CN101158655B - Laser aiming image monitoring arrangement used for single-crystal orientation tester - Google Patents

Abstract

The invention discloses a laser sighting image monitor used for single crystal orientation tester. The invention comprises a hanger rod component, a three dimensional sliding platform, a beam eyehole component and a frame component. The hanger rod component is arranged on a front cross beam and a rear cross beam of the frame component. The three dimensional sliding platform is arranged on a strong-back A of the frame component. The beam eyehole component is arranged on a strong-back B of the frame component. The laser sighting image monitor of the invention utilizes a visible laser beam to substitute the working position of the X-ray. Thereby, the beam is adjusted through the three dimensional sliding platform and the beam eyehole component. The beam is accurately arranged on the interfacings of two crystal boundaries of the detected workpiece. The visible beam and the X-ray beam are concentricity and in the same direction.

Description

Laser aiming image monitoring device for single crystal orientation tester

technical field

The present invention relates to a mechanical part structure suitable for crystal orientation by the Laue method, more particularly, it refers to a laser aiming image monitoring device suitable for a single crystal orientation tester, which uses visible beams of X-rays Instead, align the visible beam and the X-ray beam at the interface of the two metal crystal grains so that they are concentric and in the same direction.

Background technique

The Laue method refers to an experimental method in which continuous X-rays are projected onto an immobile single crystal sample to produce diffraction. The continuous X-rays used should have a higher intensity so that a clear diffraction pattern can be obtained in a shorter time.

The Laue method is the earliest diffraction method, and its experimental device is relatively simple, usually including an aperture, a sample holder and a flat film cassette. There is no precise alignment mechanism in current Laue testers, nor is there a way to facilitate alignment of X-rays to crystal boundaries. In the study of the crystal image of a single crystal, it is often necessary to measure its orientation angle. The orientation angle needs to be aligned with the grain boundary of two crystals to obtain it. The operation is complicated, and it is not easy to observe and adjust with the human eye.

Contents of the invention

Based on above-mentioned defect, the object of the present invention is to provide a kind of laser aiming image monitoring device for single crystal orientation tester, is to replace the working position of X-ray accurately with visible laser beam, so that pass through three-dimensional slide table (micro Displacement-driven precision platform) and beam pinhole assembly (micro-displacement measurement system) are adjusted so that the beam is accurately located at the interface between the two grain boundaries of the workpiece to be measured, so that the visible beam and the X-ray beam are concentric and in the same direction.

The invention is a laser aiming image monitoring device for a single crystal orientation tester, which is composed of a boom assembly, a three-dimensional slide table, a small beam hole assembly, and a frame assembly. The suspension rod assembly is installed on the front beam and the rear of the frame assembly. On the beam, the three-dimensional sliding table is installed on the A positioning plate of the frame assembly, and the beam aperture assembly is installed on the B positioning plate of the frame assembly.

The advantages of the laser aiming image monitoring device for single crystal orientation tester of the present invention are: (1) aiming is convenient, and aiming spot diameter is 0.5mm; (3) The traditional photosensitive method of film is adopted, which is easy to adjust, and the hand can operate flexibly in the space; (4) The vibration of the whole machine is small, which does not affect the operation and aiming needs; small size, light weight, convenient move.

Description of drawings

Fig. 1 is an overall configuration diagram of an image monitoring device of the present invention.

Fig. 2 is a structural diagram of the frame part of the present invention.

Fig. 2A is a structural diagram of the ray sleeve.

Fig. 2B is a structural diagram of the prism fixing frame.

Fig. 2C is a structural diagram of the laser head fixing frame.

Fig. 3 is a structural diagram of the boom assembly of the present invention.

Fig. 3A is a structural diagram of the B carriage.

Fig. 3B is a structural diagram of the connector.

Fig. 3C is a structural diagram of the C carriage.

Fig. 4 is a structural diagram of the three-dimensional slide table of the present invention.

Fig. 4A is a structural diagram of the Y-axis assembly.

Fig. 4B is a structural diagram of the X-axis assembly.

Fig. 4C is a structural diagram of the Z-axis assembly.

Fig. 5 is a structural diagram of the beam pinhole assembly.

Fig. 5A is a structural diagram of the positioning plate.

Fig. 5B is a structural diagram of the connecting plate.

In the figure: 1. Boom assembly 101.A guide rail 102.B guide rail 103.C guide rail 104.A carriage 105.B carriage 106.C carriage 107.A right clamping block 108.B right clamping block 109.A Left Clamp 110.B Left Clamp 111.C Left Clamp 112.C Right Clamp 151. Slider 152. Pillar 153. Connector 154. Fixed Plate 155. Pin 156.A Through Hole 157.B Through Hole 158. Left Clamping Stud 159. Right Clamping Stud 161. Slider 162.A Sleeve 163.C Telescopic Column 164. Ring 165.A Top Column 166.B Top Column 167.C Through Hole 168. End Face 2. Three-dimensional sliding table 21. X-axis assembly 211. X-axis motor 212. Concave frame 213. A guide rail 214. Slide table 215. Right side 216. Left side 22. Y-axis assembly 221. Y-axis motor 222. Concave frame 223.B guide rail 224.L-shaped slider 225.Right side 226.Left side 23.Z-axis assembly 231.Z-axis motor 232.Concave frame 233.C guide rail 235.Up side 236.Down Side 24. Sample table 3. Beam aperture assembly 31. Connecting plate 311.A positioning socket 312.B positioning socket 313.C positioning socket 32.L-shaped adjustable frame 321.A adjustment rod 322.B adjustment rod 323 .C Adjustment Lever 33. Positioning Plate 331. Groove 34. Shading Plate 341. Light Hole 4. Frame Assembly 41. Front Bezel 42. Rear Bezel 43. Right Bezel 44. Left Bezel 45. Bottom Plate 46. Rectangle Frame body 401.B positioning plate 402.A positioning plate 403. laser head fixing frame 404. prism fixing frame 405. fixing column 406. rear beam 407. front beam 408.C positioning plate 409. ray sleeve 410.D through hole 411 .Ray small hole 412.A telescopic column 413.B Casing 414.C Top Column 415.D Top Column 416. Support Plate 417.B Telescopic Column 418.E Top Column 419.F Top Column 420.C Sleeve 421. L-shaped Support Plate 422. Trapezoidal Plate 423. Clamping Frame 11. Lighting 12. Camera 13. Laser head 15. Prism

Detailed ways

The present invention will be further described in detail below in conjunction with the accompanying drawings.

The present invention is a laser aiming image monitoring device for a single crystal orientation tester, which is composed of a boom assembly 1, a three-dimensional slide table 2, a beam aperture assembly 3, and a frame assembly 4, and the suspension rod assembly 1 is installed on the frame assembly 4 On the front beam 407 and the rear beam 406 , the three-dimensional slide table 2 is installed on the A positioning plate 402 of the frame assembly 4 , and the beam aperture assembly 3 is installed on the B positioning plate 401 of the frame assembly 4 .

The bottom surface of the rectangular frame body 46 of the frame assembly 4 is provided with a base plate 45, and the base plate 45 is respectively fixed with a positioning plate 402 with mounting holes, a positioning plate B 401 with mounting holes, a positioning plate C 408, and a positioning plate 402. The three-dimensional slide table 2 is installed on the A positioning plate 402, and the installation hole designed on the A positioning plate 402 is used to realize the installation position of the three-dimensional slide table 2 in the laser aiming image monitoring device; The laser head fixed frame 403 of HNK type He-Ne laser), the prism fixed frame 404 that is used to fix the prism 15 (adopting coated K9 glass), realizes the light beam pinhole assembly 3 in the laser aiming image monitoring by the installation hole designed on it The installation position in the device, wherein, the C sleeve 420 of the fixed frame 403 of the laser head 13 is connected to the B telescopic column 417 through the F top post 419 and the E top post 418, and the end surface of the B telescopic post 417 is fixed with an L-shaped support plate 421 , the L-shaped support plate 421 is connected with the trapezoidal plate 422 by screws, and the clamping frame 423 is installed on the trapezoidal plate 422; the B sleeve 413 of the fixed frame 404 of the prism 15 is connected to the A telescopic frame through the D top post 415 and the C top post 414 Column 412, the end face of A telescopic column 412 is fixed with support plate 416, and prism 15 is installed on support plate 416; C positioning plate 408 is equipped with fixed column 405, and ray sleeve 409 is installed on the fixed column 405 through through hole 410, and ray sleeve 409 is used to fix the X-ray head, and the X-ray beam is emitted from the ray aperture 411; the front, rear, left, and right sides of the rectangular frame 46 are respectively provided with a front baffle 41, a rear baffle 42, a left baffle 43 and a right baffle 44, wherein the front baffle 41 is a glass plate, the rear baffle 42, the left baffle 43 and the right baffle 44 are aluminum plates.

The A guide rail 101, the B guide rail 102 and the C guide rail 103 of the boom assembly 1 are placed in parallel, and the two ends of the A guide rail 101 are respectively connected with a C left clamping block 111 and a C right clamping block 112, and the C left clamping block 111 is fixed on the front On the crossbeam 407, the C right clamping block 112 is fixed on the rear crossbeam 406; the two ends of the B guide rail 102 are respectively connected with the B left clamping block 110 and the B right clamping block 108, and the B left clamping block 110 is fixed on the front crossbeam 407, B The right clamping block 108 is fixed on the rear beam 406; the two ends of the C guide rail 103 are respectively connected with the A left clamping block 109 and the A right clamping block 107, the A left clamping block 109 is fixed on the front cross beam 407, and the A right clamping block 107 is fixed On the rear beam 406; the A slide frame 104 is installed on the A guide rail 101 and the B guide rail 102 through the holes on the slide block, and the illuminating lamp 11 for producing a visible light beam is installed on the slide block of the A slide frame 104 (using BG-II Adjustable halogen light source), the design of A slide frame 104 has realized manual adjustment of the beam position of the visible light beam in the laser aiming image monitoring device; B slide frame 105 is installed on the A guide rail through the through hole formed by the slide block 151 and the end face of the pillar 152 101 and B guide rail 102, the other end of the pillar 152 is installed in the B through hole 157 of the connector 153, and is locked by the right clamping stud 159, and a pin 155 is installed in the A through hole 156 of the connector 153, and the pin One end of the column 155 is connected with a fixing plate 154 for fixing the camera 12; the C carriage 106 is installed on the C guide rail 103 through the through hole 167 formed by the slider 161 and the end face 168 of the A sleeve 162, and the other end of the A sleeve 162 passes through the A Top post 165 and B top post 166 are connected with C telescopic post 163, and the end of C telescopic post 163 is connected with annulus 164, and annulus 164 passes through for camera head 12 and cooperates with the fixed plate 154 on the B carriage 105 and uses For fixed camera 12.

The three-dimensional slide table 2 is composed of an X-axis assembly 21, a Y-axis assembly 22, a Z-axis assembly 23 and a sample stage 24. The X-axis assembly 21 is installed on the slide block 224 of the Y-axis assembly 22, and the sample stage 24 is installed on the On the C guide rail 233 of the Z-axis assembly 23, the Z-axis assembly 23 is installed on the L-shaped slide table 214 of the X-axis assembly 21, and the concave frame 222 of the Y-axis assembly 22 is installed on the A positioning plate 402 of the frame assembly 4; A B guide rail 223 is installed on the left side 226 and the right side 225 of the concave frame 222 of the shaft assembly 22, a slide block 224 is installed on the B guide rail 223, and one end of the B guide rail 223 passes through the hole on the right side 225 and The output end of the motor 221 is connected, and the motor 221 is installed on the outer surface of the right side 225; A guide rail 213 is installed on the left side 216 and the right side 215 of the concave frame 212 of the X-axis assembly 21, and the A guide rail 213 is installed There is an L-shaped slide table 214, and one end of the A guide rail 213 is connected to the output end of the motor 221 through the hole on the right side 215, and the motor 221 is installed on the outer surface of the right side 215; the concave frame 232 of the Z-axis assembly 23 A C guide rail 233 is installed on the lower side 236 and the upper side 235 of the C guide rail 233, and the sample table 24 is installed on the C guide rail 233. One end of the C guide rail 233 passes through the hole on the upper side 235 and is connected to the output end of the motor 231, and the motor 231 is mounted on the outer side of the upper side 235 . The three-dimensional slide table 2 is used to adjust the workpiece to be measured (placed on the sample stage 24) to move arbitrarily in the vertical plane. Realize the alignment between the grain boundary movement of the measured workpiece and the aiming light (X-ray, laser beam), and achieve the purpose of cross-grain boundary irradiation.

Described light beam pinhole assembly 3 is made of connecting plate 31, L-shaped adjustable frame 32, positioning plate 33 and light-shielding plate 34, and light-shielding plate 34 is installed on the positioning plate 33, and positioning plate 33 is connected on the L-shaped adjustable frame 32 On the side wall 324, the L-shaped adjustable frame 32 is flexibly connected with the connecting plate 31 through three adjustment rods; the light-shielding plate 34 is provided with a channel 341 for passing light; the positioning plate 33 is provided with a groove 331, the size of which is Adapt to the channel 341 and play a role in positioning; the L-shaped adjustable frame 32 is provided with a hole for the adjustment rod to pass through; the connecting plate 31 is provided with A positioning socket 311, B positioning socket 312 and C positioning socket 313, Adjusting rods are installed in each positioning nest, that is, A adjusting rod 321 is installed in the A positioning nest 311, B adjusting rod 322 is installed in the B positioning nest 312, and C adjusting rod 323 is installed in the C positioning nest 313. The cooperative use of the adjustment rod realizes the flexible connection relationship between the connecting plate 31 and the L-shaped adjustable frame 32, and at the same time enables the manual fine-tuning of the optical channel. The goal of the structural design of the beam pinhole assembly 3 of the present invention is to accurately replace the working position of X-rays with visible laser beams, so as to facilitate adjustment through the three-dimensional slide table 2, so that the beams are accurately positioned at the two grain boundaries of the workpiece to be measured At the interface, and ensure that the visible beam and the X-ray beam are concentric and in the same direction.

The laser aiming image monitoring device of the present invention simulates invisible light (X-ray) into visible light to carry out the Laue scattering test. In order to complete the Laue scattering test, the ray needs to be aimed at the grain boundary of the two crystals, and the ray is selected for color development. Beam, in order to clearly observe the movement of the visible light spot at the grain boundary. In its optical path, the laser beam emitted by the laser (installed on the laser head holder 403) and the X-ray light emitted by the X-ray device (installed in the ray sleeve 409) are simultaneously irradiated onto the prism 15, and the light is converted by the prism 15. Emit from the light hole 341 on the light-shielding plate 34 (using photosensitive paper for photography) and irradiate the grain boundary of the workpiece to be measured, so that the invisible light is visible light; At the grain boundary of the workpiece to be tested, the Laue scattering test can be realized by irradiating multiple beams at the same grain boundary of the workpiece at the same time. After aligning with visible light (the light provided by the illuminating lamp 11), remove the prism 15, turn on the X-ray, and the X-ray will emit along the laser direction, and the X-ray and grain boundary can be realized without damaging the prism 15. alignment.

Laue photography is divided into two methods: transmission and back shot, and the laser aiming image monitoring device of the present invention belongs to the back shot method. The device of the present invention uses a precision adjustment mechanism to carry out precise adjustments, and utilizes the principle of laser alignment to unify visible light and X-rays, so that under the condition that visible light is aligned with crystal boundaries, X-rays can also be aligned with crystal boundaries. In the process, the magnification of the digital image is used to carefully identify the grain boundaries, and the fine adjustment process uses a precision three-dimensional platform.

Claims (5)

1. A laser aiming image monitoring device for a single crystal orientation tester is characterized in that: by suspension rod assembly (1), three-dimensional slide table (2), light beam aperture assembly (3), frame assembly (4 ), the boom assembly (1) is installed on the front beam (407) and the rear beam (406) of the frame assembly (4), and the three-dimensional slide table (2) is installed on the A positioning plate (402) of the frame assembly (4). On, the beam aperture assembly (3) is installed on the B positioning plate (401) of the frame assembly (4); The bottom surface of the rectangular frame (46) of the frame assembly (4) is provided with a base plate (45), and the base plate (45) is respectively fixed with the A positioning plate (402) with the mounting hole, and the B positioning plate (402) with the mounting hole ( 401), C positioning plate (408), three-dimensional slide table (2) is installed on the A positioning plate (402); Laser head fixing frame (403) and prism fixing frame (404) are installed on the B positioning plate (401), The C sleeve (420) of the laser head fixing frame (403) is connected to the B telescopic column (417) through the F top column (419) and the E top column (418), and the end surface of the B telescopic column (417) is fixed with an L-shaped support Plate (421), the L-shaped support plate (421) is connected with the trapezoidal plate (422) by screws, and the clamping frame (423) is installed on the trapezoidal plate (422); the B sleeve pipe (413) of the prism fixing frame (404) Connect A telescopic column (412) through D top column (415) and C top column (414), the end face of A telescopic column (412) is fixed with support plate (416), and prism (15) is installed on the support plate (416). ); C positioning plate (408) is equipped with fixed post (405), and ray cover (409) is installed on the fixed post (405) by D through hole (410), and ray cover (409) is used for fixing the X-ray head, and The X-ray beam is emitted from the ray aperture (411); the front, rear, left, and right sides of the rectangular frame (46) are respectively provided with a front baffle (41), a rear baffle (42), a left baffle (43) and a right baffle plate (44); The A guide rail (101), the B guide rail (102) and the C guide rail (103) of the boom assembly (1) are placed in parallel, and the two ends of the A guide rail (101) are respectively connected with C left clamping blocks (111) and C right clamps. Clamp block (112), C left clamp block (111) is fixed on the front beam (407), C right clamp block (112) is fixed on the rear beam (406); the two ends of B guide rail (102) are respectively connected with B Left clamp block (110) and B right clamp block (108), B left clamp block (110) is fixed on the front crossbeam (407), B right clamp block (108) is fixed on the rear crossbeam (406); C guide rail ( The two ends of 103) are respectively connected with A left clamping block (109) and A right clamping block (107), A left clamping block (109) is fixed on the front beam (407), A right clamping block (107) is fixed on the rear on the crossbeam (406); the A slide frame (104) is installed on the A guide rail (101) and the B guide rail (102) through the holes on the slide block, and the slide block of the A slide frame (104) is equipped with a Lighting lamp (11); B slide frame (105) is installed on A guide rail (101) and B guide rail (102) through the through hole that slide block (151) and pillar (152) end face form, and pillar (152) other end installs In the B through hole (157) of the connector (153), and locked by the right clamping stud (159), a pin (155) is installed in the A through hole (156) of the connector (153). One end of post (155) is connected with the fixed plate (154) that is used to fix camera (12); C slide frame (106) forms C through hole ( 167) is installed on the C guide rail (103), and the other end of the A casing (162) is connected with the C telescopic post (163) through the A top post (165) and the B top post (166), and the end of the C telescopic post (163) The part is connected with annulus (164), and annulus (164) passes through for camera (12) and cooperates with the fixed plate (154) on the B slide frame (105) and is used for fixing camera (12); Described three-dimensional slide table (2) is made of X-axis assembly (21), Y-axis assembly (22), Z-axis assembly (23) and sample stage (24), and X-axis assembly (21) is installed on Y-axis assembly ( 22) on the slider (224), the sample stage (24) is installed on the C guide rail (233) of the Z-axis assembly (23), and the Z-axis assembly (23) is installed on the L-shaped slide of the X-axis assembly (21). On the platform (214), the concave frame (222) of the Y-axis assembly (22) is installed on the A positioning plate (402) of the frame assembly (4); the left side of the concave frame (222) of the Y-axis assembly (22) A B guide rail (223) is installed on the side (226) and the right side (225), a slide block (224) is installed on the B guide rail (223), and one end of the B guide rail (223) passes through the right side (225) The hole on the top is connected with the output end of the motor (221), and the motor (221) is installed on the outer surface of the right side (225); the left side (216) of the concave frame (212) of the X-axis assembly (21) and A guide rail (213) is installed on the right side (215), an L-shaped slide table (214) is installed on the A guide rail (213), and one end of the A guide rail (213) passes through the hole on the right side (215) and The output end of the motor (221) is connected, and the motor (221) is installed on the outer surface of the right side (215); the lower side (236) and upper side (236) of the concave frame (232) of the Z-axis assembly (23) ( 235) is equipped with a C guide rail (233), the C guide rail (233) is equipped with a sample table (24), and one end of the C guide rail (233) passes through the hole on the upper side (235) and the output of the motor (231) end connection, the motor (231) is installed on the outer surface of the upper side (235); The beam aperture assembly (3) is composed of a connecting plate (31), an L-shaped adjustable frame (32), a positioning plate (33) and a shading plate (34), and the shading plate (34) is installed on the positioning plate (33) On, the positioning plate (33) is connected on the side wall (324) of the L-shaped adjustable frame (32), and the L-shaped adjustable frame (32) is flexibly connected with the connecting plate (31) by three adjustment rods; the shading plate ( 34) is provided with the passage (341) that passes through for light; Positioning plate (33) is provided with groove (331); L shape adjustable frame (32) is provided with A positioning nest (311), A positioning nest ( A adjusting rod (321) is installed in 311); B positioning nest (312), B adjusting rod (322) is installed in B positioning nest (312); C positioning nest (313), C positioning nest (313) is installed With C adjustment lever (323). 2. The laser aiming image monitoring device according to claim 1, characterized in that: the laser head (13) adopts an HNK type He-Ne laser, and the prism (15) adopts coated K9 glass. 3. The laser aiming image monitoring device according to claim 1, characterized in that: the front baffle (41) is a glass plate, the rear baffle (42), the left baffle (43) and the right baffle (44) for the aluminum plate. 4. The laser aiming image monitoring device according to claim 1, characterized in that: the illuminating lamp (11) adopts a BG-II adjustable halogen lamp source. 5. The laser aiming image monitoring device according to claim 1, characterized in that: the cooperation of the positioning socket and the adjusting rod makes the connecting plate (31) and the L-shaped adjustable frame (32) realize a flexible connection.

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