TW202011507A - Gas transmission structure of wafer carrier can increase usage convenience and efficiency without additionally connecting devices and structures - Google Patents

Abstract

The invention is a gas transmission structure of wafer carrier. The main structure includes: a rack body; a rotating component arranged on the rack body; and a carrying seat, which is used for carrying a wafer carrier, arranged on the rotating component. The rack body is also provided with an air inlet and outlet device. At least one air-intake component and at least one air-discharging component are connected to the air inlet and outlet device. The air-intake component and the air-discharging component are connected to the carrying seat. When the wafer carrier is placed on the carrying seat, the air-intake component and the air-discharging component are connected to the wafer carrier. Accordingly, gas is introduced into or exported from the wafer carrier. With the foregoing structure, the user can place the wafer carrier on the carrying seat and cooperate with the gas outlet component to lead the gas out of the wafer carrier. Afterward the inert gas is introduced into the wafer carrier through the air-intake component and can also rotate the wafer carrier via the rotating component to increase the usage convenience and efficiency.

Description

Gas transmission structure of wafer carrier

The present invention is to provide a gas transmission structure of a wafer carrier, in particular to a gas transmission structure of a wafer carrier which can prevent oxidation of wafers in the wafer carrier and increase convenience in use.

Generally speaking, most of the semiconductor wafers are loaded with wafer carriers (FOUP) to increase the convenience of transportation and maintain cleanliness. In general, some inert gases are introduced into the wafer carriers. The possibility of oxidation during storage is reduced, and when the wafers in the wafer carrier are to be taken out, the wafer carrier is placed on a load port and the lid is opened to match the wafer with the machine take out.

However, general load ports only have the function of carrying or placing wafer carriers, and their functionality is quite single. Therefore, when the wafer is replaced and the lid is covered, another mechanism is needed to supplement the inert gas, which is quite cumbersome and inconvenient, and it must be aligned with the position of the lid opening mechanism when placed, which is also inefficient in use .

Therefore, how to solve the above-mentioned conventional problems and deficiencies is the direction that the applicant of the present invention and related manufacturers engaged in this industry are eager to study and improve.

Therefore, in view of the above-mentioned deficiencies, the inventor of the present invention has collected relevant data, evaluated and considered through multiple parties, and based on years of experience accumulated in this industry, through continuous trial work and modification, he designed this kind of inert gas introduction In the wafer carrier, the inventor of the invention of the gas transmission structure of the wafer carrier that can rotate the wafer carrier at the same time to improve convenience and efficiency.

The main purpose of the present invention is to use the air inlet component and the air outlet component to introduce or export gas into the wafer carrier, and rotate the carrier through the rotating component, thereby increasing the convenience and efficiency in use.

To achieve the above object, the main structure of the present invention includes: a frame body, a rotating component provided on the frame body, a bearing seat provided on the rotating component, an air inlet and outlet device provided on the frame body, and at least one The air inlet assembly connected to the air inlet and outlet device and at least one air outlet assembly connected to the air inlet and outlet device, and the end of the air inlet assembly and the air outlet assembly facing away from the air inlet and outlet device are connected to the bearing seat.

With the above structure, the user can place the wafer carrier on the carrier, and rotate the carrier through the rotating component, thereby rotating the position of the wafer carrier to correspond to a matching mechanism, such as opening the lid The mechanism, or the mechanism for taking out the wafer, can increase the convenience of use. When the wafer carrier is placed on the carrier, the air inlet component and the air outlet component will be connected to the wafer carrier, and the air inlet and outlet device will be The gas is imported or exported into the wafer carrier. Therefore, when the wafer carrier is loaded, or the internal inert gas is insufficient, the gas can be used to export the internal gas, and the gas inlet can be used to introduce the inert gas into the wafer carrier, thereby reducing the internal wafer generation The opportunity of oxidation can be carried out directly on the carrier, without additional connection devices and structures, so it can increase the convenience and efficiency in use.

With the above-mentioned technology, it is possible to break through the problem of the single function of the conventional bearing mechanism and the inconvenience in use, to achieve the practical progress of the above advantages.

1. 1a, 1b ‧‧‧ frame

11b‧‧‧Mobile component

2. 2a‧‧‧rotating component

21‧‧‧Rotating seat

22‧‧‧rotating power parts

3. 3a‧‧‧Bearing seat

31‧‧‧Positioning Department

4‧‧‧Inlet and outlet device

5‧‧‧Intake components

51‧‧‧ Intake connector

52‧‧‧Intake pipe fittings

6‧‧‧ Outlet components

61‧‧‧ Outlet connector

62‧‧‧Outlet fittings

7, 7a‧‧‧wafer carrier

8a‧‧‧Suction components

81a‧‧‧Suction

82a‧‧‧Mobile bracket

9a‧‧‧horizontal moving component

91a‧‧‧horizontal power parts

92a‧‧‧slide

93a‧‧‧Power bearing

The first figure is a perspective perspective view of a preferred embodiment of the present invention.

The second figure is a schematic view of the preferred embodiment of the invention.

The third figure is a schematic diagram (1) of gas introduction according to a preferred embodiment of the present invention.

The fourth figure is a schematic diagram (2) of gas introduction according to a preferred embodiment of the present invention.

The fifth figure is a schematic diagram (1) of the gas derivation according to the preferred embodiment of the present invention.

The sixth figure is a schematic diagram (2) of the gas derivation according to the preferred embodiment of the present invention.

The seventh figure is a schematic view of the rotation of the preferred embodiment of the present invention.

Figure 8 is a perspective view of yet another preferred embodiment of the present invention.

The ninth figure is another perspective view of another preferred embodiment of the present invention.

Fig. 10 is a schematic diagram of movement of still another preferred embodiment of the present invention.

Figure 11 is a schematic drawing of another preferred embodiment of the present invention.

Figure 12 is a schematic diagram of another preferred embodiment of the present invention.

Figure 13 is a schematic diagram of movement of another preferred embodiment of the present invention.

In order to achieve the above objectives and effects, the technical means and structure adopted by the present invention, the drawings and details of the preferred embodiments of the present invention are described in detail below. Their features and functions are as follows, so that they fully understand.

Please refer to the first and second figures, which are perspective perspective views and placement schematic diagrams of preferred embodiments of the present invention. It can be clearly seen from the figures that the present invention includes: a frame body 1, a rotating assembly 2, A bearing base 3, a gas inlet and outlet device 4, a plurality of air intake components 5, and a plurality of air outlet components 6, wherein the rotating component 2 will be provided on the frame body 1, and the rotating component 2 will include a rotating base 21 and a rotating power Component 22, the rotating power component 22 is provided on the frame body 1, and the rotating base 21 is connected to the rotating power component 22 to rotate via the rotating power component 22, and the rotating power component 22 can be motorized, pneumatically, hydraulically, etc. Rotating, this embodiment is a pneumatic example, and the bearing base 3 will be provided on the rotating base 21, and the bearing base 3 will have a plurality of positioning portions 31, the air inlet and outlet device 4 is provided on the frame 1, and The air assembly 5 includes an air inlet connector 51 and an air inlet pipe 52. The air inlet connector 51 will be provided on the carrier 3, and the two ends of the air inlet pipe 52 will be connected to the air inlet connector 51 and the air inlet and outlet devices, respectively 4. The air outlet assembly 6 includes an air outlet connector 61 and an air outlet pipe 62. The air outlet connector 61 will be provided on the carrier 3, and the two ends of the air outlet pipe 62 will be connected to the air outlet connector 61 and the air inlet and outlet respectively装置4。 4 devices.

Through the above description, the structure of the technology can be understood, and according to the corresponding cooperation of this structure, the carrier 3 and the wafer carrier 7 can be rotated through the rotating assembly 2 and the inert gas can be introduced into the wafer carrier 7 to achieve It is more convenient and more efficient, and the detailed explanation will be explained below.

Please also refer to the first figure to the seventh figure, which is a perspective perspective view to a rotation schematic view of the preferred embodiment of the present invention. When the above components are configured, it can be clearly seen from the figure that the user can The wafer carrier 7 is placed on the carrier 3, and the wafer carrier 7 is fixed and positioned more firmly through the positioning portion 31.

When the wafer carrier 7 is placed on the carrier 3, the air inlet connector 51 and the air outlet connector 61 will communicate with the inside of the wafer carrier 7, so when the user finishes picking and placing the wafer or the wafer carrier 7 When there is not enough inert gas in it, the gas supply source 4 can be connected to multiple gas supply sources. The gas supply source is not limited, thereby connecting the gas supply source with the air inlet assembly 5 and the gas outlet assembly 6 and controlling the gas inlet and outlet The device 4 is used to introduce the inert gas into the air inlet assembly 5 or to extract the gas from the air outlet assembly 6. The control method can be controlled by means of a gas valve, a switch, etc. It is also not limited, so that the inert gas passes through the air inlet pipe 52 The gas inlet connector 51 is introduced into the wafer carrier 7 and at the same time, the gas in the gas extraction assembly 6 is used to extract the remaining gas inside the wafer carrier 7 through the gas outlet pipe 62 and the gas outlet connector 61, thereby allowing the wafer to carry The tool 7 is filled with inert gas. Since the inert gas is less prone to chemical changes, the chance of wafer oxidation in the wafer carrier 7 can be reduced, so that no additional connection mechanism is required to introduce the inert gas into the wafer carrier Within 7, the internal gas is pumped out at the same time, so the convenience and efficiency in use can be increased.

The user can also introduce gas into the rotating power member 22 to rotate the rotating base 21 and the bearing base 3 (the rotating power member 22 is a commonly used pneumatic cylinder, so its structure and operation will not be described again), thereby rotating the wafer carrier The tool 7 corresponds to various mechanisms, such as a device for opening the lid of the wafer carrier 7 or a device for taking out the wafer, so it is no longer necessary to align the corresponding mechanism during placement, which can increase the convenience of use.

Please also refer to the eighth to twelfth figures, which are perspective views to schematic diagrams of another preferred embodiment of the present invention. It can be clearly seen from the figure that this embodiment and the above-mentioned embodiments For the same, the normal load port will have the structure to open the wafer carrier 7a, so in this embodiment, the rack body 1a will be provided with a suction component 8a and a rotating component 2a and the rack body 1a The horizontal moving assembly 9a, and the sucking assembly 8a includes a sucking member 81a and a moving bracket 82a, the sucking member 81a is disposed at one side of the carrier 3a to suck the lid of the wafer carrier 7a, and the moving bracket 82a One end is provided on the frame body 1a, and the other end is connected to the suction member 81a, thereby moving the suction member 81a, and the moving bracket 82a can be moved by pneumatic, motor, hydraulic, etc., which is not limited, The horizontal moving component 9a includes a horizontal power member 91a, two slide rails 92a, and a power bearing member 93a. The slide rail 92a is disposed on the frame body 1a, and the power bearing member 93a is slidably disposed on the slide rail 92a, and the power bearing The component 93a is connected to the rotating component 2a, and the horizontal power component 91a is disposed on the frame body 1a and is located at one side of the slide rail 92a and the power carrier 93a, and is connected to the power carrier 93a to allow the power carrier 93a to pass horizontal power The power given by the piece 91a slides on the slide rail 92a, and the horizontal power piece 91a may be a motor, pneumatic, or hydraulic pressure, which is not limited.

After the user places the wafer carrier 7a on the carrier 3a, the wafer carrier 7a can be aligned with the suction component 8a through the rotating component 2a, and the horizontal power member 91a is controlled to transmit power to the power carrier 93a, thereby Move the power carrier 93a to the direction of the suction component 8a through the slide rail 92a, and at the same time drive the carrier 3a and the wafer carrier 7a close to the suction component 8a. The control method can be controlled by the controller or introduce gas into the horizontal power component 91a The control method is not limited. When the wafer carrier 7a touches the sucking member 81a, the sucking member 81a will suck the lid of the wafer carrier 7a, and the lid is removed through the moving bracket 82a, allowing the user The wafers in the wafer carrier 7a are picked and placed, so that the user can more conveniently access the wafers in the wafer carrier 7a, and the convenience in use can be improved again.

Please also refer to the thirteenth figure at the same time, which is a schematic diagram of the movement of another preferred embodiment of the present invention. It can be clearly seen from the figure that this embodiment is similar to the above embodiment, only on the frame body 1b A moving component 11b is provided to allow the user to push the frame body 1b through the moving component 11b to increase the convenience of use.

However, the above is only the preferred embodiment of the present invention, and it does not limit the patent scope of the present invention. Therefore, all the simple modifications and equivalent structural changes caused by the description and drawings of the present invention should be the same. It is included in the patent scope of the present invention and is conjoined with Chen Ming.

Therefore, the key to improving the conventional technology of the wafer carrier gas transmission structure of the present invention is:

1. Rotating the carrier 3 and the wafer carrier 7 through the rotating assembly 2 to cooperate with various corresponding mechanisms to increase the convenience of use.

2. Inert gas is introduced into the wafer carrier 7 through the gas inlet and outlet device 4, the gas inlet assembly 5, and the gas outlet assembly 6, so as to increase the efficiency in use.

3. The horizontal moving component 9a is used in conjunction with the suction component 8a to improve the efficiency in use again.

In summary, when the gas transmission structure of the wafer carrier of the present invention is used, in order to indeed achieve its efficacy and purpose, the present invention is an invention with excellent practicability, which is in accordance with the application requirements of the invention patent. After submitting the application, I hope that the review committee will grant the invention as soon as possible to protect the applicant's hard work. If there is any doubt in the review committee of the Jun Bureau, please send me a letter and give instructions. The applicant will try his best to cooperate and feel virtuous.

1‧‧‧frame

2‧‧‧Rotating components

21‧‧‧Rotating seat

22‧‧‧rotating power parts

3‧‧‧Carrier

31‧‧‧Positioning Department

4‧‧‧Inlet and outlet device

5‧‧‧Intake components

51‧‧‧ Intake connector

52‧‧‧Intake pipe fittings

6‧‧‧ Outlet components

61‧‧‧ Outlet connector

62‧‧‧Outlet fittings

Claims (10)

A gas transmission structure of a wafer carrier mainly includes: a frame body; a rotating component, the rotating component is arranged on the frame body; a bearing seat, the bearing seat is arranged on the rotating element, and the bearing seat is For supporting a wafer carrier; a gas inlet and outlet device, the gas inlet and outlet device is provided on the rack body, is used to connect at least one gas supply source; at least one air inlet component, one end of the air inlet component is connected to the air inlet and outlet gas On the device, the other end is provided on the carrier and is selectively connected to the wafer carrier to cooperate with the gas inlet and outlet device to introduce gas into the wafer carrier; and at least one gas outlet component at one end of the gas outlet component It is connected to the gas inlet and outlet device, the other end is provided on the carrier, and is selectively connected to the wafer carrier to cooperate with the gas inlet and outlet device to guide gas out of the wafer carrier. The gas transmission structure of the wafer carrier as described in item 1 of the patent scope, wherein the air inlet assembly includes an air inlet connector and an air inlet pipe member, and the air inlet connector is provided on the carrier for connection Into the wafer carrier, and one end of the air inlet pipe is connected to the air inlet connector, and the other end is connected to the air inlet and outlet device. The gas transmission structure of a wafer carrier as described in item 1 of the patent application scope, wherein the gas outlet assembly includes an outlet connector and an outlet pipe member, and the inlet connector is provided on the carrier for connection to the In the wafer carrier, one end of the gas outlet pipe member is connected to the gas outlet connector, and the other end is connected to the gas inlet and outlet device. The gas transmission structure of the wafer carrier as described in item 1 of the patent scope, wherein the rotating assembly includes a rotating seat and a rotating power member, the rotating power member is disposed on the frame body, and the rotating seat is disposed on the Rotating the power part for connecting the bearing seat. The gas transmission structure of the wafer carrier as described in item 1 of the patent application scope, wherein the rack body is provided with a suction component. The gas transmission structure of the wafer carrier as described in item 5 of the patent application scope, wherein the suction assembly includes a suction member and a moving bracket, the suction member is located at one side of the carrier, and one end of the moving bracket The utility model is arranged on the rack body, and is connected to the suction part at the other end. The gas transmission structure of the wafer carrier as described in item 1 of the patent application scope, wherein a horizontal moving component is provided between the frame body and the rotating component. The gas transmission structure of the wafer carrier as described in item 7 of the patent application scope, wherein the horizontal movement component includes a horizontal power component, at least one slide rail, and a power carrier component, the slide rail is disposed on the frame body, The power bearing member is slidably disposed on the slide rail and connected to the rotating assembly, and the horizontal power member is disposed on the frame body and connected to the power bearing member to drive the power bearing member to move on the slide rail. The gas transmission structure of the wafer carrier as described in item 1 of the patent application scope, wherein the carrier is provided with at least one positioning portion. The gas transmission structure of the wafer carrier as described in item 1 of the scope of patent application, wherein a movable component is provided on the frame body.

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