JP2009064758A5 - - Google Patents
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- JP2009064758A5 JP2009064758A5 JP2007233995A JP2007233995A JP2009064758A5 JP 2009064758 A5 JP2009064758 A5 JP 2009064758A5 JP 2007233995 A JP2007233995 A JP 2007233995A JP 2007233995 A JP2007233995 A JP 2007233995A JP 2009064758 A5 JP2009064758 A5 JP 2009064758A5
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- JP
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- Prior art keywords
- organic
- display panel
- substrate
- manufacturing apparatus
- panel manufacturing
- Prior art date
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- 239000000758 substrate Substances 0.000 claims description 14
- 238000000151 deposition Methods 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000001771 vacuum deposition Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009500 colour coating Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Description
それに比べて、フルカラー塗り分け方式の有機ＥＬディスプレイは、カラーフィルタが不要となり、発光効率が非常に優れているという利点を持っている。具体的には発光層を塗り分けるために、一般的にはドライプロセスであればマスク蒸着、ウェットプロセスであればインクジェット法にて成膜が行われている。有機ＥＬ素子は、水分に弱いとされており、現状ではドライプロセスによる成膜の方が、発光効率が良いとされている。 In comparison, the organic EL display of the full-color coating method has the advantage that the color filter is unnecessary and the luminous efficiency is very excellent. Specifically, in order to coat the light emitting layer separately, generally, film deposition is performed by mask vapor deposition in the case of a dry process and ink jet method in the case of a wet process. The organic EL device is weak to moisture, toward the film formation by the dry process at present is, luminous efficiency is good.
本発明の有機ＥＬディスプレイパネル製造装置は、真空蒸着室を有し、前記真空蒸着室内で蒸着源から発せられた蒸着材料を有機ＥＬディスプレイパネルに用いられる基板に蒸着させるようになっており、前記基板を保持する基板トレイと、前記基板トレイの前記蒸着源の側に設けられた防着部材と、を備え、前記防着部材は、蒸着源から発せられた蒸着材料の拡散領域を受け入れる位置に設けられている、ことを特徴としている。
The organic EL display panel manufacturing apparatus of the present invention has a vacuum deposition chamber being adapted to deposit on the substrate used for deposition material Sera originating from the evaporation source in the vacuum deposition chamber in the organic EL display panel, a substrate tray which holds the substrate, and a deposition-inhibitory member is provided et the on the side of the deposition source of the substrate tray, the deposition-inhibitory member accepts the diffusion region of the evaporation material emitted from the deposition source located are provided, et al, it is characterized in that.
本発明の有機ＥＬディスプレイパネル製造装置は、基板トレイに防着部材を設けることで、有機ＥＬディスプレイパネル製造時における真空蒸着室への着膜を著しく低減することができる。メンテナンスサイクルを長期化できると共に、メンテナンスをするときの作業が容易になるという絶大な効果を奏する。この結果として、本発明の有機ＥＬディスプレイパネル製造装置は、有機ＥＬディスプレイパネルの生産性が飛躍的に向上し、また歩留りも格段に向上するなどの優れた効果を奏する。
The organic EL display panel manufacturing apparatus of the present invention can remarkably reduce the film deposition on the vacuum deposition chamber during the manufacture of the organic EL display panel by providing the substrate tray with an adhesion-preventing member. The maintenance cycle can be extended, and the great effect of facilitating the maintenance work can be achieved. As a result, the organic EL display panel manufacturing apparatus of the present invention has excellent effects such as dramatically improving the productivity of the organic EL display panel and significantly improving the yield.
また、本発明の有機ＥＬディスプレイパネル製造装置は、基板トレイを真空蒸着室に対して搬入搬出を行う搬送手段を備えている場合、その搬送手段への蒸着材料の付着を著しく抑えることもできる。
Moreover, when the organic EL display panel manufacturing apparatus of this invention is provided with the conveyance means which carries in / out a board | substrate tray with respect to a vacuum evaporation chamber, it can also suppress significantly adhesion of the vapor deposition material to the conveyance means.
Claims (4)
前記基板を保持する基板トレイと、
前記基板トレイの前記蒸着源の側に設けられた防着部材と、を備え、
前記防着部材は、蒸着源から発せられた蒸着材料の拡散領域を受け入れる位置に設けられている、
ことを特徴とする有機ＥＬディスプレイパネル製造装置。 Includes a vacuum deposition chamber, in the organic EL display panel manufacturing apparatus for depositing on the substrate used origination Sera were deposited material from the deposition source in the vacuum deposition chamber in the organic EL display panel,
A substrate tray for holding the substrate;
Anda deposition preventing member is provided et the on the side of the deposition source of the substrate tray,
The adhesion preventing member is provided, et al is in a position to accept the diffusion region of the evaporation material emitted from the deposition source,
An organic EL display panel manufacturing apparatus.
ことを特徴とする請求項１に記載の有機ＥＬディスプレイパネル製造装置。The organic EL display panel manufacturing apparatus according to claim 1.
ことを特徴とする請求項１又は２に記載の有機ＥＬディスプレイパネル製造装置。 A transport means for carrying the substrate tray into and out of the vacuum deposition chamber,
The organic EL display panel manufacturing apparatus according to claim 1 or 2 .
ことを特徴とする請求項３に記載の有機ＥＬディスプレイパネル製造装置。The organic EL display panel manufacturing apparatus according to claim 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007233995A JP5252864B2 (en) | 2007-09-10 | 2007-09-10 | Organic EL display panel manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007233995A JP5252864B2 (en) | 2007-09-10 | 2007-09-10 | Organic EL display panel manufacturing equipment |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009064758A JP2009064758A (en) | 2009-03-26 |
| JP2009064758A5 true JP2009064758A5 (en) | 2010-10-28 |
| JP5252864B2 JP5252864B2 (en) | 2013-07-31 |
Family
ID=40559148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007233995A Expired - Fee Related JP5252864B2 (en) | 2007-09-10 | 2007-09-10 | Organic EL display panel manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5252864B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5567905B2 (en) * | 2009-07-24 | 2014-08-06 | 株式会社日立ハイテクノロジーズ | Vacuum deposition method and apparatus |
| JP5916883B2 (en) * | 2012-11-13 | 2016-05-11 | 三菱重工業株式会社 | Vacuum deposition equipment |
| KR102699846B1 (en) * | 2020-11-30 | 2024-08-27 | 캐논 톡키 가부시키가이샤 | Film forming apparatus |
| JP7242626B2 (en) * | 2020-12-10 | 2023-03-20 | キヤノントッキ株式会社 | Deposition equipment |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07145480A (en) * | 1993-11-22 | 1995-06-06 | Hitachi Ltd | Sputtering apparatus and film forming method using the same |
| JPH0913173A (en) * | 1995-06-28 | 1997-01-14 | Hitachi Ltd | Sputtering apparatus and method for replacing deposition preventing plate |
| JP2005056673A (en) * | 2003-08-04 | 2005-03-03 | Nec Plasma Display Corp | Film formation device of plasma display panel, manufacturing method of plasma display panel, and manufacturing method of plasma display device |
| JP4549697B2 (en) * | 2004-03-04 | 2010-09-22 | 株式会社アルバック | Film forming apparatus and film forming method |
-
2007
- 2007-09-10 JP JP2007233995A patent/JP5252864B2/en not_active Expired - Fee Related
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