CN118151324A - Optical component adjustment device and light adjustment method - Google Patents
Optical component adjustment device and light adjustment method Download PDFInfo
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- CN118151324A CN118151324A CN202410587458.5A CN202410587458A CN118151324A CN 118151324 A CN118151324 A CN 118151324A CN 202410587458 A CN202410587458 A CN 202410587458A CN 118151324 A CN118151324 A CN 118151324A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/248—Base structure objective (or ocular) turrets
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
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- Optics & Photonics (AREA)
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Abstract
本发明提供一种光学组件调节装置及调节对光方法，涉及光学元件调整领域。光学组件调节装置包括底座、干涉仪组件、波带片组件、透镜组件、观察组件以及样品组件。所述底架上安装有波带片组件、样品组件与观察组件，所述透镜组件安装在波带片组件中的第一转接板上，所述干涉仪组件安装在波带片组件、样品组件中的转接板上，根据干涉仪组件获取波带片、样品、透镜的相对空间位置，再将三者位置信息发送给计算机或其他控制装置，对波带片组件、样品组件中的各平移台、升降台以及旋转台进行位置调整完成对光。通过本发明的方法和装置，可以实现光学组件的快速、准确、简便的调节，为光学系统的设计和应用提供了新的解决方案。
The present invention provides an optical component adjustment device and an adjustment method for alignment, and relates to the field of optical element adjustment. The optical component adjustment device includes a base, an interferometer assembly, a zone plate assembly, a lens assembly, an observation assembly, and a sample assembly. The base frame is equipped with a zone plate assembly, a sample assembly, and an observation assembly, the lens assembly is mounted on a first adapter plate in the zone plate assembly, and the interferometer assembly is mounted on adapter plates in the zone plate assembly and the sample assembly. The relative spatial positions of the zone plate, the sample, and the lens are obtained according to the interferometer assembly, and the position information of the three is sent to a computer or other control device, and the positions of the translation stages, lifting stages, and rotating stages in the zone plate assembly and the sample assembly are adjusted to complete the alignment. Through the method and device of the present invention, fast, accurate, and simple adjustment of optical components can be achieved, providing a new solution for the design and application of optical systems.
Description
Technical Field
The present invention relates to the field of optical element adjustment, and in particular, to an optical component adjustment device and an optical component adjustment method.
Background
In the field of optical system design and application, precise control of the position and angle of the optical components is critical to achieving high quality imaging. Optical components such as zone plates, lenses, prisms and mirrors, and sample devices mounted behind the lenses must be precisely aligned to ensure that the light propagates along a predetermined path to achieve better experimental results. The traditional manual adjustment method has the defects of low adjustment speed, low precision, easiness in being influenced by human factors and the like, and is difficult to meet the requirements of a modern optical system on high precision and high efficiency. Some optical systems also need to work in specific atmosphere environments, such as high and low vacuum environments or inert gas environments, manual adjustment can delay the experimental progress and create more expenditure costs; while some automated adjustment devices are gradually introduced into the adjustment of optical components as the automated technology evolves, while the evolution of automated adjustment technology provides new solutions for the precise adjustment of optical components, existing automated adjustment devices still have some limitations. For example, some devices lack sufficient flexibility in facing different types and sizes of optical components; other devices are expensive to use due to their complex construction and operating requirements.
Therefore, developing an optical assembly adjusting device that can precisely control the position and angle of an optical assembly, has high flexibility and adaptability, and is easy to operate and maintain, has great significance in improving the performance of an optical system and reducing the cost.
Disclosure of Invention
In order to solve the problems, the invention provides an optical component adjusting device and an optical component adjusting method. The method and the device realize accurate adjustment of light by accurately controlling the position and the angle of the optical component. The device adopts advanced sensor and control algorithm, can monitor the state of optical subassembly in real time and carry out automatic adjustment. The technical scheme is that the three-dimensional coordinate system is established by taking the incidence direction of X rays as an X axis, and the technical scheme is as follows:
An optical assembly adjustment device includes a base, an interferometer assembly, a zone plate assembly, a lens assembly, an observation assembly, and a sample assembly. The base comprises a fixed plate, a supporting plate, a positioning seat, a positioning base I, a positioning base II, a substrate two-dimensional moving assembly, a substrate supporting plate and a substrate U-shaped block; the interferometer assembly comprises interferometers with the number more than 2, reflecting mirrors and reflecting mirror mounting seats with the corresponding number, and also comprises rib plate bottom plates, rib plates and rib plate vertical plates; the zone plate assembly comprises a first Y-axis translation table, a first lifting table, a first adapter plate, a second lifting table, a second Y-axis translation table, a second X-axis translation table, a zone plate base, a zone plate mounting seat and an adjustable zone plate; the lens assembly comprises a first lens supporting block, a second lens supporting block, a first X-axis translation table, a lens mounting plate and a lens mounting seat; the observation assembly comprises a fourth adapter plate, a microscope three-dimensional moving assembly, a fifth adapter plate, a microscope supporting device and a microscope; the sample assembly comprises a sample supporting block, a sample lifting platform, a third adapter plate, a third lifting platform, a mounting bottom plate, a rotating platform, a sample two-dimensional moving assembly, a sample frame base, a sample frame and a sample light alignment sheet. The optical fiber optical system comprises a chassis, a lens assembly, a zone plate assembly, a sample assembly and an observation assembly, wherein the zone plate assembly, the sample assembly and the observation assembly are arranged on the chassis, the lens assembly is arranged on a first adapter plate in the zone plate assembly, the interferometer assembly is arranged on an adapter plate in the zone plate assembly and the sample assembly, relative spatial position information of the zone plate, the sample and the lens is acquired according to the interferometer assembly, and then the position information of the zone plate, the sample and the lens is sent to a computer or other control devices, and position adjustment is carried out on each translation table, each lifting table and each rotating table in the zone plate assembly and the sample assembly to finish light.
In some preferred embodiments, the base is an assembly for supporting the interferometer assembly, the zone plate assembly, the lens assembly, the observation assembly and the sample assembly, the fixing plate is a rectangular plate, a through hole is formed in the center of the fixing plate, the through hole is rectangular or circular, holes with the number greater than 1 are drilled on the upper surface and the lower surface of the fixing plate, positioning seats are arranged on part of the holes, and other devices such as supporting or dragging hooks can be arranged on the holes; the supporting plate is a rectangular plate, a through hole is formed in the center of the supporting plate, the through hole is rectangular or circular, holes with the number larger than 1 are formed in the upper surface and the lower surface of the supporting plate, positioning bases are installed on part of the holes, the positions of the positioning bases correspond to the positions of the positioning bases, and the supporting plate is smaller than the fixing plate. The U-shaped base block is made of metal, hole sites are formed in the top surfaces of the vertical blocks at two ends of the U-shaped base block and are in threaded connection with the supporting plate, and through holes are formed in the transverse blocks of the U-shaped base block and are in threaded connection with the supporting plate of the base; and hole sites which are in threaded connection with the U-shaped blocks of the substrate are drilled on the substrate supporting plate.
In some preferred embodiments, the base, the interferometer assembly, the zone plate assembly, the lens assembly, the observation assembly and the sample assembly all comprise different translation stages and lifting stages, and the sample assembly further comprises a rotary stage; each translation platform and elevating platform are standard spare part, only translation distance and translation precision's difference between different translation platforms and the elevating platform.
In some preferred embodiments, the base, interferometer assembly, zone plate assembly, lens assembly, viewing assembly, and sample assembly each comprise a different adapter plate; the adapter plate is a metal plate, and comprises a first adapter plate, a second adapter plate, a third adapter plate, a fourth adapter plate and a fifth adapter plate, wherein the adapter plates are in different installation positions and are reasonably designed according to the space sizes of the installation positions of the adapter plates, the adapter plates have the function of connecting upper and lower different movable parts, and holes with the number more than or equal to 2 are drilled in the adapter plates and are used for the threaded connection of the upper and lower different parts with the adapter plate respectively.
In some preferred embodiments, the interferometer assembly includes more than 2 interferometers and a corresponding number of mirrors, mirror mounting seats, rib plates and rib plates, where the interferometers are laser interferometers, the mounting positions of the interferometers and the mirrors corresponding to the interferometers are used to measure and calculate the relative positions of the adjustable zone plate, the sample and the lens, the mirror mounting seats have multiple patterns, in this embodiment, a flat plate pattern and a sloping plate pattern are mostly adopted, different mounting patterns are selected according to different mounting spaces, and the mirror mounting seats are mounted on different adapter plates or mounting plates in the sample assembly and the zone plate assembly; the reflector is arranged on the reflector mounting seat, and the reflector has the function of reflecting laser.
In some preferred embodiments, holes connected with the support plate, the rib plate and the rib plate vertical plate are drilled on the rib plate bottom plate; the rib plate is triangular, hole sites are reserved on the surfaces of the rib plate, the rib plate bottom plate and the rib plate vertical plate in threaded connection, hole sites for installing interferometers are reserved on the rib plate vertical plate, and the number of the hole sites for installing interferometers is more than or equal to 1; hole sites which are in threaded connection with the rib plates and the rib plate bottom plates are reserved on the rib plate vertical plates.
In some preferred embodiments, a zone plate base in the zone plate assembly is provided with a hole site in threaded connection with the second X-axis translation stage, and a hole site in threaded connection with a zone plate mounting seat; the zone plate mounting seat is matched with the adjustable zone plate in size, and a hole site in threaded connection with the zone plate base and the adjustable zone plate is arranged on the zone plate mounting seat; the adjustable zone plate is a part capable of adjusting the size of the zone plate and controlling the luminous flux.
In some preferred embodiments, the sample supporting block is provided with a hole site in threaded connection with the substrate two-dimensional moving assembly and the sample lifting platform, the sample supporting block is arranged on the substrate two-dimensional moving assembly, and the sample supporting block is a rectangular block with a through hole in the center; the sample rack base is provided with a hole site in threaded connection with the sample two-dimensional moving assembly and a hole site in threaded connection with the sample rack; the sample light alignment sheet is a sheet, a rectangular area extends upwards from the center of the sheet, a semicircular area extends upwards from the right end of the sheet corresponding to the central line of the sheet, and the sample light alignment sheet is convenient to insert or extract from the sample frame; the sample frame cover plate is used for fastening a sample pair light sheet, the sample frame cover plate and the sample frame are connected into a whole through threads and are collectively called as a sample frame, and the sample frame can be used for replacing different sample frames according to different sample types, so that the supporting effect on the sample is achieved.
In some preferred embodiments, the lens mounting plate in the lens assembly is L-shaped, one end of the lens mounting plate is mounted on the first X-axis translation stage, one end of the lens mounting plate is used for mounting the lens mounting seat, and a groove adapted to the lens mounting seat is reserved on one end of the lens mounting seat, so that the lens mounting seat can be mounted conveniently, quickly and accurately; and a hole site for installing a lens is reserved on the lens installation seat.
In some preferred embodiments, the first lens supporting block and the second lens supporting block are solid metal or nonmetal blocks, threaded hole sites are formed on the upper surface and the lower surface of the first lens supporting block and the second lens supporting block, and the height of the second lens supporting block is smaller than that of the first lens supporting block.
In some preferred embodiments, the microscope support device is perforated with holes that are connected to a two-dimensional moving component of a microscope, which is an electron microscope or a visible light microscope, where X-ray beam positions can be observed.
Another object of the present invention is to: a method for adjusting light for an optical assembly adjustment device, comprising the steps of:
Step S01, selecting corresponding sample frames according to different samples, and inserting the samples into the sample frames after selecting the sample frames.
In step S02, the radiation source is turned on, and the relative position of the radiation beam as it passes through the sample is observed by a microscope.
Step S03, transmitting position movement signals to different translation stages or lifting stages in the base, the interferometer assembly, the zone plate assembly, the lens assembly, the observation assembly and the sample assembly according to the position of the ray beam by using a computer or other control equipment.
Step S04, according to the movement positions of different translation stages or lifting stages in the interferometer assembly monitoring base, the interferometer assembly, the zone plate assembly, the lens assembly, the observation assembly and the sample assembly, the simultaneous rapid and accurate movement of each translation stage and the lifting stage is ensured.
And S05, observing and judging whether the ray beam accurately passes through the sample light-aligning sheet through a microscope.
And step S06, after the radiation beam passes through the sample light-aligning sheet, turning off the radiation source, pulling out the sample light-aligning sheet, and inserting the sample light-aligning sheet into the experimental sample to complete the light-aligning work of the whole device.
A computer readable storage medium having stored thereon computer instructions which, when executed by a processor, implement any of steps S02-S05 in a method of adjusting light for an optical component adjustment device.
The invention has the advantages that:
an optical assembly adjustment device has high flexibility and adaptability and can adapt to different types and specifications of optical assemblies. By the method and the device, the optical component can be quickly, accurately and simply adjusted, and a new solution is provided for the design and the application of an optical system.
Drawings
Fig. 1 is a schematic view of the left front side of an optical assembly adjustment device.
Fig. 2 is a front view of an optical assembly adjustment device.
Fig. 3 is a schematic view of the right rear side of the optical assembly adjustment device.
Fig. 4 is a schematic view of an optical assembly conditioner chassis.
Fig. 5 is a bottom view of the optical assembly adjustment device chassis.
In the figure: the three-dimensional microscope comprises a 1-fixed plate, a 2-supporting plate, a 201-positioning seat, a 202-positioning seat, a 203-positioning seat, a 3-rib bottom plate, a 4-rib plate, a 5-rib plate vertical plate, a 6-interferometer, a 601-reflector, a 602-reflector mounting seat, a 603-reflector mounting seat, a 7-first connecting plate, a 8-lens supporting block, a 9-lens supporting block, a 10-second adapter plate, a 11-first Y-axis translation table, a 12-first lifting table, a 13-second lifting table, a 14-first X-axis translation table, a 15-second Y-axis translation table, a 16-second X-axis translation table, a 17-zone plate seat, a 18-zone plate mounting seat, a 19-adjustable zone plate, a 20-sample supporting block, a 21-sample lifting table, a 22-third adapter plate, a 23-third lifting table, a 24-mounting bottom plate, a 25-second sample two-dimensional moving component, a 27-sample frame seat, a 28-sample holder, a 29-sample pair optical plate, a 31-fourth microscope, a 32-third microscope supporting block, a 33-second microscope supporting plate, a 35-two-dimensional moving base, a substrate, a 45-U-supporting plate, a 45-three-dimensional microscope supporting base, a 45-dimensional moving base, a 45-U-shaped microscope, a substrate, a 45-moving base, and a base.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the invention, the X-ray incidence direction is taken as an X axis and is also taken as the right side of the whole device, and a three-dimensional coordinate system is established to describe the invention; where the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "inner", "outer", etc. indicate an orientation or positional relationship based on that shown in the drawings, it is merely for convenience of description and to simplify the description, and does not indicate or imply that the apparatus or elements referred to must have a specific orientation to be constructed and operated in a specific orientation, and thus should not be construed as limiting the invention.
It should be noted that, unless explicitly stated and limited otherwise, reference to "hole site" in describing the technical scheme should be interpreted broadly, for example, a hole for connection fixation may be a through hole, a threaded hole, etc.; the terms "mounted," "connected," "coupled," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
The optical assembly adjustment device shown in fig. 1, 2 and 3 comprises a chassis, an interferometer assembly, a zone plate assembly, a lens assembly, a viewing assembly and a sample assembly; the observation assembly comprises a fourth adapter plate 31, a microscope three-dimensional moving assembly 32, a fifth adapter plate 33, a microscope support device 34 and a microscope 35; the fourth adapter plate 31 is fixedly connected with the supporting plate 2 in a threaded manner, a lifting platform responsible for Z-axis movement in the three-dimensional moving component 32 of the microscope is connected with the fourth adapter plate 31 in a threaded manner, the fifth adapter plate 33 is connected with a translation platform responsible for X-axis movement in the three-dimensional moving component 32 of the microscope, the fifth adapter plate 33 enables lifting responsible for Z-axis movement in the three-dimensional moving component 32 of the microscope to be connected with the translation platform responsible for X-axis movement, the microscope supporting device 34 is arranged on the three-dimensional moving component 32 of the microscope, the microscope 35 is arranged on the microscope supporting device 34, and the observation component is responsible for observing the position of X-ray beams.
The interferometer component comprises a rib plate bottom plate 3, a rib plate 4, a rib plate vertical plate 5, an interferometer 6, a reflector 601, a first reflector mounting seat 602 and a second reflector mounting seat 603, wherein the rib plate bottom plate 3 is in threaded connection with a supporting plate 2, the rib plate vertical plate 5 is in threaded connection with the rib plate bottom plate 3, the rib plate 4 is in threaded connection with the rib plate bottom plate 3 and the rib plate vertical plate 5 respectively, so that the perpendicularity and stability of the rib plate vertical plate 5 are guaranteed, holes with the number being greater than 1 are punched on the rib plate vertical plate 5 for mounting the interferometer 6, the reflector mounting seat is provided with a plurality of patterns, for example, the first reflector mounting seat 602 and the second reflector mounting seat 603, the reflector mounting seat is mounted on adapter plates of different components, for example, the second adapter plate 10 and the third adapter plate 22 are mounted according to the space size of the adapter plates, the reflector 601 is mounted on the reflector mounting seat, the reflector 601 corresponds to the interferometer 6 one by one, and the interferometer 6 is matched with the reflector 601 to measure the relative position relationship among the components.
The lens assembly comprises a first lens supporting block 8, a second lens supporting block 9, a first X-axis translation stage 14, a lens mounting plate 40 and a lens mounting seat 41; the first lens supporting block 8 and the second lens supporting block 9 are arranged on the first adapter plate, three parts are fixedly connected through threads, the first lens supporting block 8 and the second lens supporting block 9 enable the position height of the lens mounting seat 41 to be consistent with the position height of the adjustable zone plate 19, the first X-axis translation table 14 is arranged on the second lens supporting block 9, the L-shaped lens mounting plate 40 is arranged above the first X-axis translation table 14, the lens mounting seat 41 is arranged at one end of the lens mounting plate 40, the mounting groove is formed in one end of the lens mounting seat 41, and the lens mounting seat 41 is convenient to mount, accurate in position and convenient to mount. The lens is mounted in the lens mount 41, and different sized lenses, and lens mount 41 adapted to different sized lenses, may be selected according to the needs of different experiments.
The zone plate assembly comprises a first Y-axis translation stage 11, a first lifting stage 12, a first adapter plate 7, a second lifting stage 13, a second Y-axis translation stage 15, a second X-axis translation stage 16, a zone plate base 17, a zone plate mounting seat 18 and an adjustable zone plate 19; the first Y-axis translation stage 11 is mounted on the support plate 2, the first lifting stage 12 is mounted on the first Y-axis translation stage 11, the upper and lower sides of the first adapter plate 7 are respectively in threaded connection with the first lifting stage 12 and the second lifting stage 13, so that the second lifting stage 13, the first lifting stage 12 and the first Y-axis translation stage 11 are integrated, the second Y-axis translation stage 15 is in threaded connection with the second lifting stage 13, the second X-axis translation stage 16 is in threaded connection with the second Y-axis translation stage 15, the zone plate base 17 is mounted on the second X-axis translation stage 16, the zone plate base 17 and the lens mounting plate 40 have the same horizontal height at the moment, the zone plate mounting seat 18 is mounted on the zone plate base 17, and the adjustable zone plate 19 is mounted on the zone plate mounting seat 18; after the installation is completed, the adjustable zone plate 19 can be adjusted in three-dimensional directions through the first Y-axis translation stage 11, the first lifting stage 12, the second lifting stage 13, the second Y-axis translation stage 15 and the second X-axis translation stage 16, and the center position of the adjustable zone plate 19 and the center position of the lens mounting seat 41 are on the same horizontal line. Since the first lens supporting block 8 is mounted on the first adapter plate 7, the center position of the adjustable zone plate 19 and the center position of the lens mount 41 can be ensured to be always at the same height.
The sample assembly comprises a sample supporting block 20, a sample lifting table 21, a third adapter plate 22, a third lifting table 23, a mounting bottom plate 24, a rotary table 25, a sample two-dimensional moving assembly 26, a sample frame base 27, a sample frame 28 and a sample light alignment sheet 29; the sample supporting block 20 is mounted on the substrate two-dimensional moving assembly 45, the sample lifting platform 21 is in threaded connection with the sample supporting block 20, the third lifting platform 23 is connected with the sample lifting platform 21 into a whole through the third adapter plate 22, the sample lifting platform 21 is responsible for rough adjustment in the Z-axis direction, the third lifting platform 23 is responsible for fine adjustment in the Z-axis direction, the mounting base plate 24 is mounted on the third lifting platform 23, the second reflector mounting base 603 is further mounted in front of the mounting base plate 24, the rotating platform 25 is mounted on the mounting base plate 24, the sample two-dimensional moving assembly 26 is further mounted above the rotating platform 25 and is responsible for adjusting the two-dimensional position of the sample rack 28, the sample rack base 27 is mounted on the sample rack base 27, the sample light-aligning piece 29 is inserted in a corresponding groove of the sample rack 28, and during light, the sample lifting platform 21, the third lifting platform 23 and the sample two-dimensional moving assembly 26 receive signals from a computer or a control device, and the moving position distance of the sample rack 28 is determined according to an interferometer assembly, and the sample light-aligning piece 29 is located on an X-ray path.
The chassis of the optical assembly adjusting device shown in fig. 4 and 5 comprises a fixed plate 1, a supporting plate 2, a substrate two-dimensional moving assembly 45, a substrate supporting plate 46 and a substrate U-shaped block 47; the fixing plate 1 is provided with a through hole in the center, holes with the number more than or equal to 1 are drilled on the upper surface and the lower surface, the fixing plate 1 is arranged at a corresponding space position where a laboratory or an optical component adjusting device needs to be arranged and fixed, the fixing plate 1 is provided with a positioning base, and the positioning bases are different in pattern, for example, a first positioning base 202 and a second positioning base 203; the central point of the supporting plate 2 is reserved with a through hole, the size of the through hole is smaller than that of the through hole on the fixed plate 1, the upper surface and the lower surface of the supporting plate 2 are both provided with holes with the number larger than or equal to 1, wherein the lower side of the supporting plate 2 is provided with positioning seats 201, the positioning seats 201 are distributed in a triangular mode, the positions of the positioning seats 201 correspond to the positions of positioning bases arranged on the fixed plate 1, two base U-shaped blocks 47 are symmetrically arranged on the lower side of the supporting plate 2, the base bearing plate 46 is fixedly connected with the two base U-shaped blocks 47 through threads to form a supporting platform, and the base two-dimensional moving assembly 45 is arranged on the supporting platform. The sample assembly is mounted on the base two-dimensional movement assembly 45.
A method for adjusting light for an optical assembly adjustment device, comprising:
Step S01, selecting corresponding sample frames according to different samples, and inserting the samples into the sample frames after selecting the sample frames.
In step S02, the radiation source is turned on, and the relative position of the radiation beam as it passes through the sample is observed by a microscope.
Step S03, transmitting position movement signals to different translation stages or lifting stages in the base, the interferometer assembly, the zone plate assembly, the lens assembly, the observation assembly and the sample assembly according to the position of the ray beam by using a computer or other control equipment.
Step S04, according to the movement positions of different translation stages or lifting stages in the interferometer assembly monitoring base, the interferometer assembly, the zone plate assembly, the lens assembly, the observation assembly and the sample assembly, the simultaneous rapid and accurate movement of each translation stage and the lifting stage is ensured.
And S05, observing and judging whether the ray beam accurately passes through the sample light-aligning sheet through a microscope.
And step S06, after the radiation beam passes through the sample light-aligning sheet, turning off the radiation source, pulling out the sample light-aligning sheet, and inserting the sample light-aligning sheet into the experimental sample to complete the light-aligning work of the whole device.
A computer readable storage medium having stored thereon computer instructions which, when executed by a processor, implement any of steps S02-S05 in a method of adjusting light for an optical component adjustment device.
After the optical component adjusting device finishes focusing, the adjustable zone plate 19, the lens and the sample are positioned on one light path at the moment, experiments can be carried out, in the experimental process, the first X-axis translation stage 14 can be controlled to adjust the position of the lens so as to finish the adjustment of the size and definition of the sample, and the position of the sample can be finely adjusted through the control rotary stage 25 and the third lifting stage 23, so that the state of the sample can be observed more conveniently and accurately.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents.
Claims (10)
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