JP3739132B2 - Dust intrusion prevention device for automatic guided vehicles - Google Patents
Dust intrusion prevention device for automatic guided vehicles Download PDFInfo
- Publication number
- JP3739132B2 JP3739132B2 JP14516896A JP14516896A JP3739132B2 JP 3739132 B2 JP3739132 B2 JP 3739132B2 JP 14516896 A JP14516896 A JP 14516896A JP 14516896 A JP14516896 A JP 14516896A JP 3739132 B2 JP3739132 B2 JP 3739132B2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- dust
- automatic guided
- hermetic chamber
- floor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000428 dust Substances 0.000 title claims description 35
- 230000002265 prevention Effects 0.000 title description 10
- 239000000463 material Substances 0.000 claims description 8
- 230000000630 rising effect Effects 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
Landscapes
- Handcart (AREA)
- Platform Screen Doors And Railroad Systems (AREA)
- Ventilation (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
【0001】
【発明の属する技術分野】
本発明は、無人搬送車が走行するクリーンルーム内において、クリーン度を設定値以下に保持するようにした無人搬送車におけるダスト侵入防止装置に関するものである。
【0002】
【従来の技術】
従来クリーンルーム内において走行する無人搬送車は、走行車輪が床面と接触して転動し走行する際、車輪と床面との接触にて床面からダストが発生する。このダストにて搬送物、その他クリーンルーム内が汚染されないようにするため、クリーンルーム内天井よりクリーンエアを床面に向かって噴射し、床面、特に走行路床面に設けた排気口より排気するダウンフローを形成している。然し、このダウンフローのみでは高クリーン度を保持することが困難であるため、ダウンフローと無人搬送車の搬送物収納室を走行車輪等を配設した搬送車下部室とを仕切りこの上部の搬送物収納室内を気密室とし、かつこの上部気密室の内部圧力を高めて、搬送物収納室へダストの侵入を防止する対策を行っている。
【0003】
【発明が解決しようとする課題】
上記従来の無人搬送車におけるダスト侵入防止方法においては、搬送物の搬送時は気密室の気密は保持されるので、所定のクリーン度を保つことができる。しかし搬送物の移載作業のために、上部気密室の気密式のドアを開けると、気密室内部圧力が減少し、床面から発塵して上昇してくるダストがこの開口された上部気密室内に侵入し、ダスト進入防止効果が減少してしまうという問題点があった。
【0004】
本発明は、上記従来の無人搬送車のダスト侵入防止装置の有する問題点を解決し、無人搬送車の車体下部に排気ファンを設けて床面から発生するダストを下部気密室内に吸引し走行路の近傍に設けた排気口よりダウンフローと共に排出してダストを正圧とした上部気密室の搬送物収納室内に侵入するのを防止すことができる無人搬送車におけるダスト侵入防止装置を提供することを目的とする。
【0005】
【課題を解決するための手段】
上記目的を達成するため、本発明の無人搬送車におけるダスト侵入防止装置は、無人搬送車を、上部気密室と下部気密室の上下に両気密室間で空気が流通しないように分割し、上部気密室を搬送物収納室とし、側壁若しくは天井にフィルタ付ファンを設け、側面には開閉式のドアを備え、前記フィルタ付ファンにて床面から発生するダストが舞い上がらない位置からのクリーンエアを上部気密室内に供給して内部を正圧に保つようにするとともに、前記ドアが開状態の場合に前記フィルタ付ファンにて吸引されたクリーンエアをドア が開いた開口部より上部気密室外に排出するようにし、下部気密室内に駆動制御装置を収納し、下部気密室の上部には流入口を開口し、下部気密室の床面に排気口を形成し、内部に排気ファンを設け、該排気ファンにて床から上昇するダストを流入口から下部気密室内に吸引して床下の排気口から床面の走行路の近傍に形成したダウンフロー用の排気口に向けて排気することを特徴とする。
【0006】
上記の構成からなる本発明の無人搬送車におけるダスト侵入防止装置においては、搬送物を収納するドアの開閉に関係なく常に上部気密室は正圧に保たれるので、発生ダストが上部気密室には侵入することがなく搬送物のクリーン度が保持されるとともに、下部気密室内にダストが発生しやすい駆動制御装置、車輪を備え、かつ該下部気密室を負圧としているので発生するダストもこの下部気密室内の負圧側に吸引されるため、上部気密室まで到達することがなく、上部気密室には侵入することがなく搬送物のクリーン度が保持される。
【0007】
【発明の実施の形態】
以下、本発明の無人搬送車におけるダスト侵入防止装置の実施の形態を図面に基づいて説明する。
【0008】
図1は、本発明における搬送物移載中の無人搬送車を示す平面図で、図2はその正面図を示す。図において1は、無人搬送車の本体で、この無人搬送車の本体1を上部気密室3と、下部気密室10とに分ける。上部気密室3は搬送物収納室となり、所定の容積を有し、内部にカセット2を収納するものとすると共に、側壁若しくは天井にフィルタ付ファン4を設けると共に、側面には開閉式のドア6、7を備え、これによりこのフィルタ付ファン4の駆動にて床面から発生するダストが舞い上がらない位置からのクリーンエアを上部気密室内に供給して内部を正圧に保つようにする。
【0009】
また、無人搬送車1の下部気密室10内には、走行車輪W及び駆動装置D、制御装置C等の発塵し易い駆動制御装置を収納し、この外周部をカバー12、13にて囲み気密を保つようにすると共に、この下部気密室の上部には流入口14、15を開口し、下部気密室の床面に排気口16を形成し、内部に排気ファン11を設けてなる。この排気ファン11は床面8の走行路の近傍に形成したダウンフロー用の排気口に向けて排気するようにする。これにより、車体下部の下部気密室内部は負圧になり、床から上昇するダストを流入口14、15から下部気密室内に吸引して床下の排気口16から排出される。このため、気密室内へのダストの侵入を防止することが可能である。
【0010】
従って上述の如く構成する無人搬送車におけるダスト侵入防止装置において、カセット2を移載するために無人搬送車の上部気密室のドア6、7を開状態とすると常時駆動のフィルタ付ファンにて吸引されたクリーンエアはドアが開いた開口部より気密室外に排出される。このカセット移載時も下部気密室内で常時駆動された排気用ファンにより、該室内が負圧となっているので発塵したダストはフィルタ付ファンより下方位置にある流入口より吸引され、床下へ排気されるため、ダストは飛散することなく床面下へ排気され、上部気密室内に流入することはない。
【0011】
【発明の効果】
本発明の無人搬送車におけるダスト侵入防止装置によれば、無人搬送車において、移載作業中でも上部気密室内が正圧となっているので、該室へのダストが侵入することを防止する効果がある。
また、下部気密室は台車下部の駆動装置部よりの発塵も流入口より吸引して床下へ排気するのでダストが飛散することなく、発塵と同時に排気され、クリーンルーム内は設定クリーン度を保持することができる。
【図面の簡単な説明】
【図1】 本発明の無人搬送車におけるダスト侵入防止装置の実施例を示す平面図である。
【図2】 同正面図である。
【符号の説明】
1 無人搬送車
2 カセット
3 上部気密室
4 フィルタ付ファン
5 クリーンエア
6 ドア
7 ドア
8 走行床
9 ダスト
10 下部気密室
11 排気ファン
12 カバー
13 カバー
14 流入口
15 流入口
16 床下排気口[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a dust intrusion prevention device in an automatic guided vehicle that maintains a cleanness level below a set value in a clean room in which the automatic guided vehicle travels.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, automatic guided vehicles traveling in a clean room generate dust from the floor surface due to the contact between the wheel and the floor surface when the traveling wheel rolls and travels in contact with the floor surface. In order to prevent the transported goods and other clean rooms from being contaminated by this dust, clean air is jetted from the ceiling in the clean room toward the floor and exhausted from the exhaust port provided on the floor, especially the road surface of the road. A flow is formed. However, since it is difficult to maintain high cleanliness only with this downflow, the downflow and the transported material storage chamber of the automatic guided vehicle are separated from the transport vehicle lower chamber provided with traveling wheels, etc. A countermeasure is taken to prevent dust from entering the transported material storage chamber by making the material storage chamber an airtight chamber and increasing the internal pressure of the upper airtight chamber.
[0003]
[Problems to be solved by the invention]
In the conventional dust intrusion prevention method in the conventional automatic guided vehicle, airtightness of the airtight chamber is maintained when the transported object is transported, so that a predetermined cleanliness can be maintained. However, if the airtight door of the upper airtight chamber is opened for the transfer work of the transported material, the pressure inside the airtight chamber decreases, and the dust that rises from the floor is generated by the upper airtight chamber. There was a problem that the effect of preventing dust from entering the room was reduced.
[0004]
The present invention solves the problems of the conventional dust intrusion prevention device of the automatic guided vehicle, and an exhaust fan is provided at the lower part of the vehicle body of the automatic guided vehicle to suck the dust generated from the floor surface into the lower airtight chamber so that the traveling path To provide a dust intrusion prevention device for an automatic guided vehicle capable of preventing intrusion into a transported material storage chamber of an upper airtight chamber in which dust is discharged together with a down flow from an exhaust port provided in the vicinity of the air and the dust is positive pressure. With the goal.
[0005]
[Means for Solving the Problems]
To achieve the above object, the dust intrusion preventing device in the automatic guided vehicle of the present invention is to divide the AGV, so that air is not circulated between the two airtight chambers above and below the upper airtight chamber and a lower airtight chamber, upper The airtight chamber is a transported material storage chamber, a fan with a filter is provided on the side wall or ceiling, an openable door is provided on the side, and clean air from a position where dust generated from the floor does not rise by the fan with the filter. Supplying the inside of the upper airtight chamber to keep the inside at a positive pressure, and when the door is open, clean air sucked by the fan with filter is discharged out of the upper airtight chamber from the opening of the door. The drive control device is housed in the lower hermetic chamber, an inflow port is opened in the upper part of the lower hermetic chamber, an exhaust port is formed in the floor of the lower hermetic chamber, an exhaust fan is provided inside, and the exhaust F The dust rising from the floor at emission from the inlet, characterized in that the exhausted toward the exhaust port of the down-flow is formed in the vicinity of the traveling path floor underfloor exhaust port by suction to the lower airtight chamber .
[0006]
In the dust intrusion prevention device in the automatic guided vehicle of the present invention having the above-described configuration, the upper hermetic chamber is always maintained at a positive pressure regardless of opening / closing of the door for storing the transported object, so that generated dust is kept in the upper hermetic chamber. Is not invaded and the cleanliness of the conveyed product is maintained, and there is a drive control device and wheels that easily generate dust in the lower airtight chamber, and the lower airtight chamber has a negative pressure. Since it is sucked to the negative pressure side in the lower hermetic chamber, it does not reach the upper hermetic chamber and does not enter the upper hermetic chamber, so that the cleanliness of the conveyed product is maintained.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a dust intrusion prevention device in an automatic guided vehicle according to the present invention will be described with reference to the drawings.
[0008]
FIG. 1 is a plan view showing an automatic guided vehicle during transfer of a conveyed product in the present invention, and FIG. 2 is a front view thereof. In the figure,
[0009]
Further, in the lower hermetic chamber 10 of the automatic guided
[0010]
Therefore, in the dust intrusion prevention device in the automatic guided vehicle configured as described above, when the
[0011]
【The invention's effect】
According to the dust intrusion prevention device in the automatic guided vehicle of the present invention, since the upper hermetic chamber is at a positive pressure even during the transfer operation in the automatic guided vehicle, the effect of preventing dust from entering the chamber is obtained. is there.
In addition, the lower airtight chamber sucks dust from the drive unit at the bottom of the carriage and exhausts it under the floor so that it is exhausted to the bottom of the floor without being scattered. can do.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of a dust intrusion prevention device in an automatic guided vehicle according to the present invention.
FIG. 2 is a front view of the same.
[Explanation of symbols]
DESCRIPTION OF
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14516896A JP3739132B2 (en) | 1996-05-14 | 1996-05-14 | Dust intrusion prevention device for automatic guided vehicles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14516896A JP3739132B2 (en) | 1996-05-14 | 1996-05-14 | Dust intrusion prevention device for automatic guided vehicles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09301162A JPH09301162A (en) | 1997-11-25 |
| JP3739132B2 true JP3739132B2 (en) | 2006-01-25 |
Family
ID=15379012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14516896A Expired - Fee Related JP3739132B2 (en) | 1996-05-14 | 1996-05-14 | Dust intrusion prevention device for automatic guided vehicles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3739132B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106066647B (en) * | 2016-06-12 | 2019-04-05 | 山东省产品质量检验研究院 | A kind of control method for carrying container from electrical forklift robot |
-
1996
- 1996-05-14 JP JP14516896A patent/JP3739132B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09301162A (en) | 1997-11-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100683074B1 (en) | robotic vacuum | |
| US7891045B2 (en) | Robot cleaner system having robot cleaner and docking station | |
| US12408805B2 (en) | Debris bin assembly, cleaning robot and system thereof | |
| JP3739132B2 (en) | Dust intrusion prevention device for automatic guided vehicles | |
| JP2000188320A (en) | Local clean system | |
| JPH01288342A (en) | clean cabinet | |
| JP3673327B2 (en) | Dust intrusion prevention device for automatic guided vehicles | |
| JP2001182978A (en) | Clean room equipment | |
| JP2000085963A (en) | Clean working equipment | |
| JP3861534B2 (en) | Automated guided vehicle for clean rooms | |
| JP2009126677A (en) | Transport device | |
| JPH09109692A (en) | Electric car | |
| JP2979846B2 (en) | Automatic guided vehicle | |
| JP3351362B2 (en) | Carrier | |
| JP3349919B2 (en) | Air purification device for semiconductor manufacturing process | |
| JPH0763387A (en) | Atmosphere suction device for safety cabinet | |
| JP2500940B2 (en) | Electric vacuum cleaner | |
| JP4067703B2 (en) | Transport cart | |
| JPS6027138Y2 (en) | Cleaning equipment for load handling equipment | |
| JP3369661B2 (en) | Safety cabinet suction device | |
| KR100505027B1 (en) | Wafer transferring cart | |
| JP3447208B2 (en) | Vacuum cleaner suction body | |
| JP3829272B2 (en) | Vacuum cleaner | |
| JP4116928B2 (en) | Goods transport vehicle and transport system | |
| JP4320936B2 (en) | Transport vehicle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20041222 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050215 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050418 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20051011 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20051101 |
|
| R150 | Certificate of patent (=grant) or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081111 Year of fee payment: 3 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081111 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091111 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091111 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101111 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20101111 Year of fee payment: 5 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111111 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20111111 Year of fee payment: 6 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121111 Year of fee payment: 7 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121111 Year of fee payment: 7 |
|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121111 Year of fee payment: 7 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |