CN119197326A - A Line Spectrum Confocal Sensor - Google Patents
A Line Spectrum Confocal Sensor Download PDFInfo
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- CN119197326A CN119197326A CN202411248488.XA CN202411248488A CN119197326A CN 119197326 A CN119197326 A CN 119197326A CN 202411248488 A CN202411248488 A CN 202411248488A CN 119197326 A CN119197326 A CN 119197326A
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- light beam
- cylindrical lens
- confocal sensor
- lens assembly
- line spectrum
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
- G02B27/285—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining comprising arrays of elements, e.g. microprisms
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- Microscoopes, Condenser (AREA)
Abstract
The embodiment of the application discloses a linear spectrum confocal sensor, which comprises a light source system, wherein the light source system comprises at least one light source component which is linearly arranged and used for providing a first light beam transmitted along multiple directions, a first cylindrical lens component which is used for receiving the first light beam and carrying out collimation treatment on the first light beam to obtain a parallel second light beam transmitted along the same direction, a second cylindrical lens component which is used for receiving the second light beam and carrying out focusing treatment on the second light beam to obtain a third light beam transmitted along multiple directions, a third cylindrical lens component which is used for receiving the third light beam and carrying out collimation treatment on the third light beam to obtain a fourth light beam transmitted along the same direction, and the width of the fourth light beam is smaller than that of the second light beam received by the second cylindrical lens component and is determined by the beam shrinking ratio between the second cylindrical lens component and the third cylindrical lens component.
Description
Technical Field
The application relates to the technical field of spectral confocal ranging, in particular to a linear spectral confocal sensor.
Background
The spectral confocal sensor is an advanced optical sensing technology, and utilizes the optical confocal principle and the spectral analysis technology to realize the detection of the distance of a sample. With the development demand, the light beam transmitted in the current spectral confocal sensor has larger loss and low utilization rate.
Disclosure of Invention
The embodiment of the application provides a line spectrum confocal sensor, which comprises a light source system, wherein the light source system comprises:
At least one light source assembly arranged linearly and configured to provide a first light beam transmitted in multiple directions;
The first cylindrical lens component is used for receiving the first light beam, and carrying out collimation treatment on the first light beam to obtain a parallel second light beam transmitted along the same direction;
the second cylindrical lens component is used for receiving the second light beam and focusing the second light beam to obtain a third light beam transmitted along multiple directions;
And the width of the fourth light beam is smaller than that of the second light beam received by the second cylindrical lens component, and the width of the fourth light beam is determined by the beam shrinking ratio between the second cylindrical lens component and the third cylindrical lens component.
In the scheme, the light source system further comprises a first slit, and the width of the fourth light beam is determined by the width of the first slit.
In the above aspect, the beam reduction ratio is a ratio between the first focal length of the second cylindrical lens assembly and the second focal length of the third cylindrical lens assembly.
In the above aspect, the first focal length of the second cylindrical lens assembly and the second focal length of the third cylindrical lens assembly are selected according to the width of the first slit.
In the above aspect, the width of the first slit is equal to the arrangement length of the at least one light source assembly.
The system also comprises a light splitting system, wherein the light splitting system comprises a polarization beam splitting prism PBS and a glass slide;
The PBS is used for receiving the fourth light beam passing through the first slit and dividing the fourth light beam into a first sub-light beam and a second sub-light beam, wherein the first sub-light beam is P polarized light;
The included angle between the fast axis or the slow axis of the glass slide and the optical axis of the PBS is 45 degrees, and the glass slide is used for receiving a reflected light beam, rotating the polarization direction of the reflected light beam, enabling the reflected light beam to be totally incident into a spectrometer system contained in the linear spectrum confocal sensor through the PBS, wherein the reflected light beam is a light beam reflected by the first sub-light beam through a dispersion system contained in the linear spectrum confocal sensor and a measured object.
In the above scheme, the device further comprises a second slit;
The dispersion system is used for receiving the first sub-beam, respectively focusing the light with different wavelengths after axially dispersing the first sub-beam, and conducting the reflected light beam reflected by the measured object;
The second slit is used for filtering the reflected light beam;
The spectrometer system is used for receiving the filtered reflected light beam, focusing the reflected light beam onto a photosensitive subsystem included in the spectrometer system and quantifying the reflected light beam into a spectrum curve.
In the above scheme, the light source assembly comprises an LED light source.
In the scheme, the photosensitive subsystem comprises a photosensitive coupling component CCD.
In the scheme, the dispersion system comprises a dispersion focusing lens, a first focusing lens and a second focusing lens, wherein the dispersion focusing lens is used for receiving the first sub-beams, and carrying out axial dispersion and focusing on the first sub-beams respectively, wherein the monochromatic beams focused on the surface of the measured object are reflected to become the reflected beams.
The embodiment of the application provides a line spectrum confocal sensor. The linear spectrum confocal sensor comprises a light source system, a first cylindrical lens component, a second cylindrical lens component and a third cylindrical lens component, wherein the light source system comprises at least one light source component which is linearly arranged and is used for providing a first light beam transmitted along multiple directions, the first cylindrical lens component is used for receiving the first light beam and carrying out collimation processing on the first light beam to obtain a parallel second light beam transmitted along the same direction, the second cylindrical lens component is used for receiving the second light beam and carrying out focusing processing on the second light beam to obtain a third light beam transmitted along multiple directions, the third cylindrical lens component is used for receiving the third light beam and carrying out collimation processing on the third light beam to obtain a fourth light beam transmitted along the same direction, and the width of the fourth light beam is smaller than that of the second light beam received by the second cylindrical lens component and is determined by the beam shrinkage ratio between the second cylindrical lens component and the third cylindrical lens component. According to the linear spectrum confocal sensor provided by the embodiment of the application, the light source components are arranged linearly, and three groups of cylindrical lenses are used for converting light beams emitted by the light source into parallel light beams with the width determined by the beam shrinking ratio, so that all or most of the light beams emitted by the light source are applied to optical devices to be described later, and the purpose of improving the light beam utilization rate is realized.
Drawings
In the drawings, which are not necessarily drawn to scale, like numerals may describe similar components in different views. The same numbers with different letter suffixes may represent different instances of similar components. The drawings illustrate generally, by way of example and not by way of limitation, the various embodiments discussed in the present document.
FIG. 1 is a schematic diagram of a spectral confocal sensor according to an embodiment of the present application;
fig. 2 is a schematic structural diagram of a light source system according to an embodiment of the present application;
fig. 3 is a schematic structural diagram of a PBS included in a spectroscopic system according to an embodiment of the present disclosure;
Fig. 4 is a schematic propagation diagram of a beam line of a beam splitting system according to an embodiment of the present application;
the system comprises a 100-line spectral confocal sensor, a 10-light source system, a 20-light splitting system, a 30-dispersion system, a 40-spectrometer system, a 50-measured object, a 101-LED light source, a 102-first cylindrical lens component, a 103-second cylindrical lens component, a 104-third cylindrical lens component, a 105-first slit, a 201-PBS and a 202-1/4 glass slide.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application more apparent, the specific technical solutions of the present application will be described in further detail below with reference to the accompanying drawings in the embodiments of the present application. The following examples are illustrative of the application and are not intended to limit the scope of the application.
In the present embodiments, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or number of technical features indicated by implicit express names. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present application, unless otherwise indicated, the meaning of "a plurality" is two or more.
Furthermore, in the embodiments of the present application, the terms of orientation such as "upper," "lower," "left," and "right" are defined with respect to the orientation of the components shown in the drawings as schematically prevented, and it should be understood that these directional terms are relative terms used for description and clarity with respect thereto, which may vary accordingly in response to changes in the orientation of the components shown in the drawings.
In embodiments of the present application, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include any additional elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
In embodiments of the application, "exemplary" or "such as" is used to mean serving as an example, instance, or illustration. Any embodiment or reference to an embodiment in which an embodiment of the application is described as "exemplary" or "for example" is not necessarily to be construed as preferred or advantageous over other embodiments or designs. Rather, the use of words such as "exemplary" or "such as" is intended to present related concepts in a concrete fashion.
Referring to fig. 1, a schematic structural diagram of a line spectrum confocal sensor according to an embodiment of the application is shown. As shown in fig. 1, the line spectral confocal sensor 100 includes a light source system 10, wherein the light source system 10 may include:
at least one light source assembly 101 arranged linearly and configured to provide a first light beam transmitted in multiple directions;
a first cylindrical lens assembly 102, configured to receive the first light beam, and perform collimation processing on the first light beam to obtain a parallel second light beam transmitted in the same direction;
a second cylindrical lens component 103, configured to receive the second light beam, and focus the second light beam to obtain a third light beam transmitted along multiple directions;
and a third cylindrical lens assembly 104, configured to receive the third light beam, and perform collimation processing on the third light beam to obtain a fourth light beam transmitted along the same direction, where a width of the fourth light beam is smaller than the second light beam received by the second cylindrical lens assembly, and a width of the fourth light beam is determined by a beam reduction ratio between the second cylindrical lens assembly and the third cylindrical lens assembly.
Here, the light source assembly may be an LED light source. In the spectral confocal sensor, the first slit may be elongated, and thus, the at least one light source module may be arranged linearly (i.e., in one-dimensional direction), and the width of the first slit is equal to the arrangement length of the at least one light source module. In other words, the first slit is elongated, and therefore, the light source modules are arranged in one-dimensional direction such that the width of the first slit matches the arrangement length of the light source modules. In particular, the arrangement of the at least one light source assembly, as exemplified, may be seen in fig. 2.
As shown in fig. 2, the at least one light source module is arranged in one dimension along the vertical direction, so that the first light beam diverges along the vertical direction.
As shown in fig. 2, the cylindrical surfaces of the first cylindrical lens assembly 102, the second cylindrical lens assembly 103, and the third cylindrical lens assembly 104 are parallel to the longitudinal direction of the first slit, that is, the cylindrical surfaces of the first cylindrical lens assembly 102, the second cylindrical lens assembly 103, and the third cylindrical lens assembly 104 are perpendicular to the propagation direction of the parallel second light beam. The first cylindrical lens assembly 102 may be a cylindrical lens with a vertical curvature, and is used to collimate the first light beam, specifically, the first light beam diverges in a vertical direction, and after passing through the first cylindrical lens assembly 102, the first light beam may be focused into a parallel light beam by using a cylindrical lens with a vertical curvature, that is, a second light beam is formed. The second cylindrical lens assembly 103 may include a positive cylindrical lens having a positive focal length capable of focusing parallel rays in a line. In an embodiment of the present application, the second cylindrical lens assembly 103 is configured to receive all or part of the second beam in parallel, and focus the second beam to form a focused (i.e., multi-directionally transmitted) third beam. The third cylindrical lens assembly 104 may also be a set of collimating lenses for collimating the third beam of light to form a parallel fourth beam of light.
It should be noted that the light source system shown in fig. 2 is merely an example for illustrating the implementation principle. The light source system is applied to a spectral confocal sensor, the internal space of the spectral confocal sensor is limited, and how to layout is determined according to actual conditions.
In some embodiments, the light source system 10 may further include a first slit, and the width of the fourth light beam is determined by the width of the first slit.
It should be noted that, the light beam emitted by the LED light source is collimated by the first cylindrical lens component, and then is condensed by the second cylindrical lens component and the third cylindrical lens component, so that the light beam is reduced to be matched with the first slit, and thus the light source can be fully utilized. That is, in the spectral confocal sensor, the width of the first slit is constant, so that the light beam emitted from the light source can be fully utilized, and therefore, the second cylindrical lens assembly and the third cylindrical lens assembly are adopted to perform beam shrinking, and finally, the width of the shrunk light beam is matched with the width of the first slit. That is, the second cylindrical lens assembly and the third cylindrical lens assembly are arranged so that the light beam matches the width of the first slit, i.e., the selection of the second cylindrical lens assembly and the third cylindrical lens assembly is determined by the width of the first slit.
More specifically, the beam reduction ratio may be a ratio between the first focal length F1 of the second cylindrical lens assembly and the second focal length F2 of the third cylindrical lens assembly, that is, F1/F2. And the first focal length of the second cylindrical lens assembly and the second focal length of the third cylindrical lens assembly are selected according to the width of the first slit.
In some embodiments, the line spectral confocal sensor 100 can further include a light splitting system 20, wherein the light splitting system 20 can include a polarizing beam splitting prism (PBS, polarizing Beam Splitter) 201 and a slide 202, wherein;
The PBS201 is configured to receive the fourth light beam passing through the first slit 105 and divide the fourth light beam into a first sub-beam and a second sub-beam, wherein the first sub-beam is P-polarized light;
the glass slide 202 has an included angle of 45 degrees between the fast axis or the slow axis and the optical axis of the PBS, and is configured to receive a reflected light beam, and rotate the polarization direction of the reflected light beam, so that the reflected light beam is totally incident on the spectrometer system 40 included in the line spectrum confocal sensor through the PBS, and the reflected light beam is a light beam reflected by the first sub-light beam through the dispersive system 30 included in the line spectrum confocal sensor and the measured object 50.
It should be noted that the PBS may be a special optical element that uses the polarization characteristics of light to separate or combine light beams of different polarization directions, and such a prism may include two or more prisms that are precisely aligned to achieve splitting or combining of polarized light. The principle of operation of the PBS may be such that polarization selectivity allows light of only a particular polarization to pass through, and by way of example, the PBS may comprise a cube shape with one face coated with a special film that reflects light of one polarization and transmits light of the other polarization. The slide (or wave plate) may be a 1/4 wave plate, which may also be referred to as a quarter-slide or quarter-wave plate, a special polarizing optical element that is used to change the polarization state of light passing through it. The thickness of such a slide is designed such that the phase delay is exactly one quarter of the wavelength of the light as it propagates therein. The 1/4 wave plate comprises a fast axis and a slow axis, wherein the fast axis can be the direction with lower refractive index, and the slow axis can be the direction with higher refractive index, and the light waves passing through the two axes have different phase speeds.
Fig. 3 is a schematic diagram showing an optical structure of PBS included in a spectroscopic system included in a spectral confocal sensor according to an embodiment of the present application. In fig. 3, the spectroscopic system may comprise two triangular PBS prisms coated with a 50:50 spectroscopic film on the bevel. The spectroscopic system based on the contained PBS shown in fig. 3, as shown in fig. 4, shows a schematic propagation of the optical line. Specifically, the light beam 1 (i.e., the fourth light beam, having 100% of energy) emitted by the LED light source passes through the PBS to become polarized light, and the polarized light at this time becomes linear polarization, i.e., the P-polarized light beam 2 (i.e., the first sub-light beam) and the S-polarized light beam 3 (i.e., the second sub-light beam), wherein the P-polarized light beam 2 passes through the 1/4 wave plate and the light beam 4 emitted by the dispersion system 30, and the light beam 4 passes through the 1/4 wave plate and enters the spectrometer system 40. At this time, the included angle between the 1/4 wave plate and the optical axis of the light splitting system is ensured to be 45 degrees, so that the polarization direction of the light beam 4 (i.e., the reflected light beam) reflected by the dispersion system 30 is rotated by 90 degrees, and the light beam totally reflected by the PBS just passes through the PBS and enters the spectrometer system 40, so that energy loss is not caused. The S-polarized beam 3 is lost and has an energy of 50%. That is, the beam splitting system provided by the embodiment of the application only has 50% of energy loss when the light beam 1 emitted from the light source enters the PBS, and no energy loss exists in the following light beam propagation process.
In some embodiments, the line spectral confocal sensor 100 can further comprise a second slit;
The dispersion system 30 is configured to receive the first sub-beam, and after performing axial dispersion on the first sub-beam, focus light with different wavelengths respectively, and conduct the reflected light beam reflected by the measured object;
The second slit is used for filtering the reflected light beam;
The spectrometer system 40 is configured to receive the filtered reflected light beam, and focus the reflected light beam onto a photosensitive subsystem included in the spectrometer system and quantify the reflected light beam into a spectral curve.
It should be noted that the second slit is located between the spectroscopic system 20 and the spectrometer system 40, and is used to receive the reflected light beam transmitted from the spectroscopic system 20, and filter the reflected light beam to limit only light with a specific wavelength to enter the spectrometer system, so as to obtain more accurate spectroscopic data. The dispersion system 30 mainly has two functions, namely, a first point for receiving the first sub-beam and focusing different wavelengths of light after axially dispersing the first sub-beam, and a second point for conducting a reflected beam emitted by the object to be measured, wherein the reflected beam may be a beam of the first sub-beam after being reflected by a monochromatic beam focused on the surface of the object to be measured. Here, the spectrometer system 40 may receive the reflected light beam filtered by the second slit, then focus the reflected light beam onto a photosensitive subsystem included in the spectrometer system 40 and quantize the reflected light beam into a spectral curve. The spectrometer system establishes a corresponding relation among the wavelength, the displacement of the measured object and the position of the peak of the spectrum curve, then analyzes the relation, and reversely deduces the displacement of the measured object through the peak of the spectrum curve so as to realize the process of measuring the displacement by utilizing the spectrum confocal principle.
In some embodiments, the photosensitive subsystem may include a photosensitive coupling assembly (CCD, charge Coupled Device). Here, the CCD may be a type of photosensor widely used for digital imaging and data storage, which captures an image by converting an optical signal into an electrical signal.
In some embodiments, the dispersive system 30 may include a dispersive focusing lens for axially dispersing and separately focusing the first sub-beam with respect to receiving the first sub-beam, wherein the monochromatic beam focused on the surface of the object under test is reflected and becomes the reflected beam.
The dispersive focusing lens may be a special type lens that uses the difference in refractive index of light of different wavelengths in a medium to achieve focusing, and this characteristic of refractive index as a function of wavelength is called dispersion, and is used to achieve separation and focusing of light of different wavelengths. Here, the monochromatic light beam may refer to a single wavelength light beam, that is, light rays in the light beam belong to the same wavelength.
According to the linear spectrum confocal sensor provided by the embodiment of the application, 3 groups of one-dimensional cylindrical lenses are added in front of the light source LED, so that the stretching and beam shrinking of the light source in one-dimensional direction can be realized, and the light source enters the slit and the subsequent optical system in a form matched with the width of the slit, thereby greatly improving the energy utilization rate of the light source and reducing the energy loss. In addition, the PBS is combined with the 1/4 wave plate, so that the utilization rate can be further improved.
It should be noted that the terms "first," "second," and the like herein are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. In addition, in the several embodiments provided by the present application, it should be understood that the disclosed apparatus and method may be implemented in other manners. The above-described embodiments of the apparatus are merely illustrative, and for example, the division of the units is merely a logical function division, and there may be additional divisions of actual implementation, such as multiple units or components may be combined or integrated into another system, or some features may be omitted or not performed. In addition, the various components shown or discussed may be coupled or directly coupled or communicatively coupled to each other via some interface, whether indirectly coupled or communicatively coupled to devices or units, whether electrically, mechanically, or otherwise.
The foregoing description is only of the preferred embodiments of the present application, and is not intended to limit the scope of the present application.
Claims (10)
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| Application Number | Priority Date | Filing Date | Title |
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| CN202411248488.XA CN119197326A (en) | 2024-09-06 | 2024-09-06 | A Line Spectrum Confocal Sensor |
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| CN202411248488.XA CN119197326A (en) | 2024-09-06 | 2024-09-06 | A Line Spectrum Confocal Sensor |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101527273A (en) * | 2009-04-10 | 2009-09-09 | 中国科学院光电技术研究所 | Device and method for measuring properties of semiconductor materials |
| CN101904735A (en) * | 2010-07-20 | 2010-12-08 | 李超宏 | Quick titling mirror-based wide view field confocal scanning microscope |
| CN102439804A (en) * | 2011-09-02 | 2012-05-02 | 华为技术有限公司 | Wavelength adjustable laser and wavelength selection method of adjustable laser |
| JP2013088358A (en) * | 2011-10-20 | 2013-05-13 | Kurabo Ind Ltd | Interference type film thickness meter |
| CN103389562A (en) * | 2013-08-15 | 2013-11-13 | 福建福光数码科技有限公司 | 5 mega-pixel micro camera lens with large target surface |
| CN104849237A (en) * | 2015-05-25 | 2015-08-19 | 黑龙江大学 | Refractive Index Measurement Device Based on Wavelength Modulation SPR |
| CN110230986A (en) * | 2019-07-05 | 2019-09-13 | 季华实验室 | Device and method for measuring d15 parameters of piezoelectric ceramics based on spectral confocal |
-
2024
- 2024-09-06 CN CN202411248488.XA patent/CN119197326A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101527273A (en) * | 2009-04-10 | 2009-09-09 | 中国科学院光电技术研究所 | Device and method for measuring properties of semiconductor materials |
| CN101904735A (en) * | 2010-07-20 | 2010-12-08 | 李超宏 | Quick titling mirror-based wide view field confocal scanning microscope |
| CN102439804A (en) * | 2011-09-02 | 2012-05-02 | 华为技术有限公司 | Wavelength adjustable laser and wavelength selection method of adjustable laser |
| JP2013088358A (en) * | 2011-10-20 | 2013-05-13 | Kurabo Ind Ltd | Interference type film thickness meter |
| CN103389562A (en) * | 2013-08-15 | 2013-11-13 | 福建福光数码科技有限公司 | 5 mega-pixel micro camera lens with large target surface |
| CN104849237A (en) * | 2015-05-25 | 2015-08-19 | 黑龙江大学 | Refractive Index Measurement Device Based on Wavelength Modulation SPR |
| CN110230986A (en) * | 2019-07-05 | 2019-09-13 | 季华实验室 | Device and method for measuring d15 parameters of piezoelectric ceramics based on spectral confocal |
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