CN103107132A - Apparatus for manufacturing flat panel display - Google Patents

Abstract

The invention discloses an apparatus for manufacturing flat panel displays, which includes a plurality of processing chambers, transfer chambers, loading chambers and unloading chambers. Each of the plurality of processing chambers is formed with an inner space in which at least two substrates are processed. The transfer chamber is arranged between a plurality of processing chambers along a first direction, and includes a transfer robot that supplies unprocessed substrates while linearly reciprocating in a second direction perpendicular to the first direction. The processing chamber or the processed substrate is transported out of the processing chamber. The loading chamber is connected to one side of the transfer chamber and accommodates substrates to be supplied to the transfer chamber. The unloading chamber is connected to the other side of the transfer chamber and accommodates substrates carried out from the transfer chamber. The transfer robot controls the substrates to be sequentially supplied to or transported out of the processing chamber while linearly reciprocating in the second direction.

Description

Equipment for manufacturing flat panel displays

technical field

The present invention relates to an apparatus for manufacturing a flat panel display, and more particularly, to an apparatus for manufacturing a flat panel display in which an organic thin film can be deposited on a flat panel for an organic light emitting display.

Background technique

In the process of manufacturing a flat panel display (FPD), a substrate treatment process such as a deposition process for depositing a thin film on a substrate; a photolithography process; an etching process; Cleaning processes such as washing and drying of residues; various surface treatment processes; etc. Each process is performed in a process chamber (PM).

Such processing chambers form a cluster together with the transfer chamber. In a typical cluster, multiple processing chambers are connected to a transfer chamber. That is, the cluster typically includes: a processing chamber in which a substrate processing process is performed; and a transfer chamber through which processed substrates are transferred from the processing chamber.

Meanwhile, there is a flat panel for an organic light emitting display (OLED) as one of the flat panels that can be manufactured as a conventional cluster having the aforementioned structure. An organic light emitting display is a self-luminous display using the principle that when an electric current flows in a fluorescent or phosphorescent organic thin film, light is emitted when electrons and holes combine in the organic layer. With the recent wide spread of smartphones, the use of flat panels for organic light emitting displays operating at low power has increased. Therefore, there is an increased need to improve the productivity of flat panels for organic light emitting displays.

A deposition process for depositing an organic thin film on a substrate is necessary when manufacturing a flat panel for an organic light emitting display. In order to perform the deposition process, a process of transferring the substrate into the processing chamber, a process of aligning the mask with the substrate, and the like must be performed in advance. However, it is not possible for conventional manufacturing equipment to perform this deposition process while transferring the substrate and aligning the mask. In other words, since the deposition process is performed separately from the process of transferring the substrate and the process of aligning the mask, there is a problem that the overall process time increases.

Contents of the invention

Therefore, the present invention serves to solve the aforementioned problems, and an aspect of the present invention provides an apparatus for manufacturing flat panel displays in which one process chamber accommodates two substrates so that one substrate is transferred while the other substrate undergoes a deposition process. and aligned, thereby minimizing the total process time for depositing the organic thin film on the substrate.

According to an aspect of the present invention, there is provided an apparatus for manufacturing a flat panel display, the apparatus comprising: a plurality of processing chambers formed with internal spaces in which at least two substrates are processed; a transfer chamber, the transfer chamber arranged between the plurality of processing chambers in a first direction, and the transfer chamber includes a transfer robot that feeds unprocessed substrates while linearly reciprocating in a second direction perpendicular to the first direction the processing chamber or carrying out processed substrates from the processing chamber; a loading chamber connected to one side of the transfer chamber and accommodating substrates to be supplied to the transfer chamber; and an unloading chamber connected to the other side of the transfer chamber and accommodate substrates transported out of the transfer chamber, the transfer robot controls the substrates to be sequentially supplied to the processing chamber or transferred from The process chamber is transported out and in the process chamber one substrate is subjected to deposition of process gases while the other substrate is conveyed and aligned in the second direction.

The processing chamber may include: a body member having an inner space including a first region and a second region adjacent to the first region, and the body member is opened at one side to communicate with the transfer chamber a support unit installed in the first area and the second area, respectively, to support and align the substrate transferred to the body member; a deposition source arranged in the body member and injecting processing gas onto the substrate; a drive unit that drives the deposition source to reciprocate linearly along the second direction; and a controller that controls the drive unit to drive The deposition source reciprocates between the first area and the second area.

The controller may control the driving unit to repeat a process of processing one substrate while moving the deposition source from an initial position of the first area in the second direction in the first area and A process of processing another substrate when the deposition source is moved toward the second region along the second direction in the second region and returns to the initial position, and the substrate in the first region and the first region After the substrates in both regions are processed, the transfer robot can transport processed substrates from the first region and the second region, and supply new substrates to the first region and the second region .

The controller may control the driving unit to repeatedly process the substrate in the first area while the deposition source is sequentially moved to the first area and the second area in the second direction. and the process of the substrate in the second area and processing the substrate in the second area and the substrate in the second area when the deposition source sequentially moves to the second area and the first area along the second direction The processing of the substrates in the first area, and after processing the substrates in the first area and while processing the substrates in the second area, the transfer robot can transport out the processed substrates from the first area processed substrates and feed new substrates to the first area, then after processing substrates in the second area and while substrates in the first area are being processed, the transfer robot can transfer from the second A zone carries out processed substrates and new substrates are supplied to the second zone.

The transfer robot may supply the substrate from the loading chamber to the first processing chamber among the plurality of processing chambers through the transfer chamber, and transfer the substrate processed in the first processing chamber to the first processing chamber through the transfer chamber. The first processing chamber is transported out and supplied to a second processing chamber of the plurality of processing chambers, and the substrates processed in the second processing chamber are transported from the second processing chamber through the transfer chamber. out into the unloading chamber.

The deposition sources may include one or more evaporation sources respectively corresponding to one or more materials to be simultaneously deposited.

The deposition sources may be arranged in plurality and spaced apart along the second direction.

The plurality of processing chambers may be spaced apart from each other and arranged at lateral sides of the transfer chamber along the second direction.

The transfer chamber may include two transfer robots, and the transfer robots may be spaced apart from each other in the first direction and arranged to linearly reciprocate in the second direction.

Description of drawings

The above and/or other aspects of the present invention will become apparent and more readily understood from the following description of exemplary embodiments when taken in conjunction with the accompanying drawings, in which:

FIG. 1 is a plan view schematically illustrating an apparatus for manufacturing a flat panel display according to an exemplary embodiment;

2 is a side view showing the inside of a processing chamber in the apparatus for manufacturing the flat panel display of FIG. 1;

Figure 3 shows the exterior of a processing chamber in the apparatus for manufacturing the flat panel display of Figure 1;

Figures 4a-4g illustrate a sequential process of transferring substrates while handling them in the apparatus for manufacturing the flat panel display of Figure 1;

Fig. 5 schematically shows another example of a processing chamber in the apparatus for manufacturing the flat panel display of Fig. 1;

6 is a plan view schematically showing an apparatus for manufacturing a flat panel display according to another exemplary embodiment of the present invention; and

FIG. 7 is a plan view schematically illustrating an apparatus for manufacturing a flat panel display according to an exemplary embodiment of the present invention.

Detailed ways

Hereinafter, exemplary embodiments of an apparatus for manufacturing a flat panel display according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a plan view schematically showing an apparatus for manufacturing a flat panel display according to an exemplary embodiment, and FIG. 2 is a side view showing an inside of a processing chamber in the apparatus for manufacturing a flat panel display of FIG. 1 , FIG. 3 shows the exterior of a processing chamber in the apparatus for manufacturing the flat panel display of FIG. 1 , and FIGS. 4 a - 4 g illustrate the sequential process of transferring substrates while processing them in the apparatus for manufacturing the flat panel display of FIG. 1 , and FIG. 5 schematically shows another example of a processing chamber in the apparatus for manufacturing the flat panel display of FIG. 1 .

Referring to FIGS. 1-5 , an apparatus 100 for manufacturing a flat panel according to an embodiment includes a processing chamber 110, a transfer chamber 120, a loading chamber 130, and an unloading chamber 140, in which the organic thin film can be performed for a flat panel for an organic light emitting display. deposition process.

The processing chamber 110 is formed with an inner space for processing at least two substrates 10 so that the substrates 10 are processed. In the processing chamber 110 , an organic thin film required for manufacturing an organic light emitting display is deposited on the substrate 10 .

The transfer chamber 120 is connected to the plurality of processing chambers 110 and placed between the plurality of processing chambers 110 along the first direction L1. The transfer chamber 120 includes a transfer robot 123 that reciprocates in a second direction L2 perpendicular to the first direction L1 while supplying unprocessed substrates 10 to or carrying out processed substrates 10 from the processing chamber 110 . The transfer chamber 120 may be kept under vacuum. This transfer chamber 120 will be described below.

The loading chamber 130 is connected to one side of the transfer chamber 120 and accommodates the unprocessed substrate 10 to be supplied to the transfer chamber 120 . The inner space of the loading chamber 130 accommodates a plurality of substrates 10 to which the processing process to be performed in the processing chamber 110 has not been applied and which are in a ready state in the loading chamber 130 .

The unloading chamber 140 is connected to the other side of the transfer chamber 120 and accommodates the substrate 10 that has been processed and carried out of the transfer chamber 120 . The inner space of the unload chamber 140 accommodates a plurality of substrates 10 which are in a ready state in the unload chamber 140 to be processed in the subsequent process chamber 110 after being processed in the previous process chamber 110 .

According to an embodiment of the present invention, the processing chamber 110 of the apparatus 100 for manufacturing a flat panel display processes at least two substrates 10 . Also, the processing chamber 110 is configured to supply and carry out at least two substrates 10 in a first direction L1 so that processing gas can be deposited on one substrate 10 while being delivered and transported in a second direction L2 perpendicular to the first direction L1. Another substrate 10 is aligned. For this purpose, the processing chamber 110 is formed therethrough with at least two openings 115 each being large enough for the substrate 10 to pass through.

Referring to FIGS. 2 and 3 , the processing chamber 110 includes a body member 111 , a support unit 112 , a deposition source 113 , a driving unit 114 and a controller (not shown).

The body member 111 is formed with an inner space. The inner space includes a first area A and a second area B adjacent to the first area A. Here, the first area A and the second area B may respectively correspond to spaces when the inner space of the body member 11 is exactly vertically divided into two halves. As described above, the body member 111 may be formed with at least two openings 115 at one side. The openings 115 may be arranged in parallel at the same height from the bottom of the body member 111 . Through the opening 115 , the substrate 10 can enter and exit the transfer chamber 120 .

The support unit 112 supports and aligns the substrate 10 transferred into the body member 111 . Here, one supporting unit 112 is placed in the first area A, and the other supporting unit 112 is placed in the second area B. Referring to FIG. The two supporting units 112 may be arranged as close to each other as possible along the second direction L2. This will minimize the size of the processing chamber 110 by reducing the space occupied by the support unit 112, and allow the drive unit 114 (to be described later) to quickly transfer the deposition source 113 from The first area A moves to the second area B.

If there are many spaces between the support units 112 or if there is a space where the deposition source 113 stays for a certain period of time, since the size of the processing chamber 110 is increased to a space as large as this space, the production cost may increase, and due to the The processing delay is as long as the driving unit 114 drives the deposition source 113 through the space, and the time taken to process the substrate may increase. On the contrary, according to an exemplary embodiment of the present invention, the processing chamber 110 of the apparatus 100 for manufacturing a flat panel display has no wasted space between the supporting units 112, so that the deposition source 113 can be placed between the first area A and the second area B Fast movement between, so the deposition process of the processing gas can be realized quickly.

The deposition source 113 is placed in the inner space of the body member 111 and sprays the process gas on the substrate 10 . For example, the deposition source 113 may be a linear deposition source 113 . In this exemplary embodiment, the process gas ejected from the deposition source 113 is an organic material used for manufacturing an organic light emitting display.

Referring to FIG. 2, a single deposition source 113 is placed in the inner space of the body member 111, but is not limited thereto. Alternatively, as shown in FIG. 5, a plurality of deposition sources 113 may be placed in the process chamber 110' and spaced apart along the second direction L2. The corresponding deposition sources 113 inject the processing gas at the same time, thus increasing the amount of the processing gas injected in the processing chamber 110', thereby shortening the time taken for the deposition process.

Moreover, each deposition source 113 may include one or more evaporation sources (evaporation sources) 113a, and the one or more evaporation sources 113a contain one or more materials respectively, so that one or more materials are deposited in the processing chamber 110'. Multiple materials are deposited on the substrate 10 simultaneously. The materials sprayed from the respective evaporation sources 113a are mixed to constitute a process gas.

The driving unit 114 drives the deposition source 113 to linearly reciprocate along the second direction L2. For example, the drive unit 114 may include a linear motor and a linear motion guide. The linear motor provides driving force to linearly reciprocate the deposition source 113 , and the deposition source 113 receives the driving force and linearly reciprocates in the second direction L2 along the linear motion guide. This configuration is well known to those skilled in the art, and a detailed description thereof is omitted.

The controller controls the driving unit 114 to drive the deposition source 113 to reciprocate between the first area A and the second area B. Referring to FIG. The controller controls the driving unit 114 to move the deposition source 113 to the second area B without stopping after one substrate 10 is processed by the deposition source 113 in the first area A, and to move the deposition source 113 to the second area B after the other substrate 10 is processed by the deposition source 113 in the first area A. After being processed by the deposition source 113 in the area B, the deposition source 113 is returned to the first area A without stopping. Therefore, the controller can quickly process two substrates 10 without delay time when the deposition source 113 is moved between the first area A and the second area B by the driving unit 114 .

Referring to FIG. 1 , the transfer chamber 120 includes a transfer robot 123 that linearly reciprocates in a second direction and transfers the substrate 10 , and the transfer robot 123 includes a transfer unit 121 and a robot arm 122 .

The transfer unit 121 linearly reciprocates along the second direction L2. The transfer unit 121 linearly reciprocates between the loading chamber 130 and the unloading chamber 140 .

The robot arm 122 is rotatably connected to the transfer unit 121 on the transfer unit 121, and supplies the substrate 10 to the processing chamber 110 in the first direction L1 or transports the substrate 10 out of the processing chamber 110 in the first direction L1. In a state where the substrate 10 is seated on top of the robot arm 122 , the robot arm 122 slides to supply or transport the substrate 10 to or from the processing chamber 110 . With the transfer chamber 120 having such a configuration, the substrate 10 can be simultaneously processed, supplied, and carried out in the process chamber 110 .

The transfer robot 123 allows the substrates 10 to be sequentially supplied to or transported out of the processing chamber 110 while linearly reciprocating along the second direction L2. The transfer robot 123 transfers the processed substrate 10 and the unprocessed substrate 10 through one opening 115 of the processing chamber 110, linearly reciprocates along the second direction L2 to change the position in the transfer chamber 120, and transfers the processed substrate 10 through the other opening 115. Processed substrate 10 and unprocessed substrate 10 . That is, the transfer robot 123 repeatedly linearly reciprocates within the transfer chamber 120 and exchanges the substrate 10 with the process chamber 110 .

A method of processing the substrate 10 by the controller and the transfer robot 123 will be described below.

According to an exemplary embodiment, the controller controls the driving unit 114 to repeat the process of processing one substrate 10 while moving the deposition source 113 from the initial position of the first area A along the second direction L2 in the first area A and in the second direction L2. A process of processing another substrate 10 while moving the deposition source 113 toward the second area B along the second direction L2 in the area B and returning to the original position. Here, the initial position of the first area A refers to a position in the first area A adjacent to the sidewall of the process chamber 110 as a position where the deposition of the substrate 10 within the first area A is started.

At this time, after both the substrates in the first area A and the substrates in the second area B are processed, the transfer robot 123 carries out the processed substrates 10 from the first area A and the second area B, and supplies new substrates to the second area. A zone A and a second zone B. After the processing of all substrates 10 is completed, carry-out of processed substrates 10 and supply of new substrates 10 are sequentially performed.

According to another exemplary embodiment, the controller controls the driving unit 114 to repeatedly process the substrate in the first area A and the second area B when the deposition source 113 sequentially moves to the first area A and the second area B along the second direction L2. Process of the substrate in the second area B and processing the substrate in the second area B and the substrate in the first area A while the deposition source 113 is sequentially moved to the second area B and the first area A along the second direction L2 craft.

At this time, after processing the substrates in the first area A, the transfer robot 123 carries out the processed substrates 10 from the first area A and supplies new substrates 10 to the first area A, while processing the substrates in the second area B. , and then after processing the substrates in the second area B, the processed substrates 10 are carried out from the second area B and new substrates 10 are supplied to the second area B while processing the substrates in the first area A.

The processing and transfer of the substrates are simultaneously performed in such a manner that one substrate 10 is finished processing and a new substrate 10 is supplied while another substrate 10 is processed, so that the number of processed substrates per unit time can be more than that set for manufacturing flat panel displays. The number of substrates processed by the processing chamber in the traditional equipment, thus increasing the productivity.

With this configuration, the operation of the apparatus 100 for manufacturing a flat panel display according to an embodiment of the present invention will be described with reference to FIGS. 1-5 . If the substrate 10b in the first region A of the processing chamber 110 is processed by the deposition source 113 as shown in FIG. to the processing chamber 110. The substrate 10 b that has been processed in the first area A is carried out by the transfer robot 123 , and the substrate 10 a to be processed is placed in the support unit 112 of the first area A. Referring to FIG. The supporting unit 112 is aligned with the mask so that the process gas ejected from the deposition source 113 can be uniformly deposited on the substrate 10 . Meanwhile, the deposition source 113 is rapidly moved to the second area B by the driving unit 114 and sprays the process gas to be deposited on the substrate 10 while linearly reciprocating in the second area B. Furthermore, as shown in FIGS. 4c and 4d , the transfer robot 123 transfers the substrate 10 to the unload chamber 140 to be carried out.

As shown in FIGS. 4e to 4g, the transfer robot 123 moves to the load chamber 130 and transfers the substrate 10a to the second area B while the substrate 10b is being processed in the second area B, where the processing is completed. The substrate 10b, and the substrate 10a to be processed is supplied to the second area B. That is, the deposition source 113 continuously processes the substrate 10a while reciprocating between the first region A and the second region B, and the substrate 10a placed in the loading chamber 130 is alternately supplied to the second region of the processing chamber 110 by the transfer robot 123. A zone A and a second zone B. These operations are repeated continuously.

In this exemplary embodiment, the substrate 10 processed in the processing chamber 110 is transferred to the unloading chamber 140, but is not limited thereto. Alternatively, the substrate 10 processed in one process chamber 110 is transferred to and processed in the other process chamber 110 and then transferred to the unload chamber 140 .

That is, the substrate 10 is supplied from the loading chamber 130 to the first processing chamber 110 (for example, a processing chamber placed on the right side of the transfer chamber) among the plurality of processing chambers 110 through the transfer chamber 120, and is completed in the first processing chamber 110. The processed substrate 10 is carried out from the first processing chamber 110 and supplied to the second processing chamber 110 (eg, a processing chamber placed on the left side of the transfer chamber) among the plurality of processing chambers 110 through the transfer chamber 120 . Then, the substrate 10 that has been processed in the second processing chamber 110 is carried out from the second processing chamber 110 to the unloading chamber 140 through the transfer chamber 120 .

As described above, in the apparatus 100 for manufacturing a flat panel display according to an embodiment of the present invention, once the substrate 10 is processed, the deposition source 113 moves from the first area A to the second area B without delay, and Another substrate 10 in the second area B is continuously processed, thereby shortening the processing time and improving productivity.

Moreover, as described above, in the apparatus 100 for manufacturing flat panel displays according to the embodiment of the present invention, the two support units 112 are arranged to leave a small space between them, so that even if the processing chamber 110 accommodates two The substrate 10 can also be minimized, thus reducing the manufacturing cost of the processing chamber 110 .

Meanwhile, referring to FIG. 6 , an apparatus 200 for manufacturing a flat panel display according to another exemplary embodiment includes a plurality of processing chambers 110 arranged on lateral sides of the transfer chamber 120 and mutually along the second direction L2. Spaced out. Through this configuration, more substrates can be processed per unit time, and thus productivity can be further improved over that of the apparatus 100 of FIG. 1 for manufacturing flat panel displays.

In the case where there are a plurality of processing chambers 110a, the transfer chamber 120 may include two transfer robots 123 as shown in FIG. reciprocating motion.

One transfer robot 123 supplies the substrate 10 to or carries out the substrate 10 from the processing chamber 110a connected to one side of the transfer chamber 120, and the other transfer robot 123 supplies the substrate 10 to the processing chamber 110a connected to the other side of the transfer chamber 120. chamber 110b or the substrate 10 is transported out of the processing chamber 110b. With this configuration, not only the speed at which the processed substrate 10 is carried out from the processing chamber 110 but also the speed at which the substrate 10 is supplied to the processing chamber 110 can be increased.

In the apparatus for manufacturing a flat panel display according to an embodiment of the present invention, processing and transfer of substrates are performed simultaneously, and more substrates can be processed per unit time, thereby improving productivity.

Also, in the apparatus for manufacturing a flat panel display according to an embodiment of the present invention, two regions in the processing chamber for processing substrates are adjacent to each other, so that the size of the processing chamber can be minimized, thereby reducing the overall size of the apparatus, And the distance and time to transfer the deposition source can be reduced, thereby shortening the total processing time.

Furthermore, in the apparatus for manufacturing a flat panel display according to an embodiment of the present invention, even if a plurality of processing chambers are arranged in a row, a transfer robot that linearly reciprocates between the processing chambers can be provided so that the number and arrangement of the processing chambers Various combinations can be constructed according to the internal conditions of the factory.

Although several exemplary embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that changes may be made to these embodiments without departing from the principle and spirit of the present invention. The scope is defined in the appended claims and their equivalents.

Claims (9)

1. An apparatus for manufacturing flat panel displays, the apparatus comprising: a plurality of processing chambers forming an interior space in which at least two substrates are processed; a transfer chamber arranged between the plurality of processing chambers in a first direction, and including a transfer robot that, while linearly reciprocating in a second direction perpendicular to the first direction, supplying unprocessed substrates to the processing chamber or transporting processed substrates from the processing chamber; a loading chamber connected to one side of the transfer chamber and accommodating substrates to be supplied to the transfer chamber; and an unload chamber connected to the other side of the transfer chamber and containing substrates carried out from the transfer chamber, the transfer robot controls the substrates to be sequentially supplied to or transported out of the processing chamber while linearly reciprocating in the second direction, and In said process chamber, one substrate is subjected to deposition of process gases while the other substrate is conveyed and aligned in said second direction. 2. The apparatus of claim 1, wherein the processing chamber comprises: a body member having an interior space including a first region and a second region adjacent to the first region, and the body member is open on one side to communicate with the transfer chamber; a supporting unit installed in the first area and the second area, respectively, to support and align the substrate transferred to the body member; a deposition source disposed in the inner space of the body member and injecting a process gas onto a substrate; a driving unit that drives the deposition source to linearly reciprocate in the second direction; and a controller, the controller controls the driving unit to drive the deposition source to reciprocate between the first area and the second area. 3. The device according to claim 2, wherein the controller controls the driving unit to repeatedly move the first area along the second direction from an initial position of the first area. a process of processing one substrate while depositing a source and a process of processing another substrate while moving said deposition source toward said second area in said second direction in said second area and returning to said initial position, and After both the substrates in the first area and the substrates in the second area are processed, the transfer robot transports the processed substrates from the first area and the second area, and transfers New substrates are supplied to the first area and the second area. 4. The apparatus according to claim 2, wherein the controller controls the driving unit to repeatedly move the deposition source to the first area and the second direction sequentially along the second direction. The process of processing the substrate in the first area and the substrate in the second area during the second area and moving the deposition source sequentially along the second direction to the second area and the second area a process for processing the substrate in the second region and the substrate in the first region in the first region, and After processing the substrates in the first area and while processing the substrates in the second area, the transfer robot carries out processed substrates from the first area and supplies new substrates said first area, and then after processing said substrates in said second area and while said substrates in said first area are being processed, said transfer robot transports processed substrates from said second area substrates and supply new substrates to the second area. 5. The apparatus of claim 1, wherein the transfer robot supplies substrates from the loading chamber to a first processing chamber of the plurality of processing chambers through the transfer chamber through which the The processed substrate in the first processing chamber is transported from the first processing chamber and supplied to a second processing chamber among the plurality of processing chambers, and transferred in the second processing chamber through the transfer chamber The processed substrates are transported from the second processing chamber to the unloading chamber. 6. The apparatus of claim 2, wherein the deposition sources include one or more evaporation sources respectively corresponding to one or more materials to be simultaneously deposited. 7. The apparatus of claim 6, wherein the deposition sources are arranged in plurality and spaced apart along the second direction. 8. The apparatus of claim 1, wherein the plurality of process chambers are spaced apart from each other and arranged laterally of the transfer chamber along the second direction. 9. The apparatus of claim 8, wherein the transfer chamber comprises two transfer robots, and The transfer robots are spaced apart from each other in the first direction and arranged to linearly reciprocate in the second direction.

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