CN207366496U - A kind of multichannel array gas sensor based on ceramic bases - Google Patents

Abstract

The utility model provides a multi-channel array gas sensor based on a ceramic substrate, comprising: a ceramic substrate; a plurality of electrodes arranged on the ceramic substrate in an array; A multi-layer sensitive material layer corresponding to the electrode, each sensitive material layer is formed by applying a sensitive material on a corresponding electrode; a plurality of first electrode pads respectively corresponding to the plurality of electrodes; and a second electrode pad, Each of the first electrode pads is connected to the second electrode pads, and the second electrode pads are used for grounding; wherein, both ends of each of the electrodes are respectively connected to the first electrode pads The pad is connected with the second electrode pad to output an electric signal. According to the solution of the utility model, the single sensor is upgraded to a multi-channel array gas sensor, and the multi-channel array is combined with electrode devices to improve the sensor's high recognition and high-precision detection of the object to be measured.

Description

A multi-channel array gas sensor based on ceramic substrate

technical field

The utility model relates to the technical field of sensors, in particular to a multi-channel array gas sensor based on a ceramic substrate.

Background technique

With the continuous development of gas sensor technology, people have higher and higher requirements for the miniaturization and intelligence of sensors, and while the size of the sensor chip itself is reduced, the requirements for accurate identification of sensors are also getting higher and higher. . At present, the traditional ceramic-based sensors are sensors with a single device and a single sensitive material, which have great disadvantages in the effective identification of gases, and it is difficult to meet the industry requirements for highly accurate detection. For array sensors, it can improve the sensor's recognition of gas by combining multiple materials, so it has attracted more and more attention.

Utility model content

The inventors of the present application have found that, for gas sensors, multi-channel electrode design can work well with multiple materials at the same time, thereby achieving the goal of optimizing the sensor device. In addition, the inventors of the present application have also found that the sensitive performance of the sensitive material in the array sensor has a very close relationship with its basic resistance. For example, for a gas sensor, the gas sensing performance of each gas-sensitive material under different basic resistances will all be different. Therefore, based on this discovery, the applicant designed the following technical solutions.

An object of the present utility model is to provide a multi-channel array gas sensor based on a ceramic substrate, comprising:

Ceramic substrate;

a plurality of electrodes, the plurality of electrodes are arranged in an array on the ceramic substrate;

Each electrode is provided with a sensitive material layer formed by a sensitive material applied uniformly on the electrodes; and

a plurality of first electrode pads respectively corresponding to the plurality of electrodes; and

second electrode pads, each of the first electrode pads is connected to the second electrode pads, and the second electrode pads are used for grounding;

Wherein, two ends of each electrode are respectively connected to the first electrode pad and the second electrode pad to output electrical signals.

Optionally, the electrodes are intersecting L-shaped electrodes, intersecting F-shaped electrodes, intersecting tooth-shaped electrodes, or semicircular electrodes.

Optionally, the electrode has a length ranging from any value between 500 μm to 2 mm, and a width ranging from any value between 500 μm to 2 mm.

Optionally, the plurality of electrodes are all intersecting tooth electrodes, and the line width and line spacing of each intersecting tooth electrode are set to match the optimal basic resistance of the sensitive material applied on the electrode.

Optionally, the line width of the electrode is any value in the range of 100-500 μm, the line spacing is any value in the range of 100-500 μm, and the thickness is any value in the range of 1-50 μm. value.

Optionally, the line width and line distance between the plurality of electrodes are selected to be the same or different.

Optionally, the sensitive materials on the multiple sensitive material layers are selected to be partially the same or completely different.

Optionally, the shape of the first electrode pad is a rectangle or a square;

Wherein, the length of the first electrode pad is any value in the range of 100 μm-1 mm, the width is any value in the range of 100 μm-1 mm, and the thickness is any value in the range of 1-50 μm .

Optionally, the shape of the first electrode pad is circular;

Wherein, the diameter of the first electrode pad is any value in the range of 100 μm-1 mm, and the thickness is any value in the range of 1-50 μm.

Optionally, the number of channels of the array gas sensor on the second electrode pad is any value ranging from 2 to 50.

According to the solution of the utility model, the single sensor is upgraded to a multi-channel array gas sensor, and the multi-channel array is combined with electrode devices to improve the sensor's high recognition and high-precision detection of the object to be measured. In addition, the inventor found through many experiments and in-depth summary analysis that when the electrodes are cross-toothed electrodes, the optimal basic resistance of each sensitive material can be adjusted by controlling the spacing and electrode width of each electrode, so that each A sensitive material can achieve the best sensitive performance. When each sensitive material has an optimal basic resistance, several sensitive materials work together to achieve the optimal sensitivity, identification and selection performance of the object to be measured by the array sensor. Therefore, the multi-channel array electrode can also be used in the field of high-resolution and high-precision smart sensors, and can be well applied to fields where traditional single sensors cannot be applied, such as high-precision environmental monitoring, refrigerator odor recognition Wait.

According to the following detailed description of specific embodiments of the utility model in conjunction with the accompanying drawings, those skilled in the art will be more aware of the above and other objectives, advantages and features of the utility model.

Description of drawings

Hereinafter, some specific embodiments of the present utility model will be described in detail in an exemplary rather than restrictive manner with reference to the accompanying drawings. The same reference numerals in the drawings designate the same or similar parts or parts. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the attached picture:

Fig. 1 is a schematic structural diagram of a multi-channel array gas sensor according to an embodiment of the present invention;

Fig. 2 is a schematic top view of a multi-channel array gas sensor according to an embodiment of the present invention;

Fig. 3 is a schematic top view of a multi-channel array gas sensor according to an embodiment of the present invention when the electrodes are interdigitated electrodes.

Detailed ways

Fig. 1 shows a schematic structure diagram of a multi-channel array gas sensor according to an embodiment of the present invention. Fig. 2 shows a schematic top view of a multi-channel array gas sensor according to an embodiment of the present invention. As shown in Figure 1, the multi-channel array gas sensor may include a ceramic substrate 1, a plurality of electrodes 2, a multi-layer sensitive material layer (not shown in the figure), a plurality of first electrode pads 31 and second electrode pads 32. The plurality of electrodes 2 are arranged on the ceramic substrate 1 in an array. The multiple layers of sensitive material respectively correspond to multiple electrodes 2 , and each layer of sensitive material is formed by applying a sensitive material on a corresponding electrode 2 . In one embodiment, the sensitive material layer is formed by spotting the sensitive material on the electrode 2 with a spotting machine. The plurality of first electrode pads 31 correspond to the plurality of electrodes 2 respectively. The shape and size of the second electrode pad 32 can be designed to be consistent with the shape and size of the first electrode pad 31 . Moreover, multiple channels of the multi-channel array gas sensor may share one second electrode pad 32 . Each first electrode pad 31 is connected to a second electrode pad 32, and the second electrode pad 32 is used for grounding. Wherein, two ends of each electrode 2 are respectively connected to the first electrode pad 31 and the second electrode pad 32 to output electrical signals.

In one embodiment, the electrodes 2 may be intersecting L-shaped electrodes, intersecting F-shaped electrodes or intersecting tooth-shaped electrodes. The material of the electrode 2 is a common metal electrode material, such as gold, platinum, aluminum, copper, tungsten or related alloys. The overall length of the electrode 2 may be 500 μm, 800 μm, 1 mm, 1.5 mm or 2 mm, or any other value within the range of 500 μm-2 mm. The overall width of the electrode 2 may be 500 μm, 800 μm, 1 mm, 1.5 mm or 2 mm, or any other value within the range of 500 μm-2 mm. When the overall length or width of the electrode 2 is not within the range defined by the present invention, for example, if the length and/or width of the electrode 2 are too large, the effective area of the sensitive material on the electrode 2 will be reduced, This will cause unnecessary waste and also increase the volume of the sensor device, making it unsuitable for miniaturized sensors.

Fig. 3 shows a schematic top view of a multi-channel array gas sensor when the electrode 2 is a cross tooth electrode according to an embodiment of the present invention. As shown in FIG. 3 , the plurality of electrodes 2 are interdigitated electrodes. The line width and line spacing of each intersecting toothed electrode are set to be adjusted according to the optimum basic resistance of the sensitive material applied on the electrode 2 . After the inventor realized that the sensitive performance of sensitive materials will be different under different base resistances, the optimal base for each sensitive material can be adjusted by controlling the line width and line distance of each electrode 2 in a plurality of electrodes 2 Resistance, so that the array sensor achieves the best sensitivity performance. It is worth noting that the line width and line spacing of the electrode 2 only exist when the electrode 2 is a cross-toothed electrode or a semicircular electrode. When the electrode 2 is other electrodes, the line width and line spacing of the electrode 2 do not exist. of. As shown in Figure 3, w represents the electrode line width, and s represents the electrode line distance. In this embodiment, in order to obtain the line width and line distance of the electrodes corresponding to each sensitive material, the following methods need to be used:

S100, applying the same sensitive material on multiple electrodes with different line widths and line spacings, so as to obtain the basic resistance of the sensitive materials on different electrodes;

S200. Comparing the basic resistance of sensitive materials on different electrodes to obtain the best basic resistance;

S300. Determine the corresponding electrode according to the optimal basic resistance, so as to obtain the line width and line distance corresponding to the electrode, and use the line width and line distance corresponding to the electrode as the optimum line width and the optimum line distance of the sensitive material.

After detailed design of the electrode structure and a large number of experimental verifications, in one embodiment, the line width of each electrode 2 is 100 μm, 200 μm, 300 μm, 400 μm or 500 μm, or any other value within the range of 100-500 μm. The line spacing of each electrode 2 is 100 μm, 200 μm, 300 μm, 400 μm or 500 μm, or any other value within the range of 100-500 μm. The thickness of each electrode 2 is 1 μm, 10 μm, 20 μm, 30 μm, 40 μm or 50 μm, or any other value in 1-50 μm. When the line width and line distance of the electrode 2 are not within the scope limited by the embodiments of the present invention, for example, when the line width or the line distance are too large, the effective area ratio of the sensitive material on the electrode 2 is reduced, so that Will cause unnecessary waste. If the line width or line spacing is too small, the technical requirements for spotting and instruments are too high, which will cause an excessive increase in cost.

In one embodiment, the multi-channel array gas sensor is a four-channel array sensor, four channels correspond to four electrodes 2, and four different sensitive materials can be dotted on the four electrodes 2 respectively. When the four different sensitive materials When the optimal basic resistance of the materials is different, the optimal basic resistance of the sensitive material on the corresponding electrode 2 can be adjusted by adjusting the line width and line distance of each electrode 2 in the four electrodes 2 . Of course, in other embodiments, the multi-channel array gas sensor can be a five-channel, six-channel, seven-channel, eight-channel, sixteen-channel or other multi-channel array sensor, as long as the corresponding electrodes 2 are designed. In addition, the sensitive materials on the multiple electrodes 2 may be partly the same, or completely different. The line width and line distance of multiple electrodes 2 can be different, or completely or partly the same, and the main function is to control the basic resistance of the material according to different sensitive materials, so as to optimize the sensitive performance of the sensitive material.

In one embodiment, the shape of the first electrode pad 31 may be a rectangle or a square. The length of the first electrode pad 31 may be 100 μm, 300 μm, 600 μm, 800 μm or 1 mm, or any other value within the range of 100 μm-1 mm. The width of the first electrode pad 31 may be 100 μm, 300 μm, 600 μm, 800 μm or 1 mm, or any other value within the range of 100 μm-1 mm. The thickness of the first electrode pad 31 may be 1 μm, 10 μm, 20 μm, 30 μm, 40 μm or 50 μm, or any other value in 1-50 μm. In another embodiment, the shape of the first electrode pad 31 may be circular. The diameter of the first electrode pad 31 is 100 μm, 300 μm, 600 μm, 800 μm or 1 mm, or any other value in the range of 100 μm-1 mm. The thickness of the first electrode pad 31 may be 1 μm, 10 μm, 20 μm, 30 μm, 40 μm or 50 μm, or any other value in 1-50 μm. When the length, width, diameter and/or thickness of the first electrode pad 31 are not within the scope of the embodiments of the present invention, for example, when the length, width, diameter and/or thickness of the first electrode pad 31 are too large, then This results in a reduction in the effective area and a waste of materials. If the length, width, diameter and/or thickness of the first electrode pad 31 are too small, the process is too difficult and the cost is increased.

According to the solution of the utility model, the single sensor is upgraded to a multi-channel array gas sensor, and the multi-channel array is combined with electrode devices to improve the sensor's high recognition and high-precision detection of the object to be measured. In addition, the inventor found through many experiments and in-depth summary analysis that the optimal basic resistance of each sensitive material can be adjusted by controlling the spacing and electrode width of each electrode, so that each sensitive material can achieve the best sensitivity. performance. When each sensitive material has an optimal basic resistance, several sensitive materials work together to achieve the optimal sensitivity, identification and selection performance of the object to be measured by the array sensor. Therefore, the multi-channel array electrode can also be used in the field of high-resolution and high-precision smart sensors, and can be well applied to fields where traditional single sensors cannot be applied, such as high-precision environmental monitoring, refrigerator odor recognition Wait.

So far, those skilled in the art should recognize that although a number of exemplary embodiments of the present invention have been shown and described in detail herein, they can still be used according to the present invention without departing from the spirit and scope of the present invention. Many other variations or modifications that conform to the principles of the utility model are directly determined or derived from the disclosed content of the new model. Therefore, the scope of the present invention should be understood and deemed to cover all such other variations or modifications.

Claims (10)

1. A multi-channel array gas sensor based on ceramic substrate, characterized in that, comprising: Ceramic substrate; a plurality of electrodes, the plurality of electrodes are arranged in an array on the ceramic substrate; A sensitive material layer is provided on each electrode, and the sensitive material layer is formed by a sensitive material uniformly applied on the electrodes; a plurality of first electrode pads respectively corresponding to the plurality of electrodes; and second electrode pads, each of the first electrode pads is connected to the second electrode pads, and the second electrode pads are used for grounding; Wherein, two ends of each electrode are respectively connected to the first electrode pad and the second electrode pad to output electrical signals. 2 . The multi-channel array gas sensor according to claim 1 , wherein the electrodes are intersecting L-shaped electrodes, intersecting F-shaped electrodes, intersecting toothed electrodes or semicircular electrodes. 3. The multi-channel array gas sensor according to claim 2, wherein the length of the electrodes is any value in the range of 500 μm-2 mm, and the width is any value in the range of 500 μm-2 mm . 4. The multi-channel array gas sensor according to claim 2, characterized in that, the plurality of electrodes are all cross-toothed electrodes, and the line width and line distance of each cross-toothed electrode are set to be the same as those applied to the electrodes. Match the best base resistance of the sensitive material on it. 5. The multi-channel array gas sensor according to claim 4, wherein the line width of the electrodes is any value in the range of 100-500 μm, and the line spacing is any value in the range of 100-500 μm. A value, the thickness is any value in the range of 1-50 μm. 6. The multi-channel array gas sensor according to claim 4 or 5, characterized in that the line width and line distance between the plurality of electrodes are selected to be the same or different. 7. The multi-channel array gas sensor according to any one of claims 1-5, characterized in that the sensitive materials on the multiple sensitive material layers are selected to be partially the same or completely different. 8. The multi-channel array gas sensor according to any one of claims 1-5, wherein the shape of the first electrode pad is a rectangle or a square; Wherein, the length of the first electrode pad is any value in the range of 100 μm-1 mm, the width is any value in the range of 100 μm-1 mm, and the thickness is any value in the range of 1-50 μm . 9. The multi-channel array gas sensor according to any one of claims 1-5, wherein the shape of the first electrode pad is circular; Wherein, the diameter of the first electrode pad is any value in the range of 100 μm-1 mm, and the thickness is any value in the range of 1-50 μm. 10. The multi-channel array gas sensor according to any one of claims 1-5, wherein the number of channels of the array gas sensor is any value ranging from 2-50.