Pfeiffer et al., 2018 - Google Patents

Photonic damascene process for low-loss, high-confinement silicon nitride waveguides

Pfeiffer et al., 2018

View PDF
Document ID
2983640439262587973
Author
Pfeiffer M
Herkommer C
Liu J
Morais T
Zervas M
Geiselmann M
Kippenberg T
Publication year
Publication venue
IEEE Journal of selected topics in quantum electronics

External Links

Snippet

We report on fabrication of high-confinement and low loss silicon nitride (Si 3 N 4) waveguides using the photonic Damascene process. This process scheme represents a novel fabrication approach enabling reliable, wafer-scale fabrication of highconfinement …
Continue reading at ieeexplore.ieee.org (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour

Similar Documents

Publication Publication Date Title
Pfeiffer et al. Photonic damascene process for low-loss, high-confinement silicon nitride waveguides
Ji et al. Methods to achieve ultra-high quality factor silicon nitride resonators
US10191215B2 (en) Waveguide fabrication method
Zhang et al. Low‐Temperature Sputtered Ultralow‐Loss Silicon Nitride for Hybrid Photonic Integration
Bose et al. Anneal-free ultra-low loss silicon nitride integrated photonics
Chang et al. Ultra-efficient frequency comb generation in AlGaAs-on-insulator microresonators
Pfeiffer et al. Photonic Damascene process for integrated high-Q microresonator based nonlinear photonics
Pfeiffer et al. Octave-spanning dissipative Kerr soliton frequency combs in Si3N4 microresonators
Kuwabara et al. Ultrahigh‐Q Photonic Nanocavity Devices on a Dual Thickness SOI Substrate Operating at Both 1.31‐and 1.55‐µm Telecommunication Wavelength Bands
Boust et al. Microcomb Source Based on InP DFB/Si_3N_4 Microring Butt-Coupling
Stanton et al. On-chip polarization rotator for type I second harmonic generation
Gao et al. Low-loss millimeter-length waveguides and grating couplers in single-crystal diamond
US20240210625A1 (en) Low Temperature Fabrication of Silicon Nitride Photonic Devices
Ye Ultralow-loss silicon nitride waveguides for nonlinear optics
Jang et al. Fabrication of a 3D mode size converter for efficient edge coupling in photonic integrated circuits
Li et al. Heterogeneous integration of amorphous silicon carbide on thin film lithium niobate
Levy Integrated nonlinear optics in silicon nitride waveguides and resonators
Bellegarde et al. Improvement of sidewall roughness of sub-micron silicon-on-insulator waveguides for low-loss on-chip links
Zou et al. Grating coupler with reduced back reflection using λ/4 offset at its grating sub-teeth
Aalto Microphotonic silicon waveguide components
Shen et al. A taper to reduce the straight-to-bend transition loss in compact silicon waveguides
Zhang et al. Angle-optimized ion-beam etching for high-verticality and low-loss lithium niobate microresonators
Awan Fabrication of III-V integrated photonic devices
Ren et al. A theoretical and experimental study of silicon Y-branch micro-loop reflectors
Yang et al. Silicon-on-insulator platform for integration of 3-D nanoplasmonic devices