JPS61207479A - Processing liquid for polishing - Google Patents
Processing liquid for polishingInfo
- Publication number
- JPS61207479A JPS61207479A JP60046963A JP4696385A JPS61207479A JP S61207479 A JPS61207479 A JP S61207479A JP 60046963 A JP60046963 A JP 60046963A JP 4696385 A JP4696385 A JP 4696385A JP S61207479 A JPS61207479 A JP S61207479A
- Authority
- JP
- Japan
- Prior art keywords
- polyethylene glycol
- diamond
- polishing
- water
- abrasive grain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 16
- 239000007788 liquid Substances 0.000 title claims abstract description 9
- 239000006061 abrasive grain Substances 0.000 claims abstract description 29
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 22
- 239000010432 diamond Substances 0.000 claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000002202 Polyethylene glycol Substances 0.000 claims abstract description 15
- 229920001223 polyethylene glycol Polymers 0.000 claims abstract description 15
- 239000012530 fluid Substances 0.000 claims description 30
- 238000003754 machining Methods 0.000 claims description 15
- 239000002245 particle Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 7
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 239000000654 additive Substances 0.000 description 4
- 150000001412 amines Chemical class 0.000 description 4
- -1 aromatic carboxylic acids Chemical class 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 235000011187 glycerol Nutrition 0.000 description 3
- 239000000395 magnesium oxide Substances 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- YNAVUWVOSKDBBP-UHFFFAOYSA-N Morpholine Chemical compound C1COCCN1 YNAVUWVOSKDBBP-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- 239000002612 dispersion medium Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- WWZKQHOCKIZLMA-UHFFFAOYSA-N octanoic acid Chemical compound CCCCCCCC(O)=O WWZKQHOCKIZLMA-UHFFFAOYSA-N 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- YZAZXIUFBCPZGB-QZOPMXJLSA-N (z)-octadec-9-enoic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O.CCCCCCCC\C=C/CCCCCCCC(O)=O YZAZXIUFBCPZGB-QZOPMXJLSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- 239000005635 Caprylic acid (CAS 124-07-2) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 125000002947 alkylene group Chemical group 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229960002446 octanoic acid Drugs 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000013112 stability test Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は研磨加工液に関するものである。[Detailed description of the invention] [Industrial application field] The present invention relates to a polishing liquid.
従来、研磨加工液としてグリセリンのような増粘剤を加
えた水に、酸化マグネシウムなどの砥粒を混合したもの
があった(特開昭55−189479号公報)。Conventionally, a polishing liquid has been prepared by mixing abrasive grains such as magnesium oxide with water to which a thickener such as glycerin has been added (Japanese Patent Application Laid-open No. 189479/1983).
しかしながらこのものは、砥粒が経時的に沈降しやすい
ため、砥粒の含有量の少ない加工液が被研磨′材料に供
給され研磨所要時間が長くなったり、加工液を供給する
前にあらかじめ攪拌混合する必要があり、作業性を著し
く低下させるという問題点を有している。However, with this method, the abrasive grains tend to settle over time, so a machining fluid with a low abrasive grain content is supplied to the material to be polished, prolonging the polishing time, or the machining fluid is stirred in advance before being supplied. There is a problem in that it requires mixing, which significantly reduces workability.
本発明者らは、砥粒が経時的に沈降しにくく、安定に供
給しやすい研磨加工液を得るべく鋭意検討した結果、本
発明に到達した。The present inventors have arrived at the present invention as a result of intensive studies aimed at obtaining a polishing liquid in which abrasive grains are less likely to settle over time and can be easily supplied stably.
本発明は、ポリエチレングリコール、水オヨヒダイヤモ
ンド砥粒を含有することを特徴とする研磨加工液である
。The present invention is a polishing liquid characterized by containing polyethylene glycol, water and diamond abrasive grains.
本発明におけるポリエチレングリコールとじては、分子
量が通常1000〜1〇九好ましくは入手容易の点から
1000〜2万のものがあげられる。分子量が1000
より小さいものはダイヤモンド砥粒を水中に安定に分散
させる効果が小さくなり、また分子量が10万より太き
いものは合成困難である。The polyethylene glycol used in the present invention usually has a molecular weight of 1,000 to 109, preferably 1,000 to 20,000 in view of easy availability. Molecular weight is 1000
If the diameter is smaller, the effect of stably dispersing diamond abrasive grains in water will be reduced, and if the molecular weight is greater than 100,000, it will be difficult to synthesize.
本発明におけるダイヤモンド砥粒は天然から得られたも
のでも、また人工的に合成されたものでもよい。その平
均粒径は通常20μ以)好ましくは10μ以下である。The diamond abrasive grains in the present invention may be obtained from nature or may be artificially synthesized. The average particle size is usually 20μ or more, preferably 10μ or less.
平均粒径が20μより太きいものは、研磨所要時間は短
縮されるが研磨加工面の表面粗さが大きくなり、さらに
粒径の小さい砥粒を使用した加工液で再度研磨加工する
必要がある。If the average grain size is larger than 20μ, the polishing time will be shortened, but the surface roughness of the polished surface will increase, and it will be necessary to polish again with a machining fluid using abrasive grains with a smaller grain size. .
また水中に安定に分散させることが困難である。Furthermore, it is difficult to stably disperse it in water.
本発明の加工液には必要により添加剤を加えることがで
きる。このような添加剤としては防錆。Additives can be added to the processing fluid of the present invention if necessary. Such additives are rust preventive.
防食剤たとえば有機アミン(モノエタン−〃アミン、ト
リエタノールアミン、シクロヘキシルアミン、モルホリ
ンなど)、有機アミン誘導体(上記アミンのアルキレン
オキシド付加物、脂肪酸アミドなど)、脂肪族または芳
香族カルボン酸(カプリル酸、オレイン酸、ダイマー酸
、アルケニルコハク酸、安息香酸など)およびこれらカ
ルボン酸のアルカリ金属塩、アミン塩など、pH調整剤
たとえば上記アミンやアルカリ金属の水酸化物など、お
よび消泡剤たとえばシリコーン化合物やポリエーテル化
合物などをあげることができる。Anticorrosive agents such as organic amines (monoethane-amine, triethanolamine, cyclohexylamine, morpholine, etc.), organic amine derivatives (alkylene oxide adducts of the above amines, fatty acid amides, etc.), aliphatic or aromatic carboxylic acids (caprylic acid, (oleic acid, dimer acid, alkenylsuccinic acid, benzoic acid, etc.) and alkali metal salts and amine salts of these carboxylic acids, pH adjusters such as the above-mentioned amines and alkali metal hydroxides, and antifoaming agents such as silicone compounds and Examples include polyether compounds.
本発明の加工液の処方を示せば下記の通りである。〔チ
は加工液の重量に対するチで示づ。The formulation of the processing fluid of the present invention is as follows. [Chi is expressed as chi relative to the weight of the processing fluid.
ポリエチレングリコール 通常0.1〜50チ(好ま
しくは1〜80チ)
ダイヤモンド砥粒 通常0.1〜10%(好ましくは
0.2〜5チ)
水 通常35〜99.8チ(好
ましくは区〜98.7チ)
添加剤 通常0〜5チ(好ましくは0
.1〜3チ)
上記においてポリエチレングリコ−ρの含有量が0.1
チより少ないとダイヤモンド砥粒を水中に安定に分散さ
せる効果が小さくなり、また50%をこえると加工液の
粘度が高くなり取扱いにくい。Polyethylene glycol Usually 0.1-50 inches (preferably 1-80 inches) Diamond abrasive grain Usually 0.1-10% (preferably 0.2-5 inches) Water Usually 35-99.8 inches (preferably 1-80 inches) 98.7 inches) Additives Usually 0 to 5 inches (preferably 0
.. 1 to 3) In the above, the content of polyethylene glyco-ρ is 0.1
If it is less than 50%, the effect of stably dispersing diamond abrasive grains in water will be reduced, and if it exceeds 50%, the viscosity of the processing fluid will increase and it will be difficult to handle.
ダイヤモンド砥粒の含有量が0.1チより少ないと研磨
所要時間が長くなり、また10チをこえると被研磨材料
表面の端ダレ量が大きくすり、添加しただけの効果はみ
られず経済的に不利である。If the content of diamond abrasive grains is less than 0.1 inch, the polishing time will be longer, and if it exceeds 10 inch, the edge sagging of the surface of the material to be polished will be large, and the effect of just adding diamond abrasive grains will not be seen, making it economical. disadvantageous to
本発明の加工液の製造は、あらかじめポリエチレングリ
コールを溶解させた水にダイヤモンド砥粒を混合して攪
拌により分散させる方法でもまた、ポリエチレングリコ
ール、水およびダイヤモンド砥粒を同時に混合して攪拌
により分散させる方法でもよい。添加剤成分はポリエチ
レングリコールによりダイヤモンド砥粒を水に分散させ
た後でも、またこれら3成分と同時に加えて溶解させて
もよ・い。攪拌方法としてはマグネチツクスターラー。The processing fluid of the present invention can be produced by mixing diamond abrasive grains into water in which polyethylene glycol has been dissolved in advance and dispersing it by stirring, or by mixing polyethylene glycol, water and diamond abrasive grains simultaneously and dispersing by stirring. It may be a method. The additive component may be added after the diamond abrasive grains are dispersed in water using polyethylene glycol, or may be added and dissolved simultaneously with these three components. The stirring method is a magnetic stirrer.
羽根式攪拌機、ホモミキサーなどを用いる方法があげら
れるがいずれの方法によっても攪拌してもよい。また必
要に応じて攪拌時加熱をしてもよい。Stirring may be carried out by any method, including a method using a blade stirrer, a homomixer, or the like. Further, heating may be performed during stirring if necessary.
本発明の加工液が用いられる被研磨材料としては、セラ
ミックス(肩石系、アルミナ系、炭化ケイ素系、窒化ケ
イ素系など)、金属(鋼、ステンレス、アルミニウム、
銅、ニッケルなど)Iプラスチック(ナイロン、ポリア
セタール、ポリカーボネート、変性ポリフェニレンオキ
サイドなど)。Materials to be polished using the processing fluid of the present invention include ceramics (shoulderstone-based, alumina-based, silicon carbide-based, silicon nitride-based, etc.), metals (steel, stainless steel, aluminum,
copper, nickel, etc.)I plastics (nylon, polyacetal, polycarbonate, modified polyphenylene oxide, etc.).
ガラスおよびこれらの複合材料(セラミックーフェライ
トなど)があげられる。Examples include glass and composite materials thereof (ceramic-ferrite, etc.).
このような被研磨材料は一般に従来より用いられている
ラッピングマシン(日本エンギス社製。Such materials to be polished are generally processed using a conventional lapping machine (manufactured by Nippon Engis).
スピードファム社製、ワシノ機械製、不二越機械工業製
)などで研磨される。Polished with speed fam, Washino Kikai, Fujikoshi Kikai Kogyo, etc.
本発明の加工液の適用法は、従来の加工液の適用法と同
様でよく、たとえば研磨加工においてラッププレートに
加工液を滴下またはスプレーすればよい。The method of applying the machining fluid of the present invention may be the same as the conventional method of applying the machining fluid, for example, the machining fluid may be dropped or sprayed onto a lap plate during polishing.
以下実施例により本発明をさらに説明するが本発明はこ
れに限定されるものではない。実施例中のチは重量基準
である。The present invention will be further explained below with reference to Examples, but the present invention is not limited thereto. The numbers in the examples are based on weight.
実施例1〜10゜ 本発明の加工液を表−1の通り作成した。Examples 1 to 10° The processing fluid of the present invention was prepared as shown in Table-1.
表−1
★1:ポリエチレングリコー)v(平均分子量−200
0)★2. (1−8500
)★a: (# −20
000)本発明の加工液および比較品として市販の加工
液を用いて行った経日安定性結果を表−2に示す。Table-1 ★1: Polyethylene glycol) v (average molecular weight -200
0)★2. (1-8500
)★a: (# -20
Table 2 shows the results of the stability over time using the processing fluid of the present invention and a commercially available processing fluid as a comparative product.
表=2
★4:比較品1および2は、いずれも平均粒径0.5μ
のダイヤモンド砥粒を1チ含有する水を分散媒とした加
工液である。比較品3は特開昭55−119479号公
報の発明の詳細な説明に記載されている加工液の組成(
粒径0.08〜0.1μの酸化マグネシウムをグリセリ
ンと水の混合液に加えたもの)に準じて、酸化マグネシ
ウムの代りに平均粒径01μのダイヤモンド砥粒を使用
し、ダイヤモンド砥粒t、o%、グリセリン2.5チお
よび水96.5%の割合で混合したものである。Table = 2 ★4: Comparative products 1 and 2 both have an average particle size of 0.5μ
This is a machining fluid that uses water as a dispersion medium and contains one inch of diamond abrasive grains. Comparative product 3 has the composition of the machining fluid (
Magnesium oxide with a particle size of 0.08 to 0.1μ is added to a mixture of glycerin and water), diamond abrasive grains with an average particle size of 01μ are used instead of magnesium oxide, and diamond abrasive grains t, o%, 2.5% glycerin, and 96.5% water.
経時安定性試験は各加工液を室温で静置し、分散状態を
肉眼で観察した。尚、表−2中の信号は次の通りである
。In the stability test over time, each processing solution was allowed to stand at room temperature, and the dispersion state was observed with the naked eye. The signals in Table 2 are as follows.
○:均一に分散
Δ:やや分離
×:分離
表−2の結果から本発明の加工液は分散安定性が極めて
良好であることがわかる。○: Uniformly dispersed Δ: Slightly separated ×: Separated From the results in Table 2, it can be seen that the processing fluid of the present invention has extremely good dispersion stability.
実施例11゜
実施例4の加工液を用いてセラミックとフェライトの複
合材料よりなる磁気ヘッドを研磨加工したところ、比較
品1にくらべ表面粗さはほとんど同じであったが、研磨
所要時間が約V3に短縮され、かつ加工後の水洗処理も
比較品1の2〜3回に対し、1回で十分であるとの結果
を得た。尚、研磨機械としては、エンギス社製のパイプ
レス自動精密鏡面ラッピングマシンMode+ 12を
用いた。Example 11゜When a magnetic head made of a composite material of ceramic and ferrite was polished using the working fluid of Example 4, the surface roughness was almost the same as that of comparative product 1, but the polishing time was approximately The results showed that the process was shortened to V3, and that it was sufficient to perform water washing once after processing, compared to 2 to 3 times for Comparative Product 1. As the polishing machine, a pipeless automatic precision mirror lapping machine Mode+ 12 manufactured by Engis was used.
本発明の加工液は下記の効果を奏する。 The processing fluid of the present invention has the following effects.
(1)加工液の分散安定性がよく、経時的に砥粒が沈降
しにくい。(1) The dispersion stability of the machining fluid is good, and the abrasive grains are less likely to settle over time.
(2)一定量のダイヤモンドの砥粒を被研磨材料に安定
に供給できるため作業性が向上する。(2) Work efficiency is improved because a certain amount of diamond abrasive grains can be stably supplied to the material to be polished.
(3)ポリエチレングリコールの含有量、および分子量
を変えることにより低粘度の加工液から高粘度の加工液
まで目的にあわせたものを使用できる。(3) By changing the content and molecular weight of polyethylene glycol, it is possible to use processing fluids from low viscosity to high viscosity depending on the purpose.
(4)高品質高精度の研磨加工面を得ることができる。(4) A high quality and highly accurate polished surface can be obtained.
(5)水を分散媒にしているため火災の危険性がない。(5) Since water is used as a dispersion medium, there is no risk of fire.
(6)被研磨材料から加工液の除去が容易である。(6) It is easy to remove the processing fluid from the material to be polished.
(7)本発明の加工液はセラミック、金属、ガラス。(7) The processing fluid of the present invention can be used for ceramics, metals, and glass.
プラスチックなどの材料の表面研磨に有用である。Useful for surface polishing of materials such as plastics.
(8)砥粒そのもののもっている特性を損うことがない
。(8) The characteristics of the abrasive grains themselves are not impaired.
Claims (1)
粒を含有することを特徴とする研磨加工液。 2、ポリエチレングリコールの分子量が1000〜10
万である特許請求の範囲第1項記載の加工液。 3、ポリエチレングリコールの含有量が加工液の重量に
基いて0.1〜50%である特許請求の範囲第1項また
は第2項記載の加工液。 4、ダイヤモンド砥粒の平均粒径が20μ以下である特
許請求の範囲第1項〜第3項のいずれか一項に記載の加
工液。 5、ダイヤモンド砥粒の含有量が加工液の重量に基いて
、0.1〜10%である特許請求の範囲第1項〜第4項
のいずれか一項に記載の加工液。[Claims] 1. A polishing liquid characterized by containing polyethylene glycol, water and diamond abrasive grains. 2. The molecular weight of polyethylene glycol is 1000-10
The machining fluid according to claim 1, which is 3. The machining fluid according to claim 1 or 2, wherein the content of polyethylene glycol is 0.1 to 50% based on the weight of the machining fluid. 4. The machining fluid according to any one of claims 1 to 3, wherein the diamond abrasive grains have an average particle diameter of 20 μm or less. 5. The machining fluid according to any one of claims 1 to 4, wherein the content of diamond abrasive grains is 0.1 to 10% based on the weight of the machining fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60046963A JPS61207479A (en) | 1985-03-08 | 1985-03-08 | Processing liquid for polishing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60046963A JPS61207479A (en) | 1985-03-08 | 1985-03-08 | Processing liquid for polishing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61207479A true JPS61207479A (en) | 1986-09-13 |
Family
ID=12761926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60046963A Pending JPS61207479A (en) | 1985-03-08 | 1985-03-08 | Processing liquid for polishing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61207479A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6464762A (en) * | 1987-08-31 | 1989-03-10 | Kyocera Corp | Method for whetting ceramic knife |
| JP2002193894A (en) * | 2000-12-25 | 2002-07-10 | Neos Co Ltd | Alkyl ether carboxylate having aromatic ring |
-
1985
- 1985-03-08 JP JP60046963A patent/JPS61207479A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6464762A (en) * | 1987-08-31 | 1989-03-10 | Kyocera Corp | Method for whetting ceramic knife |
| JP2002193894A (en) * | 2000-12-25 | 2002-07-10 | Neos Co Ltd | Alkyl ether carboxylate having aromatic ring |
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