Saruta et al., 2007 - Google Patents

Ultra High Contrast GxL TM Device for Laser Projector

Saruta et al., 2007

Document ID
15837307837225400187
Author
Saruta K
Nishida M
Yamaguchi M
Ito Y
Yamashita K
Taguchi A
Oniki K
Tamada H
Publication year
Publication venue
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and Microsystems Conference

External Links

Snippet

This paper presents a GxL device that exhibits an extremely high contrast ratio. We achieved a very high device contrast ratio of 34700 by optimizing the design of the posts that support the ribbons and flattening the sacrificial layer. By miniaturizing the chip and improving the …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • GPHYSICS
    • G02OPTICS
    • G02FDEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of optical devices, e.g. polarisers, reflectors or illuminating devices, with the cell
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/30Polarising elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B27/00Other optical systems; Other optical apparatus

Similar Documents

Publication Publication Date Title
JP4429900B2 (en) Device having light-absorbing mask and manufacturing method thereof
KR20060040653A (en) Micromirrors with a mechanism to improve the coupling of micromirrors using an electrostatic field
US6917409B2 (en) Integrated spacer technology for LCOS light modulators
JPH10239601A (en) Thin-film optical path adjusting device and method of manufacturing the same
US20140367035A1 (en) Optical filter, optical filter module, and analyzer
Saruta et al. Ultra High Contrast GxL TM Device for Laser Projector
US9791692B2 (en) Electrooptical device, method for manufacturing electrooptical device, and electronic apparatus
US10444493B2 (en) Electro-optical device, manufacturing method for electro-optical device, and electronic apparatus
KR100248488B1 (en) Method of manufacturing tma
KR100256796B1 (en) Manufacturing method of thin film type optical path control device
KR100251106B1 (en) Method for fabricating thin film type light-path controlling device
KR0164186B1 (en) Manufacturing method of optical path control device
KR100265943B1 (en) Manufacturing method of tma
KR100271000B1 (en) Thin film type optical path control device and its manufacturing method
KR100257236B1 (en) Thin-film type optical path adjusting device mirror and manufacturing method thereof
JPH11183810A (en) Thin film type optical path adjusting device and its manufacture
KR100265951B1 (en) Tma and manufacturing method of the same
KR100271002B1 (en) Method for manufacturing thin flim actuatred mirror array
KR100256870B1 (en) Manufacturing method of thin film type optical path control device
KR100256877B1 (en) Thin Film Type Light Path Regulator
KR100233995B1 (en) Thin film actuated mirror array and its fabrication method
Ishikawa et al. Sub-nm order fluctuation control of narrowed pitch 2K-GxL™ device for high contrast
KR19990035318A (en) Manufacturing method of thin film type optical path control device
KR19990085598A (en) Manufacturing method of thin film type optical path control device
KR19990035319A (en) Manufacturing method of thin film type optical path control device