JP2003297903A - Foup clamp mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To compact while satisfying the request of a standard concerning the specification of a clamp. <P>SOLUTION: The FOUP clamp mechanism is provided with: a clamp member 4 for clamping an FOUP 2 and pushing the same against a slide table 3; a first cam member 5b for pivoting the clamp member 4 between a clampable position and a non-clampable position retreated from the clampable position; a second cam member for clamping the clamp member 4 at the clampable position to clamp by retracting the same so as to push the FOUP 2 at the clampable position; and an actuator 7 which is only one operating source for operating the first cam member 5b and the second cam member sequentially. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a FOUP (Front
Open Unified Pod) device for clamping. More specifically, according to the present invention, the FOUP is docked to the load port, the lid is opened in a close contact state, and when the substrate is transferred under a condition where cleanliness is maintained, the FOUP is moved to a predetermined position on the slide table. The present invention relates to improvement of a mechanism for fixing the FOUP.

[0002]

2. Description of the Related Art In recent years, circuit panel substrates, display panel substrates such as liquid crystal display panel substrates and plasma display panel substrates (glass substrates), hard disk substrates (magnetic substrate), electronic devices such as semiconductor devices, etc. A substrate storage jig transfer device including a FOUP 101 which is a substrate storage jig for storing, carrying and storing a substrate 102 such as a wafer (or a resin substrate) and a load port mechanism for opening and closing the FOUP 101 is used (see FIG. 7). ).

In such a substrate accommodating jig transfer device, for example, a FIMS (Front open in) from the FOUP 101.
When the substrate 102 is transferred to the g Interface Mechanical Standard, it is required to produce integrated circuits with high yield by preventing particles (foreign particles) from entering the FIMS and preventing chemical contamination. Therefore, conventionally, the FOUP 101 is placed on a slide table, conveyed to the FIMS side, and the door 103 is pressed against the port door so as to be docked in the load port in a hermetically sealed state. In this case, the FOUP 101 may be displaced. The FOUP 101 needs to be fixed at a predetermined position on the slide table with a force that is not affected by the pressing force, because the sealed state cannot be maintained if the FOUP 101 is tilted. As one means for fixing the FOUP 101 on the slide table as described above, the FOUP is conventionally used.
A clamp mechanism is used in which the claw of the clamp lever is hooked in the clamp recess 104 at the bottom of the UP, and the claw is pulled and pressed against the slide table.

[0004]

[Problems to be Solved by the Invention] However, FOU
SEMI (Semiconduc
(Tor Equipment and Materials International) standardizes the shape of the recess 104 for clamping, the conventional FOUP clamp mechanism has various requirements as described below, that is, the recess 104 for clamping to be standardized by SEMI. The FOUP 101 can be clamped by using SEMI, because the height of the load port and the area of the slide table are determined by SEMI. Be a mechanism Keep the opening of the cover under the slide table to a minimum. Secure the clamping force specified by SEMI (175N or more). However, there is a problem in that it is difficult to satisfy all of them.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a FOUP clamp mechanism which can be made compact while satisfying the requirements of the standard regarding the specifications of the clamp.

[0006]

In order to achieve such an object, the invention according to claim 1 is an F that can accommodate a plurality of substrates.
FO at a predetermined position on the slide table where the OUP is placed.
In a FOUP clamp mechanism that clamps and fixes UP, a clamp member that clamps FOUP and presses it against a slide table, and a clamp member is rotated between a clampable position and a non-clamping position retracted from this clampable position. A first cam member, a second cam member that retracts and clamps the clamp member so as to press the FOUP at a clampable position, and a sole operation source that sequentially operates the first cam member and the second cam member. It is characterized by comprising an actuator.

The FOUP clamp mechanism according to the second aspect of the present invention is a FOUP capable of accommodating a plurality of substrates, and the FOUP.
FOUP with the slide table for placing the OUP on the port door and docking it on the load port
Between the clampable position where it can be hooked to the non-clamping position retracted from this clampable position and the axial direction at the clampable position to move the claw part in the F direction.
A clamp member hooked on the OUP, a rotating mechanism for rotating the clamp member, a moving mechanism for moving the clamp member in the axial direction, and a rotating mechanism and a moving mechanism for moving the clamp member after rotating the clamp member. It is characterized in that it is composed of an actuator which is the only operation source for sequentially operating the.

When the FOUP clamp mechanism is used, with respect to the clamping concave portion having the shape defined by the standard, the operation of releasing the claw portion of the clamping member from the non-clamping position to the clamping position and the clamping for clamping A complex motion is required that consists of both retracting the member. On the other hand, in the FOUP clamp mechanism according to the present invention, the rotating operation of the rotatable and axially movable clamp member is performed by the first cam member (or the rotating mechanism), and the moving operation is performed by the second cam member. By using a cam member (or moving mechanism) and realizing these series of operations with a single actuator, it is possible to make the mechanism compact while ensuring the necessary clamping force. In this case, the required installation space (particularly the height) can be suppressed, so that the cleanliness can be easily maintained by suppressing the size of the cover opening at the bottom of the slide table to be small.

In the rotating mechanism according to the second aspect of the present invention, the first cam member that changes its position in accordance with the operation of the actuator, and the cam follower that rotates the clamp member following the first cam member. It can consist of and.

Further, it is preferable that the FOUP clamp mechanism is provided with a contact for limiting the operation range of the first cam member to restrict the rotation angle of the clamp member. In this case, since the rotation angle of the clamp member and the claw portion at the tip thereof is limited to a predetermined amount, it becomes easy to accurately stop the claw portion at an appropriate clampable position.

Further, when such a hit is provided,
The movement of the second cam member is independent of the movement of the first cam member, allowing the second cam member to move independently after the movement of the first cam member has been stopped by a hit. It is preferable. In such a case, the second cam member can be acted after the first cam member is completely stopped, so that it is easy to perform a sequential operation of completely moving the rotating operation and then moving it. Become. Moreover, since both cam members are independent of each other, it is convenient that the operating position, operating range, etc. of the second cam member can be adjusted regardless of the operating position, operating range, etc. of the first cam member. .

Further, the FOUP clamp mechanism can be applied to the case where the clamp member is inserted into the FOUP and the clamp recess having a rotatable space is formed.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION The structure of the present invention will be described below in detail based on an example of an embodiment shown in the drawings.

1 to 6 show an embodiment of the present invention. The FOUP clamp mechanism 1 according to the present invention is a FOU
Slide table 3 for P (Front Open Unified Pod) 2
It is a mechanism for clamping on the upper side. By clamping and fixing it at a predetermined position on the slide table 3,
When the OUP 2 is brought into close contact with the port door 10 and docked in a load port (not shown), the FOUP 2 is prevented from tilting or shifting and the substrate 9 can be transported in an airtight state where cleanliness is maintained. There is.

In the embodiment described below, an integral FOUP
A mode in which 2 is moved back and forth to be docked in the load port will be described (see FIG. 5). Although the substrate transfer robot is not particularly shown, the robot used here is a known one that can take out and transfer the substrate 9 from the FOUP 2 by a rotatable arm (or hand). In this embodiment, a slide table 3 which can be moved back and forth is provided, and the FO is attached to the slide table 3.
UP2 is mounted and moved. For example, three positioning pins 23 are provided on the upper surface of the slide table 3.
And a positioning pin hole (not shown) into which these positioning pins are fitted is provided at a corresponding position on the bottom surface of the FOUP 2. The FOUP 2 is placed at a predetermined position determined by the positioning pin 23, and then the FOUP according to the present invention.
It is fixed to the slide table 3 by the clamp mechanism 1.

The FOUP 2 to be clamped includes a circuit original plate substrate, a display panel substrate such as a liquid crystal display panel substrate and a plasma display panel substrate, a hard disk substrate, and a substrate such as a wafer for an electronic device such as a semiconductor device. This is a substrate storage jig applicable to various substrates 9 such as a glass substrate, a magnetic substrate, and a resin substrate used, and is used as a 300 mm wafer pod in this embodiment, for example. The FOUP 2 of this embodiment includes a FOUP housing 25 that is a pod body and a FOUP housing 25 that is a lid that can be opened and closed with respect to the pod body and is closed.
FOUP in close contact with the seal surface (FOUP seal surface) of
It has a door 26 which is an opening / closing door section for preventing particles from entering the housing 25 and preventing chemical contamination.

The FOUP casing 25 is a casing made of metal instead of resin in order to improve the mechanical strength and raise the drying temperature. The OHT portion (O
HT: Overhead Hoist Transfer (Mushroom 27) for catching and fishing, and positioning pin holes for positioning the housing itself at a predetermined position with the positioning pin 23 protruding from the slide table 3 inserted. I have it.

The door 26 is formed of resin or metal as a main material in order to suppress metal contamination due to rubbing, and a sealing material (packing) 28 provided around the door 26 to maintain airtightness, and a door. The door clamping mechanism unit 29 is a mechanical opening / closing mechanism 26, and the retainer 30 is a substrate pressing mechanism. Door clamping mechanism part 29
In order to prevent the problem of foreign matter and chemical contamination due to the mixture of foreign matter and contaminants, the resin is mainly composed of resin or is coated with resin. Retainer 3
No. 0 is formed mainly of resin in order to prevent metal contamination of the substrate 9. The door 26 itself may be either resin or metal, but metal contamination can be suppressed by making the door clamping mechanism portion 29, which strongly rubs against the FOUP housing 25, from resin. Since only the retainer 30 and the wafer teeth portion 31 directly contact the substrate 9,
By using resin for the retainer 30 and the wafer teeth portion 31, metal contamination can be suppressed. Door 26
Is opened and closed by an opening / closing device (not shown) that moves the port door 10 and the door 26 while being supported by the port door 10.

At the bottom of the FOUP 2, there is formed a clamping concave portion 8 having at least the claw portion 4a of the clamp member 4 and a clamped stepped portion 8a on which the claw portion 4a of the clamp lever 4 rotated after insertion is caught. Has been done.
As shown in FIG. 2, the clamp recess 8 of the present embodiment has a substantially rectangular bottom surface, and part of the claw portion 4a is inserted into the inner peripheral portion (preferably the inner peripheral portion facing the port door 10 side). A clamped stepped portion 8a is provided. With respect to such a clamped stepped portion 8a, the claw portion 4a moves from a position indicated by an imaginary line in FIG. 2 (referred to as an unclamped position in this specification) to 9
When it reaches a position shown by a solid line where it can be clamped by turning by 0 degree (referred to as a clampable position in this specification), a part thereof can be slid into the space having the clamped stepped portion 8a (Fig. 1). reference).

The clamp member 4 is a member for fixing the FOUP 2 at a predetermined position on the slide table 3 by hooking the claw portion 4a at the tip end thereof to the clamped stepped portion 8a and clamping the FOUP 2 on the slide table 3. It is provided rotatably and axially movable by means of a flanged bearing 11. In the case of this embodiment, the claw portion 4a
Is removable from the tip of the clamp member 4, and is fixed by a bolt 32 as shown in the figure.

At the base end of the clamp member 4 (the end opposite to the claw portion 4a), the clamp member 4 is rotated in a predetermined manner following the cams of the rotating mechanism 5 and the moving mechanism 6. Two cam followers that perform a moving operation and a moving operation, specifically, a cam follower 4b that rotates the clamp member 4 following the groove cam of the first cam 5b, and a second cam member 6c for retracting. A cam follower 4c is provided that follows the cam and pulls down the clamp member 4. Among them, the cam follower 4b is a columnar or cylindrical cam attached to the tip of a lever 4d that is fixed to the clamp member 4 in a non-rotatable manner and protrudes in the radial direction, and is inside the groove cam of the first cam member 5b. Located on the first cam member 5b
Is provided so as to rotate the clamp member 4 by 90 degrees, for example. On the other hand, cam follower 4c
Is the base end of the clamp member 4 (the base end of the present embodiment is
A follower cam in the shape of a wheel, which is attached to the first cam member 6c as shown in the drawing, is rotatably supported by a pin 4e and is pushed by the inclined surface of the triangular cam of the second cam member 6c. Pull the clamp member 4 downward (see FIG. 4).
reference).

The rotating mechanism 5 is a mechanism for rotating the clamp member 4, and the moving mechanism 6 is a mechanism provided so as to retract the rotated clamp member 4 in the axial direction. In the present embodiment, only the actuator 7 is provided. Thus, the rotating mechanism 5 is operated first, and then the moving mechanism 6 is operated, so that the rotating mechanism 5 is sequentially operated. The actuator 7 is a drive source for causing the rotating mechanism 5 and the moving mechanism 6 to perform a predetermined operation, and in the present embodiment, a means capable of making a predetermined stroke in the horizontal direction (for example, a reciprocating device including a piston and a cylinder) is used. ing. A bracket 12 is fixed to the actuator 7 with bolts 13, and a first cam member 5b and a second cam member 6c are attached to the bracket 12. Also, this bracket 12
A slider 14 that is guided along a guide rail 15 on the bottom surface side of the slide table 3 is provided so as not to shift laterally during a stroke.

The rotating mechanism 5 is a bracket 1 that moves horizontally.
2 and the support shaft 5 attached to the bracket 12
a, a first cam member 5b fixed to the tip of the support shaft 5a with a nut 21 or the like. The first cam member 5b, which moves horizontally, has a constant stroke width (specifically, the rotation angle of the clamp member 4 is 9 by 9 degrees attached to the lower surface of the slide table 3).
The stroke width is controlled so that it becomes 0 degree. Bolt 17a for adjusting the contact position to 17
And a nut 17b, and the first cam member 5b is provided with a pin 5c for contacting with the tip of the bolt 17a.

The above-mentioned support shaft 5a is supported by a bearing 18 on the bracket 12 so as to be slidable in the axial direction, and is movable relative to the bracket 12.
The support shaft 5a and the first cam member 5b are urged away from the bracket 12 by urging means 19 formed of a compression coil spring provided around the support shaft 5a. In this case, the stopper 20 provided at the end portion of the support shaft 5a functions as a retainer that prevents the support shaft 5a from coming off the bearing 18.

The moving mechanism 6 is a bracket 1 which moves horizontally.
2 and the second cam member 6c fixed to the bracket 12 with, for example, bolts 16. The retracting cam 6c is, for example, a triangular cam having an inclined surface as shown in the drawing, and the cam follower 4c moves when moved horizontally.
It has a cam shape in which the clamp member 4 is pulled downward via c. In addition, the second cam member 6c is the clamp member 4
The cam follower 4c
Has a thickness capable of drawing in (see FIGS. 3 and 4).

Subsequently, focusing on the movement of the FOUP clamp mechanism 1 of the present embodiment, the FOUP 2 is moved to the slide table 3
The operation from mounting on the load port to docking on the load port will be described. First, the FOUP 2 is placed on the slide table 3 waiting on the front side while being positioned at a predetermined position by the positioning pin 23 (see FIG. 5). At this time, the tip end of the clamp member 4 including the claw portion 4a enters the clamp concave portion 8 in a state of facing sideways and is positioned at the non-clamp position (see FIG. 2). This FOUP clamp mechanism 1
In the stage before operating the actuator 7, the actuator 7 pulls the bracket 12 and the first cam member 5b and the second cam member 6c to the actuator body side as shown by the imaginary line (FIGS. 1, 3 and 4). reference).

When the actuator 7 is activated to make a stroke, the bracket 12, the support shaft 5a, the first cam member 5b, the second cam member 6c and the like move in parallel as a unit. At this time, the cam follower 4b that follows the grooved cam of the first cam member 5b rotates the lever 4d until the first cam member 5b comes into contact with the contact 17 in degrees. Along with this, the clamp member 4 rotates as shown in FIG. 2, and the claw portion 4a is located at the clampable position where it is recessed into the recess 8 for clamping.

Here, the first cam portion 5b and the support shaft 5
The movement of a is restricted after it comes into contact with the contact 17, but the bracket 12 is further restricted by pressing the biasing means 19 without being restricted by the first cam portion 5b and the support shaft 5a. The second cam member 6c can be brought into sliding contact with the cam follower 4c (see FIG. 4).
In this case, the clamp member 4 is pulled downward by the action of the pulling cam of the second cam member 6c, the claw portion 4a is hooked on the clamped stepped portion 8a to clamp the FOUP2, and the FOUP2 of the slide table 3 is clamped. Lock in place. After that, the slide table 3 is moved and pressed against the port door 10 to be docked with the load port (see FIG. 5).

According to the FOUP clamp mechanism 1 as described above, the FOUP 2 can be fixed to a predetermined position of the slide table 3 by being clamped so as to be pressed against the slide table 3, and the FOUP 2 is docked to the load port. In this case, it is possible to prevent the FOUP 2 from shifting, floating, or tilting, and to maintain the close contact with the load port. Therefore, FOUP2
Since it is possible to maintain the cleanliness of the transport path when transporting the substrates 9 housed inside, it is not necessary to maintain the predetermined cleanliness of the entire work room, and the cost is reduced accordingly. It is possible to plan.

Moreover, in the FOUP clamp mechanism 1 of this embodiment, since the rotating mechanism 5 and the moving mechanism 6 are sequentially operated by the actuator 7 which is the only operation source, the mechanism required for clamping the FOUP 2 is simple. The required installation space (especially height) can be reduced. For this reason, while maintaining the clamp shape defined by the SEMI standard (specifically, the shape of the clamp recess 8 provided in the lower portion of the FOUP 2) and realizing the specified clamp position and clamp force, It is possible to prevent the interference with the site. Further, it is possible to suppress the opening area of the opening of the cover that covers the lower portion of the slide table 3 from below.

Further, in the FOUP clamp mechanism 1 of this embodiment in which the rotating operation is completed and then the moving operation is performed, the claw portion 4a is directly above the clamped stepped portion 8a of the clamping recess 8. Can be pressed straight downward. Therefore, a problem that may occur when the clamp member is pressed against the clamped stepped portion while rotating like a screw (for example, the claw portion 4a or the clamped stepped portion 8a is scratched or is accompanied thereby) There is no problem such as dust. That is, the FOUP clamp mechanism 1 of the present embodiment is suitable for maintaining cleanliness in a substrate transfer apparatus that requires a clean environment.

The above-described embodiment is an example of the preferred embodiment of the present invention, but the present invention is not limited to this, and various modifications can be made without departing from the gist of the present invention. For example, in the present embodiment, the FO is moved by the movement of the actuator 7 when the bracket 12 or the like is pushed out.
Although the UP clamp mechanism 1 is operated, this is only an example of the operation, and the present invention is not limited to this. For example, by reversing the inclination of the second cam member 6c,
It is also possible to operate the FOUP clamp mechanism 1 by moving the bracket 12 backwards, for example, by changing the mounting position of 17 per degree.

[0033]

As is apparent from the above description, according to the FOUP clamp mechanism of the first aspect, the FOUP is clamped after securing the regulated clamping force by using the clamping recess which is standardized by SEMI. Then, it can be fixed at a predetermined position on the slide table. Moreover, in the FOUP clamp mechanism according to the present invention, the mechanism can be made compact by realizing a series of operations of rotation and axial movement of the clamp member with only one actuator. In this case, the required installation space (particularly the height) can be suppressed, so that the height at which there is a possibility of interference with other functions of the load port can be suppressed. In addition, the degree of cleanliness can be easily maintained by reducing the size of the cover opening below the slide table.

Also, according to the invention of claim 2, similarly to the FOUP clamping mechanism of claim 1, the FOUP is clamped and fixed at a predetermined position on the slide table after securing a prescribed clamping force. You can
The mechanism can be made compact by realizing a series of operations with only one actuator.

According to the FOUP clamp mechanism of the third aspect, the first cam member changes its position according to the operation of the actuator, and the cam follower for rotating the clamp member following the first cam member. A rotating mechanism can be configured to rotate the clamp member.

According to the FOUP clamp mechanism of the fourth aspect of the present invention, the rotation angle of the clamp member and the claw portion at the tip of the FOUP is limited to a predetermined amount by degrees, and the claw portion is accurately stopped at an appropriate clampable position. It will be easy. Therefore, it is advantageous in that the desired clamping force can be reliably obtained.

According to the FOUP clamp mechanism of the fifth aspect, the second cam after the first cam member is completely stopped.
Since it becomes possible to operate the cam member, it becomes easy to sequentially perform the moving operation after the rotating operation is completed. Moreover, since both cam members are independent of each other, the operating position of the first cam member,
This is convenient because the operating position, the operating range, etc. of the second cam member can be adjusted regardless of the operating range or the like.

Further, the FOUP clamp mechanism according to the sixth aspect can be applied to the case where the clamp member is inserted and a clamp recess having a rotatable space is formed.

[Brief description of drawings]

FIG. 1 is a side view showing a FOUP clamp mechanism according to the present invention.

FIG. 2 is a partial plan view of a FOUP clamp mechanism.

FIG. 3 is a bottom view of the FOUP clamp mechanism.

FIG. 4 is a side view of the FOUP clamp mechanism from the side opposite to FIG.

FIG. 5 is a side view showing an overall outline of a substrate transfer device.

FIG. 6 is a perspective view showing a structural example of a FOUP.

FIG. 7 is a conventional FOUP showing an example of the shape of a recess for clamping.
2A and 2B are a schematic view and a partially enlarged view of FIG. 3A, and FIG.

[Explanation of symbols]

1 FOUP clamp mechanism 2 FOUP 3 slide table 4 Clamp member 4a Claw 5 Rotation mechanism 5b First cam member 6 moving mechanism 6c Second cam member 7 Actuator 8 Clamp recess 9 substrates 10 port door

Claims (6)

[Claims] 1. A FOUP clamp mechanism for clamping and fixing the FOUP at a predetermined position of a slide table on which a FOUP capable of accommodating a plurality of substrates is mounted, and a clamp for clamping the FOUP and pressing it on the slide table. A member, a first cam member for rotating the clamp member between a clampable position and a non-clamping position retracted from the clampable position, and the clamp member pressing the FOUP at the clampable position. A FOUP clamp mechanism comprising a second cam member for retracting and clamping as described above, and an actuator that is the only operation source for sequentially operating the first cam member and the second cam member. 2. A FOUP capable of accommodating a plurality of substrates, a slide table on which the FOUP is placed, and which is brought into close contact with a port door and docked at a load port, and a claw portion,
A clamp member that pivotally moves between a clampable position that can be hooked on the OUP and a non-clamping position that is retracted from the clampable position and that axially moves at the clampable position to hook the claw portion on the FOUP; A rotation mechanism that rotates the clamp member, a movement mechanism that moves the clamp member in the axial direction, and a rotation mechanism and a movement mechanism that sequentially operate to rotate the clamp member and then move the clamp member. The FOUP clamp mechanism is characterized by comprising an actuator which is the operation source of the FOUP clamp mechanism. 3. The rotating mechanism includes a first cam member that changes its position according to the operation of the actuator, and the first cam member.
The FOUP clamp mechanism according to claim 2, further comprising a cam follower that rotates the clamp member following the cam member. 4. The FOUP clamp mechanism according to claim 1 or 3, further comprising a contact for limiting an operating range of the first cam member to restrict a rotation angle of the clamp member. 5. The movement of the second cam member is made independent of the movement of the first cam member, and after the movement of the first cam member is stopped by the hit, the second cam member is moved. The FOUP clamping mechanism according to claim 4, wherein the FOUP clamping mechanism is capable of moving independently. 6. The FOUP is formed with a groove for clamping in which the clamp member is inserted and which has a rotatable space is formed in the FOUP. FOUP clamp mechanism.