TW202523142A - Chip packages, operating components and computing devices - Google Patents
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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- H10B80/00—Assemblies of multiple devices comprising at least one memory device covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/611—Insulating or insulated package substrates; Interposers; Redistribution layers for connecting multiple chips together
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Abstract
本申請實施例提供一種晶片封裝體、工作組件和計算設備,包括:基板;多個裸晶模組,佈置於所述基板的一側,所述多個裸晶模組中的至少部分相互連接;所述多個裸晶模組中包括至少一個記憶體裸晶模組,所述記憶體裸晶模組包括多個堆疊的記憶體裸晶和邏輯處理裸晶。本申請實施例的技術方案通過提供一種基於chiplet的2.5D/3D封裝解決方案,可以實現超大算力,超高儲存頻寬。The embodiment of the present application provides a chip package, a working assembly and a computing device, including: a substrate; a plurality of bare crystal modules, arranged on one side of the substrate, at least some of the plurality of bare crystal modules are interconnected; the plurality of bare crystal modules include at least one memory bare crystal module, and the memory bare crystal module includes a plurality of stacked memory bare crystals and logic processing bare crystals. The technical solution of the embodiment of the present application can achieve ultra-large computing power and ultra-high storage bandwidth by providing a chiplet-based 2.5D/3D packaging solution.
Description
本申請關於晶片封裝技術領域,尤其關於一種晶片封裝體、工作組件和計算設備。The present application relates to the field of chip packaging technology, and more particularly to a chip package, a working assembly and a computing device.
一方面,隨著半導體製造技術的提高,電晶體密度逼近極限並帶來發熱、功耗嚴重生產製造成本的非線性增加等問題。半導體製造技術節點提高變緩並進入「後摩爾時代」,而先進封裝成為延續摩爾定律的重要途徑。On the one hand, with the improvement of semiconductor manufacturing technology, transistor density is approaching its limit, which brings about problems such as heat generation, serious power consumption, and nonlinear increase in manufacturing costs. The node improvement of semiconductor manufacturing technology has slowed down and entered the "post-Moore era", and advanced packaging has become an important way to continue Moore's Law.
另一方面,隨著高性能計算的應用場景不斷拓寬,對算力晶片性能提出更高要求。相關技術中,記憶體牆對傳統計算性能的阻礙也是一個大的挑戰,記憶體內計算就是為了解決記憶體牆問題而提出的方案,通過縮小處理器和記憶體之間的路徑長度並增大路徑頻寬,從而提升計算性能。而晶片工藝和性能的提升推動了先進封裝及晶片模組(chiplet)的需求。On the other hand, as the application scenarios of high-performance computing continue to expand, higher requirements are placed on the performance of computing chips. Among related technologies, the memory wall is also a big challenge to traditional computing performance. In-memory computing is a solution proposed to solve the memory wall problem. By reducing the path length between the processor and the memory and increasing the path bandwidth, computing performance is improved. The improvement of chip technology and performance has promoted the demand for advanced packaging and chip modules (chiplets).
本申請實施例提供一種晶片封裝體、工作組件和計算設備,以解決或緩解現有技術中的一項或更多項技術問題。The present application embodiment provides a chip package, a working assembly and a computing device to solve or alleviate one or more technical problems in the prior art.
作為本申請實施例的一個方面,本申請實施例提供一種晶片封裝體,包括:基板;多個裸晶模組,佈置於所述基板的一側,所述多個裸晶模組中的至少部分相互連接;所述多個裸晶模組中包括至少一個記憶體裸晶模組,所述記憶體裸晶模組包括堆疊的記憶體裸晶和邏輯處理裸晶。As one aspect of an embodiment of the present application, the embodiment of the present application provides a chip package, comprising: a substrate; a plurality of bare crystal modules, arranged on one side of the substrate, at least some of the plurality of bare crystal modules being interconnected; the plurality of bare crystal modules including at least one memory bare crystal module, the memory bare crystal module including stacked memory bare crystals and logic processing bare crystals.
在一種實施方式中,所述邏輯處理裸晶包括記憶體控制單元和/或處理器單元。In one implementation, the logic processing die includes a memory control unit and/or a processor unit.
在一種實施方式中,所述記憶體裸晶的數量為多個。In one implementation, there are multiple memory dies.
在一種實施方式中,邏輯處理裸晶的數量為一個或多個。In one implementation, the number of logically processed dies is one or more.
在一種實施方式中,所述記憶體裸晶模組的頂層裸晶為所述記憶體裸晶,所述記憶體裸晶模組的底層裸晶為所述邏輯處理裸晶;或者,所述記憶體裸晶模組的頂層裸晶為所述邏輯處理裸晶,所述記憶體裸晶模組的底層裸晶為所述記憶體裸晶。In one implementation, the top die of the memory die module is the memory die, and the bottom die of the memory die module is the logic processing die; or, the top die of the memory die module is the logic processing die, and the bottom die of the memory die module is the memory die.
在一種實施方式中,所述記憶體裸晶模組的非頂層裸晶設置有矽穿孔(TSV)。In one implementation, non-top dies of the memory die module are provided with through silicon vias (TSVs).
在一種實施方式中,所述記憶體裸晶模組的裸晶之間通過混合鍵合的方式連接,或通過微凸點連接。In one embodiment, the dies of the memory die module are connected by hybrid bonding or by micro bumps.
在一種實施方式中,裸晶模組之間的連接方式包括:通過所述基板連接。In one implementation, the connection between bare die modules includes: connecting through the substrate.
在一種實施方式中,所述基板中嵌入有基板電路,裸晶模組之間的連接方式包括:通過所述基板電路相互連接。In one implementation, a substrate circuit is embedded in the substrate, and the connection method between the bare die modules includes: connecting to each other through the substrate circuit.
在一種實施方式中,所述基板中設置有橋接裸晶和重佈線(RDL)中介層,所述RDL中介層佈置於所述橋接裸晶的朝向所述裸晶模組的一側,裸晶模組之間的連接方式包括:通過所述RDL中介層相互連接。In one embodiment, a bridge die and a redistribution line (RDL) interposer are provided in the substrate, the RDL interposer is arranged on a side of the bridge die facing the die module, and the connection between the die modules includes: connecting to each other through the RDL interposer.
在一種實施方式中,所述橋接裸晶被配置為矽介質。In one implementation, the bridge die is configured as a silicon dielectric.
在一種實施方式中,所述橋接裸晶包括矽介質以及所述矽介質中的TSV。In one implementation, the bridge die includes a silicon dielectric and a TSV in the silicon dielectric.
在一種實施方式中,裸晶模組之間的連接方式包括:通過中介層連接,所述中介層佈置於所述基板與所述裸晶模組之間。In one implementation, the connection between the bare die modules includes: connecting through an interposer, wherein the interposer is disposed between the substrate and the bare die module.
在一種實施方式中,所述中介層包括RDL中介層,所述RDL中介層包括RDL介質以及所述RDL介質中的RDL佈線層。In one implementation, the interposer includes an RDL interposer, and the RDL interposer includes an RDL medium and an RDL wiring layer in the RDL medium.
在一種實施方式中,所述中介層包括橋接裸晶中介層,所述橋接裸晶中介層中包括填充介質以及被所述填充介質包圍的橋接裸晶。In one embodiment, the interposer includes a bridge die-in-interposer, and the bridge die-in-interposer includes a filling medium and a bridge die surrounded by the filling medium.
在一種實施方式中,所述橋接裸晶中介層還包括RDL中介層,所述RDL中介層佈置於所述橋接裸晶的朝向所述裸晶模組的一側。In one implementation, the bridge die interposer further includes an RDL interposer, and the RDL interposer is disposed on a side of the bridge die facing the die module.
在一種實施方式中,所述橋接裸晶被配置為矽介質;或者,所述橋接裸晶包括矽介質以及所述矽介質中的TSV。In one embodiment, the bridge die is configured as a silicon dielectric; or, the bridge die includes a silicon dielectric and a TSV in the silicon dielectric.
在一種實施方式中,所述橋接裸晶中介層還包括位於所述填充介質中的孔(TIV),用於連接所述裸晶模組和所述基板。In one embodiment, the bridge die interposer further includes a hole (TIV) in the filling medium for connecting the die module and the substrate.
在一種實施方式中,所述中介層包括矽中介層,所述矽中介層包括矽介質以及設置於矽介質中的TSV。In one embodiment, the interposer includes a silicon interposer including a silicon dielectric and a TSV disposed in the silicon dielectric.
在一種實施方式中,所述中介層包括矽中介層和位於所述矽中介層與所述裸晶模組之間的RDL中介層,所述矽中介層包括矽介質以及設置於矽介質中的TSV。In one embodiment, the interposer includes a silicon interposer and an RDL interposer located between the silicon interposer and the bare die module, wherein the silicon interposer includes a silicon dielectric and a TSV disposed in the silicon dielectric.
在一種實施方式中,所述中介層還包括位於所述矽中介層與所述基板之間的RDL中介層。In one embodiment, the interposer further includes an RDL interposer located between the silicon interposer and the substrate.
在一種實施方式中,多個記憶體裸晶模組在所述基板的一側呈行列分佈。In one implementation, a plurality of memory die modules are arranged in rows and columns on one side of the substrate.
在一種實施方式中,多個記憶體裸晶模組中存在相互連接的相鄰記憶體裸晶模組,其中,所述相鄰記憶體裸晶模組為第一方向上相鄰的記憶體裸晶模組,和/或,所述相鄰記憶體裸晶模組為第二方向上相鄰的記憶體裸晶模組,所述第一方向為行方向或列方向,所述第二方向與所述第一方向在所述基板所在平面呈夾角。In one implementation, there are adjacent memory die modules connected to each other among a plurality of memory die modules, wherein the adjacent memory die modules are memory die modules adjacent in a first direction, and/or the adjacent memory die modules are memory die modules adjacent in a second direction, the first direction is a row direction or a column direction, and the second direction forms an angle with the first direction in the plane where the substrate is located.
在一種實施方式中,所述多個裸晶模組中還包括輸入輸出IO裸晶,所述IO裸晶至少與部分的記憶體裸晶模組相互連接。In one implementation, the plurality of bare die modules further include an input/output IO bare die, and the IO bare die is interconnected with at least a portion of the memory bare die modules.
在一種實施方式中,各所述記憶體裸晶模組與各所述IO裸晶呈行列分佈的陣列。In one implementation, the memory die modules and the IO die are arranged in an array in rows and columns.
在一種實施方式中,在第一方向上所述IO裸晶位於所述陣列的邊緣,所述第一方向為行方向或列方向。In one implementation, the IO die is located at an edge of the array in a first direction, and the first direction is a row direction or a column direction.
在一種實施方式中,所述多個記憶體裸晶模組中存在相互連接的相鄰記憶體裸晶模組,其中,所述相鄰記憶體裸晶模組為第一方向上相鄰的記憶體裸晶模組,和/或,所述相鄰記憶體裸晶模組為第二方向上相鄰的記憶體裸晶模組,所述第一方向為行方向或列方向,所述第二方向與所述第一方向在所述基板所在平面呈夾角。In one implementation, there are adjacent memory crystal modules connected to each other among the multiple memory crystal modules, wherein the adjacent memory crystal modules are memory crystal modules adjacent in a first direction, and/or the adjacent memory crystal modules are memory crystal modules adjacent in a second direction, the first direction is a row direction or a column direction, and the second direction forms an angle with the first direction in the plane where the substrate is located.
在一種實施方式中,每個所述記憶體裸晶模組的周圍分佈有至少一個所述IO裸晶。In one implementation, at least one IO die is distributed around each of the memory die modules.
在一種實施方式中,每個所述記憶體裸晶模組的周圍分佈有四個所述IO裸晶,在第一方向上相鄰的IO裸晶之間相互連接,所述第一方向為行方向或列方向。In one implementation, four IO die are distributed around each memory die module, and adjacent IO die are connected to each other in a first direction, where the first direction is a row direction or a column direction.
在一種實施方式中,所述多個裸晶模組中還包括IO裸晶模組,所述IO裸晶模組包括堆疊的IO裸晶和記憶體裸晶,所述IO裸晶模組至少與部分的記憶體裸晶模組相互連接。In one implementation, the plurality of bare die modules further include an IO bare die module, the IO bare die module includes stacked IO bare die and memory bare die, and the IO bare die module is interconnected with at least part of the memory bare die modules.
在一種實施方式中,所述IO裸晶模組的頂層裸晶為所述記憶體裸晶,所述IO裸晶模組的底層裸晶為所述IO裸晶;或者,所述IO裸晶模組的頂層裸晶為所述IO裸晶,所述IO裸晶模組的底層裸晶為所述記憶體裸晶。In one implementation, the top die of the IO die module is the memory die, and the bottom die of the IO die module is the IO die; or, the top die of the IO die module is the IO die, and the bottom die of the IO die module is the memory die.
在一種實施方式中,各所述記憶體裸晶模組與各所述IO裸晶模組在所述基板的一側呈行列分佈的陣列。In one implementation, the memory die modules and the IO die modules are arranged in rows and columns on one side of the substrate.
在一種實施方式中,在第一方向上所述IO裸晶模組位於所述陣列的邊緣,所述第一方向為行方向或列方向。In one implementation, the IO die module is located at an edge of the array in a first direction, and the first direction is a row direction or a column direction.
在一種實施方式中,所述多個記憶體裸晶模組中存在相互連接的相鄰記憶體裸晶模組,其中,所述相鄰記憶體裸晶模組為第一方向上相鄰的記憶體裸晶模組,和/或,所述相鄰記憶體裸晶模組為第二方向上相鄰的記憶體裸晶模組,所述第一方向為行方向或列方向,所述第二方向與所述第一方向在所述基板所在平面呈夾角。In one implementation, there are adjacent memory crystal modules connected to each other among the multiple memory crystal modules, wherein the adjacent memory crystal modules are memory crystal modules adjacent in a first direction, and/or the adjacent memory crystal modules are memory crystal modules adjacent in a second direction, the first direction is a row direction or a column direction, and the second direction forms an angle with the first direction in the plane where the substrate is located.
在一種實施方式中,每個所述記憶體裸晶模組的周圍分佈有至少一個所述IO裸晶模組。In one implementation, at least one IO die module is distributed around each of the memory die modules.
在一種實施方式中,每個所述記憶體裸晶模組的周圍分佈有四個所述IO裸晶模組,在第一方向上相鄰的IO裸晶模組之間相互連接,所述第一方向為行方向或列方向。In one implementation, four IO die modules are distributed around each memory die module, and adjacent IO die modules in a first direction are connected to each other, where the first direction is a row direction or a column direction.
在一種實施方式中,相鄰的IO裸晶模組模組之間相互連接。In one implementation, adjacent IO die modules are connected to each other.
作為本申請實施例的一個方面,本申請實施例提供一種工作組件,包括本申請實施例任一種實施方式中的晶片封裝體,以及PCB板,所述PCB板的一側佈置有所述晶片封裝體。As one aspect of an embodiment of the present application, the embodiment of the present application provides a working assembly, including a chip package in any embodiment of the present application, and a PCB board, wherein the chip package is arranged on one side of the PCB board.
在一種實施方式中,所述晶片封裝體的數量為多個。In one implementation, there are multiple chip packages.
在一種實施方式中,多個所述晶片封裝體中的至少部分相互連接。In one embodiment, at least parts of the plurality of chip packages are connected to each other.
在一種實施方式中,所述PCB板的一側佈置有記憶體設備,所述晶片封裝體中的裸晶模組通過PCB板與所述記憶體設備相互連接。In one implementation, a memory device is disposed on one side of the PCB board, and the bare die module in the chip package is interconnected with the memory device via the PCB board.
在一種實施方式中,所述記憶體設備的數量為多個。In one implementation, there are multiple memory devices.
在一種實施方式中,所述記憶體設備與所述晶片封裝單元佈置於所述PCB板的同一側。In one implementation, the memory device and the chip package unit are arranged on the same side of the PCB board.
作為本申請實施例的一個方面,本申請實施例提供一種計算設備,包括本申請實施例任一種實施方式中的工作組件以及供電模組。As one aspect of an embodiment of the present application, the embodiment of the present application provides a computing device, including a working component and a power supply module in any implementation method of the embodiment of the present application.
在一種實施方式中,所述工作組件的數量為多個。In one implementation, there are multiple working components.
在一種實施方式中,多個所述工作組件中的至少部分相互連接。In one embodiment, at least some of the plurality of working components are interconnected.
本申請實施例的技術方案通過提供一種基於chiplet的2.5D/3D封裝解決方案,可以實現超大算力,超高儲存頻寬。The technical solution of the embodiment of this application can achieve ultra-large computing power and ultra-high storage bandwidth by providing a chiplet-based 2.5D/3D packaging solution.
上述概述僅僅是為了說明書的目的,並不意圖以任何方式進行限制。除上述描述的示意性的方面、實施方式和特徵之外,通過參考附圖和以下的詳細描述,本申請進一步的方面、實施方式和特徵將會是容易明白的。The above summary is for the purpose of description only and is not intended to be limiting in any way. In addition to the illustrative aspects, implementations and features described above, further aspects, implementations and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description.
在下文中,僅簡單地描述了某些示例性實施例。正如本領域具有通常知識者可認識到的那樣,在不脫離本申請的精神或範圍的情況下,可通過各種不同方式修改所描述的實施例。因此,附圖和描述被認為本質上是示例性的而非限制性的。In the following, only certain exemplary embodiments are briefly described. As can be recognized by those skilled in the art, the described embodiments can be modified in various different ways without departing from the spirit or scope of the present application. Therefore, the drawings and description are to be regarded as illustrative rather than restrictive in nature.
應用場景Application Scenarios
隨著技術的發展,晶片的集積度越來越高,性能也在不斷提升。然而,隨著技術的進一步發展,單一晶片上集積更多的功能和元件變得越來越具有挑戰性,同時也會增加製造的成本和複雜度。As technology develops, chips become more integrated and their performance continues to improve. However, as technology further develops, it becomes increasingly challenging to integrate more functions and components on a single chip, which also increases the cost and complexity of manufacturing.
為了克服這些挑戰,半導體製造技術領域開始出現晶片模組(chiplet)這一概念。chiplet可以理解為一個小型的、獨立的晶片模組,它通常包含了一個特定的功能單元或處理單元。與傳統的單一晶片不同,chiplet將整個系統拆分成多個更小、更專注的部分。這些chiplet可以獨立地進行設計、製造和測試,然後在一個封裝中組合在一起,形成一個完整的功能系統或處理系統,以實現更高靈活性、性能優化和降低成本的設計和製造方法。chiplet是在晶片工藝和性能不斷提升的背景下,應對複雜性和成本挑戰的一種創新解決方案。To overcome these challenges, the concept of chiplet began to emerge in the field of semiconductor manufacturing technology. A chiplet can be understood as a small, independent chip module, which usually contains a specific functional unit or processing unit. Unlike traditional single chips, chiplets split the entire system into multiple smaller and more focused parts. These chiplets can be designed, manufactured and tested independently, and then combined in a package to form a complete functional system or processing system to achieve higher flexibility, performance optimization and cost reduction design and manufacturing methods. Chiplet is an innovative solution to the complexity and cost challenges faced by the continuous improvement of chip technology and performance.
在chiplet的技術概念下,2.5D和3D封裝解決方案應然而生,如基板上晶圓上晶片技術(Chip-on-Wafer-on-Substrate,CoWoS)。一種示例性的CoWoS解決方案中,通過將邏輯處理裸晶(Logic die)和高頻寬記憶體(High Bandwidth Memory,HBM)堆疊整合在一起,通常為在Logic die周圍佈局多個HBM堆疊,以提供卓越的計算和記憶體性能。其中,Logic die是CoWoS封裝晶片的核心計算單元,包含了大量的圖形處理單元(Graphics Processing Unit,GPU)用於高性能計算任務;HBM堆疊採用了3D堆疊技術,將多個記憶體晶片組件堆疊在一起,通過矽穿孔(Through Silicon Via,TSV)進行通訊,用於提供高頻寬和低延遲的記憶體存取。Under the technical concept of chiplet, 2.5D and 3D packaging solutions are born, such as Chip-on-Wafer-on-Substrate (CoWoS). In an exemplary CoWoS solution, logic die and high-bandwidth memory (HBM) stack are integrated together, usually by arranging multiple HBM stacks around the logic die to provide excellent computing and memory performance. Among them, the Logic die is the core computing unit of the CoWoS packaged chip, which contains a large number of graphics processing units (GPUs) for high-performance computing tasks; the HBM stack adopts 3D stacking technology to stack multiple memory chip components together and communicate through silicon vias (TSV) to provide high-bandwidth and low-latency memory access.
CoWoS解決方案允許在單個封裝中集積多個不同功能的晶片,從而提供更高的性能和效率。但是,與其他同等算力和同等頻寬的封裝解決方案相比,其CoWoS解決方案的晶片封裝面積也會更大,功耗和成本都會更高。The CoWoS solution allows multiple chips with different functions to be integrated into a single package, providing higher performance and efficiency. However, compared with other packaging solutions with the same computing power and bandwidth, the chip packaging area of the CoWoS solution will also be larger, and the power consumption and cost will be higher.
圖1A和圖1B示出本申請實施例提供的晶片封裝體的架構圖。如圖1A和圖1B所示,該晶片封裝體包括基板(Substrate)20和多個裸晶模組10,多個裸晶模組10佈置於基板20的一側。1A and 1B show the architecture of the chip package provided by the embodiment of the present application. As shown in FIG1A and 1B , the chip package includes a substrate 20 and a plurality of bare die modules 10 , and the plurality of bare die modules 10 are arranged on one side of the substrate 20 .
其中,基板20用作封裝基板,其材料包括有機基板、陶瓷基板、藍寶石基板等。不同的應用和需求可能會選擇不同類型的材料,本申請實施例對此不作限定。The substrate 20 is used as a packaging substrate, and its material includes an organic substrate, a ceramic substrate, a sapphire substrate, etc. Different applications and requirements may select different types of materials, and the present application embodiment does not limit this.
裸晶模組10與基板20的連接方式,本申請實施例不作限定,例如可以通過可控塌陷晶片連接凸點(Controlled Collapse Chip Connection,簡稱C4 bump或C4凸點)的連接方式,或採用中介層(Interposer)的連接方式。The connection method between the bare die module 10 and the substrate 20 is not limited in the present application embodiment. For example, the connection method can be through a controlled collapse chip connection bump (Controlled Collapse Chip Connection, referred to as C4 bump or C4 bump) or a connection method using an interposer.
其中,C4凸點採用凸點(bumping)工藝製成,核心工藝流程為金屬沉積,而最為常見的金屬沉積步驟包括凸點下金屬化層(Under Bump Metallization,UBM)的沉積和凸點本身的沉積。凸點下金屬化層(UBM)的沉積通常採用濺鍍(sputter)、化學鍍(electroless)、電鍍(plating)等方式實現;凸點本身的沉積通常採用電鍍、植球、印刷的方式實現。Among them, C4 bumps are made by bumping process, the core process flow is metal deposition, and the most common metal deposition steps include the deposition of under bump metallization (UBM) and the deposition of the bump itself. The deposition of under bump metallization (UBM) is usually achieved by sputtering, electroless plating, plating, etc.; the deposition of the bump itself is usually achieved by electroplating, ball planting, and printing.
中介層(Interposer)可以説明上層或下層的元件之間進行電性能互連和資訊交換(比如連接兩個裸晶),中介層的類型較多,可根據實際需求進行選擇,下文將通過具體示例進行介紹。Interposers can help components on the upper or lower layers to interconnect electrically and exchange information (such as connecting two bare chips). There are many types of interposers, which can be selected based on actual needs. The following will introduce them through specific examples.
進一步地,這多個裸晶模組10中包括至少一個記憶體裸晶模組100。也就是說,這多個裸晶模組10中可以全部都被配置為記憶體裸晶模組100,也可以是部分被配置為記憶體裸晶模組100,即這多個裸晶模組10中可以存在其他類型的裸晶模組。本申請實施例對裸晶模組10和記憶體裸晶模組100的數量均不作限定。Furthermore, the plurality of bare crystal modules 10 include at least one memory bare crystal module 100. That is, all of the plurality of bare crystal modules 10 may be configured as memory bare crystal modules 100, or some of them may be configured as memory bare crystal modules 100, that is, other types of bare crystal modules may exist in the plurality of bare crystal modules 10. The embodiment of the present application does not limit the number of bare crystal modules 10 and memory bare crystal modules 100.
其中,記憶體晶片模組100包括多個堆疊的記憶體裸晶102和邏輯處理裸晶101。本申請實施例中,記憶體裸晶102和邏輯處理裸晶101的數量、堆疊方式、排布位置,均不作限定,例如可以是1個、2個、4個、8個、12個、16個、20個、24個等。The memory chip module 100 includes a plurality of stacked memory die 102 and logic processing die 101. In the embodiment of the present application, the number, stacking method, and arrangement position of the memory die 102 and the logic processing die 101 are not limited, and may be 1, 2, 4, 8, 12, 16, 20, 24, etc.
在一個示例中,在圖1A所示的記憶體裸晶模組100中,記憶體裸晶102為多個,記憶體裸晶模組100的頂層裸晶為邏輯處理裸晶101,記憶體裸晶模組100的底層裸晶為記憶體裸晶102。In one example, in the memory die module 100 shown in FIG. 1A , there are multiple memory die 102 , the top die of the memory die module 100 is the logic processing die 101 , and the bottom die of the memory die module 100 is the memory die 102 .
在另一個示例中,在圖1B所示的記憶體裸晶模組100中,記憶體裸晶102為多個,記憶體裸晶模組100的頂層裸晶為記憶體裸晶102,記憶體裸晶模組100的底層裸晶為邏輯處理裸晶101。In another example, in the memory die module 100 shown in FIG. 1B , there are multiple memory die 102 , the top die of the memory die module 100 is the memory die 102 , and the bottom die of the memory die module 100 is the logic processing die 101 .
也就是說,邏輯處理裸晶101的堆疊位置可以根據實際需要進行調整,例如也可以堆疊在記憶體裸晶102之間。That is to say, the stacking position of the logic processing die 101 can be adjusted according to actual needs, for example, it can also be stacked between the memory die 102.
其中,記憶體裸晶102可以是任意類型記憶體的晶片裸晶,該任意類型記憶體可以諸如:動態隨機存取記憶體(Dynamic Random Access Memory,DRAM)、靜態隨機存取記憶體(Static Random Access Memory,SRAM)、非揮發性隨機存取記憶體(Non-Volatile Random Access Memory,NVRAM)、快閃記憶體(Flash Memory)或電子式可抹除可編程唯讀記憶體(Electrically Erasable Programmable Read-Only Memory,EEPROM)等。示例性地,記憶體裸晶102可以是定制化的晶片裸晶,也可以是標準化的晶片裸晶,本申請實施例對此不作限定。The memory die 102 may be a chip die of any type of memory, such as dynamic random access memory (DRAM), static random access memory (SRAM), non-volatile random access memory (NVRAM), flash memory, or electrically erasable programmable read-only memory (EEPROM). Exemplarily, the memory die 102 may be a customized chip die or a standardized chip die, which is not limited in the present application embodiment.
邏輯處理裸晶101可以是負責邏輯處理功能的晶片裸晶。示例性地,該邏輯處理裸晶101可以包括記憶體控制單元,也可以包括處理器單元,或者可以包括記憶體控制單元和處理器單元。其中,處理器單元例如為中央處理器(Central Processing Unit,CPU)、圖形處理器(Graphics Processing Unit,GPU)、資料處理器(Data Processing Unit,DPU)、也可以是知識處理器(Knowledge Processing Unit,KPU)、張量處理器(Tensor Processing Unit,TPU)、智慧處理器(Intelligence Processing Unit,IPU)、可重構資料流程器(Reconfigurable Dataflow Unit)、神經網路處理器(Neural Processing Unit,NPU)或其他類型的處理器(Any type Processing Unit,xPU),負責執行指令並進行各種計算和資料處理任務,包括簡單的算數運算和複雜的邏輯操作,從而實現計算、控制、決策等功能。記憶體控制單元負責管理和協調記憶體存取的一部分,如將處理器請求的記憶體操作轉換成記憶體的操作,並確保資料的正確傳輸和儲存,以實現高效的記憶體存取和資料傳輸。The logic processing die 101 may be a chip die responsible for logic processing functions. Exemplarily, the logic processing die 101 may include a memory control unit, may include a processor unit, or may include a memory control unit and a processor unit. The processor unit may be, for example, a central processing unit (CPU), a graphics processing unit (GPU), a data processing unit (DPU), a knowledge processing unit (KPU), a tensor processing unit (TPU), an intelligence processing unit (IPU), a reconfigurable dataflow unit (Reconfigurable Dataflow Unit), a neural network processor (NPU) or any other type of processor (xPU), which is responsible for executing instructions and performing various computing and data processing tasks, including simple arithmetic operations and complex logical operations, thereby realizing functions such as computing, control, and decision-making. The memory control unit is responsible for managing and coordinating part of the memory access, such as converting the memory operations requested by the processor into memory operations and ensuring the correct transmission and storage of data to achieve efficient memory access and data transmission.
需要說明的是,本申請實施例中,晶片(Chip)是在一個小型的矽片(也可以是其他半導體材料)上集積了多個電子元件(如電晶體、電容器、電阻器等)和電路連接,這些元件和連接形成了複雜的電路,可以執行各種功能,從而實現計算、儲存、控制、訊號處理等任務,即晶片是一種高度集積的電子器件。而裸晶(Die)是指一個未封裝的、單獨的晶片。在晶片製造過程中,通常會將一個矽片(也可以是其他材料)上製造出許多相同的晶片。每個晶片被稱為一個裸晶,它包含了一個特定的電路設計和功能。裸晶在製造完成後會被分離,並可以被進一步封裝成成品晶片或用於其他應用。It should be noted that in the embodiment of the present application, a chip is a small silicon wafer (or other semiconductor materials) on which multiple electronic components (such as transistors, capacitors, resistors, etc.) and circuit connections are integrated. These components and connections form complex circuits that can perform various functions, thereby realizing tasks such as calculation, storage, control, and signal processing. That is, a chip is a highly integrated electronic device. A die refers to an unpackaged, single chip. In the chip manufacturing process, many identical chips are usually manufactured on a silicon wafer (or other materials). Each chip is called a die, which contains a specific circuit design and function. After manufacturing, the die will be separated and can be further packaged into finished chips or used for other applications.
進一步地,記憶體裸晶102和邏輯處理裸晶101之間相互連接(簡稱互聯)的方式可根據實際需要進行配置,本申請實施例對此不作限定。Furthermore, the method of interconnection (referred to as interconnection) between the memory die 102 and the logic processing die 101 can be configured according to actual needs, and the embodiment of the present application is not limited to this.
在一種實施方式中,記憶體裸晶模組100的非頂層裸晶(可以是記憶體裸晶102,也可以是邏輯處理裸晶101)設置有TSV,即在裸晶內部形成穿越的垂直導孔,實現不同層次的晶片互連和通訊。每個TSV是一個微小的金屬導孔,穿過裸晶的厚度,連接了不同層次的電路,從而實現高速的訊號傳輸、低延遲的互連和更高性能、更緊湊的封裝方案。In one implementation, the non-top die of the memory die module 100 (which may be the memory die 102 or the logic processing die 101) is provided with TSVs, i.e., vertical vias are formed inside the die to achieve interconnection and communication between chips at different levels. Each TSV is a tiny metal via that passes through the thickness of the die and connects circuits at different levels, thereby achieving high-speed signal transmission, low-latency interconnection, and higher performance and more compact packaging solutions.
作為一個示例,記憶體裸晶模組100的裸晶(可以是記憶體裸晶102,也可以是邏輯處理裸晶101)之間通過混合鍵合(Hybrid Bonding)的方式連接。具體地,可以利用表面化學反應在兩個裸晶之間創建非常強大的原子級連接,從而能夠在晶圓上的微米尺度精確對準並連接晶片裸晶。混合鍵合(Hybrid Bonding)通常能夠在不需要使用焊料或導電材料的情況下實現電訊號和資料的傳輸,因此在一些應用中可以減少訊號傳輸的損耗。由於連接非常密切,通過混合鍵合(Hybrid Bonding)可以實現高密度的晶片堆疊,從而在較小的封裝尺寸內實現更多的功能。As an example, the dies of the memory die module 100 (which may be the memory die 102 or the logic processing die 101) are connected by hybrid bonding. Specifically, surface chemical reactions can be used to create a very strong atomic-level connection between the two dies, so that the chip dies can be precisely aligned and connected at the micron scale on the wafer. Hybrid bonding generally enables the transmission of electrical signals and data without the use of solder or conductive materials, thereby reducing signal transmission losses in some applications. Because the connection is very close, high-density chip stacking can be achieved through hybrid bonding, thereby realizing more functions in a smaller package size.
作為另一個示例,記憶體裸晶模組100的裸晶(可以是記憶體裸晶102,也可以是邏輯處理裸晶101)之間通過微凸點(µbump)連接。具體地,µbump 是一種微小的凸起結構,通常由金屬材料製成,從而在裸晶之間形成互聯和通訊。並且,這種結構通常通過微電子製程製造,可以精確地控制其大小、位置和排列,從而實現高密度的連接。As another example, the die of the memory die module 100 (which may be the memory die 102 or the logic processing die 101) are connected via micro bumps. Specifically, a µbump is a tiny protruding structure, usually made of metal material, which forms interconnections and communications between the die. Moreover, this structure is usually manufactured by a microelectronics process, and its size, position, and arrangement can be precisely controlled, thereby achieving high-density connections.
根據本申請實施例提供的晶片封裝體,裸晶模組為基於chiplet概念的封裝元件,通過將多個裸晶模組封裝在基板的一側,提供了一種2.5D/3D封裝解決方案。其中的記憶體裸晶模組可以實現記憶體裸晶和邏輯處理裸晶的無限堆疊和定制化堆疊,從而實現儲存頻寬的擴展和算力性能的提升,並且,相較於CoWoS解決方案,記憶體裸晶模組所採用堆疊的方式可以實現更短的互聯距離和更高的互聯密度,極大提升了互聯效率和晶片性能。According to the chip package provided in the embodiment of the present application, the bare die module is a packaging component based on the chiplet concept, and a 2.5D/3D packaging solution is provided by packaging multiple bare die modules on one side of the substrate. The memory bare die module can realize the infinite stacking and customized stacking of memory bare die and logic processing bare die, thereby realizing the expansion of storage bandwidth and the improvement of computing power performance. Moreover, compared with the CoWoS solution, the stacking method adopted by the memory bare die module can achieve a shorter interconnection distance and a higher interconnection density, which greatly improves the interconnection efficiency and chip performance.
示例性地,本申請實施例提供的晶片封裝體可以用於高性能計算晶片、感測器晶片、微機電系統(Micro-Electro-Mechanical Systems,MEMS)、光通訊晶片等。需要說明的是,本申請實施例中提供的上述應用場景或應用示例,是為了便於理解,本申請實施例對晶片封裝體的應用不作具體限定。For example, the chip package provided in the embodiment of the present application can be used for high-performance computing chips, sensor chips, micro-electro-mechanical systems (MEMS), optical communication chips, etc. It should be noted that the above application scenarios or application examples provided in the embodiment of the present application are for the purpose of facilitating understanding, and the embodiment of the present application does not specifically limit the application of the chip package.
下面以具體的實施例對本申請的技術方案以及本申請的技術方案如何解決前述技術問題進行詳細說明。所列舉的若干具體的實施例可以相互結合,對於相同或相似的概念或過程可能在某些實施例中不再贅述。The following is a detailed description of the technical solution of the present application and how the technical solution of the present application solves the above-mentioned technical problems with specific embodiments. The several specific embodiments listed can be combined with each other, and the same or similar concepts or processes may not be described in detail in some embodiments.
第一部分Part I
以下通過實施例一和實施例二介紹裸晶模組10之間的不同互聯方式。需要說明的是,這些互聯方式可以應用於任意類型的裸晶模組之間,可以在一個晶片封裝體中單獨使用一種互聯方式,也可以在一個晶片封裝體中同時使用多種互聯方式,本申請實施例對此不作限定。The following introduces different interconnection methods between bare die modules 10 through Example 1 and Example 2. It should be noted that these interconnection methods can be applied to any type of bare die modules, and a single interconnection method can be used in a chip package, or multiple interconnection methods can be used in a chip package at the same time, and this application embodiment does not limit this.
實施例一Embodiment 1
在一種互聯方式中,裸晶模組10之間可以通過基板20連接。其中,圖2A、圖2B和圖2C示出了裸晶模組10之間以及裸晶模組10與基板20之間基於基板的互聯方式。In one interconnection method, the bare die modules 10 may be connected via the substrate 20. FIG. 2A, FIG. 2B and FIG. 2C show the interconnection methods between the bare die modules 10 and between the bare die module 10 and the substrate 20 based on the substrate.
在一個示例中,如圖2A所示,裸晶模組10通過C4凸點104與基板20連接,裸晶模組10之間通過基板20中的基板電路103相互連接。在這種互聯方式中,基板電路103是直接嵌入在基板20內,即可以添加多層基板電路103來實現不同元件之間的互聯,包括通訊和電源供應。這種方式結構簡單,成本較低。In one example, as shown in FIG. 2A , the bare die module 10 is connected to the substrate 20 via the C4 bump 104, and the bare die modules 10 are connected to each other via the substrate circuit 103 in the substrate 20. In this interconnection method, the substrate circuit 103 is directly embedded in the substrate 20, that is, multiple layers of substrate circuits 103 can be added to realize the interconnection between different components, including communication and power supply. This method has a simple structure and low cost.
其中,C4凸點104設置在基板20和裸晶模組10之間的連接區域,從而實現基板20和裸晶模組10之間的可靠互聯。C4凸點可以佈置在較小的間距上,從而可以實現裸晶模組10之間以及基板20和裸晶模組10之間的高密度互聯。The C4 bumps 104 are disposed in the connection area between the substrate 20 and the die module 10, thereby realizing reliable interconnection between the substrate 20 and the die module 10. The C4 bumps can be arranged at a smaller pitch, thereby realizing high-density interconnection between the die modules 10 and between the substrate 20 and the die module 10.
在另一個示例中,裸晶模組10之間在基板20內部實現互聯。具體地,在基板20中設置有橋接裸晶(bridge die)201,橋接裸晶201的上方(朝向裸晶模組10的一側)設置有RDL中介層110,RDL中介層110包括RDL介質106以及RDL佈線層107,從而使裸晶模組10之間在基板20內部實現互聯。In another example, the bare die modules 10 are interconnected inside the substrate 20. Specifically, a bridge die 201 is disposed in the substrate 20, and an RDL interposer 110 is disposed above the bridge die 201 (on the side facing the bare die module 10), and the RDL interposer 110 includes an RDL medium 106 and an RDL wiring layer 107, so that the bare die modules 10 are interconnected inside the substrate 20.
在這個示例中有兩種實現方式:一種實現方式如圖2B所示,橋接裸晶201被配置為矽介質205。每個裸晶模組10均可以通過基板20中的孔(Via)108,在橋接裸晶201上的RDL中介層110做互聯,從而實現裸晶模組10之間的互聯。其餘的訊號(包括橋接裸晶201上的訊號或裸晶模組10上的其他訊號)均可以通過基板電路103和基板20中的孔(Via)108連接到基板20底部的焊球109。There are two implementations in this example: one implementation is shown in FIG. 2B , where the bridge die 201 is configured as a silicon dielectric 205. Each die module 10 can be interconnected through a via 108 in the substrate 20 and an RDL interposer 110 on the bridge die 201, thereby realizing interconnection between the die modules 10. The remaining signals (including signals on the bridge die 201 or other signals on the die module 10) can be connected to the solder balls 109 at the bottom of the substrate 20 through the substrate circuit 103 and the via 108 in the substrate 20.
另一種實現方式如圖2C所示,橋接裸晶201被配置為包括矽介質205以及矽介質205中的TSV204。RDL中介層110的上表面(朝向裸晶模組10的那一側)通過焊盤和C4凸點104連接,也就是說,C4凸點104一端連接裸晶模組10,另一端連接RDL中介層110的上表面,從而實現裸晶模組10之間的互聯。同時,橋接裸晶201背離裸晶模組10的那一側可以通過TSV204連接到基板電路103。Another implementation is shown in FIG. 2C , where the bridge die 201 is configured to include a silicon dielectric 205 and TSVs 204 in the silicon dielectric 205. The upper surface of the RDL interposer 110 (the side facing the die module 10) is connected to the C4 bumps 104 via pads, that is, one end of the C4 bumps 104 is connected to the die module 10, and the other end is connected to the upper surface of the RDL interposer 110, thereby realizing interconnection between the die modules 10. At the same time, the side of the bridge die 201 facing away from the die module 10 can be connected to the substrate circuit 103 via the TSVs 204.
其中,基於橋接裸晶的互聯方式可以實現裸晶模組之間高密度的互連,提供更高的性能、功能整合度、靈活性和能效,使得複雜的3D封裝系統變得更加可行和高效。Among them, the interconnection method based on bridged bare die can realize high-density interconnection between bare die modules, provide higher performance, functional integration, flexibility and energy efficiency, and make complex 3D packaging systems more feasible and efficient.
實施例二Embodiment 2
本實施例中,裸晶模組10之間可以通過中介層(Interposer)連接,該中介層佈置於基板20與裸晶模組10之間。中介層可用於使基板20上的裸晶模組10之間形成互聯,也可以用於使基板20與裸晶模組10之間形成互聯。In this embodiment, the die modules 10 may be connected via an interposer disposed between the substrate 20 and the die modules 10. The interposer may be used to interconnect the die modules 10 on the substrate 20, or may be used to interconnect the substrate 20 and the die modules 10.
其中,中介層可以包括重佈線層(Re-distribution Layer,RDL)中介層、橋接裸晶(bridge die)中介層或矽(silicon)中介層。需要說明的是,每種中介層對應一種互聯方式,因此,選擇的中介層不同,互聯方式即為不同。The interposer may include a redistribution layer (RDL) interposer, a bridge die interposer or a silicon interposer. It should be noted that each interposer corresponds to an interconnection method, so different interposers are selected, and different interconnection methods are used.
在一種互聯方式中,如圖3A所示,中介層可以為RDL中介層110,即裸晶模組10之間可以通過RDL中介層110連接。具體地,RDL中介層110包括RDL介質106以及RDL介質106中的RDL佈線層107。In one interconnection mode, as shown in FIG3A , the interposer may be an RDL interposer 110 , that is, the bare die modules 10 may be connected via the RDL interposer 110 . Specifically, the RDL interposer 110 includes an RDL medium 106 and an RDL wiring layer 107 in the RDL medium 106 .
RDL介質106通常由有機(Organic)材料製成;RDL107的常見材料是電鍍銅(Plated Cu)輔以打底的鈦、銅濺鍍層;銅層表面再按需要覆蓋相應的保護層油墨。The RDL medium 106 is usually made of organic materials; the common material of RDL 107 is electroplated copper (Plated Cu) supplemented by a base titanium or copper sputtering layer; the surface of the copper layer is then covered with a corresponding protective layer ink as needed.
示例性地,RDL107用於連接裸晶模組10上的微凸點(µbump)105和RDL中介層110另一側的C4凸點104,從而實現裸晶模組10與基板20之間以及裸晶模組10之間的互聯,實現高密度、高速的訊號傳輸。Exemplarily, RDL 107 is used to connect the micro bump 105 on the die module 10 and the C4 bump 104 on the other side of the RDL interposer 110, thereby realizing the interconnection between the die module 10 and the substrate 20 and between the die modules 10, and realizing high-density and high-speed signal transmission.
RDL中介層的互聯方式適用於裸晶模組與基板之間以及裸晶模組之間的複雜互聯。具體地,相較於基板互聯受限於基板層數,採用RDL中介層可以允許更多層次的互連,且RDL中介層的位置更靈活,因此,可以實現更複雜、更高密度的互聯;並且,採用RDL中介層的互聯方式通常具有更短更緊密的互連路徑,因此可能具有更好的性能和更低的訊號延遲。The interconnection method of RDL interposer is suitable for complex interconnection between bare die modules and substrates and between bare die modules. Specifically, compared with substrate interconnection which is limited by the number of substrate layers, the use of RDL interposer allows more layers of interconnection, and the location of RDL interposer is more flexible, so more complex and higher density interconnection can be achieved; and the interconnection method using RDL interposer usually has shorter and more dense interconnection paths, so it may have better performance and lower signal delay.
在一種互聯方式中,如圖3B和圖3C所示,中介層可以為橋接裸晶中介層210,包括填充介質202以及被填充介質202包圍填充的橋接裸晶(bridge die)201。In one interconnection manner, as shown in FIG. 3B and FIG. 3C , the interposer may be a bridge die interposer 210 , including a filling dielectric 202 and a bridge die 201 surrounded and filled by the filling dielectric 202 .
示例性地,填充介質202的材料可以是塑封(molding)材料、底部填充(Underfill)材料或其他用於保護填充的材料,包括有機材料或無機材料,只要能夠使填充介質202保護橋接裸晶201即可。Exemplarily, the material of the filling medium 202 may be a molding material, an underfill material or other materials used for protecting the filling, including organic materials or inorganic materials, as long as the filling medium 202 can protect the bridge die 201 .
在一個示例中,如圖3B所示,橋接裸晶201可以包括矽介質205以及設置於矽介質205中的TSV204,例如,橋接裸晶201的一個表面(如上表面)設置在兩個裸晶模組10之間,另一個表面(如下表面)通過矽介質205中的TSV204連接到C4凸點104,再通過C4凸點104與基板20連接。In one example, as shown in FIG. 3B , the bridge die 201 may include a silicon dielectric 205 and a TSV 204 disposed in the silicon dielectric 205 . For example, one surface (such as the upper surface) of the bridge die 201 is disposed between two die modules 10 , and the other surface (such as the lower surface) is connected to the C4 bump 104 through the TSV 204 in the silicon dielectric 205 , and then connected to the substrate 20 through the C4 bump 104 .
示例性地,如圖3B所示,橋接裸晶中介層210還可以包括設置在橋接裸晶201上的RDL中介層110,RDL中介層110包括RDL介質106以及RDL佈線層107,用於實現連接裸晶模組10之間的互聯關係。Exemplarily, as shown in FIG. 3B , the bridge die interposer 210 may further include an RDL interposer 110 disposed on the bridge die 201 , wherein the RDL interposer 110 includes an RDL medium 106 and an RDL wiring layer 107 for realizing an interconnection relationship between the connected die modules 10 .
作為可選的示例,橋接裸晶201在朝向基板20的一側設置有C4凸點104,橋接裸晶201通過TSV204連接到C4凸點104,再通過C4凸點104與基板20互聯;裸晶模組10在朝向橋接裸晶中介層210的一側設置有微凸點105,裸晶模組10通過微凸點105在RDL中介層110上實現互聯。As an optional example, the bridge die 201 is provided with a C4 bump 104 on the side facing the substrate 20, the bridge die 201 is connected to the C4 bump 104 through TSV 204, and then interconnected with the substrate 20 through the C4 bump 104; the die module 10 is provided with a micro bump 105 on the side facing the bridge die interposer 210, and the die module 10 is interconnected on the RDL interposer 110 through the micro bump 105.
在另一個示例中,如圖3C所示,橋接裸晶(bridge die)201被配置為矽介質205。需要說明的是,可以根據需要設置RDL中介層110在橋接裸晶201的一個表面(如上表面),且設置在兩個裸晶模組10之間,從而通過橋接裸晶201上表面的RDL中介層110實現連接裸晶模組10之間的互聯關係,而橋接裸晶201的另一個表面(如下表面)可以不與基板20連接。In another example, as shown in FIG3C , the bridge die 201 is configured as a silicon dielectric 205. It should be noted that the RDL interposer 110 may be provided on one surface (such as the upper surface) of the bridge die 201 as required, and may be provided between two die modules 10, so that the interconnection relationship between the die modules 10 is realized through the RDL interposer 110 on the upper surface of the bridge die 201, and the other surface (such as the lower surface) of the bridge die 201 may not be connected to the substrate 20.
進一步地,作為示例,如圖3B和3C所示,橋接裸晶中介層202還可以包括(Through Interposer Via)TIV 203,設置在填充介質202中,連接於微凸點105與C4凸點104之間,實現裸晶模組10與基板20之間的互聯。由此,裸晶模組10之間的互聯可以通過橋接裸晶中介層202實現,其餘訊號可通過TIV203連接至基板20。Further, as an example, as shown in FIGS. 3B and 3C , the bridge die interposer 202 may further include a (Through Interposer Via) TIV 203, which is disposed in the filling medium 202 and connected between the micro bumps 105 and the C4 bumps 104 to realize the interconnection between the die module 10 and the substrate 20. Thus, the interconnection between the die modules 10 can be realized through the bridge die interposer 202, and the remaining signals can be connected to the substrate 20 through the TIV 203.
示例性地,在中介層為橋接裸晶中介層210的實現方式中,即如圖3B和3C所示的實現方式中,由於微凸點105排列的稀疏程度可能與TIV203的排列稀疏程度不同,為了便於互聯,可以在橋接裸晶中介層210與微凸點105之間設置互聯中介層,例如為RDL中介層110(圖中未示出)。For example, in an implementation in which the interposer is a bridge die interposer 210, i.e., an implementation as shown in FIGS. 3B and 3C , since the sparseness of the arrangement of the micro bumps 105 may be different from the sparseness of the arrangement of the TIV 203, in order to facilitate interconnection, an interconnection interposer, such as an RDL interposer 110 (not shown in the figure), may be provided between the bridge die interposer 210 and the micro bumps 105.
基於橋接裸晶中介層的互聯方式可以實現裸晶模組之間以及裸晶模組與基板之間的高密度互連,提供更高的性能、功能整合度、靈活性和能效,使得複雜的3D封裝系統變得更加可行和高效。The interconnection method based on the bridged die interposer can achieve high-density interconnection between die modules and between die modules and substrates, providing higher performance, functional integration, flexibility and energy efficiency, making complex 3D packaging systems more feasible and efficient.
在一種實現方式中,如圖3D所示,中介層可以為矽中介層310,矽中介層310包括矽介質205以及設置於矽介質 205中的TSV204。In one implementation, as shown in FIG. 3D , the interposer may be a silicon interposer 310 , which includes a silicon dielectric 205 and a TSV 204 disposed in the silicon dielectric 205 .
示例性地,裸晶模組10朝向基板的一側設置有微凸點105,微凸點105與矽介質205之間設置有RDL中介層110, RDL中介層110包括RDL介質106以及RDL佈線層107,微凸點105通過RDL110與TSV204互聯;TSV204的一端連接於基板20上的C4凸點104,另一端與RDL110互聯,由此不同裸晶模組10之間可以在RDL中介層110上完成互聯,其餘的訊號經由RDL中介層110後再穿過矽介質205以及TSV204,連接到C4凸點104,最終與基板20連接。Exemplarily, a micro-bump 105 is provided on the side of the bare die module 10 facing the substrate, and an RDL interposer 110 is provided between the micro-bump 105 and the silicon dielectric 205. The RDL interposer 110 includes an RDL dielectric 106 and an RDL wiring layer 107. The micro-bump 105 is interconnected with the TSV 204 through the RDL 110; one end of the TSV 204 is connected to the C4 bump 104 on the substrate 20, and the other end is interconnected with the RDL 110, so that different bare die modules 10 can be interconnected on the RDL interposer 110, and the remaining signals pass through the silicon dielectric 205 and the TSV 204 after passing through the RDL interposer 110, and are connected to the C4 bump 104, and finally connected to the substrate 20.
此處,矽中介層310朝向基板20的那一面也可以有RDL中介層110,RDL中介層110包括RDL介質106以及RDL佈線層107,RDL中介層110一端連接TSV204,一端連接C4凸點104,通過C4凸點104連接到基板20,如圖3E所示。Here, the side of the silicon interposer 310 facing the substrate 20 may also have an RDL interposer 110, and the RDL interposer 110 includes an RDL dielectric 106 and an RDL wiring layer 107. One end of the RDL interposer 110 is connected to the TSV 204, and the other end is connected to the C4 bump 104, and is connected to the substrate 20 through the C4 bump 104, as shown in FIG. 3E.
矽中介層205可以在非常小的尺寸上製造複雜的電路結構,實現高密度的互連;並且,由於矽的導電性能良好,訊號傳送速率快,從而降低了訊號傳輸的延遲;進一步地,矽具有穩定的物理和電學性能,可以使矽中介層在不同的工作環境下保持穩定的互聯性能。The silicon interposer 205 can manufacture complex circuit structures in a very small size and realize high-density interconnection. In addition, due to the good electrical conductivity of silicon and the fast signal transmission rate, the delay of signal transmission is reduced. Furthermore, silicon has stable physical and electrical properties, which can enable the silicon interposer to maintain stable interconnection performance under different working environments.
第二部分Part 2
以下通過實施例三至實施例五,介紹多個裸晶模組10在基板的20上的互聯拓撲方式。需要說明的是,可以在一個晶片封裝體中單獨使用一種互聯拓撲方式,也可以在一個晶片封裝體中同時使用多種互聯拓撲方式,本申請實施例對此不作限定。The following describes the interconnection topology of multiple bare die modules 10 on the substrate 20 through the third to fifth embodiments. It should be noted that one interconnection topology can be used alone in a chip package, or multiple interconnection topologies can be used simultaneously in a chip package, and the present application embodiment does not limit this.
如圖4所示,多個裸晶模組10在基板20的一側呈行列分佈,即拓撲為N x M,其中,N為列數,M為行數,例如:2x2、3x3、4x4……nxn等;或者1x2、2x4、3x6、4x8……nx2n等;或者1x3、1x4、2x5、3x4、3x5……nxm等陣列形式,n、N和M均為正整數。本申請實施例中,第一方向為列方向X或行方向Y,第二方向Z與第一方向在基板20所在平面呈夾角,如135度夾角。As shown in FIG4 , a plurality of bare die modules 10 are arranged in rows and columns on one side of the substrate 20, i.e., the topology is N x M, where N is the number of columns and M is the number of rows, for example: 2x2, 3x3, 4x4...nxn, etc.; or 1x2, 2x4, 3x6, 4x8...nx2n, etc.; or 1x3, 1x4, 2x5, 3x4, 3x5...nxm, etc. array forms, n, N and M are all positive integers. In the embodiment of the present application, the first direction is the column direction X or the row direction Y, and the second direction Z is at an angle with the first direction in the plane where the substrate 20 is located, such as an angle of 135 degrees.
其中,多個裸晶模組中存在相互連接的相鄰裸晶模組,如需要建立互聯關係的裸晶模組被配置為相鄰位置。Among the plurality of bare die modules, there are adjacent bare die modules that are connected to each other. For example, the bare die modules that need to establish an interconnection relationship are configured as adjacent positions.
實施例三Embodiment 3
本實施例以記憶體裸晶模組100為示例,多個記憶體裸晶模組100在基板20的一側呈行列分佈,例如:2x2、3x3、4x4……nxn等;或者1x2、2x4、3x6、4x8……nx2n等;或者1x3、1x4、2x5、3x4、3x5……nxm等陣列形式。其中,多個記憶體裸晶模組中存在相互連接的相鄰記憶體裸晶模組,如需要建立互聯關係的記憶體裸晶模組被配置為相鄰位置。This embodiment takes the memory die module 100 as an example, and multiple memory die modules 100 are arranged in rows and columns on one side of the substrate 20, for example: 2x2, 3x3, 4x4...nxn, etc.; or 1x2, 2x4, 3x6, 4x8...nx2n, etc.; or 1x3, 1x4, 2x5, 3x4, 3x5...nxm, etc. array forms. Among the multiple memory die modules, there are adjacent memory die modules connected to each other, such as memory die modules that need to establish an interconnected relationship are configured as adjacent positions.
在一種互聯拓撲方式中,如圖5A所示,相互連接的記憶體裸晶模組為第一方向上相鄰的記憶體裸晶模組100,第一方向為列方向X或行方向Y。In one interconnection topology, as shown in FIG. 5A , the memory die modules connected to each other are memory die modules 100 adjacent to each other in a first direction, where the first direction is a column direction X or a row direction Y.
在一種互聯拓撲方式中,如圖5B所示,相互連接的記憶體裸晶模組還包括在第二方向上相鄰的記憶體裸晶模組100,第二方向Z與第一方向在基板20所在平面呈夾角,即可以在對角線方位形成互聯關係。由此可以在多個方向上增加互聯關係,擴展儲存頻寬,便於開發者實現高性能多樣化晶片功能。In one interconnect topology, as shown in FIG5B , the interconnected memory die modules further include memory die modules 100 adjacent to each other in the second direction, and the second direction Z is at an angle to the first direction in the plane where the substrate 20 is located, that is, an interconnection relationship can be formed in the diagonal direction. In this way, interconnections can be added in multiple directions, storage bandwidth can be expanded, and developers can realize high-performance and diversified chip functions.
本申請實施例的技術方案可以根據實際需求擴展記憶體裸晶模組100的互聯關係,從而實現儲存頻寬的擴展和算力性能的提升。The technical solution of the embodiment of the present application can expand the interconnection relationship of the memory bare crystal module 100 according to actual needs, thereby achieving the expansion of storage bandwidth and the improvement of computing power performance.
實施例四Embodiment 4
本實施例中,多個裸晶模組10中包括輸入輸出(Input Output,IO)裸晶200和記憶體裸晶模組100,如圖6所示。In this embodiment, the plurality of bare die modules 10 include an input output (IO) bare die 200 and a memory bare die module 100, as shown in FIG. 6 .
示例性地,IO 裸晶200 可用於處理與記憶體裸晶模組100以及與晶片封裝體系統外部的通訊,包括資料登錄和輸出、通訊協定的處理等,可以包括與網路、儲存、外部設備等交互所需的介面和功能。舉例來說,在一塊計算加速卡的晶片封裝體中,記憶體裸晶模組100負責計算和儲存,而 IO 裸晶200 則負責處理輸入輸出操作,以及與其他設備通訊。For example, the IO die 200 can be used to process the communication with the memory die module 100 and the outside of the chip package system, including data logging and output, communication protocol processing, etc., and can include interfaces and functions required for interaction with the network, storage, external devices, etc. For example, in a chip package of a computing accelerator card, the memory die module 100 is responsible for computing and storage, while the IO die 200 is responsible for processing input and output operations and communicating with other devices.
其中,各IO裸晶200和各記憶體裸晶模組100在基板20的一側呈行列分佈的陣列,並且,IO裸晶200至少與部分的記憶體裸晶模組100相互連接,即IO裸晶200至少與部分的記憶體裸晶模組100形成互聯關係。Among them, each IO die 200 and each memory die module 100 are arranged in an array in rows and columns on one side of the substrate 20, and the IO die 200 is interconnected with at least part of the memory die modules 100, that is, the IO die 200 forms an interconnection relationship with at least part of the memory die modules 100.
在一種實施方式中,在各記憶體裸晶模組100與各IO裸晶200所形成的陣列中,在第一方向上IO裸晶200位於陣列的邊緣,第一方向為列方向X或行方向Y。也就是說,多個記憶體裸晶模組100在基板20的一側呈行列分佈,形成記憶體裸晶模組陣列,例如:2x2、3x3、4x4……nxn等;或者1x2、2x4、3x6、4x8……nx2n等;或者1x3、1x4、2x5、3x4、3x5……nxm等陣列形式,而IO裸晶200佈置於記憶體裸晶模組陣列的週邊。其中,如圖7A、圖7B、圖7C和圖7D所示,記憶體裸晶模組陣列分別以1x1、1x2、2x2、3x3的陣列形式為示例。In one embodiment, in the array formed by each memory die module 100 and each IO die 200, the IO die 200 is located at the edge of the array in a first direction, and the first direction is the column direction X or the row direction Y. That is, a plurality of memory die modules 100 are arranged in rows and columns on one side of the substrate 20 to form a memory die module array, for example: 2x2, 3x3, 4x4...nxn, etc.; or 1x2, 2x4, 3x6, 4x8...nx2n, etc.; or 1x3, 1x4, 2x5, 3x4, 3x5...nxm, etc., and the IO die 200 is arranged around the memory die module array. As shown in FIG. 7A , FIG. 7B , FIG. 7C , and FIG. 7D , the memory die module arrays are exemplified in the form of 1x1, 1x2, 2x2, and 3x3 arrays, respectively.
如圖7A所示,對於1x1的記憶體裸晶模組陣列,每個記憶體裸晶模組100和4個IO裸晶200互聯;如圖7B所示,對於1x2的記憶體裸晶模組陣列,每個記憶體裸晶模組100和3個IO裸晶200互聯;如圖7C所示,對於2x2的記憶體裸晶模組陣列,每個記憶體裸晶模組100和2個IO裸晶200互聯;如圖7D所示,對於3x3的記憶體裸晶模組陣列,每個邊角的記憶體裸晶模組100和2個IO裸晶200互聯,邊緣行或邊緣列上除邊角外的其餘記憶體裸晶模組100和1個IO裸晶200互聯,內部(除邊緣行和邊緣列以外)的記憶體裸晶模組100不需要和IO裸晶200做互聯。其中,IO裸晶200的數量不作限定,例如也可以是3個、5個等。As shown in FIG. 7A , for a 1x1 memory die module array, each memory die module 100 is interconnected with four IO die 200; as shown in FIG. 7B , for a 1x2 memory die module array, each memory die module 100 is interconnected with three IO die 200; as shown in FIG. 7C , for a 2x2 memory die module array, each memory die module 100 is interconnected with two IO die 200. As shown in FIG7D , for a 3×3 memory die module array, each corner memory die module 100 is interconnected with two IO die 200, and the remaining memory die modules 100 on the edge row or edge column except the corners are interconnected with one IO die 200, and the internal memory die modules 100 (except the edge row and edge column) do not need to be interconnected with the IO die 200. The number of IO die 200 is not limited, for example, it can also be 3, 5, etc.
在一種實施方式中,多個記憶體裸晶模組100在基板20的一側呈行列分佈,形成記憶體裸晶模組陣列,例如:2x2、3x3、4x4……nxn等;或者1x2、2x4、3x6、4x8……nx2n等;或者1x3、1x4、2x5、3x4、3x5……nxm等陣列形式,而IO裸晶200佈置於記憶體裸晶模組陣列的外周。其中,如圖7A、圖7B、圖7C和圖7D所示,記憶體裸晶模組陣列分別以1x1、1x2、2x2、3x3的陣列形式為示例。In one embodiment, a plurality of memory die modules 100 are arranged in rows and columns on one side of the substrate 20 to form a memory die module array, such as 2x2, 3x3, 4x4...nxn, etc.; or 1x2, 2x4, 3x6, 4x8...nx2n, etc.; or 1x3, 1x4, 2x5, 3x4, 3x5...nxm, etc. arrays, and the IO die 200 is arranged at the periphery of the memory die module array. As shown in FIG. 7A, FIG. 7B, FIG. 7C and FIG. 7D, the memory die module array is exemplified by arrays of 1x1, 1x2, 2x2, and 3x3, respectively.
需要說明的是,記憶體裸晶模組陣列的互聯關係可採用實施例三中的任一互聯拓撲方式,例如:可以在圖7C和圖7D所示的陣列形式中,增加對角線方位的記憶體裸晶模組的互聯關係,如圖8A和圖8B所示。It should be noted that the interconnection relationship of the memory die module array can adopt any interconnection topology in the third embodiment. For example, the interconnection relationship of the memory die modules in the diagonal direction can be added to the array form shown in Figures 7C and 7D, as shown in Figures 8A and 8B.
在一種實施方式中,每個記憶體裸晶模組100的周圍分佈有至少一個IO裸晶200,如圖9所示,其中,IO裸晶200的數量可以根據頻寬需求調整,從而實現儲存頻寬的擴展和資料傳輸性能的提升。In one implementation, at least one IO die 200 is distributed around each memory die module 100, as shown in FIG. 9 , wherein the number of IO die 200 can be adjusted according to bandwidth requirements, thereby achieving expansion of storage bandwidth and improvement of data transmission performance.
在一種實施方式中,如圖10所示,每個記憶體裸晶模組100的周圍分佈有四個IO裸晶200,其中,在第一方向上相鄰的IO裸晶200之間相互連接,建立互聯關係,以最大限度地擴展互聯頻寬。In one implementation, as shown in FIG. 10 , four IO die 200 are distributed around each memory die module 100, wherein adjacent IO die 200 in a first direction are interconnected to establish an interconnection relationship to maximize interconnection bandwidth.
本申請實施例的技術方案可以根據實際需求擴展記憶體裸晶模組100和IO裸晶200的互聯關係,不僅可以縮短記憶體裸晶模組100和IO裸晶200之間的傳輸距離,也增大了互聯密度,從而實現儲存頻寬的擴展和資料傳輸性能的提升。The technical solution of the embodiment of the present application can expand the interconnection relationship between the memory die module 100 and the IO die 200 according to actual needs, which can not only shorten the transmission distance between the memory die module 100 and the IO die 200, but also increase the interconnection density, thereby achieving the expansion of storage bandwidth and the improvement of data transmission performance.
實施例五Embodiment 5
本實施例中,多個裸晶模組10中包括IO裸晶模組300和記憶體裸晶模組100,IO裸晶模組300至少與部分的記憶體裸晶模組100相互連接,IO裸晶模組300包括堆疊的IO裸晶200和記憶體裸晶102,如圖11所示。In this embodiment, the multiple bare crystal modules 10 include an IO bare crystal module 300 and a memory bare crystal module 100. The IO bare crystal module 300 is interconnected with at least part of the memory bare crystal module 100. The IO bare crystal module 300 includes stacked IO bare crystals 200 and memory bare crystals 102, as shown in Figure 11.
其中,記憶體裸晶102和IO裸晶200的數量、堆疊方式、排布位置,本申請實施例均不作限定。例如:在圖11所示的IO裸晶模組300中,記憶體裸晶102為多個,IO裸晶模組300的頂層裸晶為記憶體裸晶102,IO裸晶模組300的底層裸晶為IO裸晶200。又如:在IO裸晶模組300中,記憶體裸晶102為多個,IO裸晶模組300的頂層裸晶為IO裸晶200,IO裸晶模組300的底層裸晶為記憶體裸晶102。因此,IO裸晶200的堆疊位置可以根據實際需要進行調整,例如也可以堆疊在記憶體裸晶102之間。The number, stacking method, and arrangement position of the memory die 102 and the IO die 200 are not limited in the embodiments of the present application. For example, in the IO die module 300 shown in FIG11 , there are multiple memory die 102, the top die of the IO die module 300 is the memory die 102, and the bottom die of the IO die module 300 is the IO die 200. Another example: in the IO die module 300, there are multiple memory die 102, the top die of the IO die module 300 is the IO die 200, and the bottom die of the IO die module 300 is the memory die 102. Therefore, the stacking position of the IO die 200 can be adjusted according to actual needs, for example, it can also be stacked between the memory die 102.
在一種實施方式中,IO裸晶模組300的非頂層裸晶(可以是記憶體裸晶102,也可以是IO裸晶200)設置有TSV,即在裸晶內部形成穿越的垂直導孔,實現不同層次的晶片互連和通訊。每個TSV是一個微小的金屬導孔,穿過裸晶的厚度,連接了不同層次的電路,從而實現高速的訊號傳輸、低延遲的互連和更高性能、更緊湊的封裝方案。In one implementation, the non-top die of the IO die module 300 (which may be the memory die 102 or the IO die 200) is provided with TSVs, i.e., vertical vias are formed inside the die to achieve interconnection and communication between chips at different levels. Each TSV is a tiny metal via that passes through the thickness of the die and connects circuits at different levels, thereby achieving high-speed signal transmission, low-latency interconnection, and higher performance and more compact packaging solutions.
作為一個示例,IO裸晶模組300的裸晶(可以是記憶體裸晶102,也可以是IO裸晶200)之間通過混合鍵合的方式連接。具體地,可以利用表面化學反應在兩個裸晶之間創建非常強大的原子級連接,從而能夠在晶圓上的微米尺度精確對準並連接晶片裸晶。混合鍵合通常能夠在不需要使用焊料或導電材料的情況下實現電訊號和資料的傳輸,因此在一些應用中可以減少訊號傳輸的損耗。由於連接非常密切,通過混合鍵合可以實現高密度的晶片堆疊,從而在較小的封裝尺寸內實現更多的功能。As an example, the dies of the IO die module 300 (which can be the memory die 102 or the IO die 200) are connected by hybrid bonding. Specifically, surface chemical reactions can be used to create a very strong atomic-level connection between the two dies, so that the chip dies can be accurately aligned and connected at the micron scale on the wafer. Hybrid bonding can usually achieve the transmission of electrical signals and data without the use of solder or conductive materials, so in some applications, the loss of signal transmission can be reduced. Because the connection is very close, high-density chip stacking can be achieved through hybrid bonding, thereby realizing more functions in a smaller package size.
作為另一個示例,IO裸晶模組300的裸晶(可以是記憶體裸晶102,也可以是IO裸晶200)之間通過微凸點(µbump)連接,從而在裸晶之間形成互聯和通訊,並可以精確地控制其大小、位置和排列,從而實現高密度的連接。As another example, the dies of the IO die module 300 (which may be the memory die 102 or the IO die 200) are connected via micro bumps, thereby forming interconnections and communications between the dies, and their size, position, and arrangement can be precisely controlled to achieve high-density connections.
示例性地,IO 裸晶200 可用於處理與IO裸晶模組300以及與IO裸晶模組300外部(如其他裸晶模組)的通訊,包括資料登錄和輸出、通訊協定的處理等,可以包括與網路、儲存、其他裸晶模組等交互所需的介面和功能。Exemplarily, the IO die 200 can be used to handle communications with the IO die module 300 and with the outside of the IO die module 300 (such as other die modules), including data logging and output, communication protocol processing, etc., and may include interfaces and functions required for interaction with the network, storage, other die modules, etc.
其中,各IO裸晶模組300和各記憶體裸晶模組100在基板20的一側呈行列分佈的陣列,並且,IO裸晶模組300至少與部分的記憶體裸晶模組100相互連接,即IO裸晶模組300至少與部分的記憶體裸晶模組100形成互聯關係。進一步地,相鄰的IO裸晶模組300之間相互連接。The IO die modules 300 and the memory die modules 100 are arranged in rows and columns on one side of the substrate 20, and the IO die modules 300 are at least interconnected with some of the memory die modules 100, that is, the IO die modules 300 are at least interconnected with some of the memory die modules 100. Furthermore, adjacent IO die modules 300 are interconnected.
在一種實施方式中,在各記憶體裸晶模組100與各IO裸晶模組300所形成的陣列中,在第一方向上IO裸晶模組300位於陣列的邊緣,第一方向為列方向X或行方向Y。也就是說,多個記憶體裸晶模組100在基板20的一側呈行列分佈,形成記憶體裸晶模組陣列,例如:2x2、3x3、4x4……nxn等;或者1x2、2x4、3x6、4x8……nx2n等;或者1x3、1x4、2x5、3x4、3x5……nxm等陣列形式,而IO裸晶模組300佈置於記憶體裸晶模組陣列的週邊。其中,如圖12A、圖12B、圖12C和圖12D所示,記憶體裸晶模組陣列分別以1x1、1x2、2x2、3x3的陣列形式為示例。In one embodiment, in the array formed by each memory die module 100 and each IO die module 300, the IO die module 300 is located at the edge of the array in a first direction, and the first direction is the column direction X or the row direction Y. That is, a plurality of memory die modules 100 are arranged in rows and columns on one side of the substrate 20 to form a memory die module array, for example: 2x2, 3x3, 4x4...nxn, etc.; or 1x2, 2x4, 3x6, 4x8...nx2n, etc.; or 1x3, 1x4, 2x5, 3x4, 3x5...nxm, etc., and the IO die module 300 is arranged around the memory die module array. As shown in FIG. 12A , FIG. 12B , FIG. 12C , and FIG. 12D , the memory die module arrays are exemplified in the form of 1x1, 1x2, 2x2, and 3x3 arrays, respectively.
如圖12A所示,對於1x1的記憶體裸晶模組陣列,每個記憶體裸晶模組100和4個IO裸晶模組300互聯;如圖12B所示,對於1x2的記憶體裸晶模組陣列,每個記憶體裸晶模組100和3個IO裸晶模組300互聯;如圖12C所示,對於2x2的記憶體裸晶模組陣列,每個記憶體裸晶模組100和2個IO裸晶模組300互聯;如圖12D所示,對於3x3的記憶體裸晶模組陣列,每個邊角的記憶體裸晶模組100和2個IO裸晶模組300互聯,邊緣行或邊緣列上除邊角外的其餘記憶體裸晶模組100和1個IO裸晶模組300互聯,內部(除邊緣行和邊緣列以外)的記憶體裸晶模組100不需要和IO裸晶模組300做互聯。As shown in FIG12A, for a 1x1 memory die module array, each memory die module 100 is interconnected with four IO die modules 300; as shown in FIG12B, for a 1x2 memory die module array, each memory die module 100 is interconnected with three IO die modules 300; as shown in FIG12C, for a 2x2 memory die module array, each memory die module 100 is interconnected with two IO die modules 300. 12D , for a 3x3 memory die module array, each corner memory die module 100 is interconnected with two IO die modules 300, and the remaining memory die modules 100 on edge rows or edge columns except the corners are interconnected with one IO die module 300, and the internal memory die modules 100 (except the edge rows and edge columns) do not need to be interconnected with the IO die module 300.
在一種實施方式中,多個記憶體裸晶模組100在基板20的一側呈行列分佈,形成記憶體裸晶模組陣列,例如:2x2、3x3、4x4……nxn等;或者1x2、2x4、3x6、4x8……nx2n等;或者1x3、1x4、2x5、3x4、3x5……nxm等陣列形式,而IO裸晶模組300佈置於記憶體裸晶模組陣列的外周。其中,如圖12A、圖12B、圖12C和圖12D所示,記憶體裸晶模組陣列分別以1x1、1x2、2x2、3x3的陣列形式為示例。In one embodiment, a plurality of memory die modules 100 are arranged in rows and columns on one side of the substrate 20 to form a memory die module array, such as 2x2, 3x3, 4x4...nxn, etc.; or 1x2, 2x4, 3x6, 4x8...nx2n, etc.; or 1x3, 1x4, 2x5, 3x4, 3x5...nxm, etc. arrays, and the IO die module 300 is arranged at the periphery of the memory die module array. As shown in FIG. 12A, FIG. 12B, FIG. 12C, and FIG. 12D, the memory die module array is exemplified by arrays of 1x1, 1x2, 2x2, and 3x3, respectively.
需要說明的是,記憶體裸晶模組陣列的互聯關係可採用實施例三中的任一互聯拓撲方式,例如:可以在圖12C和圖12D所示的陣列形式中,增加對角線方位的記憶體裸晶模組的互聯關係,如圖13A和圖13B所示。It should be noted that the interconnection relationship of the memory die module array can adopt any interconnection topology in the third embodiment. For example, the interconnection relationship of the memory die modules in the diagonal direction can be added to the array form shown in Figures 12C and 12D, as shown in Figures 13A and 13B.
在一種實施方式中,每個記憶體裸晶模組100的周圍分佈有至少一個IO裸晶模組300,如圖14所示,其中,IO裸晶模組300的數量可以根據頻寬需求調整,從而實現儲存頻寬的擴展和資料傳輸性能的提升。In one implementation, at least one IO die module 300 is distributed around each memory die module 100, as shown in FIG. 14 , wherein the number of IO die modules 300 can be adjusted according to bandwidth requirements, thereby achieving expansion of storage bandwidth and improvement of data transmission performance.
在一種實施方式中,如圖15所示,每個記憶體裸晶模組100的周圍分佈有四個IO裸晶模組300,其中,在第一方向上相鄰的IO裸晶模組300之間相互連接,建立互聯關係,以最大限度地擴展互聯頻寬。In one implementation, as shown in FIG. 15 , four IO die modules 300 are distributed around each memory die module 100, wherein adjacent IO die modules 300 in a first direction are interconnected to establish an interconnection relationship to maximize interconnection bandwidth.
本申請實施例的技術方案可以根據實際需求擴展記憶體裸晶模組100和IO裸晶模組300的互聯關係,不僅可以縮短記憶體裸晶模組100和IO裸晶模組300之間的傳輸距離,也增大了互聯密度,從而實現儲存頻寬的擴展和資料傳輸性能的提升。The technical solution of the embodiment of the present application can expand the interconnection relationship between the memory die module 100 and the IO die module 300 according to actual needs, which can not only shorten the transmission distance between the memory die module 100 and the IO die module 300, but also increase the interconnection density, thereby achieving the expansion of storage bandwidth and the improvement of data transmission performance.
第三部分Part 3
以下通過實施例六和實施例七,介紹包括一個或多個晶片封裝體的工作組件。The following introduces a working assembly including one or more chip packages through Embodiment 6 and Embodiment 7.
實施例六Embodiment 6
如圖16所示,本申請實施例提供一種工作組件,包括印刷電路板(Printed Circuit Board,PCB板)30和晶片封裝體40,其中,至少一個晶片封裝體40佈置於PCB板30的一側。As shown in FIG. 16 , the embodiment of the present application provides a working assembly, including a printed circuit board (PCB) 30 and a chip package 40 , wherein at least one chip package 40 is arranged on one side of the PCB 30 .
晶片封裝體40可以是上述應用場景或實施例中的任一種所述的晶片封裝體,即晶片封裝體40包括一個基板20和多個裸晶模組10。需要說明的是,工作組件可以包括一種晶片封裝體,也可以包括多種晶片封裝體,本申請實施例對晶片封裝體40的類型、數量和互聯拓撲方式均不作具體限定。The chip package 40 can be any of the chip packages described in the above application scenarios or embodiments, that is, the chip package 40 includes a substrate 20 and multiple bare die modules 10. It should be noted that the working assembly can include one chip package or multiple chip packages, and the embodiment of the present application does not specifically limit the type, quantity, and interconnection topology of the chip package 40.
示例性地,晶片封裝體40通過焊球109與PCB板30連接,從而將不同晶片封裝體40內部的裸晶模組10在PCB板30上完成互聯。Exemplarily, the chip package 40 is connected to the PCB board 30 through the solder balls 109, so that the bare die modules 10 inside different chip packages 40 are interconnected on the PCB board 30.
其中,晶片封裝體40可以為多個,多個晶片封裝體40中存在相互連接的晶片封裝體,如可以在相鄰的晶片封裝體之間可以通過PCB板30建立互聯關係,從而可以實現晶片封裝體40之間的PCB板級互聯。There may be multiple chip packages 40, and there are interconnected chip packages among the multiple chip packages 40. For example, an interconnection relationship may be established between adjacent chip packages through the PCB board 30, thereby realizing PCB board-level interconnection between the chip packages 40.
在一種實施方式中,晶片封裝體40之間通過連接線50在PCB板30上相互連接。示例性地,連接線50可以為快速周邊元件互連(Peripheral Component Interconnect Express,PCIE)、串列器/解串列器(Serializer/Deserializer,Serdes)、通用小晶片互連(Universal Chiplet Interconnect Express,UCIe)、計算高速鏈路(Compute Express Link,CXL)、遠端直接記憶體存取(Remote Direct Memory Access,RDMA)、乙太網(Ethernet)等任意類型的互聯智慧財產權(Interconnection ,IP)元件或模組。In one embodiment, the chip packages 40 are connected to each other on the PCB 30 via connection lines 50. Exemplarily, the connection lines 50 may be any type of interconnection intellectual property (IP) components or modules such as Peripheral Component Interconnect Express (PCIE), Serializer/Deserializer (Serdes), Universal Chiplet Interconnect Express (UCIe), Compute Express Link (CXL), Remote Direct Memory Access (RDMA), Ethernet, etc.
根據本申請實施例提供的工作組件,可以避免傳統封裝方案儲存頻寬小、算力小的弊端,提供先進的封裝技術來增大儲存頻寬,從而提升晶片算力。According to the working assembly provided in the embodiment of the present application, the disadvantages of small storage bandwidth and small computing power of the traditional packaging solution can be avoided, and advanced packaging technology is provided to increase the storage bandwidth, thereby improving the chip computing power.
實施例七Embodiment 7
如圖17所示,本申請實施例提供一種工作組件,包括PCB板30、晶片封裝體60和記憶體設備70。示例性地,記憶體設備70和晶片封裝體60佈置於PCB板30的同一側。As shown in FIG17 , the present application embodiment provides a working assembly, including a PCB board 30, a chip package 60 and a memory device 70. Exemplarily, the memory device 70 and the chip package 60 are arranged on the same side of the PCB board 30.
晶片封裝體60包括基板20、多個裸晶模組100和多個IO裸晶200,晶片封裝體60通過PCB板30與至少一個記憶體設備70相互連接。本申請實施例對晶片封裝體60的數量和互聯拓撲方式均不作具體限定。The chip package 60 includes a substrate 20, a plurality of bare die modules 100 and a plurality of IO bare die 200, and the chip package 60 is interconnected with at least one memory device 70 via a PCB board 30. The embodiment of the present application does not specifically limit the number of chip packages 60 and the interconnection topology.
晶片封裝體60可以是實施例四中的任一實施方式的晶片封裝體,即晶片封裝體60包括基板20、IO裸晶200和記憶體裸晶模組100,晶片封裝體60通過PCB板30與至少一個記憶體設備70相互連接。The chip package 60 can be a chip package of any embodiment in the fourth embodiment, that is, the chip package 60 includes a substrate 20, an IO bare crystal 200 and a memory bare crystal module 100, and the chip package 60 is interconnected with at least one memory device 70 through a PCB board 30.
示例性地,晶片封裝體60中基板20通過焊球109與PCB板30連接,從而將IO裸晶200和記憶體裸晶模組100上的訊號連接至PCB板30上。Exemplarily, the substrate 20 in the chip package 60 is connected to the PCB board 30 through the solder balls 109, thereby connecting the signals on the IO die 200 and the memory die module 100 to the PCB board 30.
其中,晶片封裝體60可以為多個,多個晶片封裝體60中存在相互連接的晶片封裝體,如相鄰的晶片封裝體之間可以在PCB板30上建立互聯關係。在一種實施方式中,晶片封裝體60之間在PCB上通過連接線50相互連接,從而可以實現晶片封裝體60之間的PCB板級互聯。There may be multiple chip packages 60, and there are interconnected chip packages among the multiple chip packages 60, such as adjacent chip packages can establish an interconnection relationship on the PCB board 30. In one embodiment, the chip packages 60 are interconnected on the PCB through connecting wires 50, so that the PCB board-level interconnection between the chip packages 60 can be realized.
根據本申請實施例提供的工作組件,可以進一步實現了儲存容量和互聯頻寬的擴展。According to the working components provided in the embodiment of the present application, the expansion of storage capacity and interconnection bandwidth can be further achieved.
上述實施例的晶片封裝體的其他構成可以採用於本領域具有通常知識者現在和未來知悉的各種技術方案,這裡不再詳細描述。The other components of the chip package of the above-mentioned embodiment can adopt various technical solutions known to those skilled in the art now and in the future, and will not be described in detail here.
第四部分Part 4
本申請實施例還提供一種計算設備,包括上述實施例任一種工作組件以及供電模組,其中,供電模組用於對工作組件提供電源,工作組件的數量可以是一個或多個,本申請實施例對此不作限定。示例性地,多個工作組件中,至少部分相互連接,可以是電連接或物理連接,本申請實施例對此不作限定。The present application embodiment also provides a computing device, including any one of the working components of the above embodiments and a power supply module, wherein the power supply module is used to provide power to the working component, and the number of the working components can be one or more, which is not limited in the present application embodiment. Exemplarily, at least some of the multiple working components are interconnected, which can be electrically connected or physically connected, which is not limited in the present application embodiment.
示例性地,本申請實施例提供的計算設備可以用在需要大量計算能力的設備和系統中,如超級電腦、資料中心的伺服器、高性能工作站、科學研究設備等,可以應用在人工智慧、深度學習、大資料分析等領域。For example, the computing device provided by the embodiments of the present application can be used in devices and systems that require a large amount of computing power, such as supercomputers, servers in data centers, high-performance workstations, scientific research equipment, etc., and can be applied in fields such as artificial intelligence, deep learning, and big data analysis.
示例性地,本申請實施例提供的計算設備可以用在各種需要監測和測量物理或化學變化的設備中,如智慧手機、汽車、工業自動化設備、醫療設備等需要高性能感測器晶片實現的領域。For example, the computing device provided by the embodiment of the present application can be used in various devices that need to monitor and measure physical or chemical changes, such as smart phones, automobiles, industrial automation equipment, medical equipment, and other fields that require high-performance sensor chips to implement.
示例性地,本申請實施例提供的計算設備可以用在微機電系統中,如智慧手機的陀螺儀和加速度計、汽車的氣囊觸發系統、投影儀的微型鏡片陣列等。Illustratively, the computing device provided by the embodiment of the present application can be used in a micro-electromechanical system, such as a gyroscope and accelerometer in a smart phone, an airbag triggering system in a car, a micro lens array in a projector, etc.
示例性地,本申請實施例提供的計算設備可以用在光纖通訊系統,如光纖網路設備、資料中心的光互連、長距離光纖傳輸系統等需要高速資料傳輸的領域。Exemplarily, the computing device provided by the embodiment of the present application can be used in optical fiber communication systems, such as optical fiber network equipment, optical interconnection of data centers, long-distance optical fiber transmission systems, and other fields that require high-speed data transmission.
當計算設備用在不同的系統或領域中,計算設備的其他構成可能有所不同,上述實施例的計算設備的其他構成可以採用於本領域具有通常知識者現在和未來知悉的各種技術方案,這裡不再詳細描述。When the computing device is used in different systems or fields, other components of the computing device may be different. Other components of the computing device of the above-mentioned embodiment can be adopted in various technical solutions known to people with ordinary knowledge in this field now and in the future, and will not be described in detail here.
本申請實施例的技術方案中,晶片封裝體可以提供3D和2.5D的封裝結構,結合多級互聯關係,可以實現裸晶模組作為封裝單元的無線擴展和高密度互聯拓撲。In the technical solution of the embodiment of the present application, the chip package can provide 3D and 2.5D packaging structures, and combined with multi-level interconnection relationships, it can realize wireless expansion and high-density interconnection topology of the bare chip module as a packaging unit.
第一級互聯可以理解為記憶體裸晶模組中,記憶體裸晶與邏輯處理裸晶之間的無限堆疊,可以理解的是,記憶體裸晶與邏輯處理裸晶之間在垂直方向上的堆疊,形成3D封裝結構,可以實現更短的互聯距離和更高的互聯密度,極大提升了互聯效率和晶片性能,實現儲存頻寬的擴展和算力性能的提升。具體可參見本申請實施例的圖1A、圖1B及記憶體裸晶模組100的相關介紹。The first level interconnection can be understood as the infinite stacking of memory die and logic processing die in the memory die module. It can be understood that the vertical stacking of memory die and logic processing die forms a 3D packaging structure, which can achieve a shorter interconnection distance and a higher interconnection density, greatly improving the interconnection efficiency and chip performance, and achieving the expansion of storage bandwidth and the improvement of computing performance. For details, please refer to FIG. 1A, FIG. 1B of the embodiment of this application and the related introduction of the memory die module 100.
第二級互聯為可以理解為裸晶模組之間的互聯,它介於傳統的2D封裝和完全的3D封裝之間,是一種2.5D封裝結構,如記憶體裸晶模組與IO裸晶之間的互聯,縮短了傳輸距離,也增大了互聯密度。具體可參見本申請實施例一至實施例五的相關介紹。The second level interconnection can be understood as the interconnection between bare die modules, which is between the traditional 2D packaging and the complete 3D packaging, and is a 2.5D packaging structure, such as the interconnection between the memory bare die module and the IO bare die, which shortens the transmission distance and increases the interconnection density. For details, please refer to the relevant introduction of the first to fifth embodiments of the present application.
第三級互聯可以理解為PCB板級互聯,如IO裸晶之間通過PCB板的連接、IO裸晶與記憶體設備之間通過PCB板的連接、晶片封裝體之間通過PCB板的連接,從而進一步擴展儲存頻寬和儲存容量,以實現更大的性能提升。具體可參見本申請實施例六和實施例七的相關介紹。The third level interconnection can be understood as PCB board-level interconnection, such as the connection between IO bare chips through the PCB board, the connection between IO bare chips and memory devices through the PCB board, and the connection between chip packages through the PCB board, thereby further expanding the storage bandwidth and storage capacity to achieve greater performance improvement. For details, please refer to the relevant introduction of the sixth and seventh embodiments of this application.
在本說明書的描述中,需要理解的是,術語「中心」、「縱向」、「橫向」、「長度」、「寬度」、「厚度」、「上」、「下」、「前」、「後」、「左」、「右」、「豎直」、「水準」、「頂」、「底」、「內」、「外」、「順時針」、「逆時針」、「軸向」、「徑向」、「周向」等指示的方位或位置關係為基於附圖所示的方位或位置關係,僅是為了便於描述本申請和簡化描述,而不是指示或暗示所指的裝置或元件必須具有特定的方位、以特定的方位構造和操作,因此不能理解為對本申請的限制。In the description of this specification, it is necessary to understand that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.
此外,術語「第一」、「第二」僅用於描述目的,而不能理解為指示或暗示相對重要性或者隱含指明所指示的技術特徵的數量。由此,限定有「第一」、「第二」的特徵可以明示或者隱含地包括一個或者多個該特徵。In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features.
在本申請中,除非另有明確的規定和限定,術語「安裝」、「相連」、「連接」、「固定」等術語應做廣義理解,例如,可以是固定連接,也可以是可拆卸連接,或成一體;可以是機械連接,也可以是電連接,還可以是通訊;可以是直接相連,也可以通過中間媒介間接相連,可以是兩個元件內部的連通或兩個元件的相互作用關係。對於本領域的具有通常知識者而言,可以根據具體情況理解上述術語在本申請中的具體含義。In this application, unless otherwise clearly specified and limited, the terms "installation", "connection", "connection", "fixation" and the like should be understood in a broad sense, for example, it can be fixed connection, detachable connection, or integration; it can be mechanical connection, electrical connection, or communication; it can be direct connection, or indirect connection through an intermediate medium, it can be the internal connection of two components or the interaction relationship between two components. For those with ordinary knowledge in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
在本申請中,除非另有明確的規定和限定,第一特徵在第二特徵之「上」或之「下」可以包括第一和第二特徵直接接觸,也可以包括第一和第二特徵不是直接接觸而是通過它們之間的另外的特徵接觸。而且,第一特徵在第二特徵「之上」、「上方」和「上面」包括第一特徵在第二特徵正上方和斜上方,或僅僅表示第一特徵水準高度高於第二特徵。第一特徵在第二特徵「之下」、「下方」和「下面」包括第一特徵在第二特徵正上方和斜上方,或僅僅表示第一特徵水準高度小於第二特徵。In the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is lower in level than the second feature.
上文的公開提供了許多不同的實施方式或例子用來實現本申請的不同結構。為了簡化本申請的公開,上文中對特定例子的部件和設置進行描述。當然,它們僅僅為示例,並且目的不在於限制本申請。此外,本申請可以在不同例子中重複參考數位和/或參考字母,這種重複是為了簡化和清楚的目的,其本身不指示所討論各種實施方式和/或設置之間的關係。The above disclosure provides many different implementations or examples for implementing different structures of the present application. In order to simplify the disclosure of the present application, the components and configurations of specific examples are described above. Of course, they are only examples and are not intended to limit the present application. In addition, the present application may repeat reference numerals and/or reference letters in different examples. Such repetition is for the purpose of simplification and clarity, and does not indicate the relationship between the various implementations and/or configurations discussed.
以上所述,僅為本申請的具體實施方式,但本申請的保護範圍並不局限於此,任何熟悉本技術領域的技術人員在本申請揭露的技術範圍內,可輕易想到其各種變化或替換,這些都應涵蓋在本申請的保護範圍之內。因此,本申請的保護範圍應以所述請求項的保護範圍為准。The above is only the specific implementation of this application, but the protection scope of this application is not limited thereto. Any technician familiar with this technical field can easily think of various changes or substitutions within the technical scope disclosed in this application, which should be covered by the protection scope of this application. Therefore, the protection scope of this application should be based on the protection scope of the claim.
10:裸晶模組 20:基板 100:記憶體裸晶模組 101:邏輯處理裸晶 102:記憶體裸晶 103:基板電路 104:C4 凸點 105:微凸點 108:孔 110:RDL中介層 106:RDL介質 107:RDL佈線層 210:橋接裸晶中介層 201:橋接裸晶 202:填充介質 203:TIV 310:矽中介層 204:TSV 205:矽介質 200:IO裸晶 300:IO裸晶模組 30:PCB板 50:連接線 109:焊球 40、60:晶片封裝體 70:記憶體設備 10: bare die module 20: substrate 100: memory bare die module 101: logic processing bare die 102: memory bare die 103: substrate circuit 104: C4 bump 105: micro bump 108: hole 110: RDL interposer 106: RDL dielectric 107: RDL wiring layer 210: bridge bare die interposer 201: bridge bare die 202: filling dielectric 203: TIV 310: silicon interposer 204: TSV 205: silicon dielectric 200: IO bare die 300: IO bare die module 30: PCB board 50: connection line 109: Solder ball 40, 60: Chip package 70: Memory device
在附圖中,除非另外規定,否則貫穿多個附圖相同的附圖標記表示相同或相似的部件或元素。這些附圖不一定是按照比例繪製的。應該理解,這些附圖僅描繪了根據本申請公開的一些實施方式,而不應將其視為是對本申請範圍的限制。In the drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in the present application and should not be regarded as limiting the scope of the present application.
圖1A和圖1B示出根據本申請實施例的晶片封裝體的結構圖;1A and 1B show a structural diagram of a chip package according to an embodiment of the present application;
圖2A、圖2B和圖2C示出根據申請實施例的晶片封裝體的結構圖;2A, 2B and 2C show the structure of a chip package according to an embodiment of the application;
圖3A、圖3B、圖3C、圖3D和圖3E示出根據本申請實施例的晶片封裝體的結構圖;3A, 3B, 3C, 3D and 3E show the structure of a chip package according to an embodiment of the present application;
圖4示出根據實施例的晶片封裝體的拓撲關係圖;FIG4 shows a topological diagram of a chip package according to an embodiment;
圖5A和圖5B示出根據實施例的晶片封裝體的互聯拓撲方式圖;5A and 5B show interconnection topology diagrams of a chip package according to an embodiment;
圖6示出根據本申請實施例的晶片封裝體的結構圖;FIG6 shows a structural diagram of a chip package according to an embodiment of the present application;
圖7A、圖7B、圖7C和圖7D示出根據實施例的晶片封裝體的互聯拓撲方式圖;7A, 7B, 7C and 7D illustrate interconnection topology diagrams of a chip package according to an embodiment;
圖8A和圖8B示出根據實施例的晶片封裝體的互聯拓撲方式圖;8A and 8B show interconnection topology diagrams of a chip package according to an embodiment;
圖9示出根據本申請實施例的晶片封裝體的結構圖;FIG9 shows a structural diagram of a chip package according to an embodiment of the present application;
圖10示出根據實施例的晶片封裝體的互聯拓撲方式圖;FIG10 shows an interconnection topology diagram of a chip package according to an embodiment;
圖11示出根據本申請實施例的晶片封裝體的結構圖;FIG. 11 shows a structural diagram of a chip package according to an embodiment of the present application;
圖12A、圖12B、圖12C和圖12D示出根據實施例的晶片封裝體的互聯拓撲方式圖;12A, 12B, 12C and 12D illustrate interconnection topology diagrams of a chip package according to an embodiment;
圖13A和圖13B示出根據實施例的晶片封裝體的互聯拓撲方式圖;13A and 13B show interconnection topology diagrams of a chip package according to an embodiment;
圖14示出根據本申請實施例的晶片封裝體的結構圖;FIG. 14 shows a structural diagram of a chip package according to an embodiment of the present application;
圖15示出根據實施例的晶片封裝體的互聯拓撲方式圖;FIG15 shows an interconnection topology diagram of a chip package according to an embodiment;
圖16示出根據本申請實施例的工作組件的結構圖;FIG16 shows a structural diagram of a working assembly according to an embodiment of the present application;
圖17示出根據本申請實施例的工作組件的結構圖.Figure 17 shows a structural diagram of the working components according to the embodiment of the present application.
10:裸晶模組 10: Bare crystal module
20:基板 20:Substrate
100:記憶體裸晶模組 100: Memory bare die module
101:邏輯處理裸晶 101: Logical processing of bare wafers
102:記憶體裸晶 102: Memory bare die
Claims (46)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
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| CN202323192689.6U CN221409678U (en) | 2023-11-24 | 2023-11-24 | Chip package, working assembly and computing device |
| CN2023231926896 | 2023-11-24 | ||
| CN202311587753.2A CN117412608A (en) | 2023-11-24 | 2023-11-24 | Chip packages, working components and computing equipment |
| CN2023115877532 | 2023-11-24 |
Publications (1)
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| TW202523142A true TW202523142A (en) | 2025-06-01 |
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Family Applications (1)
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| TW113137371A TW202523142A (en) | 2023-11-24 | 2024-09-30 | Chip packages, operating components and computing devices |
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| TW (1) | TW202523142A (en) |
| WO (1) | WO2025107848A1 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150279431A1 (en) * | 2014-04-01 | 2015-10-01 | Micron Technology, Inc. | Stacked semiconductor die assemblies with partitioned logic and associated systems and methods |
| US11769731B2 (en) * | 2021-01-14 | 2023-09-26 | Taiwan Semiconductor Manufacturing Co., Ltd | Architecture for computing system package |
| US11756927B2 (en) * | 2021-06-24 | 2023-09-12 | Advanced Semiconductor Engineering, Inc. | Semiconductor package structure |
| CN113421879B (en) * | 2021-08-24 | 2021-12-28 | 浙江毫微米科技有限公司 | Cache content addressable memory and memory chip package structure |
| CN117412608A (en) * | 2023-11-24 | 2024-01-16 | 嘉楠明芯(北京)科技有限公司 | Chip packages, working components and computing equipment |
| CN221409678U (en) * | 2023-11-24 | 2024-07-23 | 北京硅升科技有限公司 | Chip package, working assembly and computing device |
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2024
- 2024-09-14 WO PCT/CN2024/119038 patent/WO2025107848A1/en active Pending
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| WO2025107848A1 (en) | 2025-05-30 |
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