JPS6468611A - Displacement measuring instrument - Google Patents
Displacement measuring instrumentInfo
- Publication number
- JPS6468611A JPS6468611A JP62226187A JP22618787A JPS6468611A JP S6468611 A JPS6468611 A JP S6468611A JP 62226187 A JP62226187 A JP 62226187A JP 22618787 A JP22618787 A JP 22618787A JP S6468611 A JPS6468611 A JP S6468611A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical system
- moves
- measured
- light spot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 abstract 5
- 230000004907 flux Effects 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Landscapes
- Measurement Of Optical Distance (AREA)
- Automatic Focus Adjustment (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE:To eliminate the need for a correcting circuit and to take a measurement with high accuracy by employing an image formation system which forms an afocal system as a convergence optical system and setting the movement quantity of a light spot which moves as a body is displaced and the movement quantity of its image spot accurately in direct proportion. CONSTITUTION:Light beam flux from a light source 1 such as a semiconductor laser is converged and projected on the body 3 to be measured by an irradiation lens 2 as an irradiation optical system. A light spot is therefore formed on the body 3 to be measured and part of light beam flux reflected by the body 3 is incident on the convergence optical system 4 consisting of 1st and 2nd objectives 4a and 4b and converged on a position detector 5. Here, when the body 3 to be measured is displaced in the direction of the optical axis A2 of the irradiation optical system 2, the position of the light spot on the object body 3 moves to, for example, 3b at a distance X from 3a according to the displacement. Consequently, the position of the light spot image on a light position detector 5 moves to 5b at a distance Y from 5a on the photodetection surface of the light position detector 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62226187A JPS6468611A (en) | 1987-09-09 | 1987-09-09 | Displacement measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62226187A JPS6468611A (en) | 1987-09-09 | 1987-09-09 | Displacement measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6468611A true JPS6468611A (en) | 1989-03-14 |
Family
ID=16841250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62226187A Pending JPS6468611A (en) | 1987-09-09 | 1987-09-09 | Displacement measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6468611A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002296004A (en) * | 2001-03-30 | 2002-10-09 | Fuji Photo Optical Co Ltd | Imaging optical system of grazing incidence interferometer |
| CN103499298A (en) * | 2013-10-18 | 2014-01-08 | 中水东北勘测设计研究有限责任公司 | Method for correcting absolute displacement of end point of vacuum laser collimation displacement measurement device |
-
1987
- 1987-09-09 JP JP62226187A patent/JPS6468611A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002296004A (en) * | 2001-03-30 | 2002-10-09 | Fuji Photo Optical Co Ltd | Imaging optical system of grazing incidence interferometer |
| CN103499298A (en) * | 2013-10-18 | 2014-01-08 | 中水东北勘测设计研究有限责任公司 | Method for correcting absolute displacement of end point of vacuum laser collimation displacement measurement device |
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