TWI325872B - Roll-to-roll embossing tools and processes - Google Patents

Description

BRIEF DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a polymer thin shim and a roll-to-roll method for producing the polymer shim. [Prior Art] - Description of Related Art In the past, image embossing tools have been disclosed. U.S. Patent No. 4,923,572 (hereinafter referred to as 572 #利) discloses a substantially cylindrical image embossing tool that can be used to emboss a material onto a web. The method of making the image embossing tool comprises a plurality of steps comprising: (1) placing an embossable material around the surface of the solid cylinder, and (2) using a stamper to give a hopeful The image or pattern is 'embossed on the layer of embossable' (3) electroformed to form a layer of nickel electroformed layer on the outer surface of the layer of embossable, (4) layer-strength layer Applying to the electroformed layer, (5) removing the solid cylinder, and (6) removing the embossable layer to form an electroless mandrel (7) by using a metal Electrodeposition is performed on the interior of the plating mandrel to form a second electroformed layer and to remove the second electroformed layer. According to this, the 572 patent, a multi-repetition second electroformed layer can be prepared in the same manner, and then can be placed on a carrier cylinder or a plurality of rollers to form an embossing tool. Perform continuous embossing. However, this embossing tool and its manufacturing method suffer from a number of disadvantages. For example, the method requires a cylindrical or strip-shaped embossing tool, and the stamping surface of the stamper must have - " 5 1325872 2 corresponds to the embossable material on the solid cylinder Bending 2: It is very difficult to achieve. Second, the first and second electric prayers are metal materials, such as Ni. It may be difficult to separate the electroformed layer in the cylindrical form. In particular, when copying the complex structure of the south aspect ratio, in addition, if the cutting step is involved in the preparation of the metal sheet, the slice should be reincorporated into a seamless embossed cylinder or a drum. It is difficult to: Further, if the 3D contour to be formed by this method, such as a depth greater than 1 Gm and a tilt angle less than 10, is to maintain a uniform sentence and is finely difficult. U.S. Patent No. 5,327,825 (hereinafter referred to as the '825 patent) discloses a method of forming a mold by embossing or micro-embossing. More specifically, the 3 s method is used. One kind The embossed surface of the face shape embosses a pattern or design onto a layer of silver coated on a cylindrical surface carrying a pattern or design that is pre-provided over the silver layer. And having a half of the micro-flowering step in accordance with the radius of the cylindrical surface is performed a plurality of times such that the mold prepared from the method has a repeating pattern or an astigmatism from the embossed surface of the concave shape. This method has the disadvantages similar to this, the patent's 'dip (for example, the degree of difficulty with the embossed surface and the radius of the cylindrical surface), maintaining a precise and uniform surface profile, and forming for complex structures Seamless gap tools' have their difficulty, especially those with deep 3D contours. 1325872 US Patent No. 5, 156, 863 (hereinafter referred to as 863 patent), reveals that A method of making a continuous embossed belt (belt) comprising combining a series of "subjects" or "replicas" into a group to provide a hopeful pattern in a fixture And forming an electrical Prayer shaped bars (electroform strip) from this group. The embossed tape is formed after the multiple electroforming step from the main group fixing device. One of the disadvantages of this method is that it is difficult to produce a body or replica for the population of uniform height (or thickness). In addition, in this method, a grinding step is required to eliminate surface madness. In this method, it is also difficult to avoid damage to the mandrel and the shim during the separation of the electroformed nickel shim from its mandrel, especially when it is involved A complex structure with a deep 3D contour. Further, in all of the methods discussed above, only one embossing tool can be produced at the same time. SUMMARY OF THE INVENTION A first aspect of the present invention is directed to a composition for preparing a polymer shims. A second aspect of the invention relates to a detachable composition for preparing a polymeric thin sheet. A third aspect of the invention relates to a roller belt method for producing a polymer sheet. A fourth aspect of the invention relates to the use of a polymer shims for making metal embossed 7 1325872 models or shim. The fifth aspect of the invention relates to a bonding method for producing a polymer shims having a wide format, which has a uniform surface profile and a low defect rate. The invention has many advantages which will be discussed in the "Detailed Description of the Invention" below. DETAILED DESCRIPTION OF THE INVENTION For the sake of clarity, the terms used in this case are all illustrated in FIG. 1_Master mold preparation The term "master mold" in the context of the present text means a model (1 in Figure 1) which can be used to prepare the polymer shim of the present invention (Figure 1 2 in 1). If the master mold is a male mold version, the polymer shim of the present invention will be the corresponding female mold version. The master mold is usually prepared by a light stone printing side & or a diamond turning side. Typical materials used in electroforming include, but are not limited to, H and other alloys. After electroforming, the photoresist or diamond cutting body is removed to form the master mold. The main mode can be formed by the town, Yishan Λτ# # ^ ^ by electroforming of the lacquer-based nickel electroformed or by electroless gold deposits, such as "continuous manufacturing of warfare-coated slab optical media {Manufacturing nf τα, · ^ t Thin Cover Sheet Optical Media) j SPIE Proc. , Vol. ] β R ^ Λ 63b63, page 324 (1992). Other methods for preparing master molds, including micro-engineering techniques, 8 1325872 Such as electron beam lithography (e-beam writing), dry etching, chemical axis engraving, laser writing, or laser interference, like "Q-ray technique for micro-optics Q Replication Techniques for MicrooptiCSA Δ , SPIE Proc., Vol. 3099, page 76 (1997). In addition, the master mold can also be formed by photomachining using plastic, ceramic, or metal. II. Polymer shim Preparation (i) Composition for Polymer Shim The polymer shim of the present invention is formed from an embossable composition. In a so-called "hard-embossing" system, the compressible flower The composition can be a thermoplastic polymer. The thermoplastic polymer can be plasticized by a suitable plasticizer or solvent, such as butyl acetate, cyclohexanone, butanol, diester or diether of ethylene glycol, and pyromellitic acid. Base vinegar or trialkyl phosphate. Useful embossable thermoplastic polymers' may include, but are not limited to, cellulose acetate butyrate (CAB), cellulose acetate propionate (CAP), cellulose acetate, cellophane (produced cellulose), polymethyl Ethyl acrylate (pMMA), polyethyl methacrylate (ΡΕΜΑ), polycarbonate (PC), polyethylene (PVC), polystyrene (PS), polyester 'polyamide, polyamino citric acid Esters, polyolefins, polyvinyl butyral, and copolymers thereof. In addition, a "soft one embossing" system can also be used. In this example, the embossable composition can be an achievable curable (particularly uv curable) composition comprising a polyfunctional monomer, or 9 1325872. Useful polyfunctional monomers or oligomers, which may include, but are not limited to, polyfunctional acrylates, polyfunctional thiol acrylates, polyfunctional vinyls, polyfunctional vinyl ethers, polyfunctional allylic groups, polyfunctional Epoxides, as well as other monomers comprising crosslinkable polyfunctional groups, are also oligomers. In the preferred case, an acrylated monomer or a merging polymer such as an acrylated polyurethane, a polyester, a decane, an acrylic φ resin, a novolac resin, and the like are used. The epoxide having an average molecular weight of from about 30 Torr to about 5 Å, preferably from about 5 〇 0 to about 10 Å. In order to improve film integrity and control the ballistic properties of the coating, the light-curable composition may further comprise a polymeric binder or a thickening agent. Useful adhesives or thickeners can include, but are not limited to, those thermoplastic polymers used in the "hard embossing" systems mentioned above. Φ The composition may also include a photoinitiator, a photosensitizer, or a co-initiator. Suitable photoinitiators, photosensitizers, or co-initiators may include, but are not limited to, Norrish Type 1, Type 2, and Type 3 photoinitiators from Ciba Specialty Chemicals, such as ITX (different) Propyl 13⁄4 ton _), Irgacure 651 (2,2-dioxaoxy-1,2-diphenylethane), 907 (2-methyl-1-[4-(methylthio)phenyl) ]—2-morpholino- 1-propanone), 3 69 (2-benzyl-3-carboyl)-1-yl[4-(4-morpholinyl)phenyl]-1 _), and 1 8 4 (1 - via the base ring 10 1325872 basic basis). The radiation curable composition is particularly useful when it involves a model having a complex structure with a deep 3D profile or a shim. A release agent or a reactive detachment monomer or oligomer such as a wax, a decyl alkane oil, a perfluorinated liquid or a powder, an acrylonitrile-based oxime, or the like, may be added to the radiation curable composition. a fluorinated acrylate, or a fluorinated epoxide, to facilitate detachment of the polymer shim from the master mold and to extend the main wedge

Life expectancy. One embodiment of a radiation curable composition useful for the travel of the polymer shim of the present invention will now be shown. A radiation curable composition for forming a polymer shim into a wounded beta ® preferred range of adhesives or thickeners 丄u - yu% 5-60% release agent or reactive detachment monomer / wide fee A 0-10% _ 〇 · 1 - 5 % photoinitiator, photosensitizer, or co-starting 刽 20-75% 25-45% 1-8% 1-3% ^ / ft. "0 WI 1 Diluted or dissolved, good coatability has been achieved. Suitable solvents may include, but are not limited to, ketones such as methyl ethyl hydrazine (MEK), propylene glycol (MPK), methyl ketone ketone (MBK), cyclohexanone, or two ketones such as acetic acid. Ethyl ester, propyl acetate, or butyl acetate; alcohols such as ethanol, propanol, or butanol; ethers, such as tetrahydrofuran, or dilkoxyethane; guanamines , such as dimethyl acetamide; alkyl benzenes, such as methyl or xylene, and the like. ^ The formation of the polymer shims of the present invention (3 in Figure 1), 4 first Generation model or shim, general construction. ' can be used for first generation models or thin. It is usually formed of a metallic material. Often used to prepare the desired microjunction. In order to promote the polymer to be separated from the first generation metal model, it can be as above. Such a radiation curable composition which can be deducted from the formula, includes a *, or a thickener, a useful adhesive or a thickener. Although the solution is a soluble or dispersible agent, it may be an embodiment having a carboxyl functionality = a suitable adhesive or a thickener, which may be used to coat the aged glycerin, methacrylic acid, A copolymer of itaconic acid and a benzoic acid. The adhesion typically takes up from about 5 to about 6 weight percent of the detachable composition. When a detachable composition is used, in most cases, the first generation metal model prepared in the polymer shim can be slid into any polymer residue or slag. In the case of metal, the first A metal model can be more liquid, the ball 9 can be cleaned or detached using an assay solution, and the alkaline solution is about 1 η gas oxidation. The concentration of the tetramethrin solution is from about 0 · 1 Ν to Ν ' preferably from about 〇 5 Ν to about 5 Ν. Life expectancy: also. The radiation curable composition for the polymer shim is added. Add an inhibitor or an antioxidant. A suitable inhibitor 12 1325872 or an antioxidant may include Γ/ _ (ingredients are not limited to): Β Η T (butylated hydroxy benzene), ΜΕΗη, 匕ψ ^ Q (hydroquinone monomethyl ether), And four [methylene ~ 3 (3,, 5 '~ ~ bismuth dibutyl, ψ ^ butyl -4- 4 hydroxyphenyl) propionate]. The inhibitor or antioxidant ς ^ θ is cut in an amount of from about 1% by weight to about 5% by weight, 轫祛%. Preferably, from about 0.1% to about 1 weight, air can be drawn into the radiation curable composition to prevent polymerization of the multifunctional monomer or oligomer during storage. (ii) Method for producing a polymer shim Figure 2 is a private diagram of the machine A, illustrating the method of forming the polymer of the present invention. The embossed composition (2 〇) described above is coated on a The base is reversed (2 1) and dried to achieve a hysteresis characteristic suitable for embossing. Substrates useful in the present invention may include, but are not limited to, diphenyl terephthalate (PET), polybutylene terephthalate (p:butyl), polyethyl naphthalate (PEN), Cellulose triacetate, polycarbonate, polyimine, poly maple, polyamine, and polyolefin. The embossable composition (2 〇) is typically embossed by a master mold (2 2 ). Referring to the above section ί 'in the form of a roller, a sheet, or a belt, above the embossable composition The heat distortion temperature (Hdt) of the object or the temperature of the glass transition temperature (Tg) is carried out. The HDT or Tg for a typical flower composition may range from about -7 to about 1 5 (TC, preferably from about 2 to about 〇. (: to about 丄〇. 13 1325872 The embossing temperature and pressure are controlled using a heated main mold or a heated outer casing (loaded by a model). The height of the surface of the main mold of the present invention may be between approximately 〇 Between 1 and about 100 microns is preferably between about 〇1 and about 50 microns. The aspect ratio (height, width ratio) of the embossed structure can range from about to about 20, Preferably, it is between about 0. 1 and about 1 〇. φ _ may have a selective primer layer, or a surface treatment layer (not shown) interposed between the substrate and the embossable composition layer. To enhance the adhesion or coating quality. The composition of the primer layer or the surface treatment layer may include, but is not limited to: polyurethane, epoxy, pre-cured epoxy acrylic acid 6 , polyamine acetoacetate, polyester acrylate vinegar, and the like Additionally, it may include surface pretreatment of the substrate layer using, for example, corona, plasma, or fire. The embossable composition is irradiated, heat, or solvent based. After φ is hardened, a layer of polymer thin ruthenium (23) is formed. The poly& shims are the corresponding embossed versions of the main dies. It can be produced by means of a thin plate followed by a thin sheet. Or it can preferably be produced in the form of a roller, which can be any length. The width of the thin plate or the roller is usually in the range of about 1 to about 90 忖. In addition, it is also possible to continuously produce a multi-thin (for example, one hundred or one thousand) polymer shim on a web. III. Cutting and bonding of the polymer shim if in the polymer There is a defect on the shim. If there is a U25872 trapped part of the play, it can be easily cut. _ 吟 具备 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有 有Between the plastic plates: Zha = b0 to 'Ran' and then profit —The boring hole is:= First use, for example, liquid nitrogen for the cold cutting machine to cut. $ 疋 其他 any other precise cutting:: multiple pieces of polymer thin 接合 接合 接合And the difference in height (or degree = can be controlled below 1 micron) of the different polymer shim prepared by this method = for example, by the method of As a large roller polymer gasket: choose: two pieces of polymer thin bracts' and cut to eliminate any missing = ',,: then join the two pieces together, preferably The pattern is facing down. An adhesive is applied to the slit line and sucked into the gap by a capillary. Suitable adhesives may include (but are not limited to) alum-curable adhesives, rings Oxide, decane, cyanopropene vinegar, polyamino acid vinegar, propylene glycol adhesive, and the like. The viscosity of the adhesive preferably ranges from about 5 〇 cps to about 00 00 cps, more preferably from about 〇〇 〇〇 to about 1 〇〇〇 0 cps. The application of the adhesive can be carried out by means of a syringe, a wire rod, or blended into a knife' and optionally using an automatic dispensing number (autodlspe bribe). The two sheets of polymer sheets to be joined together can be placed on a very flat surface, and the b LCD glass sheets are mechanically supported together, or by vacuum, 15 1325872 Static attraction, or a thin layer of temporary adhesive (which can then be removed by, for example, heat, solvent, or UV) to adhere it to a flat substrate. By removing any defective areas of the block and then joining the remaining parts as described above, the advantage of this method is that the gasket can be prepared from a defective main mold. Producing a large number of relatively perfect thin IV. Preparation of the first generation model or shim The first generation model or shim (3 of Fig. 1 ^) has the same structure as the main mold, and it can be I compound thin gasket to prepare 0 A · flat first generation model or shim. If necessary, once the polymer shim is produced, you can refer to the procedure described above. Pinch it into any shape and size and join it together. The formation of the first generation model or shim of the Guardian Kennedy consists of several steps, including surface treatment (24), guide shovel... #电籽层涂(2 5 ), and electroforming (26), as shown in Figure 2. In the case of the surface treatment (2 4 ), you can use the corona, 叆 游 游, or UV radiation to increase the 溥 溥 gasket and the immediate thyro seed. The layer coats the adhesion between the two. The conductive seed layer is coated with a coating layer of silver, nickel, or nickel or a chrome alloy, which is exemplified by δ) sputtering, physical or vapor deposition, evaporation, or It is the electroless 16 1325872 plating carried out by the reduction reaction. Use silver or nickel seed coating, while silver seed coating is better. 0 Apply silver on the surface of the polymer shim (as shown in Figure 2). Or a shim (usually formed of nickel) can be prepared from the polymer shim ' by electroforming. The silver seed coating (25) provides a conductive function for the subsequent electroforming step. Instead of the sputtering method or the evaporation method, it can be used for silver coating. The silver coating preferably has a thickness of from about 〇 〇丄 to about 丄 micron, more preferably from about 〇.〇5 to about 〇·5 μm. A passivation treatment may be selectively performed on the surface of the silver coating to reduce the adhesion between the silver coating and the subsequent nickel layer. Finally, a layer of nickel (26) is deposited on the silver coated polymer shim, and then the polymer shim is separated from the first generation of the niobium model or the shim (27). . By the roll-on method of the present invention, it is possible to produce a plurality of sheets of polymer shim (23) at a high speed, thus enabling a first generation model or thin pad having the same structure as the main mold (22). The sheet can be mass produced. Alternatively, the first generation model or shim produced (3 in the figure) can be used in the mass production of second generation polymer sheets. It can also be prepared by a first generation model or a thin sheet of the type B. roller type by inspection or roller type except for the flat first generation punch or thin sheet (for example) as illustrated in FIG. A first-generation model or a thin sheet (34) of the type 17 1325872 in which the two edges of the flat coated silver polymer thin sheet (3 inch) of the present invention are joined together to form a silver-plated pattern Inwardly, the bonding method employed is as described above. An adhesive is selectively applied to the slit line to insert the bonded cylindrical polymer web (31) and fit snugly within a cylindrical outer casing (32). An anode rod or a cylindrical blue (33) was inserted into the center, and electroforming was carried out on the cathode polymer sheet (31). The composite of the cylindrical first generation model or the thin tantalum sheet and the silver coated polymer sheet (30) is then removed from the outer shell (32). The silver coated polymer shim (3〇) is then physically separated, for example by cutting the polymer shim, and then by stripping or by learning the polymer The thin sheet (30) is removed from the first generation model or shim (34). In addition, after the polymer shim is assembled into the cylindrical casing (1)) (as described above), It is also possible to complete (iv) a coating (35) on the polymer web (3 Å) by, for example, sputtering. The first generation model or the batt sheet produced by this method does not have a visible slit or S weld line. It is also possible to use an adjustable cylindrical outer casing bracket 1 having a notch perpendicular to the circular surface to be supported together, to be fastened... the polymer thin crucible is precisely cut into two seed layers and broadcasted to The inward-facing species: ^^—adjustable cylindrical housing bracket. By tightening the screws, the two ends of the compound gasket are joined together. The 18 1325872 bonded polymer shim can be used directly in the subsequent electroforming process without the need for an edge adhesive. Using such an adjustable cylindrical support, the electroformed part can be retrieved from the round body by loosening the screw. After the electroforming, and after removing the first generation of the mold or the thin web from the cylindrical outer casing, it may be necessary to polish the slit line. The present invention can be applied to the preparation of any of the embossing methods used in the embossing tool' includes the common US-original number 09/518/488 filed on March 3, 2000 (corresponding to wool/ The microembossing method of '67170) and the contents thereof will be complete and incorporated herein by reference. More specifically, the first generation model or sheet can be used to prepare the microcups referred to herein. V. Polishing of the surface of the model Although the first generation of the model or shim prepared by the present invention generally has a smooth surface and a uniform depth of the groove, it can • by post-facing the surface of the model - Polished to further improve. In the discussion that follows, the model or 'thin slab, which is directly prepared from the polymer shims, is called the "first generation model or shim" to distinguish the model of the future generation. sheet. Figure 6 is a cross section showing the first generation model produced by the present invention, showing the protruding elements (6 〇 ) and the grooves (6 work). In the manufacture of the microcups described in the commonly-owned USSN 09/518,488, the protruding elements correspond to the microcups, and the grooves correspond to the dividing edges interposed between the microcups. wall. 1325872 The surface of the model after polishing can be performed in multiple steps • and begins with a very flat first generation model. The height of the protruding element in the first generation model, or the depth of the groove, can be measured using, for example, a surface profile. The first generation model is then mounted on a precisely flat • surface sheet. This step is important because the back (6 2) is used as a reference point for height. The first generation model with the surface sheet is then mounted on a linear step connected to a polishing system, such as the φ Buehler Automet 2 polishing system. The system uses a power head that has an attachment for a variety of different grades of polishing cloth, rotating at various speeds to suit a variety of different degrees of polishing. The first generation model will move under the polishing head and the polishing head will become in contact with the model surface (63). In one specific aspect, a 6 micron Metadi Supreme Polycrystalline Diamond Suspension and a Buehler Texmet 1000 polishing cloth were used. In the preferred case, it is used in the form of φ mobile carriers at a desired pressure for continuous polishing of the surface. In order to avoid undesired contamination of the gravel or powder from the polishing step, a removable mask coating or a filling material may be applied to the structure, in particular the groove, such as wax, A siloxane, or a solvent that is soluble in other solvents or water-soluble. 5微米来。 The polishing step is repeated until the surface is smooth or the height of the protruding element is uniform; the average height difference is less than about 1 micron, more preferably less than about 0.5 micro. Then, the abrasive particles, gravel, debris, and mask coating (if - present) left by polishing 20 1325872 are then mechanically cleaned, then solvent washed, ultrasonic bathed, or rinsed. Remove. Production after the model or shim is usually required. The second generation model or shim (corresponding to 4 in Figure 1 and also shown in Figure 7) has the same structure as the polymer shim and is comparable to the first generation model similar. The purpose of having a second-generation model is not only to sharpen the end point (70) of the sharp angle in φ, but also to further ensure the consistency of the height (71) of the dividing side wall. This polishing step is similar to those used for the polishing of the first generation model. For the first step, the height of the dividing side wall is measured and then the reference point is determined. A second generation model having a surface sheet is then mounted on a linear step connected to a polishing system and moved under the polishing head, and the polishing head becomes in contact with the top surface to sharpen the angle The end point (70) (if present), and the extra height (72) are worn away to ensure the consistency of the height of the dividing side wall. The conditions under which the second generation model is polished (i.e., set and period) are similar to those used for the polishing of the first generation model. After the second generation model is polished and cleaned, the model can be further produced (if necessary) to ensure the high quality of the final model. [Embodiment] The following embodiments are intended to provide a better understanding of and to practice the invention. These examples are not to be considered as limiting the scope of the invention, but only as a description and representative of the invention. Example 1 A. Primer layer In a beaker containing 5 grams of aliphatic polyurethane (P9815, Huntsman, New Jersey), 647 3 grams of MEK, and 300 grams of cyclohexanone (CH) were added. 〇), 3〇 gram of CN983 (uv oligo from Sartomer 'Pennsylvania), i 5 gram of EB129 〇 (UV valency polymer from UCB Chemicals, Georgia), 1. 72 gram IrgaCure 369 (2-Benzyl-2(dimethylamino)-i-[4 _(4-morpholinyl)phenyl]-butanone, Ciba Specialty Chemicals, Pennsylvania), 35 gram of ιτχ (SarCure SR1124) , 2-isopropyl thioxanthone (is〇pr〇pyl αίοχΜΗοΜ), from Sartomer, Pennsylvania), and 〇43 grams

Irganox 1 035 (thiodiethylene-bis(3,5 di(tert-)-butyl-4-hydroxyphenylpropionic acid octadecyl alcohol), (: iba specialty Chemicals, Pennsylvania), and homogeneously mixed. The resulting primer solution was coated onto a pET substrate using a #3 Meyer drawbar having a target dry thickness of about 0.4 microns. The dried film was exposed to 1 · 5 J/ Under the uv light in the air of Cm2 (Fusi〇n UV 'D lamp) B. Polymer shim 22 1325872 Table 1: Composition of polymer shim Example 1 (parts) PBMA-IBMA 30 · 00 EB810 15-75 HDDA 47-25 EM360 7-00 Irgacure 369 1 · 2 5 Irgacure 1035 0 · 5 0 The composition of Example 1 B (Table 1) was diluted with MEK and applied to it. The primer layer coated PET (10 mil) to have a target dry thickness of 25 microns. The coating was dried and then subjected to a master mold at 160 °F and 50 psi. Embossing for forming a microcup (110 micron height and 2 5. 5 micron depth), using UV to pass through the back of the PET substrate Exposure line (0. 068 J / cm2, F u s i ο n U V, D lamp), and finally post curing UV (2 J / cm2) from the side of the embossable composition of.

Table 2: Chemicals and suppliers full name supplier PBMA-IBMA Poly(butyl methacrylate mono-isobutyl methacrylate) Aldrich EB810 Ebecryl 81 0 (polyester acrylate oligomer) UCB chemical HDDA HD0DA (1,6-hexanediol diacrylate) UCB chemical Ebl360 Ebecryl 1360 (acrylic acid ester of urethane) UCB chemical Irgacure 369 Irgacure 369 Ciba Specialty Chemial Irgacure 1035 Irgacure 1035 Ciba Specialty Chemial MEK Ethyl Ketone EM Science 23 1325872 A Wyko NT1000 surface profiler was used to measure the depth of the polymer shim and the width of the street as a function of the position across the web. Figure 4 shows the prepared polymer shim with a very consistent microcup depth and street width. • A thin layer of silver (approximately 2 〇〇 nm) was deposited on the polymer shim by electroporation (Perkin Elmer Model 2400) to make it electrically conductive. Prior to the sputtering step, the polymer shim is first processed into a corona treatment. Then, 'the passivation of the silver layer at 50 ° C with a solution of 5 % potassium dichromate (A1 dr i ch, Tiberia) is about 3 deductions' to improve the electroformed Ni thin shim after the electroforming Separation from the polymer shim. Example 2: The first generation model was prepared by electro-pray shaping at 4 5 C' in a nickel sulfamate (from MacDermid, Likou Prefecture 1, 々, 々 + ', which was passivated The silver coated polymer shim is shaped to a thickness of about 5% of the nickel ion and about 3 Q gm/L of acid and has a current density of 15 amp steps. And the pH is equal to 4. Then, the electro-tungsten is introduced into the first generation model, and the polymer layer is peeled off or removed, and separated from the t-compound. Example 3 The polymer shim joints are placed on two sheets of polymer thinner & the spacers are placed next to each other on a glass plate with the side of the illustration facing down. An electrostatic force was applied to the two sheets of polymer crucible by an electrostatic generator of 1 〇 24 1325872 kv. The adhesive (ΝΟΑ 68, from NQrUnd pr... (8)·, Group Jersey) was applied to the The slit line is then cured by uv. The bonded polymer shim @ 3D surface profile The system is shown in Figure 5. The difference in height between the two sides of the slit line is less than 1 micrometer (Figure 4).

Removable polymer shims Table 3: Composition of alkaline detachable polymer shims AC 3 1 5 40 · 〇〇EB8 10 13-25 HDDA 39 · 75 Eb 1 360 7 · 00 Irgacure 369 1 · 25 Irganox 1035 0 · 50 Table 4: Chemicals and Suppliers

(Acrylate Copolymer) State) AC3 1 5 The procedure of Example 1 was carried out except that a box of a composition including the alkaline soluble adhesive Avalure AC315 was used, as shown in Table 3. The composition was coated, dried, and then subjected to a master mold at 2500 °F and 80 psi.

25 1325872 . Row embossing 'for forming a microcup (1 1 〇 micron height and 2 2 micron - depth), using UV to penetrate the back of the PET substrate for exposure (〇, 0 6 8 J/cm2' FusionUV, D lamp), and finally UV post-cure from the side of the embossable composition (2 J/cm) ^ From the profile measurement. It is obvious that the microstructure of the main mode is accurately converted. The polymer-thin film was used. A first-generation model, also using the polymer thin pad φ sheet of this example, was fabricated in the same manner as in Example 1. Using fine-tuning MF CD-2 6 ( The polymer layer was peeled off or removed from Rohra Hass (which is a 〇26N tetramethylammonium hydroxide solution), and the electroformed first generation model was easily removed from the polymer shims. The present invention has been described with reference to the specific embodiments thereof, and it is understood by those skilled in the art that various changes can be made without departing from the spirit and scope of the invention. Substitute substitution. In addition: many improvements can be made, and a specific situation will be The materials, compositions, methods, methods, steps, or steps are applicable to the purpose, spirit, and scope of the present invention. All such modifications are intended to fall within the scope of the appended claims. The terminology of the present invention is illustrated in Figure 2. Figure 2 is a schematic flow diagram of a method for forming a polymer shim. Round 3 is a schematic illustration of a method for preparing a thin tantalum without a weld. The width of the joint shim of the present invention is either

Figure 5 is a SEM 26 1325872 photograph of a sealing line for a bonded polymer shim of the present invention. Figure 6 is a cross-sectional view showing the first generation model showing the protruding elements and the grooves. Figure 7 illustrates the second generation model. [Description of main component symbols] 1 ·Main mold 2 ·Polymer gasket 3 ·First generation model or shim 4 ·Second generation model or shim 2 0 ·Compressible composition 2 1 ·Substrate 2 2 *Main mold 2 3 ·Polymer shim 2 4 .Surface treatment 2 5 ·Electrical seed layer coating 2 6 *Electroforming 2 7 ·Mask 3 1 ·Polymer gasket 3 2 ·Shell 3 3 · Anode rod or cylindrical basket 3 4 · First generation model or shim 3 5 · Silver coating 6 0 · Protruding element 6 1 · Groove 27 1325872

6 2 ·Back 6 3 ·Model surface 7 0 ·End point 71·Separate height of the side wall 7 2 ·Extra height 28

Claims (1)

Hf 正姒j. ju]: X. Patent application scope: ι^ί:_j 1^§^ι ———. , ju method for preparing the first generation model, including: person a) 攸 contains selection The composition of the thermoplastic polymer plasticized by a plasticizer or solvent forms a polymer shim; b) coating a layer of conductive seed; and c) electroforming to form the first generation model. 2. A method for preparing a first generation model comprising: a) forming a polymer shim from a composition comprising a polyfunctional monomer or oligomer; b) coating a layer of a conductive seed; and c) The scale is shaped to form the first generation model. 3. According to the method of claim 1 or 2 of the patent application, the + between 〇 and b) further comprises: removing any defects from the polymer shim 'and leaving the remaining polymer shim Engage. 4. The method of claim 2, wherein between b) and b) further comprising: surface treating the polymeric shim. 5. The method of claim 2, wherein the method further comprises: polishing the first generation model. 6. Corona or electropolymerization or uv radiation according to item 4 of the scope of the patent application. The surface treatment is according to the method of claim 1, wherein the conductive seed layer is a thin layer of silver, nickel or nickel-chromium alloy. 8 · According to the scope of the patent application, a thin layer of silver. The method of item 7, wherein the conductive seed layer 29 f1325872 is subjected to electroless plating for coating 1 〇. According to the scope of the patent application, the forming system is performed with a layer of nickel. 11. Passivation treatment of the surface of the silver coating according to the patent application. 12. The model of the first generation is flat according to the scope of the patent application. The method of 1 or 2, wherein the method of electroforming 8 or more includes the method of the 1 or 2, wherein the first 13. according to the method of the patent application scope, the first The generation model is cylindrical or in the form of a roller. 14. A method for preparing a first generation model comprising: a) comprising an adhesive or thickener comprising a polyfunctional monomer or oligomer and being soluble or dispersible in an organic solvent or alkaline solution; The composition forms a polymer shim, wherein the polyfunctional monomer or oligomer is selected from the group consisting of polyfunctional acrylates, polyfunctional methacrylates, polyfunctional vinyls, polyfunctional vinyl ethers, polyfunctional olefins Group of polyfunctional epoxides and other monomers or oligomers comprising crosslinkable functional groups; ) forming a first generation model from the polymer shims; and c) thinning the polymer The gasket is removed. 15. The method of claim 14, further comprising cleaning the first generation model with an alkaline solution. 16. The method of claim 15, wherein the alkaline solution is tetramethyl hydroxide. 30 1325872 17· A method for the manufacture of a sluice shims, a) from the inclusion of a house selection method, which includes: the formation of a selective sputum, the composition of the composition to a small - & Plasticized thermoplastic polythene polymer thin sheet. b) Defects from the 'battery's thin shim. · c) will not contain ',, and +匕3 defects in the polymer thin Gasket 18. - used to prepare cockroaches. Together. A method of weighing a polymer shim, which a) a sheet of polymer from a composition comprising a polyfunctional single. sputum precursor or an oligomer; > a) a defect from all of the polymer thin pads On-chip resection; and c) joining together polymer shim substantially free of defects. Η—, schema: as the next page 31 1325872 V ·· * f.r* : c .. This A 5S K i' Supplementary VII. Designated representative figure: —----d (1) The representative representative figure of this case is: (1). (2) The symbol of the symbol of this representative figure is simple: 1 · main mold 2 · polymer shim 3 · first generation model or shim 4 · second generation model or shim 8. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: (none)