JP2003121676A - Optical fiber array, and method and plate for positioning optical fiber - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily determine the position of an optical fiber with high precision at one end of an optical fiber holder. SOLUTION: The optical fiber positioning plate 12A is so formed by a thin- film process etc., as to have positioning holes H11 to H81 corresponding to holding holes J11 to J81 of the optical fiber holder 10 and a positioning plate 12B is also similarly formed. Each positioning hole is formed increasing in size from one end to the other end. The positioning plates 12A and 12B are mounted at one end and the other end of the holder 10 respectively. Optical fibers F11 to F81 are run through positioning holes K11 to K81 , inserted into the holding holes J11 to J81 and positioning holes H11 to H81 , and fixed with an adhesive layer 16. The optical fibers F11 to F81 can be fixed by using even an adhesive layer or fixing layer provided on the side of the positioning plate 12A instead of the adhesive layer 16. The fixing layer after being formed by plating is flattened by polishing.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for forming an optical transmission line using an optical fiber, and more particularly to an optical fiber array, an optical fiber positioning method used for manufacturing the optical fiber array, and a method for implementing this method. And an optical fiber positioning plate.

[0002]

2. Description of the Related Art Conventionally, as a two-dimensional optical fiber array, the one shown in FIG. 26 is known (see, for example, Japanese Patent Laid-Open No. 10-268145).

In the two-dimensional optical fiber array shown in FIG. 26, holes H ₁ , H ₂ , H ₃ ... Are formed in a matrix on the ceramic plate 1a by precision processing such as laser processing, and the holes are formed in the same manner. Ceramic plates 1b, 1c ... Are prepared. The ceramic plates 1a, 1b, 1c, ... Are laminated and fixed by aligning the hole positions by passing a guide wire through a plurality of holes such as H ₁ . After removing the guide wire from the hole, the optical fiber 2a, 2b, 2c ... and inserted into the hole _{H 1, H 2, H 3} ..., fixed. The end faces of the ceramic plate laminate are polished to align the ends of the optical fibers 2a, 2b, 2c ....

[0004]

According to the above-mentioned conventional technique, a plurality of optical fibers can be two-dimensionally arranged with high accuracy. However, it is not easy to align the positions of a large number of holes among a large number of ceramic plates even if precision processing is used, and it is not easy to insert an optical fiber into a large number of holes of a ceramic plate laminate. Therefore, there is a problem in that production is difficult.

An object of the present invention is to provide a novel optical fiber array, an optical fiber positioning method, and an optical fiber positioning plate which can accurately and easily determine the position of an optical fiber at one end of an optical fiber holder. is there.

[0006]

A first optical fiber array according to the present invention has one or a plurality of optical fibers to be positioned and optical fiber holding holes corresponding to the respective optical fibers to be positioned. An optical fiber holder in which each optical fiber holding hole is formed so as to penetrate from one end to the other end, and an optical fiber positioning hole corresponding to each optical fiber holding hole of the optical fiber holder is one main Is a positioning plate formed so as to penetrate from the surface to the other main surface and increase in size as it approaches the other main surface, and each optical fiber positioning hole is formed in the optical fiber holder on the other main surface. One mounted on one end of the optical fiber holder so as to communicate with the corresponding optical fiber holding hole, and the positioning plate on one end of the optical fiber holder. Fixing means for fixing the optical fibers to the positioning plate in a state in which each optical fiber is inserted into the corresponding optical fiber holding hole of the optical fiber holder and the corresponding optical fiber positioning hole of the positioning plate. It is a thing. Here, the size of the hole is
The diameter of a hole, the size of one side of the hole, etc.

The first optical fiber array is a first optical fiber array which will be described later.
It can be manufactured easily and with high precision by using the optical fiber positioning method described above.

A first optical fiber positioning method according to the present invention is an optical fiber holder having one or a plurality of optical fibers to be positioned and an optical fiber holding hole corresponding to each optical fiber to be positioned. And a positioning plate having optical fiber positioning holes corresponding to the respective optical fiber holding holes of the optical fiber holder, the optical fiber holding holes being formed so as to penetrate from one end to the other end thereof. And a step in which each optical fiber positioning hole is formed so as to penetrate from the main surface to the other main surface and increase in size as approaching the other main surface, and the other of the positioning plates. The positioning is performed so that each optical fiber positioning hole of the positioning plate communicates with the corresponding optical fiber holding hole of the optical fiber holder on the main surface. Mounting a plate on one end of the optical fiber holder, and positioning each optical fiber through the corresponding optical fiber holding hole of the optical fiber holder in a state where the positioning plate is mounted on one end of the optical fiber holder. And inserting the optical fiber into the corresponding optical fiber positioning hole.

According to the first optical fiber positioning method,
A positioning plate is attached to one end of the optical fiber holder, and each optical fiber is inserted into a corresponding optical fiber positioning hole through a corresponding optical fiber holding hole. The positioning plate is
It can be produced with high accuracy and easily by a thin film process or the like. In particular, the position and size of each optical fiber positioning hole and the pitch between optical fiber positioning holes can be set with submicron accuracy. Therefore, the position of the tip of each optical fiber can be accurately determined by the positioning plate at one end of the optical fiber holder.

The positioning plate is attached to one end of the optical fiber holder on the other main surface side where the size of each optical fiber positioning hole is large. Therefore, each optical fiber can be inserted into the corresponding optical fiber positioning hole from the opening end side having a large size, and the insertion work of the optical fiber becomes simple and smooth. In addition, the number of parts is two, that is, the optical fiber holder and the optical fiber positioning plate, except for the optical fiber to be positioned, which simplifies the assembly work.

A second optical fiber array according to the present invention includes one or a plurality of optical fibers as positioning targets,
An optical fiber holder having an optical fiber holding hole corresponding to each optical fiber as the positioning object, wherein each optical fiber holding hole is formed so as to penetrate from one end to the other end thereof; And a first optical fiber positioning hole corresponding to each optical fiber holding hole of the first optical fiber holding hole penetrates from one main surface to the other main surface and is formed so as to increase in size as it approaches the other main surface. A positioning plate mounted on one end of the optical fiber holder such that each first optical fiber positioning hole on the other main surface is in communication with a corresponding optical fiber holding hole of the optical fiber holder; As the second optical fiber positioning hole corresponding to each optical fiber holding hole of the optical fiber holder penetrates from one main surface to the other main surface and approaches the other main surface. A second positioning plate formed so as to increase in size such that each second optical fiber positioning hole is communicated with a corresponding optical fiber holding hole of the optical fiber holder on the one main surface. The optical fiber holder is attached to the other end, and the first and second positioning plates are attached to one end and the other end of the optical fiber holder respectively, and each optical fiber corresponds to the second positioning plate. The second optical fiber positioning hole, the corresponding optical fiber holding hole of the optical fiber holder, and the first optical fiber positioning hole of the first positioning plate are inserted through the first and second optical fibers. And the second
Fixing means for fixing to at least one of the positioning plates.

The second optical fiber array is a second optical fiber array which will be described later.
It can be manufactured easily and with high precision by using the optical fiber positioning method described above.

A second optical fiber positioning method according to the present invention is an optical fiber holder having one or a plurality of optical fibers to be positioned and optical fiber holding holes corresponding to the respective optical fibers to be positioned. In which each optical fiber holding hole is formed so as to penetrate from one end to the other end, and a first positioning having a first optical fiber positioning hole corresponding to each optical fiber holding hole of the optical fiber holder. A plate in which each of the first optical fiber positioning holes is formed so as to penetrate from one main surface to the other main surface and increase in size as it approaches the other main surface; A second positioning plate having a second optical fiber positioning hole corresponding to each optical fiber holding hole of the fiber holder, the second positioning plate penetrating from one main surface to the other main surface. A step of said other respective second optical fiber positioning holes so as to increase the size approaches the main surface of prepared and those formed One, the first
Of the first positioning plate so that each first optical fiber positioning hole of the first positioning plate communicates with the corresponding optical fiber holding hole of the optical fiber holder on the other main surface of the first positioning plate.
Of the second positioning plate is attached to one end of the optical fiber holder and the second positioning plate is attached to the second positioning plate.
Attaching the second optical fiber positioning plate to the other end of the optical fiber holder so that each second optical fiber positioning hole of the positioning plate communicates with the corresponding optical fiber holding hole of the optical fiber holder. , Each of the optical fibers from the corresponding second optical fiber positioning hole of the second positioning plate in a state where the first and second positioning plates are attached to one end and the other end of the optical fiber holder, respectively. Inserting the corresponding first optical fiber positioning hole of the first positioning plate through the corresponding optical fiber holding hole of the holder.

According to the second optical fiber positioning method,
First and second positioning plates are attached to one end and the other end of the optical fiber holder, respectively, and each optical fiber corresponds to a corresponding first optical fiber holding hole from a corresponding second optical fiber holding hole. Of the optical fiber positioning hole. The first and second positioning plates can be formed with high accuracy and easily by a thin film process or the like. In particular, the position and size of each optical fiber positioning hole and the pitch between the optical fiber positioning holes are set with submicron accuracy. be able to. The optical fiber holder also serves to secure the linearity of the optical fibers or the parallelism between the optical fibers between the first and second positioning plates. Therefore, the tip position of each optical fiber can be determined with high accuracy by the first positioning plate at one end of the optical fiber holder.

In addition, the first positioning plate is attached to one end of the optical fiber holder on the other main surface side where the size of each first optical fiber positioning hole is large, and the second positioning plate is The second optical fiber positioning hole is attached to the other end of the optical fiber holder on the one main surface side where the size is small. Therefore, each optical fiber is inserted into the corresponding second optical fiber positioning hole from the opening end side having a large size, and is also inserted into the corresponding first optical fiber positioning hole from the opening end side having a large size. As a result, the work of inserting the optical fiber becomes easy and smooth. Further, except for the optical fiber to be positioned, the number of parts is three, that is, the optical fiber holder and the first and second optical fiber positioning plates, which simplifies the assembly work.

In the second optical fiber positioning method,
In the step of preparing, a guide plate having optical fiber guide holes corresponding to the respective second optical fiber positioning holes of the second positioning plate, so as to penetrate from one main surface to the other main surface Each optical fiber guide hole is prepared with a size larger than the corresponding second optical fiber positioning hole of the second positioning plate, and in the mounting step, the other of the second positioning plate is provided. The guide plate is attached to the second positioning plate so that each optical fiber guide hole of the guide plate communicates with a corresponding second optical fiber positioning hole of the second positioning plate on the main surface, In the step of inserting, in a state where the guide plate is mounted on the second positioning plate, each optical fiber is made to correspond to the second positioning plate through a corresponding optical fiber guide hole of the guide plate. It may be inserted into the second optical fiber positioning holes. With this configuration, each optical fiber is guided to the corresponding second optical fiber positioning hole by the corresponding optical fiber guide hole, so that the operation of inserting the optical fiber becomes easier.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a two-dimensional optical fiber array according to an embodiment of the present invention.
A cross section along line A'is shown in FIG.

The optical fiber holder 10 is, for example, a quadrangular prism, and is made of metal such as stainless steel or Invar. The optical fiber holder 10 has 8 × 8 square optical fiber holding holes J _{11 to} J, respectively.
₈₈ (only J _{11 to} J ₈₁ are shown in FIG. 2 and others are omitted) are formed in a matrix so as to penetrate from one end to the other end of the holder 10 in a substantially parallel state. As a method of forming the optical fiber holder 10, a cutting method by machining can be used, and the parallelism between the optical fibers can be 1
It is possible to form the holder 10 with high accuracy so as to be 0 seconds or less (calculated assuming that the holder length is 12 mm and the pitch between the optical fibers is 0.5 μm). The constituent material of the holder 10 is not limited to metal such as stainless steel, but ceramics such as zirconia, glass, and quartz may be used.

The optical fiber positioning plate 12A has a square shape as shown in FIG. 3 as an example, and is made of a metal plate such as a Ni--Fe alloy. The positioning plate 12A, the optical fiber holding hole _J 11 _{through J 88} of the optical fiber holder 10
8 × 8 square optical fiber positioning holes H _{11 to} H ₈₈ are formed in a matrix so as to penetrate from one main surface of the positioning plate 12A to the other main surface.

FIG. 4 shows a cross section taken along the line BB 'of FIG. As shown with respect to the positioning holes H _{11 to} H _{18 in} FIG. 4, the positioning holes H _{11 to} H ₈₈ are all formed so that the size thereof increases as they progress from one main surface of the positioning plate 12A to the other main surface. ing. In the positioning plate 12A, for example, the length W of one side is 5.8.
The length L of one side of the positioning holes such as H _{11 on} one main surface may be 125.5 μm, the pitch P between the positioning holes may be 250 μm, and the thickness t may be 10 to 80 μm.

The optical fiber positioning plate 12B has the same structure as that of the positioning plate 12A, and corresponds to the optical fiber holding holes J _{11 to} J ₈₈ of the optical fiber holder 10 and has 8 × 8 square light beams. Fiber positioning hole K
_{11 to} K ₈₈ are formed in a matrix so as to penetrate from one main surface of the positioning plate 12B to the other main surface. Positioning hole K ₁₁ ~K ₈₈ are both formed such that the size increases as from one major surface of the positioning plate 12B proceeds to the other main surface.

The positioning plates 12A and 12B can be formed with high precision and easily by a thin film process as will be described later with reference to FIGS. 5 to 8. In particular, the position and size of each positioning hole and the pitch between the positioning holes are 0. It can be set with submicron accuracy such as 0.5 μm.

When manufacturing a two-dimensional optical fiber array, the optical fiber holder 10 and the positioning plates 12A and 12B as described above are prepared, and 64 optical fibers (single mode fibers) having a diameter of 125 μm are prepared. Then, the positioning plates 12A and 12B are attached to one end and the other end of the optical fiber holder 10 by a method such as bonding. That is, the positioning holes H _{11 to} H ₈₈ are connected to the optical fiber holding holes J _{11 to} J ₈₈ of the optical fiber holder 10, respectively, on the other main surface of the positioning plate 12A (the main surface having the larger size of the positioning hole). The positioning plate 12A is attached to one end of the optical fiber holder 10, and the positioning hole K ₁₁ is formed on one main surface of the positioning plate 12B (the main surface having the smaller size of the positioning hole).
-K ₈₈ communicates with the optical fiber holding holes J ₁₁ -J ₈₈ , respectively.
Attach to the other end of 0. As a result, as shown in FIG. 2, for example, the positioning hole H ₁₁ communicates with the holding hole J ₁₁ at the opening end having the larger size, and the positioning hole K ₁₁ has the holding hole J ₁₁ at the opening end having the smaller size. ₁₁ will come to communicate. Either one of the positioning plates 12A and 12B may be attached first, or the positioning plates 12A and 12B may be attached simultaneously.

Next, each optical fiber is inserted from the corresponding positioning hole of the positioning plate 12B into the corresponding positioning hole of the positioning plate 12A through the corresponding optical fiber holding hole of the optical fiber holder 10. For example, as shown in FIG. 2, the optical fiber F ₁₁ is inserted from the positioning hole K ₁₁ into the positioning hole H ₁₁ via the holding hole J ₁₁ . At this time, since the optical fiber F ₁₁ is inserted from the opening end of the larger size of each of the positioning holes K ₁₁ and H ₁₁ ,
The optical fiber F ₁₁ can be easily and smoothly inserted. For the other optical fiber _F 12 _{to F 88,} the insertion operation to be carried out similarly to the optical fiber _{F 11.}

After that, the optical fiber F is bonded by the adhesive layer 16.
_{11 to} F ₈₈ are fixed to the positioning plate 12B. And
The tip of the optical fiber protruding from the positioning plate 12A is polished to align the tip position with the plane of the positioning plate 12A. The positioning plate 12A may be left after polishing, or the positioning plate 12A may be scraped off by fixing the optical fiber to the holder 10 with an adhesive through a holding hole.

According to the above-described embodiment, the optical fiber holder 10 is positioned at one end of the holder 10 while maintaining the linearity or parallelism of the optical fibers F _{11 to} F ₈₈ between the positioning plates 12A and 12B with high accuracy. The plate 12A makes it possible to determine the tip position of each optical fiber with high accuracy. Further, in both the positioning plates 12A and 12B, the optical fiber is inserted into each positioning hole from the opening end having the larger size, so that the insertion work can be performed easily and smoothly.

In the above embodiment, the positioning plate 1
2B main surface (main surface with larger positioning hole)
Surface), as shown in FIGS.
May be provided. The guide plate 14 has, for example, a square shape.
Made of metal plate such as stainless steel
It The guide plate 14 has a positioning hole K of the positioning plate 12B.
₁₁~ K₈₈8 × 8 squares corresponding to
Optical fiber guide hole G₁₁~ G₈₈(G in Figure 2₁₁~ G
₈₁(Only shown, others are omitted) is one of the guide plates 14.
Formed in a matrix from the main surface to the other main surface
ing. Each of the guide holes of the guide plate 14 is provided on the positioning plate 12B.
Shaped to have a larger size than the corresponding locating holes
Is made. This facilitates insertion of optical fiber
This is because.

When using the optical fiber guide plate 14,
After mounting the positioning plate 12B on the other end of the optical fiber holder 10 (before mounting, or at the same time when mounting), the positioning holes of the positioning plate 12B are positioned so that the corresponding guide holes of the guide plate 14 communicate with each other. Guide plate 14 on plate 12B
Put on. Then, each optical fiber is inserted into the corresponding positioning hole of the positioning hole 12B through the corresponding guide hole of the guide plate 14. As a result, the optical fiber F _11, for example, as shown in Figure 2, is inserted into the positioning hole K ₁₁ through the large open end of the size of the positioning hole K ₁₁ from the guide hole G ₁₁ is larger in size than the positioning hole K ₁₁ As a result, the optical fiber F ₁₁ can be easily and smoothly inserted. For the other optical fiber _F 12 _{to F 88,} the insertion operation to be carried out similarly to the optical fiber _{F 11.} The subsequent operation of inserting the optical fiber into the optical fiber holder 10 and the positioning plate 12A is the same as that described above. When the insertion work of the optical fibers F _{11 to} F ₈₈ is completed, the adhesive layers 16 fix the optical fibers F _{11 to} F ₈₈ to the guide plate 14.

Next, an example of a method of manufacturing the optical fiber positioning plate such as the positioning plates 12A and 12B described above will be described with reference to FIGS.

In the step shown in FIG. 5, a Cu / Cr laminated layer (laminated layer of Cu layer on Cr layer) 22 is formed as a plating underlayer on one main surface of a substrate 20 made of, for example, glass, quartz or silicon by a sputtering method. Form. The Cr layer is for improving the adhesion of the Cu layer to the substrate 20, and the thickness of the Cr layer and the Cu layer can be about 30 nm and 300 nm, respectively.

Then, Cu /
A resist layer 24 and R _{1 to} R ₈ are formed on the Cr stack 22. The resist layer 24 is formed so as to have a hole 24a corresponding to a plane pattern of a desired optical fiber positioning plate, and each of the resist layers R _{1 to} R ₈ corresponds to a desired optical fiber positioning hole in the hole 24a. It is formed to have a pattern and increase in size from top to bottom. Here, in order to obtain a forward tapered resist shape such as the layers R _{1 to} R ₈ , when a stepper (reduction projection exposure apparatus) is used, (1) a method of setting a focus position in the resist, 2) A method of setting a small exposure amount at the bottom of the resist (method for positive resist),
(3) In the exposure mask, any one of the methods of gradually changing the transmittance of the mask portion (increasing the transmittance toward the bottom of the resist) can be used.

In the process of FIG. 6, the resist layers 24, R ₁ ...
Optical fiber positioning plate 1 made of a Ni—Fe alloy layer by selective plating treatment of a Ni—Fe alloy using R ₈ as a mask
Form 2. The thickness of the positioning plate 12 is 10 to 80 μm.
It can be about m.

In the process of FIG. 7, the resist layer 24 and R _{1 to} R ₈ are removed by chemical treatment or the like. Resist layers R _{1 to} R
_{Since 8} is removed, the positioning plate 12 is provided with the optical fiber positioning holes S _{1 to} S ₈ . Since each of the positioning holes has a size that increases as the corresponding resist layer progresses from the upper part to the lower part, it is formed so that the size thereof increases from the upper surface to the lower surface of the positioning plate 12.

In the process of FIG. 8, C is formed by the etching process.
The Cu layer of the u / Cr laminated layer 22 is removed to separate the positioning plate 12 from the substrate 20. On the upper surface of the substrate 20, C
The r layer 22a is left. The substrate 20 can be repeatedly used by forming a Cu layer on the Cr layer 22a by a sputtering method.

9 to 13 show another example of the manufacturing method of the optical fiber positioning plate. The same parts as those in FIGS. 5 to 8 are designated by the same reference numerals and detailed description thereof will be omitted.

In the step of FIG. 9, the Cu / Cr laminated layer 22 is formed on one main surface of the substrate 20 in the same manner as described above with reference to FIG. Then, the resist layers R _{11 to} R corresponding to the desired bonding hole patterns are formed by photolithography.
₁₆ is formed on the Cu / Cr stack 22.

Next, in the process of FIG. 10, the resist layers R _{21 to} R ₂₆ corresponding to the desired positioning hole patterns are formed by the photolithography process into resist layers R _{11 to} R.
₁₆ are respectively formed.

In the process of FIG. 11, resist layers R _{11 to} R ₁₁ are formed.
_The optical fiber positioning plate 12 made of a Ni—Fe alloy layer is formed by selective plating of a Ni—Fe alloy using ₁₆ and R _{21 to} R ₂₆ as a mask. At this time, the positioning plate 12 is formed so as to be spaced apart from each resist layer as it goes upward around each resist layer such as R ₂₁ (having a positioning hole whose size increases as it goes upward).

FIG. 14 shows the growth of the plated layer 12 at this time.
The situation is the resist layer R₁₁, R₂₁For example
Is. Resist layer R on Cu / Cr stack 22
₁₁On the surface of the plating layer 12 when viewed from a point P near
The points Q and R shown in the figure are equidistant. The plating layer 12
Since it grows isotropically, the resist layer R is formed directly underneath.₁₁There
At the point R where the plating base is not exposed, the plating layer 12
Is from point P to resist layer R ₁₁To overcome and grow. This
Therefore, the plating layer (positioning plate) 12 is used for each resist layer.
As it goes up around the periphery of the
It is formed.

In the process shown in FIG. 12, the cash register is processed by chemical treatment or the like.
Strike layer R₁₁~ R₁₆, R₂₁~ R ₂₆Remove and position
An optical fiber positioning hole S is formed in the deciding plate 12.₁₁~ S₁₆as well as
Bonding hole M₁₁~ M₁₆Is given. As a result, positioning
The plate 12 penetrates from one main surface to the other main surface.
And increase in size as it approaches the other major surface
Positioning hole S₁₁~ S₁₆Is formed and the position
Hole S₁₁~ S₁₆Continuously on the small size end of
Adhesive hole M larger in size than the small size end₁₁~ M₁₆
Is formed.

In the step of FIG. 13, the Cu layer of the Cu / Cr stack 22 is removed by etching in the same manner as described above with reference to FIG. 8 to separate the positioning plate 12 from the substrate 20.

FIG. 15 shows a case where the positioning plate 12 obtained by the manufacturing method of FIGS. 9 to 13 is attached to one end of the optical fiber holder 10 as shown in FIGS. It shows a fixing state of the end portion of the optical fiber.

Optical fiber F₁₁, F₁₂Positioning plate
The other main surface of 12 (the one with the larger positioning hole size)
Positioning hole S from the side)₁₁, S₁₂Inserted into each
And the adhesive hole M₁₁, M₁₂The tip is positioned via
It is arranged so as to project from one main surface of the plate 12. This
In a state like₁₁, M₁₂Light within
F₁₁, M₁₂Apply an adhesive around the
Adhesive layer A₁₁, A₁₂By optical fiber
F₁₁, F₁₂Is fixed to the positioning plate 12. After this,
One of the main surfaces of the positioning plate 12 is subjected to polishing treatment so that the optical fiber
Iba F₁₁, F ₁₂Protrusion (portion shown by broken line) and adhesion
Layer A₁₁, A₁₂Removing the protrusion (not shown) of
Thus, one main surface of the positioning plate 12 is flattened.

When the optical fiber end fixing structure shown in FIG. 15 is adopted, the adhesive layer 1 described above with reference to FIGS.
The optical fiber fixing structure by 6 may be omitted, or the optical fiber fixing structure by the adhesive layer 16 may be used together.

16 to 22 show still another example of the manufacturing method of the optical fiber positioning plate. The same portions as those in FIGS. 5 to 8 are designated by the same reference numerals and detailed description thereof will be omitted.

In the process of FIG. 16, lift-off resist layers R ₃₁ and R ₃₂ are formed on one main surface of the substrate 20 by photolithography. Resist layers R ₃₁ , R
_{All of 32} correspond to the optical fiber positioning holes, and are formed to have a size slightly larger than the corresponding positioning holes.

In the process of FIG. 17, the resist layers R ₃₁ , R
Cu / Cr stack 2 on one main surface of the substrate 20 covering ₃₂
2 is formed by the sputtering method. At this time, the Cr layer and Cu
The layer thicknesses can be 15 nm and 200 nm, respectively. After that, the resist layers R ₃₁ and R ₃₂ are lifted off together with the Cu / Cr laminated portion on the resist layers R ₃₁ and R _32, and the holes Q ₃₁ and Q ₃₂ exposing the substrate surface portion are formed in Cu / Cr.
Formed on the laminated layer 22.

In the step of FIG. 18, resist layers R ₄₁ and R ₄₂ are formed on the substrate surface portions in the holes Q ₃₁ and Q ₃₂ by photolithography. Resist layers R ₄₁ and R ₄₂
Correspond to the optical fiber positioning holes,
It is formed in a size corresponding to the corresponding positioning hole.

FIG. 19 shows the upper surface of the substrate 20 when the resist layers R ₄₁ and R ₄₂ are formed. According to FIGS. 18 and 19, the hole Q ₃₁ is formed around the resist layer R ₄₁ .
It can be seen that, around the resist layer R _42, the substrate surface portion is exposed in an annular shape due to the holes Q ₃₂ .

In the process of FIG. 20, the resist layers R ₄₁ and R
Optical fiber positioning plate 1 made of Ni—Fe alloy layer by selective plating treatment of Ni—Fe alloy with ₄₂ as a mask
Form 2. At this time, Cu /
In the peripheral portions of the resist layers R ₄₁ and R ₄₂ where the Cr laminated layer 22 is lacking in an annular shape, the growth of plating is delayed as compared with the portion located right above the Cu / Cr laminated layer 22.
The positioning plate 12 is formed so as to be spaced apart from each resist layer as it goes upward around each resist layer such as R ₄₁ (having a positioning hole whose size increases as it goes upward).

In the process of FIG. 21, the resist layers R ₄₁ and R ₄₂ are removed by chemical treatment to provide the positioning plate 12 with optical fiber positioning holes S ₃₁ and S ₃₂ . As a result,
The positioning plate 12 is positioned to increase the size as and penetrating from one main surface to the other main face closer to the other main surface hole S _31, S ₃₂ are formed.

In the process of FIG. 22, the Cu layer of the Cu / Cr laminated layer 22 is removed by etching to separate the positioning plate 12 from the substrate 20. The Cr layer 22a is left on the substrate 20.

According to the manufacturing method of the optical fiber positioning plate described above, the optical fiber positioning holes S _{1 to} S ₈ and S _{11 to} S _{11 are formed.}
The positions and sizes of ₁₆ , S ₃₁ , and S ₃₂ and the pitch between the optical fiber positioning holes can be set with submicron accuracy such as 0.5 μm.

According to the method of manufacturing the optical fiber a positioning plate described above with reference to FIGS. 16 to 22, the following additional effects (a) and (b) can be obtained.

(A) In the process of FIG. 9, the resist layer R ₁₁
Since R _{16 has} a thickness of 2 μm or more, the unevenness on the substrate is large. Therefore, in the process of FIG. 10, the flatness of the resist coating is likely to be impaired, and dimensional variation of the resist layers R _{21 to} R ₂₆ is likely to be caused. On the other hand, in the process of FIG. 17, the resist layers R ₃₁ and R ₃₂ are removed and Cu /
Since the thickness of the Cr stack 22 is as thin as about 200 nm, the unevenness on the substrate is small. Therefore, in the process of FIG. 18, the resist coating uniformity is improved, and the resist layers R ₄₁ and R _{42 are formed.}
The dimensional variation of is reduced. Therefore, the manufacturing yield of the positioning plate 12 is improved.

(B) In the process of FIG. 11, the resist layer R
_{Since the} plating process is performed in a state where the resist layers R _{11 to} R ₁₆ are present under _{21 to} R ₂₆ , even if the resist is removed in the step of FIG. 12 and the Cu etching is performed in the step of FIG. The resist remains in the bonding holes M _{11 to} M ₁₆ and the positioning holes S _{11 to} S _{16 of the above,} and is likely to cause contamination. Contamination causes a decrease in positioning accuracy when assembling the optical fiber array. On the other hand, in the process of FIG. 20, since the plating process is performed in the state where the resist layer does not exist under the resist layers R ₄₁ and R ₄₂ , the positioning plate 12
The amount of resist that adheres to and remains on the substrate is reduced, and contamination can be reduced. Therefore, the positioning accuracy at the time of assembling the optical fiber array is improved.

In the manufacturing method of the optical fiber positioning plate described above, the positioning plate 12 has positioning holes S ₁ to
Although _{S 8, S 11 ~S 16,} S 31, S 32 has been illustrated and constitute a one-dimensional array, it can be created in the same manner as the positioning hole is also described above and constitute a two-dimensional array. The positioning plate 12 can also be formed by using a selective etching process that allows so-called taper etching.

FIG. 23 shows the front structure of a two-dimensional optical fiber array according to another embodiment of the present invention.
FIG. 24 shows a cross section taken along line XX ′ in FIG. 23, 2
4, the same parts as those in FIGS. 1 to 4 are denoted by the same reference numerals, and detailed description thereof will be omitted.

The optical fiber array shown in FIGS.
4x4 optical fiber F₁₁~ F_{Four Four}With
It The optical fiber holder 10 is, for example, an 8 mm square
It is prismatic and has a length of 15 mm. Holder 10
The optical fiber F₁₁~ F ₄₄Hold each
There are 16 holding holes for
4 of the holding holes J₂₁~ J₂₄Is shown in FIG. J
₂₁Each holding hole such as has a cross-sectional shape that is orthogonal to the extension direction.
It has a circular shape.

The holder 10 is provided with pin insertion holes B _{1 to} B ₄ for inserting the guide pins P _{1 to} P ₄ , respectively, so as to penetrate from one end of the holder 10 to the other end in a state substantially parallel to the holder 10. Has been. Each of the pin insertion holes such as B ₁ has a circular cross section orthogonal to the extension direction. Each guide pin such as P ₁ is made of a ceramic such as zirconia or alumina and has a diameter of about 1 mm. Guide pin P ₁
To P ₄ are used to align and hold the positioning plate 12A with the holder 10. One guide pin may be provided on each of the left and right sides in FIG.

In the holder 10, each pin insertion hole such as B ₁ has a size (diameter) as it goes outward on the other end side of the holder 10 in order to facilitate insertion of a corresponding guide pin.
Is increasing. Further, each holding hole such as J ₂₁ has a size (diameter) as it goes outward on the other end side of the holder 10 in order to facilitate insertion of a corresponding optical fiber.
Is increasing. At the other end of the holder 10, instead of increasing the size of each holding hole, as shown in FIGS.
The positioning plate 12B may be provided as shown in, and the guide plate 14 may be provided as necessary. In this case, the positioning plate 12B and the guide plate 14 is provided with a pin insertion holes corresponding to the respective pin insertion holes of ₁ such as B.

An optical fiber positioning plate 12A is arranged at one end of the holder 10. The positioning plate 12A includes
Corresponding 16 optical fiber positioning holes 16 of the retaining hole of the holder 10 is provided in a matrix, four positioning holes H ₂₁ to H of these positioning holes
₂₄ is shown in FIG. Each positioning hole such as H ₂₁ is formed so as to penetrate from one main surface of the positioning plate 12A to the other main surface and increase in size (diameter) as it approaches the other main surface. The positioning plate 12A has four pin insertion hole _C 1 -C ₄ are provided respectively corresponding to the four-pin insertion holes _B 1 .about.B ₄ of the holder 10. Each pin insertion hole such as C ₁ is formed so as to penetrate from one main surface of the positioning plate 12A to the other main surface and increase in size (diameter) as it approaches the other main surface.

The positioning plate 12A can be easily and accurately manufactured by the thin film process as described above, and has, for example, a square shape of 8 mm square and 50 to 100 mm.
It can have a thickness of μm.

Assemble the optical fiber array of FIGS.
The other main surface of the positioning plate 12A (hole C₁~ C
_Four(The main surface of the large size end side) is one end surface of the holder 10.
(Hole B ₁~ B_FourOf the small size end)
In this way, place the positioning plate 12A at one end of the holder 10.
Pin insertion hole B₁~ B_FourThrough each
Pin insertion hole C₁~ C_FourOn the guide pin P₁~ P_FourInsert
To do. At this time, insert each pin insertion hole from the large size end side.
Since the guide pin is inserted, the insertion work is easy and smooth.
It becomes In this way, the guide pin P₁~ P_FourInsert the pin
Through hole B₁~ B_FourThrough each of the pin insertion holes C₁~ C_Four
When it is inserted into the₂₁Each positioning hole such as J₂₁
And the like are aligned with the corresponding holding holes. this
Positioning plate 12A and the guide in such a state of alignment.
Dopin P₁~ P_FourIs attached to the holder 10 by adhesion or the like.
It As an example, the pin insertion hole C₁~ C_FourTouches the large size end of
Apply the adhesive in advance, and after the above alignment,
Mounting can be achieved by curing the adhesive
It P₁Position each guide pin as shown in Fig. 25.
Projected from the deciding plate 12A by a predetermined length of about 1 mm, for example.
I will let you.

Next, in the state where the positioning plate 12A and the guide pins P _{1 to} P ₄ are mounted on the holder 10 as described above, the respective positioning holes such as J ₂₁ are inserted into the corresponding positioning holes such as H ₂₁ and F. A corresponding optical fiber such as ₂₁ is inserted. At this time, since the optical fiber is inserted into each of the holding holes and the positioning holes from the large size end side, the insertion work is simple and smooth. As shown in FIG. 25, each optical fiber such as F ₂₁ is made to project from the positioning plate 12A by a predetermined length, similarly to the guide pins such as P ₁ .

Next, as described above, the optical fibers F ₁₁ to F _11
As shown in FIG. 25, the processing regulation frame is fitted to the holder 10 with the ₄₄ inserted therein by fitting. Processing regulation frame 3
Reference numeral 2 is for restricting the plating process at one end of the holder 10 and a region in the vicinity thereof, and is mounted so as to surround one end of the holder 10 and the positioning plate 12A and project from the positioning plate 12A by, for example, about 200 μm. The processing control frame 32 is made of a non-metal material such as Teflon (registered trademark) or resin, and is a 14 mm square tube having a length of 1 mm.
It is possible to use one having a diameter of 0 mm.

On the other hand, before or after the processing control frame 32 is attached to the holder 10, the protruding portions of the guide pins P _{1 to} P ₄ and the optical fibers F _{11 to} F ₄₄ (only F _{21 to} F ₂₄ are shown in FIG. 25). 25, the optical fiber positioning plate 34 is fitted by fitting as shown in FIG. The positioning plate 34 is
The positioning plate 12A has the same configuration as that of the positioning plate 12A and is manufactured in the same manner. The pin insertion holes M _{1 to} M ₄ are pin insertion holes C.
Positioning holes N _{21 to} N ₂₄ corresponding to _{1 to} C ₄ respectively.
Correspond to the positioning holes H _{21 to} H ₂₄ , respectively. M
_The guide pin is inserted into each pin insertion hole such as ₁ from the large size end side, and the optical fiber is inserted into each positioning hole such as N ₂₁ from the large size end side, so that the insertion work is simple and smooth. Can be done.

The distance D between the processing regulation frame 32 and the positioning plate 34 can be set to 0.5 mm. In a state where the positioning plate 34 is mounted on the projecting portions of the guide pins P _{1 to} P ₄ and the optical fibers F _{11 to} F ₄₄ , the optical fibers F ₁₁ to
The F ₄₄ is positioned with high precision between the positioning plates 12A and 34.

Next, the process control frame 32 is attached to the holder 10, and the guide pins P _{1 to} P ₄ and the optical fiber F ₁₁ are attached.
In the state of mounting the positioning plate 34 to the projecting portion of the to F _44, performs plating by energizing the metallic holder 10, made of plated metal on one principal surface of the positioning plate 12A (e.g. Ni-Fe alloy) fixed Form layer 30. The thickness K of the fixed layer 30 is 100 μm or more and the processing regulation frame 32
The thickness can be set so as not to exceed the protruding length of.

After the plating process, the process control frame 32 is removed from the holder 10. And, if necessary, the positioning plate 34
And the guide pins P _{1 to} P ₄ and the optical fibers F _{11 to} F _44.
24 is removed by cutting or the like and then the fixed layer 30 is subjected to a polishing treatment to remove the fixed layer 30 as shown in FIG.
The surface (the front surface of the optical fiber array shown in FIG. 23) is flattened. At this time, since the optical fibers F _{11 to} F ₄₄ are fixed to the positioning plate 12A by the fixing layer 30 in a highly accurately positioned state, the polishing surface can be stopped anywhere without worrying about the polishing amount k. Also, the tip position of each optical fiber is maintained with high accuracy. The fixed layer 30 can also be formed by a curing process of an adhesive instead of the plating process.

According to the optical fiber array shown in FIGS. 23 and 24, each optical fiber is firmly fixed to the positioning plate 12A by the fixing layer 30 in a state where the tip position accuracy of each optical fiber is kept high at one end of the holder 10. Can be fixed.

The present invention is not limited to the above-described embodiment, but can be implemented in various modified forms. For example, the following changes are possible.

(1) The shape of the optical fiber holder 10 is not limited to a quadrangular prism, but may be a cylindrical shape, a polygonal prism (for example, a triangular prism, a hexagonal prism), or the like.

(2) The holding holes and pin insertion holes of the optical fiber holder 10, the positioning holes and pin insertion holes of the positioning plates 12A, 12B, 12, 34 and the guide holes and pin insertion holes of the guide plate 14 are square in shape. The shape is not limited to a circular shape or a circular shape, and may be a polygonal shape (for example, a triangle, a parallelogram, or a hexagon).

(3) The present invention is applicable not only to a two-dimensional optical fiber array but also to a one-dimensional optical fiber array or a single-core optical fiber holder (positioning of one optical fiber).

[0076]

As described above, according to the present invention, the tip position of each optical fiber is accurately determined by the optical fiber positioning plate on one end side of the optical fiber holder. The effect of improving accuracy is obtained.

Further, since the size of each positioning hole of the optical fiber positioning plate on one end side of the optical fiber holder is set so that the optical fiber can be easily received, each optical fiber is set to the corresponding holding hole of the optical fiber holder. The work of inserting the optical fiber into the corresponding positioning hole of the optical fiber positioning plate is simple and smooth, and the effect of facilitating the manufacture of the optical fiber array is obtained in combination with the small number of parts.

[Brief description of drawings]

FIG. 1 is a perspective view showing a two-dimensional optical fiber array according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along the line A-A ′ of FIG.

FIG. 3 is a front view showing an optical fiber positioning plate.

FIG. 4 is a cross-sectional view taken along the line B-B ′ of FIG.

FIG. 5 is a cross-sectional view showing a resist layer forming step in an example of a method for manufacturing an optical fiber positioning plate according to the present invention.

6 is a cross-sectional view showing a selective plating step following the step of FIG.

FIG. 7 is a cross-sectional view showing a resist removal process following the process of FIG.

8 is a cross-sectional view showing a separation process following the process of FIG.

FIG. 9 is a cross-sectional view showing a resist layer forming step in another example of the method for manufacturing the optical fiber positioning plate according to the present invention.

10 is a cross-sectional view showing a resist layer forming step following the step of FIG.

11 is a cross-sectional view showing a selective plating step following the step of FIG.

FIG. 12 is a cross-sectional view showing a resist removing step that follows the step of FIG.

13 is a cross-sectional view showing a separation process following the process of FIG.

FIG. 14 is a cross-sectional view showing how a plated layer grows in a selective plating process.

FIG. 15 is a cross-sectional view showing a state of fixing the end portion of the optical fiber when the optical fiber is positioned using the positioning plate obtained by the manufacturing method of FIGS.

FIG. 16 is a sectional view showing a resist layer forming step in still another example of the optical fiber positioning plate according to the present invention.

17 is a cross-sectional view showing a sputtering process and a lift-off process following the process of FIG.

FIG. 18 is a cross-sectional view showing a resist layer forming step following the step of FIG.

FIG. 19 is a top view of the substrate of FIG.

20 is a cross-sectional view showing a selective plating step following the step of FIG.

FIG. 21 is a cross-sectional view showing a resist removing step that follows the step of FIG.

22 is a cross-sectional view showing a separation step that follows the step of FIG.

FIG. 23 is a front view showing a two-dimensional optical fiber array according to another embodiment of the present invention.

FIG. 24 is a cross-sectional view taken along line X-X ′ of FIG. 23.

25 is a cross-sectional view showing a plating state of a fixed layer in the optical fiber array of FIG.

FIG. 26 is a perspective view showing an example of a conventional two-dimensional optical fiber array.

[Explanation of symbols]

10: optical fiber holder, 12, 12A, 12B, 3
4: optical fiber positioning plate, 14: optical fiber guide plate,
16, A₁₁, A₁₂: Adhesive layer, 20: substrate, 22: C
u / Cr laminated layer, 22a: Cr layer, 24, R₁~ R₈, R
₁₁~ R₁₆, R ₂₁~ R₂₆, R₃₁, R₃₂, R
₄₁, R₄₂: Resist layer, 30: optical fiber fixing layer,
32: Processing regulation frame, J₁₁~ J₈₁: Holding hole, H₁₁~
H₈₈, K_{1 1}~ K₈₈, S₁~ S₈, S₁₁~
S₁₆, S₃₁, S₃₂: Positioning hole, G_{1 1}~
G₈₁: Guide hole, F₁₁~ F₈₈: Optical fiber, M₁₁
~ M₁₆: Bonding hole, P₁~ P_Four:guide pin.

Claims (6)

[Claims] 1. An optical fiber holder having one or a plurality of optical fibers to be positioned and an optical fiber holding hole corresponding to each optical fiber to be positioned, the optical fiber holder penetrating from one end to the other end. What each optical fiber holding hole is formed, and an optical fiber positioning hole corresponding to each optical fiber holding hole of the optical fiber holder penetrates from one main surface to the other main surface and to the other main surface The optical fiber holder is a positioning plate formed to increase in size as it approaches, and each optical fiber positioning hole is made to communicate with a corresponding optical fiber holding hole of the optical fiber holder on the other main surface. Attached to one end of the optical fiber holder, and the positioning plate attached to one end of the optical fiber holder and each optical fiber corresponds to the optical fiber holder. An optical fiber array with a fixing means for fixing the optical fiber in the positioning plate in the corresponding state of being inserted in the optical fiber positioning holes of said positioning plate and the fiber holding hole. 2. An optical fiber holder having one or a plurality of optical fibers to be positioned and an optical fiber holding hole corresponding to each optical fiber to be positioned, the optical fiber holder penetrating from one end to the other end. A positioning plate having each optical fiber holding hole and an optical fiber positioning hole corresponding to each optical fiber holding hole of the optical fiber holder, which penetrates from one main surface to the other main surface. And a step in which each optical fiber positioning hole is formed so as to increase in size as it approaches the other main surface, and each optical fiber of the positioning plate on the other main surface of the positioning plate A step of mounting the positioning plate on one end of the optical fiber holder so that the positioning hole communicates with the corresponding optical fiber holding hole of the optical fiber holder. And inserting each optical fiber into a corresponding optical fiber positioning hole of the positioning plate through a corresponding optical fiber holding hole of the optical fiber holder in a state where the positioning plate is attached to one end of the optical fiber holder. An optical fiber positioning method comprising: 3. An optical fiber holder having one or a plurality of optical fibers to be positioned and an optical fiber holding hole corresponding to each optical fiber to be positioned, the optical fiber holder penetrating from one end to the other end. Each optical fiber holding hole is formed, and a first optical fiber positioning hole corresponding to each optical fiber holding hole of the optical fiber holder penetrates from one main surface to the other main surface and A first positioning plate formed so as to increase in size as it approaches the main surface, wherein each first optical fiber positioning hole is formed on the other main surface as a corresponding optical fiber holding hole of the optical fiber holder. One that is attached to one end of the optical fiber holder so as to communicate with it, and one second optical fiber positioning hole that corresponds to each optical fiber holding hole of the optical fiber holder Second positioning plate formed so as to penetrate from the main surface to the other main surface and increase in size as approaching the other main surface, and each second optical fiber on the one main surface The positioning hole is attached to the other end of the optical fiber holder so as to communicate with the corresponding optical fiber holding hole of the optical fiber holder, and the first and the first ends of the optical fiber holder are connected to the one end and the other end, respectively. Two positioning plates are mounted and each optical fiber is connected to a corresponding second optical fiber positioning hole of the second positioning plate, a corresponding optical fiber holding hole of the optical fiber holder, and a corresponding one of the first positioning plate. An optical fiber having a fixing means for fixing the optical fiber to at least one of the first and second positioning plates in a state of being inserted into the first optical fiber positioning hole. Baarei. 4. An optical fiber holder having one or a plurality of optical fibers to be positioned and an optical fiber holding hole corresponding to each optical fiber to be positioned, the optical fiber holder penetrating from one end to the other end. A first positioning plate having each optical fiber holding hole and a first optical fiber positioning hole corresponding to each optical fiber holding hole of the optical fiber holder, from one main surface to the other Corresponding to the optical fiber holding holes of the optical fiber holder and the first optical fiber positioning holes formed so as to penetrate the main surface of the optical fiber holder and increase in size as approaching the other main surface. A second positioning plate having a second optical fiber positioning hole, which penetrates from one main surface to the other main surface and increases in size as it approaches the other main surface Such that each second optical fiber positioning hole is formed, and each first optical fiber positioning of the first positioning plate on the other main surface of the first positioning plate. The first positioning plate is attached to one end of the optical fiber holder so that the hole communicates with a corresponding optical fiber holding hole of the optical fiber holder, and the first positioning plate is attached to one of the main surfaces of the second positioning plate. Mounting the second optical fiber positioning plate on the other end of the optical fiber holder so that each second optical fiber positioning hole of the second positioning plate communicates with the corresponding optical fiber holding hole of the optical fiber holder. And, in a state in which the first and second positioning plates are attached to one end and the other end of the optical fiber holder, each optical fiber is connected to the corresponding second positioning plate of the second positioning plate. Inserting the optical fiber positioning hole of the optical fiber holder through the corresponding optical fiber holding hole of the optical fiber holder into the corresponding first optical fiber positioning hole of the first positioning plate. 5. A guide plate having optical fiber guide holes corresponding to the respective second optical fiber positioning holes of the second positioning plate in the preparing step, wherein the one main surface to the other main surface Each of the optical fiber guide holes is formed to have a larger size than the corresponding second optical fiber positioning hole of the second positioning plate so as to penetrate through The guide plate is arranged on the other main surface of the positioning plate so that each optical fiber guide hole of the guide plate communicates with a corresponding second optical fiber positioning hole of the second positioning plate. In the step of mounting the guide plate on the second positioning plate, each optical fiber is positioned through the corresponding optical fiber guide hole of the guide plate in the second positioning step. The optical fiber positioning method according to claim 4, wherein the optical fiber positioning hole is inserted into the corresponding second optical fiber positioning hole of the plate. 6. An optical fiber positioning plate which is used by being attached to one end of an optical fiber holder having one or a plurality of optical fiber holding holes, the optical fiber corresponding to each optical fiber holding hole of the optical fiber holder. Each optical fiber positioning hole has a positioning hole, and is formed so as to penetrate from one main surface of the optical fiber positioning plate to the other main surface and increase in size as it approaches the other main surface. An optical fiber positioning plate characterized by the above.