JP7841290B2 - surface coated cutting tools - Google Patents
surface coated cutting toolsInfo
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Description
本発明は、表面被覆切削工具(以下、被覆工具ということがある)に関するものである。 This invention relates to a surface-coated cutting tool (hereinafter sometimes referred to as a coated tool).
切削工具の切削性能の改善を目的として、従来、炭化タングステン(以下、WCで示す)基超硬合金等の基体の表面に、被覆層を蒸着法により被覆形成した被覆工具があり、これは、優れた耐摩耗性を発揮することが知られている。
前記従来の被覆層を被覆形成した被覆工具は、耐摩耗性に優れものであるが、さらなる被覆層の改善についての種々の提案がなされている。
To improve the cutting performance of cutting tools, there are conventional coated tools in which a coating layer is formed on the surface of a substrate such as a tungsten carbide (hereinafter referred to as WC)-based cemented carbide by vapor deposition, and these are known to exhibit excellent wear resistance.
While coated tools with the aforementioned conventional coating layer exhibit excellent wear resistance, various proposals have been made for further improvements to the coating layer.
例えば、特許文献1および2には、被覆層が複数個の柱状晶を有する被覆層を含み、前記柱状晶のそれぞれは、TiCxNz-x(0.45≦x<0.70、0.80≦z≦1.20)の第1単位層と、TiCyNA-y(0.70≦y≦1、0.80≦A≦1.20)の第2単位層とが交互に積層された多層構造を有する被覆工具が記載され、この被覆工具は、耐摩耗性、耐チッピング性に優れているとされている。 For example, Patent Documents 1 and 2 describe a coated tool having a coating layer that includes a plurality of columnar crystals, where each of the columnar crystals has a multilayer structure in which a first unit layer of TiC x N z-x (0.45 ≤ x < 0.70, 0.80 ≤ z ≤ 1.20) and a second unit layer of TiC y N A-y (0.70 ≤ y ≤ 1, 0.80 ≤ A ≤ 1.20) are alternately stacked, and this coated tool is said to have excellent wear resistance and chipping resistance.
本発明は前記事情や提案を鑑みてなされたものであって、特に、鋳鉄の切削加工において耐溶着性を確保した上で、優れた耐摩耗性、耐チッピング性を有する被覆工具を提供することを目的とする。 This invention was made in view of the above circumstances and proposals, and in particular aims to provide a coated tool that ensures resistance to welding during the cutting of cast iron, while also possessing excellent wear resistance and chipping resistance.
本発明の実施形態に係る表面被覆切削工具は、
基体と該基体の表面に設けられた被覆層を有し、
前記被覆層は、積層単位を1以上含む積層体層を有し、
前記積層単位は、基体から工具表面に向かって、順に、第1層、第2層、第3層を含み、
前記第1層、前記第2層および前記第3層の各層は、いずれも組成が実質的に一定であり、意図的な組成の変化がなく、
前記第1層は、その平均厚さが0.3μm以上、3.0μm以下のTiCxN1-x(xの平均値xavgが、0.50≦xavg≦0.65)であり、
前記第2層は、その平均厚さが0.3μm以上、3.0μm以下のTiCyN1-y(yの平均値yavgが、0.65<yavg≦0.75)であり、
前記第3層は、その平均厚さが0.3μm以上、3.0μm以下のTiCzN1-z(zの平均値zavgが、0.75<zavg≦1.00)である。
A surface-coated cutting tool according to an embodiment of the present invention is
It has a substrate and a coating layer provided on the surface of the substrate,
The coating layer has a laminated layer containing one or more lamination units,
The aforementioned layered unit includes, in order from the substrate toward the tool surface, a first layer, a second layer, and a third layer.
Each of the first, second, and third layers has a substantially constant composition, without any intentional changes in composition.
The first layer is a TiC x N 1-x with an average thickness of 0.3 μm or more and 3.0 μm or less (where the average value of x, x avg , is 0.50 ≤ x avg ≤ 0.65).
The second layer has an average thickness of 0.3 μm or more and 3.0 μm or less, and is TiC y N 1-y (where the average value of y, y avg , is 0.65 < y avg ≤ 0.75).
The third layer is a TiC z N 1-z with an average thickness of 0.3 μm or more and 3.0 μm or less (where the average value of z, z avg , is 0.75 < z avg ≤ 1.00).
さらに、前記実施形態に係る表面被覆切削工具は、次の(1)~(3)の事項の1以上を満足してもよい。 Furthermore, the surface-coated cutting tool according to the above embodiment may satisfy one or more of the following items (1) to (3).
(1)前記積層単位が、1以上30以下であること。
(2)前記積層体層の平均厚さが3.0μm以上、16.0μm以下であること。
(3)前記積層体層の最も工具表面にある層の前記工具表面の側に、TiCN層を介してまたは介さないで、TiN層、TiCNO層、Al2O3層、AlTiN層のいずれか1層以上を有すること。
(4)前記基体と積層体層との間にTiC層、TiN層、TiCN層、TiCNO層のいずれか1層以上を有すること。
(1) The number of stacking units is 1 or more and 30 or less.
(2) The average thickness of the laminated layer is 3.0 μm or more and 16.0 μm or less.
(3) The laminate layer having one or more TiN layers, TiCNO layers, Al₂O₃ layers, or AlTiN layers on the tool surface side of the layer closest to the tool surface, with or without a TiCN layer.
(4) The substrate and the laminate layer have one or more layers of TiC, TiN, TiCN, and TiCNO.
前記表面被覆切削工具は、特に、鋳鉄の切削加工において、耐溶着性を確保した上で、優れた耐摩耗性、耐チッピング性を有する。 The aforementioned surface-coated cutting tool, particularly in the cutting of cast iron, ensures resistance to welding while possessing excellent wear resistance and chipping resistance.
本発明者の検討によれば、特許文献1および2に記載された被覆工具は、耐摩耗性、耐チッピング性に優れている反面、特に、鋳鉄の切削加工において耐溶着性が不十分であることが判明した。 According to the inventor's research, while the coated tools described in Patent Documents 1 and 2 exhibit excellent wear resistance and chipping resistance, they were found to have insufficient resistance to welding, particularly in the cutting of cast iron.
その理由を調査したところ、成膜ガスとしてC2H4等の炭化水素ガスを用いて成膜されたTiCN層は微細な結晶粒であるため、耐摩耗性が優れるものの、C含有量が増加することにより被削材に含まれるFeとの親和性が高くなって、耐溶着性が低下するとの知見を得た。 Upon investigating the reason, it was found that while TiCN layers formed using hydrocarbon gases such as C₂H₄ as the deposition gas have fine crystalline grains and therefore excellent wear resistance, the increased carbon content leads to a higher affinity with Fe contained in the workpiece, resulting in decreased resistance to welding.
以下では、本発明の実施形態に係る被覆工具について詳細に説明する。
なお、本明細書および特許請求の範囲において、数値範囲を「M~N」(M、Nは共に数値)で表現するときは、「M以上、N以下」と同義であって、その範囲は上限値(N)および下限値(M)を含んでおり、上限値(N)のみに単位が記載されているときは、上限値(N)と下限値(M)の単位は同じである。
また、式を用いて組成を表していない化合物の組成は、化学量論的組成に限定されず、従来公知のすべての原子比の組成を含むものである。
The following describes in detail a coating tool according to an embodiment of the present invention.
In this specification and in the claims, when a numerical range is expressed as "M to N" (where M and N are both numerical values), it is synonymous with "M or greater, N or less," and the range includes both an upper limit (N) and a lower limit (M). When a unit is specified only for the upper limit (N), the units of the upper limit (N) and the lower limit (M) are the same.
Furthermore, the composition of compounds not expressed using a formula is not limited to stoichiometric compositions, but includes all conventionally known atomic ratios.
図1は、本発明の実施形態に係る表面被覆切削工具の被覆層の縦断面(基体の表面の微小な凹凸を無視して、平坦な面と扱ったときのこの表面に垂直な断面)の一例を示す模式図であり、基体(1)の表面に、被覆層(10)があり、被覆層(10)は、下地層(2)、積層体層(7)、中間層(8)、および、上部層(9)を有している。積層体層(7)は、第1層(2)、第2層(3)および第3層(4)を含む積層単位(6)を2有している。なお、下地層(2)、中間層(6)、および、上部層(7)は、以下に説明するようにそれぞれ、選択的に設ければよい。この実施形態について、以下に詳細に説明する。 Figure 1 is a schematic diagram showing an example of a longitudinal cross-section of the coating layer of a surface-coated cutting tool according to an embodiment of the present invention (a cross-section perpendicular to the surface when the surface of the substrate is treated as a flat surface, ignoring minute irregularities on the substrate surface). The substrate (1) has a coating layer (10) on its surface, and the coating layer (10) has a base layer (2), a laminate layer (7), an intermediate layer (8), and an upper layer (9). The laminate layer (7) has two laminate units (6) including a first layer (2), a second layer (3), and a third layer (4). The base layer (2), intermediate layer (6), and upper layer (7) may be provided selectively, as will be described below. This embodiment will be described in detail below.
1.被覆層
被覆層について説明する。
1. Coating Layer The coating layer will be explained below.
(1)積層体層
積層体層は、基体側から工具表面に向かって、順に第1層、第2層、第3層の3の層の積層単位の繰返しを1以上有する。
この繰返しは2以上、30以下がより好ましい。その理由は、この範囲の繰返し数であれば、前述の目的が確実に達成できるためである。
(1) Laminated layer The laminated layer has one or more repetitions of a laminated unit of three layers, a first layer, a second layer, and a third layer, in order from the substrate side toward the tool surface.
The number of repetitions should preferably be between 2 and 30. This is because, within this range of repetitions, the aforementioned objective can be reliably achieved.
ここで、
第1層は、TiCxN1-x(xの平均値xavgが、0.50≦xavg≦0.65)が、
第2層は、TiCyN1-yで(yの平均値yavgが、0.65<avgy≦0.75)が、
第3層は、TiCzN1-z(zの平均値zavgが、0.75<zavg≦1.00)が、
それぞれ好ましい。
xavg、yavg、zavgは、それぞれ、全ての第1層、第2層、第2層における平均値である。
Here,
The first layer is TiC x N 1-x (where the mean value of x, x avg , is 0.50 ≤ x avg ≤ 0.65),
The second layer is TiC y N 1-y (where the mean value of y, y avg , is 0.65 < avg y ≤ 0.75),
The third layer is TiC z N 1-z (where the mean value of z, z avg , is 0.75 < z avg ≤ 1.00),
Each is preferable.
x avg , y avg , and z avg are the average values for all layers 1, 2, and 2, respectively.
xavg、yavgおよびzavgを前記範囲とすることが好ましい理由は、この範囲であれば組成の違いによる熱膨張係数の差が適切となり、応力緩和層としての作用を確実に発揮できるためである。 The reason why it is preferable to set x avg , y avg , and z avg within the above range is that within this range, the difference in thermal expansion coefficients due to differences in composition becomes appropriate, and the stress relaxation layer can be reliably exerted.
第1層の平均厚さは、0.3μm以上、3.0μm以下、
第2層の平均厚さは、0.3μm以上、3.0μm以下、
第3層の平均厚さは、0.3μm以上、3.0μm以下、
が好ましい。各層が、この平均厚さであれば、切削加工時に発生するクラックの伝搬をより確実に抑えることができる(第1層、第2層、第3層の平均厚さは、それぞれ、同じであっても異なっていてもよい)。そして、積層体層の平均厚さが3.0μm以上、16.0μm以下のとき、より一層確実に、切削加工時に発生するクラックの伝播が抑えられる。
The average thickness of the first layer is between 0.3 μm and 3.0 μm.
The average thickness of the second layer is between 0.3 μm and 3.0 μm.
The average thickness of the third layer is between 0.3 μm and 3.0 μm.
This is preferable. If each layer has this average thickness, the propagation of cracks generated during machining can be suppressed more reliably (the average thicknesses of the first, second, and third layers may be the same or different). Furthermore, when the average thickness of the laminate layers is 3.0 μm or more and 16.0 μm or less, the propagation of cracks generated during machining can be suppressed even more reliably.
(2)上部層
積層体層の最も工具表面側に、上部層として、それぞれの平均厚さが0.1μm以上、20.0μm以下であるTiN層、TiCNO層、Al2O3層、AlTiN層のうちのいずれかの1層以上を、合計平均厚さを1.0μm以上、25.0μm以下で設けてもよい(設けなくても前述の目的は達成される)。この上部層を設けると、被覆工具はより一層優れた耐摩耗性、耐チッピング性を発揮することができる。ここで、上部層の合計平均厚さが1.0μm未満では上部層の働きが十分になされず、一方、25.0μmを超えると上部層の結晶粒が粗大化しやすくなり、チッピングを発生しやすくなる。
(2) Upper layer An upper layer may be provided on the tool surface side of the laminate, with one or more layers from among a TiN layer, a TiCNO layer, an Al₂O₃ layer, and an AlTiN layer, each having an average thickness of 0.1 μm or more and 20.0 μm or less, for a total average thickness of 1.0 μm or more and 25.0 μm or less (the above objectives can be achieved even without providing this upper layer). Providing this upper layer allows the coated tool to exhibit even better wear resistance and chipping resistance. Here, if the total average thickness of the upper layer is less than 1.0 μm, the function of the upper layer is not fully realized, while if it exceeds 25.0 μm, the crystal grains of the upper layer tend to coarseen, making it easier for chipping to occur.
(3)中間層
中間層は、積層体層と上部層との間に両層の密着性を向上させるために、該両層の間に設けることがより一層好ましい(図1では、上部層と中間層を設けた実施形態を示しているが、上部層を設ける場合であっても、中間層はなくてもよい)。中間層は、TiCNO層が好ましく、その合計の平均厚さは0.3~3.0μmであることが好ましい。平均厚さがこの範囲にあると、積層体層と上部層との密着性がより一層向上する。
(3) Intermediate layer An intermediate layer is more preferably provided between the laminate layer and the upper layer in order to improve the adhesion between the two layers (Figure 1 shows an embodiment in which an upper layer and an intermediate layer are provided, but even when an upper layer is provided, the intermediate layer may not be necessary). The intermediate layer is preferably a TiCNO layer, and its total average thickness is preferably 0.3 to 3.0 μm. When the average thickness is within this range, the adhesion between the laminate layer and the upper layer is further improved.
(4)下地層
下地層は、基体と積層体層との密着性を向上させるために、両者の間に設けてもよい(設けなくても前述の目的は達成される)。下地層は、TiC層、TiN層、TiCN層、TiCNO層のいずれか1層以上のTi化合物層であって、その合計の平均厚さは、0.1~3.0μmであることが好ましい。合計の平均厚さがこの範囲にあると、両者の密着性がより一層向上する。
(4) Underlayment An underlayment may be provided between the substrate and the laminated layer to improve adhesion between them (the aforementioned objectives can be achieved even without it). The underlayment is preferably one or more Ti compound layers, which are TiC, TiN, TiCN, or TiCNO layers, and the average total thickness is 0.1 to 3.0 μm. When the average total thickness is within this range, the adhesion between the two is further improved.
(5)その他の層
成膜ガスの切り換え時に、意図せずに、第1層、第2層、第3層、Al2O3層、AlTiN層、TiN層、TiCNO層とは違う層がごくわずかであるが製造されることがある。
(5) Other layers When switching the film deposition gas, a very small amount of layers other than the first layer, second layer, third layer, Al₂O₃ layer, AlTiN layer, TiN layer, and TiCNO layer may be produced unintentionally.
2.基体
(1)組成
基体は、この種の基体として従来公知の基材であれば、本発明の目的を達成することを阻害するものでない限り、いずれのものも使用可能である。例を挙げるならば、超硬合金(WC基超硬合金、WCの他、Coを含み、さらに、Ti、Ta、Nb等の炭窒化物を添加したものも含むもの等)、サーメット(TiC、TiN、TiCN等を主成分とするもの等)、セラミックス(炭化チタン、炭化珪素、窒化珪素、窒化アルミニウム、酸化アルミニウムなど)、cBN焼結体であり、これらのいずれかであることが好ましい。
2. Substrate (1) Composition Any substrate known conventionally as a substrate of this type can be used, as long as it does not hinder the achievement of the objectives of the present invention. Examples include cemented carbide (WC-based cemented carbide, including those containing WC and Co, and further including those with carbonitrides such as Ti, Ta, and Nb added), cermet (mainly composed of TiC, TiN, TiCN, etc.), ceramics (titanium carbide, silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, etc.), and cBN sintered body, and it is preferable to use any of these.
(2)形状
基体の形状は、切削工具として用いられている形状であれば特段の制約はなく、インサートの形状、ドリルの形状が例示できる。
(2) Shape The shape of the base material is not particularly restricted as long as it is a shape used as a cutting tool, and examples include the shape of the insert and the shape of the drill.
3.測定方法
(1)組成
各層の組成の測定方法に関しては、透過型電子顕微鏡(Transmission Electron Microscope:TEM)、エネルギー分散型X線分析(Energy Dispersive X-ray Spectroscopy:EDS)を用いて複数個所(例えば、5箇所)で観察して、各層を特定し、各層の組成を測定してそれぞれ平均することにより得ることができる。
3. Measurement Method (1) Composition The composition of each layer can be measured by observing at multiple locations (for example, five locations) using a transmission electron microscope (TEM) and energy dispersive X-ray spectroscopy (EDS), identifying each layer, measuring the composition of each layer, and averaging them.
(2)平均厚さ
被覆層を構成する各層の平均厚さは、例えば、集束イオンビーム装置(FIB:Focused Ion Beam system)、クロスセクションポリッシャー装置(CP:Cross section Polisher)等を用いて、被覆層を任意の位置の縦断面で切断して観察用の試料を作製し、その縦断面をSEMまたは透過型電子顕微鏡(TEM:Transmission Electron Microscope)、走査型透過電子顕微鏡(STEM:Scanning Transmission Electron Microscope)、あるいはSEMまたはTEM付帯のエネルギー分散型X線分析(EDX:Energy Dispersive X-ray spectrometry)装置を用いて複数箇所(例えば、5箇所)で観察して、各層を特定し、各層の厚さを測定して平均することにより得ることができる。
(2) Average Thickness The average thickness of each layer constituting the coating layer can be determined by, for example, preparing a sample for observation by cutting the coating layer in a longitudinal section at an arbitrary position using a focused ion beam system (FIB), a cross-section polisher (CP), etc., and then analyzing the longitudinal section using a scanning electron microscope (SEM), a transmission electron microscope (TEM), a scanning transmission electron microscope (STEM), or energy dispersive X-ray analysis (EDX) attached to an SEM or TEM. This can be obtained by observing multiple locations (for example, five locations) using a spectrometry device, identifying each layer, measuring the thickness of each layer, and averaging the results.
平均厚さを求めるにあたり、厚さ方向の長さの起点となる基体の表面とは、基体にほぼ垂直な縦断面(ほぼ厚さ方向)の観察像における、基体と被覆層(後述する下地層があれば下地層である)の界面粗さの基準線とする。すなわち、基体がインサートのような平面の表面を有するときは、前記縦断面においてEDSを用いた元素マッピングを実施し、得られた元素マップに対して公知の画像処理を行うことで被覆層と基体との界面を定め、こうして得られた被覆層と基体との界面の粗さ曲線について、平均線y0を算術的に求め、これを基体の表面とする。 To determine the average thickness, the substrate surface, which serves as the starting point for the length in the thickness direction, is defined as the reference line of the interface roughness between the substrate and the coating layer (or the underlying layer, if one exists, as described later) in the observation image of a longitudinal section (approximately in the thickness direction) perpendicular to the substrate. That is, when the substrate has a planar surface like an insert, elemental mapping using EDS is performed on the longitudinal section, and the interface between the coating layer and the substrate is determined by performing known image processing on the obtained elemental map. The average line y0 is then arithmetically calculated from the roughness curve of the interface between the coating layer and the substrate, and this is considered the surface of the substrate.
ここで、算術的に平均線y0を求める方法は、例えば、縦断面の厚さ方向にy軸、その垂直方向にx軸をとった際に、界面粗さをf(x)(xは、基体表面に平行な方向の距離)で近似し、数[1]で示す演算を行う。ここで、lの長さは4μm以上が好ましい。
そして、この平均線に対して、垂直な方向を基体に垂直な方向(被覆層の厚さ方向)とする。
Here, the method for arithmetically determining the mean line y0 is to approximate the interface roughness by f(x) (where x is the distance in the direction parallel to the substrate surface) when the y-axis is taken in the thickness direction of the longitudinal section and the x-axis is taken perpendicular to it, and perform the calculation shown in equation [1]. Here, the length of l is preferably 4 μm or more.
Then, the direction perpendicular to this average line is defined as the direction perpendicular to the substrate (the thickness direction of the coating layer).
また、基体がドリルのように曲面の表面を有する場合であっても、被覆層の厚さに対して工具径が十分に大きければ、測定領域における被覆層と基体との間の界面は略平面となることから、同様の手法により基体の表面を決定することができる。すなわち、例えばドリルであれば、軸方向に垂直な断面の被覆層の縦断面においてEDSを用いた元素マッピングを実施し、得られた元素マップに対して公知の画像処理を行うことで被覆層と基体の界面を定め、こうして得られた被覆層と基体との界面の粗さ曲線について、平均線を算術的に求め、これを基体の表面とする。そして、この平均線に対して、垂直な方向を基体に垂直な方向(厚さ方向)とする。 Furthermore, even if the substrate has a curved surface, such as a drill, if the tool diameter is sufficiently large relative to the thickness of the coating layer, the interface between the coating layer and the substrate in the measurement area will be approximately flat. Therefore, the substrate surface can be determined using a similar method. That is, for example, in the case of a drill, elemental mapping using EDS is performed on the longitudinal cross-section of the coating layer perpendicular to the axial direction. Known image processing is then applied to the obtained elemental map to determine the interface between the coating layer and the substrate. The average line of the roughness curve at this interface is then arithmetically calculated and defined as the substrate surface. The direction perpendicular to this average line is then defined as the direction perpendicular to the substrate (thickness direction).
4.製造方法
本発明の被覆層は、例えば、CVD法によって以下の成膜条件により製造することができる。
4. Manufacturing Method The coating layer of the present invention can be manufactured, for example, by the CVD method under the following film formation conditions.
(1)積層体層
以下の%は、体積%(容量%)である。
(1-1)第1層
TiCl4:1.0~3.0%、 CH3CN:0.5~1.5%、
N2:13.0~40.0%、 H2:残
温度:850~950℃
圧力:5.0~7.0kPa
(1) Laminated layer The following percentages are volume percentages (capacity percentages).
(1-1) First layer TiCl 4 : 1.0 to 3.0%, CH 3 CN: 0.5 to 1.5%,
N 2 : 13.0-40.0%, H 2 : Residual temperature: 850-950°C
Pressure: 5.0–7.0 kPa
(1-2)第2層
TiCl4:1.0~2.0%、 CH3CN:0.1~1.0%、
C2H4:0.3~2.0%、 N2:0.0~40.0%、 H2:残
温度:850~950℃
圧力:5.0~7.0kPa
(1-2) Second layer TiCl 4 : 1.0 to 2.0%, CH 3 CN: 0.1 to 1.0%,
C 2 H 4 : 0.3 to 2.0%, N 2 : 0.0 to 40.0%, H 2 : Residual temperature: 850 to 950°C
Pressure: 5.0–7.0 kPa
(1-3)第3層
TiCl4:1.0~3.0%、 CH3CN:0.1~0.8%、
C2H4:2.0~3.0%、 N2:0.0~15.0%、 H2:残
温度:850~950℃
圧力:5.0~7.0kPa
(1-3) Third layer TiCl 4 : 1.0 to 3.0%, CH 3 CN: 0.1 to 0.8%,
C 2 H 4 : 2.0 to 3.0%, N 2 : 0.0 to 15.0%, H 2 : Residual temperature: 850 to 950°C
Pressure: 5.0–7.0 kPa
(2)上部層
TiN層 TiCl4:2.0~5.0%、 N2:25.0~35.0%、H2:残
TiC層 TiCl4:2.0~5.0%、 CH4:5.0~13.0%、H2:残
TiCNO層 TiCl4:0.5~3.5%、 CH3CN:0.2~1.5%、
CO:0.1~0.3%、 N2:35.0~45.0%、H2:残
AlTiN層 AlCl3:0.2~1.3%、TiCl4:0.1~0.5%、
N2:10.0~16.0%、NH3:2.0~6.0%、H2:残
Al2O3層 AlCl3:1.0~3.0%、 CO2:4.5~6.5%、
HCl:1.2~4.0%、H2S:0.1~0.3%、H2:残
温度:850~1000℃
圧力:4.0~30.0kPa
(2) Upper layer TiN layer TiCl 4 : 2.0 to 5.0%, N 2 : 25.0 to 35.0%, H 2 : remaining TiC layer TiCl 4 : 2.0 to 5.0%, CH 4 : 5.0 to 13.0%, H 2 : remaining TiCNO layer TiCl 4 :0.5~3.5%, CH3CN :0.2~1.5%,
CO: 0.1 to 0.3%, N 2 : 35.0 to 45.0%, H 2 : remaining AlTiN layer AlCl 3 : 0.2 to 1.3%, TiCl 4 : 0.1 to 0.5%,
N 2 : 10.0 to 16.0%, NH 3 : 2.0 to 6.0%, H 2 : remaining Al 2 O 3 layers AlCl 3 : 1.0 to 3.0%, CO 2 : 4.5 to 6.5%,
HCl: 1.2-4.0%, H 2 S: 0.1-0.3%, H 2 : Residual temperature: 850-1000°C
Pressure: 4.0–30.0 kPa
(3)中間層
TiCNO層 TiCl4:0.5~3.5%、 CH3CN:0.2~1.5%、
CO:0.1~0.3%、 N2:35.0~45.0%、H2:残
温度:850~1000℃
圧力:5.0~30.0kPa
(3) Intermediate TiCNO layer TiCl 4 : 0.5 to 3.5%, CH 3 CN: 0.2 to 1.5%,
CO: 0.1 to 0.3%, N 2 : 35.0 to 45.0%, H 2 : Residual temperature: 850 to 1000°C
Pressure: 5.0–30.0 kPa
(4)下地層
TiN層、TiC層、TiCNO層については上部層の成膜条件と同じ。
TiCN層 TiCl4:1.0~3.0%、 CH3CN:0.5~1.5%、
N2:13.0~18.0%、H2:残
温度:850~950℃
圧力:5.0~10.0kPa
(4) Substrate layers: The film deposition conditions for the TiN layer, TiC layer, and TiCNO layer are the same as for the upper layer.
TiCN layer TiCl 4 : 1.0 to 3.0%, CH 3 CN: 0.5 to 1.5%,
N 2 : 13.0-18.0%, H 2 : Residual temperature: 850-950°C
Pressure: 5.0–10.0 kPa
次に、実施例について説明する。
ここでは、本発明の被覆工具の具体例として、基体としてWC基超硬合金を用いたインサート切削工具に適用したものについて述べるが、基体は前述のとおりWC基超硬合金に限定されることはなく、また、被覆工具としてドリル、エンドミル等に適用した場合も同様である。
Next, we will describe some examples.
Here, as a specific example of the coated tool of the present invention, we will describe its application to an insert cutting tool using a WC-based cemented carbide as the base material. However, as mentioned above, the base material is not limited to a WC-based cemented carbide, and the same applies when the coated tool is applied to drills, end mills, etc.
まず、原料粉末として、Co粉末、TiC粉末、TaC粉末、NbC粉末、Cr3C2粉末、および、WC粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてボールミルで72時間湿式混合し、減圧乾燥した後、100MPaの圧力でプレス成形し、これらの圧粉成形体を焼結し、所定寸法となるように加工して、ISO規格CNMA120412のインサート形状をもったWC基超硬合金製の基体A~Cを作製した。なお、各粉末には不可避不純物が微量含まれていた。 First, Co powder, TiC powder, TaC powder, NbC powder, Cr3C2 powder , and WC powder were prepared as raw material powders. These raw material powders were blended according to the composition shown in Table 1, wax was added, and the mixture was wet-mixed in a ball mill for 72 hours. After drying under reduced pressure, the mixture was press-molded at a pressure of 100 MPa. These compacted bodies were sintered and processed to the predetermined dimensions to produce substrates A to C made of WC-based cemented carbide with insert shapes according to ISO standard CNMA120412. Note that each powder contained trace amounts of unavoidable impurities.
次に、この基体A~C上に、表2、表4に示す条件により、表5に示す実施例被覆工具1~8を得た。上部層の層種類の欄に2種の層記載されているものは、左側の層が積層体層側であり、また、それぞれに対応する平均厚さを記載している。 Next, on substrates A to C, the coated tools 1 to 8 shown in Table 5 were obtained according to the conditions shown in Tables 2 and 4. Where two layers are listed in the "Layer Type" column for the upper layer, the left-hand layer is the laminated layer, and the corresponding average thickness is also indicated.
また、比較のために、これら基体A~Cの表面に、表3、表4に示す成膜条件で被覆層を形成し、表5に示される比較例被覆工具1~8を得た。 Furthermore, for comparison, coating layers were formed on the surfaces of these substrates A to C under the film formation conditions shown in Tables 3 and 4, yielding comparative example coated tools 1 to 8 shown in Table 5.
表5において、「-」は存在しないことを示し、上部層の欄で右側にある層が被覆工具表面に存在し、その平均厚さは右側の値である。 In Table 5, "-" indicates non-existence, and the layer on the right in the upper layer column is present on the coated tool surface, with its average thickness being the value on the right.
続いて、実施例被覆工具1~8、比較例被覆工具1’~8’について、いずれも工具鋼製バイトの先端部に固定治具にてクランプした状態で、以下に示す、湿式切削試験1および2を実施し、切刃の逃げ面摩耗を測定した。それぞれの切削試験の結果を表6、表7に記載した。 Next, for the coated tools 1-8 of the examples and coated tools 1'-8' of the comparative examples, wet cutting tests 1 and 2, as described below, were performed with the tools clamped to the tip of a tool steel cutting tool using a fixing jig, and the wear of the flank surface of the cutting edge was measured. The results of each cutting test are shown in Tables 6 and 7.
切削試験1:湿式連続外径切削加工
被削材:FCD700 外径φ300mmの丸棒
切削速度:300m/min
切り込み:2.5 mm
送り量:0.25 mm/rev
切削時間:5分
切削油材:水溶性切削油
Cutting Test 1: Wet continuous outer diameter cutting workpiece: FCD700 round bar with outer diameter φ300 mm cutting speed: 300 m/min
Cut: 2.5 mm
Feed rate: 0.25 mm/rev
Cutting time: 5 minutes Cutting oil material: Water-soluble cutting oil
切削試験2:湿式断続端面切削加工
被削材:FCD700 外径φ300mmの4スリット入り丸棒
切削速度:250m/min
切り込み:2.0 mm
送り量:0.2 mm/rev
切削時間:5分
切削油材:水溶性切削油
Cutting Test 2: Wet Intermittent End Face Cutting Workpiece Material: FCD700 Round Bar with 4 Slits, Outer Diameter φ300 mm Cutting Speed: 250 m/min
Cut: 2.0 mm
Feed rate: 0.2 mm/rev
Cutting time: 5 minutes Cutting oil material: Water-soluble cutting oil
表6、表7において、比較被覆工具の寿命に至る切削時間(分)とはチッピング発生が原因で寿命に至るまでの切削時間(分)を示している。 In Tables 6 and 7, the cutting time (minutes) until the end of life of the comparative coated tool refers to the cutting time (minutes) until the tool reaches the end of life due to chipping.
表6、表7に示される結果から、実施例被覆工具1~8は、いずれも被覆層の耐溶着性が確保された上で、優れた耐摩耗性、耐チッピング性を有しているため、鋳鉄の切削加工に用いた場合であってもチッピングの発生がなく、長期にわたって優れた耐摩耗性を発揮する。これに対して、本発明の被覆工具に規定される事項を一つでも満足していない比較例被覆工具1~8は、鋳鉄の切削加工に用いた場合にチッピングが発生し、短時間で使用寿命に至っている。 As shown in Tables 6 and 7, the coated tools 1 to 8 of the examples all exhibit excellent wear resistance and chipping resistance while ensuring the welding resistance of the coating layer. Therefore, even when used for cutting cast iron, no chipping occurs, and they demonstrate excellent wear resistance over a long period. In contrast, the coated tools 1 to 8 of the comparative examples, which do not satisfy even one of the requirements specified for the coated tools of the present invention, exhibit chipping when used for cutting cast iron and reach the end of their service life in a short time.
1 基体
2 下地層
3 第1層
4 第2層
5 第3層
6 積層体単位
7 積層体層
8 中間層
9 上部層
10 被覆層
1. Base 2. Underlayer 3. First layer 4. Second layer 5. Third layer 6. Laminated unit 7. Laminated layer 8. Intermediate layer 9. Upper layer 10. Covering layer
Claims (4)
前記被覆層は、積層単位を1以上含む積層体層を有し、
前記積層単位は、基体から工具表面に向かって、順に、第1層、第2層、第3層を含み
前記第1層、前記第2層および前記第3層の各層は、いずれも組成が実質的に一定であり、
前記第1層は、その平均厚さが0.3μm以上、3.0μm以下のTiCxN1-x(xの平均値xavgが、0.50≦xavg≦0.65)であり、
前記第2層は、その平均厚さが0.3μm以上、3.0μm以下のTiCyN1-y(yの平均値yavgが、0.65<yavg≦0.75)であり、
前記第3層は、その平均厚さが0.3μm以上、3.0μm以下のTiCzN1-z(zの平均値zavgが、0.75<zavg≦1.00)である
ことを特徴とする表面被覆切削工具。 A surface-coated cutting tool having a substrate and a coating layer provided on the surface of the substrate,
The coating layer has a laminated layer containing one or more lamination units,
The aforementioned laminated unit comprises, in order from the substrate toward the tool surface, a first layer, a second layer, and a third layer, and each of the first, second, and third layers has a substantially constant composition.
The first layer is a TiC x N 1-x with an average thickness of 0.3 μm or more and 3.0 μm or less (where the average value of x, x avg , is 0.50 ≤ x avg ≤ 0.65).
The second layer has an average thickness of 0.3 μm or more and 3.0 μm or less, and is TiC y N 1-y (where the average value of y, y avg , is 0.65 < y avg ≤ 0.75).
The surface-coated cutting tool is characterized in that the third layer has an average thickness of 0.3 μm or more and 3.0 μm or less of TiC z N 1-z (where the average value of z, z avg , is 0.75 < z avg ≤ 1.00).
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2000158204A (en) | 1998-11-24 | 2000-06-13 | Mitsubishi Materials Corp | Surface coated cemented carbide cutting tool with a hard coating layer exhibiting excellent chipping resistance |
| JP2005153099A (en) | 2003-11-27 | 2005-06-16 | Kyocera Corp | Surface coated cutting tool |
| JP2019171547A (en) | 2018-03-29 | 2019-10-10 | 住友電工ハードメタル株式会社 | Surface-coated cutting tool and method of manufacturing the same |
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| JPH05337704A (en) * | 1992-06-11 | 1993-12-21 | Mitsubishi Materials Corp | Inclined hard layer coating cemented carbide cutting tool |
| JPH081412A (en) * | 1994-06-24 | 1996-01-09 | Nachi Fujikoshi Corp | Laminated coating tool |
| JP3705632B2 (en) * | 1995-10-27 | 2005-10-12 | 株式会社不二越 | Composite multi-layer coating tool |
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| JP2000158204A (en) | 1998-11-24 | 2000-06-13 | Mitsubishi Materials Corp | Surface coated cemented carbide cutting tool with a hard coating layer exhibiting excellent chipping resistance |
| JP2005153099A (en) | 2003-11-27 | 2005-06-16 | Kyocera Corp | Surface coated cutting tool |
| JP2019171547A (en) | 2018-03-29 | 2019-10-10 | 住友電工ハードメタル株式会社 | Surface-coated cutting tool and method of manufacturing the same |
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