JP2008070202A - Centering method of image sensor inspection device - Google Patents

Abstract

It is an object of the present invention to easily and accurately center each optical component of an image sensor inspection apparatus.
A first reference jig 51 is attached to a light source attachment position of a machine frame 41. The laser pointer 53 is fitted to the first reference jig 51 via the cylindrical jig 52, and the laser pointer 53 is turned on. The laser beam reflected by the mirror 47 in the machine frame 41 is irradiated onto the image sensor wafer 16 set on the mounting table 31, and the mounting position of the machine frame 41 is set so that the laser beam is positioned at the center position. Adjust and perform the first centering. Next, the cylindrical jig is fitted into the lens holder 63, the tip of the cylindrical jig is aligned with the center position of the imaging element body 18, and the second optical axis is aligned with the center line of the mounting table 31. Perform centering. Next, the centering jig is fitted to the first reference jig 51, and the center line of the integrator and the diaphragm is aligned with the optical axis by the alignment plate at the tip, and the third and fourth centering are performed. Do.
[Selection] Figure 6

Description

  The present invention relates to a centering method for an image sensor inspection apparatus, and more particularly to a centering method for an image sensor inspection apparatus for inspecting an image sensor or a wafer before cutting out an image sensor chip.

  Illumination light is irradiated to an image sensor such as a CCD or CMOS, or a wafer before cutting out an image sensor chip, and the quality of the image sensor is determined from an output signal obtained (for example, , See Patent Document 1). A plurality of such inspection apparatuses are often provided in order to efficiently perform a large amount of inspections.

In this inspection apparatus, accurate inspection cannot be performed unless the center of the optical axis of the illumination light of the inspection apparatus is aligned with the center of the imaging element to be inspected. For this reason, conventionally, both are centered by hanging down from the component center on one side and visually confirming the other center position. Also, instead of swinging down, the position of the small diameter circle that has passed through the small hole is projected on the monitor screen and confirmed visually, or a pinhole placed at the optical axis position in the optical system is imaged on the irradiated object. Then, the position is visually confirmed, and both are centered.
JP 2005-233863 A

  Conventionally, because of the centering method that relies on vision as described above, the adjustment accuracy varies depending on the operator, and even with the same inspection device, the alignment accuracy is not uniform. However, the other inspection apparatus may be defective even though it is good, and improvement has been desired.

  Conventionally, for an irradiating device that irradiates illumination light to an image sensor or an image sensor chip that is an object to be inspected, only the position of the irradiating light is aligned with the center of the object to be inspected. there were. For this reason, even if parts of the same standard are used, if the optical axis adjustment is not performed with high precision, the amount of light irradiated and the light quality on the inspection object will be different for each inspection device. The inspection accuracy varies among the inspection devices, and the inspection results vary.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a centering method for an image sensor inspection apparatus that can perform inspection with high accuracy while suppressing variations in inspection accuracy among inspection apparatuses.

  In order to achieve the above object, the present invention includes a holding base for holding an image sensor and at least a machine frame, a light source, an integrator, and a lens, and the light from the light source is converted to light having a uniform irradiance by the integrator. An illumination device that irradiates light to the image pickup device set on the holding table with the lens, and the image pickup device electrically connected to the image pickup device and based on an output signal of the image pickup device irradiated with the irradiation light. A centering method for an image sensor inspection apparatus having an inspection apparatus body to be inspected, wherein the holding table or the optical axis of the illumination device is aligned with a fixed position of the image sensor set on the holding table. A first centering step for finely adjusting the mounting position of the illumination device; and an optical axis of the lens and a fixed position of the imaging device holding base via a lens holder for mounting the lens to the machine frame A first reference jig having a first reference hole at a light source mounting position of the machine frame, and a second reference centering step to be combined, held in the first reference hole, and aligned with the light incident surface of the integrator And a third centering step for aligning the optical axis of the integrator with the center line of the first reference jig using a centering jig having an alignment member.

  In the present invention, in the first centering step, a laser pointer is attached to the first reference hole at a concentric position, and a laser irradiation point of the laser pointer is adjusted to a predetermined position of the imaging element, thereby The machine frame and the holding table are centered.

  In the present invention, the lighting device includes a reflection mirror that reflects light from the light source, and the first centering step is performed in a state where other optical elements other than the reflection mirror are removed from the lighting device. It is characterized by that.

  In the present invention, in the second centering step, a second reference jig having a second reference hole is attached to the image sensor holding base, and the second reference hole is held by the second reference hole and is formed of a concentric stepped cylinder. A lens holder for attaching the lens to the machine frame is aligned with a center line of the holding table via a cylindrical jig.

  The illumination device has a diaphragm for narrowing light from the light source, and is held in the first reference hole, and a centering jig having an alignment member that is aligned with the diaphragm opening of the diaphragm. And a fourth centering step for aligning the center lines of the first reference jig and the first reference jig.

  According to the present invention, the first core for finely adjusting the mounting position of the holding table or the lighting device so that the optical axis of the lighting device coincides with a certain position, for example, the center position, of the image sensor set on the holding table. A centering step, a second centering step of aligning the optical axis of the lens and a fixed position of the image sensor holding base via a lens holder for mounting the lens on the machine frame, and mounting a light source on the machine frame A first reference jig having a first reference hole is attached to the position, and the integrator is used by using a centering jig that is held in the first reference hole and has an alignment member that matches the light incident surface of the integrator. A third centering step for aligning the optical axis of the first reference jig with the center line of the first reference jig. First, in the first centering step, the illumination device and the imaging device illuminated by the illumination device Centering is performed, this centering Since the second and third centering is performed by aligning the center line of the lens and integrator, which are each optical element of the illumination device, with the optical axis, the centering is performed sequentially on the centered ones. Unlike those, the centering error of each optical element is not accumulated, and the centering can be performed with high accuracy.

  In addition, since the centering is performed using the alignment member matching the end face shape of the optical element to be centered and the fitting of the cylindrical jig, individual differences are less likely to occur compared to the conventional simple visual centering method. Accurate centering processing is possible. For example, conventional centering by mere visual recognition was limited to centering in 1 mm units. However, when a cylindrical jig or an alignment plate is provided at the tip as in the present invention, the fitting accuracy is increased. Thus, adjustment can be made in units of 0.1 mm.

  Since the centering process can be performed for each optical element, the overall centering accuracy is greatly improved as compared with the conventional one, and the occurrence of inspection errors due to the centering failure is suppressed. Therefore, the machine difference for each of a plurality of inspection apparatuses is reduced, and a substantially uniform inspection can be performed with a plurality of inspection apparatuses.

  The illumination device includes a reflection mirror that reflects light from the light source, and the first centering step is performed in a state in which the other optical elements other than the reflection mirror are removed from the illumination device, whereby the other optical elements are removed. The optical axis of the illuminating device can be matched with the center position of the image sensor set on the holding stand without being affected.

  In the first centering step, a laser pointer is attached to the first reference hole at a concentric position, and the laser irradiation point of the laser pointer is aligned with a predetermined position, for example, the center of the imaging device, so By centering with the base, quick and accurate centering is possible.

  A second reference jig having a second reference hole is attached to the image sensor holding base, and the lens is attached to the machine frame via a cylindrical jig formed of a concentric stepped cylinder held in the second reference hole. Since the second centering step is performed by matching the lens holder for mounting to the center line of the holding table, the centering can be performed accurately and reliably without visual observation as in the prior art. it can.

  As shown in FIG. 1, the image sensor inspection line 10 of the present invention includes, for example, five image sensor inspection devices 11, and efficiently inspects an image sensor (CCD) that is an inspection object. Each image sensor inspection device 11 includes an inspection device main body 12 and an inspection object set unit 13. The inspection object setting unit 13 includes, for example, a robot hand 14 and a cartridge 15. The cartridge 15 stores a large number of imaging element wafers 16 or imaging elements 17 (see FIG. 2B) that are inspection objects.

  In the present embodiment, as shown in FIG. 2, inspecting a large number of image sensor main bodies 18 formed on the wafer 16 at the stage of the image sensor wafer 16 is called a pre-stage inspection. A plurality of electrode pads 18a are formed on the image sensor body 18, and a probe pin is pressed against these electrode pads 18a for inspection. Further, the image pickup device body 18 is cut out from the wafer 16 to form a chip 19 as shown in FIG. 2B. The cut out image pickup device chip 19 is fixed to the base 20 and connected by wire bonding or the like. Inspecting the covered image sensor 17 is called a post-stage inspection. In the present invention, the centering process of the image sensor inspection apparatus 11 that performs the pre-stage inspection will be described first, and then the centering process of the inspection apparatus that performs the post-stage inspection will be described.

  As shown in FIG. 1, the robot hand 14 takes out the image sensor wafer 16 from the cartridge 15, sets it on the mounting table 31 of the inspection apparatus body 12, and after the inspection is completed by the inspection apparatus body 12, The wafer 16 is returned into the cartridge 15.

  As shown in FIGS. 1 and 3, the inspection apparatus main body 12 includes a base 30, a mounting table 31, an XY shift unit 32, an illumination light irradiation unit 33, an energization unit 35, and a measurement control unit 36. The mounting table 31 is attached to the base 30 so as to be movable in the horizontal direction (XY direction). The XY shift unit 32 shifts the mounting table 31 in the XY direction, and sets each image sensor body 18 of the image sensor wafer 16 to the inspection position. The illumination light irradiation unit 33 irradiates the imaging device wafer 16 of the mounting table 31 with illumination light for various inspections. The energization unit 35 includes a probe pin 34, and is electrically connected to the image sensor body 18 via the probe pin 34. The measurement control unit 36 includes a keyboard 37 for inputting various operation commands and a display 38 for displaying input results of the operation commands and measurement results. From the imaging element body 18 obtained from the energization unit 35. Various tests are performed based on the electrical signal.

  A holding groove 31 a is formed in the mounting table 31. The imaging device wafer 16 is positioned by fitting the imaging device wafer 16 into the holding groove 31a. The positioning method of the imaging element wafer 16 on the mounting table 31 is not limited to the holding groove 31a, and a well-known positioning method using a positioning pin, a positioning member, or the like may be used.

  Probe pins 34 are pressed against the image sensor wafer 16 placed in the holding groove 31a. The probe pin 34 is connected to the measurement control unit 36, and the imaging device body on the imaging device wafer 16 is energized via the probe pin 34, and various inspections are performed on the imaging device body. In various inspections, the electrical and optical functions of the image sensor wafer are inspected.

  The illumination light irradiation unit 33 includes a machine frame 41, a lamp 42 disposed in the machine frame 41, a condenser lens 39, an aperture 43, an integrator 44, an integrator 44, which are sequentially disposed along the optical axis L1 of the lamp 42. The optical element includes a diffusion plate 45, a filter switching unit 46, a reflection mirror 47, and a lens unit 48. The light from the lamp 42 is condensed by the condenser lens 39, and then condensed by the diaphragm 43, and the light having uniform irradiance is produced by the integrator 44. Light exiting the integrator 44 is diffused by the diffusion plate 45. The filter switching unit 46 selectively inserts red (R), green (G), and blue (B) filters 46a on the optical axis L1, and switches the illumination light to red light, green light, and blue light. The lens unit 48 includes a lens barrel that holds a plurality of lenses, and forms an image of illumination light on the light receiving surface of the image sensor wafer 16.

  Since the illumination light irradiation unit 33 includes the integrator 44 that makes the light intensity uniform, the center axis of each optical element is not strictly aligned with the optical axis L1. It was assembled with an accuracy of positioning the elements visually. For this reason, variation occurs in the positioning accuracy of each optical element, and the variation for each optical element is accumulated. As a result, there is a variation between machine differences in the illumination light in each illumination light irradiation unit 33. I found out. Therefore, the inspection results in each inspection apparatus main body 12 vary, and what is determined as a non-defective product in one inspection apparatus main body 12 may be determined as a defective product in the other inspection apparatus main body 12. In order to eliminate such machine differences between the respective inspection apparatus main bodies 12, in the present invention, optical elements (condenser lens 39, diaphragm 43, integrator 44, lens unit 48) that require optical axis alignment are described below as jigs. Positioning is performed with reference to 61, 70, 75, and 80, and the centering of each optical element with the optical axis L1 is accurately performed.

  Hereinafter, the centering method of the illumination light irradiation unit 33 will be described with reference to the flowchart shown in FIG. First, the condenser lens 39, the diaphragm 43, the integrator 44, the diffuser plate 45, the filter switching unit 46, and the lens unit 48 as other optical elements are removed from the machine frame 41 shown in FIG. The state shown in FIG. Then, the first reference jig 51 is attached to the entrance 50 through which the light from the lamp 42 enters by the attachment screw 49. The first reference jig 51 is for setting the incident optical axis L1 (see FIG. 6) with respect to the machine casing 41. The first reference jig 51 is formed in a flange shape, and includes an attachment surface 51a and a reference hole 51b having a center line orthogonal to the attachment surface 51a.

  Next, as shown in FIG. 6, a cylindrical jig 52 is fitted into the reference hole 51 b of the first reference jig 51, and the first reference jig is passed through the cylindrical jig 52 as shown in FIG. 6. A laser pointer 53 is attached to the tool 51. The cylindrical jig 52 has a laser pointer holding hole 52a, and the laser pointer holding hole 52a and the outer periphery fitting portion 52b of the cylindrical jig 52 are formed concentrically having the same center line. And the diameter of the outer periphery fitting part 52b of the cylindrical jig | tool 52 is formed in the magnitude | size fitted to the reference | standard hole 51b of the 1st reference | standard jig | tool 51. FIG. By this fitting, the optical axis L1 set by the first reference jig 51 and the optical axis of the laser pointer 53 coincide. The hole diameter of the reference hole 51b of the first reference jig 51 is formed with a tolerance of 30 + 0.02 mm, and the outer diameter of the outer periphery fitting portion 52b of the cylindrical jig 52 is a tolerance of 30-0.02 mm. Although formed, it is not limited to this tolerance, and may be changed as appropriate in accordance with the required centering accuracy.

  Next, the laser pointer 53 is turned on to emit laser light, and the laser light irradiation point coincides with the center of the light receiving surface to be inspected on the imaging element wafer 16 via the reflection mirror 47. The attachment position of the frame 41 is finely adjusted, and the first centering is performed. The machine frame 41 is fixed to the base 30 by a bracket 54 and an attachment screw 55. In this embodiment, the attachment screw 55 is loosened so that the position of the machine frame 41 is slightly on the XY plane (horizontal plane). Fine adjustment is performed by moving the laser pointer 53 so that the irradiation point of the laser pointer 53 coincides with the center P <b> 1 of the light receiving surface of the imaging element wafer 16, and then the mounting screw 55 is tightened to fix the machine frame 41 to the base 30. By this fixing, the centering (first centering) of the optical axis L1 of the machine casing 41 and the inspection target light receiving surface of the imaging element wafer 16 is completed.

  Next, as shown in FIG. 7, a reference base jig 60 as a second reference jig is attached to the mounting table 31 with reference to the positioning pins 56. A reference hole is formed in the reference base jig 60 so as to be concentric with the center position of the inspection target light receiving surface of the imaging element wafer 16 in a state where the reference base jig 60 is attached to the mounting table 31 via the positioning pins 56. 60a is formed.

  In the machine frame 41, a lens holder 63 is mounted at a position above the reference base jig 60 with a mounting screw (not shown). A lens holding hole 63a is formed in the lens holder 63, and a lens unit 48 (see FIG. 3) is detachably attached in the lens holding hole 63a. A mounting screw (not shown) of the lens holder 63 is loosened before the centering process, so that the mounting position of the lens holder 63 can be finely adjusted.

  Next, the first fitting portion 61a of the lens centering columnar jig 61 is fitted into the holding hole 63a of the lens holder 63 from above and fitted. The lens centering columnar jig 61 is composed of a stepped shaft, and the large diameter portion is the first fitting portion 61a and the small diameter portion is the second fitting portion 61b. The first fitting portion 61a and the second fitting portion 61b are formed concentrically. Then, the position of the lens holder 63 is finely adjusted so that the second fitting portion 61 b is fitted into the reference hole 60 a of the reference base jig 60. When the second fitting portion 61 b is fitted into the reference hole 60 a of the reference base jig 60, the center line of the reference base jig 60 and the center of the holding hole 63 a of the lens holder 63 are caused by the lens centering columnar jig 61. The line will match. The diameter of the holding hole 63a of the lens holder 63 is formed with a tolerance of 20 + 0.02 mm, and the outer diameter of the first fitting portion 61a of the cylindrical jig 61 is formed with a tolerance of 20-0.02 mm. It is. The diameter of the reference hole 60a of the reference base jig 60 is formed with a tolerance of 12 + 0.02 mm, and the outer diameter of the second fitting portion 61b of the cylindrical jig 61 is formed with a tolerance of 12-0.02 mm. It is. These tolerances are examples, and may be changed as appropriate according to the required centering accuracy.

  Next, in this state, a block gauge 57 having a constant height is inserted between the lens holder lower surface 63b and the upper end surface of the positioning pin 56, and the distance between the two is set to a constant length by the block gauge 57. Then, the position of the lens holder 63 in the vertical direction is determined. In this state, the mounting screw of the lens holder 63 is tightened to fix the lens holder 63 to the machine frame. Thereby, the positioning, height, and tilt adjustment of the lens holder 63 are completed. Therefore, after removing the lens centering columnar jig 61 and placing the lens unit 48 in the lens holder 63 instead (see FIG. 3), the lens unit 48 is fixed with a fixing screw (not shown), so that the light of the lens unit 48 is obtained. The axis coincides with the optical axis L1 of the machine frame, the centering, height and tilt adjustment of the lens unit 48 is completed, and the second centering is completed.

  Next, as shown in FIG. 8, the integrator centering jig 70 is attached to the first reference jig 51. The integrator centering jig 70 has a cylindrical surface 70 a that fits into the reference hole 51 b of the first reference jig 51, and an alignment plate 71 made of a rectangular plate having the same shape as the outer shape of the integrator 44 is attached to the tip. It has been. Then, the integrator 44 is attached to a predetermined position of the machine frame 41 with an attaching screw (not shown). At this time, the mounting screws are loosened so that the integrator mounting position can be finely adjusted. Next, the position of the integrator 44 is finely adjusted so that the incident side end face of the integrator 44 overlaps and is parallel to the alignment plate 71 of the integrator centering jig 70, and in this finely adjusted state, the mounting screw is attached. The integrator 44 is fixed to the machine frame 41 by tightening. Thereby, the centering and tilt adjustment of the integrator 44 is completed, and the third centering process is completed.

  Next, as shown in FIG. 9, an aperture centering jig 75 is attached to the first reference jig 51. The aperture centering jig 75 has a cylindrical surface 75a that fits into the reference hole 51b of the first reference jig 51, and an alignment plate 76 made of a rectangular plate having substantially the same shape as the aperture opening of the aperture is attached to the tip. It has been. Next, the diaphragm 43 is attached to an attachment position with an attachment screw (not shown). At this time, the mounting screw is loosened so that the throttle mounting position can be finely adjusted. Next, as shown in FIG. 10, the alignment plate 76 of the aperture centering jig 75 and the maximum aperture opening 43a of the aperture 43 coincide with each other and the aperture plates 43b and 43c constituting the aperture opening 43a are aligned. The attachment position of the diaphragm 43 is finely adjusted so that the plate 76 is parallel to the plate 76. The throttle screw 43 is fixed to the machine frame 41 by tightening the mounting screw in the finely adjusted state. Thereby, the centering and tilt adjustment of the diaphragm 43 are completed, and the fourth centering is completed. Similarly, the condenser lens 39 (see FIG. 3) is centered and fixed to the machine frame 41 using a lens centering jig (not shown).

  Next, as shown in FIG. 11, the lamp centering jig 80 is attached to the first reference jig 51. The lamp centering jig 80 has a cylindrical surface 80a that fits into the reference hole 51b of the first reference jig 51, and is formed of a circular plate having the same shape as the outer shape of the lamp 42 at the tip, and has an edge 81a around it. An alignment plate 81 is attached. The lamp 42 is brought into contact with the alignment plate 81 so that the outer shapes thereof overlap each other, and in this state, the mounting screw 82 is tightened to fix the lamp 42 to the lamp mounting base 83. Thereby, the centering and tilt adjustment of the lamp 42 are completed.

  The dimensional tolerances between the first reference jig 51 and the centering jigs 70, 75, and 80 are the same as the dimensional tolerances between the first reference jig 51 and the cylindrical jig 52, but these dimensional tolerances. Also, it may be changed as appropriate according to the required accuracy.

  Next, as shown in FIG. 3, optical elements that do not require centering processing in the machine casing 41, for example, the diffusion plate 45 and the filter switching unit 46 are attached. In addition, the attachment time of the optical element which does not require the centering process is not limited after the centering process. For example, it may be performed before or after the integrator centering process or the aperture centering process.

  As described above, the first reference jig 51 is first attached to the machine frame 41 to set the reference optical axis L1, and each optical element is centered on the first reference jig 51 via each jig. Since it is attached, each optical element can be reliably centered. In addition, since the reference optical axis L1 is used as a reference, the centering error is not accumulated, and each optical element is accurately centered, unlike the case where the next centering is performed based on the centered optical element. can do.

  Next, as shown in FIGS. 12 to 14, another embodiment of the centering process of the lens holder 90 will be described. In the above embodiment, the inspection apparatus main body 12 that inspects the image sensor wafer 16 has been described. However, in this embodiment, the image sensor wafer 16 is cut out for each image sensor main body 18 to form a chip 19. A centering method of the image sensor attached to the inspection apparatus main body will be described. In the image pickup device inspection apparatus body, the image pickup device 17 is an inspection target instead of the image pickup device wafer 16.

  As shown in FIGS. 12 and 13, the image sensor 17 is set in a socket 93 of a pallet 92. The pallet 92 is sent to the inspection position by a pallet transport device (not shown). A reference base jig 96 as a second reference jig is attached to the pallet 92 via positioning pins 95. The reference base jig 96 has a reference hole 96a. The reference hole 96a is formed such that its center line passes through the center of the light receiving surface of the image sensor 17 on the pallet 92 and the center line is perpendicular to the light receiving surface.

  As indicated by a two-dot chain line in FIG. 14, it is necessary to change the distance between the lens unit 101 of the illuminating device and the image sensor 17 according to photographing conditions such as telephoto photography, normal photography, and close-up photography. Further, when the image pickup device 17 is set, if the lens unit 101 is positioned at this inspection position, the lens unit 101 becomes an obstacle to handling of the image pickup device 17, and the image pickup device 17 cannot be sent to the inspection position. For this reason, the lens holder 90 has a lens lifting mechanism 103. The pallet 92 is positioned by positioning pins 95 held by the positioning frame 97. By this positioning, the center position of the light receiving surface of the image sensor 17 in the socket 93 is positioned on the optical axis L1 of the illumination device.

  The lens lifting mechanism 103 is configured to move up and down between an inspection position where the lens unit 101 is moved down most (indicated by a two-dot chain line) and a retracted position where the lens unit 101 is retracted upward from this position (indicated by a solid line). . As shown in FIG. 12, the lens elevating mechanism 103 includes a lens holder main body 104, an elevating guide 105 for elevating and lowering the lens holder main body 104, an elevating air cylinder 106, an inspection position stopper 107 with an adjusting mechanism, A base member 108, an L-shaped bracket 109, and a mounting unit 110 are provided. A tip of a rod 106 a of an air shilling 106 is attached to the lens holder main body 104, and the air cylinder 106 is attached to a vertical surface 109 a of an L-shaped bracket 109. Then, by switching the supply of compressed air to the air cylinder 106, the lens holder body 104 is moved up and down via the rod 106a.

  The inspection position stopper 107 is composed of a fine adjustment screw with a lock nut 107a, and the upper end is a stopper surface 107b. The stopper projection 107c engages with the stopper surface 107b, and the lens holder body 104 is positioned at the inspection position. The elevating guide 105, the air cylinder 106 and the stopper 107 are attached to the L-shaped bracket 109 via the base member 108. The base member 108 is attached to the vertical surface of the L-shaped bracket 109 via attachment screws 111. Then, after loosening the mounting screw 111 and finely adjusting the mounting position in the height direction to the L-shaped bracket, the base member 108 is positioned on the L-shaped bracket 109 by tightening the mounting screw 111. The stopper 107 is attached to the base member 108 via the attachment bracket 112.

  Further, the L-shaped bracket 109 is fixed to the bottom plate 41 e of the machine casing 41 via the mounting unit 110. The attachment unit 110 includes an attachment screw 113, and by loosening the attachment screw 113, the attachment position (attachment position on the XY plane) of the L-shaped bracket 109 with respect to the machine frame 41 can be finely adjusted.

  The elevating guide 105, the lens holder main body 104, and the mounting unit 110 are configured to have high rigidity so that a center misalignment or the like is not caused by the elevating operation of the lens unit 101.

  A reference hole 104a is formed in the lens holder body 104 in the vertical direction. The lens mounting columnar jig 120 or the lens unit 101 (see FIG. 14) is fitted into the reference hole 104a. The center line of the columnar jig 120 and the centerline of the reference hole 104a are made to coincide with the lens mounting columnar jig 120 attached to the reference hole 104a.

  The lens mounting columnar jig 120 is formed of a stepped cylindrical body or a columnar body, and has a flange 120a, a first fitting portion 120b, a main body portion 120c, and a second fitting portion 120d in order from the top. The first fitting portion 120b has a reference outer peripheral surface that fits into the reference hole 104a of the lens holder main body 104, and makes the center line of the cylindrical jig 120 coincide with the center line of the reference hole 104a. The second fitting portion 120 d is formed smaller than the diameter of the first fitting portion 120 b, has a reference outer peripheral surface that fits into the reference hole 96 a of the reference base jig 96, and is the center of the cylindrical jig 120. The line and the center line of the reference hole 96a of the reference base jig 96 are matched. The lower surface 122 of the flange 120a is for determining the height of the lens holder main body 104 at the inspection position, and a gap with the upper surface 104b of the lens holder main body 104 using a block gauge or other measuring device. Is set to a predetermined dimension. Further, by setting the gap to the same value at three or more locations, the tilt adjustment is completed in addition to the centering adjustment of the lens holder main body 104.

  The lens unit 101 attached to the lens holder 90 has a weight of about 150 g. On the other hand, the cylindrical jig 120 is set to be about 250 g, which is a little heavy. In this way, by configuring the cylindrical jig so as to have a weight about 1.5 to 3 times that of the lens unit 101 actually used, it is possible to easily confirm the bending of the lens holder 90 and the looseness of the combination of parts. It becomes possible to easily determine whether or not the rigidity of the apparatus is insufficient.

  Next, the centering method of the lens holder 90 of this embodiment is demonstrated. First, as shown in FIG. 12, the reference base jig 96 is attached to the pallet 92 via the positioning pins 95.

  Next, the mounting screw 113 of the mounting unit 110 is loosened so that the mounting position of the lens holder body 104 can be finely adjusted. Next, the first fitting portion 120 b of the lens centering columnar jig 120 is fitted into the reference hole 104 a of the lens holder main body 104. Then, the position of the lens holder 90 is finely adjusted so that the second fitting portion 120 d is fitted into the reference hole 96 a of the reference base jig 96. When the first fitting portion 120b is fitted into the reference hole 96a of the reference base jig 96, the center line of the reference base jig 96 and the mounting center line of the lens holder 90 are aligned by the lens centering cylindrical jig 120. Will match. In this state, the mounting screw 113 is tightened to fix the L-shaped bracket 109 and the lens holder body 104 to the bottom plate 41e. Thereby, the centering and tilt adjustment of the lens holder 90 is completed. Next, the inspection position stopper 107 is rotated to finely adjust the stop position of the locking projection 104c of the lens holder 90. This completes the adjustment of the lens height position at the inspection position.

  After the lens holder 90 has been centered, the other optical members are also centered. These centering adjustment processing steps are the same as those in the first embodiment, and detailed description thereof is omitted. Next, the lens centering columnar jig 120 is removed, and the lens unit 101 is placed in the lens holder main body 104 instead, and then the lens unit 101 is fixed to the lens holder main body 104 with a fixing screw (not shown).

  In each of the above embodiments, the lamp 42, the diaphragm 43, the integrator 44, the diffuser plate 45, the filter switching unit 46, the reflection mirror 47, and the lens unit 48 are arranged in this order on the machine frame 41. However, the arrangement order is not particularly limited. . Further, other optical elements may be added as necessary. In the above embodiment, a reflection mirror is provided to change the direction of the optical axis by 90 degrees. However, the change angle is not limited to this. Further, the reflection mirror 47 may be omitted.

  The inspection object setting unit 13 is not limited to the robot hand 14 as long as it can set the inspection object on the mounting table 31, and various work handling devices such as a pallet conveying device may be used. Good.

  In the above-described embodiment, the mounting position of the lighting device is finely adjusted in the first centering step so that the optical axis of the lighting device matches the center position of the imaging device set on the holding stand. Instead of this, the lighting device may be fixed and the position of the holding table may be finely adjusted.

It is a top view which shows the image pick-up element inspection line which implemented this invention. It is a top view which shows the wafer and imaging device which are test | inspected with an imaging device test | inspection apparatus. It is general | schematic sectional drawing which shows a test | inspection apparatus main body. It is a flowchart which shows the procedure of the centering process. It is a schematic sectional drawing which shows the state which attached the 1st reference | standard jig | tool to the machine frame. It is a schematic sectional drawing which shows the state which attached the laser pointer to the 1st reference | standard jig | tool of a machine frame. It is a schematic sectional drawing which shows the process which attaches a cylindrical jig to a lens holder, and matches the centerline of a machine frame and an image pick-up element. It is a schematic sectional drawing which shows an integrator centering process. It is a schematic sectional drawing which shows an aperture centering process. It is a perspective view which shows an aperture centering process. It is sectional drawing which shows a lamp | ramp centering process. It is sectional drawing which shows the lens centering process in other embodiment. It is a top view in the embodiment. It is sectional drawing which shows the test | inspection position and retracted position in the attachment state of the lens unit in the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Image sensor inspection line 11 Image sensor inspection apparatus 12 Inspection apparatus main body 14 Robot hand 15 Cartridge 16 Image sensor wafer 17 Image sensor 30 Base 31 Mounting base 32 XY shift part 33 Illumination light irradiation part 34 Probe pin 35 Current supply part 36 Measurement control Part 39 Condenser lens 41 Machine frame 42 Lamp 43 Aperture 44 Integrator 45 Diffuser plate 46 Filter switching part 47 Mirror 48 Lens 49 Mounting screw 51 First reference jig 52 Columnar jig 53 Laser pointer 54 Bracket 55 Mounting screw 60 Reference jig 61 Cylindrical jig 63 Lens holder 70 Integrator centering jig 75 Aperture centering jig 80 Lamp centering jig 81 Positioning plate 82 Mounting screw 90 Lens holder 92 Palette 93 Socket 95 Positioning pin 96 Reference base Ingredients 97 positioning frame 103 lens lift mechanism 104 lens holder main body 105 lifting guide

Claims (5)

An imaging device that has a holding table for holding an image sensor and at least a machine frame, a light source, an integrator, and a lens, uses the light from the light source as light of uniform irradiance by the integrator, and is set on the holding table by the lens An imaging device inspection apparatus comprising: an illumination device that irradiates light to an element; and an inspection device body that is electrically connected to the imaging device and inspects the imaging device based on an output signal of the imaging device irradiated with the irradiation light In the centering method of
A first centering step of finely adjusting a mounting position of the holding table or the lighting device so that an optical axis of the lighting device matches a predetermined position of the image sensor set on the holding table;
A second centering step of aligning the optical axis of the lens and a fixed position of the imaging device holding base via a lens holder for attaching the lens to the machine frame;
A centering jig having a first reference jig having a first reference hole at a light source mounting position of the machine frame and having an alignment member held in the first reference hole and aligned with the light incident surface of the integrator. And a third centering step for aligning the optical axis of the integrator with the center line of the first reference jig.   In the first centering step, a laser pointer is attached to the first reference hole at a concentric position, and a laser irradiation point of the laser pointer is aligned with a fixed position of the imaging device, whereby the machine frame and the holding base The centering method for an image sensor inspection apparatus according to claim 1, wherein the centering is performed.   The illumination device includes a reflection mirror that reflects light from the light source, and the first centering step is performed in a state where other optical elements other than the reflection mirror are removed from the illumination device. The centering method of the image sensor inspection device according to claim 1 or 2. The second centering step includes
A second reference jig having a second reference hole is attached to the image sensor holding base, and the lens is attached to the machine frame via a cylindrical jig formed of a concentric stepped cylinder held in the second reference hole. The centering method of the image sensor inspection device according to claim 1, wherein a lens holder for mounting on the lens and a center line of the holding table are aligned.   The illumination device has a diaphragm for narrowing light from the light source, and is held in the first reference hole, and a centering jig having an alignment member that is aligned with the diaphragm opening of the diaphragm. 5. The centering method for an image sensor inspection apparatus according to claim 1, further comprising a fourth centering step for aligning a center line between the first reference jig and the first reference jig.

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