JP2822814B2 - Diamond tools - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cutting tool for cutting, and more particularly to a diamond tool capable of mirror-finishing hard and brittle materials such as silicon.

[0002]

BACKGROUND OF THE INVENTION Diamond tool having a single-crystal diamond tip, it is possible to sharply formed wound a cutting edge, known as specular cutting tool of nonferrous metal material such as copper or aluminum. As this cutting tool, there is one having a structure as shown in FIG. 12, for example. To explain this, reference numeral 1 in the drawing denotes a shank, and a base 2 is mechanically fixed to the shank 1, and a single crystal diamond chip 3 is joined to the base 2 with a brazing material. The single crystal diamond tip 3 has a rake face 3a and a flank face 3a.
b are formed, and the intersection lines 3c on both sides constitute the cutting edge ridge.

[0003] By the way, single crystal diamond chip 3
In general, as described in page 72 of “Advances in Mirror Finishing Technology” issued by the Sogo Gijutsu Center (May 25, 1992, first edition), the ease of polishing and The rake face 3a is a (110) face because the loss is small. Also, the flank 3b is set to (00
1) Surface. FIG. 13 illustrates this FIG. 12 as an octahedron composed of cleavage planes 4 of diamond.

[0004]

SUMMARY OF THE INVENTION Diamond tools
In the processing of hard and brittle materials such as silicon, mirror finishing can be performed in the same manner as copper and aluminum. However,
In the processing of hard brittle materials such as silicon, unlike abrasion wear seen in the processing of copper, aluminum, etc.,
Since the tool wear progresses due to micro chipping, there is a problem that the sharpness of the cutting edge is not maintained and a mirror surface cannot be obtained continuously.

Accordingly, the present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to provide a diamond tool capable of continuously performing a mirror surface machining of a hard and brittle material such as silicon. To provide.

[0006]

In order to achieve this object, a diamond tool according to the present invention forms a single crystal diamond tip, which is a cutting edge of a diamond tool, in an appropriate crystal orientation. That is, in the diamond tool according to the present invention, the crystal orientation of the cutting edge of the diamond tip coincides with the <1X0> direction, and the crystal orientation of the flank is (11).
X) is set between the (110) plane and the cutting edge of the single crystal diamond tip is aligned with the intersection line of the octahedron composed of the cleavage planes of the diamond, and the flank and the rake face are changed to the rake face. The cleavage plane is located between 32.25 ° toward the face. Further, in the diamond tool according to the present invention, the crystal orientation of the flank of the diamond chip is defined as ( 11X ) plane, and the crystal orientation of the rake face is defined as (101) plane or (01).
1) The plane is set so that the rake face of the single crystal diamond chip includes the intersection line of the octahedron composed of the cleavage plane of diamond, and the cleavage plane coincides with the flank.

[0007]

According to the present invention, as in the case of the conventional diamond tool, the wear of the tool proceeds by micro-chipping as well as the processing, but the cleavage formed by the cleavage surface is located near the cutting edge of the cutting edge of the tool. The surface ridge becomes a sharp cutting edge, and the mirror finish is maintained. Further, it is known that a negative rake angle works effectively in the processing of hard and brittle materials, but according to the present invention, since the cleavage surface is arranged at the position of the negative rake angle, mirror finishing is more effective. Easier to do.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a side view of a first embodiment of the diamond tool according to the present invention. In the figure, 1 is a shank, 2 is a base, 3
Is a single crystal diamond chip, and the crystal orientation of the rake face 3a of the single crystal diamond chip 3 is (112)
The crystal orientation of the flank 3b is set to the (11X) plane , and the crystal direction of the cutting edge 3c is made to coincide with the <1X0> direction. Here, X is represented by the following equation.

[0009]

[Expression 1] X =

FIG. 2 shows the relationship between the cutting distance and the surface roughness when the work material is silicon as a comparison between the first embodiment of the present invention and a conventional tool. As is apparent from this figure, the conventional tool has a longer cutting distance and worsened surface roughness. However, when the tool of the first embodiment of the present invention is used, the initial surface roughness deteriorates. However, after that, a stable processed surface with a surface roughness of about 10 nm Ra was obtained.

FIG. 3 is a side view of a second embodiment of the present invention. In the second embodiment, the crystal orientation of the rake face 3a of the single crystal diamond chip 3 is set to the (001) plane, the crystal orientation of the flank face 3b is set to the (110) plane , and the crystal of the cutting edge 3c is set. The direction is matched with the <1X0> direction. Also in the second embodiment, as shown in FIG. 4, stable surface roughness is obtained as in the first embodiment.

Incidentally, in the tools of the first and second embodiments described above, similarly to the conventional tools, tool wear is progressing due to accumulation of micro chipping. FIG. 5 shows the relationship between the cutting distance and the area of the rake face on which the tool is worn, in comparison with a conventional tool. As is apparent from this figure, the tools of the first and second embodiments of the present invention have almost the same level of tool wear as the conventional tool.

[0013] Single crystal diamond has a cleaving property, and the crystal plane that is easily cleaved is the (111) plane. FIGS. 6 and 7 show the tools of the first and second embodiments described above in the form of an octahedron composed of cleavage planes.
As can be seen from these figures, in both tools, since the intersection line of the octahedron coincides with the cutting edge, as described above,
Even if tool wear progresses due to micro chipping, the ridge formed by the cleaved surface becomes a cutting edge, and mirror finishing can be performed.

In the first and second embodiments described above, the crystal orientation of the flank 3b is changed to the (11X) plane and the (1X) plane.
10) Fixed to the surface, but not limited to this, (11X)
Similar effects can be obtained by setting the distance between the plane and the (110) plane.

FIG. 8 is a side view of a third embodiment of the present invention. In the third embodiment, the crystal orientation of the rake face 3a of the single crystal diamond chip is set to the (101) plane or the (0) plane.
The crystal orientation of the flank 3b is set to the (11X) plane. By setting as described above, in the first and second embodiments described above, the cutting edge of the single crystal diamond tip is made to coincide with the intersection line of the octahedron composed of the cleavage plane of the diamond, and the flank and the flank are formed. The cleavage plane is set to be between 32.25 ° from the surface to the rake face. In the third embodiment, the cleavage face of the diamond is formed on the rake face 3a of the single crystal diamond chip. Includes the octahedral intersection that is composed,
The cleavage surface is set so as to coincide with the flank 3b.

FIG. 9 shows the relationship between the cutting distance and the surface roughness when the work material is silicon as a comparison between the third embodiment and the conventional tool. As is clear from this drawing, a stable surface roughness is obtained as in the first and second embodiments. FIG. 10 shows the relationship between the cutting distance and the area of the rake face on which the tool was worn, in comparison with the conventional tool. As is clear from this figure, the tool wear progresses with the machining, but the surface roughness increases. Is much better than the conventional tool,
The following surface roughness is obtained.

This is because the intersection line of the octahedron exists near the cutting edge ridge, as can be seen from FIG. 11 in which the tool of the third embodiment is shown as an octahedron composed of cleavage planes.
This is because even if tool abrasion progresses due to micro chipping, the ridge formed by the cleaved surface becomes a cutting edge, thereby enabling mirror finishing. Although the expression of the crystal plane in the above is based on a general crystallographic expression, the same effect can be obtained by forming a single crystal diamond chip in a crystal orientation equivalent to the above crystal orientation. Of course, it can be done.

[0018]

As described above, according to the present invention, the crystal direction of the cutting edge of the diamond tip coincides with the <1X0> direction, and the crystal orientation of the flank is (11X) plane and (11X) plane.
0) plane, the intersection line of the octahedron composed of cleavage planes is made to coincide with the cutting edge ridge, or the crystal orientation of the flank of the diamond chip is set to ( 11X ) plane, and the rake face is Since the crystal orientation was set to the (101) plane or the (011) plane, and the intersection line of the octahedron was present near the cutting edge, even if tool wear progressed due to micro chipping,
Ridgeline consisting of a cleavage plane becomes blade edges expired, a hard and brittle material such as silicon can be cut persist following good mirror table surface roughness 20NmRa.

[Brief description of the drawings]

FIG. 1 is a side view of a first embodiment of a diamond tool according to the present invention.

FIG. 2 is a diagram showing the relationship between the cutting distance and the surface roughness of the tool in the first embodiment of the diamond tool according to the present invention.

FIG. 3 is a side view of a second embodiment of the diamond tool according to the present invention.

FIG. 4 is a view showing a relationship between a cutting distance and a surface roughness of a tool in a second embodiment of the diamond tool according to the present invention.

FIG. 5 is a diagram showing the relationship between the cutting distance and the tool wear area in the first and second embodiments of the diamond tool according to the present invention.

FIG. 6 is an explanatory view showing a position of a cleavage surface in the first embodiment of the diamond tool according to the present invention.

FIG. 7 is an explanatory view showing the position of a cleavage surface in a second embodiment of the diamond tool according to the present invention.

FIG. 8 is a side view of a third embodiment of the diamond tool according to the present invention.

FIG. 9 is a view showing the relationship between the cutting distance of the tool and the surface roughness in a third embodiment of the diamond tool according to the present invention.

FIG. 10 is a diagram showing a relationship between a cutting distance and a tool wear area in a third embodiment of the diamond tool according to the present invention.

FIG. 11 is an explanatory view showing a position of a cleavage surface in a third embodiment of the diamond tool according to the present invention.

FIG. 12 is a side view of a third embodiment of the conventional diamond tool.

FIG. 13 is an explanatory view showing the position of a cleavage surface in a conventional diamond tool.

[Explanation of symbols]

 Reference Signs List 1 shank 3 single crystal diamond tip 3a rake face 3b flank face 3c cutting edge ridge 4 cleavage face

Claims (2)

(57) [Claims] 1. A diamond tool comprising a single-crystal diamond tip on which a cutting edge for cutting is formed and a shank holding the diamond tip, wherein the crystal direction of the cutting edge ridge of the diamond tip is <1.
1X0> direction, and the crystal orientation of the flank is (11X)
A diamond tool characterized by being set between a plane and a (110) plane. 2. A diamond tool comprising a single-crystal diamond tip on which a cutting edge for cutting is formed and a shank holding the diamond tip, wherein the crystal orientation of the flank of the diamond tip is ( 1)
A diamond tool characterized by having a (1X ) plane and a crystal orientation of a rake face set to a (101) plane or a (011) plane.