CN120008460A - Fiber-coupled dynamic interferometer based on arrayed waveguide grating spectrometer - Google Patents
Fiber-coupled dynamic interferometer based on arrayed waveguide grating spectrometer Download PDFInfo
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- CN120008460A CN120008460A CN202510292256.2A CN202510292256A CN120008460A CN 120008460 A CN120008460 A CN 120008460A CN 202510292256 A CN202510292256 A CN 202510292256A CN 120008460 A CN120008460 A CN 120008460A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention relates to an optical fiber coupling dynamic interferometer based on array waveguide grating light splitting, wherein a light emitting source and an array waveguide grating are arranged on a motion module. The light-emitting source is connected to the input port of the array waveguide grating through an optical fiber, and any one of a plurality of output ports of the array waveguide grating is in butt joint with the optical fiber connected to the incident end of the collimation structure through the motion module. The half wave plate and the beam splitting prism of the imaging element group are sequentially arranged on an emergent light path of the emergent end of the collimating structure, and the beam splitting prism is used for splitting the light beam passing through the half wave plate into a reference light beam transmitted along a first light path and a measuring light beam transmitted along a second light path. The mirrors of the imaging element group reflect the reference beam back to the beam splitting prism. The surface to be measured reflects the measuring beam back to the beam splitting prism. The reference beam and the measuring beam reflected back to the beam splitter prism interfere with each other and are imaged on the target surface of the camera. The accurate measurement of the wave front image of the surface to be measured is realized.
Description
Technical Field
The invention belongs to the technical field of optical measurement, and particularly relates to an optical fiber coupling dynamic interferometer based on arrayed waveguide grating light splitting.
Background
Along with the improvement of the quality requirements of the optical system in the fields of national economy, scientific research, national defense and the like, the importance of the surface shape processing and detection requirements of the optical element is increasingly highlighted. The wavefront surface shape detection of the plane, the spherical surface and the aspherical surface of the optical element can be finished by using an interferometer, and the interferometer can realize an interference test technology for detecting by using an interference phenomenon, wherein the interference test technology is widely applied to various related detection fields due to the advantages of high precision, high sensitivity, nondestructive detection and the like. However, the interference light path of the conventional interferometer cannot realize the multi-wavelength and high-precision optical measurement function.
Disclosure of Invention
Therefore, the invention aims to provide an optical fiber coupling dynamic interferometer based on array waveguide grating light splitting, which can realize frequency stabilization and screening of the wavelength of a light beam emitted by a light emitting source through an array waveguide grating, thereby realizing accurate measurement of a wavefront image of a surface to be measured.
In order to achieve the above purpose, the technical scheme of the invention is realized as follows:
An optical fiber coupling dynamic interferometer based on array waveguide grating light splitting comprises a light emitting source, an array waveguide grating, a motion module, a collimation structure, an imaging element group and a camera;
The light-emitting source is connected to the input port of the array waveguide grating through an optical fiber, and any one of a plurality of output ports of the array waveguide grating is in butt joint with the optical fiber connected to the incident end of the collimation structure through the motion module;
The imaging element group comprises a half wave plate, a beam splitting prism and a reflecting mirror, wherein the half wave plate and the beam splitting prism are sequentially arranged on an emergent light path of an emergent end of the collimating structure, the beam splitting prism is used for splitting a light beam passing through the half wave plate into a reference light beam transmitted along a first light path and a measuring light beam transmitted along a second light path, the reflecting mirror is arranged on the first light path and used for reflecting the reference light beam back to the beam splitting prism, the surface to be measured is arranged on the second light path and used for reflecting the measuring light beam back to the beam splitting prism, and the reference light beam and the measuring light beam reflected back to the beam splitting prism interfere with each other and are imaged on a target surface of the camera.
The motion module comprises a driving component and a transmission component, wherein the driving component is used for driving the transmission component to move so as to enable the light-emitting source and the array waveguide grating to move, and the transmission component adopts any one of a chain transmission component, a gear rack component and a screw rod component.
Further, the imaging element group further comprises a first quarter wave plate, and the first quarter wave plate is arranged on the first light path and is positioned between the beam splitting prism and the reflecting mirror;
the reference beam is transmitted through the first quarter wave plate, then is incident on the surface of the reflector, is reflected by the reflector, and then returns to the beam splitting prism through the first quarter wave plate again.
Further, the imaging element group further comprises a second quarter wave plate, and the second quarter wave plate is arranged on the second light path and is positioned between the beam splitting prism and the surface to be measured;
the measuring light beam is transmitted through the second quarter wave plate, then is incident to the surface to be measured, is reflected by the surface to be measured, and then returns to the beam splitting prism through the second quarter wave plate again.
Further, the imaging element group further comprises a converging lens, and the converging lens is arranged on the second light path and is positioned between the second quarter wave plate and the surface to be measured;
The measuring light beam is transmitted through the second quarter wave plate, then enters the surface to be measured through the converging lens, is reflected by the surface to be measured, and returns to the beam splitting prism through the converging lens and the second quarter wave plate again.
Further, the imaging element group further comprises a third quarter wave plate, and the third quarter wave plate is positioned between the beam splitting prism and the camera;
The reference beam and the measuring beam reflected back to the beam splitting prism are combined by the beam splitting prism and then pass through a third quarter wave plate, so that the reference beam and the measuring beam interfere with each other and are imaged on the target surface of the camera.
Further, the wavelength interval of the arrayed waveguide grating is in the range of 0.01nm to 0.1nm.
Further, the camera is a polarized mask camera.
Compared with the prior art, the invention has the following beneficial effects:
the fiber coupling dynamic interferometer based on the array waveguide grating light splitting can realize the frequency stabilization and screening of the wavelength of the light beam emitted by the light emitting source through the array waveguide grating, thereby realizing the accurate measurement of the wave front image of the surface to be measured. The light beams emitted by the light emitting source are subjected to diffraction and light splitting through the array waveguide grating, so that the light beams with different wavelengths are output through the output channels of different array waveguide gratings, and each output port of the array waveguide grating can output light beams with narrow line width and stable wavelengths. And the light emitting source and the array waveguide grating are arranged in the motion module, and the light emitting source and the array waveguide grating can be driven to move through the motion module so as to switch the output ports of the array waveguide grating which is in butt joint with the optical fibers connected to the incidence end of the collimation structure, and the different output ports of the array waveguide grating can output light beams with different wavelengths, so that the motion module can be utilized to realize multi-wavelength rapid measurement, and the accuracy of the wavefront image of the surface to be measured is higher.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute an undue limitation on the invention. In the drawings:
FIG. 1 is an optical block diagram of an array waveguide grating-based optical fiber coupling dynamic interferometer according to an inventive embodiment of the present invention.
Reference numerals illustrate:
The optical fiber coupling dynamic interferometer 10, a luminous source 11, an array waveguide grating 12, a collimation structure 13, an imaging element group 14, a camera 15, a surface to be measured 16, a half-wave plate 17, a beam splitting prism 18, a first quarter-wave plate 19, a reflecting mirror 20, a second quarter-wave plate 21, a converging lens 22 and a third quarter-wave plate 23.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not to be construed as limiting the invention. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the invention. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, well-known operations associated with the present invention have not been shown or described in detail so as not to obscure the disclosure with unnecessary detail, and thus, it is not necessary for those skilled in the art to describe the same in detail so that they may be fully understood from the description herein and from the knowledge of those skilled in the art.
It should be noted that, without conflict, the embodiments of the present invention and features of the embodiments may be combined with each other to form various embodiments. Also, the various steps or acts in the method descriptions may be interchanged or adjusted in a manner apparent to those skilled in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.
In the description of the invention, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," etc. indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the invention and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements. The specific meaning of the above terms in the creation of the present invention can be understood by those of ordinary skill in the art in a specific case.
The invention will be described in detail below with reference to the drawings in connection with embodiments.
Referring to fig. 1, an embodiment of the present invention provides an optical fiber coupling dynamic interferometer 10 based on arrayed waveguide grating spectroscopy, where the optical fiber coupling dynamic interferometer 10 can perform wavefront surface shape detection of an optical element. The fiber coupled dynamic interferometer 10 includes a light emitting source 11, an arrayed waveguide grating 12, a motion module (not shown), a collimating structure 13, an imaging element group 14, and a camera 15.
The light emitting source 11 and the arrayed waveguide grating 12 are arranged on the motion module. The light-emitting source 11 may refer to an LED light source, a laser, or the like that emits a light beam. The light emitting source 11 is connected to an input port of the arrayed waveguide grating 12 through an optical fiber. The light beams of the light source 11 enter the input port of the arrayed waveguide grating 12, and are subjected to diffraction and light splitting through the arrayed waveguide grating 12, so that the light beams with different wavelengths are output through the output channels of different arrayed waveguide gratings 12, and each output channel is correspondingly provided with an output port. I.e. the arrayed waveguide grating 12 has a plurality of output ports, different output ports being capable of outputting light beams of different wavelengths. In one embodiment, the wavelength interval of the arrayed waveguide grating 12 is in the range of 0.01nm to 0.1nm. In the present embodiment, the wavelength interval of the arrayed waveguide grating 12 is 0.01nm, that is, the wavelength difference between adjacent output channels is 0.01nm. Any one of the plurality of output ports of the arrayed waveguide grating 12 is abutted with an optical fiber connected to the incident end of the collimating structure 13 by the moving module. The motion module can drive the light-emitting source 11 and the arrayed waveguide grating 12 to move, and can drive the light-emitting source 11 and the arrayed waveguide grating 12 to move transversely along the arrayed waveguide grating 12 so as to switch different output channels of the arrayed waveguide grating 12, so that different output ports are in butt joint with optical fibers connected to the incident end of the collimation structure 13. The light beam output from the output port of the arrayed waveguide grating 12 may be coupled into an optical fiber connected to the incident end of the collimating structure 13 and passed through the collimating structure 13 to output a collimated light beam. Wherein the collimating structure 13 may be a fiber collimator.
Imaging element group 14 includes a half wave plate 17, a beam splitting prism 18, and a mirror 20. The half wave plate 17 and the beam splitting prism 18 are sequentially arranged on an outgoing light path of an outgoing end of the collimating structure 13. The beam splitting prism 18 is used to split the light beam passing through the half wave plate 17 into a reference beam transmitted along the first optical path and a measuring beam transmitted along the second optical path. In this embodiment, the collimated light beam output by the collimating structure 13 passes through the half-wave plate 17 and then enters the beam splitting prism 18, and is split into two beams with mutually perpendicular polarization directions by the beam splitting prism 18, that is, P light transmitted along the first optical path as a reference beam and S light transmitted along the second optical path as a measurement beam. A mirror 20 is arranged in the first optical path for reflecting the reference beam back to the beam splitting prism 18. The surface to be measured 16 is arranged in the second light path for reflecting the measuring beam back to the beam splitter prism 18. The reference beam and the measuring beam reflected back to the beam splitter prism 18 interfere with each other and are imaged on the target surface of the camera 15.
The fiber coupling dynamic interferometer 10 based on the array waveguide grating light splitting can realize the frequency stabilization and screening of the wavelength of the light beam emitted by the light emitting source 11 through the array waveguide grating 12, thereby realizing the accurate measurement of the wave front image of the surface 16 to be measured. By precisely controlling the wavelength of the light beam emitted by the light source 11, a basis can be provided for the surface shape detection of the surface 16 to be detected of the optical element. The light beams emitted by the light source 11 are diffracted and split by the arrayed waveguide grating 12, so that the light beams with different wavelengths are output through the output channels of different arrayed waveguide gratings 12, and each output port of the arrayed waveguide grating 12 can output the light beams with narrow linewidth and stable wavelength. And the light source 11 and the array waveguide grating 12 are arranged in the motion module, and the light source 11 and the array waveguide grating 12 can be driven to move through the motion module so as to switch the output ports of the array waveguide grating 12 which are in butt joint with the optical fibers connected to the incidence end of the collimation structure 13, and different output ports of the array waveguide grating 12 can output light beams with different wavelengths, so that the motion module can be utilized to realize multi-wavelength rapid measurement, and the accuracy of obtaining the wavefront image of the surface 16 to be measured is higher.
The invention creates the high resolution wavelength separation characteristic based on the rapid anti-vibration measurement capability of the dynamic interferometer and the array waveguide grating 12, and can solve the problems of single wavelength limitation and insufficient adaptability of multi-wavelength dynamic measurement in the prior art, so as to fill the technical blank in the high-dynamic multi-wavelength measurement system.
In one embodiment, imaging element group 14 further includes a first quarter wave plate 19, first quarter wave plate 19 being disposed in the first optical path between beam splitting prism 18 and mirror 20. The reference beam is transmitted through the first quarter wave plate 19, then is incident on the surface of the mirror 20, is reflected by the mirror 20, and then returns to the beam splitter prism 18 through the first quarter wave plate 19 again. In this embodiment, the P light transmitted along the first optical path is used as a reference beam, transmitted through the first quarter wave plate 19, converted into right-handed polarized light, incident on the surface of the mirror 20, reflected by the mirror 20, and modulated into S light again through the first quarter wave plate 19.
In one embodiment, imaging element group 14 further includes a second quarter wave plate 21, second quarter wave plate 21 being disposed in the second optical path and between beam splitting prism 18 and surface under test 16. The measuring beam is transmitted through the second quarter wave plate 21, then enters the surface to be measured 16, is reflected by the surface to be measured 16, and then returns to the beam splitter prism 18 through the second quarter wave plate 21 again.
In one embodiment, imaging element set 14 also includes a converging lens 22. The converging lens 22 may be a quartz glass lens or a lens made of other materials, and the present application is not limited thereto. A converging lens 22 is arranged in the second light path between said second quarter wave plate 21 and the surface 16 to be measured. The measuring beam is transmitted through the second quarter wave plate 21, then enters the surface to be measured 16 through the converging lens 22, is reflected by the surface to be measured 16, and returns to the beam splitting prism 18 through the converging lens 22 and the second quarter wave plate 21 again. In this embodiment, the S light transmitted along the second optical path is used as a measuring beam, transmitted through the second quarter wave plate 21, converted into the left-handed polarized light, incident on the surface 16 to be measured through the converging lens 22, reflected by the surface 16 to be measured, and modulated into the P light by the second quarter wave plate 21 through the converging lens 22 and the second quarter wave plate 21 again.
In one embodiment, imaging element group 14 further includes a third quarter wave plate 23, third quarter wave plate 23 being located between splitting prism 18 and camera 15. The reference beam and the measuring beam reflected back to the beam splitter prism 18 are combined by the beam splitter prism 18, and then pass through the third quarter wave plate 23, so that the reference beam and the measuring beam interfere with each other and are imaged on the target surface of the camera 15. In the present embodiment, the modulated S light as the reference beam and the P light as the measurement beam are returned to the splitting prism 18 to be combined, and the S light as the reference beam is converted into right-handed polarized light and the P light as the measurement beam is converted into left-handed polarized light through the third quarter wave plate 23, so that the reference beam and the measurement beam interfere with each other, an interference image is captured, and imaged on the target surface of the camera 15.
In this embodiment, the half-wave plate 17 and the second quarter-wave plate 21 are located on opposite sides of the splitting prism 18 along the first direction, and the first quarter-wave plate 19 and the third quarter-wave plate 23 are located on opposite sides of the splitting prism 18 along the second direction, where the first direction is along the direction in which the second optical path is located, and the first direction is perpendicular to the second direction.
In one embodiment, camera 15 is a polarized mask camera. Four interference images with different phases can be obtained in real time through the polarization mask camera, the interference images are sent to a computer for processing, and the computer can obtain a wavefront image of the surface 16 to be measured under the current wavelength through four-step phase shift solving. When the motion module is used to make the different output ports of the arrayed waveguide grating 12 butt-joint with the optical fibers connected to the incident end of the collimating structure 13, the wavefront images of the surface 16 to be measured under a plurality of different wavelengths can be obtained, and the computer can obtain the wavefront images of the surface 16 to be measured by processing the wavefront images of the surface 16 to be measured under a plurality of different wavelengths, so that the accurate measurement of the wavefront images of the surface 16 to be measured is realized.
In one embodiment, the motion module includes a driving assembly and a transmission assembly, and the driving assembly is used for driving the transmission assembly to move so as to enable the light emitting source 11 and the arrayed waveguide grating 12 to move. The driving assembly can adopt a motor and other structures. The transmission assembly adopts any one of a chain transmission assembly, a gear rack assembly, a screw rod and nut assembly and the like. The structure of the specific transmission component is not limited by the invention, and any output port of the plurality of output ports of the arrayed waveguide grating 12 can be butted with the optical fiber connected to the incident end of the collimation structure 13.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present disclosure may be performed in parallel, sequentially, or in a different order, provided that the desired results of the technical solutions of the present disclosure are achieved, and are not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (8)
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN121633058A (en) * | 2026-02-04 | 2026-03-10 | 中国科学院长春光学精密机械与物理研究所 | Optical fluid Raman sensor chip based on cascaded cavity structure and its fabrication method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241110A (en) * | 1999-02-19 | 2000-09-08 | Nec Corp | Array waveguide grating optical path length measuring device, method and storage medium storing program |
| JP2008151574A (en) * | 2006-12-15 | 2008-07-03 | Hitachi Cable Ltd | Physical quantity measurement system |
| US20100225924A1 (en) * | 2009-03-03 | 2010-09-09 | Canon Kabushiki Kaisha | Optical interference measuring apparatus |
| KR20130126151A (en) * | 2012-05-11 | 2013-11-20 | 주식회사 피피아이 | A optical coherence tomography using a comb source |
| JP2016080411A (en) * | 2014-10-10 | 2016-05-16 | 株式会社トプコン | Interferometer device |
| US20210164772A1 (en) * | 2018-07-02 | 2021-06-03 | Tsinghua University | Two-degree-of-freedom heterodyne grating interferometry measurement system |
| CN116530930A (en) * | 2023-03-15 | 2023-08-04 | 山西大学 | High-speed photoacoustic microscopic imaging device and method based on wavelength division multiplexing |
-
2025
- 2025-03-12 CN CN202510292256.2A patent/CN120008460B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000241110A (en) * | 1999-02-19 | 2000-09-08 | Nec Corp | Array waveguide grating optical path length measuring device, method and storage medium storing program |
| JP2008151574A (en) * | 2006-12-15 | 2008-07-03 | Hitachi Cable Ltd | Physical quantity measurement system |
| US20100225924A1 (en) * | 2009-03-03 | 2010-09-09 | Canon Kabushiki Kaisha | Optical interference measuring apparatus |
| KR20130126151A (en) * | 2012-05-11 | 2013-11-20 | 주식회사 피피아이 | A optical coherence tomography using a comb source |
| JP2016080411A (en) * | 2014-10-10 | 2016-05-16 | 株式会社トプコン | Interferometer device |
| US20210164772A1 (en) * | 2018-07-02 | 2021-06-03 | Tsinghua University | Two-degree-of-freedom heterodyne grating interferometry measurement system |
| CN116530930A (en) * | 2023-03-15 | 2023-08-04 | 山西大学 | High-speed photoacoustic microscopic imaging device and method based on wavelength division multiplexing |
Non-Patent Citations (3)
| Title |
|---|
| YI ZHANG 等: "High-accuracy online calibration scheme for large-scale integrated photonic interferometric measurements", 《IEEE PHOTONICS JOURNAL》, vol. 14, no. 3, 12 April 2022 (2022-04-12), pages 6628105 * |
| 丁君珂 等: "集成光学移相器波长相关性的比较研究", 《红外与激光工程》, vol. 48, no. 5, 25 January 2019 (2019-01-25), pages 215 - 219 * |
| 蒋超 等: "基于四分之一波片的菲佐型同步移相干涉测量方法", 《激光与光电子学进展》, vol. 53, no. 10, 31 December 2016 (2016-12-31), pages 101203 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN121633058A (en) * | 2026-02-04 | 2026-03-10 | 中国科学院长春光学精密机械与物理研究所 | Optical fluid Raman sensor chip based on cascaded cavity structure and its fabrication method |
| CN121633058B (en) * | 2026-02-04 | 2026-04-07 | 中国科学院长春光学精密机械与物理研究所 | Optical flow control Raman sensing chip based on cascade cavity structure and preparation method thereof |
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