JP2004181591A - Single crystal diamond cutting tool - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform ultra-precision machining of a sealing face currently carried out manually at one process using a single crystal diamond cutting tool. <P>SOLUTION: A single crystal diamond flat cutting tool (cutting tool) is that when the width of the edge of a blade of a cutting tool is set to 1.6-11 mm, a feeding rate is preferably 1,500-2,500 mm/min, a distance L2 between a flank 2-3 which makes a clearance angle β 3 degrees and a dihedral angle 2-4 from a tip portion is preferably 0.1-0.2 mm, by preferably providing a reversing flank 2-2 having a reversing clearance angle α of 10'-30' (a height difference between the edge of a blade and a dihedral angle portion t=0.3-1.7 micrometers), since the depth of the cutting is preferably made 2-5 μm, without the chattering of the tool and the peeling of chips, a tearing action between a cutting face and the chips is carried out good, and also burnish finishing is carried out by the dihedral angle portion. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an ultra-precision cutting method using a single crystal diamond as a tip of a cutting tool, the tool, and a product manufactured by the cutting method. More specifically, the present invention relates to a cutting method for use in a mirror processing of a sealing member or a packing mounting groove for a vacuum chamber for maintaining a high vacuum in a semiconductor manufacturing apparatus or the like, a tool therefor, and a product thereof.
[0002]
[Prior art]
Conventionally, in such ultra-precision machining, after cutting a groove with an end mill, finishing is performed with a hail bite to finish the surface to a desired surface roughness, and then several types of files # 800, # 1200 , $ 2000, $ 3000, etc., and finally polishing with a liquid abrasive.
[0003]
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION The present invention provides a cutting method capable of performing high-precision machining in a short time in a single stroke, instead of the conventional method requiring many steps and labor to obtain a desired surface roughness. It is an object of the present invention to provide a single-crystal diamond cutting tool used for that purpose, and an aluminum alloy product subjected to such ultra-precision cutting.
[0004]
[Means for Solving the Problems]
The first means for solving the problem of the present invention has a reverse clearance surface with a reverse clearance angle α of 10 ′ to 30 ′ and a distance L from the cutting edge to the ridge angle of 0.1 to 0.2 mm. It is a single crystal diamond flat bite for aluminum alloy.
The second means for solving the problem of the present invention has a reverse clearance surface with a reverse clearance angle α of 10 ′ to 30 ′ and a distance L from the cutting edge to the ridge angle of 0.1 to 0.2 mm. This is a method of ultra-precision cutting of an aluminum alloy product using a single crystal diamond flat bite, a feed rate of 1500 to 2500 mm / min, and a cutting depth of 2 to 5 μm.
A third means for solving the problem of the present invention has a reverse flank where the reverse clearance angle α is 10 ′ to 30 ′ and the distance L from the cutting edge to the ridge angle is 0.1 to 0.2 mm. It is an aluminum alloy product having an annular sealing surface with a width of 1 to 11 mm, which is ultra-precisionly cut using a single crystal diamond flat bite at a feed rate of 1500 to 2500 mm / min and a cutting depth of 2 to 5 μm.
[0005]
BEST MODE FOR CARRYING OUT THE INVENTION
The single crystal diamond flat tool (cutting tool) according to the present invention has a flank with a cutting edge width of 1.6 to 11 mm, preferably at a feed rate of 1500 to 2500 mm / min and a clearance angle of 3 °. And the distance from the tip to the ridge angle is preferably 0.1 to 0.2 mm, and the reverse clearance angle is preferably 10 'to 30' (the difference in height t between the cutting edge and the ridge angle position is t = 0.3 to 1). (7 .mu.m), preferably with a cutting depth of 2 to 5 .mu.m, so that the cutting action between the cutting surface and the chips is reduced without chattering of the tool and chipping of the chips. It is performed well, and burnishing is performed at the corners.
Although the clearance angle was set to 3 ° for the time being, it is considered that the clearance angle may be any as long as the clearance surface does not contact the surface to be cut.
[0006]
【Example】
FIG. 1 shows an elevation view of a cutting tool according to one embodiment of the present invention. 1 is a shank and 2 is a single crystal diamond tip.
FIG. 2 shows a plan view of the cutting tool 1 according to one embodiment of the present invention. 1 is a cutting tool, 2 is a single crystal diamond tip, and 3 is a shank.
FIG. 3 shows a side view of the single crystal diamond tip 2 in one embodiment of the present invention. 2-1 is a reverse flank, 2-2 is a flank, 2-3 is a ridge angle, 2-4 is a rake face, 2-5 is a rear face, 2-6 is a top face, 7 is a left side surface. α is the reverse clearance angle, and β is the clearance angle. The rake angle of the rake face 2-4 is 0 °, which coincides with the face including the central axis of the shank 1. The reverse clearance angle α was 10 ′ to 30 ′, and the clearance angle β was 3 °.
[0007]
The distance L2 between the rake face 2-4 and the ridge angle 2-3 is preferably 0.1 to 0.2 mm when the width L1 of the chip 2 is 1.6 to 11.0 mm. If it is smaller than this, chatter tends to occur, and if it is larger than this, tearing tends to occur. The size of the chip 2 is, of course, determined by the size of the single crystal diamond to be produced.
FIG. 4 shows a plan view of the diamond tip 2. 2-3 is a ridge angle, 2-4 is a rake face, 2-5 is a rear face, 2-6 is a top face, and 2-7 is a left or right side face. γ was set to 1 ° in the side clearance angle. The thickness L3 of the chip 2 was about 5 to 10 mm. The radius 2-8 at the corner was set to 0.2 mm to prevent the generation of burrs.
FIG. 5 shows a bottom view of the diamond tip 2. 2-1 is the reverse flank, 2-2 is the flank, 2-3 is the ridge angle, 2-7 is the left and right side surfaces, δ is the side clearance angle, and the radius of the corner to be cut. Determined by
[0008]
For example, when the diamond tip width is 5 mm, the thickness L of the diamond tip is 5 to 10 mm, L1 is 0.2 mm, and the reverse clearance angle α is 10 ′ to 40 ′, preferably 15 ′ to 30 ′, The angle β was 3 °, the side clearance angle γ was 1 °, and δ was 1 ° 30 ′. As materials for aluminum alloy products, for example, vacuum chambers and the like, JIS-A5052 and JIS-A6063 were tried.
An embodiment of the ultra-precision cutting of the present invention will be described. In processing a seal (O-ring) mounting surface of a vacuum chamber used in a semiconductor manufacturing apparatus, a ten-point average roughness Rz = 3 μm including a peripheral portion is processed by an end mill, and a seal contact portion that contacts the O-ring is processed. Cutting was performed with the cutting tool 1 according to the present invention. This surface is irregular with a mixture of roughness (R) and undulation (W). In order to remove such irregularities on the surface and to obtain a predetermined surface roughness, the cutting tool 1 was rotated about three times, and the cutting tool 1 was released beyond the cutting position.
[0009]
The approach to reaching the predetermined cutting depth was 100 mm. The height h of the tip of the reverse flank when L1 = 0.2 mm is 0.9 μm when α = 15 ′ and 1.7 μm when α = 30 ′. In any case, the chip has a mirror-finished surface that comes into contact with the tool, and has a thin, continuous piece of chipping having a thickness of 0.012 to 0.015 mm (measured by a micrometer) at a cutting depth of 5 μm. Was. As a cutting agent for the aluminum alloy, an emulsion liquid of a water-soluble oil, an aqueous solution of a chemical agent, or a mineral oil is used. This water-soluble oil is inexpensive, has a high cooling effect, and has a high effect of removing chips, preventing the formation of a cutting edge and welding. An aluminum alloy such as JIS-A5052 or JIS-A6063 was used as the material to be cut. Diamond has a high thermal conductivity and a small coefficient of friction with metals, but easily reacts with iron. Single crystal diamond tools are often used for cutting light metals such as aluminum and magnesium alloys, copper alloys, and precious metals, but are not suitable for machining titanium, iron, nickel, molybdenum, tungsten, etc. .
[0010]
In this embodiment, the reverse clearance angle is set to 15 ', and the cutting tool 1 having a cutting edge width of 3.0 mm and a distance L2 of 0.1 mm is cut with a cutting depth of 5 µm and a feed speed of F2000 (mm / min). Measured by a non-contact surface roughness measuring device (SURFCOM 1800D manufactured by Tokyo Seimitsu Co., Ltd .; hereinafter, referred to as “surface roughness measuring device”) (JIS-1982 standard, cross-sectional measurement, measurement length = 0.25 mm) The surface roughness was Rmax = 0.304 μm and Rz = 0.273 μm in the circumferential (longitudinal) direction, and Rmax = 0.368 μm and Rz = 0.368 μm in the transverse direction.
Similarly, cutting was performed with a cutting tool 1 having a cutting edge width of 5.0 mm and a distance L2 of 0.2 mm at a cutting depth of 5 μm and a feed speed of F2000 (mm / min). Similarly, when measured with a surface roughness measuring device, the surface roughness was Rmax = 0.336 μm and Rz = 0.320 μm in the circumferential direction, and Rmax = 0.372 μm and Rz = 0.295 μm in the transverse direction.
[0011]
Similarly, cutting was performed with a cutting tool 1 having a cutting edge width of 10.0 mm and a distance L2 of 0.2 mm at a cutting depth of 5 μm and a feed speed of F1500 (mm / min). Similarly, when measured with a surface roughness measuring device, the surface roughness was Rmax = 0.364 μm and Rz = 0.317 μm in the circumferential direction, and Rmax = 0.324 μm and Rz = 0.287 μm in the transverse direction.
FIG. 6 is a table showing the cutting edge width, the feed speed, and the cutting depth. If the feed speed is higher than this, the shape (corner) will be distorted due to the mechanical characteristics, and if the feed speed is lower than this speed, deterioration will occur. The depth of cut is beyond the challenge due to the risk of cutting tool deficiency. In addition, when the cutting edge width is 1.6 mm, the distance L2 is 0.1 mm.
[0012]
【The invention's effect】
According to the present invention, the desired surface roughness can be obtained by removing the surface roughness and the undulation in the previous step in a certain width in one step. The cutting action between the cutting surface and the chip is performed well without the chattering of the tool and the chipping of the chips, and the burnishing is performed by the corner portion.
[Brief description of the drawings]
FIG. 1 shows an elevation view of a cutting tool according to one embodiment of the present invention.
FIG. 2 shows a plan view of the cutting tool 1 according to one embodiment of the present invention.
FIG. 3 is a side view of the single-crystal diamond tip 2 according to one embodiment of the present invention.
FIG. 4 is a plan view of a single crystal diamond chip 2 according to one embodiment of the present invention.
FIG. 5 is a bottom view of the single crystal diamond tip 2 according to one embodiment of the present invention.
FIG. 6 is a list of a cutting edge width, a feed speed, and a cutting depth.
[Explanation of symbols]
1 cutting tool 2 single crystal diamond tip

Claims (3)

A single crystal diamond flat tool for aluminum alloy having a reverse flank with a reverse clearance angle α of 10 'to 30' and a distance L from the cutting edge to the ridge angle of 0.1 to 0.2 mm. The reverse clearance angle α is set to 10 ′ to 30 ′, and the distance L from the cutting edge to the ridge angle is set to 0.1 to 0.2 mm. min and a cutting depth of 2 to 5 μm for ultra-precise cutting of aluminum alloy products. The reverse clearance angle α is set to 10 ′ to 30 ′, the distance L from the cutting edge to the ridge angle is set to 0.1 to 0.2 mm, a single crystal diamond flat tool is used, the feed speed is set to 2000 to 2500 mm / min, and the cutting depth is set. An aluminum alloy product having a seal surface with a width of 1 to 11 mm, which is ultra-precision cut with a height of 2 to 5 μm.

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