JPS61143929A - Rotary positive electrode for x ray tube - Google Patents
Rotary positive electrode for x ray tubeInfo
- Publication number
- JPS61143929A JPS61143929A JP60278846A JP27884685A JPS61143929A JP S61143929 A JPS61143929 A JP S61143929A JP 60278846 A JP60278846 A JP 60278846A JP 27884685 A JP27884685 A JP 27884685A JP S61143929 A JPS61143929 A JP S61143929A
- Authority
- JP
- Japan
- Prior art keywords
- anode
- substrate
- radioactive material
- anode according
- ray tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 10
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 9
- 229910052721 tungsten Inorganic materials 0.000 claims description 9
- 239000010937 tungsten Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000012857 radioactive material Substances 0.000 claims description 6
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 3
- 238000005219 brazing Methods 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 238000005868 electrolysis reaction Methods 0.000 claims description 2
- 229910052741 iridium Inorganic materials 0.000 claims description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 2
- 238000005240 physical vapour deposition Methods 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 claims 2
- 150000001247 metal acetylides Chemical class 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 239000012071 phase Substances 0.000 claims 1
- 238000005245 sintering Methods 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 10
- 229910017083 AlN Inorganic materials 0.000 abstract 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 abstract 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 229910002804 graphite Inorganic materials 0.000 description 6
- 239000010439 graphite Substances 0.000 description 6
- 230000005484 gravity Effects 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 239000011733 molybdenum Substances 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000219061 Rheum Species 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009770 conventional sintering Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/108—Substrates for and bonding of emissive target, e.g. composite structures
Abstract
Description
【発明の詳細な説明】
本発明はX線管で使用される陽極、特に回転陽極に係る
。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to anodes used in X-ray tubes, particularly rotating anodes.
放射線分野で主に使用されているX線管が、陰極から発
生される十分高レベルの運動■ネルギーを有する電子束
の作用を受ける表面部分からX線を放射する機能を有す
るディスク状の陽極又は対自他を備えていることは、当
業者に周知である。X-ray tubes, which are mainly used in the radiation field, have a disk-shaped anode or It is well known to those skilled in the art that there is a difference between self and other.
X線管では電子の運動エネルギーのうちX線エネルギー
に変換されるのは約1%に過ぎず、電子エネルギーの大
部分が熱に変換されることも知られている。It is also known that in an X-ray tube, only about 1% of the kinetic energy of electrons is converted into X-ray energy, and most of the electron energy is converted into heat.
そのため当初このような陽極は、X線放射に関する良好
な特性に加えて非常に^い融点を有する材料、例えばタ
ングステン及びタングステン合金、特にタングステンと
レーウムとの合金でしか構成されなかった。やがてこの
ような陽極の高費用と重ωとを9慮する技術者らは、電
子を受ける部分、即ち陽極の「活性ゾーン」又は「焦点
トラック」を作成するためにはタングステンを単独で使
用すれば十分であることを知見した。その後開発の方向
は、タングステンより好適な物質から基体を構成し、タ
ングステン又はその合金の被覆から得られる活性ゾーン
を基体に付着して成る複合陽極に向けられた。Initially, such anodes were therefore initially composed only of materials which, in addition to good properties with regard to X-ray radiation, had very high melting points, such as tungsten and tungsten alloys, in particular tungsten and rheum alloys. Eventually, considering the high cost and heavy weight of such anodes, engineers decided to use tungsten alone to create the part that received the electrons, the "active zone" or "focal track" of the anode. We found that it is sufficient. Development subsequently turned to composite anodes comprising a substrate made of a material more suitable than tungsten and having an active zone obtained from a coating of tungsten or its alloys attached to the substrate.
陽極を正確に機能させるためには、基体が高融点、高比
熱レベル及び良好な熱伝導率を有していなければならな
かった。まずモリブデンが使用されたが、その後グラフ
ァイトが比熱レベルが著しく高く、また著しく軽量であ
るため回転陽極とした場合に回転が容易であるという理
由によりこれに関心が向けられた。しかし乍らその後、
タングステン層とグラファイトとの間に生じて中間層を
脆弱化せしめる反応と使用される材料間の膨張差とによ
る活性ゾーンの亀裂という問題が提起された。この問題
を解決するために、グラフフィトとタングステンとの間
に例えば仏国特許第1575111号に教示されるよう
な純粋レニウムから成るバリア層を堆積することが提案
された。更に放射線分野の進歩に伴い、材料考案者らは
陽極の回転速度の増加について検討し、1oooo回/
分を大幅に超え得る速度に到達するべく研究するように
なった。In order for the anode to function properly, the substrate had to have a high melting point, high specific heat level and good thermal conductivity. At first molybdenum was used, but then interest turned to graphite because it had a significantly higher level of specific heat and was also significantly lighter, making it easier to rotate when used as a rotating anode. However, after that,
Problems were raised of cracking in the active zone due to reactions occurring between the tungsten layer and the graphite, weakening the interlayer, and due to expansion differences between the materials used. To solve this problem, it has been proposed to deposit a barrier layer between graphite and tungsten consisting of pure rhenium, as taught for example in FR 1,575,111. Furthermore, with advances in the field of radiation, material inventors have considered increasing the rotation speed of the anode, increasing the number of times per
Research has begun to reach speeds that can significantly exceed minutes.
このような速度では基体の機械的性質が高くなければな
らず、また基体は低比重、高レベルの比熱及び良好な熱
伝導率を有する必要がある。At such speeds the mechanical properties of the substrate must be high and the substrate must have a low specific gravity, a high level of specific heat and good thermal conductivity.
本願出願人は、基体の密度がモリブデンよりも小さい複
合陽極により得られる利点に着目し、上記基準に合致し
、グラフフィトと異なりバリア層を備える必要がなく、
しかもその高い機械的特性により 1oooo回/分を
超え得る回転速度に達することの可能な材料を発見する
べく鋭意努力した。The applicant of the present application focused on the advantages obtained by a composite anode whose base density is lower than that of molybdenum, and it meets the above criteria and does not require a barrier layer unlike graphite.
Moreover, due to its high mechanical properties, we have made great efforts to discover a material that can reach rotational speeds exceeding 1000 revolutions per minute.
本願出願人の研究の結果、基体が窒化アルミニウムによ
り構成されていることを特徴とする陽極が開発されるに
至った。As a result of the applicant's research, an anode characterized in that the base is made of aluminum nitride has been developed.
前記物質は化学式AINで表されるアルミニウムの窒素
化合物であり、粉末状で得られ、従来の焼結法により成
形できるような熱及び機械的特性を有しており、比重約
3.26、即らグラファイトよりやや大さ゛いがモリブ
デンより著しく小さい比重の固体を形成し得る。この物
質は更に比較的高い融点と、特に活性ゾ〒ン中に発生さ
れた重大な熱流束を電極中に伝導及び排出できるような
良好な熱伝導率とを有している。これらの特性こそ陽極
製造に有益な物質たらしめる特性であるが、このような
物質は、本願出願人が結合層又はバリア層を備える必要
なしに該物質に放射性材料を直接被覆できることを発見
せず、また該物質が高速度回転で使用できるような機械
的特性を備えていなかったとしたら、グラファイト又は
固体金属陽極に対して競合するには十分でなかったであ
ろう。The substance is a nitrogen compound of aluminum with the chemical formula AIN, obtained in powder form, has thermal and mechanical properties such that it can be shaped by conventional sintering methods, has a specific gravity of about 3.26, and has a specific gravity of about 3.26. can form a solid with a specific gravity slightly larger than graphite but significantly lower than molybdenum. This material also has a relatively high melting point and good thermal conductivity, such that in particular the significant heat flux generated in the active zone can be conducted into and removed from the electrode. It is these properties that make the material useful for anode production, but it is important to note that it is not until the applicant discovered that the material could be directly coated with radioactive materials without the need for a bonding or barrier layer. , and if the material did not have mechanical properties that allowed it to be used at high rotational speeds, it would not have been sufficient to compete against graphite or solid metal anodes.
本願出願人は事実、活性ゾーンを構成している金属又は
合金の性質及び該金属又は合金を基体に堆積する方法に
関係なく、こうしC製造された複合素子間に完全な接着
が得られること、及び非常に高レベルの運動エネルギー
の電子束の作用下であっても経時的に品質が維持される
ことを確認した。The applicant has in fact shown that perfect adhesion can be obtained between these C-manufactured composite elements, regardless of the nature of the metal or alloy constituting the active zone and the method of depositing the metal or alloy onto the substrate. , and confirmed that the quality is maintained over time even under the action of electron fluxes of very high levels of kinetic energy.
こうして極めて多様な方法、例えば溶融塩浴電解、物理
的又は化学的気相蒸着、鑞付は固定、あるいは最新の放
射線技術で使用される高出力管で長期間使用後も接着力
低下又は劣化減少を認めることなく平坦表面又は中空構
造の表面に焼結金属素子をリング状又はリングの一部と
して固定するための他の任意の方法を用いて、タングス
テン、レニウム、イリジウム、オスミウム及びこれらの
合金、又は炭化物、窒化物もしくは硼化物型のこれらの
化合物から成る厚さ0.5〜2111#Iの堆積物が形
成された。Thus, a wide variety of methods, such as molten salt bath electrolysis, physical or chemical vapor deposition, brazing, fixing, or even after long-term use in high-power tubes used in modern radiation technology, reduces the loss of adhesion or deterioration. tungsten, rhenium, iridium, osmium and their alloys, using any other method for fixing the sintered metal element in the form of a ring or as part of a ring on a flat surface or on the surface of a hollow structure without admitting Alternatively, deposits of 0.5 to 2111 #I thick were formed consisting of these compounds of the carbide, nitride or boride type.
例として、活性ゾーンの温度が2500〜3000℃と
なるような出力及び時間条件下で使用されていたある秤
の従来陽極に替えて本発明の陽極を使用した。同一条件
下で使用した処、活性ゾーンの温度は200〜400℃
に低下し、窒化アルミニウムの熱伝導の良好な特性を丞
した。By way of example, an anode of the invention was used to replace a conventional anode in a scale that was used under power and time conditions such that the active zone temperature was between 2500 and 3000<0>C. When used under the same conditions, the temperature of the active zone was 200-400℃
and improved the good properties of aluminum nitride thermal conductivity.
本発明の陽極は、高出力レベル及び10000回/分を
超え得る回転速度を使用する最新型のものを含む凡ゆる
Xa管で使用される。The anode of the present invention is used in all Xa tubes, including the latest types, which use high power levels and rotational speeds that can exceed 10,000 revolutions per minute.
Claims (6)
層により被覆されている基体により構成されたX線管用
回転陽極であって、該基体が窒化アルミニウムから形成
されていることを特徴とする前記陽極。(1) A rotating anode for an X-ray tube constituted by a substrate at least a portion of the so-called "active" surface being coated with a layer of radioactive material, characterized in that the substrate is formed from aluminum nitride. The anode.
する特許請求の範囲第1項に記載の陽極。(2) The anode according to claim 1, wherein the substrate is formed by sintering particles.
とする特許請求の範囲第1項に記載の陽極。(3) The anode according to claim 1, wherein the radioactive material is in direct contact with the substrate.
ウム及びイリジウムの金属、それ等の合金、及び炭化物
、窒化物、硼化物のようなそれ等の金属の化合物から構
成される群に属していることを特徴とする特許請求の範
囲第1項に記載の陽極。(4) that the radioactive material belongs to the group consisting of the metals tungsten, rhenium, osmium and iridium, their alloys and compounds of these metals such as carbides, nitrides and borides; An anode according to claim 1, characterized in:
相物理的蒸着、鑞付け固定及び他の任意の焼結金属素子
固定方法から構成される群に属する方法により得られる
ことを特徴とする特許請求の範囲第1項に記載の陽極。(5) that the radioactive material is obtained by a method belonging to the group consisting of molten bath electrolysis, water phase chemical vapor deposition, vapor phase physical vapor deposition, brazing fixing and any other method of fixing sintered metal elements; An anode according to claim 1, characterized in:
ることを特徴とする特許請求の範囲第1項に記載の陽極
。(6) The anode according to claim 1, wherein the thickness of the radioactive material is in the range of 0.5 to 2 mm.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8419398A FR2574988B1 (en) | 1984-12-13 | 1984-12-13 | ROTATING ANODE FOR X-RAY TUBE |
| FR8419398 | 1984-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61143929A true JPS61143929A (en) | 1986-07-01 |
| JPH023263B2 JPH023263B2 (en) | 1990-01-23 |
Family
ID=9310746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60278846A Granted JPS61143929A (en) | 1984-12-13 | 1985-12-11 | Rotary positive electrode for x ray tube |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP0185598B1 (en) |
| JP (1) | JPS61143929A (en) |
| AT (1) | ATE39784T1 (en) |
| DE (1) | DE3567318D1 (en) |
| FR (1) | FR2574988B1 (en) |
| SU (1) | SU1479013A3 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0487243A (en) * | 1990-07-27 | 1992-03-19 | Nobuatsu Watanabe | Manufacture of rotating anode x-ray tube target |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4975621A (en) * | 1989-06-26 | 1990-12-04 | Union Carbide Corporation | Coated article with improved thermal emissivity |
| RU2307422C1 (en) * | 2005-12-26 | 2007-09-27 | Институт структурной макрокинетики и проблем материаловедения Российской Академии наук | X-ray tube combined rotating anode and its manufacturing process |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3819971A (en) * | 1972-03-22 | 1974-06-25 | Ultramet | Improved composite anode for rotating-anode x-ray tubes thereof |
| JPS56141153A (en) * | 1980-04-03 | 1981-11-04 | Toshiba Corp | Target for x-ray tube |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1178523B (en) * | 1962-07-04 | 1964-09-24 | Patra Patent Treuhand | X-ray tube rotating anode, in particular a plate-shaped rotating anode |
| US3459678A (en) * | 1966-01-03 | 1969-08-05 | Eastman Kodak Co | Olefin hydration catalyst |
| DE2201979C3 (en) * | 1972-01-17 | 1979-05-03 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Process for the production of a blackened layer on rotating anodes of X-ray tubes |
| AT336143B (en) * | 1975-03-19 | 1977-04-25 | Plansee Metallwerk | X-ray anode |
| CA1142211A (en) * | 1978-11-20 | 1983-03-01 | Richard G. Weber | Rotatable x-ray target having off-focal track coating |
-
1984
- 1984-12-13 FR FR8419398A patent/FR2574988B1/en not_active Expired
-
1985
- 1985-12-10 AT AT85420225T patent/ATE39784T1/en not_active IP Right Cessation
- 1985-12-10 DE DE8585420225T patent/DE3567318D1/en not_active Expired
- 1985-12-10 EP EP85420225A patent/EP0185598B1/en not_active Expired
- 1985-12-11 SU SU853985468A patent/SU1479013A3/en active
- 1985-12-11 JP JP60278846A patent/JPS61143929A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3819971A (en) * | 1972-03-22 | 1974-06-25 | Ultramet | Improved composite anode for rotating-anode x-ray tubes thereof |
| JPS56141153A (en) * | 1980-04-03 | 1981-11-04 | Toshiba Corp | Target for x-ray tube |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0487243A (en) * | 1990-07-27 | 1992-03-19 | Nobuatsu Watanabe | Manufacture of rotating anode x-ray tube target |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0185598B1 (en) | 1989-01-04 |
| JPH023263B2 (en) | 1990-01-23 |
| EP0185598A1 (en) | 1986-06-25 |
| SU1479013A3 (en) | 1989-05-07 |
| ATE39784T1 (en) | 1989-01-15 |
| DE3567318D1 (en) | 1989-02-09 |
| FR2574988A1 (en) | 1986-06-20 |
| FR2574988B1 (en) | 1988-04-29 |
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