JP2001196023A - Photomultiplier - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a photomultiplier having improved anode assembling while an insulation substrate is prevented from static change, and mutually disposing anode plates with high density. SOLUTION: In this photomultiplier, each anode plate 21 can easily be disposed on an insulation substrate 20, when disposing the plural anode plates 21 on the substrate 20, simply by inserting leads 21b of a plurality of anode plates 21 into the holes 23 provided on the substrate. And adjacent lead-insertion holes 23 are not arranged in a line because they are staggered in the direction X of putting. Accordingly, this prevents crack of the substrate 20 along lead inserting holes 23 while allowing high density layout of the anode plates 21 in the direction X. Electrons can be trapped by an electron absorbing plate 22 before trapped by the substrate 20, and static charge of the substrate 20 is appropriately prevented because a major part 21a of the anode plates 21 can be enclosed with the electron absorbing plate 22.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a photomultiplier tube, and more particularly to a photomultiplier tube having a multipolar anode in which a plurality of anode plates are arranged in parallel.

[0002]

2. Description of the Related Art Conventionally, there is Japanese Patent Publication No. 8-20307 as a technique in such a field. The photomultiplier described in this publication has an anode having a structure in which a plurality of anode plates are arranged on a highly insulating substrate. Then, on the substrate, divided electrodes are provided so as to surround each anode plate. Therefore, electrons arriving between the anode plates are captured by the split electrodes, and the electric charges are not accumulated on the substrate. Further, crosstalk between the anode plates can be appropriately prevented, and a highly reliable detection signal can be obtained from each anode plate.

[0003]

However, the above-mentioned conventional photomultiplier tube has the following problems. That is, when arranging a plurality of anode plates on the substrate, each anode plate is fixed so as to be stuck on the substrate, thereby deteriorating the workability of assembling the anode and, at the same time, forming a small gap between the anode plates. However, there is a problem in that the arrangement work becomes difficult when trying to make them close to each other. Note that Japanese Patent Application Laid-Open No. 8-641
No. 68 discloses an example in which each anode plate is fixed on a ceramic substrate by eyelets.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and in particular, improves the workability of assembling an anode while preventing electrification of an insulating substrate by electrons. It is an object of the present invention to provide a photomultiplier tube which can be arranged in a plurality.

[0005]

According to a first aspect of the present invention, there is provided a photomultiplier tube having a photocathode for emitting electrons by light incident on a light-receiving surface plate, and multiplying electrons emitted from the photocathode. In a photomultiplier tube having an electron multiplier and having an anode for transmitting an output signal based on the electrons multiplied by the electron multiplier, the anode is arranged in parallel with an electrically insulating substrate and an upper surface of the substrate. A plurality of anode plates to be provided, and an electron absorbing plate disposed on the upper surface of the substrate so as to surround the anode plate, and a pair of leads provided at both ends of the main body of the anode plate are connected to the substrate. Inserted in a pair of provided lead insertion holes, in the juxtaposition direction of the anode plate, adjacent lead insertion holes are alternately arranged on the substrate, and the main body of the anode plate is alternately arranged on the substrate, Each lead The main body portion of and inclusive holes and anode plates, characterized in that is positioned in the openings provided in the electronic absorption plate.

In this photomultiplier tube, when arranging a plurality of anode plates on an electrically insulating substrate,
Each anode plate is provided with leads on both sides of the body that accepts electrons.Each anode plate can be easily placed on the substrate simply by inserting each lead into the lead insertion hole provided on the substrate. Can be arranged. Furthermore, when achieving high-density arrangement of the anode plates, it is necessary to bring the anode plates close to each other. In this case, the adjacent lead insertion holes are alternately arranged in the direction in which the anode plates are arranged, so that the adjacent lead insertion holes are prevented from being aligned. As a result, cracking of the substrate along the direction in which the lead insertion holes are arranged is prevented while enabling high-density arrangement of the anode plates. Further, since the lead insertion hole and the main body of the anode plate are located in the opening provided in the electron absorbing plate, the main body of the anode plate can be surrounded by the electron absorbing plate. Before the captured electrons are captured by the substrate, the electrons can be appropriately captured by the electron absorbing plate, the charging of the substrate is reliably prevented, and a highly reliable detection signal can be obtained from each anode plate.

[0007] In the photomultiplier tube according to the second aspect, it is preferable that the electron absorbing plate has a plurality of openings, and one body of each anode plate is arranged in each opening. In this case, as a result of one-to-one correspondence between the anode plate and the opening of the electron absorption plate, a part of the electron absorption plate can be extended between the adjacent anode plates. Therefore, it is possible to partition the anode plates with the electron absorption plate, appropriately prevent crosstalk between the anode plates, and obtain a highly reliable detection signal for each anode plate.

[0008] In the photomultiplier tube according to the third aspect, it is preferable that a plurality of main bodies of the anode plate are arranged in the opening of the electron absorption plate. This makes it possible to arrange the anode plates side by side in one opening.

In the photomultiplier tube according to claim 4, an anode plate group is constituted by a plurality of anode plates arranged in parallel, and the electron absorption plate has a plurality of openings, and each anode plate group is provided in each opening. It is preferable to arrange them one by one. In the case of adopting such a configuration, each anode plate group and the opening can be made to correspond one-to-one, and a part of the electron absorption plate can be extended between the anode plate groups. As a result, coherent measurement for each anode plate group is enabled. For example, when a photomultiplier tube having two anode plate groups is used by incorporating it into a spectrometer, one group is used for detecting sample light and the other group is used for detecting reference light at the anode. And a plurality of types of light can be measured by one photomultiplier tube.

[0010] In the photomultiplier tube according to the fifth aspect, it is preferable that a contour line forming the opening portion be close to both ends of the main body of the anode plate. When such a configuration is adopted, even in the vicinity of both ends of the main body of the anode plate, electrons can be captured by the electron absorbing plate, and the substrate is prevented from being charged as much as possible.

In the photomultiplier according to claim 6, it is preferable that the substrate is provided with a gas passage hole extending between the pair of lead insertion holes and extending in the direction in which the anode plates are arranged. When such a configuration is adopted, the anode plates can be arranged on the substrate so as to bridge the gas passage holes. Therefore, the gap between the gas passage holes and the anode plate allows the alkali metal for forming the photoelectric surface to be formed. The vapor can reliably reach the photocathode without being disturbed by the anode plate.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a photomultiplier according to the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a sectional view showing a photomultiplier according to the present invention. The photomultiplier tube 1 shown in FIG. 1 has a metal side tube 2 having a substantially rectangular cylindrical shape, and a light receiving surface plate 3 made of glass is fixed to an open end on one side of the side tube 2. A photocathode 3a for converting light into electrons is formed on the inner surface of the photodetector 2. The photocathode 3a is formed by reacting alkali metal vapor with antimony previously deposited on the light receiving face plate 2. A flange portion 2a is formed at the other open end of the side tube 2, and a peripheral portion of a metal stem 4 is fixed to the flange portion 2a by resistance welding or the like. Thus, the sealed container 5 is constituted by the side tube 2, the light receiving face plate 3, and the stem 4.

An exhaust pipe 6 made of metal is fixed to the center of the stem 4. After the assembling work of the photomultiplier tube 1 is completed, the exhaust pipe 6 evacuates the inside of the sealed container 5 by a vacuum pump (not shown). ) Is used to evacuate to a vacuum state, and is also used as a tube for introducing alkali metal vapor into the sealed container 5 when forming the photocathode 3a.

In the sealed container 5, an electron multiplier 7 of a block type and a laminated type is fixed, and the electron multiplier 7 is an electronic multiplier in which ten (10) dynodes 8 are laminated. The electron multiplier 7 includes a multiplier 4 and a stem 4.
Container 5 by a predetermined stem pin 10 provided in
And each stem pin 10 is electrically connected to each dynode 8. At the lowermost part of the electron multiplier 7, a multipolar flat anode 12 is arranged. The anode 12 has a structure in which a plurality of (for example, 16) anode plates 21 are arranged on a ceramic substrate 20.

Further, the electron multiplier 7 has a flat focusing electrode plate 13 disposed between the photocathode 3a and the electron multiplier 9, and this focusing electrode plate 13 has a slit-like focusing plate. Opening 1
A plurality of openings 3a are formed, and the openings 13a are linearly arranged in one direction. Similarly, in each dynode 8 of the electron multiplier 9, a plurality of slit-like electron multiplier holes 8a of the same number as the openings 13a are formed, and the electron multiplier holes 8a are linearly arranged in one direction. I have. Each electron multiplying path L formed by arranging the electron multiplying holes 8a of each dynode 8 in a stepwise direction.
A plurality of linear channels A are formed by associating the apertures 13a of the focusing electrode plate 13 with the apertures 13a one-to-one.

Each anode plate 21 of the anode 12 is
Are arranged on the substrate 20 so as to correspond to the respective channels A on a one-to-one basis. Further, each anode plate 21 is
By connecting to predetermined stem pins 10, individual outputs are extracted to the outside via the anode stem pins 10.

As described above, the electron multiplier 7 has a plurality of (for example, 16) channels A linearly arranged. A predetermined voltage is supplied to the electron multiplier 9 and the anode 12 by a predetermined stem pin 10 connected to a bleeder circuit (not shown), so that the photoelectric surface 3a and the focusing electrode plate 13 are set to the same potential, and Each dynode 8 and anode 12 of the multiplication unit 9 are set to a higher potential from the top in this order. Therefore, the light incident on the light receiving surface plate 2 is converted into electrons at the photoelectric surface 3a, and the electrons enter the predetermined channel A. Therefore, in the channel A on which the electrons are incident, the electrons are multiplied by the dynodes 8 in each stage while passing through the electron multiplying path L of the dynodes 8, and are emitted from the electron multiplier 9. Then, the multiply-multiplied electrons enter the predetermined anode plate 21,
An individual predetermined output is obtained for each anode plate 21 of a predetermined channel A.

Here, the configuration of the anode 12 will be described in detail. As shown in FIG. 1 and FIG.
Is composed of an electrically insulating substrate 20 made of ceramics and having a thickness of about 0.8 mm, a plurality of anode plates 21 made of stainless steel (SUS) arranged side by side on the upper surface 20a of the substrate 20, and all the anode plates 21. And a stainless steel (SUS) electron absorbing plate 22 disposed so as to surround the upper surface 20a of the substrate 20.

As shown in FIG. 3, the anode plate 21 has an elongated main body 21a having a thickness of about 0.25 mm, and the width of the main body 21a is to receive the multiplied electrons. The width corresponds to the width of the electron multiplying path L described above. Further, pin-shaped leads 2 are provided at both ends of the main body 21a.
1b are integrally formed, and each lead 21b is
a protrudes in a direction orthogonal to the longitudinal direction of a.

As shown in FIG. 4, a substantially square upper surface 20a is formed.
An anode plate 21 is provided on a ceramic substrate 20 having
Lead insertion hole 2 for inserting each lead 21b
3 are formed. Then, the lead 21b inserted into the lead insertion hole 23 penetrates the substrate 20, and the tip of the lead 21b is connected to a desired stem pin 10 via a connection (not shown). In the center of the substrate 20, an elongated gas passage hole 24 for passing an alkali metal vapor for forming a photocathode is formed. Then, the anode plate 2 is extended over the gas passage hole 24.
Since one main body 21a is arranged, the lead insertion hole 2 corresponding to each lead 21b of one anode plate 21 is formed.
3 are provided on both sides of the gas passage hole 24.

In the direction X in which the anode plates 21 are arranged side by side, the adjacent lead insertion holes 23 are alternately arranged on the substrate 20 at a predetermined interval. That is, the adjacent lead insertion holes 23 are arranged in a zigzag manner in the juxtaposition direction X. Such an arrangement pattern is common on both sides of the gas passage hole 24. Since the anode plates 21 having the same shape are arranged on the substrate 20, the interval between the pair of lead insertion holes 23 is The distance between the lead 21b and the pair of leads 21b is the same.

Accordingly, each lead 21b of the anode plate 21
The anode plates 21 can be simply arranged on the substrate 20 simply by inserting the anode plates 21 into the lead insertion holes 23. Furthermore, when achieving high-density arrangement of the anode plates 21, it is necessary to bring the anode plates 21 closer to each other. In this case, by arranging the adjacent lead insertion holes 23 alternately in the juxtaposition direction X of the anode plates 21, it is possible to appropriately prevent the adjacent lead insertion holes 23 from being arranged in a line. Therefore, in the juxtaposition direction X, cracking of the substrate 20 along the lead insertion hole 23 is prevented while enabling high-density arrangement of the anode plates 21.

As shown in FIGS. 2 and 5, the electron absorbing plate 2
The anode plates 2 are set at substantially the same potential as the anode plate 21 and are alternately arranged on the substrate 20.
An opening 25 for exposing the main body 21a is formed. Further, in order to achieve the exposure of the main body 21 a of the anode plate 21, it is necessary to locate each lead insertion hole 23 in the opening 25. Furthermore, one anode plate 21 is arranged in one opening 25 by making the number of openings 25 correspond to the number of anode plates 21.

As described above, the anode plate 21 and the opening 25 of the electron absorbing plate 22 are made to correspond one-to-one, so that the partitioning part 26 forming a part of the electron absorbing plate 22 is also provided between the adjacent anode plates 21. It will extend. Therefore, it is possible to partition between the anode plates 21 with the electron absorbing plate 22,
Crosstalk between the anode plates 21 can be appropriately prevented, and a highly reliable detection signal can be obtained for each anode plate 21.

The electron absorbing plate 22 is integrally formed with four ear pieces 27 for attachment to the substrate 20, and each of the ear pieces 27 is provided with a notch 27a for bending. Therefore, when fixing the electron absorbing plate 22 to the substrate 20, it is possible to bend the ear piece 27 so as to crawl on the side surface of the substrate 20. In this case, four notch grooves 28 are formed in advance on the substrate 20 shown in FIG. 4, and each ear piece 27 is fitted into each of the notch grooves 28, so that the electronic absorption plate with respect to the substrate 20 is formed. Twenty-two alignments are achieved.

As shown in FIG. 6, a contour line 25a for forming the opening 25 is formed by the anode plate 21 in order to sufficiently achieve the electron absorbing function of the electron absorbing plate 22.
Of the main body 21a. Further, the contour line 25a is formed at both ends 2 of the main body 21a of the anode plate 21.
1c. This enables the electron absorption plate 22 to capture electrons even in the vicinity of both ends 21c of the main body 21a, and to try to prevent the substrate 20 from being charged as much as possible. The contour line 25a may have a round shape that matches the round shape of the end 21c of the main body 21a.

Next, another anode 30 applied to the photomultiplier according to the present invention will be described. Note that the same or equivalent components as those of the anode 12 described above are denoted by the same reference numerals, and description thereof will be omitted.

As shown in FIG. 7 and FIG.
At the center of the electron absorbing plate 31, one opening 32
The main body portions 33a of all the anode plates 33 are exposed to the outside by the openings 32. Therefore,
In the opening 32, 1 is arranged according to the number of channels.
The body portions 33a of the six anode plates 33 are arranged.

In this case, the outline 32a of the opening 32 is
As a result of extending so as to approach the end 33c of the main body 33a, each side line 32aA, 32aB of the contour line 32a is formed as one zigzag line. Since this type of electron absorbing plate 31 does not create a partition between the anode plates 33, it is easily formed by punching a flat plate.

The lead 3 of the anode plate 33 described above is used.
As shown in FIG. 9, 3b is formed by bending both ends of one elongated plate at right angles. Such a lead shape not only facilitates the formation of the anode plate 33,
It also enables mass production.

Next, still another anode 39 applied to the photomultiplier according to the present invention will be described.

As shown in FIG. 10, the anode 39 is composed of an electrically insulating substrate 40 made of ceramics and having a thickness of about 0.8 mm, and two rows of anode plate groups S1, S2 arranged on the upper surface 40a of the substrate 40. S2 and an electron absorbing plate 42 made of stainless steel (SUS) disposed on the upper surface 40a of the substrate 40 so as to surround the anode plate groups S1 and S2.

As shown in FIGS. 10 and 11, the anode plate group S1 includes a plurality of (for example, 16) anode plates 41.
Are arranged side by side on the substrate 40. Each anode plate 41 is made of stainless steel (SUS) and has a thickness of 0.1 mm.
It has a main body 41a formed to be elongated about 25 mm,
The width of the main body 41a corresponds to the width of the electron multiplying path L described above in order to receive the multiplied electrons. Further, the leads 41b of the anode plate 41 are formed by bending both ends of a single elongated thin plate at right angles.

Similarly, as shown in FIGS. 10 and 12,
The anode plate group S2 is configured by arranging a plurality of (for example, 16) anode plates 51 in parallel on the substrate 40.
Each anode plate 51 is composed of a main body 51a and a lead 51b formed by bending both ends of one elongated thin plate at right angles. In this case, the anode plate 51
The width is the same as the anode plate 41, but the length is shorter. On the substrate 40, the anode plate 41 and the anode plate 51 are arranged so as to correspond one-to-one.

As shown in FIG. 10 and FIG.
In forming the anode plate group S1 above, a lead insertion hole 43 for inserting each lead 41b of the anode plate 41 is formed in the ceramic substrate 40 having a substantially square upper surface 40a. Then, the lead 41b inserted into the lead insertion hole 43 penetrates the substrate 40, and the tip of the lead 41b is connected to a predetermined stem pin 10 (see FIG. 1) via a connection (not shown). Further, the substrate 40 is formed with an elongated gas passage hole 44 for passing an alkali metal vapor for forming a photocathode. Since the main body 41a of the anode plate 41 is disposed so as to bridge the gas passage hole 44, the lead insertion hole 43 corresponding to each lead 41b of one anode plate 41 sandwiches the gas passage hole 44. It will be provided on both sides.

Then, in the direction X in which the anode plates 41 are arranged, the adjacent lead insertion holes 43 are alternately arranged on the substrate 40 at a predetermined interval. That is, the adjacent lead insertion holes 43 are arranged in a zigzag shape in the juxtaposition direction X. Such an arrangement pattern is common on both sides of the gas passage hole 44, and since the anode plates 41 of the same shape are arranged on the substrate 40, the interval between the pair of lead insertion holes 43 is The distance between the pair of leads 41b provided on the base 41 is the same as the distance between the leads 41b.

Similarly, in forming the anode plate group S 2 on the substrate 40, the substrate 40 has a gas passage hole 54 formed in parallel with the gas passage hole 44. Each lead 51 of the anode plate 51 is provided on both sides of the gas passage hole 54.
A lead insertion hole 53 for inserting b is formed. Then, in the juxtaposition direction X of the anode plates 51,
The adjacent lead insertion holes 53 are alternately arranged on the substrate 40 at a predetermined interval. That is, the adjacent lead insertion holes 53 are arranged in a zigzag manner in the juxtaposition direction X. Such an arrangement pattern is common on both sides of the gas passage hole 54, and since the anode plates 51 of the same shape are arranged on the substrate 40, the interval between the pair of lead insertion holes 53 is The distance between the pair of leads 51b provided on the first member 51 is the same as that between the leads 51b.

As described above, the leads 41b and 51b of the anode plates 41 and 51 are inserted into the predetermined lead insertion holes 43 and 5 respectively.
3, the anode plate group S on the substrate 40
1, S2 can be created. In order to achieve a high-density arrangement of the anode plates 41 and 51, it is necessary to bring the anode plates 41 and the anode plates 51 closer to each other. In this case, by arranging the adjacent lead insertion holes 43 and 53 alternately in the juxtaposition direction X of the anode plates 41 and 51, the adjacent lead insertion holes 43 and 53 are appropriately prevented from being aligned in a line. You. Accordingly, cracking of the substrate 40 along the lead insertion holes 43, 53 is prevented while enabling high-density arrangement of the anode plates 41, 51.

As shown in FIGS. 10 and 14, the electron absorbing plate 42 is used to expose all the main bodies 41a of the anode plate group S1 composed of the anode plates 41 arranged alternately on the substrate 40. Opening 45 is formed. Similarly, an opening 55 for exposing all the main bodies 51a of the anode plate group S2 constituted by the anode plates 51 arranged alternately on the substrate 40 is formed.

In this case, the outline 45a of the opening 45 is
Each side line 45a of the contour 45a extends so as to approach the end 41c (see FIG. 11) of the main body 41a.
A and 45aB are formed as one zigzag line. Similarly, since the outline 55a of the opening 55 extends so as to be close to the end 51c (see FIG. 12) of the main body 51a, each side line 55aA of the outline 55a,
55aB will be formed as one zigzag line.

As described above, the two anode plate groups S1, S
As a result, two openings 45 and 55 are provided in the electron absorption plate 42 so as to correspond to the adjacent anode plate group S.
Between 1 and S2, a partition portion 46 that forms a part of the electron absorption plate 42 extends. Therefore, it is possible to partition the anode plate groups S1 and S2 with the electron absorbing plate 42, and it is possible to appropriately prevent crosstalk between the anode plate groups S1 and S2.

Incidentally, four ear pieces 47 are integrally formed on the electron absorbing plate 42 for attachment to the substrate 40, and each ear piece 47 is provided with a notch 47a for bending. Therefore, when fixing the electron absorbing plate 42 to the substrate 40, it is possible to bend and form the lugs 47 so as to crawl on the side surfaces of the substrate 40. . in this case,
The substrate 40 shown in FIG. 13 is formed with four notches 48 in advance, and by fitting each ear piece 47 into each notch 48, the position of the electron absorbing plate 42 with respect to the substrate 40 is reduced. Matching is achieved.

The anode plate 39 as described above enables a coherent measurement for each of the anode plate groups S1 and S2. For example, when a photomultiplier tube having two anode plate groups S1 and S2 is incorporated in a spectrometer and used,
Since the anode plate 41 in the anode plate group S1 and the anode plate 51 in the anode plate group S2 are in one-to-one correspondence, one group S1 is used for measurement of sample light,
The other group S2 can be used for measuring the reference light. As described above, with the anode plate 39 having the above-described configuration, a plurality of types of light can be measured by one photomultiplier tube.

[0045]

The photomultiplier according to the present invention has the following effects because it is constructed as described above. That is, it has a photocathode that emits electrons by light incident on the light receiving surface plate, and has an electron multiplier that multiplies electrons emitted from the photocathode, based on the electrons multiplied by the electron multiplier. In a photomultiplier tube having an anode for transmitting an output signal, the anode is disposed on the upper surface of the substrate so as to surround the anode plate, an anode plate arranged in parallel on the upper surface of the substrate, and a plurality of anode plates arranged in parallel on the upper surface of the substrate. A pair of leads provided at both ends of the main body of the anode plate are inserted into a pair of lead insertion holes provided in the substrate, and in a direction in which the anode plates are juxtaposed, Adjacent lead insertion holes are staggered on the substrate, and the body of the anode plate is staggered on the substrate, and each lead insertion hole and the body of the anode plate are provided on the electron absorbing plate. By was positioned in the opening, while preventing the charging of the electrons by the insulating substrate, to improve the anode of the assembly workability, moreover, it is possible to densely arrange the anode plate together.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an embodiment of a photomultiplier according to the present invention.

FIG. 2 is a plan view showing an anode applied to the photomultiplier tube of FIG.

FIG. 3 is a perspective view showing an anode plate applied to the anode of FIG. 2;

FIG. 4 is a perspective view showing a substrate applied to the anode of FIG. 2;

FIG. 5 is a perspective view showing an electron absorbing plate applied to the anode of FIG.

FIG. 6 is an enlarged view of a main part of the anode of FIG. 2;

FIG. 7 is a plan view showing a second modification of the anode.

FIG. 8 is a plan view showing an electron absorbing plate applied to the anode of FIG.

FIG. 9 is a perspective view showing an anode plate applied to the anode of FIG. 7;

FIG. 10 is a plan view showing a third modification of the anode.

FIG. 11 is a perspective view showing a first anode plate applied to the anode of FIG. 10;

FIG. 12 is a perspective view showing a second anode plate applied to the anode of FIG. 10;

13 is a plan view showing a substrate applied to the anode of FIG.

FIG. 14 is a plan view showing an electron absorbing plate applied to the anode of FIG.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Photomultiplier tube 3 ... Light receiving surface plate 3a ... Photocathode 9
Electron multiplier, 12, 30, 39 ... Anode, 20, 40
... Substrate, 20a, 40a ... Top surface of substrate, 21, 33, 4
1, 51 ... anode plate, 21a, 33a, 41a, 51
a ... main body, 21b, 33b, 41b, 51b ... lead, 21c, 33c, 41c, 51c ... end of main body,
22, 31, 42: Electron absorption plate, 23, 43, 53: Lead insertion hole, 24, 44, 54: Gas passage hole, 2
5, 32, 45, 55 ... opening, S1, S2 ... anode plate group, X ... parallel direction.

Claims (6)

[Claims] 1. A photocathode for emitting electrons by light incident on a light-receiving surface plate, and an electron multiplying unit for multiplying electrons emitted from the photocathode, wherein the electron multiplying unit multiplies the electrons. A photomultiplier tube having an anode for sending an output signal based on the electrons, wherein the anode surrounds an electrically insulating substrate, a plurality of anode plates juxtaposed on an upper surface of the substrate, and the anode plate An electron absorbing plate disposed on the upper surface of the substrate as described above, and a pair of leads provided at both ends of the main body of the anode plate are provided in a pair of lead insertion holes provided in the substrate. In the direction in which the anode plates are juxtaposed, the adjacent lead insertion holes are alternately arranged on the substrate, and the main bodies of the anode plates are alternately arranged on the substrate, Serial said body portion, photomultiplier tube, characterized in that is positioned in an opening provided in the electron absorption plate of each lead insertion hole and the anode plate. 2. The photoelectron multiplying device according to claim 1, wherein said electron absorbing plate has a plurality of said openings, and said body portions of said anode plates are arranged one by one in each said opening. Double tube. 3. The photomultiplier tube according to claim 1, wherein a plurality of said main bodies of said anode plate are arranged in said opening of said electron absorption plate. 4. An anode plate group is constituted by a plurality of anode plates arranged in parallel, and said electron absorbing plate has a plurality of said openings, and each said anode plate group is disposed in each of said openings. The photomultiplier tube according to claim 1, wherein: 5. The photomultiplier according to claim 1, wherein a contour line forming the opening is close to the both ends of the main body of the anode plate. tube. 6. The substrate according to claim 1, wherein a gas passage hole is provided between the pair of lead insertion holes and extends in a direction in which the anode plates are arranged.
The photomultiplier tube according to any one of the above.