JP5044372B2 - Magnetostrictive torque sensor shaft manufacturing method - Google Patents

Magnetostrictive torque sensor shaft manufacturing method Download PDF

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JP5044372B2
JP5044372B2 JP2007298106A JP2007298106A JP5044372B2 JP 5044372 B2 JP5044372 B2 JP 5044372B2 JP 2007298106 A JP2007298106 A JP 2007298106A JP 2007298106 A JP2007298106 A JP 2007298106A JP 5044372 B2 JP5044372 B2 JP 5044372B2
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torque sensor
magnetostrictive film
sensor shaft
magnetostrictive
hole
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JP2009122042A (en
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浩一 井澤
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Toshiba Corp
Toshiba Lifestyle Products and Services Corp
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Toshiba Consumer Electronics Holdings Corp
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Description

本発明は、トルクセンサシャフト本体の外周面部に磁歪膜を設けると共に、その磁歪膜に軸方向に対して傾斜する磁歪膜削除パターンを設けて成る磁歪式トルクセンサシャフトの製造方法に関する。   The present invention relates to a method for manufacturing a magnetostrictive torque sensor shaft in which a magnetostrictive film is provided on an outer peripheral surface portion of a torque sensor shaft main body and a magnetostrictive film deletion pattern that is inclined with respect to the axial direction is provided on the magnetostrictive film.

従来より、トルクの検出をするトルクセンサとして、トルクセンサシャフト本体の外周面部に磁歪膜を設けて成る磁歪式トルクセンサシャフトを具え、このトルクセンサシャフトの磁歪膜を設けた部分の外周にコイルを配置した構成にて、トルクセンサシャフトに作用するトルクにより、上記磁歪膜に引張りや圧縮の応力が及び、それによる逆磁歪効果で磁歪膜の透磁率が変化することに応じ、その透磁率変化をコイルにより検出するものが供されている。   Conventionally, as a torque sensor for detecting torque, a magnetostrictive torque sensor shaft having a magnetostrictive film provided on the outer peripheral surface portion of a torque sensor shaft main body has been provided, and a coil is provided on the outer periphery of the portion of the torque sensor shaft provided with the magnetostrictive film. In the arranged configuration, the tensile force or compressive stress is applied to the magnetostrictive film due to the torque acting on the torque sensor shaft, and the permeability change of the magnetostrictive film due to the inverse magnetostrictive effect thereby changes the permeability. What is detected by a coil is provided.

そして又、このものにおいては、上記磁歪膜に、軸方向に対して傾斜する磁歪膜削除パターンを設けたものが供されており、このものでは、その磁歪膜削除パターンの傾斜に応じて、トルクセンサシャフトに作用するトルクによる引張りや圧縮の応力が磁歪膜に効果的に及ぶことから、磁歪膜の透磁率変化が大きく、トルクの検出精度が高く得られる。   In this case, the magnetostrictive film is provided with a magnetostrictive film deletion pattern that is inclined with respect to the axial direction. In this case, torque is applied in accordance with the inclination of the magnetostrictive film deletion pattern. Since the tensile or compressive stress due to the torque acting on the sensor shaft is effectively applied to the magnetostrictive film, the permeability change of the magnetostrictive film is large, and the torque detection accuracy is high.

しかして、このもののトルクセンサシャフトの製造方法としては、例えば、磁歪材であるアモルファス薄帯に、楕円形の孔をトルクセンサシャフト本体の軸方向に対し傾斜状に並べて複数個穿つことにより磁歪膜削除パターンを形成し、この磁歪膜削除パターンを形成したアモルファス薄帯をトルクセンサシャフト本体の外周面部に接着する方法がある（例えば特許文献１参照）。   Therefore, as a method of manufacturing the torque sensor shaft of this type, for example, a magnetostrictive film is formed by drilling a plurality of elliptical holes arranged in an inclined manner with respect to the axial direction of the torque sensor shaft body in an amorphous ribbon that is a magnetostrictive material. There is a method in which a deletion pattern is formed and an amorphous ribbon having the magnetostrictive film deletion pattern is adhered to the outer peripheral surface portion of the torque sensor shaft main body (for example, see Patent Document 1).

又、上記とは異なるトルクセンサシャフトの製造方法として、トルクセンサシャフト本体の外周面部に磁歪膜を磁性薄板の接着又はメッキで設け、その磁歪膜に、軸方向に対し傾斜して連続する溝をエッチングやレーザトリミングによって形成することにより磁歪膜削除パターンを設ける方法がある。（例えば特許文献２参照）。
特開平７−１１３７０２号公報 特開昭６４−２５４９０号公報 As another torque sensor shaft manufacturing method, a magnetostrictive film is provided on the outer peripheral surface portion of the torque sensor shaft main body by bonding or plating a magnetic thin plate, and the magnetostrictive film is provided with a continuous groove inclined to the axial direction. There is a method of providing a magnetostrictive film deletion pattern by etching or laser trimming. (For example, refer to Patent Document 2).
JP-A-7-113702 JP-A 64-25490

上記従来のもののうち、前者（特許文献１による方法）では、トルクセンサシャフト本体の外周面部に接着する前の薄帯に孔をトルクセンサシャフト本体の軸方向に対し傾斜状に並べて複数個穿つ作業が困難であり、又、そのようにして磁歪膜削除パターンを形成したアモルファス薄帯をトルクセンサシャフト本体の外周面部に接着するのも困難であった。   Among the above conventional methods, in the former (method according to Patent Document 1), a plurality of holes are formed in the thin ribbon before being bonded to the outer peripheral surface portion of the torque sensor shaft main body so as to be inclined with respect to the axial direction of the torque sensor shaft main body. In addition, it has been difficult to bond the amorphous ribbon having the magnetostrictive film deletion pattern thus formed to the outer peripheral surface portion of the torque sensor shaft body.

そして一方、後者（特許文献２による方法）では、トルクセンサシャフト本体の外周面部に磁性薄板の接着又はメッキで設けた磁歪膜に、軸方向に対し傾斜して連続する溝をエッチングやレーザトリミングによって形成するのが困難で、特にエッチングでは、トルクセンサシャフト本体の外周面部にその円筒面に沿って磁歪膜を残す（連続溝を形成する）マスキングを施すのが困難であり、又、レーザトリミングでは、トルクセンサシャフト本体の外周面部に設けた磁歪膜を連続する溝で削除するのに、トルクセンサシャフト本体（ワーク）を回転させつつレーザを照射するが、そのレーザ出力の管理やトルクセンサシャフト本体の回転速度の管理が困難であった。   On the other hand, in the latter (method according to Patent Document 2), a groove that is inclined and continuous with respect to the axial direction is formed by etching or laser trimming on a magnetostrictive film provided on the outer peripheral surface of the torque sensor shaft body by adhesion or plating of a magnetic thin plate. It is difficult to form, especially in etching, it is difficult to mask the outer peripheral surface portion of the torque sensor shaft main body so as to leave a magnetostrictive film along the cylindrical surface (form a continuous groove), and in laser trimming, In order to remove the magnetostrictive film provided on the outer peripheral surface of the torque sensor shaft main body with a continuous groove, the laser is irradiated while rotating the torque sensor shaft main body (work), but the management of the laser output and the torque sensor shaft main body It was difficult to manage the rotation speed.

本発明は上述の事情に鑑みてなされたものであり、従ってその目的は、トルクセンサシャフト本体の外周面部に設ける磁歪膜に、軸方向に対して傾斜する磁歪膜削除パターンを容易に設けることのできる磁歪式トルクセンサシャフトの製造方法を提供するにある。   The present invention has been made in view of the above-described circumstances. Therefore, the object of the present invention is to easily provide a magnetostrictive film deletion pattern inclined on the axial direction on the magnetostrictive film provided on the outer peripheral surface portion of the torque sensor shaft body. Another object of the present invention is to provide a method for manufacturing a magnetostrictive torque sensor shaft.

上記目的を達成するために、本発明の磁歪式トルクセンサシャフトの製造方法においては、トルクセンサシャフト本体の外周面部に磁歪膜を設け、その後に、その磁歪膜にほゞ円形の孔を、レーザトリミングによって、軸方向に対し傾斜状に並べて複数個穿つことにより磁歪膜削除パターンを形成するようにしたことを特徴とする（請求項１の発明）。 To achieve the above object, in the method for manufacturing a magnetostrictive torque sensor shaft of the present invention, a magnetostrictive film provided on the outer peripheral surface of a torque sensor shaft body, after which the magnetostrictive film ho Isuzu circular hole, laser A plurality of magnetostrictive film deletion patterns are formed by trimming and forming a plurality of holes in an inclined manner with respect to the axial direction (invention of claim 1).

上記手段によれば、トルクセンサシャフト本体の外周面部に接着する前の薄帯に孔をトルクセンサシャフト本体の軸方向に対し傾斜状に並べて複数個穿つような作業の困難さがなく、又、そのようにして磁歪膜削除パターンを形成したアモルファス薄帯をトルクセンサシャフト本体の外周面部に接着するような作業の困難さもない。更に、孔はほゞ円形であって溝ではないから、トルクセンサシャフト本体の外周面部にその円筒面に沿って磁歪膜を残す（連続溝を形成する）マスキングを施すような作業の困難さがない上、レーザトリミングをする場合のレーザ出力の管理やトルクセンサシャフト本体の回転速度の管理も容易である。   According to the above means, there is no difficulty in the work of drilling a plurality of holes arranged in an inclined manner with respect to the axial direction of the torque sensor shaft body in the ribbon before bonding to the outer peripheral surface portion of the torque sensor shaft body, There is no difficulty in the work of adhering the amorphous ribbon having the magnetostrictive film deletion pattern to the outer peripheral surface portion of the torque sensor shaft main body. Further, since the hole is substantially circular and not a groove, it is difficult to carry out masking on the outer peripheral surface portion of the torque sensor shaft main body so as to leave a magnetostrictive film along the cylindrical surface (form a continuous groove). In addition, it is easy to manage the laser output and the rotational speed of the torque sensor shaft body when performing laser trimming.

以下、本発明の第１実施例（第１の実施形態）につき、図１ないし図６を参照して説明する。
まず、図６には、トルクセンサ１の全体構造を示しており、中央に磁歪式トルクセンサシャフト２が存している。この磁歪式トルクセンサシャフト２は、ステンレス鋼など金属にて円柱状に形成したトルクセンサシャフト本体３と、これの図中左右方向の中間部の近接した二箇所にわたってその表面に設けた磁歪膜４、及びこの磁歪膜４に軸方向に対し左右対称的に傾斜させて設けた磁歪膜削除パターン５から成っており、その詳細は後述する。 A first embodiment (first embodiment) of the present invention will be described below with reference to FIGS.
First, FIG. 6 shows the overall structure of the torque sensor 1, and the magnetostrictive torque sensor shaft 2 exists in the center. This magnetostrictive torque sensor shaft 2 includes a torque sensor shaft main body 3 formed of a metal such as stainless steel in a columnar shape, and a magnetostrictive film 4 provided on the surface of two adjacent portions in the middle in the horizontal direction in the drawing. And a magnetostrictive film deletion pattern 5 provided on the magnetostrictive film 4 so as to be symmetrically inclined with respect to the axial direction. The details will be described later.

磁歪式トルクセンサシャフトの上記磁歪膜４を設けた部分の外周囲には、それぞれ検出コイル６をボビン７に巻装した状態で配設している。ボビン７には、導電材から成る２本（図で上下）の接続ピン８を挿通して固着しており、この接続ピン８のボビン７内側部分に、各検出コイル６の先端部を接続している。   A detection coil 6 is wound around a bobbin 7 around the outer periphery of the portion of the magnetostrictive torque sensor shaft where the magnetostrictive film 4 is provided. Two connecting pins 8 (upper and lower in the figure) made of a conductive material are inserted into and fixed to the bobbin 7, and the tip ends of the detection coils 6 are connected to the inner portions of the bobbins 7 of the connecting pins 8. ing.

トルクセンサシャフト本体３の磁歪膜４を設けた部分の両側には、軸受９をそれぞれ装着し、これらの両軸受９からボビン７にかけて、フレーム１０を被装している。このフレーム１０の図中左側部の外側には、各種電気部品１１を実装した中継用基板１２を装着しており、この中継用基板１２に、フレーム１０から突出させた前記接続ピン８の各先端部を挿通させて半田付け等により接続している。   Bearings 9 are mounted on both sides of the portion of the torque sensor shaft body 3 where the magnetostrictive film 4 is provided, and a frame 10 is mounted from both the bearings 9 to the bobbin 7. A relay board 12 on which various electrical components 11 are mounted is mounted on the outside of the left side of the frame 10 in the figure, and each end of the connection pin 8 protruding from the frame 10 is mounted on the relay board 12. The part is inserted and connected by soldering or the like.

なお、中継用基板１２に実装した各種電気部品１１は、検出コイル６と協働して、磁歪式トルクセンサシャフトに作用したトルクを検出するもので、磁歪式トルクセンサシャフトに作用したトルクにより及ぶ応力で磁歪膜４の透磁率が変化することに応じ、その透磁率変化を検出することで、磁歪式トルクセンサシャフトに作用したトルクを検出するようになっている。   The various electrical components 11 mounted on the relay substrate 12 detect the torque acting on the magnetostrictive torque sensor shaft in cooperation with the detection coil 6, and are covered by the torque acting on the magnetostrictive torque sensor shaft. The torque acting on the magnetostrictive torque sensor shaft is detected by detecting the change in the magnetic permeability according to the change in the magnetic permeability of the magnetostrictive film 4 due to the stress.

ここで、磁歪式トルクセンサシャフト２の製造方法につき詳述するに、まず、図２に示すように、前記トルクセンサシャフト本体３の中間部の近接した二箇所にわたってその表面には、例えばニッケルと鉄との合金から成る磁歪膜４をメッキ、特には湿式メッキによって帯状に設ける。その厚さ（図５にＥで示す）は、例えば数〔μｍ〕〜数１０〔μｍ〕である。   Here, the manufacturing method of the magnetostrictive torque sensor shaft 2 will be described in detail. First, as shown in FIG. 2, for example, nickel and The magnetostrictive film 4 made of an alloy with iron is provided in a strip shape by plating, particularly wet plating. The thickness (indicated by E in FIG. 5) is, for example, several [μm] to several tens [μm].

次いで、図３に示すように、上記磁歪膜４にほゞ円形の孔１３をトルクセンサシャフト本体３の軸方向に対し左右対称の傾斜状に並べて複数個穿つことにより、同傾斜状の前記磁歪膜削除パターン５を形成する。この場合、詳細には、孔１３は、磁歪膜４にレーザを照射するレーザトリミングによって穿つもので、そのレーザの照射は例えば直径が数〔μｍ〕のスポット照射で行う。孔１３の直径は、数１０〔μｍ〕である。又、孔１３の傾斜並び（磁歪膜削除パターン５）の傾斜角度αは、この場合、最も好ましいほゞ４５度である。   Next, as shown in FIG. 3, a plurality of substantially circular holes 13 are formed in the magnetostrictive film 4 so as to be symmetrically inclined with respect to the axial direction of the torque sensor shaft body 3, thereby forming the magnetostrictive film having the same inclined shape. A film deletion pattern 5 is formed. In this case, in detail, the hole 13 is formed by laser trimming to irradiate the magnetostrictive film 4 with laser, and the laser irradiation is performed by spot irradiation having a diameter of several μm, for example. The diameter of the hole 13 is several tens [μm]. In this case, the inclination angle α of the inclination arrangement of the holes 13 (magnetostrictive film deletion pattern 5) is about 45 degrees most preferable.

上記レーザトリミングによる孔１３の形成は、図４に矢印と併せて示す番号順に行うもので、すなわち、１つの孔１３を形成した後に、隣の孔１３の部分避けて形成する順序で行う。
図１は、上述のようにして磁歪膜４に形成した孔１３の部分を拡大して表しており、この孔１３は傾斜の並び方向に重なっておらず、その並び方向に隣り合う二つの孔の中心間距離Ａは、隣り合う磁歪膜削除パターン５の中心間距離Ｂより小さく（Ａ＜Ｂ）している。 The holes 13 are formed by the laser trimming in the order of the numbers shown in FIG. 4 together with the arrows. That is, after forming one hole 13, the holes 13 are formed by avoiding the adjacent holes 13.
FIG. 1 is an enlarged view of the portion of the hole 13 formed in the magnetostrictive film 4 as described above, and this hole 13 does not overlap with the direction in which the slopes are arranged, and two holes adjacent to each other in the direction of the alignment. Is smaller than the center distance B between adjacent magnetostrictive film deletion patterns 5 (A <B).

又、孔１３の中心Ｏは、隣の磁歪膜削除パターン５の二つの孔１３間の中央からの垂直二等分線Ｃ上に位置するようにしている。
図５は、孔１３の深さＤを示しており、この孔１３の深さＤは磁歪膜４の厚みＥとほゞ同一（Ｄ≒Ｅ）としていて、それは又、トルクセンサシャフト本体３にかかった孔１３の底部における直径ｆが、孔１３の磁歪膜４表面部における直径Ｆの１／２以上（ｆ≧Ｆ／２）となるのを好ましい値としている。 The center O of the hole 13 is positioned on the perpendicular bisector C from the center between the two holes 13 of the adjacent magnetostrictive film deletion pattern 5.
FIG. 5 shows the depth D of the hole 13. The depth D of the hole 13 is substantially the same as the thickness E of the magnetostrictive film 4 (D≈E). It is preferable that the diameter f at the bottom of the applied hole 13 is not less than ½ (f ≧ F / 2) of the diameter F at the surface portion of the magnetostrictive film 4 of the hole 13.

このように本構成のものでは、トルクセンサシャフト本体３の外周面部に磁歪膜４を設け、その後に、その磁歪膜４にほゞ円形の孔１３を軸方向に対し傾斜状に並べて複数個穿つことにより磁歪膜削除パターン５を形成することで、磁歪式トルクセンサシャフト２を製造するようにしている。   As described above, in this configuration, the magnetostrictive film 4 is provided on the outer peripheral surface portion of the torque sensor shaft main body 3, and then a plurality of substantially circular holes 13 are formed in the magnetostrictive film 4 so as to be inclined with respect to the axial direction. Thus, the magnetostrictive torque sensor shaft 2 is manufactured by forming the magnetostrictive film deletion pattern 5.

この方法によれば、磁歪膜４には、それをトルクセンサシャフト本体３の外周面部に設けた後に、孔１３をトルクセンサシャフト本体３の軸方向に対し傾斜状に並べて複数個穿つのであるから、従来の、トルクセンサシャフト本体の外周面部に接着する前の薄帯に孔をトルクセンサシャフト本体の軸方向に対し傾斜状に並べて複数個穿つような作業の困難さがなく、又、そのようにして磁歪膜削除パターンを形成したアモルファス薄帯をトルクセンサシャフト本体の外周面部に接着するような作業の困難さもない。   According to this method, since the magnetostrictive film 4 is provided on the outer peripheral surface portion of the torque sensor shaft main body 3, a plurality of holes 13 are formed in an inclined manner with respect to the axial direction of the torque sensor shaft main body 3. There is no difficulty in the conventional work of perforating a plurality of holes arranged in an inclined manner with respect to the axial direction of the torque sensor shaft main body before bonding to the outer peripheral surface portion of the torque sensor shaft main body. Thus, there is no difficulty in the operation of bonding the amorphous ribbon having the magnetostrictive film deletion pattern to the outer peripheral surface portion of the torque sensor shaft main body.

又、孔１３はほゞ円形であって溝ではないから、従来の、トルクセンサシャフト本体の外周面部にその円筒面に沿って磁歪膜を残す（連続溝を形成する）マスキングを施すような作業の困難さがない上、レーザトリミングをする場合のレーザ出力の管理やトルクセンサシャフト本体の回転速度の管理も容易にできる。
かくして、本構成のものの場合、トルクセンサシャフト本体３の外周面部に設ける磁歪膜４に、軸方向に対して傾斜する磁歪膜削除パターン５を容易に設けることができる。 Further, since the hole 13 is substantially circular and not a groove, a conventional masking operation is performed on the outer peripheral surface portion of the torque sensor shaft main body so as to leave a magnetostrictive film along the cylindrical surface (form a continuous groove). In addition, it is easy to manage the laser output and the rotational speed of the torque sensor shaft body when performing laser trimming.
Thus, in the case of this configuration, the magnetostrictive film deletion pattern 5 inclined with respect to the axial direction can be easily provided on the magnetostrictive film 4 provided on the outer peripheral surface portion of the torque sensor shaft body 3.

特に、本構成のものの場合、孔１３は傾斜の並び方向に重なっていないが、その並び方向に隣り合う二つの孔の中心間距離Ａは、隣り合う磁歪膜削除パターン５の中心間距離Ｂより小さくしている。それにより、磁歪膜削除パターン５と、残った磁歪膜４のパターンとの区別が明確となり、それだけトルクセンサシャフトにトルクが作用したときの磁歪膜４の透磁率変化を明確に出させることができて、トルクの検出精度を高めることができ、且つ、磁歪膜４のパターンを幅広く残すことができて、磁歪膜４の固着強度を高め、使用上の信頼性を向上させることができる。   In particular, in the case of this configuration, the holes 13 do not overlap in the direction in which the slopes are arranged, but the center-to-center distance A between two holes adjacent to each other in the direction of alignment is greater than the center-to-center distance B between adjacent magnetostrictive film deletion patterns 5. It is small. Thereby, the distinction between the magnetostrictive film deletion pattern 5 and the remaining pattern of the magnetostrictive film 4 becomes clear, and the change in the permeability of the magnetostrictive film 4 when the torque acts on the torque sensor shaft can be clearly shown. Thus, the torque detection accuracy can be increased, and a wide pattern of the magnetostrictive film 4 can be left, the fixing strength of the magnetostrictive film 4 can be increased, and the reliability in use can be improved.

又、孔１３の中心Ｏは、隣の磁歪膜削除パターン５の二つの孔１３間の中央からの垂直二等分線Ｃ上に位置するようにしており、それによって、その垂直二等分線Ｃ上には、磁歪膜削除パターン５の孔１３の外形上の凸形状（図１に１３ａで示す）が隣の磁歪膜削除パターン５の二つの孔１３間の凹形状（図１に１３ｂで示す）に合って、磁歪膜４を極力外形の凹凸の少ない形状に残すことができ、それだけ又、トルクセンサシャフトにトルクが作用したときの磁歪膜４の透磁率変化を明確に出させることができて、トルクの検出精度を高めることができる。   The center O of the hole 13 is positioned on the vertical bisector C from the center between the two holes 13 of the adjacent magnetostrictive film deletion pattern 5. On C, the convex shape on the outer shape of the hole 13 of the magnetostrictive film deletion pattern 5 (indicated by 13a in FIG. 1) is the concave shape between the two holes 13 of the adjacent magnetostrictive film deletion pattern 5 (in FIG. The magnetostrictive film 4 can be left in a shape with as few asperities as much as possible, and the change in the permeability of the magnetostrictive film 4 when the torque acts on the torque sensor shaft can be clearly shown. Thus, the torque detection accuracy can be increased.

更に、孔１３の深さＤは磁歪膜４の厚みＥとほゞ同一としており、それによって、磁歪膜削除パターン５と、残った磁歪膜４のパターンとの区別を明確にするのに、磁歪膜４を穿つのがほゞ必要最小限の加工でできる。   Further, the depth D of the hole 13 is substantially the same as the thickness E of the magnetostrictive film 4, so that the magnetostrictive film deletion pattern 5 and the remaining pattern of the magnetostrictive film 4 can be clearly distinguished. It is possible to pierce the membrane 4 with the minimum necessary processing.

そして、孔１３はレーザトリミングによって形成しており、レーザトリミングはレーザのスポット照射の直径を数〔μｍ〕に絞って行い得るから、孔１３も数１０〔μｍ〕の微細な直径で形成できて、磁歪膜削除パターン５を微細なパターンに形成でき、それだけトルクセンサシャフト本体３に対するパターン本数を多くできるから、磁歪膜４の透磁率変化を豊富にしてトルクの検出精度を高めることができる。しかも、レーザトリミングの熱により磁歪膜４とトルクセンサシャフト本体３とを溶接結合する作用もあって、磁歪膜４をトルクセンサシャフト本体３により強固に固着することができ、使用上の信頼性を向上させることができる。   The holes 13 are formed by laser trimming, and laser trimming can be performed by reducing the diameter of laser spot irradiation to a few [μm], so the holes 13 can also be formed with a fine diameter of several tens [μm]. Since the magnetostrictive film deletion pattern 5 can be formed into a fine pattern and the number of patterns for the torque sensor shaft body 3 can be increased accordingly, the change in the magnetic permeability of the magnetostrictive film 4 can be abundant and the torque detection accuracy can be increased. In addition, the magnetostrictive film 4 and the torque sensor shaft main body 3 are welded to each other by the heat of laser trimming, so that the magnetostrictive film 4 can be firmly fixed to the torque sensor shaft main body 3 and reliability in use can be improved. Can be improved.

加えて、この場合、孔１３は、レーザトリミングにより、１つの孔１３を形成した後には、隣りの孔１３の部分を避けて形成するようにしており、それによって、レーザトリミングによる加工熱が分散して与えられ、均一な熱加工ができる。又、その加工時に磁歪膜４が過度に加熱されると、孔１３の径に狂いが生じることがあるが、レーザトリミングによる加工熱が分散して与えられ、磁歪膜４が過度に加熱されることがないので、孔１３の径に狂いが生じることもない。   In addition, in this case, after forming one hole 13 by laser trimming, the hole 13 is formed so as to avoid the adjacent hole 13, thereby dispersing processing heat by laser trimming. And can be uniformly heat-processed. Further, if the magnetostrictive film 4 is excessively heated during the processing, the diameter of the hole 13 may be distorted. However, the processing heat by laser trimming is distributed and given, and the magnetostrictive film 4 is excessively heated. Therefore, the diameter of the hole 13 does not get out of order.

以上に対して、図７は本発明の第２実施例（第２の実施形態）を示すもので、第１実施例と同一の部分には同一の符号を付して説明を省略し、異なる部分についてのみ述べる。   In contrast to this, FIG. 7 shows a second embodiment (second embodiment) of the present invention. The same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Only the part is described.

このものの場合、磁歪膜削除パターン５の孔１３を傾斜の並び方向に一部ずつ重ねて形成している。
このようにすることにより、磁歪膜削除パターン５と、残った磁歪膜４のパターンとの区別が一層明確となり、それだけトルクセンサシャフトにトルクが作用したときの磁歪膜４の透磁率変化を一層明確に出させることができて、トルクの検出精度を更に高めることができる。
そのほかは、第１実施例と同一であり、従って、第１実施例と同様の作用効果を得ることができる。 In this case, the holes 13 of the magnetostrictive film deletion pattern 5 are formed so as to partially overlap each other in the direction of inclination.
By doing so, the distinction between the magnetostrictive film deletion pattern 5 and the remaining pattern of the magnetostrictive film 4 is further clarified, and the change in the permeability of the magnetostrictive film 4 when torque is applied to the torque sensor shaft is further clarified. The accuracy of torque detection can be further increased.
Other than that, this embodiment is the same as the first embodiment, and therefore the same effects as the first embodiment can be obtained.

このほか、本発明は上記し且つ図面に示した実施例にのみ限定されるものではなく、要旨を逸脱しない範囲内で適宜変更して実施し得る。   In addition, the present invention is not limited to the embodiments described above and shown in the drawings, and can be implemented with appropriate modifications without departing from the scope of the invention.

本発明の第１実施例を示す主要部分中の一部の側面図The side view of the part in the principal part which shows 1st Example of this invention 主要部分の加工途中状態の側面図Side view of the main part during machining 主要部分の加工後状態の側面図Side view of the main part after processing 主要部分の加工順序を示す一部の側面図Partial side view showing the processing order of the main parts 図１のＸ−Ｘ線に沿う主要部分中の一部の断面図Sectional drawing of the part in the principal part in alignment with the XX line of FIG. トルクセンサ全体の縦断側面図Vertical side view of the entire torque sensor 本発明の第２実施例を示す図１相当図FIG. 1 equivalent view showing a second embodiment of the present invention.

符号の説明Explanation of symbols

図面中、１はトルクセンサ、２は磁歪式トルクセンサシャフト、３はトルクセンサシャフト本体、４は磁歪膜、５は磁歪膜削除パターン、１３は孔、Ａは二つの孔の中心間距離、Ｂは隣り合う磁歪膜削除パターンの中心間距離、Ｃは二つの孔間の中央からの垂直二等分線、Ｄは孔の深さ、Ｅは磁歪膜の厚み、Ｏは孔の中心を示す。   In the drawings, 1 is a torque sensor, 2 is a magnetostrictive torque sensor shaft, 3 is a torque sensor shaft body, 4 is a magnetostrictive film, 5 is a magnetostrictive film deletion pattern, 13 is a hole, A is a distance between centers of two holes, B Is the distance between the centers of adjacent magnetostrictive film deletion patterns, C is a perpendicular bisector from the center between two holes, D is the depth of the hole, E is the thickness of the magnetostrictive film, and O is the center of the hole.

Claims (6)

トルクセンサシャフト本体の外周面部に磁歪膜を設け、その後に、その磁歪膜にほゞ円形の孔を、レーザトリミングによって、軸方向に対し傾斜状に並べて複数個穿つことにより磁歪膜削除パターンを形成するようにしたことを特徴とする磁歪式トルクセンサシャフトの製造方法。 A magnetostrictive film is formed on the outer peripheral surface of the torque sensor shaft body, and then a magnetostrictive film deletion pattern is formed by drilling a plurality of roughly circular holes in the magnetostrictive film in an inclined manner with respect to the axial direction by laser trimming. A method of manufacturing a magnetostrictive torque sensor shaft, wherein: 磁歪膜削除パターンの孔が並び方向に重なっておらず、その並び方向に隣り合う二つの孔の中心間距離が、隣り合う磁歪膜削除パターンの中心間距離より小さくされていることを特徴とする請求項１記載の磁歪式トルクセンサシャフトの製造方法。   The holes of the magnetostrictive film deletion pattern do not overlap in the alignment direction, and the distance between the centers of two holes adjacent in the alignment direction is smaller than the distance between the centers of the adjacent magnetostrictive film deletion patterns. A method for manufacturing a magnetostrictive torque sensor shaft according to claim 1. 磁歪膜削除パターンの孔が並び方向に一部ずつ重なっていることを特徴とする請求項１記載の磁歪式トルクセンサシャフトの製造方法。   2. The method of manufacturing a magnetostrictive torque sensor shaft according to claim 1, wherein the holes of the magnetostrictive film deletion pattern partially overlap each other in the arrangement direction. 磁歪膜削除パターンの孔の中心が、隣の磁歪膜削除パターンの二つの孔間の中央からの垂直二等分線上に位置することを特徴とする請求項２又は３記載の磁歪式トルクセンサシャフトの製造方法。   4. The magnetostrictive torque sensor shaft according to claim 2, wherein the center of the hole of the magnetostrictive film deletion pattern is located on a perpendicular bisector from the center between two holes of the adjacent magnetostrictive film deletion pattern. Manufacturing method. 磁歪膜削除パターンの孔の深さが磁歪膜の厚みとほゞ同一であることを特徴とする請求項１記載の磁歪式トルクセンサシャフトの製造方法。   2. The method of manufacturing a magnetostrictive torque sensor shaft according to claim 1, wherein the depth of the hole of the magnetostrictive film deletion pattern is substantially the same as the thickness of the magnetostrictive film. 磁歪膜削除パターンの孔が、その１つの孔を形成した後に、隣の孔の部分を避けて形成されていることを特徴とする請求項１記載の磁歪式トルクセンサシャフトの製造方法。 Hole of the magnetostrictive film deletion pattern, after forming the one hole of that method of manufacturing a magnetostrictive torque sensor shaft according to claim 1, wherein that you have been formed to avoid a part of the adjacent hole.
JP2007298106A 2007-11-16 2007-11-16 Magnetostrictive torque sensor shaft manufacturing method Expired - Fee Related JP5044372B2 (en)

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