KR102153726B1 - Motion stage capable of aligning flat products in relatively precise locations - Google Patents

Abstract

A motion stage to which an air bearing is applied is disclosed. The disclosed motion stage includes a base; A first slider slidingly disposed on the base in a first direction; A second slider disposed on the first slider to be slidably disposed in a second direction perpendicular to the first direction; A third slider disposed on the second slider so as to be slidable along the first direction; A fourth slider disposed on the third slider to be slidable along the second direction; An upper posture adjustment unit disposed on the fourth slider; And a lower posture control unit disposed on the second slider, wherein the upper and lower posture control units control members fixed to the first equipment and the second equipment, respectively, to form a mutually parallel posture. It features.

Description

Motion Stage Capable of Aligning Flat Products IN RELATIVELY PRECISE LOCATIONS}

The present invention relates to a motion stage, and more particularly, to a motion stage capable of precisely adjusting the posture of equipment mounted on each posture control unit by having upper and lower posture control units that move vertically up and down.

When an element formed on a wafer is transferred to a glass panel using a motion stage, a vacuum chuck for gripping the wafer is mounted on the upper slider, and a clamper on which the glass panel is mounted on the lower slider may be installed.

In this case, the distance between the wafer held by the vacuum chuck and the glass panel clamped by the clamper is performed while maintaining a very narrow distance of several micrometers. At this time, in order to transfer the elements of the wafer to the glass panel, the vacuum chuck is continuously moved and repeated along the X-axis and Y-axis at a preset distance while mounted on the upper slider.

However, in the motion stage to which the conventional air bearing is applied, microscopic vibration may occur throughout the motion stage. In addition, when the gap between the wafer and the glass panel is very narrow, and the wafer and the glass panel cannot maintain a parallel posture in a working environment where the vacuum chuck needs to be moved, the wafer and the glass panel are damaged due to mutual contact or friction. There is.

An object of the present invention is to provide an upper and lower posture adjustment unit to each of the sliders moving in the X-axis and Y-axis and the sliders moving in the X-axis and Y-axis stacked on top of each other. It is to provide a motion stage that can be precisely adjusted so that the posture of each installed equipment can be adjusted in an absolute horizontal state or arranged in parallel with each other.

In order to achieve the above object, the present invention provides a motion stage to which an air bearing is applied, comprising: a base; A first slider slidingly disposed on the base in a first direction; A second slider disposed on the first slider to be slidably disposed in a second direction perpendicular to the first direction; A third slider disposed on the second slider so as to be slidable along the first direction; A fourth slider disposed on the third slider to be slidable along the second direction; An upper posture adjustment unit disposed on the fourth slider; And a lower posture control unit disposed on the second slider, wherein the upper and lower posture control units control members fixed to the first equipment and the second equipment, respectively, to form a mutually parallel posture. It provides a motion stage characterized in that.

The upper posture adjustment unit may include a first mounting plate on which the first equipment is mounted, first to third actuators for adjusting the first mounting plate to various angles, and a rotation angle of the first mounting plate. And a fourth actuator for adjusting the lower posture, wherein the lower posture control unit includes a second mounting plate on which a second device is mounted, and fifth to seventh actuators for adjusting the second mounting plate at various angles, and the It may include an eighth actuator for adjusting the rotation angle of the second mounting plate.

The first to third actuators may be piezo actuators.

Each of the first to third actuators may have one side fixed to a ring guide rotated by the eighth actuator and the other side connected to the first mounting plate through an elastic pin.

The first to third actuators may adjust the posture of the first mounting plate by pushing or pulling the elastic pin in the Z-axis direction.

Each of the elastic pins may be spaced apart from each other at the same angle.

The fourth actuator may include a first power transmission unit supporting the ring guide so as to be rotatable clockwise and counterclockwise while moving along an axis perpendicular to each other.

The fifth to seventh actuators may adjust the posture of the second mounting plate by pushing or pulling each of the three points of the second mounting plate in the Z-axis direction through the cam unit.

The cam unit may include: a cam member linearly moving by the actuator and having an inclined guide rail; And a cam follower fixed to the second mounting plate and slidably coupled to the guide rail.

The eighth actuator may include a second power transmission unit that rotates the second mounting plate in a clockwise and counterclockwise direction while moving along an axis perpendicular to each other.

The second mounting plate is supported so as to be movable at each of the four corners by a plurality of auxiliary supporting portions, each auxiliary supporting portion, a guide block; A pair of movable blocks stacked on the guide block and slidably coupled in a direction perpendicular to each other; And a circular bearing rotatably coupled to a movable block located on an upper side of the pair of movable blocks and connected to the second mounting plate.

1 is a perspective view showing a motion stage according to an embodiment of the present invention.
2 is a side view showing a motion stage according to an embodiment of the present invention.
3 is an exploded perspective view showing an upper posture adjustment unit of a motion stage according to an embodiment of the present invention.
4 is a plan view showing an upper posture adjustment unit of a motion stage according to an embodiment of the present invention.
5 is a bottom view showing an upper posture adjustment unit of a motion stage according to an embodiment of the present invention.
6 and 7 are views showing an upper posture adjustment unit in a state in which the frame is omitted.
8 is an exploded perspective view showing a lower posture adjustment unit of a motion stage according to an embodiment of the present invention.
9 and 10 are an exploded perspective view and a cross-sectional view respectively showing the coupling structure between the cam structure and the elastic plate shown in FIG.

Hereinafter, various embodiments will be described in more detail with reference to the accompanying drawings. The embodiments described in this specification may be variously modified. Certain embodiments may be depicted in the drawings and described in detail in the detailed description. However, specific embodiments disclosed in the accompanying drawings are only intended to facilitate understanding of various embodiments. Accordingly, the technical idea is not limited by the specific embodiments disclosed in the accompanying drawings, and it should be understood to include all equivalents or substitutes included in the spirit and scope of the invention.

Terms including ordinal numbers such as first and second may be used to describe various elements, but these elements are not limited by the above-described terms. The above-described terms are used only for the purpose of distinguishing one component from other components.

In the present specification, terms such as "comprises" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, but one or more other features. It is to be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof, does not preclude in advance. When a component is referred to as being "connected" or "connected" to another component, it is understood that it may be directly connected or connected to the other component, but other components may exist in the middle. Should be. On the other hand, when a component is referred to as being "directly connected" or "directly connected" to another component, it should be understood that there is no other component in the middle.

Meanwhile, a "module" or "unit" for a component used in the present specification performs at least one function or operation. And, the "module" or "unit" may perform a function or operation by hardware, software, or a combination of hardware and software.

In addition, in describing the present invention, when it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be abbreviated or omitted.

1 and 2 are perspective and side views illustrating a motion stage according to an embodiment of the present invention.

1 and 2, the motion stage 10 according to an embodiment of the present invention includes an upper posture adjustment unit 100 to which a first device may be mounted, and a lower posture to which a second device may be mounted. It may include an adjustment unit 200. The motion stage 10 according to an embodiment of the present invention may linearly move the upper posture control unit 100 along the X and Y axes, and move the lower posture control unit 200 linearly along the X and Y axes. I can make it.

The motion stage 10 according to an embodiment of the present invention includes a base 20, a lower linear moving part disposed above the base 20, an upper linear moving part disposed above the lower linear moving part, and the upper and It may include first and second posture adjustment units 100 and 200 respectively disposed on the lower linear moving part.

The lower linear movable part is a first slider slidably coupled to a pair of first X-axis guide rails 31 arranged parallel to the upper surface of the base 20, and a pair of first X-axis guide rails 31. 33), a pair of first Y-axis guide rails 41 disposed on the upper surface of the first slider 33 and perpendicular to the first X-axis guide rail 31, and a pair of first Y-axis guide rails ( A second slider 43 slidably coupled to 41) may be included.

The upper linear moving part is slidably coupled to a pair of second X-axis guide rails 51 disposed parallel to the upper surface of the second slider 43, and a third pair of second X-axis guide rails 51. The slider 53, a pair of second Y-axis guide rails 61 disposed on the upper surface of the third slider 53 and perpendicular to the second X-axis guide rail 51, and a pair of second Y-axis guides It may include a fourth slider 63 slidably coupled to the rail 61.

In this case, each slider is slidably coupled to each guide rail by an air bearing. Here, the air bearing corresponds to a known technology formed between the slider and the guide rail by injecting air at a predetermined pressure between the slider and the guide rail, and can minimize the frictional force between the slider and the guide rail (almost zero convergence). have.

Referring to FIG. 2, the upper posture control unit 100 and the lower posture control unit 200 may have a first device 1 and a second device 3 installed on each side facing each other. To secure a space for installing the first and second equipment (1, 3) between the upper posture control unit 100 and the lower posture control unit 200, as shown in Figure 2, the upper posture control unit 100 and The lower posture adjustment unit 200 is disposed at regular intervals.

The first and second equipments 1 and 3 mounted on the upper and lower posture adjustment units 100 and 200 are not limited to any one type of equipment, and various equipment may be applied according to a task to be performed.

For example, when the motion stage 10 according to an embodiment of the present invention is used for transferring an element formed on a wafer to a glass panel, the first equipment 1 mounted on the upper posture adjustment unit 100 May be a vacuum chuck for holding the wafer 5, and the second equipment 3 mounted on the lower posture adjustment unit 200 may be a clamper on which the glass panel 7 is mounted. In this way, products (wafers, glass panels) fixed by each of the equipments 1 and 3 may have a flat shape.

In this case, the present invention is to solve the above-described conventional problem, the wafer 5 and the glass panel 7 are placed in an absolute horizontal posture (i.e., one reference plane (the upper surface of the base) in parallel) during the transfer operation. Posture) is essential. The motion stage 10 according to an embodiment of the present invention includes an upper posture adjustment unit 100 equipped with the first equipment 1 and a lower posture control unit 200 equipped with the second equipment 3. It can be configured to adjust the posture inclined in the direction and angle of.

The upper and lower posture adjustment units 100 and 200 adjust the Euler angle of the first and second equipment 1 and 3, respectively, and rotate in the theta (θ) direction (the direction rotating based on the Z-axis direction). By adjusting the angle, the posture of the structure (wafer, glass panel) fixed to the first and second equipment can be adjusted to an absolute horizontal posture.

Hereinafter, the upper posture control unit 100 and the lower posture control unit 200 will be sequentially described with reference to FIGS. 2 to 10.

First, the structure and operation of the upper posture adjustment unit 100 will be described with reference to FIGS. 3 to 7.

3 to 5 are an exploded perspective view, a plan view, and a bottom view showing an upper posture control unit of a motion stage according to an embodiment of the present invention, and FIGS. 6 and 7 show an upper posture control unit in a state where a frame is omitted. These are the drawings.

The upper posture adjustment unit 100 may be coupled to a fourth slider 63 having a pair of both sides as shown in FIG. 1. Accordingly, the upper posture adjustment unit 100 may be disposed between the fourth sliders 63 without being positioned above the fourth slider 63, thereby lowering the overall height of the motion stage 10. It can be made more compact than that

The upper posture adjustment unit 100 is for adjusting the frame 111, the first mounting plate 130 on which the first equipment (see 1, 2) is mounted, and the first mounting plate 130 at various angles. The first to third actuators 150, 160, and 170, and a fourth actuator 180 for adjusting the rotation angle of the first mounting plate 130 may be included.

Here, that the first mounting plate 130 is adjusted at various angles means that the first mounting plate 130 is inclined at various angles so that the first mounting plate 130 is disposed in parallel with each other while maintaining the same distance with respect to the second mounting plate 230. It can mean. In addition, various angles may be implemented by adjusting the Euler angle, which is a three-axis rotation angle.

Referring to FIG. 3, the frame 111 has a substantially rectangular shape, and first to fourth actuators 150, 160, 170, and 180 may be disposed inside. The frame 111 may have first and second upper covers 113a and 113b disposed thereon to protect the first to fourth actuators 150, 160, 170, and 180 disposed therein.

The first upper cover 113a may be fastened to the frame 111, and the second upper cover 113b may be fastened to the circular fixing part 112 inside the frame 111.

Inside the circular fixing part 112, a circular support 114 having a diameter smaller than that of the circular fixing part is fixedly disposed, and a ring guide 115 having a diameter smaller than that of the circular support is arranged rotatably inside the circular support part 114 Can be.

Referring to FIG. 4, first to third actuators 150, 160, and 170 are disposed at a predetermined angle along the inner circumferential surface of the ring guide 115. In this case, the elastic pins 158, 168, and 178 connected to the first to third actuators 150, 160, and 170, respectively, may be arranged at the same angle α. In this embodiment, it is described that the three elastic pins 158, 168, and 178 are arranged at the same angle, but it is not necessarily the same angle, and the rotation center of the three elastic pins 158, 168, and 178 corresponds to each elastic pin. It suffices if it is arranged so that it can be located inside the connecting virtual triangle.

As the three elastic pins 158, 168, and 178 move along the Z-axis direction according to the operation of the connected first to third actuators 150, 160, 170, the first mounting plate 116 may be inclined at various angles. That is, when the three elastic pins 158, 168, and 178 move along the Z-axis direction, the Euler angle of the first mounting plate 116 may be adjusted.

The fourth actuator 180 may be disposed adjacent to the outer side of the circular fixing part 112. As the fourth actuator 180 is connected to the ring guide 115 through the first power transmission unit 181, the ring guide 115 may rotate clockwise and counterclockwise around the Z-axis.

Referring to FIG. 5, the first mounting plate 116 connected to the three elastic pins 158, 168, and 178 may be located inside the ring guide 115.

When the first mounting plate 116 is disposed at a predetermined distance from the inner circumferential surface of the ring guide 115, the first to third actuators 150, 160, and 170 adjust the posture to have various inclination angles. ) Does not interfere.

The structures of the first to fourth actuators 150, 160, 170 and 180 will be described with reference to FIGS. 6 and 7.

The first to third actuators 150, 160, and 170 may be formed of piezo actuators. In the present embodiment, since the first to third actuators 150, 160, and 170 all have the same structure, the configuration of only the first actuator 150 will be described below.

6, the first actuator 150 has one side 152a fixed to the first support bracket 153 mounted in an approximately horizontal direction on the inner circumferential surface of the ring guide 115, and the other side 152b is an elastic pin It is coupled to the second support bracket 153 on which the 158 is mounted.

The first actuator 150 operates such that the other side 152b is inclined at a predetermined angle in an upward or downward direction based on one side 152a, and may move the elastic pin 158 in the Z-axis direction.

The second support bracket 153 is a connecting member that interconnects the first actuator 150 and the elastic pin 158. One end of the elastic pin 158 may be fixed to the second support bracket 153 and the other end may be fixed to the first mounting plate 116.

When the posture of the first mounting plate 116 is adjusted, the elastic pin 158 moves upward when one side of the first mounting plate 116 on which the elastic pin 158 is disposed moves upward, the first actuator 150 ) It is preferable that it is made of an elastic material that can be bent to minimize the load transmitted to it.

As described above, since the first to third actuators 150, 160, and 170 are connected to the elastic pins 158, 168, and 178, respectively, the posture of the first mounting plate 116 can be adjusted to various inclination angles.

6 and 7, the fourth actuator 180 may rotate the ring guide 115 clockwise or counterclockwise through the first power transmission unit 181. The angle at which the ring guide 115 rotates may be, for example, about ±1°. The fourth actuator 180 is a D.C. It can be a geared motor.

As the first power transmission unit 181 is connected to the rotation shaft of the fourth actuator 180 in a ball screw method, a first movable block 183a capable of linear reciprocating motion and a second movable slidably connected to the first movable block It may include a block 183b and a first connector 185a that is coupled to the second movable block 183b and moves together with the second movable block.

In addition, the first power transmission unit 181 includes a third movable block 185b slidably connected to the first connector, a circular bearing 186 rotatably disposed under the third movable block, and one side is a circular bearing. The second connector 187 may be connected to and the other side connected to one side of the ring guide 115.

The second movable block 183b connected to one side of the first connector 185a and the third movable block 185b connected to the other side of the first connector 185a may slide in a direction orthogonal to each other.

The first power transmission unit 181 may rotate the ring guide 115 in a clockwise or counterclockwise direction by using the power of the fourth actuator 180 when the fourth actuator 180 is operated.

According to this structure, the upper posture control unit 100 may operate the first to fourth actuators 150, 160, 170, and 180 to adjust the first mounting plate 116 to a desired posture.

Hereinafter, the configuration and operation of the lower posture adjustment unit 200 will be described with reference to the drawings.

8 is an exploded perspective view showing a lower posture control unit of a motion stage according to an embodiment of the present invention, and FIGS. 9 and 10 are exploded perspective views and cross-sectional views respectively showing a coupling structure between the cam structure and the elastic plate shown in FIG. 8 .

Referring to FIG. 8, the lower posture control unit 200 may be disposed on the upper surface of the second slider 43 to correspond to the upper posture control unit 100. The height of the lower posture control unit 200 is preferably manufactured in consideration of having a predetermined distance from the bottom of the upper posture control unit 100 so that various equipment can be mounted on the first and second mounting plates 116 and 216 Do.

The lower posture adjustment unit 200 includes a base 210 disposed on the upper surface of the second slider 43, a second mounting plate 216, fifth to eighth actuators 250, 260, 270, 280 installed on the base, and a first To fourth auxiliary support portions 291, 292, 293, and 294.

The second mounting plate 216 may be disposed on the upper side of the support plate 213 which is elastically connected to the base 210 by a plurality of elastic pieces 214.

The second mounting plate 216 is coupled to a ring guide 215 whose center portion is rotated clockwise and counterclockwise, and the four corner sides are connected by first to fourth auxiliary supports 291, 292, 293, and 294, respectively.

The ring guide 215 may be rotatably coupled to the outer periphery of the rotation guide 212 connected to the central part of the support plate 216. Accordingly, the ring guide 215 may be indirectly connected to the support plate 216 through the rotation guide 212.

In addition, when one side of the second mounting plate 216 is connected to the second power transmission unit 281, when the power generated from the eighth actuator 280 is transferred through the second power transmission unit 281, the ring guide ( 215) can be rotated clockwise or counterclockwise. In this case, the rotation angle of the second mounting plate 216 may be about ±1°, similar to the rotation angle of the ring guide 115 of the first mounting plate 116.

The fifth to seventh actuators 250, 260, and 270 are D.C. It may be a geared motor, and the second mounting plate 216 can be adjusted to be inclined at various angles by pushing or pulling the three points of the second mounting plate 216 in the Z-axis direction through the cam unit and plates 258, 268 and 278, respectively. . That is, the Euler angle of the second mounting plate 216 may be adjusted so that one side of the three elastic plates 258, 268, and 278 is bent along the Z-axis direction and the second mounting plate 216 can be changed to various inclination angles.

As the fifth actuator 250 is disposed along one side of the base 210, the fifth actuator 250 may be disposed opposite the eighth actuator 280. The sixth and seventh actuators 260 and 270 may be disposed along the other two sides of the base 210 facing each other, respectively.

Three elastic plates 278 operated by the fifth to seventh actuators 250, 260, and 270 are disposed on each side of the support plate 213 so as to be adjacent to each actuator. The elastic plate 278 is preferably made of a material having elasticity so that it can be bent by an external force and can be restored to a circular shape.

Since the cam units connecting the fifth to seventh actuators 250, 260, and 270 and the elastic plates 258, 268, and 278 are all the same, only the cam unit and the elastic plate 258 related to the fifth actuator 250 will be described below. .

Referring to FIG. 9, the cam unit disposed between the fifth actuator 250 and the elastic plate 258 includes a fourth movable block 251 connected to the rotation shaft 250a of the fifth actuator 250 in a ball screw manner. , A lifting block 255 that moves up and down according to the linear movement of the fourth movable block, a tilt plate 256 disposed above the lifting block, and a spacer 257 disposed between the tilt plate and the bottom surface of the elastic plate. I can. Here, if the fourth movable block 251 is a cam member, the elevating block 255 may be a cam follower operating by cam contacting the cam member.

The fourth movable block 251 has a guide rail 253 inclined toward one side along the moving direction of the movable block 251 on the upper side. The guide rail 253 may be slidably coupled to the lifting block 255.

9 and 10, the tilt plate 256 is fastened to a pair of projections (255a, 255b) of the lifting block 255, respectively, by screws (254a, 254b) on both sides, the center screw (254c) ) Is fastened to one side (258b) of the elastic plate 258. Accordingly, when the lifting block 255 moves up and down, one side 258b of the elastic plate 258 is pushed or pulled and is raised and lowered in the same direction as the moving direction of the lifting block 255.

The tilt plate 256 is preferably formed of an elastic material so as to absorb a load generated when the elastic plate 258 is bent in association with the lifting operation of the lifting block 255.

Between the pair of protrusions 255a and 255b of the lifting block 255, a space part 255c for securing a space so as not to interfere with the bending operation of the tilt plate 256 may be formed.

The elastic plate 258 may have one side 258a connected to the lifting block 255 and the other side 258b connected to each side of the support plate 213 so that one side 258a may be bent upward and downward.

Through this configuration, as the fifth to seventh actuators 250, 260, and 270 operate, the elastic plates 258, 268, and 278 push or pull the three points of the second mounting plate 216 through each cam unit, so that the second mounting plate The Euler angle of 216 can be adjusted.

Referring to FIG. 8, the eighth actuator 280 may rotate the second mounting plate 216 clockwise and counterclockwise through the second power transmission unit 281.

The second power transmission unit 281 is connected to the fifth movable block 280b connected to the rotation shaft 280a of the eighth actuator 280 in a ball screw manner, and the fifth movable block 280b to reciprocate in a linear direction. The sixth movable block 282 to be moved, the seventh movable block 283 connected to the sixth movable block so as to be slidable in a direction orthogonal to the direction in which the sixth movable block moves, and the seventh movable block rotatably A connected circular bearing 285 and a second connector 287 having one side connected to the circular bearing and the other side connected to one end of the second mounting plate 216 may be included.

Under this structure, the second power transmission unit 281 transmits the power of the eighth actuator 280 to the second mounting plate 216 when the eighth actuator 280 is operated to transfer the second mounting plate 216. It can be rotated clockwise and counterclockwise.

On the other hand, the first to fourth auxiliary support portions 291, 292, 293, 294 support the four corner sides of the second mounting plate 216 to prevent sagging of the second mounting plate 216, and at the same time, the second mounting plate 216 It can rotate smoothly.

Since the structures of the first to fourth auxiliary support portions 291, 292, 293, and 294 are all the same, only the structure of the first auxiliary support portion 291 will be described below.

The first auxiliary support 291 includes a guide block 291a fixed to the upper surface of the base 210, an eighth movable block 291b slidably coupled to an upper portion of the guide block, and an eighth movable block. It includes a ninth movable block 291c slidably coupled in a direction perpendicular to the moving direction of the eighth movable block, and a circular bearing 291d rotatably coupled to the ninth movable block and connected to the second mounting plate. I can.

The first auxiliary support 291 configured as described above may support the second mounting plate 216 so that it can move smoothly without interference when rotating.

As described above, according to the present invention, the air bearing is applied and the sliders moving in the X and Y axes and the sliders moving in the X and Y axes stacked thereon are provided with upper and lower posture adjustment units 100 and 200, respectively. , It is possible to adjust the posture of each equipment mounted on each posture adjustment unit to an absolute horizontal state, or to be arranged in parallel with each other.

In some cases, the second posture control unit 200 may of course have the same configuration as the first posture control unit 100 described above.

In the above, preferred embodiments of the present invention have been illustrated and described, but the present invention is not limited to the specific embodiments described above, and the present invention is generally in the technical field to which the present invention belongs without departing from the gist of the present invention claimed in the claims. Of course, various modifications may be implemented by those skilled in the art, and these modifications should not be understood individually from the technical idea or prospect of the present invention.

100: upper posture adjustment unit
115: ring guide
116: first mounting plate
150,160,170,180: first to fourth actuators
158,168,178: elastic pin
181: first power transmission unit
200: lower posture adjustment unit
215: ring guide
216: second mounting plate
258,268,278: elastic plate
250,260,270,280: fifth to eighth actuators
281: second power transmission unit

Claims (11)

In the motion stage with air bearing applied,
Base;
A first slider slidingly disposed on the base in a first direction;
A second slider disposed on the first slider to be slidably disposed in a second direction perpendicular to the first direction;
A third slider disposed on the second slider so as to be slidable along the first direction;
A fourth slider disposed on the third slider to be slidable along the second direction;
An upper posture adjustment unit disposed on the fourth slider; And
Includes; a lower posture adjustment unit disposed on the second slider,
The upper and lower posture adjustment units are adjusted so that the members respectively fixed to the first and second equipment mounted thereon form a mutually parallel posture,
The upper posture adjustment unit may include a first mounting plate on which the first equipment is mounted, first to third actuators for adjusting the first mounting plate to various angles, and a rotation angle of the first mounting plate. Includes; a fourth actuator for
The lower posture adjustment unit includes a second mounting plate on which the second equipment is mounted, fifth to seventh actuators for adjusting the second mounting plate to various angles, and adjusting a rotation angle of the second mounting plate. Includes; an eighth actuator for,
The first to third actuators are piezo actuators, each of which one side is fixed to a ring guide rotated by the eighth actuator, and the other side is connected to the first mounting plate through an elastic pin. delete delete delete The method of claim 1,
The first to third actuators push or pull the elastic pin in the Z-axis direction. The method of claim 1,
Each of the elastic pins is a motion stage, characterized in that the spaced apart from each other at the same angle. The method of claim 1,
The fourth actuator includes a first power transmission unit configured to support the ring guide in a clockwise and counterclockwise direction while moving along an axis perpendicular to each other. The method of claim 1,
The fifth to seventh actuators adjust the posture of the second mounting plate by pushing or pulling each of the three points of the second mounting plate in the Z-axis direction through a cam unit. The method of claim 8,
The cam unit,
A cam member linearly moving by the actuator and having an inclined guide rail; And
And a cam follower fixed to the second mounting plate and slidably coupled to the guide rail. The method of claim 1,
The eighth actuator includes a second power transmission unit that rotates the second mounting plate in a clockwise and counterclockwise direction while moving along an axis perpendicular to each other. The method of claim 1,
The second mounting plate is supported so that the four corner sides are movable, respectively, by a plurality of auxiliary support portions,
Each auxiliary support,
Guide block;
A pair of movable blocks stacked on the guide block and slidably coupled in a direction perpendicular to each other; And
And a circular bearing rotatably coupled to a movable block located on an upper side of the pair of movable blocks and connected to the second mounting plate.

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