Goll et al., 1997 - Google Patents
An electrostatically actuated polymer microvalve equipped with a movable membrane electrodeGoll et al., 1997
- Document ID
- 1274818655262909328
- Author
- Goll C
- Bacher W
- Büstgens B
- Maas D
- Ruprecht R
- Schomburg W
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
An electrostatically actuated polymer microvalve with a movable membrane electrode is presented. The microvalve cases are made by thermal injection molding of conductive polyamide. The movable membrane acting as an electrode consists of two insulating layers …
- 239000012528 membrane 0 title abstract description 44
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