WO2004010492A1 - Opening/closing device of substrate holding container - Google Patents

Abstract

An opening/closing device of a substrate holding container, wherein, when an SMIF pod (12) is horizontally moved on a loading part (13), a pin rotating body (23) is positioned on a lower side and, when loaded at a specified position, a lever (25) is raised to position the pin rotating body (23) on an upper side so as to engage pin fitting holes with engagement pins (23A, 23B), and when the lever (25) is rotated, the pin fitting holes are operated through the pin rotating body (23) to operate a latch mechanism so as to operate the latch claws (34A, 34B) of a holding part (31) in the relation of being latched with the latch fitting parts (33A, 33B) formed in a pod cover (32), whereby the substrate holding container can be easily positioned at an open/close positions, and the efficiency of open/close operations can be increased.

Description

 Description Substrate holding container opening and closing device Technical field

 The present invention relates to an opening and closing device that opens and closes a substrate holding container used when transporting and storing a substrate used in a predetermined process in semiconductor manufacturing. Background art

 In recent years, in order to transport and store substrates such as photomasks, mask blanks, glass substrates, and wafers in semiconductor manufacturing, we have developed a standardized SM IF (Standard Mechanica 1 Interface) pod defined by SEM IE9. A so-called substrate holding container is used. The SM IF pod is sealed to prevent dust from entering, and it is necessary to open and close the pod cover when taking it out or carrying it in.This improves work efficiency by reducing the complexity of opening and closing. Improvement is desired.

Conventionally, various automatic opening / closing devices that automatically open and close the pod when the substrate is stored in or taken out of the SM IF pod are known. At present, such an automatic opening and closing device is operated by a mechanism that is manually opened and closed, including a failure of the device and a maintenance operation, because it is not easy for an operator to remove the substrate. On the other hand, since automatic switchgear is expensive, it is necessary to have a switchgear that can be opened and closed only manually. For example, such a manual switchgear is disclosed in Japanese Patent Application Laid-Open No. 2002-76106. Some of them are described in Japanese Patent Publication No. In the standardized SMIF pod, the holding portion for holding the substrate is formed of a transparent pod cover. The holding section and the pod cover are locked by a latch mechanism, and a pin state hole provided on the bottom surface (back side) of the holding section is turned to a locked state and an unlocked state. Has become. A predetermined number of holes (manufacturing jig holes) and the like for positioning the pod are formed on the bottom surface of the holding portion.

 According to the above publication for opening and closing the SMIF pod as described above, a predetermined number of positioning pins on a stage on which the pod is mounted, and a rotation in which two fitting pins for fitting into the pin fitting holes are erected. A pedestal is provided, and the SMIF pod is fitted to the positioning pin while lowering the SMIF pod from above, whereby the fitting pin is fitted to the pin fitting hole formed in the holding portion of the pod. The lock is released by rotating the lever connected to the rotating pedestal in the horizontal direction to rotate the pin fitting hole.

 However, the SMIF pod itself is heavy, and becomes heavier when the above-mentioned substrate is stored.Therefore, it is difficult to place such a SMIF pod on the above-mentioned stage or the like while positioning it from above. There is a problem that the efficiency is reduced.

 Therefore, the present invention has been made in view of the above problems, and an object of the present invention is to provide a substrate holding container opening / closing device that easily positions a substrate holding container with respect to an opening / closing position and improves the efficiency of the opening / closing operation. I do. Disclosure of the invention

The present invention is directed to a case where a substrate holding container having a latch mechanism for opening and closing and a related part for operating the latch mechanism is not placed at a predetermined position on a placing part. The engaging means is set at a lower position, and when the engaging means is placed at a predetermined position, the engaging means is set at an upper position to be engaged with the related portion. At this time, the latch mechanism is operated by operating the related part by the operating means via the engaging means. This makes it possible to horizontally move the substrate holding container on the mounting portion, thereby improving the efficiency of the opening and closing work. Further, even when the substrate holding container is positioned above the mounting portion from above, the engaging means can be easily engaged with the related portion, and the efficiency of the opening and closing operation is improved.

 INDUSTRIAL APPLICABILITY The present invention is used for opening and closing a substrate holding container used for transporting and storing a substrate used in a predetermined process in semiconductor manufacturing. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is an external configuration diagram of a substrate holding container opening and closing device according to a first embodiment of the present invention. FIG. 2A is a bottom view of the SM IF pod. FIG. 2 (B) is a schematic perspective view for explaining the operation of the pin rotator in the switchgear. FIG. 3 (A) is an exploded view of the engagement means. FIG. 3 (B) is a conceptual diagram illustrating the operation of the engagement means. 4 (A) and 4 (B) are explanatory diagrams of a state where the SM IF pod is placed on the substrate holding container opening / closing device. FIG. 5 is an explanatory diagram in which the SM IF pod is opened by the substrate holding container opening / closing device. FIG. 6 is an explanatory diagram of a locking operation by the opening / closing device for the substrate holding container. FIG. 7 is an external configuration diagram of a substrate holding container opening / closing device according to a second embodiment of the present invention. FIG. 8 (A) is an explanatory diagram of the operation of the pin rotator in the switchgear of FIG. FIG. 8B is an explanatory view of the bottom portion of the pin rotating body support portion. FIG. 8C is an external view of the transmission unit. 9 (A) and 9 (B) are explanatory diagrams of the operation of the transmission unit in FIG. BEST MODE FOR CARRYING OUT THE INVENTION

 Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In the present embodiment, the substrate to be stored will be described using a photomask as an example, but may be a mask blank, a glass substrate, a wafer, or the like as described above. Further, in the present embodiment, the number of substrates to be stored is described as a plurality, but the present invention can be applied to a case where a single substrate is stored.

FIG. 1 shows an external configuration diagram of a substrate holding container opening and closing device according to a first embodiment of the present invention. In Figure 1, closing device 1 1 of the substrate holding vessel, _t SMIF pod 1 2 for opening and closing with respect SMIF pod 1 2 example described above is a substrate holding container, as will be described later, and a lid portion, the lid And a holding section having a lock mechanism for locking the section, and a related section for operating the latch mechanism.

 The opening / closing device 11 includes, for example, a box-shaped (not necessarily a box-shaped) mounting portion 13. Guide restricting portions 21A and 21B are provided on the placing portion 13 as regulating means for positioning when the SMIF pod 12 is horizontally moved from a predetermined direction. The guide restricting portions 21 A and 21 B serve as positioning even when the SMIF pod 12 is positioned from above.

A notch 22 is formed at a portion corresponding to a predetermined position (open / close position) on the upper plate of the mounting portion 13, and the pin rotating body 23 can be lifted from the notch 22. That is, when the SMIF pod 12 is positioned on the mounting portion 13 by the guide restricting portions 21A and 21B, a pin fitting which is a related portion for operating the latch mechanism provided in the holding portion is provided. The hole (described later) and the two fitting pins 23 A and 23 B standing upright on the pin rotating body 23 face each other. This pin rotator 23 and mating pin 23 A, 23 B forms a part of the engagement means.

 A lever guide notch 24A is formed in a horizontal direction on a predetermined side of the mounting portion 13, and a lever guide notch 24B is formed in a vertical direction at an end (the left end in the figure). Is done. Then, the distal end portion of the lever 25, which is an operation portion connected to the pin rotating body 23, is provided with a lever guide notch portion 24A,

Expressed from 24 B. The relationship between the pin rotating body 23 and the lever 25 will be described with reference to FIGS. 3 (A) and 3 (B).

 On the other hand, the SMIF pod 12 is composed of a holding portion 31 and a pod cover 32 which is a transparent cover as appropriate. The holding portion 31 is provided with a latch mechanism (not shown), and the latch claws 34A and 34B operated by the latch mechanism are exposed. The pod cover 32 is formed with latch engagement portions 33A and 33B that engage with the latch claws 34A and 34B. That is, the holding part 3 1 and the pod cover 3 2

The locked state or the unlocked state is established by the engagement relationship between 34 A, 34 B and the latch engagement portions 33 A, 33 B.

 Further, a predetermined number of holder guide portions 35 are provided on the holding portion 31. The substrate holder 36 is positioned by being regulated by the holder guide 35. The substrate holder 36 holds a predetermined number of substrates 37. The pod cover 32 is provided with grip portions 38A and 38B for lifting the pod cover 32 upward when the pod cover 32 is unlocked with the holding portion 31.

Here, Figure 2 (A) shows a bottom view of the SM IF pod. FIG. 2B is a schematic perspective view for explaining the operation of the pin rotator in the switching device. In FIG. 2A, arc-shaped latch guide notches 41A and 41B are formed on the bottom surface of the holder 31 so as to face each other along a circular shape. In addition, the latch mechanism described above is provided in each of the latch guide notches 41A and 41B. The pin fitting holes 42A and 42B, which are related parts for operating the device, are arranged. The arrangement of the latch guide notches 41 A and 41 B and the pin fitting holes 42 A and 42 B is standardized by the SEM IE 19 described above.

 On the other hand, in the opening / closing device 11 shown in FIG. 2 (B), when the lever 25 is moved up and down by the lever guide notch 24B, the pin rotator 23 Move the mating pins 23 A, 23 B) up and down. That is, when the SM IF pod 12 is not positioned on the mounting portion 13, the lever 25 is positioned above the lever guide notch 24 B, and at this time, the pin rotating body 23 is positioned below. Is located.

 When the SM IF pod 12 is positioned and positioned on the mounting portion 13 by the guide restricting portions 21A and 21B, the pin fitting holes 42A and 42B and the fitting pins 23A and 23 B faces. At this time, the pin rotating body 23 is raised by pushing down the lever 25 below the lever guide notch 24B. Then, the fitting pins 23A and 23B are engaged with the pin fitting holes 42A and 42B, respectively. In this state, when the lever 25 is rotated along the lever guide notch 24A, the rotating body 23 (the fitting pins 23A and 23B) is rotated, so that the pin is fitted. The holes 42A and 42B rotate to operate the latch mechanism.

Therefore, FIG. 3A is an exploded view of the engagement means. FIG. 3B is a conceptual diagram for explaining the operation of the engagement means. In FIG. 3A, the pin rotor 23 is supported by the pin rotor support 51 via a coil panel 52 which is an elastic member. The pin rotating body 23 has an inverted concave shape. For example, two (or one) fitting grooves 53A and 53B are formed on the side thereof, and two fitting pins are provided at the upper part. 23 A and 23 B are erected. The pin rotating body support 51 is cylindrical and has a step formed therein to support the coil spring 52. In addition, fitting protrusions 54A, 54B that fit into the fitting grooves 53A, 53B formed in the pin rotating body 23 are formed on the side portions. Further, a transmission section 55 as a “U” -shaped transmission means is rotatably attached to the side of the pin rotation body support section 51. The lever 25 is attached to the transmission part 55.

 Then, the coil panel 52 is included in the pin rotating body support 51, and the pin rotating body 23 is connected to the fitting projections 54A, 548 and the fitting grooves 538, 53B. The engaging means is constituted by fitting and covering as shown in FIG. 3 (B). At this time, a clearance is formed inside the pin rotator 23 with respect to the pin rotator support 51 by the coil spring 52, and the pin rotator 23 can freely move up and down (for example, 1 Omn! To 20 mm).

 As shown in FIG. 3 (B), the pin rotator supporting portion 51 supporting the pin rotator 23 is vertically movable on a fixed shaft 56 provided on a bottom plate inside the mounting portion 13. Mated. A lever guide plate 57 as an auxiliary means is provided between the fixed shaft 56 and the lever guide notches 24 A and 24 B formed on the side of the mounting portion 13. The lever guide plate 57 is formed with a lever guide notch 58 for guiding the horizontal rotation of the lever 25. The lever guide plate 57 serves as a fulcrum when the pin rotator 23 is moved up and down by the up and down movement of the lever 25.

That is, when the lever 25 is located above the lever guide notch 24 B, the pin rotating body 23 (pin rotating body support 51) moves the lever guide notch 58 to the transmission section. It is located on fixed axis 56 via 55. When the lever 25 is pushed down below the lever guide notch 24 B, the pin rotating body 2 3 (pin The rotating body supporting portion 51) is raised on the fixed shaft 56 via the transmitting portion 55.

 Next, FIGS. 4 (A) and 4 (B) show explanatory views of a state where the SMIF pod is placed on the substrate holding container opening / closing device. FIG. 5 shows an explanatory diagram in which the SMIF pod is opened by the substrate holding container opening / closing device. First, the SM IF pod 12 has a substrate holder 36 holding a predetermined number of substrates 37 housed in the holder 31, and the holder 31 is covered with a pod cover 32. Thus, the latch engagement portions 33A, 33B and the latch claws 34A, 34B are locked by the latch mechanism. In the opening / closing device 11, the lever 25 is located above the lever guide notch 24 B, and accordingly, the pin rotating body 23 (the tip of the fitting pin 23 A, 23 B ) Is located below the upper surface of the receiver 13.

 As shown in FIG. 4 (A), the SMIF pod 12 is placed at one end (the lever 25 side) on the mounting portion 13 of the opening / closing device 11. From this state, as shown in FIG. 4 (B), the upper surface of the mounting portion 13 is horizontally moved to the rear side, and is guided by the guide restricting portions 21A and 21B to the innermost restricting portion. Is positioned by contact with When the SM IF pod 1 2 is positioned on the opening / closing device 1 1, the lever 25 is pushed down below the lever guide notch 24 B, and the lever rotator plate 57 is used as a fulcrum. 23 (the fitting pins 23 A, 23 B) is raised on the fixed shaft 56 via the transmission part 55. As a result, the fitting pins 23A and 23B are fitted and engaged with the pin fitting holes 42A and 42B on the bottom surface of the mounting portion 13, respectively.

Therefore, as shown in FIG. 5, when the lever 25 is rotated along the lever guide notch 24A, the pin fitting holes 42A and 42B are formed through the fitting pins 23A and 23B. Rotate. Then, the latch mechanism is activated, The locked state by the latch engagement portions 33A and 33B and the latch claws 34A and 34B is released. As a result, the pod cover 32 opens to the holding portion 31. Then, the grip portion 3 8 A of the pod cover 3 2,

The stored substrate holder 36 is exposed by holding and lifting the 38 B upward, and the held substrate 37 is extracted or inserted.

 By the way, the pin fitting hole on the bottom of the SMI F pod 12 (placement section 13)

When the pin rotating body 23 rises due to the misalignment of the 42A and 42B, the mating pins 23A and 23B may not always be fitted. In this case, since the pin rotator 23 can be moved up and down by the coil panel 52, when the pin rotator 23 rises, the fitting pins 23A and 23B are inserted into the pin fitting holes 4. It is maintained in contact with the peripheral portions of 2A and 42B. Then, while the pin rotating body 23 is being rotated, the pin fitting holes 42A, 42B and the fitting pins 23A, 23B match, and at this point, the fitting is performed by the coil spring 52. Can be combined.

 Next, FIG. 6 shows an explanatory view of the locking operation by the opening / closing device for the substrate holding container. Fig. 6 shows the case where the board holder 36 is replaced from the state shown in Fig. 5 or the board holder 36 is not stored in our SMIF pod 12 (in this case, the holder 31 and the pod cover 3 2 are locked. State), unlocking, and then raising the pod cover 32 to accommodate the board holder 36.

In FIG. 6, the holding part 31 of the SMIF pod 12 is set on the switchgear 11, and the lever 25 is located at the opposite end of the lever guide notch 24 A and the lock is released. I have. Therefore, a substrate holder 36 holding a predetermined number of substrates 37 is positioned and placed on the holder 31 by a holder guide 35. After that, hold Pod Cover 1 3 2 By rotating the lever 25 along the lever guide notch 24A, the pin fitting holes 42A and 42B are rotated, and the latch mechanism is rotated. It works. As a result, the latch engagement portions 33A, 33B of the pod cover 32 and the latch claws 34A, 34B of the holding portion 31 are engaged to be in a locked state. Then, by moving the lever 25 above the lever guide notch 24 B and lowering the pin rotator 23, the SMIF pod 12 is horizontally moved and opened and closed, contrary to Fig. 4 (A). It can be removed from the device 11.

 As described above, when the SMIF pod 12 is not at the predetermined position (opening / closing position) on the mounting portion 13 of the opening / closing device 11, the pin rotating body 23 is at the lower position. The horizontal movement can be performed on the mounting portion 13. As a result, the SMIF pod 12 can be easily positioned with respect to the open / close position, and the efficiency of the open / close operation can be improved.

Although not shown, even when the SMIF pod 12 is placed at a predetermined position on the placing portion 13 from above, when the SMIF pod 12 is not placed, the pin rotator 23 is in the lower position, It is not necessary to perform the mounting while the pin fitting holes 42A, 42B and the fitting pins 23A, 23B are fitted, and the mounting can be performed easily. In this case, a positioning pin for positioning the SMIF pod 12 may be provided on the mounting portion 13 as appropriate. These are the same in the following embodiments. Next, FIG. 7 shows an external configuration diagram of a substrate holding container opening and closing device according to a second embodiment of the present invention. In FIG. 7, on the mounting portion 13 of the opening / closing device 11, the back side (not necessarily the back side) into which the SMIF pod 12 is inserted by horizontal movement is, for example, two (one Plungers 61A and 61B, which are abutting means, are provided to be vertically movable. You. In this case, the lever guide notch 24A for guiding the rotation of the lever 25 is formed only, and the lever guide notch 24B is not required.

 The vertical movement of the plungers 61A and 61B causes the pin rotator to move through the transmission means described later with reference to FIGS. 8A to 8C, 9A and 9B. 23 is moved up and down. That is, in a state where the plungers 61A and 61B are protruded above the mounting portion 13 at the upper position, the pin rotating body 23 (the fitting pins 23A and 23B) is positioned lower. It does not protrude above the mounting portion 13. In addition, when the plungers 6 1 A and 618 are pushed into contact with the 3] \ 4 IF pod 12, the pin rotating body 23 (the fitting pins 23 A and 23 B) rises and the fitting is performed. The mating pins 23A, 23B and the pin fitting holes 42A, 42B are in a state of being fitted (or fitted by turning the revolver 25).

 In FIG. 7, the configuration of the SMIF pod 12 is the same as that of FIG. 1, and the other configuration of the switchgear 11 except for the transmission means of the above configuration is also the same as that of FIG.

Therefore, Fig. 8 (A) is a diagram illustrating the operation of the pin rotator in the switchgear of Fig. 7. FIG. 8 (B) shows an explanatory view of the bottom portion of the pin rotator support portion. Fig. 8 (C) shows an external view of the transmission unit. 8 (A) to 8 (C), the pin rotator 23 is covered with the pin rotator support 51 with the coil spring 52 included therein as in FIG. 3. You. As shown in FIG. 8 (B), the hollow interior of the pin rotator support portion 51 has a shape in which a part of a circular cross section is cut off. A turning plate 25A is formed or attached to the rear end of the lever 25. A rotating shaft 56A corresponding to the fixed shaft 56 is fixed on the rotating plate 25A. As shown in FIG. 8 (C), the rotating shaft 56 A It has the same (similar) cross-sectional shape as the internal hollow of the rolling member support portion 51, and is fitted with the internal hollow of the pin rotating body support portion 51.

 On the other hand, a lower portion (or a side surface) of the pin rotator support portion 51 is associated with one end of a transmission portion 71 which is a transmission means for moving the pin rotator support portion 51 up and down. One end of the transmission portion 71 is formed in a shape avoiding the rotation shaft 56A. The other end of the transmission section 7 1 is connected to the plunger 6 1 A,

It is associated with 6 1 B, and its configuration is described in FIG.

 FIG. 8 (A) shows a case where the lever guide plate 57 is provided as shown in FIG. 3 (B), but the pin 25 is rotated by the lever 25 as in the first embodiment. Since the body 23 is not moved up and down, the lever guide plate 57 can be omitted.

 Here, FIGS. 9 (A) and 9 (B) show operation explanatory diagrams of the transmission unit in FIG. FIG. 9 (A) shows a case where the plungers 61A and 61B are in the upward orientation, with the upper ends thereof protruding above the mounting portion 13. FIG. In this case, a cutout smaller than the maximum width of the plungers 61A and 6IB is formed on the mounting portion 13 so that the plungers 61A and 61B are not excessively protruded.

The transmission portion 71 extends from a contact portion associated with the other end plungers 61A and 6IB onto a fulcrum plate 71A appropriately provided in the mounting portion 13 and It extends from the fulcrum plate 71A in the direction of the pin rotating body 23 at a predetermined angle, and further extends at a predetermined angle as appropriate. The length from the abutting portion of the plungers 61A and 61B to the fulcrum plate 71A in such a transmission part 71, the angle at the fulcrum plate 71A, the pin rotation from the fulcrum plate 71A The length toward the body supporting portion 51 is set such that the pin rotator 23 is raised to the pin fitting position by a stroke downward of the plungers 61A and 61B. That is, as shown in FIG. 9 (B), when the plungers 61A and 6IB come into contact with the SM IF pod 12 and are pushed downward, the other end of the transmitting section 71 is pushed downward. At this time, the pin rotating body 23 is pushed up so that the same angle is maintained at the position of the fulcrum plate 71A, so that the pin rotating body support 51 (pin rotating body 23) is raised. Thus, the fitting pins 23 A and 23 B are projected above the mounting portion 13.

 Returning to FIG. 8 (A), when the plungers 61A and 61B come into contact with the SM IF pod 12 and are pushed downward, the fitting pins 23A and 23B (rotating body) 3 2) protrudes above the receiver 13. At this time, they are fitted into the pin fitting holes 42A and 42B on the bottom surface of the SMIF pod 12 (holding portion 31). When the lever 25 is rotated along the lever guide notch 24A, the pin rotator support 51 (pin rotator 23) is rotated via the rotation shaft 56A. As a result, the pin fitting holes 42A and 42B are rotated via the fitting pins 23A and 23B. Accordingly, the latch mechanism is operated to release the locked state between the latch engagement portions 33A, 33B of the pod cover 32 and the latch claws 34A, 34B.

That is, the state of locking and unlocking between the holding portion 31 and the pod cover 32 is the same as in FIG. 4B, FIG. 5, and FIG. Similarly, as described above, for example, the lever 25 is located at a position halfway through the notch 24 A of the lever guide, and the pin fitting holes 42 A, 42 on the bottom of the SM IF pod 12 (placement 13) are provided. Even if B is displaced, the pin rotating body 23 can be moved up and down by the coil panel 52, so when the pin rotating body 23 rises, the fitting pins 23A and 23B are It is maintained in contact with the peripheral portions of the pin fitting holes 42A and 42B. In this state, the levers 25 are returned or advanced so that the pin fitting holes 42A and 428 and the fitting pins 23 If A and 23B are matched, it can be fitted at this point by the coil spring 52.

 In this way, by moving the pin rotator 23 up and down by the plungers 61A and 61B, the SMIF pod 12 is also placed on the mounting portion 13 of the switchgear 11 as described above. When it is not at the predetermined position (open / close position), since the pin rotating body 23 is at the lower position, the SMIF pod 12 can be horizontally moved on the mounting portion 13. As a result, the SMIF pod 12 can be easily positioned with respect to the open / close position, and the efficiency of the open / close operation can be improved.

 Further, even when the SMIF pod 12 as the substrate holding container is positioned on the mounting portion 13 from above, the pin fitting holes 42A and 42B, which are the related portions of the SMIF pod 12, are provided. In addition, the fitting pins 23A and 23B, which are a part of the engaging means, can be easily fitted and brought into the engaged state, thereby improving the efficiency of the opening and closing work. . Industrial applicability

 INDUSTRIAL APPLICABILITY The present invention is suitable for opening and closing a substrate holding container used for transporting and storing substrates such as wafers, photomasks, mask blanks, and glass substrates used in predetermined steps in semiconductor manufacturing.

Claims

The scope of the claims 1. The lid is opened and closed by the holding part for a substrate holding container that is composed of a lid and a holding part with a latch mechanism that locks the lid part and has a related part that operates the latch mechanism. An opening and closing device for the substrate holding container to be brought into a state,  A mounting portion for mounting the substrate holding container at a predetermined position,  When the substrate holding container is not placed at the predetermined position on the mounting portion, the substrate holding container is at a lower position, and at least when the substrate holding container is mounted at the predetermined position, the substrate holding container is at an upper position. Engagement means to be engaged with  An operation unit connected to the engagement unit, and operating the related unit via the engagement unit in a state where the engagement unit and the related unit are engaged;  An opening and closing device for a substrate holding container, comprising: 2. The related part has a predetermined number of pin fitting holes,  2. The substrate holding container according to claim 1, wherein the engaging means has a corresponding number of fitting pins fitted to the pin fitting holes of the related portion on the pin rotating body. Switchgear.  3. The engaging means has a pin rotator support portion for supporting the pin rotator, and an elastic member for vertically moving the pin rotator in the biased state is supported by the pin rotator support portion. 3. The apparatus for opening and closing a substrate holding container according to claim 1, wherein  4. The substrate holding container according to any one of claims 1 to 3, further comprising a transmission unit that moves the engagement unit up and down by moving the operation unit up and down. Switchgear. 5. Between the operation part and the transmission means, assist the vertical movement of the transmission part 5. The opening / closing device for a substrate holding container according to claim 4, wherein an auxiliary means for performing the operation is provided.  6. The substrate holding container is vertically movably provided on the mounting portion, and is set to the upper position when the substrate holding container is not mounted on the mounting portion at the predetermined position. At least when the substrate holding container is mounted, the substrate holding container is held. A predetermined number of abutting means which is brought into a lower position by abutting the container;  A transmitting means for setting the engaging means to the lower position when the contact means is at the upper position, and setting the engaging means to the upper position when the contact means is at the lower position;  4. The device for opening and closing a substrate holding container according to at least one of claims 1 to 3, further comprising:  7. At least any one of claims 1 to 6, wherein a regulating means for positioning the substrate holding container at a predetermined position on the placing portion is provided on the placing portion. 3. The opening and closing device for a substrate holding container according to claim 1.