Gonda et al., 1999 - Google Patents
Mechanical performances of a symmetrical, monolithic three-dimensional fine-motion stage for nanometrologyGonda et al., 1999
- Document ID
- 3218855033175781234
- Author
- Gonda S
- Kurosawa T
- Tanimura Y
- Publication year
- Publication venue
- Measurement Science and Technology
External Links
Snippet
A centro-symmetrical, monolithic three-dimensional fine-motion stage was investigated in terms of its static and dynamic characteristics. The outer frame with the size of a 100 mm cube includes differently sized, concentric X/Y/Z linear motion stages. The yaw, pitch and roll …
- 238000006073 displacement reaction 0 abstract description 38
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical means
- G01B5/004—Measuring arrangements characterised by the use of mechanical means for measuring coordinates of points
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