JP2010103950A - Vibrator and method of manufacturing the same - Google Patents

Abstract

An object of the present invention is to provide a vibrator that realizes a reduction in thickness and an improvement in impact resistance, and a method for manufacturing the vibrator.
A vibrator (piezoelectric vibrator) of the present invention includes a base, a plurality of vibrating arms extending from the base, and a pair of parallel arms extending along the vibrating arm from the base with the vibrating arm interposed therebetween. A vibration piece housed inside the package, a first support member 70a connected to the package 40 and supporting the fixation arm, and a lid 60 stacked on the package 40. And a second support member 70b for supporting the fixing arm, and one of the first and second support members 70a and 70b is a conductive adhesive, and the vibration piece is the first and the second support member 70b. It is characterized by being sandwiched and supported by the package 40 and the lid body 60 via the second support members 70a and 70b.
[Selection] Figure 1

Description

  The present invention relates to a vibrator used for communication equipment and the like and a method for manufacturing the vibrator.

  Along with the downsizing and thinning of electronic devices, there is a demand for downsizing and thinning of surface mount type vibrators. A piezoelectric vibrating piece constituting a piezoelectric device as shown in Patent Document 1 employs a cantilever support structure in which a fixed end side in a longitudinal direction is fixed by a mount electrode in a package and a free end side is made free. As a result, energization from the mount electrode is ensured, stress from the mount electrode is relaxed, the mounting area of the piezoelectric vibrating piece is reduced, and the entire device is miniaturized.

In addition, as shown in Patent Document 2, a piezoelectric device having a configuration in which a piezoelectric vibrating piece is accommodated in a package is bonded and supported in order to improve the bonding strength of the piezoelectric vibrating piece to the package and to prevent adverse effects on vibration performance due to bonding. A piezoelectric device is disclosed in which a piezoelectric vibrating piece provided with a fixing arm is housed in a package.
Japanese Patent No. 3982441 JP 2006-203458 A

  However, the piezoelectric vibrating piece as shown in Patent Document 1 has a possibility that the free end of the piezoelectric vibrating piece comes into contact with the inner surface of the package when the piezoelectric device is dropped and impacts the characteristics of the piezoelectric device. Note that this problem is likely to become significant if the package in which the piezoelectric vibrating piece is accommodated is small in size, because a sufficient clearance between the piezoelectric vibrating piece and the inner surface of the package cannot be secured. In addition, the fixed state of the piezoelectric vibrating piece fixed by the adhesive during a drop impact changes, causing a change in the internal resistance and capacitance, which are the electrical characteristics of the piezoelectric vibrating piece, resulting in the desired resonance frequency of the piezoelectric vibrating piece. There has been a problem of deviation from the resonance frequency. Further, in the case of the cantilever support structure, there is a problem that it is difficult to mount the piezoelectric vibrating piece in parallel to the base substrate.

Also, the piezoelectric device shown in Patent Document 2 is provided with a fixing arm in order to improve the strength when the vibrating piece is bonded to the package, and the piezoelectric vibrating piece is mounted parallel to the base substrate by the fixing arm. Can do. However, when considering further thinning of the package, there is a problem that the piezoelectric vibrating piece comes into contact with the lid and shifts from a desired resonance frequency.
Accordingly, the present invention focuses on the above-described problems, and an object thereof is to provide a vibrator that realizes a reduction in thickness and an improvement in impact resistance and a method for manufacturing the vibrator.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following application examples.
Application Example 1 includes a base, a plurality of resonating arms extending from the base, and a pair of fixing arms extending in parallel along the resonating arm across the resonating arm from the base, A vibrating piece to be housed, a first support member connected to the package and supporting the fixing arm, and a second support connected to the lid laminated on the package and supporting the fixing arm A member, and one of the first and second support members is a conductive adhesive, and the vibration piece is connected to the package and the lid via the first and second support members. A vibrator characterized by being sandwiched and supported by a body.

  Accordingly, since the mechanical fixing of the vibrating piece having the pair of fixing arms sandwiching the vibrating arm to the package is performed by the package and the lid through the support member, the vibrating piece at the time of a drop impact is performed. Can be prevented, and contact of the vibrating element with the inner surface of the package can be prevented. Further, it is possible to prevent the vibration piece from being fixed to the package in accordance with the drop impact, and to prevent the vibration piece from changing in frequency during the drop impact. In addition, the vibrating piece can be held in parallel with the lid or the base substrate, and the thickness can be easily reduced.

    Application Example 2 includes a base, a plurality of vibrating arms extending from the base, and a fixing arm extending in parallel along the vibrating arm from the base between the vibrating arms, and is housed inside the package. A first support member that connects to the package and supports the fixing arm, and a second support member that connects to the lid laminated on the package and points to the fixing arm. One of the first and second support members is a conductive adhesive, and the vibrating piece is attached to the package and the lid via the first and second support members. A piezoelectric vibrator characterized by being sandwiched and supported.

  As a result, the mechanical fixing of the vibrating piece having the fixing arm sandwiched between the vibrating arms to the package is performed by being held between the package and the lid through the support member. It is possible to suppress blurring and prevent contact of the resonator element with the inner surface of the package. Further, it is possible to prevent the vibration piece from being fixed to the package in accordance with the drop impact, and to prevent the vibration piece from changing in frequency during the drop impact. In addition, the vibrating piece can be held in parallel with the lid or the base substrate, and the thickness can be easily reduced.

    Application Example 3 A vibrating piece having a base, a plurality of vibrating arms extending from the base, and a pair of fixing arms extending in parallel along the vibrating arm across the vibrating arm from the base, A first sealing hole having a diameter larger than that of the stopper; a first substrate on which the vibrating piece is mounted; an opening that constitutes a cavity that houses the vibrating piece; and a frame portion of the cavity. A second sealing hole having a smaller diameter than the sealing material provided at a position overlapping with the first sealing hole when viewed in plan, and is stacked on the first substrate. And a lid that is disposed in a frame shape on the upper surface of the frame portion, and is laminated on the second substrate via a brazing material that arranges the opening and the second sealing hole inside, Adhering to the inner wall surface of the first sealing hole and the stepped portion between the first sealing hole and the second sealing hole. A sealing material, and first and second support members that support the fixing arm from above and below, one of the first and second support members being a conductive adhesive, The vibrator, wherein the vibrating piece is supported by being sandwiched between inner surfaces of the lid and the first substrate facing each other through the first and second support members.

  As a result, the mechanical fixing of the vibrating piece provided with a pair of fixing arms sandwiching the vibrating arm to the package is performed by being held between the package and the lid via the support member. It is possible to suppress blurring and prevent contact of the resonator element with the inner surface of the package. In addition, the vibrating piece can be held in parallel with the lid or the base substrate, and the thickness can be easily reduced. Further, the transpiration particles of the sealing material are not mixed and scattered in the cavity that accommodates the resonator element, and there is no adverse effect caused by the evaporation particles adhering to the excitation electrode of the resonator element.

    Application Example 4 A vibrating piece having a base, a plurality of vibrating arms extending from the base, and a fixing arm extending in parallel along the vibrating arm from the base between the vibrating arms, and a sealing material The first sealing hole having a larger aperture, the first substrate for mounting the vibrating piece, the opening constituting the cavity for housing the vibrating piece, and the frame portion of the cavity in plan view And a second sealing hole having a smaller diameter than the sealing material provided at a position overlapping with the first sealing hole, and being stacked on the first substrate A lid that is arranged in a frame shape on the upper surface of the frame portion, and is laminated on the second substrate via a brazing material that arranges the opening and the second sealing hole inside, 1 sealing hole inner wall surface and a sealing material fixed to a step portion between the first sealing hole and the second sealing hole And first and second support members that support the fixing arm from above and below, one of the first and second support members being a conductive adhesive, and the vibrating piece being A vibrator characterized by being sandwiched and supported by inner surfaces of the lid and the first substrate facing each other via the first and second support members.

  As a result, the mechanical fixing of the resonator element having the fixing arm sandwiched between the vibrating arms to the package is performed between both surfaces of the fixing arm and the inner surface of the package. For this reason, the resonator element can be held in parallel with the lid or the first substrate, which facilitates thinning. Moreover, it is possible to prevent the transpiration particles of the sealing material from being mixed and scattered in the cavity that accommodates the resonator element, and there is no adverse effect caused by the evaporation particles adhering to the excitation electrode of the resonator element.

Application Example 5 The vibrator according to any one of Application Examples 1 to 4, wherein the second support member is brought into contact with the lid after the upper surface is cured.
Thus, even when the vibration piece is tilted after the second support member is cured, the contact of the vibration piece due to the contact between the second support member and the lid body when the lid pair is mounted on the package. The vibration piece can be adjusted in parallel by absorbing variations due to the bias. In addition, it is possible to suppress vibration of the vibrating piece during a drop impact and to prevent the vibrating piece from contacting the inner surface of the package.
Application Example 6 A first support member is applied to a base substrate of a package to mount a fixing arm of a vibrating piece, a resonance frequency of the vibrating piece is adjusted, and a second support is provided on the upper surface of the fixing arm. After the member is applied and the second support member is cured, the lid is joined to the package, and the vibrating piece is attached to the inner surfaces of the package opposite to each other via the first and second support members. A method for manufacturing a vibrator, characterized in that the vibrator is sandwiched and supported.

  Thus, even when the vibrating piece is inclined after the second supporting member is cured, the vibrating piece is brought into contact with the second supporting member and the lid when the lid pair is mounted on the package. The vibration piece can be adjusted in parallel by absorbing the variation due to the bias. Therefore, the resonator element can be held in parallel with the lid or the base substrate, and the thickness can be easily reduced. Further, the mechanical fixing of the vibrating piece having a pair of fixing arms sandwiching the vibrating arm to the package is performed by holding the vibrating piece between the package and the lid through the support member. And the contact of the resonator element with the inner surface of the package can be prevented. Further, it is possible to prevent the vibration piece from being fixed to the package in accordance with the drop impact, and to prevent the vibration piece from changing in frequency during the drop impact.

[Application Example 7]
The vibrator according to Application Example 6, wherein after applying the second support member, the lid is mounted and bonded to a package, and the second support member is fixed to the lid. Manufacturing method.
Thereby, hardening of the 2nd support member can be performed at the time of joining of a lid and a package, and a part of manufacturing process which hardens only the 2nd support member can be omitted.

  Hereinafter, embodiments of a vibrator and a method for manufacturing the same according to the present invention will be described in detail with reference to the accompanying drawings. In this embodiment, a case where a piezoelectric vibrator is used as an example of the vibrator will be described.

  FIG. 1 is a diagram showing a schematic configuration of a vibrator according to the first embodiment. (1) shows a plan view with the lid 60 removed, (2) shows an AA cross-sectional view with the lid 60 attached to (1), (3) shows a bottom view, (4 ) Shows a plan view of the package excluding the piezoelectric vibrating piece of (1). As illustrated, the piezoelectric vibrator 10 mainly includes a piezoelectric vibrating piece 20, a package 40 having a cavity for accommodating the piezoelectric vibrating piece 20, a lid body 60 that seals the upper opening of the cavity, and a support member 70. It is a configuration requirement.

  The piezoelectric vibrating piece 20 may be variously selected as long as it can be excited by forming an electrode pattern on a member having a piezoelectric effect, such as crystal, lithium tantalate, lithium niobate, and piezoelectric ceramics. It is. Here, in this embodiment, the member is made of quartz having excellent frequency-temperature characteristics, and a piezoelectric vibrating piece having the following form is employed. That is, it has a pair of vibrating arms 21, a base portion 22 that supports the vibrating arms 21, and a pair of fixing arms 23 that support the vibrating arms 21 and the base portion 22. Here, the fixing arm 23 is extended to both lateral sides of the base portion 22 via a constricted portion 24 extending in the opposite direction to the vibrating arm 21 from the base portion 22 in order to ensure the stability of the support state. . The fixing arm 23 extending to the side of the base portion 22 is further extended in the extending direction of the vibrating arm 21, and its end portion is positioned near the longitudinal center of the piezoelectric vibrating piece. By adopting such a configuration, the support portion can be placed near the longitudinal center of the piezoelectric vibrating piece, so that the mounting state can be stabilized, and the horizontal position in the mounting state of the piezoelectric vibrating piece can be secured. It becomes easy. Moreover, vibration leakage can be prevented by increasing the distance from the vibrating arm 21 serving as the excitation unit to the tip of the fixing arm 23 serving as the fixing unit. Furthermore, by providing the constricted portion 24 between the base portion 22 and the fixing arm 23, the effect of preventing vibration leakage can be enhanced.

  Excitation electrodes 25 and 26 are formed on the resonating arm 21 so that a voltage having the same potential is applied to opposing surfaces in the cross section. The excitation electrodes 25 and 26 are wired so that voltages having different polarities are applied to the surfaces corresponding to each other in the two vibrating arms 21 forming a pair, as indicated by diagonal lines in the opposite direction in FIG. ing. Input / output electrodes 27 and 28 for supplying electric power to the excitation electrodes 25 and 26 are formed on the fixing arm 23, and the excitation electrodes 25 and 29 are provided via the extraction electrodes 29a and 29b formed on the base or the like. 26 is electrically connected.

  The package 40 according to the present embodiment includes two substrates (a first substrate 42 and a second substrate 44). Both the first substrate 42 and the second substrate 44 may be ceramic substrates made of alumina, aluminum nitride or the like as a constituent member, and the package 40 is formed by laminating and sintering these substrates. .

  The first substrate 42 constitutes a bottom plate of the package 40, and a mount electrode 46 is formed on one main surface, and an external mounting electrode 48 is formed on the other main surface. Of the four external mounting electrodes 48 shown in FIG. 1 (3), two are set as active electrodes (HOT electrodes) 48a, and the remaining two are set as ground electrodes (GND electrodes) 48b. Each of the mount electrodes 46 is electrically connected to an external mounting electrode 48 set as a HOT electrode through a metal pattern 50 routed to the joint with the second substrate 44 and a through hole (not shown). Has been. Also, the external mounting electrode 48 is connected to an oscillation circuit that oscillates the piezoelectric vibrating piece 20 in the package by being connected to an electrode on the mounting device side (not shown).

  The second substrate 44 has an opening 52 for forming a cavity. The opening 52 is formed according to the shape of the piezoelectric vibrating piece 20. On the upper end surface of the frame portion of the opening 52, a metallization 85 having good wettability of the brazing material is provided.

  The lid 60 may be a flat member, and may be made of a metal (for example, Kovar) having a coefficient of thermal expansion close to that of the member constituting the package 40, glass (for example, soda glass), or the like. When a metal is used for the lid 60, the durability is high, and the lid 60 can be used as an external electrode depending on the wiring inside the package. In addition, when glass is used for the lid 60, the electrodes can be trimmed by a laser or ion beam from the main surface having translucency, and the frequency adjustment can be performed after the lid 60 is joined to the package 40. It becomes possible. Further, the metallization 85 may not be provided.

  The brazing material provided on the metallized layer 85 is a bonding material used for bonding the lid body 60 and the package 40. As the brazing material, a low melting point alloy, a low melting point glass, or the like is used. The brazing material is applied in a substantially rectangular shape on the metallization 85 around the opening 52.

  The support member 70 is formed of a conductive material such as conductive silicon, or a nonconductive adhesive having a certain strength and elasticity, such as an epoxy resin. Since the support member 70 has a certain strength, it can surely support the piezoelectric vibrating piece 20, and has a certain elasticity so that an impact from the outside of the package 40 can pass through the support member 70. It is possible to prevent the number from reaching 20. The support member 70 is provided on the upper and lower surfaces (both sides) of the fixing arm 23 of the piezoelectric vibrating piece 20, and the one fixed on the first substrate 42 is a first support member 70 a and is fixed to the lid 60. This is referred to as a second support member 70b. The first and second support members 70a and 70b are provided to have a predetermined height in order to support the piezoelectric vibrating piece 20 in a floating state without being brought into contact with the package 40.

Next, a method for manufacturing a piezoelectric vibrator having the above configuration will be described below.
The first support member 70a is applied to a predetermined height on the two mount electrodes 46 that are the fixed positions of the piezoelectric vibrating reed 20 on the first substrate 42 of the package 40. At this time, it is desirable that the application of the first support member 70a ensure a wide application area such as a multipoint or linear shape in order to stabilize the fixation of the piezoelectric vibrating piece 20.

  Then, the fixing arm 23 of the piezoelectric vibrating piece 20 is bonded onto the first supporting member 70a, and the first supporting member 70a is heated to the curing temperature while the piezoelectric vibrating piece 20 is maintained parallel to the upper surface of the first substrate 42. The piezoelectric vibrating piece 20 is fixed by heating and curing.

  After the first support member 70a is fixed, the piezoelectric vibrating piece 20 is electrically connected to the external mounting electrode 48, and can be oscillated by connecting the piezoelectric vibrating piece 20 to an oscillation circuit (not shown). Therefore, the resonance frequency is adjusted by irradiating the weight portion of the piezoelectric vibrating piece 20 with a laser beam, an ion beam, or the like and peeling off a part of the weight portion. The weight portion may have a configuration in which the excitation electrodes 25 and 26 are routed, but may be separated from the excitation electrodes 25 and 26.

  Next, the second support member 70 b is applied to the upper surface of the fixing arm 23 of the piezoelectric vibrating piece 20 to a predetermined height. At this time, the second support member 70 b is applied so that the height thereof is slightly higher than the height of the second substrate 44. In addition, it is desirable that the application area is wide, such as multipoint or linear, like the first support member 70a. Then, the second support member 70b is heated to the curing temperature and cured. Thus, the first support member 70a and the second support member 70b are fixed in a straight line with the fixing arm 23 interposed therebetween.

  After the second support member 70b is cured, the lid 60 and the package 40 are joined. First, when the lid body 60 is laminated on the metallized layer 85 of the second substrate 44 via a brazing material, the upper surface of the second support member 70b and the lower surface of the lid body 60 abut. Thus, even when the piezoelectric vibrating piece 20 is tilted after the second support member 70 b is cured, the second support member 70 b and the lid body 60 when the lid body 60 is mounted on the package 40. Thus, it is possible to adjust the piezoelectric vibrating piece 20 to be parallel by absorbing variations due to the bias of the piezoelectric vibrating piece 20. Then, the lid 60 is joined to the package 40 by heating to the joining temperature. At this time, the lid 60 and the second support member 70 b maintain the contact state without the support member being fixed to the lid 60.

  Accordingly, the fixing arm 23 of the piezoelectric vibrating piece 20 is sandwiched from the upper and lower surfaces (both surfaces) by the first support member 70 a on the first substrate 42 and the second support member 70 b on the lower surface of the lid body 60. Will be supported. The package 40 is maintained in a vacuum state, and a sealing hole (not shown) is sealed to form the piezoelectric vibrator 10.

  In addition, after apply | coating the 2nd support member 70b, the said cover body 60 may be mounted in the package 40, and it may join, and the 2nd support member 70b may be fixed to the said cover body 60. FIG. That is, after the second support member 70b is applied to the upper surface of the fixing arm 23, the lid body 60 is sealed on the second substrate 44 and heated in two stages. First, the second support member 70b is heated to the curing temperature. Next, the lid 60 and the package 40 are heated to the bonding temperature and bonded. Accordingly, the second support member 70b can be cured simultaneously with the joining of the lid body 60 and the package 40, and the manufacturing process for curing only the second support member 70b can be omitted.

  In the present embodiment, a conductive adhesive is used for the first support member 70a, a non-conductive adhesive is used for the second support member 70b, and a conductive adhesive is used for either one. In consideration of the expansion / contraction rate or expansion rate due to the curing of the support member, a conductive adhesive having the same quality for both the first and second support members may be used.

  According to the piezoelectric vibrator 10 of the first embodiment as described above, mechanical fixing of the piezoelectric vibrating piece 20 including the pair of fixing arms 23 sandwiching the vibrating arm 21 to the package 40 is performed on both surfaces of the fixing arm 23. This is performed between the inner surface of the package 40. For this reason, the piezoelectric vibrating piece 20 can be held in parallel with the lid 60 or the first substrate 42, and the thickness can be easily reduced. Moreover, the vibration of the piezoelectric vibrating piece 20 at the time of a drop impact can be suppressed, and contact between the piezoelectric vibrating piece 20 and the inner surface of the package 40 can be prevented. Similarly, the lid 60 and the package 40 can be prevented from contacting each other. Therefore, it is possible to improve the mounting strength of the piezoelectric vibrating piece 20 with respect to the package 40 while realizing miniaturization of the piezoelectric vibrator 20.

  FIG. 2 is a diagram showing a schematic configuration of the piezoelectric vibrator according to the second embodiment. (1) shows a plan view with the lid 60 removed, (2) shows a BB cross-sectional view with the lid 60 attached to (1), and (3) shows the piezoelectric vibrating piece of (1). The top view of the package remove | excluding was shown, (4) has shown the bottom view of the piezoelectric vibrating piece of 2nd Embodiment.

  The piezoelectric vibrator 10A according to the second embodiment employs the same material as the piezoelectric vibrating piece 10 of the first embodiment, and includes a pair of vibrating arms 202, a base portion 204 that supports the vibrating arms 202, and a pair of vibrating arms. A fixing arm 206 extending in parallel along the vibrating arm 202 from between 202 is provided.

  Here, the fixing arm 206 extends between the pair of vibrating arms 202 to the vicinity of the center along the longitudinal direction via the base portion 204 and the constricted portion 228. By adopting such a configuration, the support portion can be placed near the longitudinal center of the piezoelectric vibrating piece, so that the mounting state can be stabilized, and the horizontal position in the mounting state of the piezoelectric vibrating piece can be secured. It becomes easy. Further, by providing the constricted portion 228 between the base portion 204 and the fixing arm 206, the effect of preventing vibration leakage can be enhanced.

  Excitation electrodes 208 and 210 are formed on the vibrating arm 202 so that a voltage having the same potential is applied to the opposing surfaces in the cross section. The excitation electrodes 208 and 210 are wired so that voltages having different polarities are applied to the surfaces corresponding to each other in the two vibrating arms 202 forming a pair, as indicated by diagonal lines in the opposite direction in FIG. ing. Input / output electrodes 216 and 218 for supplying electric power to the excitation electrodes 208 and 210 are formed on the fixing arm 206, and the excitation electrodes 208 and 214 are formed via the extraction electrodes 212 and 214 formed on the base 204 and the like. , 210 are electrically connected. Further, weight portions 224 and 226 are formed at the ends of the two vibrating arms 202, respectively. The weight parts 224 and 226 are formed in a rectangular shape wider than the vibrating arm 202. By forming the weight portions 224 and 226, the entire length of the vibrating arm 202 can be shortened without changing the characteristics of the piezoelectric vibrating piece.

  Furthermore, two long grooves 230a, 230b, 230c, and 230d are formed on the front and back surfaces of the vibrating arm 202, respectively. By forming an electric field between the excitation electrode on the inner surface of the long groove 230 and the side electrode facing it, the electric field efficiency can be increased.

  The package 40a has the same configuration as the package 40 of the first embodiment, but the positions of the mount electrode 46a and the metal pattern 50a are different. As shown in FIG. 2 (3), the mount electrode 46 a is provided at a position facing the input / output electrodes 216 and 218 of the fixing arm 206 of the piezoelectric vibrating piece 200. The metal pattern 50a is also routed from the mount electrode 46a through a through hole (not shown) so as to be electrically connected to an external mounting electrode set as a HOT electrode.

  Other configurations are the same as those of the piezoelectric vibrator 10 according to the first embodiment, and detailed description thereof is omitted. The piezoelectric vibrator 10A according to the second embodiment having the above-described configuration can be manufactured in the same manner as the method for manufacturing the piezoelectric vibrator 10 according to the first embodiment.

  According to the piezoelectric vibrator 10A according to the second embodiment as described above, the mechanical fixing of the piezoelectric vibrating piece 200 including the fixing arm 206 sandwiched between the vibrating arms 202 to the package 40a is performed on both surfaces of the fixing arm 206. And the inner surface of the package 40a, the blurring of the piezoelectric vibrating piece 200 during a drop impact can be suppressed, and the piezoelectric vibrating piece 200 and the inner surface of the package 40a can be prevented from contacting each other. Similarly, contact between the lid 60 and the package 40a can be prevented. Therefore, it is possible to improve the mounting strength of the piezoelectric vibrating piece with respect to the package while realizing miniaturization of the piezoelectric vibrator.

Next, a piezoelectric vibrator 10B according to a third embodiment will be described. FIG. 3 is a diagram showing the configuration of the piezoelectric vibrator according to the third embodiment excluding the lid, (1) is a plane excluding the lid 60, and (2) is a cross-sectional view taken along the line CC in (1). FIG. 4 is a diagram showing the configuration of the package of the third embodiment, (1) is a plane excluding the lid 60, (2) is a DD cross section with the lid 60 attached to (1), (3) is an EE cross section obtained by attaching a lid 60 to (1), and (4) is a view showing a bottom surface. FIG. 5 is an enlarged view when a metal ball is placed in the first sealing hole. FIG. 6 is a partially enlarged view of a portion F in FIG.
The piezoelectric vibrating piece of the piezoelectric vibrator 10B according to the third embodiment is the same as the piezoelectric vibrating piece 20 in the first embodiment, and detailed description thereof is omitted.

The package 40b has the same basic configuration as the package 40 of the first embodiment, and different configurations will be described below.
In the first substrate 42b, a first sealing hole 80 is formed in one of the external mounting electrodes 48 set as the GND electrode. The first sealing hole 80 is a hole penetrating the first substrate 42b, and the diameter thereof is set larger than the diameter of the metal ball 96 (solder ball) used for sealing. A metal coating (metallized) 82 is formed on the inner wall surface of the first sealing hole 80 as shown in FIG. By applying metallization 82 to the inner wall surface of the first sealing hole 80, wettability with respect to the sealing material (for example, solder) can be improved, and adhesion, that is, airtight reliability of the package 40b can be improved. it can. The metallization 82 of the inner wall surface in the first sealing hole 80 is screen-printed simultaneously with the formation of the external mounting electrode 48 when the first substrate 42b is manufactured, and is internally drawn by suction from one main surface side. It can be formed by drawing into the wall surface.

  An opening 52b for forming a cavity is formed in the second substrate 44b, and a frame-shaped first metallization 85 with good wettability of the brazing material is formed on the upper end surface of the frame portion serving as a side wall. ing. Further, the second metallization 81 is formed in a floating island shape on the long side portion and on the short side portion in the junction region where the first metallization 85 is formed. The opening 52b is formed according to the shape of the piezoelectric vibrating piece 20, and is formed by connecting a wide portion 90 having a large width and a narrow portion 92 having a small width along the longitudinal direction of the substrate. The base portion 22, the fixing arm 23, and the proximal end side of the vibrating arm 21 can be accommodated in the wide portion 90, and the distal end side of the vibrating arm 21 can be accommodated in the narrow portion 92. As described above, since the difference in the width of the opening 52b is provided, the overhanging portion 94 is formed in the frame portion constituting the side wall.

  In the present embodiment, the second sealing hole 84 is formed in the overhanging portion 94 in the frame portion of the second substrate 44b. The second sealing hole 84 is a hole penetrating the second substrate 44b, the diameter of which is set smaller than the diameter of the metal ball 96 described above, and the formation position is centered on the first substrate. Desirably, the position coincides with the center of the first sealing hole 80 formed in 42b, and at least a part thereof is overlapped. By forming the first sealing hole 80 and the second sealing hole 84 in such a positional relationship, the cavity is evacuated via the first sealing hole 80 and the second sealing hole 84. It is because it becomes possible to perform.

  As shown in FIG. 5, by making the diameter of the second sealing hole 84 smaller than the diameter of the metal ball 96, the metal ball 96 accommodated in the first sealing hole 80 can be supported. . For this reason, the distance between the metal ball 96 and the cavity can be increased by the thickness of the second substrate 44b. Therefore, it is possible to prevent the transpiration particles generated when the metal ball 96 is melted from entering the cavity. Further, by making the second sealing hole 84 smaller in diameter than the first sealing hole 80, it is possible to increase the strength of the second substrate 44b serving as a frame-shaped member. A metallization 83 formed by screen printing or the like is formed around the second sealing hole 84 on the surface facing the first substrate 42b. By forming the metallization 83 in this portion, the metallization appears at the step portion between the first sealing hole 80 and the second sealing hole 84. Therefore, wettability of the portion with respect to the sealing material can be increased. For this reason, the sealing area (distance) by a sealing hole can be increased, and the airtight reliability of a piezoelectric vibrator can be improved.

  Since the first metallized 85 is provided in a substantially rectangular shape around the opening 52b as described above, the overhanging portion 94 is located inside the surrounding area made of the brazing material provided on the first metallized 85. It becomes. Further, the opening 52b and the second sealing hole 84 are also arranged inside the surrounding area made of the brazing material. Further, the second metallization 81 is formed on each of the long side portion and the short side portion of the joining region to which the brazing material is applied. Since the brazing material itself has a minute thickness, a minute gap is formed between the overhanging portion 94 where the brazing material is not applied and the lid body 60. Depending on the degree of melting, etc., an error may occur in the clearance. Since the gap between the overhanging portion 94 and the lid 60 is used as an air passage for evacuation through the second sealing hole 84, the time required for evacuation becomes longer when the gap is narrowed. It becomes. Further, the airtight reliability between the lid 60 and the second substrate 44b can be improved.

  For this reason, in this embodiment, as shown in FIG. 6, the gap 100 between the overhanging portion 94 and the lid 60 is set within a predetermined range depending on the thickness of the first and second metallizations 81 and 85 that are not melted by the heat at the time of lid joining. In addition, the second substrate 44b and the lid body 60 are bonded to each other with a brazing material.

Next, a method for manufacturing the piezoelectric vibrator 10B according to the third embodiment having the above-described configuration will be described.
The piezoelectric vibrating piece 10B according to the third embodiment is for fixing the piezoelectric vibrating piece 20 by performing the same process as the piezoelectric vibrating piece 10 of the first embodiment until the lid 60 is joined to the package 40b. The arm 23 is sandwiched and supported from the upper and lower surfaces (both surfaces) by the first support member 70a on the first substrate 42b and the second support member 70b on the lower surface of the lid 60.

  Then, after the lid 60 is joined to the package 40b, the cavity is evacuated and the first sealing hole 80 is sealed with the sealing material. It adheres to the transpiration particle adhesion region (shaded portion in FIG. 6) on the upper end surface of the frame part (overhanging part) in the body 60 and the package 40b. In other words, in the piezoelectric vibrator 10B of the present embodiment, the transpiration particles of the sealing material are adhered to the transpiration particle adhesion region provided on the upper surface of the lid 60 and the second substrate 44b. For this reason, in the piezoelectric vibrator 10B according to the present embodiment, the transpiration particles of the sealing material are not mixed and scattered in the cavity that accommodates the piezoelectric vibration piece 20, and the transpiration particles are excited by the excitation electrode of the piezoelectric vibration piece 10. There is no adverse effect by adhering to etc.

  In the piezoelectric vibrator 10B having the above-described configuration, the sealing hole is a stepped hole including the first sealing hole 80 and the second sealing hole 84, and the inner wall surface of the first sealing hole 80 and Since the metallizations 82 and 83 are formed around the opening of the second sealing hole 84, the adhesion of the sealing material and the adhesion distance (area) of the sealing material can be increased. Therefore, the hermetic reliability of the package could be improved.

  Furthermore, in the piezoelectric vibrator 10B configured as described above, the diameter of the second sealing hole 84 is smaller than that of the first sealing hole 80, so that the strength of the second substrate 44b can be improved. The strength of the entire piezoelectric vibrator can also be increased.

  According to the piezoelectric vibrator 10 </ b> B according to the third embodiment as described above, the mechanical fixing of the piezoelectric vibrating piece 20 including the pair of fixing arms 23 sandwiching the vibrating arm 21 to the package 40 b is performed on both surfaces of the fixing arm 23. And between the inner surface of the package 40b. For this reason, the piezoelectric vibrating piece 20 can be held in parallel with the lid body 60 or the first substrate 42b, and it is easy to reduce the thickness. In addition, it is possible to prevent the transpiration particles of the sealing material from being mixed and scattered in the cavity accommodating the piezoelectric vibrating piece 20, and there is no adverse effect due to the evaporation particles adhering to the excitation electrode of the piezoelectric vibrating piece 10.

  FIG. 7 is a diagram showing a schematic configuration of the piezoelectric vibrator according to the fourth embodiment. The figure (1) shows the top view except the lid 60, (2) is the figure which shows the GG section where the lid 60 is attached to (1).

  The piezoelectric vibrator 10C according to the fourth embodiment is a vibrator in which a sealing hole is formed in the frame body of the package 40c. The piezoelectric vibrating piece according to the fourth embodiment is the same as the piezoelectric vibrating piece 200 according to the second embodiment, and detailed description thereof is omitted. The package 40c has the same basic configuration as that of the third embodiment, except that the positions of the first and second sealing holes 80c and 84c, the projecting portion 94c, the mount electrode, and the metal pattern are different.

  According to the piezoelectric vibrator 10 </ b> C according to the fourth embodiment as described above, the mechanical fixing of the piezoelectric vibrating piece 200 including the fixing arm 206 sandwiched between the vibrating arms 202 to the package 40 c is performed on both surfaces of the fixing arm 206. And between the inner surface of the package 40c. For this reason, the piezoelectric vibrating piece 200 can be held in parallel with the lid 60 or the first substrate 42c, and the thickness can be easily reduced. Further, it is possible to prevent the transpiration particles of the sealing material from being mixed and scattered in the cavity that accommodates the piezoelectric vibrating piece 200, and there is no adverse effect caused by the evaporation particles adhering to the excitation electrode of the piezoelectric vibrating piece 200.

It is a figure which shows the structure outline of the piezoelectric vibrator which concerns on 1st Embodiment. It is a figure which shows the structure outline of the piezoelectric vibrator which concerns on 2nd Embodiment. It is a figure which shows the structure of the piezoelectric vibrator which concerns on 3rd Embodiment except a cover body. It is a figure which shows the structure of the package of 3rd Embodiment. It is an enlarged view when a metal ball is mounted in the 1st sealing hole. It is the elements on larger scale of F section of Drawing 4 (2). It is a figure which shows the structure outline of the piezoelectric vibrator which concerns on 4th Embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ......... Piezoelectric vibrator, 20, 200 ......... Piezoelectric vibrating piece, 21 ......... Vibrating arm, 22 ......... Base, 23 ......... Fixing arm, 24 ......... Constriction, 25, 26 ... ...... Excitation electrode, 27, 28 ......... Input / output electrode, 29 ......... Extraction electrode, 40 ......... Package, 42 ......... First substrate, 44 ......... Second substrate, 46 ......... Mount electrode 48... External mounting electrode 50... Metal pattern 52... Opening 60... Lid 70... Support member 202. ... Base, 206 ......... Fixing arm, 208,210 ......... Excitation electrode, 212,214 ...... Drawer electrode, 216,218 ......... I / O electrode, 224,226 ......... Weight part, 228 ... ... Constriction, 230 ... Long groove.

Claims (7)

A vibrating piece having a base, a plurality of vibrating arms extending from the base, and a pair of fixing arms extending in parallel along the vibrating arm across the vibrating arm from the base. When,
A first support member connected to the package and supporting the fixing arm;
A second support member that connects to the lid laminated on the package and supports the fixing arm; and
One of the first and second support members is a conductive adhesive,
The vibrator, wherein the vibrating piece is supported by being sandwiched between the package and the lid through the first and second support members. A vibrating piece having a base, a plurality of vibrating arms extending from the base, and a fixing arm extending in parallel along the vibrating arm from the base between the vibrating arms;
A first support member connected to the package and supporting the fixing arm;
A second support member that is connected to the lid laminated on the package and points to the fixing arm;
One of the first and second support members is a conductive adhesive,
The piezoelectric vibrator, wherein the vibrating piece is sandwiched and supported by the package and the lid through the first and second support members. A vibrating piece having a base, a plurality of vibrating arms extending from the base, and a pair of fixing arms extending in parallel along the vibrating arm across the vibrating arm from the base;
A first substrate having a first sealing hole having a larger diameter than the sealing material, and mounting the resonator element;
The opening that constitutes the cavity that accommodates the resonator element and the frame of the cavity have a smaller diameter than the sealing material provided in a position overlapping the first sealing hole when viewed in plan. A second substrate provided with a second sealing hole, and laminated on the first substrate;
A lid that is disposed in a frame shape on the upper surface of the frame portion, and is laminated on the second substrate via a brazing material that arranges the opening and the second sealing hole inside;
A sealing material fixed to the inner wall surface of the first sealing hole and the step portion between the first sealing hole and the second sealing hole;
First and second support members for supporting the fixing arm from above and below,
One of the first and second support members is a conductive adhesive, and the vibrating piece is connected to the lid and the first substrate via the first and second support members. A vibrator characterized by being sandwiched and supported by opposing inner surfaces. A vibrating piece having a base, a plurality of vibrating arms extending from the base, and a fixing arm extending in parallel along the vibrating arm from the base between the vibrating arms;
A first substrate having a first sealing hole having a larger diameter than the sealing material, and mounting the resonator element;
The opening that constitutes the cavity that accommodates the resonator element and the frame of the cavity have a smaller diameter than the sealing material provided in a position overlapping the first sealing hole when viewed in plan. A second substrate provided with a second sealing hole, and laminated on the first substrate;
A lid that is disposed in a frame shape on the upper surface of the frame portion, and is laminated on the second substrate via a brazing material that arranges the opening and the second sealing hole inside;
A sealing material fixed to the inner wall surface of the first sealing hole and the step portion between the first sealing hole and the second sealing hole;
First and second support members for supporting the fixing arm from above and below,
One of the first and second support members is a conductive adhesive, and the vibrating piece is connected to the lid and the first substrate via the first and second support members. A vibrator characterized by being sandwiched and supported by opposing inner surfaces.   5. The piezoelectric vibrator according to claim 1, wherein the second support member is brought into contact with the lid after the upper surface is hardened. 6. Apply the first support member to the base substrate of the package and mount the arm for fixing the vibration piece.
Adjusting the resonance frequency of the resonator element;
Applying a second support member to the upper surface of the fixing arm;
After curing the second support member, the lid is joined to the package,
A method of manufacturing a vibrator, wherein the resonator element is sandwiched and supported by inner surfaces of the package that are opposed to each other via the first and second support members.   The vibrator according to claim 6, wherein after applying the second support member, the lid is mounted and bonded to a package, and the second support member is fixed to the lid. Manufacturing method.

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