CN109085701A - Beam splitting system and manufacturing method and spectrum detection instrument and manufacturing method comprising it - Google Patents
Beam splitting system and manufacturing method and spectrum detection instrument and manufacturing method comprising it Download PDFInfo
- Publication number
- CN109085701A CN109085701A CN201810836353.3A CN201810836353A CN109085701A CN 109085701 A CN109085701 A CN 109085701A CN 201810836353 A CN201810836353 A CN 201810836353A CN 109085701 A CN109085701 A CN 109085701A
- Authority
- CN
- China
- Prior art keywords
- grating
- substrate
- axis
- light
- spectroscopic system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1086—Beam splitting or combining systems operating by diffraction only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
- G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B2005/1804—Transmission gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
本公开涉及一种分光系统及制造方法以及包含其的光谱检测仪及制造方法。该分光系统包括：透明的第一基板，其具有相对设置的第一表面和第二表面；光源，设置在第一基板的第一表面上；全息光栅，设置在第一基板的与第一表面相对的第二表面上，全息光栅配置为接收来自光源的透射穿过第一基板的光并反射衍射不同波长的光返回第一基板的第一表面上分离的不同区域；数个透射光学器件，其分别设置在第一基板的第一表面上各个分离的区域上，并配置为：准直或汇聚从全息光栅反射衍射的光，并使其从第一基板出射。该分光系统能够应用于非准直宽光谱的光源，能够实现高精度分色，以较低成本满足多波长的一次性、快速、高精度的光谱检测的需求。
The disclosure relates to a spectroscopic system and a manufacturing method, as well as a spectroscopic detector including the same and a manufacturing method. The spectroscopic system includes: a transparent first substrate, which has a first surface and a second surface opposite to each other; a light source, arranged on the first surface of the first substrate; a holographic grating, arranged on the first surface of the first substrate and the first surface On the opposite second surface, the holographic grating is configured to receive light from the light source transmitted through the first substrate and reflect and diffract light of different wavelengths back to separate different regions on the first surface of the first substrate; a plurality of transmissive optics, They are respectively disposed on separate regions on the first surface of the first substrate, and are configured to: collimate or converge light reflected and diffracted from the holographic grating, and make it exit the first substrate. The spectroscopic system can be applied to non-collimated wide-spectrum light sources, can achieve high-precision color separation, and meets the needs of one-time, fast, and high-precision spectral detection of multiple wavelengths at a low cost.
Description
Technical field
This disclosure relates to a kind of beam splitting system and its manufacturing method, and further relate to the spectral detection comprising the beam splitting system
Instrument and its manufacturing method.
Background technique
Currently, spectrum detection instrument is in physics, biology such as species analysis, calibration, molecular diagnosis, food quarantine and division bacterias
It is widely used in chemical field.In some applications it is desirable to under the effect of light of single or multiple wavelength into
Row physically or chemically reacts the cell of (such as dyeing) or substance is detected or collected.Although introducing grating color separation,
But it can only generally realize basic color separation, final Color separating accuracy is lower.In order to improve transmission or reflecting light precision and
Intensity requires that incident light is the light source of high collimation at present, and light source collimation directly affects the precision of transmission or reflecting light
And intensity.And the cost and manufacture difficulty of spectrum detection instrument are increased for the dependence of the light source of height collimation.
Therefore, it is necessary to a kind of beam splitting system, which can be applied to non-collimated and wide spectrum (such as white light)
Light source, and can be realized the micro spectral detector of high-precision color separation, to meet species analysis at lower cost, calibration, to divide
Son diagnosis, food quarantine and the physics such as division bacteria, more substances of multi-wavelength in biological and chemical field it is disposable, quickly and
The needs of the spectral detection of several other precision of wavelength level.
Summary of the invention
According to the first scheme of the disclosure, a kind of beam splitting system is provided, the beam splitting system includes:
Transparent first substrate has the first surface and second surface being oppositely arranged；
Light source is arranged on the first surface of first substrate；
Holographic grating is arranged on the second surface of the first substrate, and the holographic grating is configured to receive and come from
The light for being transmitted through first substrate of the light source and the light of reflection diffraction different wave length return to the first table of the first substrate
The different zones separated on face；
Several transmission optics are separately positioned on each isolated region on the first surface of the first substrate
On, and it is configured that the light of collimation or convergence from the holographic grating reflection diffraction, and be emitted it from the first substrate.
In some embodiments, the holographic grating includes multiple grating regions, and each grating region is emitted
The light of respective wavelength to the first substrate first surface corresponding region.
In some embodiments, the holographic grating includes multiple grating regions, and the multiple grating region is arranged
In groups so as to same group grating region outgoing phase co-wavelength light to the first substrate first surface corresponding region.
In some embodiments, the transmission optics are transmission gratings, are configured to transmission diffraction from the holography
The light of optical grating reflection diffraction, and collimated and take out the first substrate.
In some embodiments, the transmission optics are miniature convex lenses.
In some embodiments, the light source includes appointing in micro-led light source and semiconductor laser chip
What is a kind of.
In some embodiments, the beam splitting system further includes convergence device, is configured to collapse the light source towards institute
State the radiation angle of first substrate.
In some embodiments, the convergence device includes reflecting mirror, and the separate of the light source is arranged in its reflecting surface
The side of the first substrate, so that the radiation angle by the light source towards the first substrate is collapsed into preset range.
In some embodiments, the range that the preset range is -30 ° to+30 °.
In some embodiments, the holographic grating is three-dimensional grating, and three-dimensional includes three x-axis, y-axis and z axis dimensions,
Wherein x-axis and y-axis are the axis in two dimensions in the plane of the holographic grating respectively, and z-axis is on the plane normal direction
Axis,
Each grating region of the holographic grating is calculated for the period of x-axis according to formula (2):
Each grating region of the holographic grating is calculated for the period of y-axis according to formula (3):
The period of each grating region of the holographic grating calculates according to formula (4):
Also, the grating arragement direction of each grating region of the holographic grating is calculated according to formula (5):
θg=arc tan (Λy/Λx) formula (5),
Wherein, Λ is the period of each grating region of the holographic grating, ΛxFor each grating of the holographic grating
Region is directed to the period of x-axis, ΛyThe period of y-axis, θ are directed to for each grating region of the holographic gratinggFor the holographic optical
The grating arragement direction of each grating region of grid, niFor the refractive index of incident medium, θiBetween the vector and z-axis of incident light
Angle,For the angle between the vector projection and x-axis on the x-y plane of incident light, m is diffraction time, and λ is incident light
Wavelength, θdFor diffraction outgoing light vector and z-axis between angle,For diffraction outgoing light vector on the x-y plane
Projection and x-axis between angle and ndFor the refractive index of emergent medium.
In some embodiments, for each transmission grating for three-dimensional grating and including multiple grating regions, three-dimensional includes x-axis, y
Three dimensions of axis and z-axis, wherein x-axis and y-axis are the axis in two dimensions in the plane of the transmission grating respectively, and z-axis is
Axis on the plane normal direction,
Each grating region of the transmission grating is calculated for the period of x-axis according to formula (6):
Each grating region of the transmission grating is calculated for the period of y-axis according to formula (7):
The period of each grating region of the transmission grating calculates according to formula (4):
Also, the grating arragement direction of each grating region of the transmission grating is calculated according to formula (5):
θg=arc tan (Λy/Λx) formula (5),
Wherein, Λ is the period of each grating region of the transmission grating, ΛxFor each grating of the transmission grating
Region is directed to the period of x-axis, ΛyThe period of y-axis, θ are directed to for each grating region of the transmission gratinggFor the transmitted light
The grating arragement direction of each grating region of grid, niFor the refractive index of incident medium, θiBetween the vector and z-axis of incident light
Angle,For angle of the vector between the projection and x-axis in x-y plane of incident light, m is diffraction time, and λ is incidence
Optical wavelength.
According to the alternative plan of the disclosure, a kind of spectrum detection instrument is provided comprising: above-mentioned any light splitting system
System；The second substrate is arranged on the side opposite with the holographic grating of the beam splitting system；Determinand channel, sets
It sets in the second substrate on the side of the beam splitting system；And detector, with several transmission optics
The corresponding mode of device, be arranged in the determinand channel on the side of the beam splitting system.
In some embodiments, the determinand channel is microchannel.
According to the third program of the disclosure, provide it is a kind of manufacture it is above-mentioned using transmission grating as transmission optics
The method of beam splitting system, which comprises
The first substrate is provided；
The spin coating photoresist on the second surface of the first substrate；
The figure of the holographic grating and its alignment mark is formed on the photoresist on the second surface of the first substrate
Case；
The holographic grating and its register guide are etched on the second surface of the first substrate using dry etching
Note, and coat protective layer protects the holographic grating and its alignment mark；
The spin coating photoresist on the first surface of the first substrate；
The figure of the transmission grating and its alignment mark is formed on the photoresist on the first surface of the first substrate
Case；
The transmission grating and its register guide are etched on the first surface of the first substrate using dry etching
Note；And
Remove the photoresist.
In some embodiments, the method includes the methods of the above any manufacture beam splitting system and as follows
Step:
Cleaning and dry obtained beam splitting system；
The second substrate formed on the side of the beam splitting system determinand channel and it is described to
That surveys object channel is arranged the detector on the side of the beam splitting system；And
By the first substrate and the second substrate contraposition fitting.
Detailed description of the invention
In the attached drawing being not drawn necessarily to scale, identical appended drawing reference can describe similar in different views
Component.Same reference numerals with letter suffix or different letter suffix can indicate the different instances of similar component.Attached drawing
Generally through citing rather than the mode of limitation shows various embodiments, and reinstates with specification and claims one
It is illustrated in the disclosed embodiments.In due course, make to be referred to identical reference in all the appended drawings same
One or similar part.Such embodiment is illustrative, and is not intended as the exhaustive or exclusive of the present apparatus or method
Embodiment.
Fig. 1 shows the structural diagrams of the beam splitting system according to the first embodiment of the present disclosure；
Fig. 2 shows the structural diagrams according to the spectrum detection instrument of the second embodiment of the present disclosure；
Fig. 3 (a) shows the angular spectrum distribution of incident light in the beam splitting system in spectrum detection instrument shown in Fig. 2；
Fig. 3 (b) shows radiation area of the light source on holographic grating in the beam splitting system in spectrum detection instrument shown in Fig. 2
The division of the surface of intensity distribution and grating region on domain illustrates；
Fig. 4 shows the grating arragement direction of the transmission grating in the beam splitting system according to the third embodiment of the present disclosure, transmission
The distribution map of the orientation of diffraction light and reflection diffracting light；
Fig. 5 shows the flow chart of the manufacturing method of the beam splitting system according to the fourth embodiment of the present disclosure；
Fig. 6 (a) shows the holographic optical in the manufacturing process of beam splitting system shown in Fig. 5 on the second surface of first substrate
The arrangement of grid and the diagram of alignment mark position；
Fig. 6 (b) shows the transmitted light in the manufacturing process of beam splitting system shown in Fig. 5 on the first surface of first substrate
The arrangement of grid and the diagram of alignment mark position；And
Fig. 7 shows the structural diagrams of the spectral investigator according to fifth embodiment of the present disclosure.
Specific embodiment
To make those skilled in the art better understand the technical solution of the disclosure, with reference to the accompanying drawing and specific embodiment party
Formula elaborates to the disclosure.Embodiment of the disclosure work is further retouched in detail in the following with reference to the drawings and specific embodiments
It states, but not as the restriction to the disclosure.
" first ", " second " used in the disclosure and similar word are not offered as any sequence, quantity or again
The property wanted, and be used only to distinguish different parts.The similar word such as " comprising " or "comprising" means the element before the word
Cover the element enumerated after the word, it is not excluded that be also covered by the possibility of other element."upper", "lower", "left", "right" etc. are only used
In indicating relative positional relationship, after the absolute position for being described object changes, then the relative positional relationship may also be correspondingly
Change.
In the disclosure, when being described to certain device between the first device and the second device, in the certain device
There may be devices between two parties between the first device or the second device, and device between two parties can also be not present.When being described to specific device
When part connects other devices, which can be directly connected to without device between two parties with the other devices, can also be with
It is not directly connected to the other devices and there is device between two parties.
All terms (including technical term or scientific term) that the disclosure uses are common with disclosure fields
The meaning that technical staff understands is identical, unless otherwise specifically defined.It is also understood that in term such as defined in the general dictionary
The meaning consistent with their meanings in the context of the relevant technologies should be interpreted as having, without application idealization or
The meaning of extremely formalization explains, unless being clearly defined herein.
Technology, method and apparatus known to person of ordinary skill in the relevant may be not discussed in detail, but suitable
In the case of, the technology, method and apparatus should be considered as part of specification.
Fig. 1 shows the structural diagrams of the beam splitting system according to the first embodiment of the present disclosure.As shown in Figure 1, the beam splitting system
Include: transparent first substrate 101, there are the first surface and second surface being oppositely arranged；Light source 102, setting is the
On the first surface of one substrate 101；Opposite with first surface of the first substrate 101 is arranged in holographic grating 103
On two surfaces, the holographic grating 103 is configured to receive the light for being transmitted through first substrate 101 from the light source and anti-
The light for penetrating diffraction different wave length (such as returns to the difference separated on the first surface of the first substrate 101 with special angle γ)
Region；Several transmission optics 104 are separately positioned on each isolated area on the first surface of the first substrate 101
On domain, and it is configured that collimation (as shown in Figure 1) or the convergence light of (as shown in Figure 7) from 103 reflection diffraction of holographic grating,
And it is emitted it from the first substrate 101.
Note that special angle γ can be the same or different for the light of different wave length.In some embodiments, energy
Enough using holographic grating 103 by the laser accunputure of specific wavelength to incidence angles degree with special angle γ reflection diffraction, institute as shown in figure 1
Show, so that the light of specific wavelength reaches corresponding each region of the separation on the upper surface of first substrate 1, recycles it
Each transmission optics 104 of upper setting collimate or convergence is taken out, so as to test substance (such as under test gas or micro-
Fluid) carry out physics or chemical reaction.Collimation takes out or convergence takes out and can be improved Color separating accuracy and and determinand
The light intensity of the light of qualitative response, it is higher that the light intensity that convergence takes out on obtained test substance certain area compares collimation taking-up.
In some embodiments, the holographic grating includes multiple grating regions, can allow the wave of grating region and outgoing
It is long to correspond so that each grating region be emitted the light of corresponding specific wavelength to the first substrate first surface phase
Answer region.
In some embodiments, grating region can also be arranged in groups, so as to the wavelength one of one group of grating region and outgoing
One is corresponding, so that the corresponding region of first surface of the light of the grating region outgoing phase co-wavelength of same group to the first substrate.
In some embodiments, above-mentioned grating region is such as, but not limited to square grid shown in Fig. 2, each rectangular grid
Lattice enter angular difference, and each square grid or several square grids are as one group, so that same group of square grid is emitted
The same area of first surface of the light of same wavelength ranges (such as with a wavelength) to the first substrate 101.Wherein, each light
The light-emitting angle of gate region can be emitted to the positioning in the region on first surface according to the positioning and intention of each grating region
Design, and the period of each grating region can by light that needs are emitted wavelength, go out, the refractive index of incident material, enter optic angle
Degree and the light-emitting angle of design codetermine.
In some embodiments, the transmission optics 104 are transmission gratings, are configured to transmission diffraction from described complete
The light of 103 reflection diffraction of grating is ceased, and is collimated and takes out the first substrate 101.In some embodiments, the transmitted light
Learning device 104 is miniature convex lens.The parameter of transmission grating or miniature convex lens is required to the wavelength according to the light to be transmitted
Special design, in contrast, the difficulty of processing of multiple miniature convex lenses is larger, and it is also larger to align difficulty.
The beam splitting system of the disclosure can be realized as higher Color separating accuracy using non-collimated light source, to significantly reduce
Manufacturing cost.The light source of beam splitting system suitable for the disclosure includes that various cheap common non-collimated and wide spectrums are (such as white
Light) light source, any one of including but not limited to micro-led light source and semiconductor laser chip.
" substrate " herein, the second substrate including the first substrate 101 that is mentioned above and hereinafter mentioned
108, can use glass substrate, the preferable resin of stability or petchem can also be selected, can also with paper etc. its
His substrate；The thickness of the substrate can determine according to actual needs.
In some embodiments, the holographic grating 103 is the optical grating construction of half-wavelength, to reflection diffraction target wavelength
Light return first substrate 101.In some embodiments, the duty ratio of the holographic grating 103 is generally 0.5, but in reality
This value can be deviateed in product design and (for example for the intensity for adjusting out light, balance the difference of display panel different location brightness
The purpose of).In some embodiments, the height of the holographic grating 103, according to requiring some wavelength or certain several wavelength
The intensity of light determines, can be several hundred nanometers, is also possible to micron order.In some embodiments, the holographic grating 103 can be with
Including dielectric grating, material can include but is not limited to SiNx、SiO2, in polymethyl methacrylate (PMMA) and resin
It is any one or more of, preferably SiNxOr SiO2.In some embodiments, the holographic grating 103 may include metal light
Grid, material can include but is not limited to any one of metal Al, Ag or the metal material of other similar characteristics or more
It plants, herein preferred metal Ag.
In some embodiments, the holographic grating 103 can also be substituted with other filtering structures, can be according to optical filtering
Special wavelength and light-emitting angle require to design the filtering structure, which can include but is not limited to built-in micro- anti-
Penetrate mirror or other micro optical structures etc..
In some embodiments, also it is the grating of half-wavelength as the transmission grating of transmission optics 104, is spread out with transmission
It penetrates for the purpose of the light for taking out each region, while can also play the role of filtering the light of other wavelength.
In some embodiments, the beam splitting system further includes convergence device 105, is configured to collapse the light source 102
Towards the radiation angle of the first substrate, so as to collapse the collimation angle that light source 102 emits light, and then Color separating accuracy is improved
And alleviate the collimation or convergence burden of transmission optics 104.In some embodiments, which can use micro-
Any one or combination of type convex lens and reflecting mirror.In some embodiments, the convergence device 105 includes reflecting mirror,
And the side far from the first substrate 101 of the light source 102 is arranged in its reflecting surface, so as to by 102 direction of light source
The radiation angle of the first substrate 101 is collapsed into preset range.The case where mutually less using reflecting mirror, by above-mentioned reflecting mirror packet
It can not only play the role of collapsing collimation angle containing convergence device 105 inside, additionally it is possible to stop the radiation from light source 102
Light is just directly emitted without color separation and contact measured substance, to avoid its interference and adverse effect to measurement accuracy；And
And the radius without color separation can be reflected back to the second surface of first substrate 101, to improve the utilization rate of light simultaneously
Enhance light intensity.In some embodiments, the range that the preset range is -30 ° to+30 °.
In some embodiments, the beam splitting system further include be arranged in first substrate 101 together with holographic grating 103 with
Reflection protecting layer 106 on the opposite side of first surface, thus protect beam splitting system from polluting and destroying on the side, and
It can be improved the utilization rate of light and enhance light intensity.In some embodiments, the beam splitting system can also include being arranged in the
The packaging plastic 107 on the periphery of one substrate 101, which is used to cooperate with reflection protecting layer 106, by entire beam splitting system
In being encapsulated in, to protected from pollution and destruction, and convenient packaging, storage and transport.
Fig. 2 shows the structural diagrams according to the spectrum detection instrument of the second embodiment of the present disclosure, as shown in Fig. 2, the spectrum is examined
Surveying instrument includes: any beam splitting system above-mentioned as shown in Figure 1；The second substrate 108 is arranged in the beam splitting system
The side opposite with the holographic grating 103 on；Determinand channel 109, the second substrate 108 is arranged in faces institute
It states on the side of beam splitting system；And detector 110, in a manner of corresponding with several transmission optics 104, setting
In the determinand channel 109 on the side of the beam splitting system.In this way, the different wavelength range that collimation takes out
Light reaches 109 surface of determinand channel, is reacted with the corresponding test substance arranged thereon, to reflect that test substance is believed
The detector 110 that the light of breath is correspondingly arranged detects, and completes to demarcate.This is particularly suitable for some test substance or test substance
Some characteristic need using specific wavelength light carry out physically or chemically reaction come the case where identifying.As an example, the light
Spectrometer can open different determinand channels 109 to the position of each self-aggregation of different wave length；It can also be to different waves
Different test substances is placed in the position of long each self-aggregation, to realize to the disposable, quick of more substances or more substance characteristics
And the detection and calibration of precision.
Particularly, determinand can be microfluid, be also possible to gas.In some embodiments, the determinand is logical
Road 109 can include but is not limited to microchannel, to detect the characteristic of the test substance under different miniflow states.It is logical in miniflow
In the case that road is used as Micro Fluid Transfer channel, according to practical application, the width and height in the channel can be Nanoscale channels,
It can also be than big or small.Specifically, microchannel can be formed by various lithographic methods (including but not limited to photoetching)
In silicon, glass, polymer (such as dimethyl silicone polymer (PDMS) or PMMA) or on other materials.In some embodiments,
The inner wall of microchannel can be surface-treated to realize required mobile performance.For example, can according to actual demand,
It is coated on the inner wall of microchannel and dredges/hydrophilic membrane (such as TeflonTMThe hydrophobic layer of AF material), make microfluid in microchannel
It inside flows or of short duration delay according to actual needs, so that miniflow be made to be not adhere in microchannel as far as possible.
In some embodiments, detector 110 is photosensitive detector, it is desirable to each transmission optics as light outlet
Device 104 corresponds, precision and photodetector between the two away from the light direction dependent on light coupling structure (array)
Signal-to-noise ratio demand, fitted closely preferably with the two.As an example, also may include buffering film layer etc. between the two.Some
In embodiment, detector can be using charge-coupled device (CCD), complementary mos device (CMOS) and probe
Any one or more of (PIN).
Below using micro-led as light source 102, to illustrate in spectrum detection instrument shown in Fig. 2
The design method of holographic grating 103 and transmission grating 107 in beam splitting system.
In some embodiments, the holographic grating 103 is embodied as three-dimensional grating, and three-dimensional includes x-axis, y-axis and z-axis three
A dimension, wherein x-axis and y-axis are the axis in two dimensions in the plane of the holographic grating 103 respectively, and z-axis is the plane
Normal direction on axis.
Collimation angle of the light that light source 102 is launched after convergence device 105 collapses is in -30 ° to+30 ° of model
In enclosing (referring to Fig. 3 (a)), and it is transferred into for example with this collimation angle with a thickness of in the first substrate of 2mm 101, using for example
Radiation areas that lighting design software LightTools is detected such as a circle is shown on the left of Fig. 3 (b), intermediate light intensity compared with
It is strong and the light intensity of surrounding is weaker.
If Fig. 3 (b) is shown, radiation areas shown in left side can be divided into multiple grating regions, each grating region
(such as shown in small cube on the right side of Fig. 3 (b)) is with the radiation angle at its centerIt identifies, radiation angle θ indicates light
Angle between the vector and z-axis of (such as incident ray or emergent ray), radiation angleIndicate light (such as incident ray or
Emergent ray) vector projection and x-axis on the x-y plane between angle.Hereinafter, Λ is the holographic grating 103
The period of each grating region, ΛxThe period of x-axis, Λ are directed to for each grating region of the holographic grating 103yIt is described complete
The each grating region 103 for ceasing grating is directed to the period of y-axis, θgFor the grating of each grating region of the holographic grating 103
Arragement direction, niFor the refractive index of incident medium, θiFor the angle between the vector and z-axis of incident light,For the vector of incident light
The angle between projection and x-axis on the x-y plane, m are diffraction time, and λ is lambda1-wavelength, θdFor the light of diffraction outgoing
Angle between vector and z-axis,For the angle between the vector projection and x-axis on the x-y plane of the light of diffraction outgoing,
And ndFor the refractive index of emergent medium.
It is embodied as the diffraction formula of the holographic grating 103 of three-dimensional grating are as follows:
Based on formula (1), it can derive that each grating region of the holographic grating 103 is directed to the meter in the period of x-axis
Calculate formula:
Based on formula (1), it is also theorized that each grating region of the holographic grating 103 is directed to the period root of y axis
It is calculated according to formula (3):
The period of the holographic grating 103 calculates according to formula (4) as a result:
Also, the grating arragement direction of each grating region of the holographic grating 103 is calculated according to formula (5):
θg=arc tan (Λy/Λx) formula (5).
In some embodiments, the first-order diffraction that a grating region only reflects a wavelength is set, other wavelength are by light
Grid are returned through perhaps absorbing or first-order diffraction light of the adjacent several grating regions as one wavelength of a group reflection diffraction
A corresponding position on the first surface of first substrate 101 is returned to, the emergent light of all wavelengths is all the of first substrate 101
It is taken out by the transmission grating collimation diffraction as transmission optics 104 on one surface.Based on such setting, m=1 is enabled.
For example, the grating region design grating to be identified in Fig. 3 (b) with small cube.Firstly, determining the grating region
Central point coordinate be (608 μm, 203 μm), calculate it is corresponding enter angularFor (18 °, 42 °).Assuming that all
Light is all with identical light-emitting angleThe light of a certain wavelength of reflection diffraction reaches the phase on the first surface of first substrate 101
The region that should be separated.If the green light that this grating region is 580nm just for wavelength, incident medium and emergent medium are using empty
Gas and glass, and light-emitting angleHolographic grating can be determined then according to above formula (2)-(5) for (60 °, 0)
The periods lambda of 103 corresponding grating region is 570nm, grating arragement direction θgIt is 72 degree.In some embodiments, light out
AngleIt can be according to the position of the central point of the grating region and the location information in determinand channel 109 come true in advance
It is fixed, and determine therefrom that each Grating Design parameter of the light of other each wavelength, including but not limited to period and grating arrangement side
To.
The above-mentioned design principle phase of the design principle of transmission grating as transmission optics 104 and holographic grating 103
With, this will not be repeated here.The difference is that entering angular for transmission gratingMade according to matched
The light-emitting angle of the corresponding grating region of holographic grating 103 determines, as long as there is known the light-emitting angle of transmission gratingPeriod and the grating arragement direction of the corresponding grating region of transmission grating can be calculated.Transmission grating goes out light
AngleThe collimation for the transmission diffraction light along-z-axis that can be realized according to it takes out effect to determine.Such as figure
Shown in 4, via transmission grating institute transmission diffraction light exit direction along-z-axis, and from the light of transmission grating institute reflection diffraction
Exit direction along-y-axis, that is to say, that θdFor 180 degree.Each grating region of the transmission grating is directed to x-axis as a result,
Period calculated according to formula (6):
Each grating region of the transmission grating is calculated for the period of y-axis according to formula (7):
The period of each grating region of the transmission grating calculates according to formula (4):
Also, the grating arragement direction of each grating region of the transmission grating is calculated according to formula (5):
θg=arc tan (Λy/Λx) formula (5),
Still come with the angle and wavelength of 1 grade of diffraction light of Fig. 3 (b) grating region reflection diffraction identified for 580nm
It calculates, then the period of the corresponding grating region of transmission grating is 441nm, and the grating arragement direction of the corresponding grating region is 180 °
(angle relative to y-axis is 180 °, as shown in Figure 4).
Fig. 5 shows the flow chart of the manufacturing method of the beam splitting system according to the fourth embodiment of the present disclosure, wherein the light splitting system
System is using transmission grating as transmission optics.As shown in figure 5, the manufacturing method of the beam splitting system includes the following steps: to mention
For the first substrate 101 (501)；The spin coating photoresist (502) on the second surface of the first substrate 101；Described
The pattern (503) of the holographic grating 103 and its alignment mark is formed on photoresist on the second surface of one substrate 101；Benefit
The holographic grating 103 and its alignment mark are etched on the second surface of the first substrate 101 with dry etching, and
Coat protective layer protects the holographic grating 103 and its alignment mark (504)；In the first surface of the first substrate 101
Upper spin coating photoresist (505)；The transmission grating 104 is formed on the photoresist on the first surface of the first substrate 101
And its pattern (506) of alignment mark；It is etched on the first surface of the first substrate 101 using dry etching described
Transmission grating 104 and its alignment mark (507)；And the removal photoresist (508).In above-mentioned process, step 502- step
Rapid 504 for fabricating holographic grating 103, and step 505-508 is for fabricating transmission grating 104.
In some embodiments, electron-beam direct writing (EBL) or nanometer pressure be can use in step 503 and step 506
The mode of (NIP) is printed to form corresponding pattern.In some embodiments, above-mentioned dry etching includes but is not limited to inductance
Coupled plasma etches (ICP) or reactive ion etching (NIP), and the holographic grating 103 that is etched by step 504 and
Shown in its alignment mark such as Fig. 6 (a), the transmission grating 104 etched by step 507 and its alignment mark such as Fig. 6 (b) institute
Show, wherein the right angle of black indicates alignment mark.
In some embodiments, the manufacturing method further include: cleaning and dry obtained beam splitting system；And by institute
State first substrate 101 and the contraposition fitting of the second substrate 108.Particularly, obtained beam splitting system can be sequentially placed into
It is cleaned in acetone, alcohol and deionized water, places into vibration in supersonic wave cleaning machine and wash several minutes, clean time-consuming root
It is determined according to the coating thickness of photoresist.After cleaning up photoresist, with being dried with nitrogen.In some embodiments, the system
Make method further include: the determinand channel 109 is formed on the side of the beam splitting system in the second substrate 108
And the detector 110 is set on the side of the beam splitting system in the determinand channel 109；And by described
One substrate 101 and the contraposition fitting of the second substrate 108, so complete the processing of entire micro spectral tester.
Fig. 7 shows the structural diagrams of the spectral investigator according to fifth embodiment of the present disclosure, with light shown in Fig. 2
The difference of spectrum tester is that transmission optics 104 use miniature convex lens 104 ' rather than transmission grating.In this way, holographic optical
The first-order diffraction of several grating regions is returned to the first surface of first substrate 101, therefore this by grid 103 with a special angle γ
The first-order diffraction of a certain wavelength of several grating regions all returns first surface with directional light reflection diffraction, then covers first surface
Miniature convex lens is arranged in all region of some wavelength, by all diffraction lights convergences of this wavelength and be just radiated to
The lower surface in object channel 109 is surveyed, and is corresponded with the detector of the second substrate 108 109.It compares shown in Fig. 2 using transmission
Embodiment of the grating as transmission optics 104, the light intensity which finally converges is relatively high, still, miniature convex lens
Difficulty of processing itself and processing cost are larger, and different wave length needs to design different miniature convex lenses, further increase processing
Difficulty and cost, and it is also bigger to align difficulty.
In addition, range includes any and all based on this public affairs although exemplary embodiment has been described herein
That opens has equivalent element, modification, omission, combination (for example, scheme that various embodiments are intersected), reorganization or the implementation changed
Example.Element in claims will be construed broadly as based on the language used in claim, however it is not limited in this explanation
Described example, example are to be interpreted as nonexcludability in book or during the implementation of the application.Therefore, this specification and
Example is intended to be to be considered only as example, and real scope and spirit are by following following claims and the full scope of its equivalent institute
Instruction.
Above description is intended to illustrative rather than restrictive.For example, above-mentioned example (or one or more side
Case) it can be in combination with one another.Such as other embodiments can be used when reading foregoing description in those of ordinary skill in the art.
In addition, various features can be grouped together to simplify the disclosure in above-mentioned specific embodiment.This should not be construed as
A kind of not claimed disclosed feature is necessary intention for any claim.On the contrary, subject of the present invention can be with
Less than whole features of specific disclosed embodiment.To which following claims is incorporated to herein as example or embodiment
In specific embodiment, wherein each claim is independently as individual embodiment, and consider that these embodiments can be with
It is combined with each other with various combinations or arrangement.The scope of the present invention should refer to appended claims and these claims are entitled
The full scope of equivalent form determines.
Above embodiments are only exemplary embodiment of the present invention, are not used in the limitation present invention, protection scope of the present invention
It is defined by the claims.Those skilled in the art can within the spirit and scope of the present invention make respectively the present invention
Kind modification or equivalent replacement, this modification or equivalent replacement also should be regarded as being within the scope of the present invention.
Claims (15)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810836353.3A CN109085701A (en) | 2018-07-26 | 2018-07-26 | Beam splitting system and manufacturing method and spectrum detection instrument and manufacturing method comprising it |
| US16/495,050 US11344882B2 (en) | 2018-07-26 | 2019-05-05 | Microfluidic apparatus, and method of detecting substance in microfluidic apparatus |
| PCT/CN2019/085526 WO2020019809A1 (en) | 2018-07-26 | 2019-05-05 | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer |
| US16/617,696 US11344884B2 (en) | 2018-07-26 | 2019-05-05 | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer |
| PCT/CN2019/085562 WO2020019812A1 (en) | 2018-07-26 | 2019-05-05 | Microfluidic apparatus, and method of detecting substance in microfluidic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810836353.3A CN109085701A (en) | 2018-07-26 | 2018-07-26 | Beam splitting system and manufacturing method and spectrum detection instrument and manufacturing method comprising it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109085701A true CN109085701A (en) | 2018-12-25 |
Family
ID=64830823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810836353.3A Pending CN109085701A (en) | 2018-07-26 | 2018-07-26 | Beam splitting system and manufacturing method and spectrum detection instrument and manufacturing method comprising it |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109085701A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020019809A1 (en) * | 2018-07-26 | 2020-01-30 | Boe Technology Group Co., Ltd. | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040263860A1 (en) * | 2003-06-30 | 2004-12-30 | Kenneth C. Johnson | Focus and alignment sensors and methods for use with scanning microlens-array printer |
| EP1510838A1 (en) * | 2003-09-01 | 2005-03-02 | Canon Kabushiki Kaisha | Polarization beam splitter, optical system and image displaying apparatus using the same |
| CN101636645A (en) * | 2008-03-04 | 2010-01-27 | 浜松光子学株式会社 | Light splitting module |
| CN102073103A (en) * | 2010-11-22 | 2011-05-25 | 北京交通大学 | Subwavelength binary diffraction grating-based wavelength separator |
| CN102822647A (en) * | 2010-04-01 | 2012-12-12 | 浜松光子学株式会社 | Spectrometer module |
| US20150132003A1 (en) * | 2013-11-13 | 2015-05-14 | Finisar Corporation | Multiplexer/demultiplexer based on diffractive optical elements |
| US9703042B2 (en) * | 2013-12-20 | 2017-07-11 | Finisar Corporation | Multiplexer/demultiplexer based on diffraction and reflection |
| CN107607475A (en) * | 2017-09-06 | 2018-01-19 | 京东方科技集团股份有限公司 | Micro-total analysis system and method |
| CN108255028A (en) * | 2018-02-07 | 2018-07-06 | 绵阳京东方光电科技有限公司 | Patterning processes and patterning apparatus, the preparation method of array substrate |
-
2018
- 2018-07-26 CN CN201810836353.3A patent/CN109085701A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040263860A1 (en) * | 2003-06-30 | 2004-12-30 | Kenneth C. Johnson | Focus and alignment sensors and methods for use with scanning microlens-array printer |
| EP1510838A1 (en) * | 2003-09-01 | 2005-03-02 | Canon Kabushiki Kaisha | Polarization beam splitter, optical system and image displaying apparatus using the same |
| CN101636645A (en) * | 2008-03-04 | 2010-01-27 | 浜松光子学株式会社 | Light splitting module |
| CN102822647A (en) * | 2010-04-01 | 2012-12-12 | 浜松光子学株式会社 | Spectrometer module |
| CN102073103A (en) * | 2010-11-22 | 2011-05-25 | 北京交通大学 | Subwavelength binary diffraction grating-based wavelength separator |
| US20150132003A1 (en) * | 2013-11-13 | 2015-05-14 | Finisar Corporation | Multiplexer/demultiplexer based on diffractive optical elements |
| US9703042B2 (en) * | 2013-12-20 | 2017-07-11 | Finisar Corporation | Multiplexer/demultiplexer based on diffraction and reflection |
| CN107607475A (en) * | 2017-09-06 | 2018-01-19 | 京东方科技集团股份有限公司 | Micro-total analysis system and method |
| CN108255028A (en) * | 2018-02-07 | 2018-07-06 | 绵阳京东方光电科技有限公司 | Patterning processes and patterning apparatus, the preparation method of array substrate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020019809A1 (en) * | 2018-07-26 | 2020-01-30 | Boe Technology Group Co., Ltd. | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer |
| WO2020019812A1 (en) * | 2018-07-26 | 2020-01-30 | Boe Technology Group Co., Ltd. | Microfluidic apparatus, and method of detecting substance in microfluidic apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108956469B (en) | Spectrometer system and spectral analysis method | |
| CN105899983B (en) | Guided Mode Resonance Equipment | |
| US6795192B2 (en) | SPR sensor and SPR sensor array | |
| CN101091100B (en) | Miniature fourier transform spectrophotometer | |
| JP5519297B2 (en) | Droplet actuator apparatus, configuration and method for improved absorbance detection | |
| US7738110B2 (en) | Displacement sensor based on photonic crystal waveguides | |
| CN208520750U (en) | A spectral detection device | |
| US20160025994A1 (en) | Self-aligned spatial filter | |
| TW201802433A (en) | Integrated color confocal sensor | |
| CN109239940B (en) | A spectroscopic device and its manufacturing method, light dispersion method and spectrometer | |
| KR20220118301A (en) | Autofocus function in optical sample analysis | |
| EP3511757B1 (en) | Reflective objective lens, and observation method | |
| TW202113464A (en) | On chip sensor for wafer overlay measurement | |
| CN111830486A (en) | An all-solid-state lidar on-chip integrated chip and design method thereof | |
| US11344884B2 (en) | Microfluidic apparatus, method of detecting substance in microfluidic apparatus, and spectrometer | |
| EP1500434A1 (en) | Micro-spectroscopic measuring device and micro-chemical system | |
| CN108917927B (en) | Dispersive devices and spectrometers | |
| CN108918433B (en) | A microfluidic detection device | |
| Hsieh et al. | Realization and characterization of SU-8 micro cylindrical lenses for in-plane micro optical systems | |
| CN109085701A (en) | Beam splitting system and manufacturing method and spectrum detection instrument and manufacturing method comprising it | |
| Fonollosa et al. | Design and fabrication of silicon-based mid infrared multi-lenses for gas sensing applications | |
| CN110186563A (en) | Light splitting light guide module and integrated spectrometer and production method based on cylindrical grating | |
| Wang et al. | Laser interference photocuring curved surface grating lenses inspired by red spider’s eyes | |
| Chattopadhyay et al. | Fiber positioning in microlens-fiber coupled integral field unit | |
| CN110780382B (en) | Optical structure and manufacturing method thereof, light source system, and detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |