JPH10296637A - Super abrasive grain grinding wheel - Google Patents
Super abrasive grain grinding wheelInfo
- Publication number
- JPH10296637A JPH10296637A JP12800497A JP12800497A JPH10296637A JP H10296637 A JPH10296637 A JP H10296637A JP 12800497 A JP12800497 A JP 12800497A JP 12800497 A JP12800497 A JP 12800497A JP H10296637 A JPH10296637 A JP H10296637A
- Authority
- JP
- Japan
- Prior art keywords
- vol
- superabrasive
- grinding
- grains
- bond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000006061 abrasive grain Substances 0.000 title claims abstract description 11
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 18
- 239000010432 diamond Substances 0.000 claims abstract description 18
- 239000011521 glass Substances 0.000 claims abstract description 11
- 229910052582 BN Inorganic materials 0.000 claims abstract description 8
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000000919 ceramic Substances 0.000 claims abstract description 5
- 239000011230 binding agent Substances 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 7
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000000843 powder Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 201000004569 Blindness Diseases 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- -1 cermets Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、特に多結晶ダイヤ
モンド焼結体(PCD)、多結晶立方晶窒化硼素焼結体
(PCBN)のような超硬質材料の研削加工用超砥粒砥
石に関するものであるが、超硬合金、セラミックス、サ
ーメット、ガラス、その他の硬質材料の研削加工にも広
く応用が可能なものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superabrasive grinder for grinding ultra-hard materials such as polycrystalline diamond sintered compact (PCD) and polycrystalline cubic boron nitride sintered compact (PCBN). However, it can be widely applied to grinding of hard metals, ceramics, cermets, glass, and other hard materials.
【0002】[0002]
【従来の技術】PCDは、従来、天然ダイヤモンドが使
われていたあらゆる分野において重要な役割を果してお
り、微細で粒径のそろったダイヤモンド粉末を超硬合金
製基台の上に載せ、超高圧高温下で焼結した、多結晶体
であって、天然ダイヤモンドのようにある方向に対して
脆いという欠点が無く、均質で極めて強靱な多結晶体で
ある。2. Description of the Related Art PCD plays an important role in all fields where natural diamond has been used in the past. Fine and uniform diamond powder is placed on a cemented carbide base and subjected to ultra-high pressure. It is a polycrystalline body sintered at a high temperature and free from the disadvantage that it is brittle in a certain direction like natural diamond, and is a homogeneous and extremely tough polycrystalline body.
【0003】また、PCBNは、ダイヤモンドが鉄族金
属と容易に反応する弱点を解決するために発明されたも
のであって、立方晶窒化硼素(CBN)の粉末をPCD
と同様にして焼結したものである。[0003] Further, PCBN was invented to solve the weak point that diamond easily reacts with an iron group metal, and a powder of cubic boron nitride (CBN) was formed by PCD.
It was sintered in the same manner as described above.
【0004】これらPCD及びPCBNは、超硬合金、
セラミックスに比べ耐摩耗性、破壊靱性値およびヤング
率が高いなどの優れた物理的特性を有するため、切削工
具素材および耐磨工具素材として使用されている。その
使用態様は、使用目的に応じて適当な寸法に切断し、鋼
製のシャンクまたはカッターボディなどに固着して切削
工具等として使用される。このとき、使用する機械、加
工する材料、加工条件に応じて、刃先の形状を基台の超
硬合金とともに研削加工して仕上げる場合が多い。[0004] These PCD and PCBN are made of cemented carbide,
Since it has excellent physical properties such as higher wear resistance, higher fracture toughness and higher Young's modulus than ceramics, it is used as a cutting tool material and abrasion resistant tool material. According to the usage mode, it is cut into an appropriate size according to the purpose of use, and is fixed to a steel shank or a cutter body to be used as a cutting tool or the like. At this time, the shape of the cutting edge is often finished by grinding with the cemented carbide of the base in accordance with the machine to be used, the material to be processed, and the processing conditions.
【0005】この切削工具は耐摩耗性に優れるので、超
硬合金切削工具に比べ寿命は数十倍であるが、使用する
につれて刃先が摩耗し、切削能率が低下するため、ある
時間使用すると再研磨が必要になる。この再研磨は、P
CD等の硬度が高いため、研削加工に長時間を必要とす
る。また、この加工は専用に設計された高精度・高剛性
の研削盤を用いて行われる。[0005] This cutting tool has excellent wear resistance, so its service life is several tens of times longer than that of cemented carbide cutting tools. However, the cutting edge wears out as it is used and the cutting efficiency is reduced. Polishing is required. This re-polishing is
Since the hardness of a CD or the like is high, a long time is required for grinding. This processing is performed using a specially designed high-precision, high-rigidity grinding machine.
【0006】その研削加工には、一般に特殊メタルボン
ドダイヤモンド砥石または金属粉末をフィラーとして加
えたレジンボンドダイヤモンド砥石が用いられている。
しかし、PCD、PCBNの主成分はダイヤモンドなど
硬いものなので、砥石と工作物の硬さがほぼ同じであ
り、砥石は激しく目つぶれ、目ずまりを生じ、頻度の高
いドレッシングが必要になる。For the grinding, a special metal bond diamond wheel or a resin bond diamond wheel to which metal powder is added as a filler is generally used.
However, since the main components of PCD and PCBN are hard materials such as diamond, the hardness of the grindstone is almost the same as that of the workpiece, and the grindstone is severely blinded and clogged, requiring frequent dressing.
【0007】この点を改良したとする砥石として、特公
昭56−41391号公報には、所要量の超砥粒をガラ
ス質によって結合焼成したものが開示されている。Japanese Patent Publication No. 56-41391 discloses a grindstone in which a required amount of superabrasive grains are bonded and fired by vitreous material.
【0008】[0008]
【発明が解決しようとする課題】上記公報記載の砥石
は、特殊メタルボンドダイヤモンド砥石、レジンボンド
ダイヤモンド砥石に比べれば、目つぶれ、目ずまりの改
良がなされているが、作業の能率化が要求される今日で
は、そのより改良が望まれる。The whetstone described in the above publication has improved blindness and clogging as compared with special metal bond diamond whetstones and resin bond diamond whetstones, but it requires higher work efficiency. Today, more improvements are desired.
【0009】ところで、特開平1−289668号公報
には、ビトリファイド結合剤中に潤滑性を高めるため
に、h−BNを配合して、切粉を円滑に排出して目詰り
を防止した考えが示されている。Japanese Patent Application Laid-Open No. 1-289668 discloses the idea that h-BN is blended in a vitrified binder to smoothly discharge chips and prevent clogging. It is shown.
【0010】本発明は、結合剤中に上記h−BNの添加
量を考慮して、PCD、PCBNなどの超硬質材料をよ
り円滑に研削し得るようにすることを課題とする。An object of the present invention is to make it possible to grind ultra-hard materials such as PCD and PCBN more smoothly in consideration of the amount of h-BN added to the binder.
【0011】[0011]
【課題を解決するための手段】上記課題を達成するため
に、本発明は、超砥粒をガラス質またはセラミック質の
結合材によって焼結してなる超砥粒砥石であって、上記
超砥粒を25〜40vol(容)%、上記結合材を60
〜75vol%とし、その結合材が、ガラスを66vo
l%〜99vol%、h−BNを1〜17vol%、S
iCを0〜15vol%とから成る構成としたのである
(請求項1)。In order to achieve the above object, the present invention provides a superabrasive grain grindstone obtained by sintering a superabrasive grain with a vitreous or ceramic binder. 25-40 vol (volume)% of the particles, 60
7575 vol%, and the binder is 66 vol.
1% to 99% by volume, 1 to 17% by volume of h-BN, S
The iC is comprised of 0 to 15 vol% (claim 1).
【0012】このように、h−BNを添加すると、その
潤滑性により、結合材が適宜に崩れて(目つぶれをした
超砥粒近傍の結合材が微小破壊して)、超砥粒の自生発
刃、及び切り屑の排除作用が行われ、円滑な研削を行い
得る。このとき、h−BNが1.0vol%未満である
と、前記自生発刃等の作用が発揮されず、逆に、17v
ol%を超えると、材料除去量は増加するが、砥石摩耗
が激しくなり、ワークのチッピング、砥石の偏摩耗を生
じ易くなり、研削比((砥石が削った材料の体積)÷
(砥石の摩耗体積))が著しく低下する(実施例参
照)。As described above, when h-BN is added, due to its lubricating property, the binder is appropriately broken (the binder near the closed superabrasive grains is minutely broken), and the superabrasive grains are spontaneously generated. The cutting action and the removal of chips are performed, and smooth grinding can be performed. At this time, if the h-BN is less than 1.0 vol%, the action such as the spontaneous blade generation is not exhibited, and conversely, 17 v
When the amount exceeds ol%, the amount of material removed increases, but the wear of the grindstone becomes severe, chipping of the work and uneven wear of the grindstone easily occur, and the grinding ratio ((volume of material shaved by the grindstone)) ÷
(Wear volume of the grindstone)) is significantly reduced (see Examples).
【0013】超砥粒が20vol%未満では、超砥粒の
集中度が低すぎるため、円滑な研削が行われず、逆に4
0vol%を越えると、超砥粒が密すぎて、円滑に自生
発刃がなされず、目ずまりが生じ易い。If the superabrasive grains are less than 20 vol%, the degree of concentration of the superabrasive grains is too low, so that smooth grinding is not performed.
If it exceeds 0 vol%, the superabrasive grains are too dense, and the spontaneous blade generation is not performed smoothly, and clogging is likely to occur.
【0014】SiCは超砥粒の代替のために骨材として
添加し、15vol%を越えると、超砥粒の集中度を低
くすることとなり、好ましくない。[0014] SiC is added as an aggregate to substitute for superabrasive grains, and if it exceeds 15 vol%, the concentration of the superabrasive grains decreases, which is not preferable.
【0015】上記超砥粒、SiC及びh−BNの合計量
は50vol%以下とすることが好ましく(請求項
2)、この50vol%を超えると、超砥粒の保持力が
低下し、砥石摩耗が激しくなる。The total amount of the superabrasive grains, SiC and h-BN is preferably 50 vol% or less (claim 2). When the total amount exceeds 50 vol%, the holding power of the superabrasive grains decreases, and the grinding wheel wears. Becomes intense.
【0016】上記結合材のガラスを結晶化ガラス(例え
ばウルマイト:2ZnO・SiO2)を0〜50vol
%含むものとすれば(請求項3)、結晶化ガラスは、高
温においても機械的強度が高く、ダイヤモンド砥粒やC
BN砥粒と近い熱膨張係数を有するので、高い超砥粒の
保持が得られる。The above-mentioned glass for the binder is made of crystallized glass (for example, ulmite: 2ZnO.SiO 2 ) in an amount of 0 to 50 vol.
% (Claim 3), the crystallized glass has high mechanical strength even at a high temperature,
Since it has a thermal expansion coefficient close to that of BN abrasive grains, high retention of superabrasive grains can be obtained.
【0017】上記h−BNを、平均粒径が20μm以下
のものとすれば(請求項4)、円滑な潤滑性を得ること
ができ、自生発刃、目づまり防止の作用がより円滑とな
る。When the h-BN has an average particle size of 20 μm or less (claim 4), smooth lubrication can be obtained, and the action of self-generated cutting and prevention of clogging becomes smoother. .
【0018】上記超砥粒をダイヤモンド砥粒とすれば、
多結晶ダイヤモンド焼結体又は多結晶立方晶窒化硼素焼
結体の研削加工に非常に有効である(請求項5)。すな
わち、上記h−BNの添加量等によって、PCD、PB
CNの研削を円滑になし得る。If the super-abrasive grains are diamond abrasive grains,
It is very effective for grinding a polycrystalline diamond sintered body or a polycrystalline cubic boron nitride sintered body. That is, depending on the amount of h-BN added, PCD, PB
Grinding of CN can be performed smoothly.
【0019】[0019]
ダイヤモンド砥粒:♯2000で集中度150とした表
1に示す混合割合の実施例1〜5及び比較例1、2を混
合機で混合した後、従来と同様にして、成形型に充填
し、加圧焼成して、外径:150mm、厚さ:15mm
の砥石をそれぞれ製作した。このとき、h−BNは平均
粒径:5μmのものを、固形成分にはウルマイト20v
ol%の結晶化ガラス粉をそれぞれ使用した。Diamond abrasive grains: After mixing Examples 1 to 5 and Comparative Examples 1 and 2 at a mixing ratio shown in Table 1 with a concentration of 150 at $ 2000, using a mixer, the mixture was filled in a mold in the same manner as in the prior art. Baking under pressure, outer diameter: 150mm, thickness: 15mm
Were manufactured respectively. At this time, h-BN had an average particle size of 5 μm, and ulmite 20v was used as a solid component.
% of crystallized glass powder was used.
【0020】つぎに、実施例1〜5及び比較例1、2に
ついて、PCD工具研削盤CPG300により、切り込
み速度(強制切り込み):0.4mm/min、加工時
間:10min、砥石周速:942m/min、揺動
幅:11mm、研削液:JISW2種2%の条件下で、
PCD(幅3.2×厚み0.5mm、GE製1300シ
リーズ)を研削加工した際の(実切込み量/設定切り込
み量)×100(%)、研削抵抗(Fn)、研削比をそ
れぞれ表1に示す。Next, for Examples 1 to 5 and Comparative Examples 1 and 2, a cutting speed (forced cutting): 0.4 mm / min, a processing time: 10 min, and a grinding wheel peripheral speed: 942 m / min, rocking width: 11 mm, grinding fluid: JISW 2 types 2%
Table 1 shows the actual cutting depth / set cutting depth × 100 (%), grinding resistance (Fn), and grinding ratio when grinding a PCD (3.2 × 0.5 mm thick, 1300 series made by GE). Shown in
【0021】[0021]
【表1】 この実験結果によると、各実施例は、比較例1(従来
例)に対し、(実切込み量/設定切り込み量)は2倍以
上、研削抵抗は7分の1から40分の1近くまで低下
し、研削比においても、それほどの低下を招いていな
い。一方、比較例2において、h−BNが18vol%
となると、研削比が著しく低下し、砥石摩耗が大きいた
め、砥石面振れによる大きなチッピングが発生した。こ
のため、h−BNの添加量は17vol%以下とする。[Table 1] According to the experimental results, in each example, (actual cutting amount / set cutting amount) was twice or more and grinding resistance was reduced from 1/7 to nearly 1/40 as compared with Comparative Example 1 (conventional example). However, the grinding ratio does not decrease so much. On the other hand, in Comparative Example 2, h-BN was 18 vol%
In this case, the grinding ratio was remarkably reduced, and the wear of the grindstone was large, so that large chipping due to the wobble of the grindstone surface occurred. For this reason, the addition amount of h-BN is 17 vol% or less.
【0022】このように、各実施例が比較例1に対し、
研削性で優れているのは、図1に示す実施例2、図2に
示す比較例1の2000倍の砥面写真において、(a)
はドレッシング後、(b)は加工作用後のものであり、
実施例2は加工後においてもダイヤモンド砥粒が突き出
しているのに対し、比較例1は激しく目ずまりしている
ことから、窺うことができる。As described above, each of the examples is different from the comparative example 1.
In Example 2 shown in FIG. 1, and 2000 times of the grinding surface photographs of Comparative Example 1 shown in FIG.
Is after dressing, (b) is after processing,
Example 2 shows that the diamond abrasive grains protrude even after processing, whereas Comparative Example 1 is severely clogged.
【0023】[0023]
【発明の効果】本発明は以上の説明から理解できるよう
に、超砥粒、結合材の所要の混合比において、h−BN
の所要量を添加するようにしたので、従来では得られな
かった研削特性のよい超砥粒砥石を得ることができる。As can be understood from the above description, the present invention can provide h-BN at a required mixing ratio of superabrasives and binder.
Is added, so that a superabrasive grindstone having good grinding characteristics, which has not been obtained conventionally, can be obtained.
【図1】一実施例の砥面写真であり、(a)はドレッシ
ング後、(b)は加工作用後である。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a photograph of a grinding surface of one embodiment, (a) after dressing and (b) after working.
【図2】従来例の砥面写真であり、(a)はドレッシン
グ後、(b)は加工作用後である。FIGS. 2A and 2B are photographs of a grinding surface of a conventional example, wherein FIG. 2A shows a state after dressing and FIG.
Claims (5)
結合材によって焼結してなる超砥粒砥石であって、 上記超砥粒を25〜40vol%、上記結合材を60〜
75vol%とし、その結合材が、ガラスを66vol
%〜99vol%、六方晶窒化硼素を1〜17vol
%、SiCを0〜15vol%とから成ることを特徴と
する超砥粒砥石。1. A superabrasive grindstone obtained by sintering superabrasive grains with a vitreous or ceramic binder, wherein the superabrasive grains are 25 to 40% by volume and the binder is 60 to 60%.
75 vol%, and the binder is 66 vol.
% To 99 vol%, 1 to 17 vol.
% And SiC of 0 to 15 vol%.
の合計量が50vol%以下であることを特徴とする請
求項1記載の超砥粒砥石。2. The superabrasive grinding wheel according to claim 1, wherein the total amount of said superabrasive, SiC and hexagonal boron nitride is 50 vol% or less.
0〜50vol%含むことを特徴とする請求項1又は2
に記載の超砥粒砥石。3. The binder glass according to claim 1, wherein the glass contains 0 to 50 vol% of crystallized glass.
The superabrasive grindstone described in 1.
μm以下であることを特徴とする請求項1乃至3のいず
れか一つに記載の超砥粒砥石。4. The hexagonal boron nitride has an average particle size of 20.
4. The superabrasive grindstone according to claim 1, wherein the diameter is not more than μm.
て、多結晶ダイヤモンド焼結体又は多結晶立方晶窒化硼
素焼結体の研削加工に用いられることを特徴とする請求
項1乃至4のいずれか一つに記載の超砥粒砥石。5. The method according to claim 1, wherein the superabrasive grains are diamond abrasive grains, and are used for grinding a polycrystalline diamond sintered body or a polycrystalline cubic boron nitride sintered body. The superabrasive grinding wheel according to any one of the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09128004A JP3086667B2 (en) | 1997-04-30 | 1997-04-30 | Super abrasive whetstone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09128004A JP3086667B2 (en) | 1997-04-30 | 1997-04-30 | Super abrasive whetstone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10296637A true JPH10296637A (en) | 1998-11-10 |
| JP3086667B2 JP3086667B2 (en) | 2000-09-11 |
Family
ID=14974095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09128004A Expired - Lifetime JP3086667B2 (en) | 1997-04-30 | 1997-04-30 | Super abrasive whetstone |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3086667B2 (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002224963A (en) * | 2001-01-31 | 2002-08-13 | Allied Material Corp | Super abrasive vitrified bond whetstone |
| JP2011067947A (en) * | 2001-08-21 | 2011-04-07 | Saint-Gobain Abrasives Inc | Machining tool with vitrified superabrasive and method of manufacture the same |
| CN102825559A (en) * | 2012-07-31 | 2012-12-19 | 安徽威铭耐磨材料有限公司 | Ceramic CBN (Cubic Boron Nitride) grinding wheel doped with bamboo charcoal powders |
| CN103737499A (en) * | 2014-01-08 | 2014-04-23 | 苏州赛力精密工具有限公司 | End face super grinding special metal ceramic CBN (Cubic Boron Nitride) grinding wheel and preparation method thereof |
| JP2016147359A (en) * | 2015-02-13 | 2016-08-18 | 株式会社ディスコ | Grinding whetstone |
| KR20160145500A (en) * | 2015-06-10 | 2016-12-20 | 가부시기가이샤 디스코 | Grinding wheel |
| CN108247553A (en) * | 2017-12-30 | 2018-07-06 | 汪逸凡 | A kind of preparation method of wear-resisting artificial oilstone |
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| JP2021534012A (en) * | 2018-08-17 | 2021-12-09 | サンーゴバン アブレイシブズ,インコーポレイティド | Adhesive polishing articles containing fillers containing nitrides |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0390154U (en) * | 1989-12-27 | 1991-09-13 | ||
| JPH03212062A (en) * | 1990-01-17 | 1991-09-17 | Murata Mach Ltd | Receiving method for facsimile equipment |
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1997
- 1997-04-30 JP JP09128004A patent/JP3086667B2/en not_active Expired - Lifetime
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| JP2002224963A (en) * | 2001-01-31 | 2002-08-13 | Allied Material Corp | Super abrasive vitrified bond whetstone |
| JP2011067947A (en) * | 2001-08-21 | 2011-04-07 | Saint-Gobain Abrasives Inc | Machining tool with vitrified superabrasive and method of manufacture the same |
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| CN102825559B (en) * | 2012-07-31 | 2015-11-25 | 安徽威铭耐磨材料有限公司 | A kind of vitrified CBN wheel being mixed with bamboo charcoal powder |
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| JP2016147359A (en) * | 2015-02-13 | 2016-08-18 | 株式会社ディスコ | Grinding whetstone |
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| CN108247553A (en) * | 2017-12-30 | 2018-07-06 | 汪逸凡 | A kind of preparation method of wear-resisting artificial oilstone |
| CN108247553B (en) * | 2017-12-30 | 2020-11-17 | 义乌市安航科技有限公司 | Preparation method of wear-resistant artificial oilstone |
| CN108527174A (en) * | 2018-04-27 | 2018-09-14 | 郑州磨料磨具磨削研究所有限公司 | A kind of silicon carbide substrates chamfering grinding wheel and preparation method thereof |
| JP2021534012A (en) * | 2018-08-17 | 2021-12-09 | サンーゴバン アブレイシブズ,インコーポレイティド | Adhesive polishing articles containing fillers containing nitrides |
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