Holota et al., 2014 - Google Patents

High sensitive active MOS photo detector on the local 3D SOI-structure

Holota et al., 2014

Document ID
1536701514002867429
Author
Holota V
Kogut I
Druzhinin A
Khoverko Y
Publication year
Publication venue
Advanced Materials Research

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Snippet

High Sensitive Active MOS Photo Detector on the Local 3D SOI-Structure Page 1 High sensitive active MOS photo detector on the local 3D SOI-structure V. Holota 1 , I. Kogut 1 , A. Druzhinin 2 , Y. Khoverko 2 1Precarpathian University named after V.Stephanyk, Ivano-Frankivsk, Ukraine …
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    • H01L27/144Devices controlled by radiation
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    • H01L27/14601Structural or functional details thereof
    • H01L27/14603Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
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    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14689MOS based technologies
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