KR101214361B9 - Plasma generation apparatus - Google Patents

Plasma generation apparatus

Info

Publication number: KR101214361B9
Authority: KR; South Korea
Prior art keywords: generation apparatus; plasma generation; plasma; generation
Prior art date: 2005-08-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

KR1020050075064A

Other languages

Korean (ko)

Other versions

KR101214361B1 (en

KR20070020798A (en

Inventor

권기청

황철주

Original Assignee

주성엔지니어링(주)

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-08-17

Filing date

2005-08-17

Publication date

2025-01-10

2005-08-17 Application filed by 주성엔지니어링(주) filed Critical 주성엔지니어링(주)

2005-08-17 Priority to KR1020050075064A priority Critical patent/KR101214361B1/en

2007-02-22 Publication of KR20070020798A publication Critical patent/KR20070020798A/en

2012-12-21 Application granted granted Critical

2012-12-21 Publication of KR101214361B1 publication Critical patent/KR101214361B1/en

2025-01-10 Publication of KR101214361B9 publication Critical patent/KR101214361B9/en

2025-08-17 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
- H01J37/3211—Antennas, e.g. particular shapes of coils
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Plasma & Fusion (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Drying Of Semiconductors (AREA)
Plasma Technology (AREA)

KR1020050075064A 2005-08-17 2005-08-17 Plasma generation apparatus Expired - Lifetime KR101214361B1 (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
KR1020050075064A KR101214361B1 (en)	2005-08-17	2005-08-17	Plasma generation apparatus

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
KR1020050075064A KR101214361B1 (en)	2005-08-17	2005-08-17	Plasma generation apparatus

Publications (3)

Publication Number	Publication Date
KR20070020798A KR20070020798A (en)	2007-02-22
KR101214361B1 KR101214361B1 (en)	2012-12-21
KR101214361B9 true KR101214361B9 (en)	2025-01-10

Family

ID=43653074

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
KR1020050075064A Expired - Lifetime KR101214361B1 (en)	2005-08-17	2005-08-17	Plasma generation apparatus

Country Status (1)

Country	Link
KR (1)	KR101214361B1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
KR101003382B1 (en) *	2008-02-13	2010-12-22	주식회사 유진테크	Plasma treatment apparatus and method
KR101013357B1 (en) *	2008-07-23	2011-02-14	한국표준과학연구원	High Power Plasma Generator
JP6647180B2 (en) *	2016-09-09	2020-02-14	東京エレクトロン株式会社	Antenna device, plasma generating device using the same, and plasma processing device
KR102015381B1 (en)	2017-03-29	2019-08-29	세메스 주식회사	Plasma generating device and apparatus for treating substrate comprising the same
JP2024531964A (en) *	2021-08-20	2024-09-03	東京エレクトロン株式会社	Apparatus for plasma processing

2005
- 2005-08-17 KR KR1020050075064A patent/KR101214361B1/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
KR101214361B1 (en)	2012-12-21
KR20070020798A (en)	2007-02-22

Legal Events

Date	Code	Title	Description
2005-08-17	PA0109	Patent application	St.27 status event code: A-0-1-A10-A12-nap-PA0109
2007-02-22	PG1501	Laying open of application	St.27 status event code: A-1-1-Q10-Q12-nap-PG1501
2009-10-12	R18-X000	Changes to party contact information recorded	St.27 status event code: A-3-3-R10-R18-oth-X000
2010-07-14	A201	Request for examination
2010-07-14	P11-X000	Amendment of application requested	St.27 status event code: A-2-2-P10-P11-nap-X000
2010-07-14	P13-X000	Application amended	St.27 status event code: A-2-2-P10-P13-nap-X000
2010-07-14	PA0201	Request for examination	St.27 status event code: A-1-2-D10-D11-exm-PA0201
2010-08-12	R18-X000	Changes to party contact information recorded	St.27 status event code: A-3-3-R10-R18-oth-X000
2011-08-29	E902	Notification of reason for refusal
2011-08-29	PE0902	Notice of grounds for rejection	St.27 status event code: A-1-2-D10-D21-exm-PE0902
2011-09-07	E13-X000	Pre-grant limitation requested	St.27 status event code: A-2-3-E10-E13-lim-X000
2011-09-07	P11-X000	Amendment of application requested	St.27 status event code: A-2-2-P10-P11-nap-X000
2011-09-07	P13-X000	Application amended	St.27 status event code: A-2-2-P10-P13-nap-X000
2012-03-13	E902	Notification of reason for refusal
2012-03-13	PE0902	Notice of grounds for rejection	St.27 status event code: A-1-2-D10-D21-exm-PE0902
2012-05-07	E13-X000	Pre-grant limitation requested	St.27 status event code: A-2-3-E10-E13-lim-X000
2012-05-07	P11-X000	Amendment of application requested	St.27 status event code: A-2-2-P10-P11-nap-X000
2012-05-07	P13-X000	Application amended	St.27 status event code: A-2-2-P10-P13-nap-X000
2012-09-21	E701	Decision to grant or registration of patent right
2012-09-21	PE0701	Decision of registration	St.27 status event code: A-1-2-D10-D22-exm-PE0701
2012-12-14	GRNT	Written decision to grant
2012-12-14	PR0701	Registration of establishment	St.27 status event code: A-2-4-F10-F11-exm-PR0701
2012-12-14	PR1002	Payment of registration fee	St.27 status event code: A-2-2-U10-U11-oth-PR1002 Fee payment year number: 1
2012-12-21	PG1601	Publication of registration	St.27 status event code: A-4-4-Q10-Q13-nap-PG1601
2013-07-15	PN2301	Change of applicant	St.27 status event code: A-5-5-R10-R13-asn-PN2301 St.27 status event code: A-5-5-R10-R11-asn-PN2301
2015-08-25	FPAY	Annual fee payment	Payment date: 20150825 Year of fee payment: 4
2015-08-25	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 4
2016-09-01	P22-X000	Classification modified	St.27 status event code: A-4-4-P10-P22-nap-X000
2016-09-12	FPAY	Annual fee payment	Payment date: 20160912 Year of fee payment: 5
2016-09-12	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 5
2017-07-23	P22-X000	Classification modified	St.27 status event code: A-4-4-P10-P22-nap-X000
2017-08-31	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 6
2018-08-17	FPAY	Annual fee payment	Payment date: 20180817 Year of fee payment: 7
2018-08-17	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 7
2019-07-18	R18-X000	Changes to party contact information recorded	St.27 status event code: A-5-5-R10-R18-oth-X000
2019-08-26	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 8
2020-08-21	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 9
2021-11-26	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 10
2022-08-22	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 11
2022-08-29	R18-X000	Changes to party contact information recorded	St.27 status event code: A-5-5-R10-R18-oth-X000
2023-08-21	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 12
2024-08-26	PR1001	Payment of annual fee	St.27 status event code: A-4-4-U10-U11-oth-PR1001 Fee payment year number: 13
2024-11-28	P14-X000	Amendment of ip right document requested	St.27 status event code: A-5-5-P10-P14-nap-X000
2024-11-28	R15-X000	Change to inventor requested	St.27 status event code: A-5-5-R10-R15-oth-X000
2024-12-02	P16-X000	Ip right document amended	St.27 status event code: A-5-5-P10-P16-nap-X000
2024-12-02	Q16-X000	A copy of ip right certificate issued	St.27 status event code: A-4-4-Q10-Q16-nap-X000
2024-12-02	R16-X000	Change to inventor recorded	St.27 status event code: A-5-5-R10-R16-oth-X000
2025-01-10	PG1701	Publication of correction	St.27 status event code: A-5-5-P10-P19-oth-PG1701 Patent document republication publication date: 20250110 Republication note text: Request for Correction Notice (Document Request) Gazette number: 1012143610000 Gazette reference publication date: 20121221
2025-08-18	PC1801	Expiration of term	St.27 status event code: N-4-6-H10-H14-oth-PC1801 Not in force date: 20250818 Ip right cessation event data comment text: Termination Category : EXPIRATION_OF_DURATION
2026-01-06	P22-X000	Classification modified	St.27 status event code: A-4-4-P10-P22-nap-X000

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