KR20040096676A - A vibration cutting machine - Google Patents

A vibration cutting machine Download PDF

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Publication number
KR20040096676A
KR20040096676A KR1020030029564A KR20030029564A KR20040096676A KR 20040096676 A KR20040096676 A KR 20040096676A KR 1020030029564 A KR1020030029564 A KR 1020030029564A KR 20030029564 A KR20030029564 A KR 20030029564A KR 20040096676 A KR20040096676 A KR 20040096676A
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South Korea
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tool
piezoelectric actuator
vibration
cutting device
elastic hinge
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KR100514991B1 (en
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오창진
이대희
김호상
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사단법인 고등기술연구원 연구조합
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/02—Driving main working members
    • B23Q5/04—Driving main working members rotary shafts, e.g. working-spindles
    • B23Q5/10—Driving main working members rotary shafts, e.g. working-spindles driven essentially by electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B29/00—Holders for non-rotary cutting tools; Boring bars or boring heads; Accessories for tool holders
    • B23B29/04—Tool holders for a single cutting tool
    • B23B29/12—Special arrangements on tool holders
    • B23B29/125—Vibratory toolholders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2260/00—Details of constructional elements
    • B23B2260/108—Piezoelectric elements

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Turning (AREA)

Abstract

본 발명은 압전액튜에이터의 가진작용을 이용하여 공구에 미세한 진동을 발생시켜 공작물을 초정밀로 절삭가공하는 진동절삭장치에 관한 것으로, 공구와 압전액츄에이터가 소정간격을 두고 공구대에 각각 설치되어 압전액츄에이터의 가진시 불필요한 진동모드에 의해 공구의 운동방향을 변화시키는 것을 방지할 수 있도록 한 것이다. 그리고, 공구대는 브라켓부와, 이 브라켓부에 고정단이 고정설치됨과 더불어 자유단에 상기 공구가 설치되는 공구장착부 및, 공구장착부에 외측으로 돌출성형된 탄성힌지부로 이루어져, 주파수대역폭이 넓은 압전액츄에이터를 사용하지 않고서도 탄성힌지부 중심으로부터 공구까지의 길이를 가변시키므로써 절삭속도의 향상시킬 수 있도록 한 것이다.The present invention relates to a vibration cutting device for cutting a workpiece with high precision by generating fine vibration in a tool by using the excitation action of a piezoelectric actuator, wherein the tool and the piezoelectric actuator are respectively installed on a tool post at a predetermined interval of the piezoelectric actuator. It is to prevent changing the direction of movement of the tool by the vibration mode unnecessary when excited. The tool post includes a bracket part, a tool mounting part having a fixed end fixed to the bracket part, and a tool mounting part installed at the free end, and an elastic hinge part protruding outward from the tool mounting part. It is possible to improve the cutting speed by varying the length from the center of the elastic hinge to the tool without using.

Description

압전액츄에이터를 이용한 진동절삭장치{A VIBRATION CUTTING MACHINE}Vibration cutting device using piezoelectric actuators {A VIBRATION CUTTING MACHINE}

본 발명은 진동절삭장치에 관한 것으로, 특히 압전액튜에이터의 가진작용을 이용하여 공구에 미세한 진동을 발생시켜 공작물을 초정밀로 절삭가공하는 압전액츄에이터를 이용한 진동절삭장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration cutting device, and more particularly, to a vibration cutting device using a piezoelectric actuator which generates a fine vibration in a tool by using the excitation action of a piezoelectric actuator to cut a workpiece with high precision.

최근 반도체, 항공우주, 영상정보, 정밀기계 산업이 발전하면서 초정밀 가공기술에 대한 필요성이 더욱 증가하고 있는 추세이다. 초정밀 가공법중 다이아몬드 공구를 사용한 초정밀 절삭기술은 절입량이 수 ㎛에서 수십 ㎛이지만, 이 절입량을 서브마이크로미터 이하로 제어하면 결정립계 단차가 없는 표면과 결함이 없는 이상적인 표면이 얻어질 가능성이 있다. 그러나, 초정밀 가공기에서는 주축, 이송장치 등 주요 부품의 운동특성이 가공정밀도에 미치는 영향이 매우 크므로 보다 높은 가공정밀도를 실현하기 위해서는 각각의 요소부품의 운동정밀도 향상과 더불어 운동오차의 실시간 보상이 절대적으로 요구된다.With the recent development of the semiconductor, aerospace, image information, and precision machinery industries, the need for ultra-precision processing technology is increasing. In the ultra-precision machining method, the ultra-precision cutting technique using a diamond tool has a cutting amount of several micrometers to several tens of micrometers. However, if the cutting amount is controlled to submicrometer or less, there is a possibility that an ideal surface free from grain boundaries and an ideal surface free from defects can be obtained. However, in the ultra-precision machine, the movement characteristics of the main parts such as the spindle and the feeding device have a great influence on the machining precision. Therefore, in order to realize higher machining precision, the real-time compensation of the movement error is required with the improvement of the movement precision of each component. Is required.

특히, 최근의 초정밀 가공기에서는 가공 가능한 공작물의 직경이 커지면서 가공정밀도가 높아지는 추세에 따라 각 슬라이드의 행정거리가 수백 ㎜로 상대적으로 길어짐에도 불구하고, ㎚수준의 높은 분해능과 전 운동구간에 걸쳐 높은 운동정밀도가 요구되고 있다. 그러나 이 경우 이송부의 관성질량이 매우 크기 때문에 실시간으로 운동오차를 보상하기에는 응답속도가 절대적으로 늦어져, 실시간 운동오차 보상이 매우 어렵게 된다.In particular, in recent ultra-precision machines, as the diameter of the workable workpiece increases, the machining precision increases, and the stroke length of each slide is hundreds of millimeters, which is relatively long. Precision is required. However, in this case, since the inertial mass of the conveying part is very large, the response speed is absolutely slow to compensate for the motion error in real time, and the real time motion compensation becomes very difficult.

이와 같은 문제점을 극복하기 위하여 주축과 이송계의 운동 정밀도를 정밀하게 측정하면서 압전 액츄에이터를 이용하여 상대적으로 질량이 매우 작은 절삭공구와 툴 홀더만을 미세하게 구동시켜 실시간으로 운동오차를 보정하면서 가공할 수 있는 미소절삭공구대(FTS; Fast Tool Servo)가 사용되고 있으며, 이러한 압전 액츄에이터의 고속응답을 이용하여 공구의 끝부분에 기하학적인 운동을 유발시켜 미세패턴을 가공하는 진동절삭장치 등에 응용하고 있다.In order to overcome this problem, it is possible to precisely measure the movement accuracy of the spindle and the feed system while using a piezoelectric actuator to finely drive only cutting tools and tool holders with relatively small masses to compensate for motion errors in real time. Fast Tool Servo (FTS) is used, and the high speed response of the piezoelectric actuator is used to induce a vibratory cutting device that processes a fine pattern by inducing a geometric motion at the end of the tool.

상기한 바와 같은 종래의 압전액츄에이터를 이용한 진동절삭장치는 도 1에 나타낸 바와 같이, 공작물(100)을 절삭하는 공구(101)가 장착되는 공구부착부(102)를 공구대(103)와 일체로 연결형성하고, 상기 공구부착부(102)와 공구대(103)사이에 서로 직교하는 방향으로 한쌍의 압전액튜에이터(105,105')를 설치하여, 상기 압전액튜에이터(105,105')에 의해 발생된 진동으로 상기 공구(101)를 X축과 Y축방향으로 진동시켜 공작물(100)을 절삭하도록 되어 있다.Vibration cutting device using a conventional piezoelectric actuator as described above, as shown in Figure 1, the tool attachment portion 102 to which the tool 101 for cutting the workpiece 100 is mounted integrally with the tool rest 103 A pair of piezoelectric actuators 105 and 105 'are installed between the tool attaching part 102 and the tool rest 103 in a direction orthogonal to each other, and the vibration is generated by the piezoelectric actuators 105 and 105'. The work tool 100 is cut by vibrating the tool 101 in the X-axis and Y-axis directions.

그런데, 상기와 같은 종래의 진동절삭장치는 공구(101)의 이동방향이 압전액츄에이터(105,105')의 연장선상에 있어 공구(101)의 스트로크가 압전액츄에이터(105,105')의 스트로크 이내로 제한되며, 이에 따라 높은 절삭속도를 얻기 위해서는 기술적, 경제적으로 불리한 주파수 대역폭이 넓은 압전액츄에이터를 사용해야 한다는 문제점이 있었다.However, in the conventional vibration cutting device as described above, since the moving direction of the tool 101 is on the extension line of the piezoelectric actuators 105 and 105 ', the stroke of the tool 101 is limited to the stroke of the piezoelectric actuators 105 and 105'. Accordingly, in order to obtain a high cutting speed, there is a problem in that a piezoelectric actuator having a wide frequency bandwidth is technically and economically disadvantageous.

본 발명은 상기한 문제점을 해결하기 위해 안출된 것으로, 압전액츄에이터의진동에 따라 이 진동방향과 소정각도를 이루는 공구를 탄성회동시켜 공구의 스트로크를 압전액츄에이터의 스트로크보다 크게 증폭시키므로써 절삭속도를 향상시킬 수 있는 압전액츄에이터를 이용한 진동절삭장치를 제공하는데 그 목적이 있다.SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and the cutting speed is improved by amplifying the tool stroke larger than the stroke of the piezoelectric actuator by elastically rotating the tool having a predetermined angle with the vibration direction according to the vibration of the piezoelectric actuator. An object of the present invention is to provide a vibration cutting device using a piezoelectric actuator.

본 발명의 또다른 목적은, 압전액츄에이터와 공구장착부를 서로 독립적으로 배열하여 압전액츄에이터의 가진시 불필요한 진동모드에 의한 공구의 운동방향을 변화시키는 것을 방지하는 데에도 있다.Still another object of the present invention is to prevent the piezoelectric actuator and the tool mounting portion from being arranged independently of each other to change the direction of movement of the tool due to an unnecessary vibration mode when the piezoelectric actuator is excited.

도 1은 종래의 압전액츄에이터를 이용한 진동절삭장치를 나타낸 도면,1 is a view showing a vibration cutting device using a conventional piezoelectric actuator,

도 2a와 도 2b는 본 발명에 따른 압전액츄에이터를 이용한 진동절삭장치를 나타낸 도면,2a and 2b is a view showing a vibration cutting device using a piezoelectric actuator according to the present invention,

도 3은 본 발명에 따른 압전액츄에이터를 이용한 진동절삭장치의 작동상태를 설명하기 위한 도면,3 is a view for explaining the operating state of the vibration cutting device using a piezoelectric actuator according to the present invention,

도 4는 본 발명에 따른 본 발명에 따라 공구가 이동되면서 공작물을 절삭하는 것을 보인 동작상태도이다.4 is an operational state diagram showing cutting a workpiece while the tool is moved according to the present invention.

* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

10 : 절삭기본체 20 : 공구대10: cutting base 20: tool post

21 : 브라켓부 22 : 공구장착부21: bracket portion 22: tool mounting portion

23,23' : 아암레버 24,24' : 탄성힌지부23,23 ': Arm lever 24,24': Elastic hinge part

25,26,25'26' : 장홈 27,27' : 벤딩부25,26,25'26 ': Long groove 27,27': Bending part

30 : 공구 40,40': 압전액츄에이터30 tool 40,40 ': piezo actuator

O,O' : 힌지점O, O ': hinge point

상기한 목적을 달성하기 위한 본 발명의 진동절삭장치는, 공구대에 공구와 압전액츄에이터가 각각 설치되고, 상기 공구대는 상기 절삭기 본체에 설치되는 브라켓부와, 상기 브라켓부에 고정단이 고정설치됨과 더불어 자유단에 상기 공구가 설치되는 공구장착부를 포함하여 이루어져 있다.In the vibration cutting device of the present invention for achieving the above object, a tool and a piezoelectric actuator are respectively installed on a tool post, the tool post is a bracket portion is installed on the cutter body, and the fixed end is fixed to the bracket portion and In addition, the tool is configured to include a tool mounting portion is installed on the free end.

여기서, 공구장착부에는 상기 자유단이 탄성회동할 수 있도록 탄성힌지부가 구비되어 있으며, 이 탄성힌지부에는 상기 공구작착부의 길이방향에 수직하게 벤딩부를 사이에 두고 서로 마주보며 형성된 한쌍의 장홈이 구비되어 있다.Here, the tool mounting portion is provided with an elastic hinge portion so that the free end can be elastically rotated, the elastic hinge portion is provided with a pair of long grooves formed facing each other with the bending portion perpendicular to the longitudinal direction of the tool mounting portion. have.

그리고, 상기 공구장착부의 자유단측에는 일측에 상기 압전액츄에이터가 결합되는 아암레버가 외측으로 돌출형성되어, 압전액츄에이터의 진동에 의해 상가 탄성힌지를 중심으로 회동할 수 있도록 되어 있다.In addition, an arm lever to which the piezoelectric actuator is coupled to one side is formed at the free end side of the tool mounting part to protrude outward, so that the upper part of the tool mounting unit can rotate around the elastic hinge by the vibration of the piezoelectric actuator.

한편, 상기 공구장착부와 압전액츄에이터는 소정간격을 두고 나란하게 설치되어, 압전액츄에이터의 가진시 불필요한 진동모드가 공구장착부를 통해 공구로 전달되는 것을 방지할 수 있도록 되어 있다.On the other hand, the tool mounting portion and the piezoelectric actuator is installed side by side at a predetermined interval, it is possible to prevent the unnecessary vibration mode to be transmitted to the tool through the tool mounting portion when the piezoelectric actuator is excited.

이하 본 발명의 바람직한 실시례를 첨부한 예시도면을 참조하여 자세히 설명한다.Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be described in detail.

도 2a와 도 2b는 본 발명에 따른 압전액츄에이터를 이용한 진동절삭장치를 나타낸 도면으로서, 도 2a는 X축 압전액츄에이터를 나타내기 위한 도면이고, 도 2b는 Y축 압전액츄에이터를 나타내기 위한 도면이다.Figure 2a and Figure 2b is a view showing a vibration cutting device using a piezoelectric actuator according to the present invention, Figure 2a is a view for showing the X-axis piezoelectric actuator, Figure 2b is a view for showing the Y-axis piezoelectric actuator.

도면에 나타낸 바와 같이 본 바렴은, 절삭기본체(10)에 공구대(20)가 설치되어 있고, 상기 공구대(20)에 절삭공구(30)와 압전액츄에이터(40,40')가 각각 설치되어 있다.As shown in the drawing, the tool base 20 is provided on the cutting base 10, and the cutting tool 30 and the piezoelectric actuators 40 and 40 'are respectively installed on the tool base 20. have.

상기 공구대(20)는 절삭기 본체(10)에 설치되는 브라켓부(21)와, 일단이 상기 브라켓부(21)에 설치되면서 그 선단에 상기 공구(30)가 설치되는 공구장착부(22)로 이루어져 있다.The tool post 20 is a bracket portion 21 which is installed in the cutting machine main body 10, and a tool mounting portion 22, one end is installed in the bracket portion 21, the tool 30 is installed at the tip thereof. consist of.

상기 공구장착부(22)의 자유단측에는 외측으로 수직하게 아암레버(23,23')가 돌출형성되어 있고, 고정단측에는 탄성복원력을 지닌 넥크형상의 탄성힌지부(24,24')가 형성되어 있다.Arm levers 23 and 23 'protrude outwardly from the free end side of the tool mounting portion 22, and neck-shaped elastic hinge portions 24 and 24' with elastic restoring force are formed on the fixed end side. have.

상기 탄성힌지부(24,24')에는 탄성복원력을 지닐 수 있도록 공구장착부(22)의 길이방향에 수직하게 서로 마주보며 형성된 한쌍의 장홈(25,26,25'26')과, 이 한쌍의 장홈(25,26,25'26')사이에는 상기 압전액츄에이터(41,41')의 진동에 의해 아암레버(23,23')에 힘을 가할 때 굽혀지는 벤딩부(27,27')로 이루어져 있다.The pair of long grooves 25, 26, 25 ′ 26 ′ formed in the elastic hinge portions 24 and 24 ′ facing each other perpendicular to the longitudinal direction of the tool mounting portion 22 to have an elastic restoring force, Between the long grooves 25, 26 and 25'26 ', the bending portions 27 and 27' are bent when applying force to the arm levers 23 and 23 'by the vibration of the piezoelectric actuators 41 and 41'. consist of.

즉, 상기 벤딩부(27,27')는 아암레버(23,23')에 힘이 가해질 때 벤딩되며, 강체인 공구장착부(22)의 자유단부는 상기 벤딩부(27,27')의 힌지점(O,O')을 회전중심으로 하여 회동하도록 되어 있다.That is, the bending parts 27 and 27 'are bent when a force is applied to the arm levers 23 and 23', and the free end of the rigid tool mounting part 22 is hinged of the bending parts 27 and 27 '. The point O, O 'is rotated around the rotational center.

한편, 상기 공구(30)는 공구장착부(22)의 길이방향 혹은 상기 압전액츄에이터(40,40')의 진동방향에 대해서 소정각도 만큼 기울어지게 설치되어 있다. 이는 공구(30)와 공작물(100)사이에 일정각도를 형성하여 절삭가공시 배출되는 칩을 원활하게 배출하기 위함이다.On the other hand, the tool 30 is inclined by a predetermined angle with respect to the longitudinal direction of the tool mounting portion 22 or the vibration direction of the piezoelectric actuators (40, 40 '). This is to form a predetermined angle between the tool 30 and the workpiece 100 to smoothly discharge the chip discharged during the cutting process.

상기 압전액츄에이터(40,40')는 전기적 신호에 따라 X축 혹은 Y축방향으로 팽창과 수축을 반복하여 진동을 발생시키는 것으로, 상기 공구장착부(22)와 소정간격을 두고 나란하게 설치되어 있고, 그 일단은 상기 브라켓부(21)에 고정되고 타단은 상기 아암레버(23,23')에 고정되어 있다.The piezoelectric actuators 40 and 40 'generate vibration by repeating expansion and contraction in the X-axis or Y-axis direction according to an electrical signal, and are installed in parallel with the tool mounting part 22 at a predetermined interval. One end is fixed to the bracket portion 21 and the other end is fixed to the arm levers 23 and 23 '.

따라서, 상기 압전액츄에이터(40,40')의 가진작용에 따라 상기 아암레버(23,23')는 진동방향으로 힘을 받게 된다.Therefore, the arm levers 23 and 23 'are subjected to a force in the vibration direction according to the excitation action of the piezoelectric actuators 40 and 40'.

즉, 상기 압전액츄에이터(40,40')가 전기적 신호에 따라 팽창과 수축을 반복함으로써 상기 공구장착부(22)는 탄성힌지부(24)의 벤딩부(27,27')를 중심으로 회동하게 되고, 이에 따라 상기 공구장착부(22) 선단에 구비된 공구(30)는 일정한 주기로 진동하여 2차원의 타원궤적을 그리면서 절삭가공을 하게 된다.That is, as the piezoelectric actuators 40 and 40 'repeat and expand and contract according to electrical signals, the tool mounting part 22 rotates around the bending parts 27 and 27' of the elastic hinge part 24. Accordingly, the tool 30 provided at the tip of the tool mounting part 22 vibrates at regular intervals, thereby cutting the two-dimensional elliptical trajectory.

상기 압전액츄에이터(40,40')와 공구장착부(22)를 상기 브라켓부(21)에 소정 간격을 두고 나란하게 설치한 것은, 압전액츄에이터(40,40')의 진동시 불필요한 진동모드가 공구(30)에 전달되는 것을 방지하기 위함이다.The piezoelectric actuators 40 and 40 'and the tool mounting portion 22 are installed side by side at a predetermined interval on the bracket portion 21, so that an unnecessary vibration mode is generated when the piezoelectric actuators 40 and 40' are vibrated. 30) to prevent delivery.

한편, 상기 압전액츄에이터(40,40')는 X축액츄에이터(40)과 Y축 압전액츄에이터(40')로 이루어지고, 이들의 진동에 의한 공구(30)의 회동방향은 서로 직교하게 되는 바, 이 경우 각각의 움직임에 의해 간섭을 받지 않고 정확하게 회동할 수 있도록 각 축의 탄성부는 서로 직교하는 방향으로 형성되어 있다.On the other hand, the piezoelectric actuator (40, 40 ') is composed of the X-axis actuator 40 and the Y-axis piezoelectric actuator (40'), the rotational direction of the tool 30 due to these vibrations are orthogonal to each other, In this case, the elastic portions of each axis are formed in the direction orthogonal to each other so as to be able to rotate accurately without interference by each movement.

상기와 같이 이루어진 본 발명에 따른 진동절삭장치의 작동과정을 도 3과 도 4를 참조하여 설명하기로 한다.Operation of the vibration cutting device according to the present invention made as described above will be described with reference to FIGS.

먼저, 공작물(100)을 X축 방향으로 절삭하기 위해 상기 X축 압전액츄에이터(40)에 전기적 신호를 공급하면, 전류신호에 따라 상기 압전액츄에이터(40)는 팽창과 수축을 반복하여 진동을 발생시키게 된다.First, when the electrical signal is supplied to the X-axis piezoelectric actuator 40 in order to cut the workpiece 100 in the X-axis direction, the piezoelectric actuator 40 repeats expansion and contraction to generate vibration in accordance with the current signal. do.

상기 압전액츄에이터(40)가 신축됨에 따라 상기 아암레버(23)에는 진동방향으로 외력을 받게 됨과 더불어, 아암레버(23)에 작용된 외력은 아암레버(23)와 일체로 이루어지며 외팔보 형태인 상기 공구장착부(22)에 회전력으로서 작용하게 된다.As the piezoelectric actuator 40 is stretched, the arm lever 23 receives an external force in a vibration direction, and the external force acting on the arm lever 23 is integrally formed with the arm lever 23 and is cantilevered. The tool mounting portion 22 acts as a rotating force.

이 회전력에 의해 상기 탄성힌지부(24)는 변형하게 되고, 상기 공구장착부(22)의 자유단과 아암레버(23) 상의 모든 질점은 상기 벤딩부(27)의 힌지점(O)을 중심으로 하여 화살표방향으로 회동하게 되며, 공구장착부(22) 선단에 설치된 공구(30)도 함께 회동하여 공작물을 절삭하게 된다.The elastic hinge portion 24 is deformed by this rotational force, and all the quality points on the free end of the tool mounting portion 22 and the arm lever 23 are centered on the hinge point O of the bending portion 27. It rotates in the direction of the arrow, the tool 30 installed at the tip of the tool mounting portion 22 also rotates to cut the workpiece.

여기서, 공구장착부(22)의 자유단과 아암레버(23)로 이루어지는 강체에서 임의의 질점(P)에서의 회전변위량(dl)은 도 3에 나타낸 바와 같이, 상기 압전액츄에이터(40)의 신축량(dx) 및 회전중심인 힌지점(O)으로부터 질점까지의 거리(r)에 의해서 결정되어 진다.Here, the rotational displacement amount dl at an arbitrary quality point P in the rigid body consisting of the free end of the tool mounting portion 22 and the arm lever 23 is the amount of expansion and contraction dx of the piezoelectric actuator 40 as shown in FIG. ) And the distance r from the hinge point O, which is the center of rotation, to the vaginal point.

이를 함수관계로 나타내면, dθ가 압전액츄에이터(40)의 신축에 의해 힌지점(O)을 중심으로 상기 아암레버(23)가 회전한 각도라 할 때, 임의의 질점 (P)에서의 회전변위량 dl = r×dθ 의 관계가 성립하게 된다.In terms of a functional relationship, when dθ is an angle at which the arm lever 23 is rotated around the hinge point O by the expansion and contraction of the piezoelectric actuator 40, the rotational displacement amount dl at an arbitrary material point P = r x dθ is established.

즉, 회전각(dθ) 혹은 압전액츄에이터(40)의 신축량(dx; 스트로크)을 동일하게 한 상태에서 힌지점(O)으로부터 공구(30)까지의 거리(rt)를 변화시켜 공구(30)의 스트로크도 비례적으로 변화시킬 수 있게 된다.That is, the tool 30 is changed by varying the distance r t from the hinge point O to the tool 30 in the state where the rotation angle dθ or the amount of stretching (dx; stroke) of the piezoelectric actuator 40 is the same. The stroke of can also be changed proportionally.

따라서, 공구(30)의 스트로크를 증가시켜 절삭속도를 향상시키기 위해서는, 기술적 경제적으로 불리한 주파수대역폭이 넓은 압전액츄에이터(40)를 사용하지 않고서도 공구(30)의 설치위치를 벤딩부(27)의 힌지점(O)으로부터 먼 거리에 설치하면, 공구(30)의 스트로크를 크게 증폭시킬 수 있음과 더불어 절삭속도를 향상시킬 수 있게 되는 것이다.Therefore, in order to increase the cutting speed by increasing the stroke of the tool 30, the installation position of the tool 30 can be changed without the use of the piezoelectric actuator 40 having a wide bandwidth, which is technically disadvantageous. When installed at a distance from the hinge point O, the stroke of the tool 30 can be greatly amplified and the cutting speed can be improved.

즉, 공구(30)와 힌지점(O)간의 거리(rt)를 압전액츄에이터(40)와 아암레버(23)가 결합되는 결합부와 힌지점(O)간의 거리(ra)보다 길게 하면 공구(30)의 스트로크를 압전액츄에이터(40)의 스트로크보다 크게 증폭할 수 있게 된다.That is, when the distance r t between the tool 30 and the hinge point O is made longer than the distance r a between the hinge portion O and the coupling portion to which the piezoelectric actuator 40 and the arm lever 23 are coupled, The stroke of the tool 30 can be amplified larger than the stroke of the piezoelectric actuator 40.

물론, 공구(30)와 힌지점(O)간의 거리(rt)를 압전액츄에이터(40)와 아암레버(23)가 결합되는 결합부와 힌지점(O)간의 거리(ra)보다 짧게 하여 공구(30)의 스트로크를 압전액츄에이터(40)의 스트로크 이내로 제한할 수도 있는 것이다.Of course, the distance r t between the tool 30 and the hinge point O is shorter than the distance r a between the hinge portion O and the coupling portion to which the piezoelectric actuator 40 and the arm lever 23 are coupled. The stroke of the tool 30 may be limited to within the stroke of the piezoelectric actuator 40.

다음으로, Y축 방향으로의 공작물 절삭기구도 위에서 설명한 X축 절삭기구와 동일하며, 다만 Y축 압전액츄에이터(40')에 인가되는 전기적 신호를 X축 압전액츄에이터(40)에 인가되는 전기적 신호와 소정의 위상차를 두면 된다.Next, the workpiece cutting mechanism in the Y-axis direction is also the same as the X-axis cutting mechanism described above, except that the electrical signal applied to the Y-axis piezoelectric actuator 40 'and the electrical signal applied to the X-axis piezoelectric actuator 40 What is necessary is just to put a predetermined phase difference.

한편, 공작물(100)은 상기 공구(30)가 그리는 궤적에 의해서 도 4에 나타낸 바와 같이 절삭된다.On the other hand, the workpiece 100 is cut as shown in Figure 4 by the trajectory that the tool 30 draws.

즉, 상기 공구(30)는 압전액츄에이터(40)의 진동에 의해 타원형의 공구(30)궤적을 그리게 된다. 그리고, 상기 공작물(100)은 V의 속도로 공구(30)를 향해 화살표 방향(→) 진행하게 된다.That is, the tool 30 draws an elliptical tool 30 trajectory by the vibration of the piezoelectric actuator 40. In addition, the workpiece 100 moves in the arrow direction (→) toward the tool 30 at the speed of V. FIG.

이에 따라, 실제로는 상기 공구(30)는 타원형의 2차원 궤적을 그리면서 제자리에 있으나 상기 공작물(100)이 V의 속도로 진행하므로 상대적으로 공구(30)가 도 4의 공구(30)궤적을 그리면서 공작물(100)을 절삭하는 것으로 보이는 것이다.Accordingly, the tool 30 is actually in place while drawing an elliptical two-dimensional trajectory, but since the workpiece 100 proceeds at a speed of V, the tool 30 relatively maintains the trajectory of the tool 30 of FIG. 4. In doing so, it appears to be cutting the work piece 100.

상술한 실시례는 본 발명의 일실시례에 불과한 것으로, 본 발명의 기술적 사상이 허용되는 한도내에서 다양하게 변형하여 실시할 수 있음은 물론이다.The above embodiments are merely examples of the present invention, and of course, various modifications may be made within the limits of the technical idea of the present invention.

이상에서 설명한 바와 같이 본 발명의 진동절삭장치에 따르면, 기술적 경제적으로 불리한 주파수대역폭이 넓은 압전액츄에이터를 사용하지 않고서도 탄성힌지부 중심으로부터 공구까지의 길이를 가변시키므로써, 스트로크 증가에 의한 절삭속도의 향상을 얻을 수 있다.As described above, according to the vibration cutting device of the present invention, by varying the length from the center of the elastic hinge portion to the tool without using a piezoelectric actuator having a wide bandwidth, which is technically disadvantageous, You can get an improvement.

또한, 압전액츄에이터와 공구장착부가 서로 독립하여 설치되어 있으므로써, 압전액츄에이터의 가진시 불필요한 진동모드에 의해 공구의 운동방향을 변화시키는 것을 방지하여 가공정밀도를 향상시킬 수 있게 된다.In addition, since the piezoelectric actuator and the tool mounting portion are provided independently of each other, it is possible to prevent the piezoelectric actuator from changing the direction of movement of the tool due to an unnecessary vibration mode when the piezoelectric actuator is excited, thereby improving processing accuracy.

Claims (3)

절삭기본체에 설치된 공구대에 공구와 압전액츄에이터가 각각 설치되고, 상기 압전액츄에이터를 통해 공구를 미세 진동시켜 공작물을 절삭하도록 된 진동절삭장치에 있어서,In the vibrating cutting device is a tool and a piezoelectric actuator is installed on the tool post installed in the cutting base, respectively, to finely vibrate the tool through the piezoelectric actuator to cut the workpiece, 상기 공구대는 상기 절삭기 본체에 설치되는 브라켓부와;The tool post has a bracket portion which is installed in the cutter body; 상기 브라켓부에 고정단이 고정설치되고, 자유단에 상기 공구가 설치되며, 상기 자유단이 탄성회동할 수 있도록 탄성힌지부를 구비함과 더불어 상기 압전액츄에이터와 소정간격을 두고 나란하게 설치된 공구장착부 및;A fixed end is fixedly installed on the bracket part, the tool is installed on a free end, and an elastic hinge part is provided to allow the free end to rotate freely, and a tool mounting part installed in parallel with the piezoelectric actuator at a predetermined distance; ; 상기 공구장착부의 자유단측에 외측으로 수직하게 돌출형성되고, 일측에 상기 압전액츄에이터가 결합되는 아암레버를 포함하여 이루어진 압전액츄에이터를 이용한 진동절삭장치.Vibration cutting device using a piezoelectric actuator formed on the free end side of the tool mounting portion vertically protruding outward, and comprises an arm lever coupled to the piezoelectric actuator on one side. 제 1 항에 있어서, 상기 탄성힌지부는 상기 공구작착부의 길이방향에 수직하게 서로 마주보며 형성된 한쌍의 장홈과, 이 한쌍의 장홈사이에는 상기 압전액튜에이터의 진동에 따라 굽혀지는 벤딩부로 이루어진 것을 특징으로 하는 압전액츄에이터를 이용한 진동절삭장치.The method of claim 1, wherein the elastic hinge portion is a pair of long grooves formed to face each other perpendicular to the longitudinal direction of the tool mounting portion, and between the pair of long grooves is characterized in that the bending portion bent in accordance with the vibration of the piezoelectric actuator Vibration cutting device using piezo actuator. 제 1 항 또는 제 2 항에 있어서, 상기 압전액츄에이터의 스트로크가 동일한 조건하에서 상기 공구의 스트로크가 상기 공구와 탄성힌지부간의 거리에 정비례하는 것을 특징으로 하는 압전액츄에이터를 이용한 진동절삭장치.The vibration cutting device according to claim 1 or 2, wherein the stroke of the tool is directly proportional to the distance between the tool and the elastic hinge portion under the same stroke condition of the piezoelectric actuator.
KR10-2003-0029564A 2003-05-10 2003-05-10 A vibration cutting machine Expired - Fee Related KR100514991B1 (en)

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US7293487B2 (en) 2005-11-15 2007-11-13 3M Innovative Properties Company Cutting tool having variable and independent movement in an x-direction and a z-direction into and laterally along a work piece for making microstructures
US7328638B2 (en) 2005-12-27 2008-02-12 3M Innovative Properties Company Cutting tool using interrupted cut fast tool servo
US7350441B2 (en) 2005-11-15 2008-04-01 3M Innovative Properties Company Cutting tool having variable movement at two simultaneously independent speeds in an x-direction into a work piece for making microstructures
US7350442B2 (en) 2005-11-15 2008-04-01 3M Innovative Properties Company Cutting tool having variable movement in a z-direction laterally along a work piece for making microstructures
US7628100B2 (en) 2007-01-05 2009-12-08 3M Innovative Properties Company Cutting tool using one or more machined tool tips with diffractive features in a continuous or interrupted cut fast tool servo
US7669508B2 (en) 2007-10-29 2010-03-02 3M Innovative Properties Company Cutting tool using one or more machined tool tips with diffractive features
US7677146B2 (en) 2006-05-10 2010-03-16 3M Innovative Properties Company Cutting tool using one or more machined tool tips in a continuous or interrupted cut fast tool servo
US9810817B2 (en) 2008-04-02 2017-11-07 3M Innovative Properties Company Light directing film and method for making the same
EP3408049A1 (en) * 2016-01-27 2018-12-05 J.G. Weisser Söhne GmbH & Co. KG Method for machining a workpiece, tool head for a lathe, and lathe
CN112720019A (en) * 2019-10-14 2021-04-30 光电科技光学机械有限责任公司 Tool drive unit, turning device, turning method and use thereof
CN116529005A (en) * 2021-11-30 2023-08-01 李承俊 Vibration cutting device for micro pattern production
CN117259865A (en) * 2023-09-27 2023-12-22 中冶华天南京工程技术有限公司 A single-excitation three-dimensional vibration cutting device and trajectory generation method
CN118583066A (en) * 2024-05-27 2024-09-03 北京工业大学 A micro air-floating probe based on chip motor drive
CN119566867A (en) * 2025-01-07 2025-03-07 杭州电子科技大学 A novel decoupled dual-axis elliptical vibration-assisted cutting platform and its control method

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EP1948392A4 (en) * 2005-11-15 2010-11-17 3M Innovative Properties Co Cutting tool having variable and independent movement in an x-direction and a z-direction into and laterally along a work piece for making microstructures
KR101312233B1 (en) * 2005-11-15 2013-09-27 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Apparatus for machining a cylindrical work piece and method for using a virtual center y actuator to machine a work piece
US7350441B2 (en) 2005-11-15 2008-04-01 3M Innovative Properties Company Cutting tool having variable movement at two simultaneously independent speeds in an x-direction into a work piece for making microstructures
US7350442B2 (en) 2005-11-15 2008-04-01 3M Innovative Properties Company Cutting tool having variable movement in a z-direction laterally along a work piece for making microstructures
US7395741B2 (en) 2005-11-15 2008-07-08 3M Innovative Properties Company Method for using a cutting tool having variable and independent movement in an x-direction and z-direction into and laterally along a work piece for making microstructures
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US7398715B2 (en) 2005-11-15 2008-07-15 3M Innovative Properties Company Method for using a cutting tool having variable rotation about a y-direction transversely across a work piece for making microstructures
US7487701B2 (en) 2005-11-15 2009-02-10 3M Innovative Properties Company Method for using a cutting tool having variable movement at two simultaneously independent speeds in an x-direction into a work piece for making microstructures
US7290471B2 (en) 2005-11-15 2007-11-06 3M Innovative Properties Company Cutting tool having variable rotation about a y-direction transversely across a work piece for making microstructures
KR101312194B1 (en) * 2005-11-15 2013-09-27 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Apparatus for machining having variable and independent movement in an x-direction and a z-direction into and laterally along a work piece for making microstructures and a method for machining a work piece with the same
US7293487B2 (en) 2005-11-15 2007-11-13 3M Innovative Properties Company Cutting tool having variable and independent movement in an x-direction and a z-direction into and laterally along a work piece for making microstructures
US7328638B2 (en) 2005-12-27 2008-02-12 3M Innovative Properties Company Cutting tool using interrupted cut fast tool servo
US7677146B2 (en) 2006-05-10 2010-03-16 3M Innovative Properties Company Cutting tool using one or more machined tool tips in a continuous or interrupted cut fast tool servo
US7628100B2 (en) 2007-01-05 2009-12-08 3M Innovative Properties Company Cutting tool using one or more machined tool tips with diffractive features in a continuous or interrupted cut fast tool servo
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US10197713B2 (en) 2008-04-02 2019-02-05 3M Innovative Properties Company Light directing film and method for making the same
US9810817B2 (en) 2008-04-02 2017-11-07 3M Innovative Properties Company Light directing film and method for making the same
EP3408049A1 (en) * 2016-01-27 2018-12-05 J.G. Weisser Söhne GmbH & Co. KG Method for machining a workpiece, tool head for a lathe, and lathe
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CN116529005A (en) * 2021-11-30 2023-08-01 李承俊 Vibration cutting device for micro pattern production
CN117259865A (en) * 2023-09-27 2023-12-22 中冶华天南京工程技术有限公司 A single-excitation three-dimensional vibration cutting device and trajectory generation method
CN118583066A (en) * 2024-05-27 2024-09-03 北京工业大学 A micro air-floating probe based on chip motor drive
CN119566867A (en) * 2025-01-07 2025-03-07 杭州电子科技大学 A novel decoupled dual-axis elliptical vibration-assisted cutting platform and its control method

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