JP2002361448A - Laser irradiation device and method for controlling passage of laser beam in the laser irradiation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To decrease a micro crack generated in a work to be machined, to increase machining speed and to improve the accuracy of trimming. SOLUTION: A Q-switch frequency signal from a programmable frequency divider circuit 15-2-2 is sent from a logical circuit 15-2-4 to a programmable timer circuit (for optical switch control) 15-2-5 when a measured value of resistance of the work to be machined is smaller than a target value. In the programmable timer circuit (for optical switch control) 15-2-5, an optical switch signal is generated on the basis of the inputted Q-switch frequency signal and conveyed to an optical switch driver part 14 at a set time (a passage time of a laser beam in an optical switch unit 12) set on a decorder part 15-2-4. The optical switch unit 12 is opened by the optical switch driver part 14 on the basis of the switch signal and remaining heat is given to a work to be machined.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser irradiating apparatus for laser trimming means for processing a chip resistor or the like by irradiating a giant pulse laser beam with a Q switch, and to a laser beam passing control method in the laser irradiating apparatus.

[0002]

2. Description of the Related Art Laser trimming means (laser trimming apparatus) is widely used for processing an object to be processed, for example, a chip resistor. The laser trimming means is usually provided with a laser irradiation device having a laser oscillator having a Q switch unit and a Q switch driver for driving the Q switch unit. The laser irradiation apparatus having such a configuration performs ON / OFF control of the laser light emitted from the laser oscillator by driving the Q switch unit as an internal shutter by the Q switch driver unit.

Further, the laser irradiation device has an optical switch unit for passing only the giant pulse of the laser light from the laser oscillator. By using this optical switch unit, the laser irradiation device can turn on the laser light for a fixed time from the rise of the Q switch frequency signal. Therefore, unnecessary continuous oscillation can be suppressed.

[0004] Accordingly, the laser irradiation apparatus appropriately sets the Q switch frequency according to the processing pitch of the chip resistor so as to have an optimum pulse width for processing. Based on the Q switch frequency, the giant of the laser beam is used. A pulse is applied to the object to be processed to perform processing of a predetermined size.

A chip resistor that occupies most of the objects to be processed by the laser trimming means is a mini-disc (M
D), with the mass production of information terminal equipment such as digital video cameras (DVCs) and mobile phones, the unit price of the chip resistor itself is decreasing. For this reason, there has been a demand for laser trimming means to increase the processing speed of chip resistors and the like and to improve productivity.

[0006]

However, the Q switch frequency determined in the conventional laser irradiation apparatus is selected so that the giant pulse of the laser beam from the laser oscillator has an optimum pulse width for processing. The selected Q-switch frequency differs depending on the laser oscillator pumping method (for example, a lamp pumping method or a laser diode pumping method) or the configuration of a resonator, even for laser oscillators having the same oscillation wavelength. .

For this reason, when the processing pitch of the chip resistor is fixed, if the Q switch frequency is determined according to the optimum pulse width for processing, the processing speed of the chip resistor is also determined. This makes it difficult to improve productivity. Therefore, even if a different Q switch frequency is set due to a difference in the excitation method of the laser oscillator or the like, it is possible to increase the processing speed and improve the processing accuracy in the laser trimming means regardless of the difference in the Q switch frequency. The provision of technology was required.

When the Q-switch control in the conventional laser oscillator is performed in a time shorter than the fluorescence lifetime in the resonator, the pumping time, which is the energy storage time of the laser light, is reduced to the peak of the giant pulse of the laser light. Energy and pulse width were determined. Therefore, when the Q switch frequency is changed, the pumping time also changes, and the pulse width of the giant pulse also changes.

Then, when the pumping time T1 is "T1 = Q
Switch period T3-fixed time T ", and Q
When the switch frequency was lowered, the peak width of the laser was very high, but the pulse width was extremely narrow. In this case, since sufficient processing heat cannot be applied to the processing target, processing defects such as uncut resistors have occurred.

Further, micro-cracks may be generated in the resistor, which is an object to be processed by the laser trimming means, due to a rapid solidification effect immediately after the laser trimming. This microcrack is several microseconds after laser irradiation.
Since this occurs in several tens of μs, the trimming accuracy is greatly affected, especially when processing is performed at a high Q switch frequency during high-speed processing.

[0011] The present invention has been made in view of the above circumstances, and enables to increase the processing speed and improve the processing accuracy in laser trimming means.
Apply sufficient processing heat to the processing object to eliminate processing defects,
It is another object of the present invention to provide a laser irradiation apparatus capable of reducing micro cracks generated in a chip resistor or the like, and a method for controlling laser beam passage in the laser irradiation apparatus.

[0012]

In order to achieve this object, a laser irradiation apparatus according to claim 1 of the present invention comprises a laser oscillator for emitting laser light, and a laser oscillator for emitting laser light emitted from the laser oscillator. And an optical switch unit that transmits and blocks laser light, an optical switch driver that drives the optical switch unit, and a laser control unit that controls driving of the optical switch driver. A device,
The laser control means determines the transit time of the laser light in the optical switch unit, and the optical switch driver section drives the optical switch unit to pass the laser light based on the transit time determined by the laser control means. is there.

When the laser irradiation apparatus is configured as described above, the transit time of the laser light in the optical switch unit is controlled, so that not only the driving time of the optical switch unit is controlled by the optical switch driver, but also the processing object It is possible to control the residual heat on the object and the preheating for the next pulse processing. For this reason, it is possible to reduce microcracks generated by a rapid solidification action immediately after the laser trimming, and to provide sufficient processing heat to the processing target to eliminate processing defects.

Further, the laser irradiation apparatus according to the second aspect is
A laser control means for storing a set time preset as a laser light transit time in the optical switch unit, and an optical switch control for determining the set time extracted from the storage as the laser light transit time A programmable timer circuit, wherein the optical switch driver unit drives the optical switch unit based on the transit time determined by the programmable timer circuit for controlling the optical switch to pass the laser light.

With such a configuration of the laser irradiation device, it is possible to control the opening / closing time in the optical switch unit based on the passing time set in advance and stored in the storage unit. Then, the user of the laser irradiation apparatus can set the passage time of the laser light in the optical switch unit in advance as a time suitable for giving residual heat to the workpiece.

Therefore, since the optical switch signal is sent from the programmable timer circuit (for optical switch control) to the optical switch driver unit with the value set by the user as the transit time of the laser light, the residual heat or the like on the workpiece is reduced. In this way, microcracks can be reduced.

Further, the laser irradiation apparatus according to claim 3 is
A configuration is provided that includes a computer that inputs a set time and sends the input set time to a storage unit of the laser control unit for storage. With such a configuration of the laser irradiation apparatus, the set time automatically calculated by the computer based on data input by the user or from another apparatus can be used as the passage time of the laser light in the optical switch unit.

Therefore, if the set time automatically calculated by the computer and stored in the storage unit of the laser control means is sufficiently long, sufficient heat can be applied to the object to be processed, so that micro cracks can be reduced. Thus, the trimming accuracy can be improved.

Further, the laser irradiation apparatus according to claim 4 is
Measurement of a predetermined item is performed on a workpiece to be processed by a laser trimming device having a laser irradiation device, and a measurement comparison / determination device that compares the measured value with a target value,
The optical switch control programmable timer circuit of the laser control means determines the laser light transit time based on the result of the measurement performed by the measurement comparison and determination means.

With such a configuration of the laser irradiation apparatus, the laser control means can calculate the passage time of the laser beam based on the measurement result from the measurement comparison and judgment means. Then, preheating for the next pulse processing can be performed based on the calculated passing time. Therefore, sufficient processing heat is given to the processing object, so that processing defects can be eliminated, processing speed can be increased, and processing accuracy can be improved.

Further, the laser irradiation apparatus according to claim 5 is
The laser control means has a decoder section for setting a pumping time of the laser oscillator, and an optical switch control programmable timer circuit determines a laser light passage time based on the pumping time set by the decoder section, and Based on the transit time determined by the optical switch control programmable timer circuit,
The configuration is such that the optical switch unit is driven to pass laser light.

With such a configuration of the laser irradiation apparatus, the passage time of the laser beam can be determined based on the pumping time. In other words, since the pulse width of the giant pulse is determined by the pumping time, by determining the transit time of the laser light based on the pumping time, it is possible to ensure that only the giant pulse is emitted and to sufficiently apply residual heat to the workpiece. Can be.

According to a sixth aspect of the present invention, there is provided a laser irradiation control method for a laser irradiation apparatus, wherein an optical switch unit is arranged in an optical path of laser light emitted from a laser oscillator.
A laser light passing control method for controlling the drive of the arranged optical switch unit to pass and cut off the laser light, which determines the passing time of the laser light in the optical switch unit, based on the determined passing time, This is a method of driving and controlling an optical switch unit to pass or block laser light.

If the laser beam passage control method in the laser irradiation apparatus is set to such a method, the passage time of the laser beam in the optical switch unit is extended as compared with the conventional one, so that the laser beam can be sufficiently applied to the workpiece immediately after laser trimming. It can give a lot of residual heat. Furthermore, since the removal of the resistive element in the next pulse can be performed efficiently, the processing edge is affected, and the trimming accuracy can be finally improved.

[0025]

Embodiments of the present invention will be described below with reference to the drawings. First, an embodiment of a laser irradiation apparatus of the present invention and a laser beam passage control method in the laser irradiation apparatus will be described with reference to FIG.
FIG. 1 is a block diagram illustrating a configuration of a laser irradiation apparatus according to the present embodiment.

The laser irradiating device 10 includes a laser trimming device (laser trimming device),
For example, for processing a chip resistor or the like, as shown in FIG. 1, a laser oscillator 11, an optical switch unit 12, a Q switch driver unit 13, an optical switch driver unit 14, a measurement unit 15 And a computer 16.

The laser oscillator 11 has a built-in resonator 11b having a Q switch unit 11a.
ON / OFF control of the laser oscillation by the resonator 11b is performed by the Q switch unit 11a, so that the laser beam generated by the laser oscillation is irradiated toward a processing target (not shown).

The optical switch unit 12 is arranged in the optical path of the laser light emitted from the laser oscillator 11, and operates as an external shutter. That is, the optical switch unit 12 passes and blocks the laser light emitted from the laser oscillator 11. This optical switch unit 1
2 is controlled by the optical switch driver unit 14 to pass and block the laser light.

When a Q switch signal (described later) as a laser emission permission signal is input, the Q switch driver section 13 outputs a signal to the Q switch unit 11a to cause the laser oscillator 11 to oscillate. Emit laser light. Also, the Q switch driver unit 13
When the Q switch signal is not input, the oscillation of the laser oscillator 11 is suppressed by not outputting a signal to the Q switch unit 11a.

The optical switch driver section 14 sends a drive signal to the optical switch unit 12 when an optical switch signal (described later) as a laser emission permission signal is input. The optical switch unit 12 that has received the drive signal passes the laser light emitted from the laser oscillator 11. The optical switch driver unit 14 does not send a drive signal to the optical switch unit 12 when an optical switch signal is not input. The optical switch unit 12 that has not received this drive signal blocks the laser light emitted from the laser oscillator 11.

The optical switch driver 14 sends a drive signal to the optical switch unit 12 while the laser emission permission signal is being input. That is, the time during which the drive signal is transmitted is the transit time of the laser light in the optical switch unit 12.

The measuring unit 15 is used for measuring and comparing
5-1 and a laser control means 15-2. The measurement comparing and judging means 15-1 measures a predetermined item, for example, a resistance value, with respect to a chip resistor or the like as a processing target.

Then, the measurement comparing and judging means 15-1 compares and judges this measured value with the target value, and outputs the judgment result to the laser control means 15-2. The output of the determination result by the measurement comparison determination unit 15-1 can be performed only when, for example, the measured value is less than the target value.

The laser control means 15-2 is provided as shown in FIG.
As shown in the figure, a decoder section 15-2-1, a programmable frequency dividing circuit 15-2-2, and a reference clock oscillator 15-2-1.
-2-3, a logic circuit 15-2-4, a programmable timer circuit (for controlling an optical switch) 15-2-5, and a programmable timer circuit (for controlling a Q switch) 15-2-
6.

The decoder section 15-2-1 uses the computer 16 to decode I / O data for control signals of the Q switch unit 11a and the optical switch unit 12. Then, the decoder section 15-2-1 sends the decoded control signal I / O data to the programmable frequency dividing circuit 15-2-2 and the programmable timer circuit (for Q switch control) 15-2-6.

The decoder section 15-2-1 has a storage section (not shown) for storing the passage time of the laser light in the optical switch unit 12. This storage unit stores not only the transit time of the laser light in the optical switch unit 12 but also the computer 1 used as the transit time.
The set time from 6 can also be stored.

Further, the decoder section 15-2-1 sets a pumping time of the laser oscillator 11. This pumping time is stored in the storage unit. Note that the pumping time corresponds to T1 of the Q switch signal (B) in FIG. The set pumping time is determined by a programmable timer circuit (for controlling an optical switch) 15-2-5 and a programmable timer circuit (for controlling a Q switch) 15-2.
-6.

By providing a storage section in the decoder section 15-2-1 of the laser control means 15-2, the release / shut-off time in the optical switch unit can be controlled based on the set time stored in the storage section. . For this reason,
The user of the laser irradiation apparatus can set the passage time of the laser light in the optical switch unit in advance as a time suitable for giving residual heat to the workpiece.

The programmable frequency dividing circuit 15-2-2 is
The control signal I / O data from the decoder unit 15-2-1 is frequency-divided to generate a Q-switch frequency signal as a frequency-divided signal. And a programmable frequency dividing circuit 15-2-2.
Sends the generated Q-switch frequency signal to the reference clock oscillator 15-2-3 and the logic circuit 15-2-4.

In the present invention, the Q-switch frequency signal is generated as a square wave having a duty ratio of 50% in the programmable frequency dividing circuit 15-2-2. However, the Q switch frequency signal has a duty ratio of 5
It is not limited to a square wave of 0%, but can be generated at another duty ratio. By controlling the duty ratio of the Q switch frequency signal, the pulse width of the giant pulse can be varied.

The frequency of the Q switch frequency signal is
It can be changed as appropriate by programming on the programmable frequency dividing circuit 15-2-2. The Q-switch frequency signal serves as a reference signal for laser emission, pulse control, and the like, in addition to the Q-switch signal and the optical switch signal.

The reference clock oscillator 15-2-3 generates a reference clock based on the frequency-divided signal from the programmable frequency divider 15-2-2. The reference clock oscillator 15-2-3 uses the generated reference clock as a programmable timer circuit (for Q switch control) 15-2.
Send to -6.

The logic circuit 15-2-4 receives the frequency-divided signal (Q-switch frequency signal) from the programmable frequency-dividing circuit 15-2-2 and the judgment result from the measurement / comparison judging means 15-1. A divided signal and an AND output signal of the determination result are generated. Then, the logic circuit 15-2-4
Converts the generated AND output signal into a programmable timer circuit (for controlling an optical switch) 15-2-5 and a programmable timer circuit (for controlling a Q switch) 15-2-6.
Send to

The programmable timer circuit (for optical switch control) 15-2-5 (programmable timer circuit for optical switch control) synchronizes with the Q switch frequency signal based on the AND output signal from the logic circuit 15-2-4. The optical switch signal is sent to the optical switch driver section 14 as a laser emission permission signal.

The optical switch signal generated by the programmable timer circuit (for optical switch control) 15-2-5 is output and stopped in synchronization with the Q switch frequency signal, as shown in FIG. You. That is, the optical switch signal is turned on at the same time as the generation of the Q switch frequency signal, and turned off after a predetermined time has elapsed.

For the transmission time of the optical switch signal, that is, the passage time of the laser light in the optical switch unit 12, the set time stored in the storage unit (not shown) of the decoder unit 15-2-1 may be used. it can. That is, the set time taken out of the storage unit and sent from the decoder unit 15-2-1 is the passage time of the laser light in the optical switch unit 12.

If the set time in the decoder unit 15-2-1 is used as the passage time of the laser light in the optical switch unit 12, the user of the laser irradiation apparatus 10 can arbitrarily determine the set value. Also,
By connecting to another device via the computer 16, the computer 16 is connected to the other device based on data from the other device.
Can be used as the set value.

Therefore, the time set by the user or by the computer and automatically set in the decoder section 15-2-1 is set as the laser light passage time from the programmable timer circuit (for optical switch control) 15-2-5. An optical switch signal (laser emission permission signal) can be sent to the optical switch driver unit 14. Thus, with the optical switch signal extended compared to the related art, it is possible to apply residual heat to the object to be processed and reduce microcracks.

Further, the transit time of the laser light in the optical switch unit 12 can be determined based on the measurement result from the measurement comparing and judging section 15-1. When using the measurement result from the measurement comparison / judgment unit 15-1, the programmable timer circuit (for controlling the optical switch) 15-2-1 is based on the measurement result sent via the logic circuit 15-2-4. At 5, the transit time of the laser light is determined.

Therefore, the value calculated based on the measured value in the measurement comparison / judgment means 15-1 is set as the passage time of the laser beam from the programmable timer circuit (for optical switch control) 15-2-5 to the optical switch driver section 14. Optical switch signal can be sent. In this case, too, the object to be processed is given residual heat by the optical switch signal extended compared to the related art, so that microcracks can be reduced.

Further, the passage time of the laser light in the optical switch unit 12 can be determined based on the pumping time set by the decoder unit 15. Even when the transit time of the laser light is calculated using the pumping time from the decoder unit 15-2-1, the micro switch is provided with residual heat by the optical switch signal extended compared to the conventional one, and micro cracks are generated. Can be reduced.

The programmable timer circuit (for Q switch control) 15-2-6 includes I / O data for control output from the decoder section 15-2-1 and a reference clock oscillator 15-2.
-3 based on the reference clock from the logic circuit 15-2-4 and the AND output signal from the logic circuit 15-2-4. The programmable timer circuit (for Q switch control) 15-2-6 uses the generated Q switch signal as a laser emission permission signal,
Send to 3.

The Q switch signal generated by the programmable timer circuit (for Q switch control) 15-2-6 is output and stopped in synchronization with the Q switch frequency signal shown in FIG. You. That is, FIG.
As shown in the figure, the Q switch signal is turned off simultaneously with the generation of the Q switch frequency signal, and the decoder unit 15-2-
It turns ON after the set time in 1 elapses. The computer 16 controls the measurement comparison / determination unit 15-1 and the laser control unit 15-2.

Next, the operation (laser trimming control method) of the laser irradiation apparatus of this embodiment will be described with reference to FIGS. 1, 2 and 3. FIG. 3 shows a laser irradiation device 1
6 is a time chart showing changes in signals generated and stopped in each component of 0.

In FIG. 3, a time T1 is a time from the generation of the Q switch signal (B) to the stop thereof, which is referred to as a time T2.
Is a time from the stop of the Q switch signal (B) to the generation of the next Q switch signal (B). From these, Q
The cycle T3 of the switch frequency signal (A) is T3 = T1 +
It becomes T2.

In the decoder section 15-2-1 of the laser control means 15-2, the Q-switch frequency data for laser emission is set by the computer 16 as I / O data for a control signal. The set control signal I / O data is decoded by the decoder section 15-2-1, and the programmable frequency dividing circuit 15-2-2 and the programmable timer circuit (for Q switch control) 15-2 are used.
-6.

In the programmable frequency dividing circuit 15-2-2, the input control signal I / O data is frequency-divided.
A Q-switch frequency signal that is a square wave with a duty ratio of 50% is generated as a frequency-divided signal. The Q-switch frequency signal generated by the programmable frequency divider 15-2-2 is applied to the reference clock oscillator 15-2-3 and the logic circuit 15.
-2-4.

By the way, the resistance value of the object to be processed is measured by the measurement comparing and judging means 17, and the measured value and the target value are compared and judged. Then, the result of this determination is sent to the logic circuit 15-2-4. In the logic circuit 15-2-4, the input determination result is confirmed. As a result of this determination, when the measured value is less than the target value, the Q-switch frequency signal is output as an AND output signal to the logic circuit 15-2.
-4 to a programmable timer circuit (for optical switch control) 15-2-5 and a programmable timer circuit (for Q switch control) 15-2-6.

In the programmable timer circuit (for Q switch control) 15-2-6, a Q switch signal (FIG. 3B) is generated based on the input Q switch frequency signal and transmitted to the Q switch driver unit 13. Can be In the Q switch driver section 13, based on the input Q switch signal, the laser oscillator 11 is driven in a laser oscillation state for a time T2. In the driven laser oscillator 11, a giant pulse (FIG. 3D) of the laser beam is generated based on the Q-switch principle.

After the lapse of the time T2, the Q switch driver section 13 performs the following based on the Q switch signal.
During the time T1, the laser oscillation of the laser oscillator 11 is suppressed. As a result, during the time T1, light energy is accumulated in the resonator 11b of the laser oscillator 11, and
The energy density in 1b increases.

Thereafter, during time T2 in the next cycle,
The laser oscillation state is set again, and then the oscillation suppression state is set for a time T1, and such oscillation and oscillation suppression are repeated. Then, in each cycle, at the start of time T2,
When the laser oscillator 11 enters a laser oscillation state, FIG.
As shown in (C), the energy density is increased by suppressing the laser oscillation at the time T1 immediately before that.

For this reason, one giant pulse (FIG. 3D) is emitted from the laser oscillator 11, whereby the energy density sharply decreases. Thereafter, due to continuous pumping, the energy density in the resonator 11b instantaneously rises, and when the laser beam reaches the oscillation threshold, a continuous oscillation state weaker than the giant pulse is obtained.

Incidentally, in the programmable timer circuit (for optical switch control) 15-2-5, an optical switch signal (FIG. 3E) is generated based on the input Q switch frequency signal, and the optical switch driver section is generated. It is sent to 14. The time during which this optical switch signal is sent (the transit time of the laser light in the optical switch unit 12) is determined based on the set time from the decoder section 15-2-1.

The transit time of the laser light in the optical switch unit 12 is based on the measurement result in the measurement comparison / determination section 15-1 and the pumping time set in the decoder section 15-2-1. (For switch control) 15-2-5.

In the optical switch driver section 14, the decoder section 15-2 is operated based on the input optical switch signal.
-1 during the time T4 set by -1.
2 is released. By releasing the optical switch unit 12, only the giant pulse of the laser light emitted from the laser oscillator 11 can pass.

After the elapse of the time T4, the optical switch driver section 14 sets the time (T) based on the optical switch signal.
During 3-T4), the optical switch unit 12 is closed. By closing the optical switch unit 12, the laser light emitted from the laser oscillator 11 is cut off. Therefore, the laser light that has passed through the optical switch unit 12
As shown in FIG. 3 (F), each cycle of the Q switch frequency has only one giant pulse.

In order to keep the pulse width constant even when the Q switch frequency is changed, it is necessary to fix the pumping time T1. This can be realized by setting T2 (= T3-T1) in a programmable manner. In addition, by outputting a variable optical switch signal T4 in which the energy generated by continuous oscillation for a time T2, which has been considered unnecessary for processing, to the Q switch frequency signal to the optical switch driver, a simple shutter operation is performed. In addition, it is possible to control the residual heat (or preheating for the next pulse processing) on the resistor and to improve the trimming shape.

In the above-described embodiment, the case where the chip resistor is machined as the object to be machined by using the laser irradiation apparatus for the laser trimming apparatus and the laser pulse width control method according to the present invention has been described. It is apparent that the present invention can be applied to processing other processing objects.

[0069]

As described above, according to the present invention, since the passage time of the laser light in the optical switch unit is controlled, only the giant pulse of the laser light emitted from the laser oscillator can be passed. Not only do
The processing object can be given residual heat to eliminate processing defects. In addition, by securing the passage time of the laser light enough,
Microcracks generated by a rapid solidification action immediately after laser trimming can be reduced, and further, preheating for the next pulse processing can be controlled.

Further, by providing the laser control means with a storage unit for storing a preset time as a passage time of the laser light in the optical switch unit,
Based on the set time stored in the storage unit, it is possible to control the opening / closing time in the optical switch unit. For this reason, the user of the laser irradiation apparatus can preset the passage time of the laser light in the optical switch unit as a time suitable for giving residual heat to the processing target.

By applying preheating to the workpiece during the set passage time, microcracks can be reduced, and high-speed trimming from low resistance to high resistance can be performed. Further, since the removal of the resistive element in the next pulse can be performed efficiently, the processing edge is affected, and the trimming accuracy can be finally improved.

Further, by providing a computer for setting the passage time of the laser light in the optical switch unit from outside the laser control means, the computer can automatically calculate the set time based on data input by the user or from another device. Can be the transit time of the laser light in the optical switch unit. Therefore, if the set time automatically calculated by the computer and stored in the storage unit of the laser control means is sufficiently long, sufficient heat can be applied to the workpiece, so that micro cracks can be reduced and trimming can be performed. Accuracy can be improved.

Further, the laser irradiation apparatus includes a measurement comparison / judgment means for measuring a predetermined item on the object to be processed by the laser trimming means having the laser irradiation apparatus and comparing the measured value with a target value. With this arrangement, the optical switch control programmable timer circuit of the laser control means can determine the passage time of the laser light based on the result of the measurement performed by the measurement comparison and determination means.

For this reason, it is possible to perform preheating for the next pulse processing based on the passage time of the laser beam calculated based on the measurement result from the measurement comparing and judging means.
Therefore, sufficient processing heat is given to the processing object, so that processing defects can be eliminated, processing speed can be increased, and processing accuracy can be improved.

Further, by providing the laser control means with a decoder section for setting the pumping time of the laser oscillator, the optical switch control programmable timer circuit allows the laser light to pass through based on the pumping time set by the decoder section. Time can be determined. For this reason, while ensuring emission of only the giant pulse,
It is possible to sufficiently impart residual heat to the object to be processed, thereby reducing processing defects.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating a configuration of a laser irradiation apparatus according to the present invention.

FIG. 2 is a block diagram showing an internal configuration of a laser control unit in the laser irradiation device of the present invention.

FIG. 3 is a timing chart showing changes in signals generated and stopped in each component of the laser irradiation apparatus of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 Laser irradiation apparatus 11 Laser oscillator 11a Q switch unit 11b Resonator 12 Optical switch unit 13 Q switch driver part 14 Optical switch driver part 15 Measurement unit 15-1 Measurement comparison judgment means 15-2 Laser control means 15-2-1 Decoder Unit 15-2-2 Programmable frequency divider 15-2-3 Reference clock oscillator 15-2-4 Logic circuit 15-2-5 Programmable timer circuit (for optical switch control) 15-2-6 Programmable timer circuit (Q switch) 16 computers

Claims (6)

[Claims] A laser oscillator that emits laser light; an optical switch unit that is disposed in an optical path of the laser light emitted from the laser oscillator and that passes and blocks the laser light; What is claimed is: 1. A laser irradiation apparatus comprising: an optical switch driver unit for driving a unit; and a laser control unit for controlling driving of the optical switch driver unit. A laser irradiating apparatus, wherein the optical switch driver unit drives the optical switch unit to pass the laser light based on the transit time determined by the laser control means. 2. A storage unit for storing a preset time set as a passage time of the laser light in the optical switch unit, wherein the laser control unit stores the set time extracted from the storage unit as the laser light. An optical switch control programmable timer circuit that is determined as the transit time of the optical switch control unit, wherein the optical switch driver unit drives the optical switch unit based on the transit time determined by the optical switch control programmable timer circuit. The laser irradiation apparatus according to claim 1, wherein the laser beam is passed through the laser irradiation apparatus. 3. The laser irradiation apparatus according to claim 2, further comprising a computer for inputting the set time and transmitting the input set time to the storage unit of the laser control means for storing the set time. 4. A measurement comparison / judgment unit that performs measurement of a predetermined item on an object to be processed by a laser trimming unit having the laser irradiation device, and compares the measured value with a target value. The programmable timer circuit for controlling the optical switch of the laser control means, wherein the passage time of the laser light is determined based on a result of the measurement performed by the measurement comparison determination means. 3
The laser irradiation device according to claim 1. 5. The laser control means has a decoder unit for setting a pumping time of the laser oscillator, and the optical switch control programmable timer circuit is configured based on the pumping time set by the decoder unit. Determining the transit time of the laser light, wherein the optical switch driver unit drives the optical switch unit to pass the laser light based on the transit time determined by the optical switch control programmable timer circuit. The laser irradiation device according to claim 2, 3 or 4, wherein: 6. A laser beam passage control method for arranging an optical switch unit in an optical path of a laser beam emitted from a laser oscillator, and controlling and controlling the disposed optical switch unit to pass and block the laser beam. A laser characterized in that a transit time of the laser light in the optical switch unit is determined, and based on the determined transit time, the optical switch unit is drive-controlled to pass or block the laser light. A method for controlling the passage of laser light in an irradiation device.