TW200517644A - Defect inspection apparatus - Google Patents

Defect inspection apparatus

Info

Publication number
TW200517644A
TW200517644A TW093121102A TW93121102A TW200517644A TW 200517644 A TW200517644 A TW 200517644A TW 093121102 A TW093121102 A TW 093121102A TW 93121102 A TW93121102 A TW 93121102A TW 200517644 A TW200517644 A TW 200517644A
Authority
TW
Taiwan
Prior art keywords
inspection apparatus
defect inspection
defects
shooting
resolution
Prior art date
Application number
TW093121102A
Other languages
Chinese (zh)
Other versions
TWI247106B (en
Inventor
Masahiro Ishibashi
Naomichi Chida
Norihide Fujiki
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Publication of TW200517644A publication Critical patent/TW200517644A/en
Application granted granted Critical
Publication of TWI247106B publication Critical patent/TWI247106B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust

Landscapes

  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Geometry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

A defect inspection apparatus is provided to inspect defects of an object with the image processing, which uses a shooting signal output through a shooting part to shoot said object. The shooting part includes at least two cameras of different resolutions. The high-resolution camera is provided to inspect defects and the one with low-resolution inspects the color of defects to reduce the inspection time.
TW093121102A 2003-11-27 2004-07-15 Defect inspection apparatus TWI247106B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003396703A JP4411588B2 (en) 2003-11-27 2003-11-27 Defect inspection equipment

Publications (2)

Publication Number Publication Date
TW200517644A true TW200517644A (en) 2005-06-01
TWI247106B TWI247106B (en) 2006-01-11

Family

ID=34722064

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093121102A TWI247106B (en) 2003-11-27 2004-07-15 Defect inspection apparatus

Country Status (3)

Country Link
JP (1) JP4411588B2 (en)
KR (1) KR20050051535A (en)
TW (1) TWI247106B (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005249946A (en) * 2004-03-02 2005-09-15 Inter Action Corp Defect inspecting apparatus for display device
JP4884828B2 (en) * 2006-05-01 2012-02-29 株式会社日本マイクロニクス Processing device for display panel
KR100766946B1 (en) * 2006-07-14 2007-10-17 삼성에스디아이 주식회사 Inspection device and method of organic light emitting cell
JP4791928B2 (en) * 2006-09-28 2011-10-12 株式会社東芝 Image processing apparatus and image processing method
JP4893938B2 (en) * 2006-10-03 2012-03-07 横河電機株式会社 Defect inspection equipment
JP2008096302A (en) * 2006-10-12 2008-04-24 Yokogawa Electric Corp Defect inspection equipment
CN102016496A (en) 2008-02-04 2011-04-13 Fps食品加工系统股份有限公司 Vision system with software control for detecting dirt and other imperfections on egg surfaces
KR101012633B1 (en) 2008-10-09 2011-02-09 (주) 인텍플러스 Dual Camera Vision Inspection Device
KR100952703B1 (en) 2008-12-29 2010-04-13 에이티아이 주식회사 Inspection apparratus of surface using dual camera
JP5995165B2 (en) * 2012-05-31 2016-09-21 株式会社Ｊｏｌｅｄ Display device inspection method, inspection device, and manufacturing method
KR20150051437A (en) 2013-11-04 2015-05-13 삼성디스플레이 주식회사 System and method for a luminance correction
KR101649424B1 (en) * 2014-12-31 2016-08-30 한국산업기술대학교산학협력단 Position control system and method
CN107024476A (en) * 2016-03-10 2017-08-08 上海帆声图像科技有限公司 Display panel detecting system and its detection means and detection method
DE102017219153B4 (en) * 2017-10-25 2020-03-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. Device and method for the optical monitoring of moving components
CN107966275B (en) * 2017-11-24 2020-01-07 中山依瓦塔光学有限公司 Lens detection equipment that can simulate multi-pose detection
JP7331311B2 (en) * 2019-07-16 2023-08-23 株式会社竹中工務店 Image inspection device and image inspection program
CN114298254B (en) * 2021-12-27 2024-03-15 亮风台（上海）信息科技有限公司 Method and device for obtaining display parameter test information of optical device
JP2023129047A (en) * 2022-03-04 2023-09-14 Juki株式会社 Visual inspection equipment and visual inspection method
KR102474125B1 (en) * 2022-04-11 2022-12-05 주식회사 머신앤비전 High speed inspection equipment for quantum dot display luminance mura
DE102022129464B3 (en) 2022-11-08 2024-01-11 Göpel electronic GmbH Device and method for testing two- or three-dimensional objects
CN115855452B (en) * 2022-12-12 2025-07-11 中检西部检测有限公司 A lighting and light signal device geometric visibility test instrument and method

Also Published As

Publication number Publication date
TWI247106B (en) 2006-01-11
KR20050051535A (en) 2005-06-01
JP2005156396A (en) 2005-06-16
JP4411588B2 (en) 2010-02-10

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees