KR19990086301A - Method and setting device for foreign material inspection area of solid-state imaging device - Google Patents

Abstract

The inspection area is set by dividing the imaging area so that the foreign matter adhering to the imaging area of the solid-state imaging device manufactured can be inspected accurately.

The present invention shows arbitrary axial and axial axis segments by performing learning according to each solid-state image sensor to store a predetermined learning value, and the axial and axial axis segments and the outline of the case of the solid-state image sensor are Detects and stores the value of the intersection point as a learning value, and sets and saves the offset point and the inspection area based on the reference point. Find the point corresponding to the learning value by plotting arbitrary axial and axial line segments on the image pickup device, and then show the axial and axial lines at that point to set the intersection point as the reference point, and then The inspection area is set after finding the offset point, and the inspection area is set by dividing into four parts. The imaging area is divided into first to fourth quadrants, and each of the first to fourth quadrants is divided. In addition to detecting and storing the existing learning value, the offset point and inspection area based on the reference point are set and stored.In the foreign material inspection mode, the reference point is found in the first to fourth quadrants, and the offset point is found from the reference point. After that, set the inspection area and perform foreign material inspection.

Description

Method and setting device for foreign material inspection area of solid-state imaging device

The present invention is a test for inspecting whether a mote is attached to an image capturing area of a solid-state image sensor such as a CCD (Charge Coupled Device) used to photograph a predetermined subject in various cameras such as an industrial camera and a surveillance camera. A foreign material inspection area setting method and setting device for a solid-state imaging device for setting an area.

The solid-state imaging device is a kind of sensor that converts an incident light amount into an electrical signal and outputs the electrical signal.

When foreign matter exists in the imaging area of the solid-state imaging device, the amount of incident light is affected. As a result, the magnitude of the image signal output from the solid-state imaging device is changed, so that the subject cannot be captured clearly.

Therefore, one of the most important items to be managed when manufacturing a solid-state imaging device is a foreign material inspection, which manufactures the solid-state imaging device in a clean environment, and inspects whether the foreign-body is attached to the imaging area. Foreign object inspection is being performed.

In the conventional foreign material inspection, the operator visually inspected whether foreign materials exist in the imaging area of the solid-state imaging device.

However, when the worker visually inspects the foreign matter, the detection power of the foreign matter varies depending on the ability of the operator, and it is very difficult to detect the size of the foreign matter adhering to the imaging area.

In addition, the inspection of the foreign matter with the naked eye causes a lot of fatigue in the eyes of the worker, it is difficult to carry out the foreign matter inspection continuously, there was a problem of low work capacity.

Accordingly, an object of the present invention is to provide a foreign material inspection area setting method and setting device for a solid-state imaging device that sets the inspection area so that the foreign matter attached to the imaging area of the solid-state imaging device can be accurately inspected using a camera.

Another object of the present invention is to provide a foreign material inspection area setting method and a setting apparatus of a solid-state imaging device for dividing an imaging area of a solid-state imaging device and inspecting the foreign material by setting the divided imaging area as an inspection area.

According to the foreign material inspection area setting method and setting device of the solid-state imaging device of the present invention for achieving this object, by performing the learning (teaching) according to each solid-state imaging device to store a predetermined learning value as an arbitrary X axis And the Y-axis line segment, the X-axis and Y-axis line segment and the point of intersection of the case of the solid-state image pickup device is detected and stored as a learning value, and the offset point and inspection area based on the reference point Set and save.

When the foreign material inspection mode is set, the solid-state image pickup device is positioned and the arbitrary X-axis and Y-axis line segments are shown on the solid-state image pickup device to find the point corresponding to the learning value. Set the intersecting point as the reference point by showing the axis line, find the offset point at the set reference point, and set the inspection area.

Herein, the present invention divides an imaging area into four divisions to set an inspection area. The imaging area is divided into first to fourth quadrants, and the learning values are detected and stored in each of the divided first to fourth quadrants, and the reference point is referred to. Set and store the offset point and the inspection area, and in the foreign material inspection mode, find the reference point in the first to fourth quadrants, find the offset point in the reference point, and then set the inspection area.

1 is a perspective view showing a boat for transporting a solid-state imaging device in the inspection region setting apparatus of the present invention,

2 is a block diagram showing the configuration of the inspection area setting apparatus of the present invention;

3 is a plan view showing the boat transport means for transporting the boat in the inspection area setting apparatus of the present invention,

Figure 4 is a side view showing the boat transport means for transporting the boat in the inspection area setting apparatus of the present invention,

5 is a view showing a camera transfer means in the inspection area setting apparatus of the present invention,

6 is a signal flow diagram illustrating a test area setting method of the present invention;

7 is a signal flow diagram illustrating a learning mode routine of FIG. 6;

8 is a signal flowchart showing the operation of the foreign material inspection mode routine of FIG. 6;

9 is a view illustrating a state in which arbitrary X-axis and Y-axis line segments are shown on a solid-state imaging device in the inspection region setting method of the present invention;

10 is a view for explaining an operation of finding a reference point, an offset point and an inspection area in the inspection area setting method of the present invention;

11 is a view showing an example in which the inspection region of the solid-state imaging device is divided into four in the inspection region setting method of the present invention.

* Description of the symbols for the main parts of the drawings *

10 boat 11: solid-state image sensor

112: case 20 of the solid-state image sensor

21: camera 22: video signal processor

24: key input unit 25: boat transport means

26 camera transfer means

Hereinafter, with reference to the accompanying drawings will be described in detail the foreign material inspection area setting method and setting device of the solid-state imaging device of the present invention.

1 is a perspective view showing a boat for transporting a solid-state imaging device.

Here, reference numeral 10 denotes a boat, and reference numeral 11 denotes a solid-state imaging device.

The boat 10 is provided with a plurality of seating holes 101 for seating the solid-state imaging element 11, a plurality of boat transport means 12 to be described later on one side to transport the boat 10 Of the feed holes 102 are drilled.

The solid-state imaging device 11 includes an imaging area 112 at the center of the case 111, a lead frame 113 is provided at a periphery of the case 111, and a bent portion of the lead frame 113 is seated on the seat 111. It is seated in the boat 10 in a state of being fitted in the hole 101.

2 is a block diagram showing the configuration of the inspection area setting apparatus of the present invention.

As shown therein, the control unit 20 performs training on the solid-state imaging device 1 to inspect the foreign material, finds a learning value, and controls the setting operation of the reference point, the offset point, and the inspection area using the learning value. And a camera 21 for photographing the solid-state imaging device 11, an image signal processor 22 for processing and inputting an image signal captured and output by the camera 21 to the controller 20, and the controller. A memory 23 for storing and outputting the learning value, the offset point, and the inspection area learned by 20, and instructing the setting of the learning mode and the foreign material inspection mode of the controller 20 according to the operator's operation, A key input unit 24 for setting a point and an inspection area, a boat transfer unit 25 for moving the boat 10 under the control of the control unit 20 to transfer the solid-state imaging element 11, and the control unit Under the control of 20, the camera 21 It consists of the camera moving means 26 which moves to an X-axis and a Y-axis.

3 and 4 are a plan view and a side view showing the boat transport means 25 for transporting the boat 10 to move the solid-state imaging element 11.

The boat transfer means 25 is rotated by the feed screw 252 is installed in the rotation drive unit 251 for generating a rotational force, the transfer unit body 253 is installed on the feed screw 252 of the feed screw 252 In accordance with the rotation, the transfer unit body 253 moves forward and backward.

And the lifting unit 254 is installed in the transfer unit main body 253 is moved up and down in accordance with the driving of the lifting control means (not shown in the figure), such as a solenoid installed in the transfer unit main body 253.

The transfer part 255 is fixed to an end of the lifting table 254, and a transfer protrusion 256 fitted to the transfer hole 101 is provided on the bottom surface of the transfer part 255.

5 is a view showing the camera transfer means 26 in the inspection area setting apparatus of the present invention.

Here, reference numeral 261 denotes an X-axis moving unit, and reference numeral 262 denotes a Y-axis moving unit provided in the X-axis moving unit 261.

The X-axis moving unit 261 and the Y-axis moving unit 262 are provided with driving motors 263 and 264, respectively, and the Y-axis moving unit 262 is provided with the camera 21 and a driving motor 263. As the X-axis moving unit 261 and the Y-axis moving unit 262 are moved according to the driving of the 264, the camera 21 moves on the X-axis and the Y-axis.

In the inspection area setting apparatus of the present invention configured as described above, the operator operates the key input unit 24 to set the learning mode, and inputs the model name of the solid-state imaging device to be learned.

Then, the control unit 20 drives the boat transfer means 25 to position the solid state imaging element 11 in position.

That is, the control unit 20 drives the lift control means provided in the transfer unit main body 256 to lower the lift table 254 and the transfer protrusion 257 of the transfer unit 256 moves the transfer hole 101 of the boat 10. )

In this state, the control unit 20 drives the rotation driving unit 251 to rotate the feed screw 252.

Then, the transfer unit body 253 is transferred according to the rotation of the transfer screw 252, and the transfer unit 256 transfers the boat 10 according to the transfer of the transfer unit body 253, and the solid-state imaging mounted on the boat 10 is carried out. The element 11 is conveyed and placed in place.

When the solid state image pickup device 11 is positioned in this manner, the control unit 20 controls the camera transfer means 26 to transfer the camera 21 to the X and Y axes from the top of the solid state image pickup device 11. Let's go.

That is, as the driving motor 263 is driven, the Y-axis moving unit 262 installed in the X-axis moving unit 261 moves to the X-axis, and as the driving motor 264 is driven, the Y-axis moving unit ( As the camera 21 installed in the 262 moves on the Y axis, the control unit 20 drives the drive motors 263 and 264 of the camera transfer means 26 so that the camera 21 is a solid-state imaging device 11. Position it on top of

In this state, the camera 21 photographs the solid-state image sensor 11 to output an image signal, and the output image signal is processed by the image signal processor 22 and input to the controller 20.

When the video signal photographing the solid-state imaging device 11 is input in this way, the control unit 20 shows arbitrary X-axis and Y-axis line segments in the video signal of the solid-state imaging device 11 to be input, and the X-axis and The image value of the point where the Y-axis line segment intersects the outline of the case 111 of the solid-state image sensor 11 is set as a learning value and stored in the memory 23.

Next, the operator stores the coordinates of the offset point in which the inspection area is set and the range of the inspection area based on the reference point determined by the stored learning value in the memory 23 as the operator inputs.

Here, the learning value, the offset value, and the range of the inspection area are stored in the memory 23 together with the model name input by the operator.

In this state, when the operator operates the key input unit 24 to set the foreign material inspection mode and inputs the model name of the solid-state imaging element 11 to be inspected, the controller 20 first displays the corresponding model name in the memory 23. The learning value, offset point, and range of the inspection area for the solid-state imaging element 11 are read.

Next, the boat transport means 25 is controlled to position the solid-state imaging device 11 in position, and the camera transport means 26 is controlled to allow the camera 21 to photograph the solid-state imaging device 11, and then the camera 21. Inputs a video signal of the solid-state imaging element 11 to be photographed.

When the video signal of the solid-state imaging device 11 is input in this way, the control unit 20 shows arbitrary X-axis and Y-axis segments on the input video signal, and moves along the arbitrary X-axis and Y-axis segments. Compare the image value with the learning value and find the same point.

After finding the point where the image value and the learning value are the same, set the point of intersection by showing the Y-axis and the X-axis segment at that point, and find the position of the offset point based on the set reference point. The inspection area is set in the range of the inspection area, and the foreign material inspection of the imaging area 112 of the solid-state imaging element 11 is performed.

Here, the present invention performs a foreign material inspection by dividing the imaging area 112 of the solid-state imaging device 11 by moving the camera 21 to the first to fourth quadrants in the learning mode while finding and storing a learning value. Stores the offset value and the range of the inspection area input by the operator, and when performing the foreign material inspection mode, finds the reference point by finding the point corresponding to the learning value while moving the camera to the first to fourth quadrants, and based on the reference point. The foreign material inspection is performed by setting the position of the offset point and the range of the inspection area.

6 is a signal flow diagram illustrating a test area setting method of the present invention.

As shown therein, the control unit 20 performs an initialization operation in step S10, and when a key signal is input in step S11, determines whether the learning key is input in step S12, and in step S13. In step S14, it is determined whether the foreign material inspection key is input, and the learning mode is set in step S14 when the learning key is input, and the foreign material inspection mode is set in step S15 when the foreign material inspection key is input.

In the next step (S16), the set operation mode is determined, and when the determination result is the learning mode, the learning mode routine is performed in step S17, and when the determination result is the foreign material inspection mode, the foreign material inspection mode routine is performed in step S18. Perform.

The learning mode routine of step S17 is performed when the operator inputs the model name of the solid-state imaging element 11 to be learned by operating the key input unit 24 in step S171, as shown in FIG. In step S172, the solid-state image pickup device 11 of the corresponding model name is positioned at the position to be learned, and in step S173, any of the axial and axial axes 113 in the first to fourth quadrants as shown in FIG. (114) is set.

In a next step (S174), the image values of the points (115) and (116) where the arbitrary axis and the axis line segments (113) 114 and the outline of the case 111 of the solid-state image sensor 11 intersect are extracted. The value of the extracted image is set as a learning value in step S175 and stored together with the model name in the memory 23.

In the next step S176, the operator stores the range of the offset point and the inspection area inputted by manipulating the key input unit 24, and in step S177, the entire quadrant of the imaging area 112 of the solid-state imaging device 11 Determine if learning for has been completed.

When the learning of the entire quadrant is not completed in step S177, the process returns to step S173, and the learning of the entire quadrant is performed to store the learning value, the offset point, and the range of the inspection area, and the learning of the whole quadrant is completed. If so, return.

8 is a signal flowchart showing the operation of the foreign material inspection mode routine of step S18.

As shown in the figure, when the operator operates the key input unit 24 to input the model name of the solid-state imaging device 11 to be inspected for foreign matter in step S181, the control unit 20 corresponds to the model name in step S182. The range of the learning value, the offset point, and the inspection area of the solid-state imaging element 11 is read, and the boat transfer means 25 is controlled in step S183 to move the solid-state imaging element 11 to be inspected for foreign matter in the transport and in-situ position. Position it.

In the next step S184, the X-axis and Y-axis line segments 113 and 114 are shown in the first to fourth quadrants as shown in FIG. 10, and the X-axis and Y-axis line segments 113 and 114 are shown. Next, the image 115 is searched for points 115 and 116 corresponding to the learning value.

When the points 115 and 116 corresponding to the learning values are found, the Y-axis line and the X-axis line intersect by showing the Y-axis line and the X-axis line based on the points 115 and 116 in step S185. The point to be determined is the reference point 117.

In this way, when the reference point 117 is determined, the offset point 118 is found as the offset value in step S186, and the inspection area of the solid-state imaging element 11 is determined in the range of the inspection area in step S187. .

That is, the value of the offset is given by the values of the X-axis and Y-axis coordinates, and the offset point 118 is found by moving the coordinates according to the offset value with respect to the reference point 117, and at this offset point 118 The inspection area is set to the values of the X and Y axes of the inspection area range.

When the inspection area is set in this way, the foreign material inspection is performed in step S188, and it is determined whether the foreign material inspection of the entire quadrant is completed in step S189.

If the foreign material inspection of the entire quadrant is not completed in step S189, the process returns to step S184, and the inspection area is set in the first to fourth quadrants to perform the foreign material inspection.

For example, a foreign material inspection of the first to fourth quadrants in which the imaging region 112 of the solid-state imaging element 11 is divided into four regions as shown in FIG. 11 is performed.

When the foreign material inspection of the entire quadrant is completed in step S189, the process returns.

As described above, according to the present invention, by inspecting the foreign matter adhering to the imaging area of the solid-state imaging device using a camera, the foreign material can be inspected accurately, the size of the inspected foreign matter can be easily measured, and the imaging area By dividing into 4 to inspect the foreign matter, it is possible to accurately inspect the fine foreign matter.

Claims (8)

A mode setting process of selectively setting a learning mode and a foreign material inspection mode according to the input of the learning key and the foreign material inspection key; When the learning mode is set in the mode setting process, an image of arbitrary X-axis and Y-axis segments is shown while photographing a solid-state image sensor with a camera, and an image of an intersection point of the arbitrary X-axis and Y-axis line segments with the solid-state image sensor. A learning mode process of storing a value as a learning value and storing an offset value input by an operator and a range of an inspection area; And When the foreign material inspection mode is set in the mode setting process, the learning value, the offset value, and the range of the inspection area stored in the learning mode process are read, and arbitrary X- and Y-axis segments are taken while photographing the solid-state image sensor with the camera. After extracting the image values of the X-axis and Y-axis segments, find the position of the learning value, set the reference point, move the offset value from this reference point, set the inspection area according to the range of the inspection area, and perform the foreign material inspection. A method for setting a foreign material inspection region of a solid-state imaging device, characterized in that the foreign material inspection process performed. The method of claim 1, In the learning mode process, when the operator inputs the model name of the solid-state imaging device, the learning mode is performed. In the foreign material inspection process, the foreign material inspection area setting method of the solid-state imaging device, characterized in that the foreign material inspection is performed after reading the corresponding learning value, offset value and the range of the inspection area as the operator enters the model name. The method of claim 1, In the learning mode process, the imaging area of the solid-state imaging device is divided into four and divided into first to fourth quadrants, and learning is performed on each divided quadrant to store a learning value, an offset value, and a range of an inspection area. The foreign material inspection region is a foreign material inspection region setting method of the solid-state imaging device, characterized in that the foreign material inspection is performed by finding a reference point with a learning value in the divided first to fourth quadrants, finding an offset point, and setting an inspection region. The method of claim 1, The foreign material of the solid-state imaging device, wherein the intersection point of the arbitrary X-axis and Y-axis line segments and the solid-state image pickup device in the learning mode process is the point where the X-axis and Y-axis line segments and the outline of the case of the solid-state image pickup device cross each other. How to set up inspection area. The reference point of the foreign material inspection process shows a Y-axis and an X-axis line at an intersection point of an arbitrary X-axis and Y-axis line segment with a solid-state image sensor, and the Y-axis and X-axis lines intersect each other. A foreign material inspection region setting method for a solid-state imaging device, characterized in that the point. A controller configured to perform learning about a solid-state imaging device to inspect a foreign object, find a learning value, and control a setting operation of a reference point, an offset point, and an inspection area using the learning value; A camera for photographing the solid-state imaging device; An image signal processor configured to process an image signal captured by the camera and output the image signal to the controller; A memory for storing and outputting the learning value, the offset point, and the inspection area learned by the controller; A key input unit for setting a learning point and a foreign material inspection mode of the controller and setting an offset point and an inspection area according to an operator's operation; Boat transport means for transporting the solid-state imaging element seated by moving the boat under the control of the controller; And And a camera moving means for moving the camera on the x-axis and the y-axis according to the control of the controller. The boat transport system of claim 6, wherein the boat transport means; A feed screw that is installed and rotated in a rotation drive unit that generates rotational force; A transfer unit body installed in the transfer screw to move forward and backward according to the rotation of the transfer screw; A lifting table installed in the main body of the transfer unit and being lifted up and down according to the driving of the lifting control means; A transfer unit installed on the platform and moved back and forth together with the transfer unit body according to the elevation of the platform; And The foreign material inspection region setting apparatus of claim 1, wherein the foreign body is configured to include a transfer protrusion which protrudes from a lower surface of the transfer portion and fits into a transfer hole of the boat. The method of claim 6, wherein the camera transfer means; X-axis moving unit; A Y-axis moving unit installed in the X-axis moving unit; A driving motor provided in the X-axis moving unit and the Y-axis moving unit, respectively; And And a camera installed in the Y-axis moving unit and configured to move in an X-axis and a Y-axis according to the driving of the driving motor.