TW202539827A - Nickel-containing particles, method for producing nickel-containing particles, and slurry - Google Patents
Nickel-containing particles, method for producing nickel-containing particles, and slurryInfo
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Abstract
本發明提供一種含鎳粒子、含鎳粒子的製造方法、及用於製造含鎳粒子的漿料,該含鎳粒子在加熱時有效地抑制於特定溫度的熱縮。本發明的含鎳粒子具有含有鎳的鎳粒子、及覆蓋上述鎳粒子的表面的至少一部分且包含矽的覆蓋層,上述鎳粒子含有硫,且在利用軟X射線發射光譜法進行分析時所獲得的Si-Kα光譜中,峰的峰頂位置為1735 eV以上,上述峰的半峰全寬為10.5 eV以下。This invention provides nickel-containing particles, a method for manufacturing nickel-containing particles, and a slurry for manufacturing nickel-containing particles, wherein the nickel-containing particles effectively suppress thermal shrinkage at a specific temperature upon heating. The nickel-containing particles of this invention have nickel-containing particles and a silicon-containing coating layer covering at least a portion of the surface of the nickel particles. The nickel particles contain sulfur, and in the Si-Kα spectrum obtained by soft X-ray emission spectroscopy analysis, the peak apex position is above 1735 eV, and the full width at half maximum (FWHM) of the peak is below 10.5 eV.
Description
本發明關於一種含鎳粒子、含鎳粒子的製造方法、及用於製造含鎳粒子的漿料。This invention relates to nickel-containing particles, a method for manufacturing nickel-containing particles, and a slurry for manufacturing nickel-containing particles.
主要包含鎳的鎳粉因其優異的散熱特性和電性能,有時用作包含多功能手機在內的電子計算機用積層陶瓷芯片電容器(MLCC)的電極材料、鎳氫電池或鋰離子電池的材料。Nickel powder, which mainly contains nickel, is sometimes used as an electrode material for multilayer ceramic chip capacitors (MLCCs) in electronic computers, including multifunction mobile phones, as well as for nickel-hydrogen batteries or lithium-ion batteries due to its excellent heat dissipation and electrical properties.
其中,積層陶瓷芯片電容器具有交替地積層介電層及內部電極層並在其兩端設置外部電極而成的構成。此處,介電層可以使用以鈦酸鋇等介電常數較高的陶瓷作為主成分的陶瓷粉。另一方面,內部電極層可以使用各種金屬或者合金的粉末。近年來,業界正在推進開發一種將微細的鎳粉用於內部電極層的積層陶瓷芯片電容器。Multilayer ceramic chip capacitors (MLCs) are constructed by alternately stacking dielectric layers and internal electrode layers, with external electrodes at both ends. The dielectric layers can be ceramic powders with high dielectric constants, such as barium titanium oxide, as the main component. The internal electrode layers can be powders of various metals or alloys. In recent years, the industry has been developing MLCs that use fine nickel powder in the internal electrode layers.
作為關於鎳粉的技術,有專利文獻1~5中所記載的技術等。Regarding the technology of nickel powder, there are technologies described in patent documents 1 to 5, etc.
在專利文獻1中,作為「燒結時難以收縮的含鎳粒子」,提出了「一種含鎳粒子,其具有包含Ni的核心粒子、及位於該粒子的表面且包含Si、Al、Zr及Sn中的至少一種元素的覆蓋層,並且在以升溫速度10℃/min從25℃升溫到800℃時的氮氣99體積%及氫氣1體積%的混合環境下的熱機械分析中,400℃時的收縮率為3.0%以下,且800℃時的收縮率為15.0%以下,在大氣環境下的熱重量分析中,相對於25℃時的質量增加了0.5%質量時的溫度為250℃以上350℃以下」。In patent document 1, as "nickel-containing particles that are difficult to shrink during sintering", it is proposed that "a nickel-containing particle has a core particle containing Ni and a covering layer on the surface of the particle containing at least one element selected from Si, Al, Zr and Sn, and in thermomechanical analysis in a mixed environment of 99% nitrogen and 1% hydrogen at a heating rate of 10℃/min from 25℃ to 800℃, the shrinkage rate at 400℃ is less than 3.0% and the shrinkage rate at 800℃ is less than 15.0%, and in thermogravimetric analysis in an atmospheric environment, the temperature at which the mass increases by 0.5% relative to 25℃ is between 250℃ and 350℃".
專利文獻2的目的在於「提供一種複合Ni微粒子、其製造方法及製造裝置,該複合Ni微粒子即便是平均粒徑為0.2 μm以下、特別是0.1 μm以下的超微粒子,也能夠防止燒成過程中的分層,且能夠實現積層陶瓷電容器等超微粒子應用產品的薄層化」。並且,該專利文獻2中揭示了「一種複合Ni微粒子,其特徵在於在Ni或Ni合金的微粒子的表面,以1至5 nm的厚度覆蓋有選自由Si、Si3N4及SiO2所組成的群的一種材料,且該複合Ni微粒子的平均粒徑為0.07至0.50 μm」。The purpose of Patent 2 is to "provide a composite Ni microparticle, its manufacturing method and manufacturing apparatus, wherein even ultrafine particles with an average particle size of less than 0.2 μm, particularly less than 0.1 μm, can prevent delamination during the sintering process and can achieve thin-layer production of ultrafine particle application products such as multilayer ceramic capacitors". Furthermore, Patent 2 discloses "a composite Ni microparticle characterized in that a material selected from the group consisting of Si, Si3N4 and SiO2 is coated on the surface of Ni or Ni alloy microparticles with a thickness of 1 to 5 nm, and the average particle size of the composite Ni microparticle is 0.07 to 0.50 μm".
專利文獻3記載了「一種鎳細粉,其特徵在於平均粒徑為0.05~0.3 μm,微晶徑相對於比表面積直徑為60~90%,硫含量為0.1~0.5質量%,且氧含量為0.4~1.5質量%,並且在表面具有包含氧且厚度為2~15 nm的覆蓋層,至少該覆蓋層的最外面包含含有鎳硫化合物及鎳氧化合物的混合物」。根據該「鎳細粉」,其「純度高且結晶性優異,適宜作為電子設備、部件用材料。特別是在用作MLCC的內部電極形成用鎳細粉的情況下,能夠提高收縮起始溫度,且能夠抑制伴隨於燒結的收縮,因此能夠防止產生裂縫或剝離等結構缺陷」,「另外,藉由控制表面化合物層,能夠使樹脂黏合劑的分解溫度與原來的樹脂黏合劑的分解溫度同等,因此能夠進一步防止產生內部電極的不連續性或者剝離」,「進而,上述鎳細粉的製造方法簡易且在工業規模下也能夠實現,故其工業價值極大」。Patent document 3 describes "a nickel fine powder, characterized in that the average particle size is 0.05 to 0.3 μm, the crystallite diameter relative to the specific surface area diameter is 60 to 90%, the sulfur content is 0.1 to 0.5% by mass, and the oxygen content is 0.4 to 1.5% by mass, and the surface has a coating layer containing oxygen with a thickness of 2 to 15 nm, at least the outermost part of the coating layer contains a mixture of nickel sulfur compounds and nickel oxide compounds". According to this "nickel powder," it has "high purity and excellent crystallinity, making it suitable as a material for electronic devices and components. Especially when used as nickel powder for forming the internal electrodes of MLCCs, it can increase the shrinkage initiation temperature and suppress shrinkage accompanying sintering, thus preventing structural defects such as cracks or peeling." Furthermore, by controlling the surface compound layer, the decomposition temperature of the resin adhesive can be made the same as that of the original resin adhesive, thus further preventing discontinuity or peeling of the internal electrodes. "In addition, the above-mentioned method for manufacturing nickel powder is simple and can be realized on an industrial scale, so its industrial value is extremely high."
專利文獻4中記載了「一種鎳粉末,其特徵在於含有1.0~5.0質量%的硫,且個數50%直徑為0.09 μm以下」。Patent document 4 describes "a nickel powder characterized by containing 1.0 to 5.0% by mass of sulfur, and 50% of the particles having a diameter of less than 0.09 μm".
專利文獻5中記載了「一種金屬粉末,其包含含有金屬、及本體濃度為0.01重量%以上1.0重量%以下的硫的金屬粒子,與上述金屬粒子的表面相距4 nm位置處的硫的局部濃度為2原子%以上,且上述本體濃度和上述局部濃度分別藉由電感耦合等離子體發射光譜分析裝置、及掃描穿透型電子顯微鏡所具備的能量色散X射線光譜分析器來估算」,且「上述金屬為鎳、銅、或者銀」。[先前技術文獻][專利文獻]Patent document 5 describes "a metal powder comprising metal particles containing a metal and sulfur at a bulk concentration of 0.01% to 1.0% by weight, wherein the local concentration of sulfur at a position 4 nm away from the surface of the metal particles is 2 atoms or more, and the bulk concentration and the local concentration are estimated by means of an inductively coupled plasma emission spectrometry (ICP-ESI) analyzer and an energy-dispersive X-ray spectrometer of a scanning transmission electron microscope," and "the metal is nickel, copper, or silver." [Prior Art Documents][Patent Documents]
[專利文獻1]國際公開第2021/199694號[專利文獻2]日本專利特開2004-232036號公報[專利文獻3]國際公開第2011/037150號[專利文獻4]國際公開第2015/156080號[專利文獻5]國際公開第2020/004105號[Patent Document 1] International Publication No. 2021/199694 [Patent Document 2] Japanese Patent Application Publication No. 2004-232036 [Patent Document 3] International Publication No. 2011/037150 [Patent Document 4] International Publication No. 2015/156080 [Patent Document 5] International Publication No. 2020/004105
[發明所欲解決之課題]但是,當將鎳粉用於製造上述積層陶瓷芯片電容器等產品時,有時將鎳粉包含在有機黏合劑等中而製成漿狀。然後,積層由介電層用陶瓷粉所形成的坯片、及內部電極層用鎳粉漿,並同時對它們進行加熱而使陶瓷粉及鎳粉分別燒結。[Problem to be Solved by the Invention] However, when nickel powder is used to manufacture products such as the aforementioned multilayer ceramic chip capacitors, sometimes the nickel powder is contained in an organic binder or the like to form a paste. Then, a blank formed from ceramic powder for the dielectric layer and a nickel powder paste for the inner electrode layer are stacked, and they are heated simultaneously to sinter the ceramic powder and nickel powder separately.
這時,如果燒結時鎳粉在相對低溫大幅度地收縮,那麼可能因與陶瓷粉的收縮行為的差異而產生內部電極層斷離等產品不良。為了防止這種情況,有時要求鎳粉具有加熱時在特定溫度不發生大幅度收縮的程度的耐熱性。專利文獻1~5中所記載的發明從提高耐熱性的觀點來看,仍有進一步改善的餘地。If the nickel powder shrinks significantly at a relatively low temperature during sintering, the difference in shrinkage behavior compared to ceramic powder may lead to product defects such as internal electrode layer breakage. To prevent this, nickel powder is sometimes required to have heat resistance to the point that it does not shrink significantly at a specific temperature when heated. From the perspective of improving heat resistance, the inventions described in Patents 1-5 still have room for further improvement.
本發明的課題在於解決如上所述的問題,其目的在於提供一種在加熱時有效地抑制於特定溫度的熱縮的含鎳粒子、含鎳粒子的製造方法、及用於製造含鎳粒子的漿料。[解決課題之技術手段]The present invention addresses the problems described above, aiming to provide nickel-containing particles that effectively suppress thermal shrinkage at specific temperatures during heating, a method for manufacturing nickel-containing particles, and a slurry for manufacturing nickel-containing particles. [Technical Means for Solving the Problem]
發明人經過潛心研究,結果獲得了下述見解,即,如果在含有鎳的鎳粒子的表面被包含矽的覆蓋層覆蓋的含鎳粒子中,該鎳粒子進一步含有硫,那麼耐熱性有可能會提高。並且,藉由進一步研究,發現如果這種含鎳粒子中藉由利用軟X射線發射光譜法進行分析所獲得的Si-Kα光譜的峰成為特定的形狀,那麼會顯示較高的耐熱性。Through dedicated research, the inventors discovered that if nickel-containing particles, whose surface is covered by a silicon-containing coating, further contain sulfur, then the heat resistance may be improved. Furthermore, through further research, they found that if the peaks of the Si-Kα spectrum obtained by soft X-ray emission spectroscopy in these nickel-containing particles have a specific shape, then higher heat resistance is observed.
本發明的含鎳粒子具有含有鎳的鎳粒子、及覆蓋上述鎳粒子的表面的至少一部分且包含矽的覆蓋層,上述鎳粒子含有硫,且在利用軟X射線發射光譜法進行分析時所獲得的Si-Kα光譜中,峰的峰頂位置為1735 eV以上,上述峰的半峰全寬為10.5 eV以下。The nickel-containing particles of the present invention comprise nickel particles containing nickel and a covering layer containing silicon covering at least a portion of the surface of the nickel particles. The nickel particles contain sulfur, and in the Si-Kα spectrum obtained by analysis using soft X-ray emission spectroscopy, the peak apex position is above 1735 eV, and the full width at half maximum (FWHM) of the peak is below 10.5 eV.
上述含鎳粒子的矽含量較佳為0.05質量%~1.5質量%。The silicon content of the nickel-containing particles is preferably 0.05% to 1.5% by mass.
上述含鎳粒子的硫含量較佳為0.01質量%~1.0質量%。The sulfur content of the nickel-containing particles is preferably 0.01% to 1.0% by mass.
上述含鎳粒子的粒徑有時為50 nm~300 nm。The particle size of the nickel-containing particles mentioned above is sometimes 50 nm to 300 nm.
本發明的含鎳粒子的製造方法中,上述含鎳粒子具有含有鎳的鎳粒子、及覆蓋上述鎳粒子的表面的至少一部分且包含矽的覆蓋層,上述含鎳粒子的製造方法包括對鎳粒子實施矽包覆的包覆步驟,且作為上述鎳粒子,使用在深度方向上距離表面2 nm位置處的硫的局部濃度(atm%)相對於在深度方向上距離表面5 nm位置處的硫的局部濃度(atm%)的濃度比為5倍以上的鎳粒子。In the method for manufacturing nickel-containing particles of the present invention, the nickel-containing particles have nickel particles containing nickel and a covering layer containing silicon covering at least a portion of the surface of the nickel particles. The method for manufacturing nickel-containing particles includes a coating step of coating the nickel particles with silicon. As the nickel particles, nickel particles with a concentration ratio of 5 times or more between the local concentration (atm%) of sulfur at a position 2 nm away from the surface in the depth direction and the local concentration (atm%) of sulfur at a position 5 nm away from the surface in the depth direction are used.
本發明的漿料用於製造如上所述的含鎳粒子,該含鎳粒子具有含有鎳的鎳粒子、及覆蓋上述鎳粒子的表面的至少一部分且包含矽的覆蓋層,上述漿料包含含有硫的鎳粒子、及矽添加劑。The slurry of the present invention is used to manufacture nickel-containing particles as described above, the nickel-containing particles having nickel-containing nickel particles and a covering layer containing silicon covering at least a portion of the surface of the nickel particles, the slurry comprising sulfur-containing nickel particles and silicon additives.
上述矽添加劑較佳為包含粒狀的二氧化矽及/或有機矽化物。[發明之效果]The aforementioned silicon additive preferably comprises granular silicon dioxide and/or organosilicon compounds. [Effects of the Invention]
本發明的含鎳粒子是在加熱時有效地抑制於特定溫度的熱縮的含鎳粒子。The nickel-containing particles of this invention are nickel-containing particles that effectively suppress thermal shrinkage at a specific temperature when heated.
以下,對本發明的實施方式進行說明。本發明的一實施方式的含鎳粒子具有鎳粒子(核心粒子)、及覆蓋該鎳粒子的表面的至少一部分的覆蓋層。覆蓋層中包含矽。鎳粒子主要含有鎳,重要的是進一步含有硫。The embodiments of the present invention are described below. One embodiment of the present invention comprises nickel particles (core particles) and a covering layer covering at least a portion of the surface of the nickel particles. The covering layer contains silicon. The nickel particles primarily contain nickel, and importantly, further contain sulfur.
另外,在利用軟X射線發射光譜法(Soft X-ray Emission Spectroscopy,SXES)對該含鎳粒子進行分析時所獲得的Si-Kα光譜中,峰的峰頂位置為1735 eV以上,且峰的半峰全寬為10.5 eV以下。In addition, in the Si-Kα spectrum obtained by analyzing the nickel-containing particles using soft X-ray emission spectroscopy (SXES), the peak apex position is above 1735 eV and the full width at half maximum (FWHM) of the peak is below 10.5 eV.
雖然原因未必明確,但如果在不僅含有鎳還含有硫的鎳粒子的表面存在含有矽的覆蓋層,進而Si-Kα光譜的峰為上述形狀,那麼會成為耐熱性優異的含鎳粒子。該含鎳粒子在加熱時,在特定溫度區不會發生大幅度熱縮。由此,在將含鎳粒子用於製造積層陶瓷芯片電容器的情況下,有可能能夠在燒結時與陶瓷粉的收縮行為一致,從而能夠抑制產品不良的產生。While the exact reason may not be clear, if a silicon-containing coating layer exists on the surface of nickel particles that contain both nickel and sulfur, resulting in the aforementioned peak shape in the Si-Kα spectrum, then these nickel-containing particles would possess excellent heat resistance. These particles do not undergo significant thermal shrinkage within a specific temperature range when heated. Therefore, when using nickel-containing particles in the manufacture of multilayer ceramic chip capacitors, it is possible to achieve shrinkage behavior consistent with that of ceramic powder during sintering, thereby suppressing product defects.
特別是在對鎳粒子的表層附近含有相對較多量的硫的鎳粒子實施包覆而製造含鎳粒子時,認為在燒結含鎳粒子時,表層中的該硫成分的液化因覆蓋層的矽而受到阻礙,隨之,存在於含鎳粒子的深部的鎳在相鄰的含鎳粒子間的擴散得到進一步抑制。結果推測燒結發生延遲,從而進一步有效地抑制熱縮。In particular, when nickel-containing particles are manufactured by coating nickel particles containing a relatively large amount of sulfur near their surface, it is believed that during the sintering of the nickel-containing particles, the liquefaction of the sulfur component in the surface layer is hindered by the silicon of the coating layer. Consequently, the diffusion of nickel deep within the nickel-containing particles between adjacent nickel-containing particles is further suppressed. As a result, it is speculated that sintering is delayed, thereby further effectively suppressing thermal shrinkage.
(組成)構成含鎳粒子的一部分的鎳粒子主要含有鎳(Ni),但還包含硫(S)。因此,具有鎳粒子的含鎳粒子包含硫。(Composition) Nickel particles, which constitute a part of nickel-containing particles, mainly contain nickel (Ni), but also contain sulfur (S). Therefore, nickel-containing particles containing nickel particles contain sulfur.
含鎳粒子的硫含量較佳為0.01質量%~1.0質量%。如果硫含量過少,那麼有可能在低溫進行燒結。另一方面,如果硫含量過多,那麼有燒成時發生氧化而產生氣體從而造成層間剝離的顧慮。硫含量是依據JIS K0116並利用ICP發射光譜法來測定。也能夠以同樣的方式測定下述鎳粒子的硫含量。The sulfur content of the nickel particles is preferably 0.01% to 1.0% by mass. If the sulfur content is too low, sintering may have to be carried out at a low temperature. On the other hand, if the sulfur content is too high, there is a concern that oxidation may occur during firing, generating gases and causing interlayer peeling. The sulfur content is determined according to JIS K0116 using ICP emission spectroscopy. The sulfur content of the nickel particles described below can also be determined in the same manner.
存在於鎳粒子的表面的至少一部分的覆蓋層含有矽(Si)。含鎳粒子的矽含量較佳為0.05質量%~1.5質量%,更佳為0.08質量%~1.2質量%。藉由使含鎳粒子在一定程度上較多地包含矽,而提高耐熱性。另一方面,如果含鎳粒子的矽含量過多,那麼可能導致耐熱性提高效果變差。矽含量是藉由X射線衍射法(XRD)來測定。矽含量是以換算成SiO2重量比的值的形式求出。At least a portion of the coating layer present on the surface of the nickel particles contains silicon (Si). The silicon content of the nickel-containing particles is preferably 0.05% to 1.5% by mass, more preferably 0.08% to 1.2% by mass. By ensuring that the nickel-containing particles contain a relatively high amount of silicon, heat resistance is improved. On the other hand, if the silicon content of the nickel-containing particles is too high, the improvement in heat resistance may be diminished. The silicon content is determined by X-ray diffraction (XRD). The silicon content is calculated as a value converted to the weight ratio of SiO₂ .
(粒徑)含鎳粒子的粒徑例如為50 nm~300 nm,典型而言為80 nm~300 nm,但並不限定於此。包含這種微細的含鎳粒子的鎳粉特別適於上述的積層陶瓷芯片電容器等用途。(Particle size) The particle size of nickel-containing particles is, for example, 50 nm to 300 nm, typically 80 nm to 300 nm, but not limited to this. Nickel powder containing such fine nickel particles is particularly suitable for applications such as the above-mentioned multilayer ceramic chip capacitors.
這裡所說的粒徑意指個數平均徑。在測定含鎳粒子的粒徑時,對以特定的倍率拍攝每個粒子所得的SEM影像中的500個~1000個粒子的長徑進行測定,並將其個數平均值作為粒徑。The particle size referred to here is the number average diameter. When measuring the particle size of nickel-containing particles, the diameter of 500 to 1000 particles in the SEM image obtained by photographing each particle at a specific magnification is measured, and the average number of these particles is taken as the particle size.
(SXES的Si-Kα光譜)當針對含鎳粒子利用軟X射線發射光譜法對其中所包含的矽進行分析時,會獲得如圖1所例示的Si-Kα光譜作為因X射線的照射而從含鎳粒子中的Si元素發射的特性X射線(Kα線)的能量分佈。(Si-Kα spectrum of SXES) When silicon contained in nickel-containing particles is analyzed by soft X-ray emission spectroscopy, the Si-Kα spectrum illustrated in Figure 1 is obtained as the energy distribution of characteristic X-rays (Kα lines) emitted from the Si element in the nickel-containing particles due to X-ray irradiation.
在本發明的實施方式的含鎳粒子的上述Si-Kα光譜中,峰的峰頂位置Pt為1735 eV以上。另外,該峰的半峰全寬Wh、即該峰的峰頂的強度Sp的一半強度(Sp/2)處的該峰的全寬Wh為10.5 eV以下。此處,峰頂位置Pt意指在Si-Kα光譜中作為複數個高斯函數的線性合成而擬合的函數f(x)取最大值Sp時的x的值。另外,上述峰的全寬W意指該函數f(x)的值成為Sp/2以上的x的範圍的寬度。In the aforementioned Si-Kα spectrum of nickel-containing particles according to the embodiment of the present invention, the peak apex position Pt is 1735 eV or higher. Furthermore, the full width at half maximum (WHM) of this peak, i.e., the full width at half the intensity Sp of the peak apex (Sp/2), is 10.5 eV or lower. Here, the peak apex position Pt refers to the value of x when the function f(x) fitted as a linear synthesis of complex Gaussian functions in the Si-Kα spectrum reaches its maximum value Sp. The full width at half maximum (WHM) refers to the width of the range of x for which the value of the function f(x) is Sp/2 or higher.
如果Si-Kα光譜的峰頂位置Pt及峰的半峰全寬Wh分別處於上述範圍內,那麼該含鎳粒子在特定的加熱溫度不會發生大幅度熱縮,而耐熱性優異。If the peak position Pt and the full width at half maximum (WHM) of the Si-Kα spectrum are within the above ranges, then the nickel-containing particles will not undergo significant thermal shrinkage at a specific heating temperature and will exhibit excellent heat resistance.
在Si-Kα光譜中,峰頂位置Pt的能量值在上述範圍內越大,且峰的半峰全寬Wh在上述範圍內越小,則耐熱性傾向於越高。因此,峰頂位置Pt較佳為處於1736 eV~1740 eV的範圍內。另外,峰的半峰全寬Wh較佳為處於8.0 eV~10.5 eV的範圍內。In Si-Kα spectra, the higher the energy value of Pt at the peak position within the aforementioned range, and the smaller the full width at half maximum (FWHM) Wh within the same range, the higher the heat resistance tends to be. Therefore, the peak position Pt is preferably in the range of 1736 eV to 1740 eV. Furthermore, the FWHM Wh is preferably in the range of 8.0 eV to 10.5 eV.
利用軟X射線發射光譜法所進行的含鎳粒子的分析,具體來說如下進行。將含鎳粒子的經乾燥的樣品壓抵在銦箔上之後,用碳帶將其固定在軟X射線發射光譜裝置的試驗臺上,而進行分析。此處,可以將加速電壓設為3 kV,將電流值設為45~50 nA,將測定倍率設為30000倍,將測定時間設為每個視野15分種,將累計視野數量設50~100個視野。The analysis of nickel-containing particles using soft X-ray emission spectroscopy is performed as follows: A dried sample containing nickel particles is pressed onto an indium foil and then fixed to the experimental stage of the soft X-ray emission spectroscopy apparatus using a carbon ribbon for analysis. Here, the accelerating voltage can be set to 3 kV, the current to 45–50 nA, the magnification to 30,000x, the measurement time to 15 minutes per field of view, and the cumulative number of fields of view to 50–100.
(製造方法)為了製造如上所述的含鎳粒子,首先要準備含有硫的鎳粒子。(Manufacturing method) In order to manufacture the nickel-containing particles as described above, nickel particles containing sulfur must first be prepared.
鎳粒子的粉末可以使用市售品,也可以藉由氣相法或液相法等來製作。就容易控制粒徑且效率良好地獲得球狀鎳粒子的方面來說,特別較佳為使用:使氯化鎳氣體與還原性氣體接觸的氣相還原法、或者噴霧熱分解性鎳化合物而進行熱分解的噴霧熱分解法。Nickel powder can be commercially available or produced using methods such as gas-phase or liquid-phase methods. For ease of particle size control and efficient production of spherical nickel particles, the following methods are particularly preferred: gas-phase reduction method, which involves contacting nickel chloride gas with a reducing gas, or spray thermal decomposition method, which involves thermally decomposing a thermally decomposable nickel compound.
在氣相還原法中,在大多情況下進行氯化步驟及還原步驟,上述氯化步驟藉由加熱使包含單質金屬鎳的固體原料蒸發並使其與氯氣接觸而生成氯化鎳氣體,該還原步驟使氯化鎳氣體與氫氣等還原性氣體進行反應。具體來說,例如可以在氯化步驟中使氯氣接觸金屬鎳而連續地產生氯化鎳氣體,同時將該氯化鎳氣體供給至還原步驟而使其與還原性氣體接觸,從而連續地還原氯化鎳氣體。此外,如果能夠藉由其他途徑獲得還原步驟中所使用的氯化鎳氣體,那麼也可以省略氯化步驟。In gas-phase reduction processes, a chlorination step and a reduction step are typically performed. The chlorination step involves heating a solid feedstock containing elemental nickel to evaporate it, which then comes into contact with chlorine gas to generate nickel chloride gas. The reduction step involves reacting the nickel chloride gas with a reducing gas such as hydrogen. Specifically, for example, chlorine gas can be introduced into the nickel in the chlorination step to continuously generate nickel chloride gas, while simultaneously supplying this nickel chloride gas to the reduction step to allow it to come into contact with a reducing gas, thereby continuously reducing the nickel chloride gas. Furthermore, if the nickel chloride gas used in the reduction step can be obtained through other means, the chlorination step can be omitted.
供氯化步驟使用的固體原料可以設為粒徑約5 mm~20 mm的粒狀、塊狀或板狀等,其鎳純度較佳為99.5質量%以上。在氯化步驟中,對該固體原料進行加熱同時使其與氯氣接觸。這時的溫度可以設為800℃以上且鎳的熔點即1453℃以下,以便充分地促進反應。考慮到反應速度及氯化爐的耐久性,較佳為900℃~1100℃的範圍。由此,生成氯化鎳氣體。The solid feedstock used in the chlorination step can be in granular, block, or plate form with a particle size of approximately 5 mm to 20 mm, and its nickel purity is preferably 99.5% by mass or higher. In the chlorination step, the solid feedstock is heated while simultaneously contacting it with chlorine gas. The temperature can be set above 800°C and below the melting point of nickel (1453°C) to fully promote the reaction. Considering the reaction rate and the durability of the chlorination furnace, a range of 900°C to 1100°C is preferred. This generates nickel chloride gas.
在還原步驟中,使上述氯化鎳氣體與氫氣等還原性氣體接觸而進行反應。這時,也可以使氮氣或氬氣等非活性氣體以相對於氯化鎳氣體為1莫耳%~30莫耳%的量混入其中。另外,也可以在還原步驟中與氯化鎳氣體分開地供給氯氣。在還原步驟中供給非活性氣體或氯氣時,可以調整氯化鎳氣體的分壓,能夠控制鎳粒子的粒徑並抑制粒徑的不均。另外,在還原步驟中,可以供給硫化氫或二氧化硫、鹵化硫(SnCl2(n為2以上的整數)、SF6、SF5Cl、SF5Br等)等其他含硫氣體。由此,在還原步驟後獲得含有硫的鎳粒子。還原反應的溫度只要是還原反應所需的溫度以上即可,但為了生成容易處理的固體鎳粒子,可以設為鎳的熔點以下,例如較佳為設為900℃~1100℃。In the reduction step, the nickel chloride gas is brought into contact with a reducing gas such as hydrogen to carry out the reaction. At this time, an inert gas such as nitrogen or argon can also be mixed in at an amount of 1 mol% to 30 mol% relative to the nickel chloride gas. Alternatively, chlorine gas can be supplied separately from the nickel chloride gas in the reduction step. When an inert gas or chlorine gas is supplied in the reduction step, the partial pressure of the nickel chloride gas can be adjusted, which can control the particle size of the nickel particles and suppress particle size inhomogeneity. Furthermore, in the reduction step, other sulfur-containing gases such as hydrogen sulfide, sulfur dioxide, sulfur halides ( SnCl₂ (n is an integer greater than or equal to 2), SF₆ , SF₅Cl , SF₅Br , etc.) can be supplied. Thus, nickel particles containing sulfur are obtained after the reduction step. The temperature of the reduction reaction can be above the temperature required for the reduction reaction, but in order to generate easily handleable solid nickel particles, it can be set below the melting point of nickel, for example, preferably 900℃~1100℃.
在還原步驟中,在氯化鎳氣體與還原性氣體接觸的瞬間生成鎳原子,鎳原子彼此發生碰撞,由此生成超微粒子並進行生長。並且,根據還原步驟中的氯化鎳氣體的分壓或溫度等其他條件,而獲得特定粒徑的鎳粒子。因為在氯化步驟中產生與氯氣的供給量對應的量的氯化鎳氣體,所以能夠藉由控制氯氣的供給量來調整對還原步驟的氯化鎳氣體的供給量。由此,能夠有效地控制鎳粒子的粒徑。In the reduction step, nickel atoms are generated instantaneously upon contact between nickel chloride gas and the reducing gas. These nickel atoms collide with each other, thereby generating ultrafine particles that then grow. Furthermore, nickel particles of a specific particle size are obtained based on other conditions such as the partial pressure or temperature of the nickel chloride gas in the reduction step. Because the amount of nickel chloride gas produced in the chlorination step corresponds to the amount of chlorine supplied, the supply of nickel chloride gas to the reduction step can be adjusted by controlling the amount of chlorine supplied. Therefore, the particle size of the nickel particles can be effectively controlled.
可以對還原步驟中所獲得的鎳粒子進行冷卻。這時,較理想為藉由吹入氮氣等非活性氣體,來將已結束還原反應的1000℃附近的氣流急速地冷卻至400~800℃左右。由此,防止因還原步驟中所生成的粉末中的一次粒子彼此凝聚而生成二次粒子,從而能夠獲得所需粒徑的鎳粒子。然後,例如利用過濾袋等來分離鎳粒子的粉末並回收。The nickel particles obtained in the reduction step can be cooled. Ideally, this is done by blowing in an inert gas such as nitrogen to rapidly cool the airflow, which has completed the reduction reaction and is around 1000°C, to about 400–800°C. This prevents the formation of secondary particles from the agglomeration of primary particles in the powder generated in the reduction step, thus allowing the acquisition of nickel particles of the desired particle size. The nickel particles are then separated and recovered, for example, using a filter bag.
也可以在上述還原步驟中的含硫氣體的供給的基礎上或代替其而使還原步驟後的鎳以乾式或濕式方式與硫脲等含硫化合物接觸。藉由與含硫化合物接觸,而在鎳粒子的表面覆蓋含硫化合物,或者形成鎳與硫的化合物層,從而獲得含有硫的鎳粒子(核心粒子)。在濕式情況下,具體來說可以向液體中的鎳粒子添加含硫化合物,或者混合含硫化合物的水溶液或乙醇、異丙醇等醇溶液等。此時,可以利用超聲波等進行攪拌。含硫化合物的使用量能夠以下述方式進行調整,即,接觸後的鎳粒子的硫含量例如成為0.01~1.0質量%、較佳為為0.05~0.5質量%。接觸時間有時設為10~60分鐘、甚至15~30分鐘。Alternatively, the nickel after the reduction step can be contacted with sulfur-containing compounds such as thiourea in a dry or wet manner, either based on or replacing the supply of sulfur-containing gas in the reduction step. By contacting with the sulfur-containing compound, the surface of the nickel particles is coated with the sulfur-containing compound, or a layer of nickel and sulfur compounds is formed, thereby obtaining sulfur-containing nickel particles (core particles). In the wet case, specifically, a sulfur-containing compound can be added to the nickel particles in the liquid, or an aqueous solution of the sulfur-containing compound or an alcohol solution such as ethanol or isopropanol can be mixed. At this time, stirring can be performed using ultrasound or the like. The amount of sulfur-containing compound used can be adjusted such that the sulfur content of the nickel particles after contact is, for example, 0.01 to 1.0% by mass, preferably 0.05 to 0.5% by mass. The contact time is sometimes set to 10-60 minutes, or even 15-30 minutes.
如果在還原步驟中供給含硫氣體,那麼最終所獲得的含鎳粒子傾向於從表面到相對較深的位置都包含硫。另一方面,在還原步驟之後使鎳粒子與含硫化合物接觸時,含鎳粒子的內部的表層附近的硫的局部濃度容易變高。If a sulfur-containing gas is supplied during the reduction step, the resulting nickel particles tend to contain sulfur from the surface to relatively deep locations. On the other hand, when the nickel particles are brought into contact with sulfur-containing compounds after the reduction step, the local concentration of sulfur near the surface of the inner part of the nickel particles tends to increase.
在噴霧熱分解法中,以熱分解性鎳化合物作為原料,噴霧該原料的溶液而形成微細的液滴,並且於高溫進行加熱,使鎳化合物進行熱分解而生成鎳粒子。作為原料,具體可以使用包含選自由硝酸鹽、硫酸鹽、硝酸氧鹽、硫酸氧鹽、氯化物、銨錯合物、磷酸鹽、羧酸鹽及烷氧基化合物所組成的群中的至少一種的原料。在噴霧原料而形成液滴時,可以使用水、醇、丙酮、醚等作為溶劑。噴霧的方法有時利用超聲波或雙噴嘴等來進行。加熱液滴的溫度較佳為設為用作原料的特定鎳化合物發生熱分解的溫度以上且金屬的熔點附近。In the spray thermal decomposition method, a thermally decomposable nickel compound is used as a raw material. A solution of the raw material is sprayed to form fine droplets, and then heated at a high temperature to cause the nickel compound to thermally decompose and generate nickel particles. Specifically, the raw material can include at least one selected from the group consisting of nitrates, sulfates, nitrate oxysalts, sulfate oxysalts, chlorides, ammonium complexes, phosphates, carboxylates, and alkoxy compounds. Water, alcohols, acetone, ethers, etc., can be used as solvents when spraying the raw material to form droplets. The spraying method sometimes utilizes ultrasound or dual nozzles. The temperature of the heated droplets is preferably set above the temperature at which the specific nickel compound used as the raw material undergoes thermal decomposition and near the melting point of the metal.
在液相法中,藉由添加等方式使包含硫酸鎳、氯化鎳或者鎳錯合物的鎳水溶液與氫氧化鈉等鹼金屬氫氧化物接觸,而生成鎳氫氧化物。然後,利用肼等還原劑將鎳氫氧化物還原,而獲得鎳粒子。對於以這種方式生成的鎳粒子的粉末,有時視需要進行粉碎處理,以便形成均勻的粒徑。In the liquid-phase method, a nickel aqueous solution containing nickel sulfate, nickel chloride, or nickel complexes is brought into contact with an alkaline metal hydroxide such as sodium hydroxide by means of addition, thereby generating nickel hydroxide. Then, the nickel hydroxide is reduced using a reducing agent such as hydrazine to obtain nickel particles. The nickel particle powder generated in this way is sometimes subjected to pulverization as needed to form a uniform particle size.
藉由上文所述的各種方法所獲得的鎳粒子較理想為含有硫。由此,經過下述包覆步驟所製造的含鎳粒子的鎳粒子成為含有硫的鎳粒子。鎳粒子的硫含量較佳為0.01質量%~1.0質量%,進而較佳為0.05質量%~0.2質量%。鎳粒子的硫含量能夠藉由變更可供給至還原步驟的含硫氣體的流量等來進行調整。The nickel particles obtained by the methods described above ideally contain sulfur. Therefore, the nickel particles containing nickel particles produced through the following coating steps become sulfur-containing nickel particles. The sulfur content of the nickel particles is preferably 0.01% to 1.0% by mass, and more preferably 0.05% to 0.2% by mass. The sulfur content of the nickel particles can be adjusted by changing the flow rate of the sulfur-containing gas supplied to the reduction step.
另外,鎳粒子較佳為在從該鎳粒子的表面朝向深度方向測定硫濃度(atm%)時,在深度方向上距離該表面2 nm位置處的硫的局部濃度(atm%)相對於在深度方向上距離該表面5 nm位置處的硫的局部濃度(atm%)的濃度比為5倍以上。如此,藉由使在一定程度上較多的硫存在於鎳粒子表面的附近,而與下述包覆步驟中所形成的覆蓋層的矽進行作用,抑制含鎳粒子彼此之間的鎳的擴散,因此能夠進一步提高耐熱性。Furthermore, the nickel particles are preferably such that, when the sulfur concentration (atm%) is measured from the surface of the nickel particles toward the depth direction, the local sulfur concentration (atm%) at a position 2 nm away from the surface in the depth direction is at least 5 times higher than the local sulfur concentration (atm%) at a position 5 nm away from the surface in the depth direction. In this way, by ensuring a relatively high amount of sulfur is present near the surface of the nickel particles, and interacting with the silicon of the coating layer formed in the following coating step, the diffusion of nickel between the nickel-containing particles is suppressed, thereby further improving heat resistance.
鎳粒子的上述硫的局部濃度例如可以利用掃描穿透型電子顯微鏡所具備的能量色散X射線光譜分析器(STEM-EDS:Scanning Transmission Electron Microscope-Energy Dispersive X-ray Spectroscope)進行觀測。例示具體的測定方法,首先,將鎳粒子分散在樹脂中,並使樹脂硬化。然後,使用截面拋光儀(CP)使截面露出,使用聚焦離子束(FIB)製作基於平面採樣的薄膜試樣。藉由將試樣的厚度設為100 nm左右,而將鎳粒子成形為具有該厚度的薄膜。然後,針對所獲得的薄膜,在穿過鎳粒子的中央的直線上進行EDS測定,由此能夠獲得局部濃度。作為EDS測定的條件,例如可以選擇下述條件:加速電壓200 kV、探針直徑1 nm、間距寬度3 nm、每個點的測定時間15秒。The localized sulfur concentration of nickel particles can be observed, for example, using an energy-dispersive X-ray spectroscopy (STEM-EDS) analyzer within a scanning transmission electron microscope. A specific measurement method is described as follows: First, nickel particles are dispersed in resin, and the resin is cured. Then, a cross-section is exposed using a section polisher (CP), and a thin film sample based on planar sampling is prepared using focused ion beam (FIB). By setting the sample thickness to approximately 100 nm, the nickel particles are shaped into a thin film of that thickness. Then, EDS measurement is performed on the obtained thin film along a straight line passing through the center of the nickel particles, thereby obtaining the localized concentration. As conditions for EDS measurement, for example, the following conditions can be selected: accelerating voltage 200 kV, probe diameter 1 nm, spacing width 3 nm, and measurement time of 15 seconds per point.
然後,進行對鎳粒子的粉末實施矽包覆的包覆步驟。藉由包覆步驟,而使鎳粒子(核心粒子)的表面的至少一部分被包含矽的覆蓋層覆蓋,從而能夠獲得含鎳粒子的粉末。Then, a silicon coating step is performed on the nickel particle powder. By means of the coating step, at least a portion of the surface of the nickel particles (core particles) is covered by a silicon-containing coating layer, thereby obtaining nickel particle-containing powder.
在包覆步驟中,無論使用什麼具體方法,只要能夠使鎳粒子與矽接觸並在其表面形成覆蓋層即可。例如,可以向在水等液體中懸浮有矽添加劑的漿料中添加鎳粒子的粉末,並將它們攪拌混合。In the coating step, any specific method used will suffice as long as it allows the nickel particles to come into contact with silicon and form a coating layer on its surface. For example, powdered nickel particles can be added to a slurry containing silicon additives suspended in a liquid such as water, and the mixture can be stirred and stirred together.
包含在漿料中的矽添加劑較佳為含有二氧化矽(SiO2)及/或具有碳-矽鍵的有機矽化物的粒狀矽添加劑。作為有機矽化物,具體來說可列舉Si樹脂酸鹽、矽油等。粒狀矽添加劑的平均粒徑較佳為設為20 nm~50 nm。The silicon additive included in the slurry is preferably a granular silicon additive containing silicon dioxide ( SiO2 ) and/or an organosilicon with carbon-silicon bonds. Specific examples of organosilicon include Si resinates and silicone oils. The average particle size of the granular silicon additive is preferably set to 20 nm to 50 nm.
漿料中所包含的矽添加劑的質量比例可設為1%~75%。由此,易於將含鎳粒子的矽含量調整至特定的範圍。另外,有時於漿料中包含分散劑等。The mass percentage of silicon additives in the slurry can be set from 1% to 75%. This makes it easy to adjust the silicon content of nickel-containing particles to a specific range. In addition, dispersants are sometimes included in the slurry.
有時將混合時的攪拌速度設為3000 rpm~5000 rpm,將攪拌時間設為1小時~20小時,將液溫設為10℃~60℃。Sometimes the stirring speed during mixing is set to 3000 rpm to 5000 rpm, the stirring time is set to 1 hour to 20 hours, and the liquid temperature is set to 10℃ to 60℃.
認為當將鎳粒子混入至漿料中時,鎳粒子與矽添加劑在漿料中接觸,而發生包覆反應。由此,在鎳粒子的表面形成包含矽的覆蓋層。It is believed that when nickel particles are mixed into the slurry, the nickel particles come into contact with the silicon additives in the slurry, and a coating reaction occurs. As a result, a silicon-containing coating layer is formed on the surface of the nickel particles.
使鎳粒子與上述漿料混合之後,使漿料乾燥。這時,可將漿料在例如氬氣環境下加熱至60℃~80℃的溫度。如果溫度過低,那麼乾燥需要耗費較長時間,如果過高,那麼存在生成不必要的氫氧化物等的顧慮。After mixing the nickel particles with the slurry, the slurry is dried. At this point, the slurry can be heated to a temperature of 60°C to 80°C, for example, in an argon atmosphere. If the temperature is too low, drying will take a long time; if it is too high, there is a concern about the formation of unwanted hydroxides, etc.
乾燥之後,獲得鎳粒子(核心粒子)的表面的至少一部分被包含矽的覆蓋層覆蓋的含鎳粒子的粉末。該含鎳粒子有下述傾向:軟X射線發射光譜法的Si-Kα光譜中的峰頂位置及峰的半峰全寬分別處於特定的範圍內。結果認為當對含鎳粒子進行加熱時,藉由粒子表面的硫化物與矽成分的反應產物,而抑制於相對低溫的熱縮。[實施例]After drying, a nickel-containing powder is obtained, in which at least a portion of the surface of the nickel particles (core particles) is covered by a silicon-containing coating. The nickel-containing particles exhibit the following tendency: the peak positions and full width at half maximum (FWHM) of the peaks in the Si-Kα spectrum obtained by soft X-ray emission spectroscopy are respectively within specific ranges. It is concluded that when the nickel-containing particles are heated, thermal shrinkage at relatively low temperatures is suppressed by the reaction products of sulfides and silicon components on the particle surface. [Example]
其次,試製本發明的含鎳粒子並確認其效果,這將在下文中進行說明。但是,這裡的說明只是為了單純地例示,不欲限定於此。Next, the nickel-containing particles of this invention were prototyped and their effects were confirmed, which will be explained below. However, the explanation here is merely illustrative and is not intended to be limiting.
(實施例1及2)藉由氣相還原法,進行如上所述的氯化步驟及還原步驟、以及之後的與含硫化合物的接觸,而製作粒徑為180 nm的鎳粒子(核心粒子)的粉末。與含硫化合物的接觸是藉由向包含鎳粒子的液體中添加含硫化合物的乙醇溶液,並在常溫(20℃)使超聲波作用30分鐘而進行的。然後,利用氣流乾燥機進行乾燥,在大氣中以200℃加熱30分鐘。此處,藉由變更含硫化合物的添加量,而如表1所示獲得硫含量不同的複數種鎳粒子。另外,在深度方向上距離鎳粒子表面2 nm位置處的硫的局部濃度C2(atm%)相對於在深度方向上距離鎳粒子表面5 nm位置處的硫的局部濃度C1(atm%)的濃度比(C2/C1),在實施例1中為5.5倍,在實施例2中為7.8倍。(Examples 1 and 2) Nickel particles (core particles) with a particle size of 180 nm were produced by performing the chlorination and reduction steps described above, followed by contact with a sulfur-containing compound, using a gas-phase reduction method. The contact with the sulfur-containing compound was performed by adding an ethanol solution of the sulfur-containing compound to a liquid containing the nickel particles and then subjecting it to ultrasonic treatment at room temperature (20°C) for 30 minutes. Then, drying was carried out using an airflow dryer and heated at 200°C in the atmosphere for 30 minutes. Here, by varying the amount of sulfur-containing compound added, several types of nickel particles with different sulfur contents were obtained, as shown in Table 1. Furthermore, the ratio (C2/C1) of the local sulfur concentration C2 (atm%) at a position 2 nm away from the surface of the nickel particles in the depth direction to the local sulfur concentration C1 (atm%) at a position 5 nm away from the surface of the nickel particles in the depth direction is 5.5 times in Example 1 and 7.8 times in Example 2.
然後,對各鎳粒子的粉末進行包覆,用包含矽的覆蓋層來覆蓋鎳粒子(核心粒子)的表面的至少一部分,而製造含鎳粒子。具體來說,向包含表1中所示的矽添加劑的漿料中投入鎳粒子的粉末並進行混合,歷時1小時對該漿料進行攪拌。由此,獲得含鎳粒子。Then, the nickel particle powder is coated with a silicon-containing coating layer to cover at least a portion of the surface of the nickel particles (core particles), thereby producing nickel-containing particles. Specifically, nickel particle powder is added to a slurry containing the silicon additives shown in Table 1 and mixed, and the slurry is stirred for 1 hour. Thus, nickel-containing particles are obtained.
(比較例1)獲取其他公司所製造的鎳粒子。在深度方向上距離鎳粒子表面2 nm位置處的硫的局部濃度C2(atm%)相對於在深度方向上距離鎳粒子表面5 nm位置處的硫的局部濃度C1(atm%)的濃度比(C2/C1)為1.9倍。對此,以與實施例1同樣的方式進行包覆,而獲得含鎳粒子。(Comparative Example 1) Nickel particles manufactured by another company were obtained. The concentration ratio (C2/C1) of sulfur at a location 2 nm away from the surface of the nickel particles in the depth direction (C2(atm%)) relative to the local concentration of sulfur at a location 5 nm away from the surface of the nickel particles in the depth direction (C1(atm%)) was 1.9 times. Nickel-containing particles were obtained by coating in the same manner as in Example 1.
(比較例2)除了未對鎳粒子的粉末進行包覆以外,藉由實施例1及2的製法來製作鎳粒子的粉末。在深度方向上距離鎳粒子表面2 nm位置處的硫的局部濃度C2(atm%)相對於在深度方向上距離鎳粒子表面5 nm位置處的硫的局部濃度C1(atm%)的濃度比(C2/C1)為9.9倍。(Comparative Example 2) Except that the nickel particle powder was not coated, nickel particle powder was prepared by the methods of Examples 1 and 2. The concentration ratio (C2/C1) of the local sulfur concentration C2 (atm%) at a position 2 nm away from the surface of the nickel particles in the depth direction to the local sulfur concentration C1 (atm%) at a position 5 nm away from the surface of the nickel particles in the depth direction was 9.9 times.
(評價)藉由上文所述的方法對以上述方式所獲得的各含鎳粒子的硫含量(S含量)、矽含量(Si含量)進行測定,結果如表1所示。將實施例1及比較例1的鎳粒子的利用STEM-EDS所得的深度方向的硫濃度的分析結果示於圖2中。另外,含鎳粒子的粒徑為180 nm。(Evaluation) The sulfur content (S content) and silicon content (Si content) of each nickel-containing particle obtained in the above manner were measured using the method described above, and the results are shown in Table 1. The analysis results of the sulfur concentration in the depth direction of the nickel particles of Example 1 and Comparative Example 1 obtained by STEM-EDS are shown in Figure 2. In addition, the particle size of the nickel-containing particles is 180 nm.
另外,根據上文所述的順序及條件,藉由軟X射線發射光譜法(SXES)對各含鎳粒子進行分析,而獲得Si-Kα光譜後,確認該Si-Kα光譜的峰的峰頂位置及半峰全寬。將其結果示於表1中。Furthermore, following the order and conditions described above, each nickel-containing particle was analyzed using soft X-ray emission spectroscopy (SXES) to obtain the Si-Kα spectrum. The peak positions and full width at half maximum (FWHM) of the Si-Kα spectrum were then confirmed. The results are shown in Table 1.
另外,進行確認各含鎳粒子的耐熱性的試驗。在該試驗中,在800℃對含鎳粒子進行加熱而製作燒成膜,並以目視確認拍攝該燒成膜所得的影像,由此根據下述標準進行耐熱性的評價。○維持粒子形狀△部分地維持粒子形狀×未維持粒子形狀In addition, tests were conducted to confirm the heat resistance of each nickel-containing particle. In this test, the nickel-containing particles were heated to 800°C to create a sintered film, and images of the sintered film were visually verified by photographing. The heat resistance was then evaluated according to the following criteria: ○ Maintaining particle shape △ Partially maintaining particle shape × Not maintaining particle shape
[表1]
以上內容暗示了本發明的含鎳粒子有可能在加熱時有效地抑制於特定溫度的熱縮。The above suggests that the nickel-containing particles of this invention may effectively suppress thermal shrinkage at a specific temperature during heating.
Sp:峰頂的強度Pt:峰頂位置Wh:峰的半峰全寬Sp: Peak intensity; Pt: Peak position; Wh: Half-peak width of the peak.
[圖1]是表示利用軟X射線發射光譜法對含鎳粒子進行分析所得的Si-Kα光譜的一例的圖表。[圖2]是表示實施例1及比較例1的鎳粒子(核心粒子)的利用STEM-EDS所得的深度方向的硫濃度的分析結果的圖表。[Figure 1] is a chart showing an example of the Si-Kα spectrum obtained by analyzing nickel-containing particles using soft X-ray emission spectroscopy. [Figure 2] is a chart showing the analysis results of sulfur concentration in the depth direction of nickel particles (core particles) of Example 1 and Comparative Example 1 obtained by STEM-EDS.
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