JPWO1994009944A1 - Edge polishing machine - Google Patents
Edge polishing machineInfo
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- JPWO1994009944A1 JPWO1994009944A1 JP6-510886A JP51088694A JPWO1994009944A1 JP WO1994009944 A1 JPWO1994009944 A1 JP WO1994009944A1 JP 51088694 A JP51088694 A JP 51088694A JP WO1994009944 A1 JPWO1994009944 A1 JP WO1994009944A1
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Abstract
(57)【要約】本公報は電子出願前の出願データであるため要約のデータは記録されません。 (57) [Abstract] This publication contains application data prior to electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】 端面研磨機 技術分野 本発明は光ファイバを固定したフェルールの先端を、光ファイン(端面を含む凸 球面に研磨する研磨装置に関するものである。[Detailed Description of the Invention] End-Face Polishing Machine Technical Field The present invention relates to a polishing machine for polishing the tip of a ferrule, to which an optical fiber is attached, into an optical fine (including end face) convex spherical surface.
背景技術 光コ2クタの接続点、すなわち、ファイ/s+突合せ端面での反射C二よる戻り 光がレーザ・ダイオード走用いた超高速通信で雑音や否を増加させる問題が起こ る。この端面での反射を低減するためC二、フェルール端面をファイバ中心に凸 球面加工を行い、対向接続時にこの端面同士を空気層のない状煎で宙着させる( Physical Contact)PC端面形成技術が広く用いられている。Background Technology In ultra-high-speed communications using laser diodes, reflections at the fiber end face of an optical connector increase noise and signal quality. To reduce reflections at the end face, a widely used technology is PC (Physical Contact) end face formation, in which the ferrule end face is machined into a convex spherical shape centered on the fiber, allowing the end faces to be spaced apart without any air gaps when connected.
この凸球面を得るために、軟質弾性材質を用いた平板の上面に消い研摩ソートを 貼り付けて研磨板を構成し、この研磨板に被研磨フェルールの先端面を押し付け ながら、円弧状の軌跡を描いて運動させる。この際、研磨板は弾性変形してたわ み、このたわみ現象を利用して、フェルールならびファイバ端面に同時に正確に 凸球面状に形成される。To achieve this convex spherical surface, a polishing plate is formed by attaching a polishing sheet to the top surface of a flat plate made of a soft, elastic material. The end face of the ferrule to be polished is pressed against the polishing plate, which moves along an arc. During this process, the polishing plate elastically deforms and bends, and this bending phenomenon is used to simultaneously and accurately form a convex spherical surface on both the ferrule and the fiber end face.
他方、試料と研磨板の運動機構は、端面の仕上り精度、研磨時間に大きな影響を 与えるため、研摩板は良(知られた平行平面の加工物を研磨する機械であるラン プ盤の機構が用いられる。すなわち、加工物であるフェルールを静止しておき、 遊星歯車と駆動モータとにより研磨板の公転と自転を同時に行うことで、フェル ールを研摩板に当接させて一様な軌跡を描くラフビッグ運動が与えられる。On the other hand, the motion mechanism of the sample and polishing plate has a significant impact on the finish accuracy of the end face and the polishing time. Therefore, the polishing plate uses a ramp mechanism, a well-known machine for polishing parallel workpieces. That is, the workpiece (ferrule) is kept stationary, and the polishing plate is rotated and revolved simultaneously by a planetary gear and a drive motor, causing the ferrule to abut against the polishing plate, creating a rough-and-bent motion that traces a uniform trajectory.
この結果、フェルールは希望するファイバを頂点とする凸球面シこ、しかも同時 に能率よく加工することができる。As a result, the ferrule has a convex spherical shape with the desired fiber at its apex, and can be efficiently processed at the same time.
従来例として、USパテント49793340ptical Fiber en d−facaPulishing devrce M、 Takahashi Dec、 25+ 1990が開示されているにの機構は、自転円盤の同心円上 で回転する偏心盤を持ち、この偏心盤に公転用のモータの回転を伝達するtiX 歯車を持ち、これを研磨盤に結合させて研磨盤を自転および公転させるものであ る。As a prior art example, US Patent No. 49793340, "Practical Fiber End-Facing Polishing Devrce M, Takahashi, December 25, 1990," discloses a mechanism that has an eccentric disk that rotates concentrically with a rotating disk, and a tIX gear that transmits the rotation of a revolution motor to this eccentric disk. This gear is then coupled to the polishing disk, causing the polishing disk to rotate and revolve.
ここで、公転機構に遊星歯車を用いているため、公転用モータを停止しても、自 転軸に回転を与えると遊星歯車は停止した公転用モータ歯車に沿って噛み合いな がら回転し、結果的に研磨盤は公転運動をしてしまう。このため、研磨条件に仕 上げ精度や、加工時間等最適の自転と公転の回転数を設定することに制約が住じ るという課題があった。Because the revolution mechanism uses planetary gears, even when the revolution motor is stopped, the planetary gears continue to rotate while meshing with the stopped revolution motor gear when rotation is applied to the rotation shaft, resulting in the grinding disc revolving. This creates limitations on setting the optimal rotation and revolution speeds for polishing conditions such as finishing accuracy and processing time.
さらに、支持板に固定された複数の加工物133は、研磨板に正確に垂直当接さ せ希望するファイバを頂点とした凸球面を得ることが要求される。しかし、図6 では、試料を加える支持板131;よ支持台Aに圧接部材Sを介して固定されて いるため、圧接部材Sと支持板131のハメアイとネジ締結136による垂直セ ンティング誤差が必ず生し、フェルールが斜めに当接されるという欠点がある。Furthermore, the multiple workpieces 133 fixed to the support plate must be precisely perpendicularly abutted against the polishing plate to obtain a convex spherical surface with the desired fiber at the apex. However, in Figure 6, the support plate 131 on which the sample is placed is fixed to the support stage A via the pressure contact member S. This inevitably results in a perpendicular centering error due to the fit between the pressure contact member S and the support plate 131 and the screw fastening 136, resulting in the ferrule being abutted at an angle.
この結果、フェルール仕上面は、理想的なファイバの中心を頂点とする凸球面か ら若干ずれてしまい、コネクタ接続性能に大きな影響を及ぼすこととなる。As a result, the finished surface of the ferrule deviates slightly from the ideal convex spherical surface with its apex at the center of the fiber, which significantly affects the connector connection performance.
そこで、この発明の目的は、従来のこのような課題を解決するため、研磨盤の自 転運動、公転運動の回転数をそれぞれ独立して設定できる研磨機を得ること、さ らに、被研磨物を研磨盤に正確に当接できるm構を導入することとした。Therefore, the object of the present invention is to solve the above-mentioned problems of the prior art by providing a polishing machine in which the rotational and revolution speeds of the polishing disc can be set independently, and by introducing a mechanism that allows the workpiece to be accurately brought into contact with the polishing disc.
発明の開示 本発明において、複数の研磨試料であるフェルール端面それぞれに常に同し加工 圧が作用させなから軟性体材質と研磨シートを張りつけた研磨盤の上に静止、当 接させ、該研磨盤を公転と自転をそれぞれ独立で回転できる運動機構を備えるこ とで、研磨盤は弾性変形してたわみ、このたわみ現象と試料が一様な軌跡を描く ラッピング運動の採用により、各試料をファイン\を頂点とする凸球面に加工す ることとした。Disclosure of the Invention In this invention, the same processing pressure is constantly applied to each of the ferrule end faces of multiple polishing samples. The polishing plate is made of a soft material and is attached to an abrasive sheet. The polishing plate is equipped with a motion mechanism that can independently rotate and revolve. This causes the polishing plate to elastically deform and bend. By employing this bending phenomenon and a lapping motion in which the sample traces a uniform trajectory, each sample is polished to a convex spherical surface with a fine point at its apex.
具体的には、ファイバを固定した複数のフェルール等の棒状部材を固定する固定 治具盤と、固定治具盤を支持と研磨盤へ棒状部材を垂直当接する支持機構と、棒 状部材を研磨する研磨部材を設けた研磨盤とで構成する単一ユニットを複数備え た多連型端面研磨機において、研磨盤にそれぞれ独立した自転、公転をさせるた めの駆動機構を備え、かつ、複数フェルールを研摩盤に正確に垂直当接する1こ め、フェルール固定治具量をピン・ポイント軸受機構により、あらかしめ平面度 の出ている研9盤にならって加工することとした。Specifically, the multiple end face polishing machine is equipped with multiple single units, each consisting of a fixture plate for fixing rod-shaped components such as multiple ferrules with attached fibers, a support mechanism for supporting the fixture plate and orthogonally abutting the rod-shaped components against the polishing plate, and a polishing plate equipped with a polishing member for polishing the rod-shaped components. The machine is equipped with a drive mechanism for independently rotating and revolving the polishing plates, and the ferrule fixtures are processed using a pin-point bearing mechanism, modeled after a polishing plate with pre-set flatness, to precisely orthogonally abut the multiple ferrules against the polishing plate.
以上の手段により、研磨仕上り性能の一層の向上と、簡便な工法で凸球面加工で きる研2機を量産することが可能となった。By using the above methods, it has become possible to further improve the polishing finish performance and mass-produce a polishing machine that can process convex spherical surfaces using a simple method.
発明を実施するための最良の形態 この発明の実施例を図1〜図5に基づいて単一ユニ・ノドの端面研磨機について 説明する。BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described with reference to Figures 1 through 5, which illustrate a single-throat end face grinder.
図1はこの発明の平面図、図2はこの発明の断面図である。自転用モータlによ り回転軸中心に自転させられる第1の自転伝達盤2がモータ1の軸に固定され、 さらに第1の自転伝達盤2の回転中心軸の同心円上に複数の第1のピン3が固定 されている。第1のピン3に回転自在に挿入された回転伝達盤4には、それぞれ 同一の偏心位置に孔が設けられており、それぞれの孔に対応するように回転自在 に挿入された第2のピン5が第2の自転伝達盤6に固定されている。Figure 1 is a plan view of the present invention, and Figure 2 is a cross-sectional view of the present invention. A first rotation transmission disk 2, which is rotated about its axis by a rotation motor 1, is fixed to the shaft of the motor 1. Furthermore, multiple first pins 3 are fixed concentrically to the rotation axis of the first rotation transmission disk 2. Rotation transmission disks 4, which are rotatably inserted onto the first pins 3, each have holes at the same eccentric position. Second pins 5, which are rotatably inserted to correspond to the holes, are fixed to a second rotation transmission disk 6.
一方、公転用モータ7により回転させられる1組の歯車8.9を介して回転軸中 心で軸受は筒10をガイドに公転伝達軸11が設けられている。公転伝達軸11 には回転中心より前記回転伝達盤と同一の偏心量を偏心させた位置に貫通した支 持孔12が設けられている。支持孔12には自転用回転軸13が回転自在に挿入 され、その端部は第2の自転伝達盤6に固定され、他の端部は結合部材14を介 して研磨盤15に結合されている。Meanwhile, a revolution transmission shaft 11 is provided at the center of the rotation axis via a pair of gears 8 and 9 rotated by a revolution motor 7, with a bearing cylinder 10 as a guide. The revolution transmission shaft 11 is provided with a support hole 12 that penetrates the shaft at a position eccentric from the center of rotation by the same amount as the rotation transmission disk. A rotation shaft 13 is rotatably inserted into the support hole 12, with one end fixed to the second rotation transmission disk 6 and the other end connected to a polishing disk 15 via a connecting member 14.
さらに研!ff115には研磨部材(図示せず)が設けられ、その研磨部材に端 面を研磨されるフェルール等の棒状部材16が接Mしている。棒状部材16は多 連の固定治具盤17に脱着可能で固定され、押さえ軸19によって所定の力で研 9F:2+5を押しつけている。固定治具盤17は回転止めどン20によって回 転を阻止されている。Furthermore, a polishing member (not shown) is provided in the polishing face 115, and a rod-shaped member 16, such as a ferrule, whose end face is to be polished, is in contact with the polishing member. The rod-shaped member 16 is detachably fixed to a multiple fixture plate 17, and a pressure shaft 19 presses the fixture plate 17 against the polishing face with a predetermined force. The fixture plate 17 is prevented from rotating by a rotation stopper 20.
支持機構への加重は任意の数値が選べるよう複数重りが配されている(図示せず )。Multiple weights are provided to allow any desired weight to be applied to the support mechanism (not shown).
次に、この発明の動作について説明する0図3はこの発明の詳細な説明する平面 図であり、図4は図3のA−A’断面図である。まず公転運動については、公転 用モータ7により1組の歯車8.9を介して公転伝達軸11をY軸中心で回転さ せる。このとき研磨盤15の中心は、Y軸からe2だけずれたY′軸にあるため Y゛軸はY軸を中心にe、の半径で動く、この時公転伝達軸11の中に自転用回 転軸13が存在するが、図3に示すように、Y軸とY゛軸の偏心量e2と同一の 偏心量e1を持つ回転伝達盤4を配しているので、回転伝達盤4は公転伝達軸1 1の回転と同し位相で第1のピン3回りでそれぞれ回転する。従って、第1の自 転伝達盤2が止まっていても、または回転していても公転伝達軸11の回転が規 制されることはない。Next, the operation of this invention will be described. FIG. 3 is a plan view illustrating the invention in detail, and FIG. 4 is a cross-sectional view taken along the line A-A' in FIG. 3. First, regarding revolution, the revolution motor 7 rotates the revolution transmission shaft 11 about the Y axis via a set of gears 8 and 9. At this time, the center of the polishing disk 15 is on the Y' axis, offset by e2 from the Y axis, so the Y' axis moves with a radius of e about the Y axis. At this time, the rotation shaft 13 exists within the revolution transmission shaft 11, but as shown in FIG. 3, the rotation transmission disk 4 is disposed with an eccentricity e1 identical to the eccentricity e2 of the Y and Y' axes. Therefore, the rotation transmission disk 4 rotates around the first pin 3 in the same phase as the rotation of the revolution transmission shaft 11. Therefore, whether the first rotation transmission disk 2 is stationary or rotating, the rotation of the revolution transmission shaft 11 is not restricted.
一方、自転運動については自転用モータ1により第1の自転伝達盤2を回転させ るが、第1のピン3は自転伝達盤2の同心円上にあるのでY軸回りで同し軌跡を 通る。自転用回転軸13は第1の自転伝達軸から82だけ回転軸がずれているが 、第2の自転伝達盤6の同心円上にある第2のピン5が偏心量e1を保ったまま 回転伝達盤4を介して連結しているので、第1の自転伝達盤2と同じ回転数の回 転が自転用回転軸13に伝達される。Meanwhile, for rotation, the first rotation transmission disk 2 is rotated by the rotation motor 1, and since the first pin 3 is concentric with the rotation transmission disk 2, it follows the same trajectory around the Y axis. The rotation axis of the rotation shaft 13 is offset by 82 from the first rotation transmission axis, but since the second pin 5, which is concentric with the second rotation transmission disk 6, is connected via the rotation transmission disk 4 while maintaining the eccentricity e1, the same rotation speed as the first rotation transmission disk 2 is transmitted to the rotation shaft 13.
なお、この発明の目的から自転の回転数は公転の回転数に比べて非常に遅くなっ ているが、前述のように回転数の設定は自転、公転とも独立してでき何ら制限は ない0図5は、棒状部材16が研摩盤15に残した軌跡の一例であり、研磨部材 をを効に使っていることを示している。For the purposes of this invention, the rotational speed is set much slower than the revolutional speed. However, as mentioned above, the rotational speed and revolutional speed can be set independently and are not subject to any limitations. Figure 5 shows an example of the trajectory left by the rod-shaped member 16 on the polishing disc 15, demonstrating the efficient use of the polishing member.
次に、研磨仕上り面の加工精度ア一番重要な凸球面の曲率偏心について述べる。Next, we will discuss the eccentricity of curvature of the convex spherical surface, which is the most important factor in the accuracy of polished surfaces.
図1、図2に示すように複数個のフェルール16を取り付ける固定治具盤17の 中心には、圧力付与の押さえ軸19と係合するテーパ嵌合穴31とにより、研磨 物は研磨機の組立てる上で避けることの出来ないメカニカルな不完全要因、すな わち、研磨盤とフェルール支持m措18との平行度の問題を除去することができ る。As shown in FIGS. 1 and 2, the fixture plate 17, which holds multiple ferrules 16, has a tapered hole 31 at its center that engages with the pressure-applying retainer shaft 19. This eliminates the problem of parallelism between the polishing plate and the ferrule support member 18, an unavoidable mechanical imperfection that occurs when assembling a polishing machine.
さら;二、長さが異なる複数の研摩物(フェルールンを支持i措17にそれぞれ 取付けた際、研磨盤には長さの不揃いの当接が行われる。その際、上記のビンビ ボ−/ ト結合方式では長さの不揃いりこよる研磨運動を吸収する働きがある。Furthermore, when multiple abrasives (ferrules) of different lengths are attached to the support 17, they come into contact with the grinding disc at uneven lengths. In this case, the above-mentioned bimbipaddle/board coupling system acts to absorb the grinding motion caused by the uneven lengths.
この他に、固定治具盤17に取付ける複数の被研磨物はすべて、固定治具盤17 の中心から等しい距離に配置している。この結果、最終仕上りの状況で複数の研 磨物が等しい運動軌跡を描くことで均質な仕上りを得ることができる。In addition, all of the multiple workpieces mounted on the fixture platen 17 are positioned at equal distances from the center of the fixture platen 17. As a result, the multiple workpieces move along the same path during the final finishing process, resulting in a uniform finish.
なお、以上述べ1こ多連型研磨機機能を有するユニットを複数個同一平面内に従 属的に備えた多連型端面研磨機も数多(の研磨物を研磨するのに有効であること は言うまでもない。It goes without saying that a multiple end face polisher, which has multiple units with the functions of the multiple polisher described above, installed in the same plane, is also effective for polishing multiple workpieces.
図面の簡単な説明 (211はこの発明の平面図である6図2はこの発明の断面図である。BRIEF DESCRIPTION OF THE DRAWINGS (1) 1 is a plan view of the present invention; (2) 2 is a cross-sectional view of the present invention.
図3はこの発明の詳細な説明する平面図である0図4は図3の八−A′断面図で ある0図5は棒状部材が研磨盤に残した軌跡の一例である。図6は従来技術を示 す図である。FIG. 3 is a plan view for explaining the present invention in detail. FIG. 4 is a cross-sectional view taken along line VIII-A' in FIG. 3. FIG. 5 shows an example of the track left by a rod-shaped member on a polishing disc. FIG. 6 shows the prior art.
産業上の利用可能性 本発明の主眼とするところは、フェルールの端面をファイバを頂点とする凸球面 加工仕上げするための高精度で量産できる研磨機である。INDUSTRIAL APPLICABILITY The main focus of this invention is a high-precision, mass-produced polishing machine for finishing the end faces of ferrules into a convex spherical surface with the fiber at the apex.
本発明の重要な点は、先ず複数の研摩試料であるフェルール端面を常に同し加工 圧が作用する軟性体材質と研磨シートを張りつけた研磨盤の上に当接と、かつ静 止させ、研Ig盤を公転と自転をそれぞれ独立で回転できる運動機構とにより、 研磨盤の上で試料が一様な軌跡を描くランピング運動させることで、複数の試料 を希望するファイバを頂点とする凸球面に容品に加工することが可能となったこ とである、 才た、量産性についても草−ユニットを複数備えた多連型端面研磨機の構成をと ることが多いから、同一工程を複数ユニットで同時に処理したり、あるいは祖、 仕上げ、ポリンング等の各工程をそれぞれのユニット専門に割り当て研磨処理で きることで大きなメリフトが出る。当然、曲率半径の選択は、最適な硬さを持つ 軟質弾性体材質の採用で、またフェルールの端面がある角度f1!いた平面に凸 球面を形成するに:=、あらかじめ該試料をフェルール支持部材のフェルール取 付角度を目的とする角度に設定することで対応できることは自明である0本発明 による端面研磨機は、ファイバを固定したフェルール凸球面形成に最適であり、 その工業的価値が大である。The key feature of this invention is that multiple ferrule end faces, which are polished specimens, are constantly held stationary and pressed against a polishing plate with a soft material and an abrasive sheet attached. A motion mechanism allows the polishing plate to revolve and rotate independently, resulting in a ramping motion that causes the specimens to trace a uniform trajectory on the polishing plate, enabling multiple specimens to be polished into convex spherical surfaces with the desired fiber at the apex. Furthermore, for mass production, multi-unit end face polishing machines are often configured with multiple units. This allows for simultaneous processing of the same process in multiple units, or the ability to assign each process, such as polishing, finishing, and polishing, to a dedicated unit for each process, resulting in significant improvements. Naturally, the selection of the radius of curvature is dependent on the use of a soft, elastic material with optimal hardness, and the angle f1 of the ferrule end face. It is obvious that forming a convex spherical surface on a flat surface can be achieved by presetting the ferrule attachment angle of the ferrule support member to the desired angle. The end face polishing machine of this invention is ideal for forming a convex spherical surface on a ferrule with a fixed fiber, and its industrial value is great.
Claims (7)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28867692 | 1992-10-27 | ||
| JP4-288676 | 1992-10-27 | ||
| PCT/JP1993/001552 WO1994009944A1 (en) | 1992-10-27 | 1993-10-27 | End surface polishing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO1994009944A1 true JPWO1994009944A1 (en) | 1994-12-01 |
| JP3544977B2 JP3544977B2 (en) | 2004-07-21 |
Family
ID=17733247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51088694A Expired - Lifetime JP3544977B2 (en) | 1992-10-27 | 1993-10-27 | Edge polishing machine |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5516328A (en) |
| EP (1) | EP0627280A4 (en) |
| JP (1) | JP3544977B2 (en) |
| WO (1) | WO1994009944A1 (en) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3664188B2 (en) * | 1995-12-08 | 2005-06-22 | 株式会社東京精密 | Surface processing method and apparatus |
| US5743785A (en) * | 1996-04-04 | 1998-04-28 | Us Conec Ltd. | Polishing method and apparatus for preferentially etching a ferrule assembly and ferrule assembly produced thereby |
| JP2976188B2 (en) * | 1996-08-02 | 1999-11-10 | セイコーインスツルメンツ株式会社 | Polishing method of rod-shaped member end face |
| US5947797A (en) | 1996-09-11 | 1999-09-07 | Buzzetti; Mike | Computer-controlled method for polishing |
| JP3074377B2 (en) | 1997-03-06 | 2000-08-07 | セイコーインスツルメンツ株式会社 | End face polishing apparatus and polishing method |
| EP0868968B1 (en) * | 1997-03-31 | 2003-02-19 | Nippei Toyama Corporation | Grinder and grinding method |
| JPH11242135A (en) * | 1998-02-24 | 1999-09-07 | Seiko Instruments Inc | Ferrule polishing method for oblique pc connector |
| US6039630A (en) * | 1998-02-27 | 2000-03-21 | Ciena Corporation | Apparatus and method for calibrating pressure existing between optical fibers and a polishing pad during a polishing process |
| US6302763B1 (en) | 1998-06-29 | 2001-10-16 | Mike Buzzetti | Apparatus for polishing |
| US6454631B1 (en) | 1998-06-29 | 2002-09-24 | Mike Buzzetti | Polishing apparatus and method |
| US6106368A (en) * | 1998-11-18 | 2000-08-22 | Siecor Operations, Llc | Polishing method for preferentially etching a ferrule and ferrule assembly |
| JP4342012B2 (en) * | 1998-12-02 | 2009-10-14 | 株式会社ノリタケカンパニーリミテド | Plane polishing method and apparatus |
| JP2000296451A (en) * | 1999-04-12 | 2000-10-24 | Seiko Instruments Inc | End face polishing device |
| TW394125U (en) * | 1999-04-13 | 2000-06-11 | Uconn Technology Inc | Fiberglass grinder |
| JP2002210644A (en) * | 2001-01-18 | 2002-07-30 | Seiko Instruments Inc | End surface polishing device |
| US6814651B2 (en) * | 2001-07-13 | 2004-11-09 | Seiko Instruments Inc. | End face polishing machine and method of polishing rod-shaped member |
| US6878040B2 (en) * | 2002-08-30 | 2005-04-12 | Wei-Min Wang | Method and apparatus for polishing and planarization |
| DE60330742D1 (en) * | 2002-10-28 | 2010-02-11 | Nippon Telegraph & Telephone | Apparatus and method for processing the end of optical connectors |
| US6918816B2 (en) * | 2003-01-31 | 2005-07-19 | Adc Telecommunications, Inc. | Apparatus and method for polishing a fiber optic connector |
| JP4116506B2 (en) * | 2003-08-25 | 2008-07-09 | 株式会社精工技研 | Optical connector end polishing machine |
| US7209629B2 (en) * | 2004-06-14 | 2007-04-24 | Adc Telecommunications, Inc. | System and method for processing fiber optic connectors |
| US7068906B2 (en) * | 2004-06-14 | 2006-06-27 | Adc Telecommunications, Inc. | Fixture for system for processing fiber optic connectors |
| US7352938B2 (en) * | 2004-06-14 | 2008-04-01 | Adc Telecommunications, Inc. | Drive for system for processing fiber optic connectors |
| US7198549B2 (en) * | 2004-06-16 | 2007-04-03 | Cabot Microelectronics Corporation | Continuous contour polishing of a multi-material surface |
| US7491114B2 (en) * | 2006-11-17 | 2009-02-17 | Hong Zhang | Fiber optic polisher |
| US8672730B2 (en) | 2010-12-23 | 2014-03-18 | Exelis, Inc. | Method and apparatus for polishing and grinding a radius surface on the axial end of a cylinder |
| KR20120139021A (en) * | 2011-06-16 | 2012-12-27 | 주식회사 엘지화학 | Apparatus for rotation and revolution of polishing plate, and operation methods for the same |
| CN113165135B (en) * | 2018-12-20 | 2023-11-28 | 东京毅力科创株式会社 | Substrate processing equipment |
| CN110480494A (en) * | 2019-08-16 | 2019-11-22 | 广州市协辉精密机械设备有限公司 | A kind of Multifunction adaptor head suitable for polishing industry |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4839993A (en) * | 1986-01-28 | 1989-06-20 | Fujisu Limited | Polishing machine for ferrule of optical fiber connector |
| JPS63278758A (en) * | 1987-05-08 | 1988-11-16 | Toyo Shinku Kako Kk | Rotary type polishing device |
| JPH0767663B2 (en) * | 1989-06-23 | 1995-07-26 | 株式会社精工技研 | Optical fiber end face polishing machine |
| JPH0366555A (en) * | 1989-08-03 | 1991-03-22 | Japan Nuclear Fuel Co Ltd<Jnf> | Polishing method for end face of coil spring |
| JP3027063B2 (en) * | 1992-12-15 | 2000-03-27 | 株式会社精工技研 | Optical fiber end face polishing equipment |
-
1993
- 1993-10-27 WO PCT/JP1993/001552 patent/WO1994009944A1/en not_active Ceased
- 1993-10-27 US US08/256,317 patent/US5516328A/en not_active Expired - Lifetime
- 1993-10-27 EP EP93923649A patent/EP0627280A4/en not_active Withdrawn
- 1993-10-27 JP JP51088694A patent/JP3544977B2/en not_active Expired - Lifetime
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