WO2009054469A1 - 観察装置および観察方法、並びに検査装置および検査方法 - Google Patents

観察装置および観察方法、並びに検査装置および検査方法 Download PDF

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Publication number
WO2009054469A1
WO2009054469A1 PCT/JP2008/069264 JP2008069264W WO2009054469A1 WO 2009054469 A1 WO2009054469 A1 WO 2009054469A1 JP 2008069264 W JP2008069264 W JP 2008069264W WO 2009054469 A1 WO2009054469 A1 WO 2009054469A1
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WO
WIPO (PCT)
Prior art keywords
inspection
monitoring
wafer
section
illuminating light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/069264
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English (en)
French (fr)
Inventor
Toru Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
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Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of WO2009054469A1 publication Critical patent/WO2009054469A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

　本発明に係る観察装置は、ウェハＷの表面に照明光を照射する照明部１０と、照明光１０が照射されたウェハＷを撮像する撮像部２５と、撮像部２５により撮像されたウェハＷの画像を記憶する記録部３２と、記録部３２に記憶されたウェハＷの画像を表示するモニタ３４とを備え、照明光が照射されたウェハＷの静止画像を撮像部２５が撮像し、静止画像の取得後に照明部１０が照明光の照射を中止し、照明光の照射が中止された状態で、記録部３２に記憶されたウェハＷの画像がモニタ３４に表示されるようになっている。
PCT/JP2008/069264 2007-10-25 2008-10-23 観察装置および観察方法、並びに検査装置および検査方法 Ceased WO2009054469A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-278100 2007-10-25
JP2007278100A JP2011009244A (ja) 2007-10-25 2007-10-25 観察装置および観察方法、並びに検査装置および検査方法

Publications (1)

Publication Number Publication Date
WO2009054469A1 true WO2009054469A1 (ja) 2009-04-30

Family

ID=40579571

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/069264 Ceased WO2009054469A1 (ja) 2007-10-25 2008-10-23 観察装置および観察方法、並びに検査装置および検査方法

Country Status (3)

Country Link
JP (1) JP2011009244A (ja)
TW (1) TW200929414A (ja)
WO (1) WO2009054469A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102590211A (zh) * 2011-01-11 2012-07-18 郑州大学 利用光谱和图像特征进行烟叶分级的方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5551404B2 (ja) * 2009-10-15 2014-07-16 オリンパス株式会社 半導体検査装置および半導体検査方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04279848A (ja) * 1991-03-08 1992-10-05 Kawasaki Steel Corp 熱間圧延における鋼板表面状態観察装置及び観察方法
JPH1194754A (ja) * 1997-09-19 1999-04-09 Olympus Optical Co Ltd 基板検査装置
JP2000035319A (ja) * 1999-05-31 2000-02-02 Olympus Optical Co Ltd 外観検査装置
JP2001289733A (ja) * 2000-04-10 2001-10-19 Toshiba Corp 欠陥検査システム
JP2002014054A (ja) * 2000-06-28 2002-01-18 Hitachi Ltd 検査装置および検査方法
JP2006017668A (ja) * 2004-07-05 2006-01-19 Toyota Motor Corp 表面欠陥検出方法および表面欠陥検出装置
JP2006250783A (ja) * 2005-03-11 2006-09-21 Olympus Corp マクロ検査装置
JP2007155448A (ja) * 2005-12-02 2007-06-21 Olympus Corp 端面検査装置
JP2007327903A (ja) * 2006-06-09 2007-12-20 Olympus Corp 外観検査装置
JP2008070237A (ja) * 2006-09-14 2008-03-27 Olympus Corp 基板検査装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04279848A (ja) * 1991-03-08 1992-10-05 Kawasaki Steel Corp 熱間圧延における鋼板表面状態観察装置及び観察方法
JPH1194754A (ja) * 1997-09-19 1999-04-09 Olympus Optical Co Ltd 基板検査装置
JP2000035319A (ja) * 1999-05-31 2000-02-02 Olympus Optical Co Ltd 外観検査装置
JP2001289733A (ja) * 2000-04-10 2001-10-19 Toshiba Corp 欠陥検査システム
JP2002014054A (ja) * 2000-06-28 2002-01-18 Hitachi Ltd 検査装置および検査方法
JP2006017668A (ja) * 2004-07-05 2006-01-19 Toyota Motor Corp 表面欠陥検出方法および表面欠陥検出装置
JP2006250783A (ja) * 2005-03-11 2006-09-21 Olympus Corp マクロ検査装置
JP2007155448A (ja) * 2005-12-02 2007-06-21 Olympus Corp 端面検査装置
JP2007327903A (ja) * 2006-06-09 2007-12-20 Olympus Corp 外観検査装置
JP2008070237A (ja) * 2006-09-14 2008-03-27 Olympus Corp 基板検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102590211A (zh) * 2011-01-11 2012-07-18 郑州大学 利用光谱和图像特征进行烟叶分级的方法
CN102590211B (zh) * 2011-01-11 2014-10-22 郑州大学 利用光谱和图像特征进行烟叶分级的方法

Also Published As

Publication number Publication date
JP2011009244A (ja) 2011-01-13
TW200929414A (en) 2009-07-01

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