CN109638135A - Luminescence chip and its manufacturing method and current expansion method - Google Patents

Luminescence chip and its manufacturing method and current expansion method Download PDF

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Publication number
CN109638135A
CN109638135A CN201910006183.0A CN201910006183A CN109638135A CN 109638135 A CN109638135 A CN 109638135A CN 201910006183 A CN201910006183 A CN 201910006183A CN 109638135 A CN109638135 A CN 109638135A
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China
Prior art keywords
type
type electrode
layer
passivation protection
protection layer
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CN201910006183.0A
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Chinese (zh)
Inventor
周弘毅
魏振东
张书山
李俊贤
李健
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Xiamen Changelight Co Ltd
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Xiamen Changelight Co Ltd
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Priority to CN201910006183.0A priority Critical patent/CN109638135A/en
Publication of CN109638135A publication Critical patent/CN109638135A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/831Electrodes characterised by their shape
    • H10H20/8316Multi-layer electrodes comprising at least one discontinuous layer
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/83Electrodes
    • H10H20/831Electrodes characterised by their shape
    • H10H20/8312Electrodes characterised by their shape extending at least partially through the bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/032Manufacture or treatment of electrodes

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Abstract

本发明公开了一发光芯片及其制造方法和电流扩展方法,其中所述发光芯片包括依次层叠的一衬底、一N型半导体层、一发光层、一P型半导体层、一透明导电层以及一钝化保护层,所述发光芯片进一步包括层叠于所述钝化保护层的一N型电极和一P型电极,其中所述N型电极被电连接于所述N型半导体层,所述P型电极被电连接于所述P型半导体层和所述透明导电层,其中自所述N型电极注入的电流能够在所述N型电极的N型电极焊盘的附近被注入所述N型半导体层,自所述P型电极注入的电流能够在所述P型电极的P型电极焊盘的附近被进一步注入透明导电层,通过这样的方式,电流能够被均匀地分布,从而有利于提高发光效率和提升整体亮度。

The invention discloses a light-emitting chip, a manufacturing method and a current spreading method thereof, wherein the light-emitting chip comprises a substrate, an N-type semiconductor layer, a light-emitting layer, a P-type semiconductor layer, a transparent conductive layer and a passivation protection layer, the light-emitting chip further includes an N-type electrode and a P-type electrode stacked on the passivation protection layer, wherein the N-type electrode is electrically connected to the N-type semiconductor layer, the A P-type electrode is electrically connected to the P-type semiconductor layer and the transparent conductive layer, wherein the current injected from the N-type electrode can be injected into the N-type electrode in the vicinity of the N-type electrode pad of the N-type electrode type semiconductor layer, the current injected from the P-type electrode can be further injected into the transparent conductive layer in the vicinity of the P-type electrode pad of the P-type electrode. In this way, the current can be uniformly distributed, which is beneficial to Improve luminous efficiency and enhance overall brightness.

Description

Luminescence chip and its manufacturing method and current expansion method
Technical field
The present invention relates to semiconductor fields, in particular to a luminescence chip and its manufacturing method and current expansion method.
Background technique
Light emitting diode (Light Emmitting Diode, LED) is as the ring of new generation for replacing incandescent lamp and fluorescent lamp Light source is protected, compared with conventional illumination sources, has that high-efficient, low energy consumption, the service life is long, pollution-free, small in size, rich in color etc. all More advantages are widely used in the fields such as illumination, display and backlight.The prior art, which exists, incorporates passivation protection layer and electric current The semiconductor chip of the light emitting diode on barrier layer, wherein the P metal electrode of semiconductor chip directly connects with p type semiconductor layer Touching and N metal electrode are directly contacted with n type semiconductor layer, to infuse in subsequent permission electric current from N metal electrode and P metal electrode Enter semiconductor chip, this structure of semiconductor chip causes to there is many defects.Specifically, semiconductor chip P metal electrode and p type semiconductor layer can not form Ohmic contact, cause electric current near the p-type pad of P metal electrode that cannot be had Effect ground injects and the brightness of semiconductor chip is caused to reduce, although and the N-type pad of N metal electrode is contacted with n type semiconductor layer Well, but since the N-type bonding pad area of N metal electrode is bigger, electric current is caused excessively to concentrate on the N-type weldering of N metal electrode Disk position, so cause current-crowding effect occur and the brightness that reduces semiconductor chip.
Summary of the invention
It is an object of the present invention to provide a luminescence chip and its manufacturing methods and current expansion method, wherein from institute The electric current of a N-type electrode and P-type electrode injection for stating luminescence chip can be evenly distributed in the luminescence chip, thus Promote the brightness of the luminescence chip.
It is an object of the present invention to provide a luminescence chip and its manufacturing methods and current expansion method, wherein described It is partially electronically conductive near one N-type electrode pad of one N-type electrode of luminescence chip, to avoid the electric current injected from the N-type electrode There is the bad phenomenon of crowding effect near the N-type electrode pad;Wherein the one of a P-type electrode of the luminescence chip It is partially electronically conductive near P-type electrode pad, to improve the efficiency from the P-type electrode Injection Current, in this way, from institute The electric current for stating N-type electrode and P-type electrode injection can be evenly distributed in the luminescence chip.
It is an object of the present invention to provide a luminescence chip and its manufacturing methods and current expansion method, wherein in institute The lower part for stating the N-type electrode pad of N-type electrode is arranged a passivation protection layer and is arranged near the N-type electrode pad The short pin of an at least N-type electrode, is partly led by the N-type that the short pin of the N-type electrode injects a current into the semiconductor chip There is the bad phenomenon of crowding effect in the N-type electrode pad to avoid the electric current injected from the N-type electrode in body layer.
It is an object of the present invention to provide a luminescence chip and its manufacturing methods and current expansion method, wherein in institute The passivation protection layer is arranged in the lower part for stating the N-type electrode pad of N-type electrode, so that the surface of the N-type electrode pad It is smooth, to promote the reliability of encapsulation bonding wire.
It is an object of the present invention to provide a luminescence chip and its manufacturing methods and current expansion method, wherein in institute It states and an at least P-type electrode short pin is set near the P-type electrode pad of P-type electrode, pass through the short pin of the P-type electrode A transparency conducting layer is injected a current into, to improve the efficiency from the P-type electrode Injection Current.
One aspect under this invention, the present invention provide a luminescence chip comprising the substrate that stacks gradually, a N-type Semiconductor layer, a luminescent layer, a p type semiconductor layer, a transparency conducting layer and a passivation protection layer, wherein the luminescence chip Further comprise:
One N-type electrode comprising:
One N-type electrode pad is laminated in the passivation protection layer in the second end of the luminescence chip;
The short pin of an at least N-type electrode, extend the N-type electrode pad and pass through the passivation protection layer after The n type semiconductor layer is electrically connected near the N-type electrode pad;And
The long pin of an at least N-type electrode, prolongs from the N-type electrode pad to the first end direction of the luminescence chip It stretches and is electrically connected to the n type semiconductor layer after passing through the passivation protection layer;With
One P-type electrode comprising:
One P-type electrode pad is laminated in the passivation protection layer in the first end of the luminescence chip and is passing through The p type semiconductor layer is electrically connected to after the passivation protection layer;
The short pin of an at least P-type electrode, extend the P-type electrode pad and pass through the passivation protection layer after The transparency conducting layer is electrically connected near the P-type electrode pad;And
The long pin of an at least P-type electrode prolongs from the second end direction of luminescence chip described in the P-type electrode pad type It stretches and is electrically connected to the transparency conducting layer after passing through the passivation protection layer.
According to one embodiment of present invention, the extending direction of the short pin of the N-type electrode of the N-type electrode and described The extending direction of the long pin of N-type electrode is opposite.
According to one embodiment of present invention, the extending direction of the short pin of the P-type electrode of the P-type electrode and described The extending direction of the long pin of P-type electrode is identical.
According to one embodiment of present invention, the N-type electrode includes a long pin of N-type electrode, and the N The long pin of type electrode is laminated in the middle part of the passivation protection layer, wherein the P-type electrode includes that two P-type electrode length are drawn Foot, and the long pin of the P-type electrode is laminated in the edge of the passivation protection layer.
According to one embodiment of present invention, the N-type electrode includes two long pins of N-type electrode, and the N The long pin of type electrode is laminated in the edge of the passivation protection layer, wherein the P-type electrode includes that the P-type electrode length is drawn Foot, and the long pin of the P-type electrode is laminated in the middle part of the passivation protection layer.
According to one embodiment of present invention, the N-type electrode includes two long pins of N-type electrode, and the N The long pin of type electrode is laminated in the middle part of the passivation protection layer, wherein the P-type electrode includes that three P-type electrode length are drawn Foot, and a long pin of P-type electrode in three long pins of P-type electrode is laminated in the passivation protection layer Portion, other two long pin of P-type electrode are laminated in the edge of the passivation protection layer, and in two P-type electrodes The long pin of N-type electrode is maintained between long pin.
According to one embodiment of present invention, the N-type electrode includes three long pins of N-type electrode, and three A long pin of N-type electrode in the long pin of N-type electrode is laminated in the middle part of the passivation protection layer, other two The long pin of N-type electrode is laminated in the edge of the passivation protection layer, wherein the P-type electrode includes two p-type electricity Extremely long pin, and two long pins of P-type electrode are laminated in the middle part of the passivation protection layer, and in two N The long pin of P-type electrode is maintained between the long pin of type electrode.
Other side under this invention, the present invention further provides a luminescence chips comprising:
One N-type electrode;
One P-type electrode;
One transparency conducting layer;
One extension unit a comprising substrate, a n type semiconductor layer, a luminescent layer and the p-type stacked gradually is partly led Body layer, wherein the transparency conducting layer is laminated in the p type semiconductor layer;And
One passivation protection layer is laminated in the transparency conducting layer, wherein the passivation protection layer has an at least column N-type The short pin channel of long pin channel, at least a N-type, a p-type pad channel, the long pin channel of an at least column p-type and an at least P The short pin channel of type, wherein each of column long pin channel of N-type long pin channel is in a manner of being spaced apart from each other Extend from the second end of the luminescence chip to first end direction, each short pin channel of N-type is respectively formed in institute The second end of luminescence chip is stated, p-type pad channel is formed in the first end of the luminescence chip, a column p-type Each of the long pin channel long pin channel of the p-type in a manner of being spaced apart from each other from the first end of the luminescence chip to The second end direction extends, and each short pin channel of p-type is respectively formed in the first end of the luminescence chip, wherein institute It states N-type electrode and is laminated in the passivation protection layer, and a part of the N-type electrode is passing through each long pin of N-type It is electrically connected to the n type semiconductor layer behind channel and the short pin channel of each N-type, wherein the P-type electrode is laminated in The passivation protection layer, and a part of the P-type electrode is electrically connected to the P after passing through p-type pad channel Type semiconductor layer and institute is being electrically connected to after passing through each long pin channel of p-type and the short pin channel of each p-type State transparency conducting layer.
According to one embodiment of present invention, the passivation protection layer has the long pin channel of a column N-type and two column The long pin channel of p-type, a column long pin channel of N-type is at the middle part of the passivation protection layer from the luminescence chip The second end extends to first end direction, the long pin channel of p-type described in each column respectively the edge of the passivation protection layer from The first end of the luminescence chip extends to the second end direction.
According to one embodiment of present invention, the passivation protection layer has the long pin channel of the two column N-types and a column The long pin channel of p-type, the long pin channel of N-type described in each column is respectively at the edge of the passivation protection layer from the luminous core The second end of piece extends to first end direction, a column long pin channel of p-type the middle part of the passivation protection layer from The first end of the luminescence chip extends to the second end direction.
According to one embodiment of present invention, the passivation protection layer has the long pin channel of the two column N-types and three column The long pin channel of p-type, the long pin channel of N-type described in each column is respectively at the middle part of the passivation protection layer from the luminous core The second end of piece extends to first end direction, the column long pin channel of p-type in the three column long pin channels of p-type Extend at the middle part of the passivation protection layer from the first end of the luminescence chip to the second end direction, in addition described in two column The long pin channel of p-type is respectively at the edge of the passivation protection layer from the first end of the luminescence chip to the second end direction Extend, wherein maintaining the long pin channel of the column N-type between the two column long pin channels of p-type.
According to one embodiment of present invention, the passivation protection layer has the long pin channel of the three column N-types and two column The long pin channel of p-type, the three column long pin channels of N-type arranged in the long pin channels of N-type are protected in the passivation The middle part of sheath extends from the second end of the luminescence chip to first end direction, in addition the two column long pin channel point Do not extend at the edge of the passivation protection layer from the second end of the luminescence chip to first end direction, P described in each column The long pin channel of type is respectively at the middle part of the passivation protection layer from the first end of the luminescence chip to the second end direction Extend, wherein maintaining the long pin channel of the column p-type between the two column long pin channels of N-type.
According to one embodiment of present invention, the N-type electrode includes:
One N-type electrode pad, is laminated in the passivation protection layer;
The short pin of an at least N-type electrode extends the N-type electrode pad and is passing through the every of the passivation protection layer The n type semiconductor layer is electrically connected near the N-type electrode pad behind a short pin channel of the N-type;And
The long pin of an at least N-type electrode extends the N-type electrode pad and is passing through the every of the passivation protection layer The n type semiconductor layer is electrically connected to behind a long pin channel of the N-type.
According to one embodiment of present invention, the P-type electrode includes:
One P-type electrode pad is laminated in the passivation protection layer and welds in the p-type for passing through the passivation protection layer The p type semiconductor layer is electrically connected to behind disk channel;
The short pin of an at least P-type electrode extends the P-type electrode pad and is passing through the every of the passivation protection layer The transparency conducting layer is electrically connected near the P-type electrode pad behind a short pin channel of the p-type;And
The long pin of an at least P-type electrode extends the P-type electrode pad and is passing through the every of the passivation protection layer The transparency conducting layer is electrically connected to behind a long pin channel of the p-type.
Other side under this invention, the present invention further provides the current expansion method of a luminescence chip, wherein institute Current expansion method is stated to include the following steps:
(a) electric current injected from a N-type electrode pad is guided to be injected a N-type half near the N-type electrode pad Conductor layer;With
(b) it guides electric current inject from a P-type electrode pad to be injected one near the P-type electrode pad transparent to lead Electric layer.
According to one embodiment of present invention, in the step (a), further guidance is infused from the N-type electrode pad The electric current entered is injected the n type semiconductor layer at the middle part of the n type semiconductor layer, and in the step (b), further The electric current injected from the P-type electrode pad is guided to be injected the transparency conducting layer at the middle part of the transparency conducting layer.
According to one embodiment of present invention, in the step (a), a passivation protection layer is formed in the N-type electrode Between pad and the n type semiconductor layer, to prevent to be directly injected into the N-type half from the electric current that the N-type electrode pad injects Conductor layer.
Other side under this invention, the present invention further provides the manufacturing methods of a luminescence chip, wherein the system The method of making includes the following steps:
(i) one N-type electrode of stacking is in a passivation protection layer, wherein a N-type electrode pad of the N-type electrode is in the hair The second end of optical chip is laminated in the passivation protection layer, and the N-type electrode extends the N-type electrode pad at least The short pin of one N-type electrode is electrically connected to a N-type half after passing through the passivation protection layer near the N-type electrode pad The long pin of an at least N-type electrode for extending the N-type electrode pad of conductor layer, the N-type electrode is passing through the passivation The n type semiconductor layer is electrically connected to after protective layer;With
(ii) one P-type electrode of stacking is in the passivation protection layer, wherein a P-type electrode pad of the P-type electrode is in institute The first end for stating luminescence chip passes through the passivation protection layer and is electrically connected to a p type semiconductor layer, the P-type electrode The short pin of an at least P-type electrode of the P-type electrode pad is extended after passing through the passivation protection layer in the P-type electrode A transparency conducting layer, at least P for extending the P-type electrode pad of the P-type electrode are electrically connected near pad The long pin of type electrode is electrically connected to the transparency conducting layer after passing through the passivation protection layer.
According to one embodiment of present invention, before the step (i), the manufacturing method further comprises step:
An insulated substrate is laminated in a transparency conducting layer;
Etch the insulated substrate, with formed the passivation protection layer and be formed simultaneously the long pin channel of an at least column N-type, The short pin channel of an at least N-type, a p-type pad channel, the long pin channel of an at least column p-type and the short pin channel of an at least p-type In the passivation protection layer, thus in the step (i), the N-type electrode is passing through the long pin channel of the N-type and described The n type semiconductor layer is electrically connected to behind the short pin channel of N-type, and in the step (ii), the P-type electrode is being passed through It is electrically connected to the p type semiconductor layer behind p-type pad channel and is passing through the long pin channel of the p-type and the P Type is electrically connected to the transparency conducting layer behind short pin channel.
Detailed description of the invention
Figure 1A is the schematic cross-sectional view of one of manufacturing step of a luminescence chip of a preferred embodiment under this invention.
Figure 1B is the vertical view signal of one of manufacturing step of the luminescence chip of above-mentioned preferred embodiment under this invention Figure.
Fig. 2A is the two section view signal of the manufacturing step of the luminescence chip of above-mentioned preferred embodiment under this invention Figure.
Fig. 2 B is the two vertical view signal of the manufacturing step of the luminescence chip of above-mentioned preferred embodiment under this invention Figure.
Fig. 3 A is the three section view signal of the manufacturing step of the luminescence chip of above-mentioned preferred embodiment under this invention Figure.
Fig. 3 B is the three vertical view signal of the manufacturing step of the luminescence chip of above-mentioned preferred embodiment under this invention Figure.
Fig. 4 A is the four section view signal of the manufacturing step of the luminescence chip of above-mentioned preferred embodiment under this invention Figure, it illustrates the section view states of the luminescence chip.
Fig. 4 B is the four vertical view signal of the manufacturing step of the luminescence chip of above-mentioned preferred embodiment under this invention Figure, it illustrates the overlooking states of the luminescence chip.
Fig. 5 A is the section view of a variant embodiment of the luminescence chip of above-mentioned preferred embodiment under this invention Schematic diagram.
Fig. 5 B is the vertical view of the above-mentioned variant embodiment of the luminescence chip of above-mentioned preferred embodiment under this invention Schematic diagram.
Fig. 6 A is cuing open for another variant embodiment of the luminescence chip of above-mentioned preferred embodiment under this invention Depending on schematic diagram.
Fig. 6 B is the vertical view of the above-mentioned variant embodiment of the luminescence chip of above-mentioned preferred embodiment under this invention Schematic diagram.
Fig. 7 A is cuing open for another variant embodiment of the luminescence chip of above-mentioned preferred embodiment under this invention Depending on schematic diagram.
Fig. 7 B is the vertical view of the above-mentioned variant embodiment of the luminescence chip of above-mentioned preferred embodiment under this invention Schematic diagram.
Specific embodiment
It is described below for disclosing the present invention so that those skilled in the art can be realized the present invention.It is excellent in being described below Embodiment is selected to be only used as illustrating, it may occur to persons skilled in the art that other obvious modifications.It defines in the following description Basic principle of the invention can be applied to other embodiments, deformation scheme, improvement project, equivalent program and do not carry on the back Other technologies scheme from the spirit and scope of the present invention.
It will be understood by those skilled in the art that in exposure of the invention, term " longitudinal direction ", " transverse direction ", "upper", The orientation of the instructions such as "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside" or position are closed System is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, without referring to Show or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore above-mentioned art Language is not considered as limiting the invention.
It is understood that term " one " is interpreted as " at least one " or " one or more ", i.e., in one embodiment, The quantity of one element can be one, and in a further embodiment, the quantity of the element can be it is multiple, term " one " is no It can be interpreted as the limitation to quantity.
With reference to the attached drawing 1A to Fig. 4 B of Figure of description of the invention, a luminous core of a preferred embodiment under this invention Piece and its manufacturing process are disclosed for and are set forth in following description, wherein the luminescence chip includes an extension unit 10, a transparency conducting layer 20, a passivation protection layer 30, a N-type electrode 40 and a P-type electrode 50.
The extension unit 10 includes a substrate 11, a n type semiconductor layer 12, a luminescent layer 13 and a P-type semiconductor Layer 14, wherein the n type semiconductor layer 12 is laminated in the substrate 11, the luminescent layer 13 is laminated in the n type semiconductor layer 12, the p type semiconductor layer 14 is laminated in the luminescent layer 13, so that the substrate 11, the n type semiconductor layer 12, described Luminescent layer 13 and the p type semiconductor layer 14 stack gradually.The transparency conducting layer 20 is laminated in the institute of the extension unit 10 P type semiconductor layer 14 is stated, the passivation protection layer 30 is laminated in the transparency conducting layer 20, the N-type electrode 40 and the p-type Electrode 50 is respectively laminated on the passivation protection layer 30, and the N-type electrode 40 is electrically connected to the extension unit 10 The n type semiconductor layer 12, the P-type electrode 50 are electrically connected to 14 He of the p type semiconductor layer of the extension unit 10 The transparency conducting layer 20.
For example, growing the N-type half from the substrate 11 in a preferable examples of the luminescence chip of the invention Conductor layer 12, so that the n type semiconductor layer 12 is laminated in the substrate 11;The hair is grown from the n type semiconductor layer 12 Photosphere 13, so that the luminescent layer 13 is laminated in the n type semiconductor layer 12;The p-type is grown from the luminescent layer 13 partly to lead Body layer 14, so that the p type semiconductor layer 14 is laminated in the luminescent layer 13, so that the substrate 11, the N-type are partly led Body layer 12, the luminescent layer 13 and the p type semiconductor layer 14 stack gradually.
It is noted that the type of the substrate 11 of the extension unit 10 can be but not limited to sapphire lining Bottom, silicon substrate, silicon carbide substrates etc..The n type semiconductor layer 12 and the p type semiconductor layer 14 can be but not limited to nitrogenize Gallium layer.The luminescent layer 13 can be but not limited to quantum well layer.
With continued reference to attached drawing 1A and Figure 1B, the extension unit 10 has at least exposed portion 15 of semiconductor, wherein described Semiconductor bare portion 15 extends to the n type semiconductor layer 12 through the luminescent layer 13 from the p type semiconductor layer 14, to allow A part of surface of the n type semiconductor layer 12 is exposed to the semiconductor bare portion 15.
In a preferable examples of the luminescence chip of the invention, by the P for etching the extension unit 10 Type semiconductor layer 14 and the mode of the luminescent layer 13 are capable of forming from the p type semiconductor layer 14 to be extended through the luminescent layer 13 The extremely semiconductor bare portion 15 of the n type semiconductor layer 12, and a part of surface violence of the n type semiconductor layer 12 In the semiconductor bare portion 15.
In another preferable examples of the luminescence chip of the invention, by etching described in the extension unit 10 The mode of p type semiconductor layer 14, the luminescent layer 13 and the n type semiconductor layer 12 is capable of forming from the p type semiconductor layer 14 extend to the semiconductor bare portion 15 of the n type semiconductor layer 12, and the N-type semiconductor through the luminescent layer 13 A part of surface violence of layer 12 is in the semiconductor bare portion 15.That is, this in the luminescence chip specifically shows In example, with reference to attached drawing 1A, a part of thickness of the n type semiconductor layer 12 is removed, thus pair of the n type semiconductor layer 12 The thickness of the part in semiconductor bare portion 15 described in Ying Yu corresponds to the luminescent layer less than the n type semiconductor layer 12 The thickness of 13 part.
Further, the extension unit 10 has the exposed portion 16 in an edge, wherein the exposed portion in the edge 16 is described The edge of extension unit 10 extends to institute through the luminescent layer 13 and the n type semiconductor layer 12 from the p type semiconductor layer 14 Substrate 11 is stated, with the edge of the exposure n type semiconductor layer 12 in the exposed portion 16 in the edge.For example, described in of the invention In one preferable examples of luminescence chip, by the p type semiconductor layer 14, the luminescent layer that etch the extension unit 10 13 and the mode of the n type semiconductor layer 12 be capable of forming from the p type semiconductor layer 14 through the luminescent layer 13 and the N-type Semiconductor layer 12 extends to the exposed portion 16 in the edge of the substrate 11.
It is noted that the exposed portion 16 in the semiconductor bare portion 15 of the extension unit 10 and the edge can be with It is formed simultaneously, can also be formed according to sequencing, the luminescence chip of the invention is unrestricted in this regard.In addition, erosion The concrete technology that carving method forms the exposed portion 16 in the edge forms the concrete technology one in the semiconductor bare portion 15 with etching It causes, for example, the P-type semiconductor of the extension unit 10 can be etched by dry method etch technology or wet etching process Layer 14, the luminescent layer 13 and the n type semiconductor layer 12 are to form the exposed portion in the semiconductor bare portion 15 and the edge 16。
Further, with continued reference to attached drawing 1A and Figure 1B, the semiconductor bare portion 15 of the extension unit 10 has The exposed portion 151 of one N-type pad, the exposed portion 152 of the long pin of a N-type and the exposed portion 153 of the short pin of an at least N-type, the wherein institute The second end 102 that the exposed portion 151 of N-type pad is formed in the luminescence chip is stated, the exposed portion 152 of the long pin of N-type exists Prolong from the exposed portion 151 of the N-type pad to 101 direction of a first end of the luminescence chip at the middle part of the extension unit 10 It stretches, each exposed portion 153 of the short pin of N-type is respectively from the exposed portion 151 of the N-type pad to described in a manner of being spaced apart from each other The edge direction of the second end 102 of luminescence chip extends.In the short transverse of the luminescence chip, the extension unit The exposed portion 151 of the N-type pad in the 10 semiconductor bare portion 15, the exposed portion 152 of the long pin of the N-type and each described The exposed portion 153 of the short pin of N-type extends to the n type semiconductor layer through the luminescent layer 13 from the p type semiconductor layer 14 respectively 12, it is naked in the exposed portion 151 of the N-type pad, the long pin of the N-type with a part of surface of the exposure n type semiconductor layer 12 Dew portion 152 and each exposed portion 153 of the short pin of the N-type.
With reference to attached drawing 2A and Fig. 2 B, the transparency conducting layer 20 is laminated in the P-type semiconductor of the extension unit 10 Layer 14, wherein the transparency conducting layer 20 has a first passage 21 and a second channel 22, wherein the transparency conducting layer 20 The first passage 21 be formed in the first end 101 of the luminescence chip, and the first passage 21 corresponds to The p type semiconductor layer 14 of the extension unit 10, with the exposure p type semiconductor layer 14 in the transparency conducting layer 20 The first passage 21, wherein the semiconductor bare portion 15 of the extension unit 10 corresponds to and be connected to described transparent lead The second channel 22 of electric layer 20.Preferably, the shape of the second channel 22 of the transparency conducting layer 20 and described outer The shape for prolonging the semiconductor bare portion 15 of unit 10 is consistent.It is highly preferred that described the second of the transparency conducting layer 20 is logical The size in road 22 slightly larger than the semiconductor bare portion 15 of the extension unit 10 size, with reference to attached drawing 2A and Fig. 2 B, from And a part of surface of the p type semiconductor layer 14 of the extension unit 10 is made to be exposed to the transparency conducting layer 20 The second channel 22.
In a specific example of the luminescence chip of the invention, the material of the transparency conducting layer 20 has high saturating The characteristic of bright, high conductivity and low contact resistance, for example, forming the material of the transparency conducting layer 20 can be selected from but not limited to NiAu alloy, tin indium oxide, indium zinc oxide, zirconium oxide, chromium oxide.
Specifically, the transparency conducting layer 20 is laminated in the step of the p type semiconductor layer 14 of the extension unit 10 Suddenly include:
Firstly, an electrically conducting transparent base is laminated in the extension unit 10, so that the electrically conducting transparent base is laminated in institute State the p type semiconductor layer 14 and the n type semiconductor layer 12 of extension unit 10.The thickness of the electrically conducting transparent base Range is 100 angstroms -2000 angstroms (including 100 angstroms and 2000 angstroms).For example, one in the luminescence chip of the invention is preferably shown In example, the electrically conducting transparent base can be precipitated through but not limited to the mode of sputtering or vapor deposition in the extension unit 10, So that the electrically conducting transparent base is laminated in the p type semiconductor layer 14 and the n type semiconductor layer of the extension unit 10 12。
Secondly, identifying etching figure in the electrically conducting transparent base using the photoresist layer for being laminated in the electrically conducting transparent base Case, and the electrically conducting transparent base is etched by modes such as dry etching or wet etchings, so that the electrically conducting transparent base The transparency conducting layer 20 is formed, and is formed simultaneously the first passage 21 and the second channel of the transparency conducting layer 20 22。
Finally, removal photoresist layer.It is noted that removal is laminated in the photoresist layer of the transparency conducting layer 20 Mode is unrestricted in the luminescence chip of the invention.
It is noted that the shape of the first passage 21 of the transparency conducting layer 20 shown in attached drawing 2B is circle Scheme it is merely illustrative, but the concrete shape of the first passage 21 shown in attached drawing 2B and be not construed as to of the invention The limitation of the content and range of the luminescence chip.
With reference to attached drawing 3A and Fig. 3 B, the passivation protection layer 30 is laminated in the transparency conducting layer 20, and the passivation The first passage 21 of the protective layer 30 further through the transparency conducting layer 20 extends to the p-type of the extension unit 10 The semiconductor bare of semiconductor layer 14, the second channel 22 through the transparency conducting layer 20 and the extension unit 10 Portion 15 extends to the n type semiconductor layer 12 of the extension unit 10 and the edge through the extension unit 10 is exposed Portion 16 extends to the substrate 11 of the extension unit 10.
The passivation protection layer 30 has the long pin channel 31 of a column N-type, the short pin channel 32 of an at least N-type, p-type weldering Disk channel 33 and the long pin channel 34 of two column p-types.In the one column long pin channel 31 of N-type of the passivation protection layer 30 Each long pin channel 31 of the N-type is in a manner of being spaced apart from each other at the middle part of the passivation protection layer 30 from the luminescence chip The second end 102 extend to 101 direction of first end, and the long pin channel 31 of each N-type is right respectively The exposed portion 152 of the long pin of the N-type of extension unit 10 described in Ying Yu, with a part of table of the exposure n type semiconductor layer 12 Face is in the long pin channel 31 of each of the passivation protection layer 30 N-type.The short pin of the N-type of the passivation protection layer 30 Channel 32 corresponds to the exposed portion 153 of the short pin of the N-type of the extension unit 10, with the exposure n type semiconductor layer 12 A part of surface is in the short pin channel 32 of the N-type of the passivation protection layer 30.The p-type of the passivation protection layer 30 is welded Disk channel 33 is formed in the first end 101 of the luminescence chip, wherein the p-type pad of the passivation protection layer 30 Channel 33 corresponds to the first passage 21 of the transparency conducting layer 20, with the p-type of the exposure extension unit 10 half A part of surface of conductor layer 14 is in the p-type pad channel 33 of the passivation protection layer 30.The passivation protection layer 30 Each of long pin channel 34 of p-type described in each column long pin channel 34 of the p-type is in a manner of being spaced apart from each other in the passivation The edge of protective layer 30 extends from the first end 101 of the luminescence chip to 102 direction of the second end, and every A long pin channel 34 of the p-type corresponds respectively to the transparency conducting layer 20, with one of the exposure transparency conducting layer 20 Divide surface in the long pin channel 34 of each of the passivation protection layer 30 p-type.
Further, with continued reference to attached drawing 3A and Fig. 3 B, the passivation protection layer 30 further has at least a p-type is short to draw Foot channel 35, wherein the short pin channel 35 of each p-type is adjacent with p-type pad channel 33 respectively, and each P The short pin channel 35 of type corresponds respectively to the transparency conducting layer 20, with a part of surface of the exposure transparency conducting layer 20 in The short pin channel 35 of each of the passivation protection layer 30 p-type.
It is noted that the material for forming the passivation protection layer 30 can be the material of insulation transparent, such as but not It is limited to silica, silicon nitride, aluminium oxide, magnesium fluoride etc..
Specifically, the passivation protection layer 30 be laminated in the step of transparency conducting layer 20 including:
Firstly, one insulated substrate of deposition is in the transparency conducting layer 20, and the insulated substrate is allowed transparent to lead through described The first passage 21 of electric layer 20 extends to the p type semiconductor layer 14 of the extension unit 10, through the electrically conducting transparent The second channel 22 of layer 20 and the semiconductor bare portion 15 of the extension unit 10 extend to the extension unit 10 The n type semiconductor layer 12 and the exposed portion 16 in the edge through the extension unit 10 extend to the extension unit 10 The substrate 11.The thickness of the insulated substrate is unrestricted, such as the thickness range of the insulated substrate can To be 600 angstroms -3000 angstroms (including 600 angstroms and 3000 angstroms).It is understood that the thickness of the passivation protection layer 30 with The thickness of the insulated substrate is identical.
Secondly, etching pattern is identified in the electrically conducting transparent base using the photoresist layer for being laminated in the insulated substrate, The insulated substrate is etched with by modes such as dry etching or wet etchings, so that the insulated substrate forms the passivation Protective layer 30, and be formed simultaneously the long pin channel 31 of the N-type of the passivation protection layer 30, the short pin channel 32 of the N-type, P-type pad channel 33, the long pin channel 34 of the p-type and the short pin channel 35 of the p-type.
Finally, removal photoresist layer.It is noted that removal is laminated in the photoresist layer of the transparency conducting layer 20 Mode is unrestricted in the luminescence chip of the invention.
With reference to attached drawing 4A and Fig. 4 B, the N-type electrode 40 and the P-type electrode 50 are respectively laminated on the passivation protection layer 30, and a part of the N-type electrode 40 is passing through each of the passivation protection layer 30 long 31 He of pin channel of the N-type The n type semiconductor layer 12 of the extension unit 10 is electrically connected to behind each short pin channel 32 of the N-type respectively, it is described A part of P-type electrode 50 is electrically connected to described outer behind the p-type pad channel 33 for passing through the passivation protection layer 30 Prolong the p type semiconductor layer 14 of unit 10 and passes through each of the passivation protection layer 30 long pin channel 34 of the p-type The transparency conducting layer 20 is electrically connected to behind each short pin channel 35 of p-type.
Specifically, the N-type electrode 40 includes a N-type electrode pad 41, the long pin 42 of a N-type electrode and at least one The short pin 43 of N-type electrode, wherein the long pin 42 of the N-type electrode pad 41, the N-type electrode and each N-type electrode are short Pin 43 is integrally formed and is electrically connected to each other, and a part of the long pin 42 of the N-type electrode is passing through passivation guarantor The n type semiconductor layer 12 of the extension unit 10 is electrically connected to behind the long pin channel 31 of each of sheath 30 N-type, A part with the short pin 43 of the N-type electrode is passing through each of the passivation protection layer 30 short pin channel 32 of the N-type It is electrically connected to the n type semiconductor layer 12 of the extension unit 10 afterwards.
More specifically, the N-type electrode pad 41 of the N-type electrode 40 is laminated in the passivation protection layer 30, that is, The N-type electrode pad 41 of the N-type electrode 40 and the n type semiconductor layer 12 of the extension unit 10 are not electrically connected It connects, so that the electric current injected from the N-type electrode 40 be avoided directly to enter the extension unit 10 through the N-type electrode pad 41 The n type semiconductor layer 12, and then avoid current crowding effect occur in the N-type electrode pad 41 of the N-type electrode 40 It answers.In addition, the N-type electrode pad 41 of the N-type electrode 40 is laminated in the mode of the passivation protection layer 30, so that described The surface of the N-type electrode pad 41 of N-type electrode 40 is more smooth, in this way, can guarantee to encapsulate bonding wire Reliability.The short pin 43 of each of the N-type electrode 40 N-type electrode is respectively laminated on the passivation protection layer 30 and is wearing It crosses behind the short pin channel 32 of each of the passivation protection layer 30 N-type and is electrically connected to the N of the extension unit 10 Type semiconductor layer 12, in this way, when electric current can be further through each N from after the N-type electrode 40 injection The short pin 43 of type electrode injects the n type semiconductor layer 12 of the extension unit 10 near the N-type electrode pad 41, To avoiding while current-crowding effect occurs in the N-type electrode pad 41, the N-type electrode 40 and described outer is realized Prolong the partially electronically conductive of the n type semiconductor layer 12 of unit 10, and then is conducive to optimize current distribution.The N-type electrode 40 The long pin 42 of N-type electrode is laminated in the passivation protection layer 30, wherein the long pin 42 of the N-type electrode is protected in the passivation The first end 101 direction of the middle part of sheath 30 from the N-type electrode pad 41 to the luminescence chip extends, and institute A part of the long pin 42 of N-type electrode is stated in the quilt behind each of the passivation protection layer 30 long pin channel 31 of the N-type It is electrically connected to the n type semiconductor layer 12 of the extension unit 10.
Correspondingly, the P-type electrode 50 includes a P-type electrode pad 51, the long pin 52 of two P-type electrodes and an at least P The short pin 53 of type electrode, wherein the P-type electrode pad 51, each long pin 52 of P-type electrode and each p-type electricity Extremely short pin 53 is integrally formed and is electrically connected to each other, and the P-type electrode pad 51 is passing through the passivation protection layer 30 P-type pad channel 33 after be electrically connected to the p type semiconductor layer 14 of the extension unit 10, each p-type The long pin 52 of electrode is electrically connected to institute after passing through each of the passivation protection layer 30 long pin channel 52 of the p-type respectively Transparency conducting layer 20 is stated, each short pin 53 of P-type electrode is passing through each of the passivation protection layer 30 p-type respectively The transparency conducting layer 20 is electrically connected to behind short pin channel 35.
Specifically, the P-type electrode pad 51 of the P-type electrode 50 is laminated in the passivation protection layer 30 and is passing through The P-type semiconductor of the extension unit 10 is electrically connected to behind the p-type pad channel 33 of the passivation protection layer 30 Layer 14, so that further the extension can be injected through the P-type electrode pad 51 from the electric current that the P-type electrode 50 is injected The p type semiconductor layer 14 of unit 10.In addition, the P-type electrode pad 51 of the P-type electrode 50 is through the passivation protection The p type semiconductor layer 14 of the extension unit 10 is incorporated into behind the rounded p-type pad channel 33 of layer 30 Mode is electrically connected to the p type semiconductor layer 14, so that the surface of the P-type electrode pad 51 of the P-type electrode 50 is more To be smooth, in this way, it can guarantee the reliability for encapsulating bonding wire.Each of the P-type electrode 50 P-type electrode Short pin 53 is respectively laminated on the passivation protection layer 30 and is passing through each of the passivation protection layer 30 short pin of the p-type The transparency conducting layer 20, in this way, energy are electrically connected to behind channel 35 near the P-type electrode pad 51 It is enough to improve the current injection efficiency that the electric current of the luminescence chip is injected from the P-type electrode 50, so that it is uniform to be conducive to electric current Distribution.The long pin 52 of each of the P-type electrode 50 P-type electrode is respectively laminated on the passivation protection layer 30, wherein often A long pin 52 of the P-type electrode is respectively at the edge of the passivation protection layer 30 from the P-type electrode pad 51 to the hair 102 direction of the second end of optical chip extends, and a part of the long pin 52 of each P-type electrode is across described Each of passivation protection layer 30 p-type is electrically connected to the transparency conducting layer 20 behind long pin channel 34.
In a preferable examples of the luminescence chip of the invention, the N-type electrode 40 and the P-type electrode 50 can To be formed simultaneously, that is, the N-type electrode 40 and the P-type electrode 50 can be laminated by same procedure and protected in the passivation Sheath 30.Optionally, the N-type electrode 40 and the P-type electrode 50 are formed according to sequencing.In addition, forming the N-type electricity The material of pole 40 and the P-type electrode 50 is unrestricted in the luminescence chip of the invention, for example, Cr, Ni, Al, Ti, Pt, The high conductivity materials such as Au can be used for making the N-type electrode 40 and the P-type electrode 50.
It is noted that the position of the N-type electrode pad 41 of the N-type electrode 40 corresponds to the extension unit The position in the 10 exposed portion 151 of the N-type pad;The position of the long pin 42 of the N-type electrode of the N-type electrode 40 and quantity Correspond respectively to position and the columns in the long pin channel 31 of the N-type of the passivation protection layer 30, the passivation protection layer 30 The long pin channel 31 of the N-type position and columns correspond to the extension unit 10 the exposed portion 152 of the long pin of the N-type Position and quantity;The position of the short pin 43 of the N-type electrode of the N-type electrode 40 and quantity correspond respectively to the passivation The position in the short pin channel 32 of the N-type of protective layer 30 and quantity, the short pin channel of the N-type of the passivation protection layer 30 32 position and quantity correspond to position and the quantity in the exposed portion 153 of the short pin of the N-type of the extension unit 10.Accordingly Ground, the position of the P-type electrode pad 51 of the P-type electrode 50 correspond to the p-type pad of the passivation protection layer 30 The position of the position in channel 33, the p-type pad channel 33 of the passivation protection layer 30 corresponds to the transparency conducting layer 20 The first passage 21 position;The position of the long pin 52 of the P-type electrode of the P-type electrode 50 and quantity correspond to institute State position and the columns in the long pin channel 34 of the p-type of passivation protection layer 30;The P-type electrode of the P-type electrode 50 is short The position of pin 53 and quantity correspond to position and the quantity in the short pin channel 35 of the p-type of the passivation protection layer 30.
Attached drawing 5A and Fig. 5 B show a variant embodiment of the luminescence chip, shown in attached drawing 1A to Fig. 4 B It is described outer in this preferable examples of the luminescence chip shown in attached drawing 5A to Fig. 5 B unlike the luminescence chip Prolong the semiconductor bare portion 15 tool of unit 10 there are two the exposed portion 152 of the long pin of the N-type, wherein each N-type is long The exposed portion 152 of pin is respectively at the edge of the extension unit 10 from the exposed portion 151 of the N-type pad to the luminescence chip 101 direction of first end extends.The passivation protection layer 30 has described in the long pin channel 31 of the two column N-types and a column The long pin channel 34 of p-type, wherein the long pin channel of each of long pin channel 31 of N-type described in each column N-type 31 is with mutual The mode at interval is at the edge of the passivation protection layer 30 from the second end 102 of the luminescence chip to the first end 101 direction of portion extends, and one arranges each of described long pin channel 34 of p-type long pin channel 34 of the p-type to be spaced apart from each other Mode extends from the first end 101 of the luminescence chip to 102 direction of the second end.The N-type electrode 40 is wrapped Two long pins 42 of N-type electrode are included, each long pin 42 of N-type electrode is respectively to be laminated in the passivation protection layer 30 The first end 101 direction of the mode from the N-type electrode pad 41 to the luminescence chip at edge extend, and it is every A long pin 42 of the N-type electrode is respectively logical across each of the long pin channel 31 of N-type described in each column long pin of the N-type The n type semiconductor layer 12 is electrically connected to behind road 31.The P-type electrode 50 includes a long pin 52 of P-type electrode, institute The long pin 52 of P-type electrode is stated in a manner of being laminated in the middle part of the passivation protection layer 30 from the P-type electrode pad 51 to institute 102 direction of the second end for stating luminescence chip extends, and the long pin 52 of the P-type electrode is passing through a column p-type Each of long pin channel 34 is electrically connected to the transparency conducting layer 20 behind the long pin channel 34 of the p-type.
Attached drawing 6A and Fig. 6 B show a variant embodiment of the luminescence chip, shown in attached drawing 1A to Fig. 4 B Unlike the luminescence chip, in this preferable examples of the luminescence chip shown in attached drawing 6A to Fig. 6 B, the N-type Electrode 40 includes two long pins 42 of N-type electrode, wherein the long pin 42 of each N-type electrode is described to be laminated in respectively The first end 101 side of the mode at the middle part of passivation protection layer 30 from the N-type electrode pad 41 to the luminescence chip To extension.The P-type electrode 50 includes three long pins 52 of P-type electrode, wherein in three long pins 52 of P-type electrode A long pin 52 of P-type electrode in a manner of being laminated in the middle part of the passivation protection layer 30 from the P-type electrode weld Disk 51 to 102 direction of the second end of the luminescence chip extend, other two described long pin 52 of P-type electrode respectively with It is laminated in described second of the mode at the edge of the passivation protection layer 30 from the P-type electrode pad 51 to the luminescence chip 102 direction of end extends.Preferably, the N-type electrode is maintained between the long pin 52 of the P-type electrode described in any two Long pin 42.
Attached drawing 7A and Fig. 7 B show a variant embodiment of the luminescence chip, shown in attached drawing 1A to Fig. 4 B Unlike the luminescence chip, in this preferable examples of the luminescence chip shown in attached drawing 7A to Fig. 7 B, the p-type Electrode 50 includes two long pins 52 of P-type electrode, wherein the long pin 52 of each P-type electrode is described to be laminated in respectively The second end 102 side of the mode at the middle part of passivation protection layer 30 from the P-type electrode pad 51 to the luminescence chip To extension.The N-type electrode 40 includes three long pins 42 of N-type electrode, wherein in three long pins 42 of N-type electrode A long pin 42 of N-type electrode in a manner of being laminated in the middle part of the passivation protection layer 30 from the N-type electrode weld Disk 41 to 101 direction of the first end of the luminescence chip extend, other two described long pin 42 of N-type electrode respectively with It is laminated in described first of the mode at the edge of the passivation protection layer 30 from the N-type electrode pad 41 to the luminescence chip 101 direction of end extends.Preferably, the P-type electrode is maintained between the long pin 42 of the N-type electrode described in any two Long pin 52.
Other side under this invention, the present invention further provides the manufacturing methods of the luminescence chip, wherein described Manufacturing method includes the following steps:
(i) N-type electrode 40 is laminated in the passivation protection layer 30, wherein the N-type electrode of the N-type electrode 40 Pad 41 is laminated in the passivation protection layer 30 in the second end 102 of the luminescence chip, and the N-type electrode 40 is prolonged Stretch at least one described short pin 43 of N-type electrode of the N-type electrode pad 41 after passing through the passivation protection layer 30 The n type semiconductor layer 12 is electrically connected near the N-type electrode pad 41, the N-type electrode 40 extends the N The long pin 42 of at least one of type electrode pad 41 N-type electrode is electrically connected to institute after passing through the passivation protection layer 30 State n type semiconductor layer 12;With
(ii) P-type electrode 50 is laminated in the passivation protection layer 30, wherein the p-type electricity of the P-type electrode 50 Pole pad 51 passes through the passivation protection layer 30 in the first end 101 of the luminescence chip and is electrically connected to the P Type semiconductor layer 14, the P-type electrode is short draws at least one of the P-type electrode pad 51 of extending of the P-type electrode 50 Foot 53 is electrically connected to the transparency conducting layer near the P-type electrode pad 51 after passing through the passivation protection layer 30 20, at least one described long pin 52 of P-type electrode for extending the P-type electrode pad 51 of the P-type electrode 50 is passing through The transparency conducting layer 20 is electrically connected to after the passivation protection layer 30.
Other side under this invention, the present invention further provides the current expansion methods of the luminescence chip, wherein The current expansion method includes the following steps:
(a) electric current injected from the N-type electrode pad 41 is guided to be injected institute near the N-type electrode pad 41 State n type semiconductor layer 12;(b) guide the electric current injected from the P-type electrode pad 51 in the attached of the P-type electrode pad 51 The transparency conducting layer 20 closely is injected, in this way, can be avoided the electric current from the N-type electrode 40 injection in institute The bad phenomenon that current-crowding effect occurs in N-type electrode pad 41 is stated to occur and improve what electric current was injected from the P-type electrode 50 Efficiency, to be conducive to be evenly distributed electric current, to improve the luminous efficiency and overall brightness of the luminescence chip.
It is worth noting that, " stacking " involved in the present invention can be direct stacking, it is also possible to be laminated indirectly. For example, the n type semiconductor layer 12 of the extension unit 10, which is laminated in the substrate 11, can refer to the n type semiconductor layer 12 are directly laminated in the substrate 11, that is, the n type semiconductor layer 12 is directly grown from the surface of the substrate 11, so that The n type semiconductor layer 12 is laminated in the substrate 11;The n type semiconductor layer 12 of the extension unit 10 is laminated in described Substrate 11 may also mean that the n type semiconductor layer 12 is laminated in the substrate 11 indirectly, that is, in the substrate 11 and described Other layers, such as, but not limited to buffer layer are also provided between n type semiconductor layer 12, that is, first in the substrate 11 Then surface grown buffer layer grows the n type semiconductor layer 12 on the surface of buffer layer again, so that the N-type semiconductor Layer 12 is laminated in the substrate 11.
It is worth noting that, showing the substrate 11 of the semiconductor chip, institute in Figure of description of the invention State n type semiconductor layer 12, the luminescent layer 13, the p type semiconductor layer 14, the transparency conducting layer 20, the passivation protection The thickness of layer 30, the N-type electrode 40 and the P-type electrode 50 is merely illustrative, is not offered as the substrate 11, the N-type Semiconductor layer 12, the luminescent layer 13, the p type semiconductor layer 14, the transparency conducting layer 20, the passivation protection layer 30, The actual thickness of the N-type electrode 40 and the P-type electrode 50.Also, it is the substrate 11, the n type semiconductor layer 12, described Luminescent layer 13, the p type semiconductor layer 14, the transparency conducting layer 20, the passivation protection layer 30,40 and of the N-type electrode Actual proportions relationship between the P-type electrode 50 is also unlike shown in the accompanying drawings.
It will be appreciated by those skilled in the art that above embodiments are only for example, wherein the feature of different embodiments It can be combined with each other, with the reality that the content disclosed according to the present invention is readily conceivable that but is not explicitly pointed out in the accompanying drawings Apply mode.
It should be understood by those skilled in the art that foregoing description and the embodiment of the present invention shown in the drawings are only used as illustrating And it is not intended to limit the present invention.The purpose of the present invention has been fully and effectively achieved.Function and structural principle of the invention exists It shows and illustrates in embodiment, under without departing from the principle, embodiments of the present invention can have any deformation or modification.

Claims (18)

1.一发光芯片,其特征在于,包括依次层叠的一衬底、一N型半导体层、一发光层、一P型半导体层、一透明导电层以及一钝化保护层,其中所述发光芯片进一步包括:1. a light-emitting chip, is characterized in that, comprises a substrate, an N-type semiconductor layer, a light-emitting layer, a P-type semiconductor layer, a transparent conductive layer and a passivation protection layer stacked successively, wherein the light-emitting chip Further includes: 一N型电极,其包括:an N-type electrode comprising: 一N型电极焊盘,其在所述发光芯片的第二端部层叠于所述钝化保护层;an N-type electrode pad, which is stacked on the passivation protection layer at the second end of the light-emitting chip; 至少一N型电极短引脚,其延伸于所述N型电极焊盘和在穿过所述钝化保护层后在所述N型电极焊盘的附近被电连接于所述N型半导体层;以及At least one N-type electrode short lead extending from the N-type electrode pad and electrically connected to the N-type semiconductor layer in the vicinity of the N-type electrode pad after passing through the passivation protection layer ;as well as 至少一N型电极长引脚,其自所述N型电极焊盘向所述发光芯片的第一端部方向延伸和在穿过所述钝化保护层后被电连接于所述N型半导体层;和At least one N-type electrode long lead, which extends from the N-type electrode pad to the first end of the light-emitting chip and is electrically connected to the N-type semiconductor after passing through the passivation protective layer layer; and 一P型电极,其包括:A P-type electrode, which includes: 一P型电极焊盘,其在所述发光芯片的第一端部层叠于所述钝化保护层和在穿过所述钝化保护层后被电连接于所述P型半导体层;a P-type electrode pad, which is laminated on the passivation protection layer at the first end of the light-emitting chip and is electrically connected to the P-type semiconductor layer after passing through the passivation protection layer; 至少一P型电极短引脚,其延伸于所述P型电极焊盘和在穿过所述钝化保护层后在所述P型电极焊盘的附近被电连接于所述透明导电层;以及at least one P-type electrode short pin, which extends from the P-type electrode pad and is electrically connected to the transparent conductive layer in the vicinity of the P-type electrode pad after passing through the passivation protection layer; as well as 至少一P型电极长引脚,其自所述P型电极焊盘型所述发光芯片的第二端部方向延伸和在穿过所述钝化保护层后被电连接于所述透明导电层。At least one P-type electrode long lead, which extends from the second end of the P-type electrode pad type of the light-emitting chip and is electrically connected to the transparent conductive layer after passing through the passivation protective layer . 2.根据权利要求1所述的发光芯片,其中所述N型电极包括一个所述N型电极长引脚,并且所述N型电极长引脚层叠于所述钝化保护层的中部,其中所述P型电极包括两个所述P型电极长引脚,并且所述P型电极长引脚层叠于所述钝化保护层的边缘。2 . The light-emitting chip according to claim 1 , wherein the N-type electrode comprises one long N-type electrode lead, and the N-type electrode long lead is stacked in the middle of the passivation protection layer, wherein The P-type electrode includes two long pins of the P-type electrode, and the long pins of the P-type electrode are stacked on the edge of the passivation protection layer. 3.根据权利要求保护1所述的发光芯片,其中所述N型电极包括两个所述N型电极长引脚,并且所述N型电极长引脚层叠于所述钝化保护层的边缘,其中所述P型电极包括一个所述P型电极长引脚,并且所述P型电极长引脚层叠于所述钝化保护层的中部。3 . The light-emitting chip according to claim 1 , wherein the N-type electrode comprises two N-type electrode long pins, and the N-type electrode long pins are stacked on the edge of the passivation protection layer. 4 . , wherein the P-type electrode includes one long pin of the P-type electrode, and the long pin of the P-type electrode is stacked in the middle of the passivation protection layer. 4.根据权利要求1所述的发光芯片,其中所述N型电极包括两个所述N型电极长引脚,并且所述N型电极长引脚层叠于所述钝化保护层的中部,其中所述P型电极包括三个所述P型电极长引脚,并且三个所述P型电极长引脚中的一个所述P型电极长引脚层叠于所述钝化保护层的中部,另外两个所述P型电极长引脚层叠于所述钝化保护层的边缘,并且在两个所述P型电极长引脚之间保持有一个所述N型电极长引脚。4. The light-emitting chip according to claim 1, wherein the N-type electrode comprises two N-type electrode long pins, and the N-type electrode long pins are stacked in the middle of the passivation protection layer, The P-type electrode includes three P-type electrode long pins, and one of the three P-type electrode long pins is stacked in the middle of the passivation protection layer , the other two P-type electrode long pins are stacked on the edge of the passivation protection layer, and one N-type electrode long pin is kept between the two P-type electrode long pins. 5.根据权利要求1所述的发光芯片,其中所述N型电极包括三个所述N型电极长引脚,并且三个所述N型电极长引脚中的一个所述N型电极长引脚层叠于所述钝化保护层的中部,另外两个所述N型电极长引脚层叠于所述钝化保护层的边缘,其中所述P型电极包括两个所述P型电极长引脚,并且两个所述P型电极长引脚层叠于所述钝化保护层的中部,并且在两个所述N型电极长引脚之间保持有一个所述P型电极长引脚。5. The light-emitting chip according to claim 1, wherein the N-type electrode comprises three N-type electrode long pins, and one of the N-type electrode long pins in the three N-type electrode long pins The pin is stacked in the middle of the passivation protection layer, and the other two long pins of the N-type electrode are stacked on the edge of the passivation protection layer, wherein the P-type electrode includes two long pins of the P-type electrode. pins, and two of the P-type electrode long pins are stacked in the middle of the passivation protection layer, and one of the P-type electrode long pins is maintained between the two N-type electrode long pins . 6.一发光芯片,其特征在于,包括:6. A light-emitting chip, characterized in that, comprising: 一N型电极;an N-type electrode; 一P型电极;a P-type electrode; 一透明导电层;a transparent conductive layer; 一外延单元,其包括依次层叠的一衬底、一N型半导体层、一发光层以及一P型半导体层,其中所述透明导电层层叠于所述P型半导体层;以及an epitaxial unit comprising a substrate, an N-type semiconductor layer, a light-emitting layer and a P-type semiconductor layer stacked in sequence, wherein the transparent conductive layer is stacked on the P-type semiconductor layer; and 一钝化保护层,其层叠于所述透明导电层,其中所述钝化保护层具有至少一列N型长引脚通道、至少一N型短引脚通道、一P型焊盘通道、至少一列P型长引脚通道以及至少一P型短引脚通道,其中一列所述N型长引脚通道中的每个所述长引脚通道以相互间隔的方式自所述发光芯片的第二端部向第一端部方向延伸,每个所述N型短引脚通道分别形成于所述发光芯片的第二端部,所述P型焊盘通道形成于所述发光芯片的第一端部,一列所述P型长引脚通道中的每个所述P型长引脚通道以相互间隔的方式自所述发光芯片的第一端部向第二端部方向延伸,每个所述P型短引脚通道分别形成于所述发光芯片的第一端部,其中所述N型电极层叠于所述钝化保护层,并且所述N型电极的一部分在穿过每个所述N型长引脚通道和每个所述N型短引脚通道后被电连接于所述N型半导体层,其中所述P型电极层叠于所述钝化保护层,并且所述P型电极的一部分在穿过所述P型焊盘通道后被电连接于所述P型半导体层和在穿过每个所述P型长引脚通道和每个所述P型短引脚通道后被电连接于所述透明导电层。A passivation protection layer, which is stacked on the transparent conductive layer, wherein the passivation protection layer has at least one row of N-type long lead channels, at least one N-type short lead channel, a P-type pad channel, at least one row P-type long lead channels and at least one P-type short lead channel, wherein each of the long lead channels in a row of the N-type long lead channels is spaced apart from the second end of the light-emitting chip Each of the N-type short lead channels is formed at the second end of the light-emitting chip, and the P-type pad channel is formed at the first end of the light-emitting chip. , each of the P-type long lead channels in a row of the P-type long lead channels extends from the first end of the light-emitting chip to the direction of the second end in a mutually spaced manner, and each of the P-type long lead channels Type short lead channels are respectively formed at the first ends of the light-emitting chips, wherein the N-type electrodes are stacked on the passivation protection layer, and a part of the N-type electrodes passes through each of the N-type electrodes. A long lead channel and each of the N-type short lead channels are electrically connected to the N-type semiconductor layer, wherein the P-type electrode is stacked on the passivation protection layer, and a part of the P-type electrode Electrically connected to the P-type semiconductor layer after passing through the P-type pad channel and electrically connected after passing through each of the P-type long lead channels and each of the P-type short lead channels on the transparent conductive layer. 7.根据权利要求6所述的发光芯片,其中所述钝化保护层具有一列所述N型长引脚通道和两列所述P型长引脚通道,一列所述N型长引脚通道在所述钝化保护层的中部自所述发光芯片的第二端部向第一端部方向延伸,每列所述P型长引脚通道分别在所述钝化保护层的边缘自所述发光芯片的第一端部向第二端部方向延伸。7. The light-emitting chip according to claim 6, wherein the passivation protection layer has one column of the N-type long lead channels and two columns of the P-type long lead channels, and one column of the N-type long lead channels The middle part of the passivation protection layer extends from the second end of the light-emitting chip to the first end, and the P-type long lead channels of each row are respectively at the edge of the passivation protection layer from the The first end portion of the light-emitting chip extends toward the second end portion. 8.根据权利要求6所述的发光芯片,其中所述钝化保护层具有两列所述N型长引脚通道和一列所述P型长引脚通道,每列所述N型长引脚通道分别在所述钝化保护层的边缘自所述发光芯片的第二端部向第一端部方向延伸,一列所述P型长引脚通道在所述钝化保护层的中部自所述发光芯片的第一端部向第二端部方向延伸。8. The light-emitting chip according to claim 6, wherein the passivation protection layer has two columns of the N-type long lead channels and one column of the P-type long lead channels, each column of the N-type long lead channels Channels respectively extend from the second end of the light-emitting chip to the first end at the edge of the passivation protection layer, and a row of the P-type long lead channels extend from the passivation protection layer in the middle of the passivation protection layer. The first end portion of the light-emitting chip extends toward the second end portion. 9.根据权利要求6所述的发光芯片,其中所述钝化保护层具有两列所述N型长引脚通道和三列所述P型长引脚通道,每列所述N型长引脚通道分别在所述钝化保护层的中部自所述发光芯片的第二端部向第一端部方向延伸,三列所述P型长引脚通道中的一列所述P型长引脚通道在所述钝化保护层的中部自所述发光芯片的第一端部向第二端部方向延伸,另外两列所述P型长引脚通道分别在所述钝化保护层的边缘自所述发光芯片的第一端部向第二端部方向延伸,其中两列所述P型长引脚通道之间保持有一列所述N型长引脚通道。9. The light-emitting chip according to claim 6, wherein the passivation protection layer has two columns of the N-type long lead channels and three columns of the P-type long lead channels, each column of the N-type long lead channels The pin channels respectively extend from the second end of the light-emitting chip to the first end in the middle of the passivation protection layer, and one column of the P-type long pins in the three columns of the P-type long pin channels The channel extends from the first end of the light-emitting chip to the second end in the middle of the passivation protection layer, and the other two columns of the P-type long lead channels are respectively at the edge of the passivation protection layer. The first end portion of the light-emitting chip extends toward the second end portion, and a row of the N-type long lead channels is maintained between the two columns of the P-type long lead channels. 10.根据权利要求6所述的发光芯片,其中所述钝化保护层具有三列所述N型长引脚通道和两列所述P型长引脚通道,三列所述N型长引脚通道中的一列所述N型长引脚通道在所述钝化保护层的中部自所述发光芯片的第二端部向第一端部方向延伸,另外两列所述长引脚通道分别在所述钝化保护层的边缘自所述发光芯片的第二端部向第一端部方向延伸,每列所述P型长引脚通道分别在所述钝化保护层的中部自所述发光芯片的第一端部向第二端部方向延伸,其中两列所述N型长引脚通道之间保持有一列所述P型长引脚通道。10. The light-emitting chip according to claim 6, wherein the passivation protection layer has three columns of the N-type long lead channels and two columns of the P-type long lead channels, and three columns of the N-type long lead channels. One column of the N-type long lead channels in the pin channel extends from the second end of the light-emitting chip to the first end in the middle of the passivation protection layer, and the other two columns of the long lead channels are respectively The edge of the passivation protection layer extends from the second end of the light-emitting chip to the first end, and the P-type long lead channels of each row are respectively in the middle of the passivation protection layer from the The first end portion of the light-emitting chip extends toward the second end portion, and a row of the P-type long lead channels is maintained between the two columns of the N-type long lead channels. 11.根据权利要求6至10中任一所述的发光芯片,其中所述N型电极包括:11. The light-emitting chip according to any one of claims 6 to 10, wherein the N-type electrode comprises: 一N型电极焊盘,其层叠于所述钝化保护层;an N-type electrode pad, which is stacked on the passivation protection layer; 至少一N型电极短引脚,其延伸于所述N型电极焊盘和在穿过所述钝化保护层的每个所述N型短引脚通道后在所述N型电极焊盘的附近被电连接于所述N型半导体层;以及At least one N-type electrode short lead extending from the N-type electrode pad and at the N-type electrode pad after passing through each of the N-type short lead channels of the passivation protection layer. the vicinity is electrically connected to the N-type semiconductor layer; and 至少一N型电极长引脚,其延伸于所述N型电极焊盘和在穿过所述钝化保护层的每个所述N型长引脚通道后被电连接于所述N型半导体层。at least one N-type electrode long lead extending from the N-type electrode pad and electrically connected to the N-type semiconductor after each of the N-type long lead channels passing through the passivation protection layer Floor. 12.根据权利要求6至10中任一所述的发光芯片,其中所述P型电极包括:12. The light-emitting chip according to any one of claims 6 to 10, wherein the P-type electrode comprises: 一P型电极焊盘,其层叠于所述钝化保护层和在穿过所述钝化保护层的所述P型焊盘通道后被电连接于所述P型半导体层;a P-type electrode pad stacked on the passivation protection layer and electrically connected to the P-type semiconductor layer after passing through the P-type pad channel of the passivation protection layer; 至少一P型电极短引脚,其延伸于所述P型电极焊盘和在穿过所述钝化保护层的每个所述P型短引脚通道后在所述P型电极焊盘的附近被电连接于所述透明导电层;以及At least one P-type electrode short lead extending from the P-type electrode pad and at the P-type electrode pad after passing through each of the P-type short lead channels of the passivation protection layer. the vicinity is electrically connected to the transparent conductive layer; and 至少一P型电极长引脚,其延伸于所述P型电极焊盘和在穿过所述钝化保护层的每个所述P型长引脚通道后被电连接于所述透明导电层。At least one P-type electrode long lead extending from the P-type electrode pad and being electrically connected to the transparent conductive layer after passing through each of the P-type long lead channels of the passivation protective layer . 13.根据权利要求11所述的发光芯片,其中所述P型电极包括:13. The light-emitting chip of claim 11, wherein the P-type electrode comprises: 一P型电极焊盘,其层叠于所述钝化保护层和在穿过所述钝化保护层的所述P型焊盘通道后被电连接于所述P型半导体层;a P-type electrode pad stacked on the passivation protection layer and electrically connected to the P-type semiconductor layer after passing through the P-type pad channel of the passivation protection layer; 至少一P型电极短引脚,其延伸于所述P型电极焊盘和在穿过所述钝化保护层的每个所述P型短引脚通道后在所述P型电极焊盘的附近被电连接于所述透明导电层;以及At least one P-type electrode short lead extending from the P-type electrode pad and at the P-type electrode pad after passing through each of the P-type short lead channels of the passivation protection layer. the vicinity is electrically connected to the transparent conductive layer; and 至少一P型电极长引脚,其延伸于所述P型电极焊盘和在穿过所述钝化保护层的每个所述P型长引脚通道后被电连接于所述透明导电层。At least one P-type electrode long lead extending from the P-type electrode pad and being electrically connected to the transparent conductive layer after passing through each of the P-type long lead channels of the passivation protective layer . 14.一发光芯片的电流扩展方法,其特征在于,所述电流扩展方法包括如下步骤:14. A current expansion method for a light-emitting chip, wherein the current expansion method comprises the following steps: (a)引导自一N型电极焊盘注入的电流在所述N型电极焊盘的附近被注入一N型半导体层;和(a) a current directed from an injection of an N-type electrode pad is injected into an N-type semiconductor layer in the vicinity of the N-type electrode pad; and (b)引导自一P型电极焊盘注入的电流在所述P型电极焊盘的附近被注入一透明导电层。(b) The electric current directed from a P-type electrode pad is injected into a transparent conductive layer in the vicinity of the P-type electrode pad. 15.根据权利要求14所述的电流扩展方法,其中在所述步骤(a)中,进一步引导自所述N型电极焊盘注入的电流在所述N型半导体层的中部被注入所述N型半导体层,和在所述步骤(b)中,进一步引导自所述P型电极焊盘注入的电流在所述透明导电层的中部被注入所述透明导电层。15 . The current spreading method according to claim 14 , wherein in the step (a), the current injected from the N-type electrode pad is further guided to be injected into the N-type semiconductor layer in the middle of the N-type semiconductor layer. 16 . type semiconductor layer, and in the step (b), the current injected from the P-type electrode pad is further guided to be injected into the transparent conductive layer in the middle of the transparent conductive layer. 16.根据权利要求14或15所述的电流扩展方法,其中在所述步骤(a)中,形成一钝化保护层于所述N型电极焊盘和所述N型半导体层之间,以阻止自所述N型电极焊盘注入的电流直接注入所述N型半导体层。16. The current spreading method according to claim 14 or 15, wherein in the step (a), a passivation protective layer is formed between the N-type electrode pad and the N-type semiconductor layer to The current injected from the N-type electrode pad is prevented from being directly injected into the N-type semiconductor layer. 17.一发光芯片的制造方法,其特征在于,所述制造方法包括如下步骤:17. A manufacturing method of a light-emitting chip, characterized in that, the manufacturing method comprises the following steps: (i)层叠一N型电极于一钝化保护层,其中所述N型电极的一N型电极焊盘在所述发光芯片的第二端部层叠于所述钝化保护层,所述N型电极的延伸于所述N型电极焊盘的至少一N型电极短引脚在穿过所述钝化保护层后在所述N型电极焊盘的附近被电连接于一N型半导体层,所述N型电极的延伸于所述N型电极焊盘的至少一N型电极长引脚在穿过所述钝化保护层后被电连接于所述N型半导体层;和(i) Laminating an N-type electrode on a passivation protection layer, wherein an N-type electrode pad of the N-type electrode is laminated on the passivation protection layer at the second end of the light-emitting chip, and the N-type electrode is stacked on the passivation protection layer. At least one N-type electrode short pin of the type electrode extending from the N-type electrode pad is electrically connected to an N-type semiconductor layer in the vicinity of the N-type electrode pad after passing through the passivation protective layer , at least one N-type electrode long pin of the N-type electrode extending from the N-type electrode pad is electrically connected to the N-type semiconductor layer after passing through the passivation protection layer; and (ii)层叠一P型电极于所述钝化保护层,其中所述P型电极的一P型电极焊盘在所述发光芯片的第一端部穿过所述钝化保护层和被电连接于一P型半导体层,所述P型电极的延伸于所述P型电极焊盘的至少一P型电极短引脚在穿过所述钝化保护层后在所述P型电极焊盘的附近被电连接于一透明导电层,所述P型电极的延伸于所述P型电极焊盘的至少一P型电极长引脚在穿过所述钝化保护层后被电连接于所述透明导电层。(ii) Laminating a P-type electrode on the passivation protection layer, wherein a P-type electrode pad of the P-type electrode passes through the passivation protection layer and is electrically connected at the first end of the light-emitting chip Connected to a P-type semiconductor layer, at least one P-type electrode short pin of the P-type electrode extending from the P-type electrode pad passes through the passivation protection layer and is connected to the P-type electrode pad. The vicinity of the P-type electrode is electrically connected to a transparent conductive layer, and at least one P-type electrode long pin of the P-type electrode extending from the P-type electrode pad is electrically connected to the P-type electrode after passing through the passivation protection layer. the transparent conductive layer. 18.根据权利要求17所述的制造方法,其中在所述步骤(i)之前,所述制造方法进一步包括步骤:18. The manufacturing method according to claim 17, wherein before the step (i), the manufacturing method further comprises the step of: 层叠一绝缘基层于一透明导电层;stacking an insulating base layer on a transparent conductive layer; 蚀刻所述绝缘基层,以形成所述钝化保护层和同时形成至少一列N型长引脚通道、至少一N型短引脚通道、一P型焊盘通道、至少一列P型长引脚通道和至少一P型短引脚通道于所述钝化保护层,从而在所述步骤(i)中,所述N型电极在穿过所述N型长引脚通道和所述N型短引脚通道后被电连接于所述N型半导体层,和在所述步骤(ii)中,所述P型电极在穿过所述P型焊盘通道后被电连接于所述P型半导体层以及在穿过所述P型长引脚通道和所述P型短引脚通道后被电连接于所述透明导电层。Etch the insulating base layer to form the passivation protection layer and simultaneously form at least one row of N-type long lead channels, at least one N-type short lead channel, a P-type pad channel, and at least one column of P-type long lead channels and at least one P-type short lead channel in the passivation protection layer, so that in the step (i), the N-type electrode passes through the N-type long lead channel and the N-type short lead channel. The pin channel is then electrically connected to the N-type semiconductor layer, and in the step (ii), the P-type electrode is electrically connected to the P-type semiconductor layer after passing through the P-type pad channel and is electrically connected to the transparent conductive layer after passing through the P-type long lead channel and the P-type short lead channel.
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