EA201100820A1 - METHOD OF FORMING MASSIVES OF CARBON NANOTUBES - Google Patents
METHOD OF FORMING MASSIVES OF CARBON NANOTUBESInfo
- Publication number
- EA201100820A1 EA201100820A1 EA201100820A EA201100820A EA201100820A1 EA 201100820 A1 EA201100820 A1 EA 201100820A1 EA 201100820 A EA201100820 A EA 201100820A EA 201100820 A EA201100820 A EA 201100820A EA 201100820 A1 EA201100820 A1 EA 201100820A1
- Authority
- EA
- Eurasian Patent Office
- Prior art keywords
- organometallic compound
- cnt
- carbon nanotubes
- reactor
- given
- Prior art date
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title abstract 7
- 239000002041 carbon nanotube Substances 0.000 title abstract 7
- 229910021393 carbon nanotube Inorganic materials 0.000 title abstract 7
- 238000000034 method Methods 0.000 title abstract 3
- 150000002902 organometallic compounds Chemical class 0.000 abstract 4
- 238000003491 array Methods 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 239000000243 solution Substances 0.000 abstract 2
- 239000012190 activator Substances 0.000 abstract 1
- 239000012159 carrier gas Substances 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 abstract 1
- 230000004907 flux Effects 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 238000001459 lithography Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000005507 spraying Methods 0.000 abstract 1
- 230000002194 synthesizing effect Effects 0.000 abstract 1
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
Изобретение относится к области технологии изготовления углеродных нанотрубок (УНТ). Способ формирования массивов углеродных нанотрубок включает введение подложки в реактор, подачу газа-носителя, введение в нагретый реактор раствора металлорганического соединения путем инжекции, распыления или атомизации, при этом предварительно на поверхности подложки формируют буферный слой, над ним формируют слой, содержащий по меньшей мере один активатор распада металлорганического соединения, затем литографией формируют топологический рисунок, а при введении в нагретый объем раствора металлорганического соединения задают его расход, обеспечивающий в рабочей зоне реактора плотность потока атомов металла, содержащегося в металлорганическом соединении, не более 3,1×10моль/(м∙с). Технический результат заключается в расширении функциональных возможностей способа синтеза массивов УНТ с обеспечением возможности выращивания на функциональной подложке массивов УНТ заданной топологии с заданным характерным диаметром УНТ с достаточной воспроизводимостью результатов.The invention relates to the field of manufacturing technology of carbon nanotubes (CNT). The method of forming arrays of carbon nanotubes includes introducing a substrate into the reactor, supplying a carrier gas, introducing a solution of an organometallic compound into the heated reactor by injection, spraying or atomizing, with a buffer layer previously formed on the substrate surface, and a layer containing at least one the disintegration activator of the organometallic compound, then a topological drawing is formed by lithography, and when introduced into the heated volume of the solution, the organometallic compound is given the flow rate, which ensures that in the working area of the reactor the flux density of atoms of the metal contained in the organometallic compound is not more than 3.1 × 10 mol / (m ∙ s). The technical result consists in expanding the functional capabilities of the method for synthesizing CNT arrays with the possibility of growing on a functional substrate of CNT arrays of a given topology with a given characteristic diameter of CNT with sufficient reproducibility of the results.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EA201100820A EA201100820A1 (en) | 2011-06-01 | 2011-06-01 | METHOD OF FORMING MASSIVES OF CARBON NANOTUBES |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EA201100820A EA201100820A1 (en) | 2011-06-01 | 2011-06-01 | METHOD OF FORMING MASSIVES OF CARBON NANOTUBES |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EA016557B1 EA016557B1 (en) | 2012-05-30 |
| EA201100820A1 true EA201100820A1 (en) | 2012-05-30 |
Family
ID=46163589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EA201100820A EA201100820A1 (en) | 2011-06-01 | 2011-06-01 | METHOD OF FORMING MASSIVES OF CARBON NANOTUBES |
Country Status (1)
| Country | Link |
|---|---|
| EA (1) | EA201100820A1 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AUPQ064999A0 (en) * | 1999-05-28 | 1999-06-24 | Commonwealth Scientific And Industrial Research Organisation | Patterned carbon nanotube films |
| CN101913591B (en) * | 2004-07-27 | 2012-11-14 | 独立行政法人产业技术综合研究所 | Single-layer carbon nanotube and alinged single-layer carbon nanotube bulk structure, and their production process, production apparatus and use |
| US8207658B2 (en) * | 2006-08-25 | 2012-06-26 | Rensselaer Polytechnic Institute | Carbon nanotube growth on metallic substrate using vapor phase catalyst delivery |
-
2011
- 2011-06-01 EA EA201100820A patent/EA201100820A1/en active IP Right Revival
Also Published As
| Publication number | Publication date |
|---|---|
| EA016557B1 (en) | 2012-05-30 |
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| MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
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| MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
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| MM4A | Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s) |
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| NF4A | Restoration of lapsed right to a eurasian patent |
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