TWI889432B - Detachably supporting mechanism and reticle pod with the same - Google Patents

Abstract

Provided is a reticle pod with a detachable supporting mechanism, which is suitable for a dual pod, including an outer pod and an inner pod received therein, the inner pod including: a base, and at least a supporting mechanism, mounted on the base. The supporting mechanism includes: a supporting assembly, connected to a mounting interface of the base, the supporting assembly includes a seat, at least one limiting post, and a mounting hole, the at least one limiting post connects to the seat, the mounting hole penetrates the base and not a circular hole; and a supporting element, having a matching structure, so that the supporting element detachably received in the mounting hole.

Description

Detachable support mechanism and photomask box having the support mechanism

The present invention relates to a support mechanism for a mask box, and in particular to a support mechanism with a detachable support structure.

In the known extreme ultraviolet (EUV) mask transfer box, the mask is supported by a support mechanism, which includes a support member and a limit column. The support member is used to carry and contact the mask, and the limit column and the support member are integrated. When the support mechanism is assembled to the inner box base of the mask box, in addition to being fixed by screws, a knives pin is also used to be riveted into the inside of the limit column to strengthen the fixation to avoid loosening. Because the knives pin and the inside of the limit column are interference fit, if the known support structure needs to be replaced, it is necessary to first destroy the limit column, remove the screws, and then knock out the knives pin.

However, in actual use, only the support parts will contact the photomask, and the limit posts are only used to prevent abnormal actuation errors from damaging the photomask components in unexpected situations. Therefore, the photomask will not contact the limit posts under normal circumstances. In other words, only the support parts are consumables, and the limit posts do not actually need to be replaced. However, due to the current design, if the support parts need to be replaced, the limit posts will be replaced together with the support parts, resulting in waste of materials and costs, and the problem of inconvenience in removal.

In view of the above problems of the prior art, the present invention provides a detachable support structure to simplify the disassembly process of the support mechanism and reduce the waste of materials and costs. In addition, the support member can be made of a more wear-resistant material according to actual needs to enhance the service life.

The present invention provides a mask box, which is suitable for a double-layer box, including an outer box and an inner box contained therein, wherein the inner box includes: a base, and at least one supporting mechanism, which is arranged on the base; the supporting mechanism includes: a supporting assembly, which is connected to an installation interface of the base, and the supporting assembly includes a seat body, at least one limiting column, and a mounting hole, the at least one limiting column is connected to the seat body, and the mounting hole passes through the seat body and is a non-circular hole; and a supporting piece, which has a matching structure for matching the mounting hole, so that the supporting piece can be detachably accommodated in the mounting hole.

In a specific embodiment, the support member has at least one anti-rotation feature, and when the support member is disposed in the mounting hole, the at least one anti-rotation feature abuts against the edge of the mounting hole.

In one embodiment, the thickness of the anti-rotation feature is the same as or similar to the thickness of the base.

In a specific embodiment, the support member includes a contact portion, a neck portion, and a bottom portion, the contact portion and the bottom portion are connected via the neck portion, and the neck portion has the at least one anti-rotation feature.

In a specific embodiment, the support member includes a contact portion, a neck portion, and a bottom portion, wherein the bottom portion is provided with at least one protrusion, and the at least one protrusion protrudes outward from the bottom portion; the mounting hole is provided with at least one notch, and the at least one notch extends outward from the periphery of the mounting hole corresponding to the shape of the at least one protrusion.

In a specific embodiment, the neck is provided with at least one anti-rotation feature, and the mounting hole is provided with at least one positioning protrusion, which protrudes inward from the periphery of the mounting hole, and the positioning protrusion abuts against the at least one anti-rotation feature to prevent the support member from rotating relative to the support assembly.

In a specific embodiment, the at least one anti-rotation feature is a supporting protrusion extending outward from the surface of the neck, and the supporting protrusion of the neck and the at least one protrusion of the bottom are misaligned in the vertical direction.

In a specific embodiment, the bottom has at least one notch, and the at least one notch is recessed inward from the radial direction of the bottom surface, so that when the support member is placed in the mounting hole, the bottom avoids the positioning protrusion of the mounting hole.

In a specific embodiment, the at least one recess is disposed adjacent to the at least one protrusion.

In a specific embodiment, the support member includes a fixing hole, which is arranged in the bottom and the neck. After the support member is rotated to a positioning position where the supporting protrusion and the positioning protrusion abut against each other, the support member is installed by cooperating with a fixing element and the fixing hole.

In a specific embodiment, when the supporting member is located at the positioning position, the lower surface of the contact portion contacts the upper surface of the base, and the upper surface of the bottom contacts the lower surface of the base.

In one embodiment, the materials constituting the support member and the support assembly are different.

In one embodiment, the material of the support has a glass transition temperature greater than or equal to 200°C (392°F).

Please refer to Figure 1. The present invention provides a mask box with a detachable supporting mechanism, which is suitable for a double-layer box, including an outer box and an inner box accommodated in the outer box. The inner box includes a base 10, a cover (not shown), and a supporting mechanism 20, which is connected to the mounting interface 101 of the base 10. The supporting mechanism 20 is used to carry the mask.

Please refer to FIG. 2, which is an enlarged exploded view of the circle A in FIG. 1. The detachable support mechanism 20 of the first embodiment of the present invention includes a support assembly 21 and a support member 23. The support assembly 21 is disposed in the mounting interface 101 of the base 10, and the support member 23 has a matching structure 23A for matching the mounting hole 213 of the support assembly 21, so that the support member 23 can be detachably accommodated in the mounting hole 213 of the support assembly 21.

Please refer to FIG. 4A to FIG. 4C , the support member 23 has a contact portion 231, a fixing hole 234, and a matching structure 23A. The contact portion 231 can be used to allow the user to hold or rotate the support member 23, and the fixing hole 234 passes through the matching structure 23A. Please also refer to FIG. 3 , the matching structure 23A can pass through the mounting hole 213 and can partially abut against the mounting hole 213, so that the support member can be accommodated in the mounting hole 213. In this embodiment, the matching structure 23A includes a neck 232 and a bottom 233. The contact portion 231 and the bottom 233 are connected by the neck 232, and the fixing hole 234 is set in the bottom 233 and the neck 232. In this embodiment, the fixing hole 234 penetrates from the lower surface 2337 of the bottom 233 and extends completely or partially to the neck 232. Preferably, the upper surface of the contact portion 231 is used to directly contact the photomask, and the neck 232 extends from the lower surface 2315 of the contact portion 231 and extends from the upper surface 2335 of the bottom 233. Preferably, a plurality of contact protrusions 2311 are formed on the upper surface of the contact portion 231 to reduce the contact area between the photomask and the support member 23 when carrying the photomask.

The periphery of the bottom 233 has at least one convex portion 2331 and at least one concave portion 2333. The convex portion 2331 protrudes outward relative to the radial direction of the surface of the bottom 233, and the concave portion 2333 is concave inward relative to the radial direction of the surface of the bottom 233. The at least one convex portion 2331 and the at least one concave portion 2333 are arranged adjacent to each other. Preferably, the bottom 233 has a center O1, and the distance R1 from the convex portion 2331 to the center O1 is greater than the distance p1 from the concave portion 2333 to the center O1. In the embodiment of the present invention, the periphery of the bottom 233 has four convex portions 2331 and four concave portions 2333.

Referring to FIG. 4B and FIG. 4C , the neck portion 232 has at least one abutting protrusion 2321 (or anti-rotation feature) protruding outwardly from the surface of the neck portion 232 in the radial direction. When viewed from the front, the neck portion 232 has a thickness d1. The thickness d1 may also be a vertical distance between the lower surface 2315 of the contact portion 231 and the upper surface 2335 of the bottom portion 233. The farthest distance R1 from the protrusion 2331 to the center O1 of the bottom portion 233 defines a vertical direction Y1, and the shortest distance p1 from the abutting protrusion 2321 to the center O1 of the bottom portion 233 defines a vertical direction Y2. The protrusion 2331 and the abutting protrusion 2321 are misaligned in the vertical direction, that is, the vertical direction Y1 and the vertical direction Y2 are parallel to each other but do not overlap.

Please refer to FIG. 5A and FIG. 5B , the support assembly 21 has a base 211, at least one limiting column 212, and a mounting hole 213. At least one limiting column 212 is connected to the base 211, and at least one limiting column 212 has a fixing hole 2121 disposed therein. The mounting hole 213 penetrates the base 211 and is not a circular hole. The matching structure 23A of the support member 23 matches the shape of the mounting hole 213, so that the support member 23 can be detachably mounted in the mounting hole 213. From the front view direction of the support assembly 21, the base 211 has a thickness D1, and the thickness D1 is substantially the same as or similar to the thickness d1 of the neck 232 of the support member 23.

The periphery of the mounting hole 213 has at least one notch 2131 and at least one positioning protrusion 2133. The notch 2131 extends outward relative to the radial direction of the mounting hole 213, and the positioning protrusion 2133 is recessed inward relative to the radial direction of the mounting hole 213, wherein at least one notch 2131 and at least one positioning protrusion 2133 are disposed adjacent to each other. When the support member is assembled on the support assembly, the notch 2131 can avoid the matching structure 23A of the support member 23, and the positioning protrusion 2133 can abut against the matching structure 23A of the support member 23 to position each other, so as to avoid unnecessary rotation of the support member 23 during assembly.

In this embodiment, when the support member 23 is assembled on the support assembly 21, the convex portion 2331 of the support member 23 is avoided, and the concave portion 2333 of the support member 23 can avoid the positioning convex portion 2133. When the support member 23 is assembled on the support assembly 21, the positioning convex portion 2133 and the abutting convex portion 2321 of the support member 23 are mutually positioned. In this embodiment, the mounting hole 213 has a center O2, and the distance R2 from the notch 2131 to the center O2 is greater than the distance p2 from the positioning convex portion 2133 to the center O2. Preferably, the notch 2131 has a shape corresponding to the convex portion 2331, and the positioning convex portion 2133 has a shape corresponding to the notch 2333. Preferably, the distance R2 from the notch 2131 to the center O2 is greater than or equal to the distance R1 from the protrusion 2331 to the center O1. In this embodiment, the periphery of the mounting hole 213 has four notches 2131 and four positioning protrusions 2133.

Please refer to FIG. 6A and FIG. 6B . To more clearly illustrate the relative position of the support member 23 and the support assembly 21, the base 10 is omitted in the figure. When the support member 23 is accommodated in the support assembly 21, the user can directly hold the contact portion 231 of the support member 23 or hold it through the robot arm, align the protrusion 2331 of the support member 23 with the notch 2131 of the mounting hole 213, and put it into the mounting hole 213 until the lower surface of the contact portion 231 and the upper surface 2115 of the base 211 contact each other. At this time, the contact portion 231 is located above the upper surface 2115 of the base 211, the bottom 233 is located below the lower surface 2117 of the base 211, and the neck 232 is accommodated in the mounting hole 213. Referring to FIG. 8A , FIG. 8A is a cross-sectional view of plane B of FIG. 6A , at which time the supporting protrusion 2321 and the positioning protrusion 2133 are not in contact with each other.

Next, please refer to FIG. 7A and FIG. 7B . After the support member 23 is rotated in one direction, the protrusion 2331 and the notch 2131 are misaligned in the vertical direction, so that the upper surface of the bottom 233 contacts the lower surface of the base 211 to prevent the support member 23 from being separated in the vertical direction. Please refer to FIG. 8B , which is a cross-sectional view of the C plane of FIG. 7A . After the support member 23 is rotated until the abutting protrusion 2321 and the positioning protrusion 2133 abut against each other and the support member 23 is located at the positioning position, the support member 23 is locked from the bottom of the base 10 through the mounting element 24 , so that the support member 23 is installed in the support assembly 21 disposed on the base 10 , and the installation of the support mechanism 20 is completed. By abutting the abutting protrusion 2321 and the positioning protrusion 2133 against each other, the support member 23 can be prevented from rotating relative to the support assembly 21 during the process of the mounting element 24 locking the support member 23. Preferably, the distance t1 from the center O1 of the support member 23 to the abutting protrusion 2321 is greater than the distance p2 from the center O1 of the support member 23 to the positioning protrusion 2133, so that the positioning protrusion 2133 of the mounting hole 213 can abut against the support member 23 to prevent the support member 23 from rotating relative to the support assembly 21. In this embodiment, the mounting element 24 is a screw, and the fixing hole 234 is a screw hole corresponding to the screw. The direction in which the supporting member 23 rotates to the mutual abutment between the supporting protrusion 2321 and the positioning protrusion 2133 is the same as the direction in which the mounting element 24 locks the supporting member 23, so that when the supporting member 23 is locked, the supporting protrusion 2321 and the positioning protrusion 2133 are forced to continue to contact each other, thereby avoiding unnecessary rotation of the supporting member 23 during the locking process, thereby increasing the installation efficiency.

The following will describe the process of installing the detachable support mechanism of the invention on the installation interface of the base. First, please refer to Figure 2 and Figure 5A, first fix the support assembly 21 through the through hole 102 of the base 10 and the fixing hole 2121 in the limit column 212 through the fixing element 22. The fixing element 22 can be riveted into the limit column 212 using a knurled pin or locked by a screw.

Next, referring to FIG. 6A and FIG. 6B , align the protrusion 2331 of the support member 23 with the notch 2131 of the mounting hole 213 and insert the support member 23 into the mounting hole 213 until the lower surface 2315 of the contact portion 231 and the upper surface 2115 of the base 211 contact each other.

Next, please refer to FIG. 7A and FIG. 7B , the support member 23 is rotated in one direction, and the protrusion 2331 of the support member 23 and the notch 2131 of the mounting hole 213 are misaligned in the vertical direction, so that the upper surface 2335 of the bottom 233 and the lower surface 2117 of the base 211 contact each other. Please refer to FIG. 8B , the support member 23 is rotated until the positioning protrusion 2133 contacts the abutting protrusion 2321, so that the support member 23 reaches the positioning position.

Finally, the support member 23 is locked from below the through hole 103 of the base by the mounting element 24, and the support mechanism 20 is installed. When the support member 23 is arranged in the mounting hole 213, the abutting protrusion 2321 can be forced to continuously abut against the positioning protrusion 2133 of the mounting hole 213, which can prevent the support member 23 from rotating relative to the support assembly 21 during the installation process.

When the support member 23 is to be replaced, the mounting element 24 is first removed, and then the support member 32 is rotated until the protrusion 2331 of the support member 23 is aligned with the notch 2131 of the mounting hole 213 to remove the support member 23 from the mounting hole 213. The support member 23 can be replaced by repeating the above steps.

Please refer to FIG. 9 for the supporting mechanism of the second embodiment of the present invention. The difference between the second embodiment and the first embodiment lies in the structure of the supporting member 33 and the supporting assembly 31.

The detachable supporting mechanism of the second embodiment includes a supporting assembly 31 and a supporting member 33. The supporting assembly 31 is disposed on the mounting interface 101 of the base 10, and the supporting member 33 is detachably mounted on the supporting assembly 31.

Please refer to Figures 11A and 11B. The support member 33 includes a body 331, a matching structure 33A, and a fixing hole (not shown). The body 331 is generally cylindrical, and a plurality of contact protrusions 3311 are formed on its upper surface to reduce the contact area between the photomask and the support member 33 when the photomask is carried. The matching structure 33A is used to match the mounting hole 313 of the support assembly 31, so that the support member 33 is accommodated in the mounting hole 313 of the support assembly 31. In this embodiment, the matching structure 33A has an anti-rotation feature 332 protruding outward from the body 331, and the anti-rotation feature 332 has a thickness d2 when viewed from the side. The fixing hole is formed in the body 331 and partially penetrates the body 331.

Please refer to Figures 12A and 12B. The support assembly 31 has a base 311, at least one limiting column 312, and a mounting hole 313. At least one limiting column 312 is connected to the base 311, and at least one limiting column 312 is provided with a fixing hole (same as the fixing hole 2121 of the first embodiment) inside. The mounting hole 213 passes through the base 311 and is a non-circular hole. The cross-sectional shape of the anti-rotation feature 332 matches the shape of the mounting hole 313, so that the support member 33 can be accommodated in the mounting hole 313, and can support the mounting hole 313 to prevent the support member 33 from rotating. From the front view direction of the support assembly 31, the base 311 has a thickness D2, and the thickness D2 is substantially the same as or similar to the thickness d2 of the anti-rotation feature 332 of the support member 33.

The following will describe the process of installing the detachable support mechanism of the second embodiment of the present invention on the base 10. Referring to FIG. 10 , first, the support assembly 31 is fixed through the through hole 102 of the lower cover and the fixing hole 2121 in the limiting column 312 by the fixing element 22. The fixing element 22 can be riveted into the limiting column 312 by a knurled pin or locked by a screw.

Then, the user can directly hold or use a robot arm to hold the matching structure 33A of the support member 33, align it with the mounting hole 313, and put it into the mounting hole 313. Then, the support member 33 is installed from below the through hole 103 of the base through the mounting element 24, and the installation of the support mechanism is completed. Through the cooperation of the cross-sectional shape of the anti-rotation feature 332 and the shape of the mounting hole 313, when the support member 33 is set in the mounting hole 313, the anti-rotation feature 332 can be forced to continuously support the periphery of the mounting hole 313, which can prevent the support member 33 from rotating relative to the support assembly 31 during the installation process.

If the support member 33 needs to be replaced, the mounting element 24 is removed, and then the support member 33 can be vertically removed, and then the above steps are repeated to replace the support member 33. After the support assembly 31 is fixed to the base 10, it does not need to be disassembled and replaced, which can avoid waste of materials and costs.

The detachable support mechanism of the first embodiment and the second embodiment of the present invention has a detachable design of the support members 23, 33 and the support assemblies 21, 31. In addition to having a quick disassembly function, it also has a higher degree of freedom in matching and combination.

Preferably, the support components 21, 31 and the support members 23, 33 can be made of different materials or have different surface treatments. For example, the support components 21, 31 can be made of more cost-effective materials, and the support members 23, 33 can be made of suitable materials according to actual use requirements. Preferably, the support members 23, 33 can be made of more wear-resistant materials, such as materials with a glass transition temperature (Tg) of 200°C (392°F) (inclusive) or above, and/or in a general atmospheric environment or a vacuum environment, the selected materials are insulating materials or materials with electrostatic dissipation functions (such as a surface resistance between 10 ⁴ and 10 ¹¹ (Ω/sq)).

Preferably, the material of the support members 23 and 33 in the embodiment of the present invention is polyimide (Pi), which has a significant improvement in wear and service life. In addition, the material of the support members 23 and 33 themselves can be plastic or metal, and processed by surface treatment, surface coating, etc. The glass transition temperature of the coating material selected for the support members 23 and 33 is 200°C (392°F) (inclusive) or above, and/or in a general atmospheric environment or a vacuum environment, it can be insulated or have the function of static dissipation to improve the service life of the support members 23 and 33.

By making the supporting parts 23 and 33 of materials with better wear resistance and higher performance, the wear resistance and service life of the supporting parts 23 and 33 are effectively improved, and the dust pollution of the photomask is reduced.

10: base 101: mounting interface 102: through hole 103: through hole 20: support mechanism 21: support assembly 211: base 212: limit column 2121: fixing hole 213: mounting hole 2131: notch 2133: positioning protrusion 22: fixing element 23: support member 23A: matching structure 231: contact part 2311: contact protrusion 2315: lower surface 232: neck 2321: supporting protrusion 233: bottom 2331: protrusion 2333: notch 2335: upper surface 2337: lower surface 234: fixing hole 24: Mounting components d1, D1, d2, D2: Thickness R1, R2, p1, p2, n1: Distance A: Circle B, C: Plane Y1, Y2: Vertical direction 31: Support assembly 311: Base 312: Limiting column 313: Mounting hole 33: Support component 33A: Matching structure 331: Body 3311: Contact protrusion 332: Anti-rotation feature

The present invention may be further understood with reference to the following drawings and descriptions. Non-limiting and non-exhaustive examples are described with reference to the following drawings. The components in the drawings are not necessarily to actual size; the emphasis is on illustrating the structure and principle.

FIG. 1 is a three-dimensional view of the base of an inner box provided with the supporting mechanism of the present invention.

FIG. 2 is a partially enlarged exploded perspective view of the support mechanism at point A in FIG. 1 .

FIG. 3 is a partially enlarged three-dimensional view of the supporting mechanism replacing the supporting member.

FIG. 4A is a bottom view of the support member according to an embodiment of the present invention.

FIG. 4B is a front view of the support member according to an embodiment of the present invention.

FIG. 4C is a three-dimensional diagram of the support member according to an embodiment of the present invention.

FIG. 5A is a bottom view of the support assembly according to an embodiment of the present invention.

FIG. 5B is a front view of the support assembly according to an embodiment of the present invention.

FIG. 6A is a three-dimensional diagram of the support mechanism when the support member of the embodiment of the present invention is in the positioning position.

FIG6B is a three-dimensional view of the support mechanism from another angle when the support member of the embodiment of the present invention is not in the positioning position.

FIG. 7A is a three-dimensional diagram of the support mechanism when the support member of the embodiment of the present invention is in a positioning position.

FIG. 7B is a three-dimensional view of the support mechanism from another angle when the support member of the embodiment of the present invention is in the positioning position.

FIG8A is a cross-sectional view of section B in FIG6A.

FIG8B is a cross-sectional view of section C in FIG7A.

FIG. 9 is a partially enlarged exploded perspective view of the support mechanism of the second embodiment of the present invention.

FIG10 is a partially enlarged three-dimensional view of the supporting mechanism of the second embodiment of the present invention when replacing the supporting member.

FIG. 11A is a side view of a support member of the second embodiment of the present invention.

FIG. 11B is a top view of the support member of the second embodiment of the present invention.

FIG. 12A is a side view of the support assembly of the second embodiment of the present invention.

FIG. 12B is a top view of the support assembly of the second embodiment of the present invention.

10: Base

101: Installation interface

103:Through hole

21: Support assembly

211: Seat

212: Limiting column

213: Mounting hole

23: Support parts

23A: Matching structure

24: Install components

Claims (12)

A mask box, which is suitable for a double-layer box, includes an outer box and an inner box contained therein, the inner box includes: a base, and at least one supporting mechanism, which is arranged on the base; the supporting mechanism includes: a supporting assembly, which is connected to a mounting interface of the base, the supporting assembly includes a base, at least one limiting column, and a mounting hole, the at least one limiting column is connected to the base, the mounting hole passes through the base and is a non-circular hole; and a supporting piece, which has a matching structure for matching the mounting hole, so that the supporting piece can be detachably accommodated in the mounting hole; wherein, a mounting element is provided below the base, and the mounting element is connected to the supporting piece through the bottom of the base, so that the supporting piece is fixed in the mounting hole. A mask box as claimed in claim 1, wherein the matching structure has at least one anti-rotation feature, and when the support member is disposed in the mounting hole, the at least one anti-rotation feature abuts against an edge of the mounting hole. A mask box as claimed in claim 2, wherein the thickness of the anti-rotation feature is the same as or similar to the thickness of the base. As in claim 2, the support member includes a contact portion, the matching structure includes a neck and a bottom, the contact portion and the bottom are connected via the neck, and the neck has at least one anti-rotation feature. A mask box as claimed in claim 1, wherein the support member includes a contact portion, the matching structure includes a neck and a bottom, the bottom is provided with at least one protrusion, and the at least one protrusion protrudes outward from the bottom; the mounting hole is provided with at least one notch, and the at least one notch extends outward from the periphery of the mounting hole corresponding to the shape of the at least one protrusion. As in claim 5, the neck is provided with at least one anti-rotation feature, the mounting hole is provided with at least one positioning protrusion, the positioning protrusion protrudes inward from the periphery of the mounting hole, and the positioning protrusion supports the at least one anti-rotation feature to prevent the support member from rotating relative to the support assembly. A mask box as claimed in claim 6, wherein the at least one anti-rotation feature is a supporting protrusion extending outward from the neck surface, and the supporting protrusion of the neck is misaligned with the at least one protrusion of the bottom in the vertical direction. As in claim 6, the mask box, wherein the bottom has at least one notch, and the at least one notch is recessed inward from the radial direction of the bottom surface, so that when the support member is placed in the mounting hole, the bottom avoids the positioning protrusion of the mounting hole. A mask box as claimed in claim 8, wherein the at least one recess of the bottom is disposed adjacent to the at least one protrusion. A mask box as claimed in claim 6, wherein the support member includes a fixing hole formed at the bottom, and after the support member is rotated to a positioning position where the supporting protrusion and the positioning protrusion abut against each other, the support member is fixed in the mounting hole by the cooperation between the mounting element and the fixing hole. A mask box as claimed in claim 10, wherein when the support member is located at the positioning position, a lower surface of the contact portion contacts an upper surface of the base, and an upper surface of the bottom contacts a lower surface of the base. A mask box as claimed in claim 1, wherein a glass transition temperature of a material constituting the support member is greater than or equal to 200°C supporting the component.

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