CN120427099B - A fiber optic cantilever acoustic sensor based on polyimide (PI) film - Google Patents
A fiber optic cantilever acoustic sensor based on polyimide (PI) filmInfo
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Abstract
The invention belongs to the technical field of optical fiber sensing, and discloses an optical fiber cantilever beam acoustic sensor based on a Polyimide (PI) film, which comprises a gold-plated Polyimide (PI) cantilever Liang Baomo, two stainless steel annular substrates, a 3D printing shell and an optical fiber ceramic core, wherein the thickness of the Polyimide (PI) film is 25 mu m, a 200nm gold film is plated through magnetron sputtering, the reflectivity is 85%, the cantilever beam adopts a triangle-rectangular composite structure, the total size is 1.5mm multiplied by 0.8mm, the top is an isosceles triangle with the bottom of 0.8mm and the height of 0.5mm, and the bottom is a rectangular arm with the bottom of 1mm multiplied by 0.5 mm. The invention realizes the purpose of high-precision acoustic signal detection based on the Fabry-Perot interference principle, remarkably improves the sensitivity and dynamic response range, is suitable for acoustic signal detection in extreme environments, and has low cost and easy mass production.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to an optical fiber cantilever beam acoustic sensor based on a Polyimide (PI) film. The sensor is suitable for weak acoustic signal detection in the fields of geological exploration, pipeline leakage monitoring, underwater acoustic detection, photoacoustic spectroscopy and the like, and particularly shows excellent performance in extreme environments such as high temperature, high noise and the like. The present invention provides a high sensitivity, broadband acoustic detection solution by combining the unique material properties of Polyimide (PI) films with fiber optic fabry-perot interference (FPI) technology.
Background
The acoustic wave sensing technology has important application value in the fields of industrial monitoring, medical diagnosis, environment detection and the like. Conventional acoustic sensors (e.g., capacitive and piezoelectric sensors) can meet basic requirements under conventional conditions, but have significant limitations in that they have low sensitivity, insufficient electromagnetic interference resistance, and difficulty in realizing long-distance signal transmission, and particularly have significantly reduced performance in extreme environments such as high temperature, high noise, or strong electromagnetic fields. In recent years, the fiber optic acoustic sensor gradually becomes a powerful substitute for the traditional sensor by virtue of the advantages of electromagnetic interference resistance, small volume, low transmission loss and the like. Among them, a fiber-optic acoustic sensor based on the fabry-perot interference (FPI) principle is receiving attention because of its compact structure and high sensitivity.
In the prior art, fiber-optic FPI acoustic sensors typically consist of a fiber-optic endface and an acoustically sensitive element (e.g., a membrane or cantilever beam) that together form an interferometric cavity. When the sound wave acts on the sensitive element, the vibration of the sound wave causes the change of the length of the interference cavity, so that the interference spectrum is modulated, and the detection of the sound signal is realized. However, current fiber optic cantilever acoustic sensors still suffer from material selection and structural design. The metal film represented by stainless steel has high Young's modulus (about 200 GPa), so that the cantilever beam has high rigidity, limited vibration amplitude and low sensitivity. For example, the sensitivity of a commercial stainless steel cantilever beam acoustic sensor is only 787.6mV/Pa near 4kHz, and the requirement of high-precision weak acoustic signal detection is difficult to meet.
To overcome the limitations of metallic materials, researchers have attempted to fabricate cantilever beams from polymeric materials (e.g., polystyrene, PS). The Young's modulus of the polymer material is lower (about 3-4 GPa), and the vibration response of the cantilever beam can be theoretically enhanced, so that the sensitivity is improved. However, the reflectivity of polymer films is generally low (typically less than 10%), resulting in insufficient interference signal strength, limiting detection accuracy. In addition, polymer materials are easy to soften or degrade in a high-temperature environment, and cannot meet the application requirements under extreme conditions.
Polyimide (PI) is used as a high-performance engineering plastic, has excellent high temperature resistance (can resist more than 400 ℃), low Young's modulus (about 2-3 GPa) and good mechanical stability, and has been widely applied in the fields of aerospace, electronic packaging and the like. Compared with stainless steel, the Young's modulus of the Polyimide (PI) film is only about 1/50 of that of the Polyimide (PI) film, and the vibration sensitivity of the cantilever beam can be obviously improved theoretically. However, polyimide (PI) films have low natural reflectivity (about 5%), and if used directly in FPI acoustic sensors, the interference signal strength is insufficient, making it difficult to achieve high-precision detection.
In order to solve the problems, the invention provides an optical fiber cantilever beam acoustic sensor based on a gold-plated Polyimide (PI) film. The reflectivity is improved to 85% by plating the nanoscale gold film on the surface of the Polyimide (PI) film, so that the interference signal strength is remarkably enhanced, and the advantage of low Young modulus of the Polyimide (PI) film is maintained. In addition, the invention adopts an innovative triangle-rectangle composite cantilever beam structure, optimizes stress distribution and further improves sensitivity and frequency response range. The design not only overcomes the defect of low sensitivity of the traditional metal cantilever beam, but also solves the problems of low reflectivity and poor high temperature resistance of the polymer film, and has remarkable creativity and practical value.
Disclosure of Invention
The invention aims to provide an optical fiber cantilever beam acoustic sensor based on a Polyimide (PI) film, which aims to solve the technical problems of the existing optical fiber acoustic sensor in the aspects of insufficient sensitivity, low reflectivity, poor high-temperature adaptability and the like and realize high-precision and wide-frequency sound signal detection.
The technical scheme of the invention is as follows:
a Polyimide (PI) film based fiber optic cantilever acoustic sensor comprising the following components:
The gold-plated Polyimide (PI) cantilever Liang Baomo is characterized in that a Polyimide (PI) film with the thickness of 25 mu m is selected as the cantilever Liang Jicai, and a gold film with the thickness of 200nm is plated on the surface of the film through a magnetron sputtering process, so that a high reflection surface of an F-P interference cavity is formed, and the reflectivity reaches 85%.
The stainless steel annular substrate adopts two stainless steel annular substrates with the thickness of 100 mu m, and is used for fixing the gold-plated Polyimide (PI) cantilever Liang Baomo to provide stable structural support.
The 3D printing shell is 15mm in diameter and 10mm in length, and is used for packaging the sensor assembly and protecting the internal structure from external interference.
The optical fiber ceramic core is connected with a single mode fiber (Corning SMF-28) to form a light incidence channel of the F-P interference cavity, so that high-efficiency transmission of optical signals is ensured.
The cantilever beam geometric design is that the whole size of the cantilever beam is 1.5mm (length) multiplied by 0.8mm (width), the top is an isosceles triangle with the bottom side of 0.8mm and the height of 0.5mm, and the bottom is a rectangular arm with the length of 1mm multiplied by 0.5mm (width). The composite structure optimizes the vibration mode and improves the sensitivity and the frequency response.
Further, the Young's modulus of the Polyimide (PI) cantilever Liang Baomo is 1/50 that of stainless steel, and the sensitivity at 4.1kHz frequency is 957.7mV/Pa.
Further, the reflectivity of the gold-plated layer is 85%, and compared with the reflectivity of a Polyimide (PI) film without gold plating, the reflectivity is improved by 1600%.
Further, the frequency response range of the sensor is 500Hz to 8kHz, and the resonance frequency is 4.1kHz.
Further, the stainless steel annular substrate and the optical fiber ceramic core are fixed through blue field 9005 epoxy resin AB glue.
Further, the Polyimide (PI) cantilever Liang Baomo is processed by a laser marking machine to form a triangle-rectangle composite structure.
Compared with the prior art, the optical fiber cantilever beam acoustic sensor based on the Polyimide (PI) film has the following remarkable advantages:
1. the sensor has the advantage of high sensitivity, wherein the sensitivity reaches 957.7mV/Pa at 4.1kHz resonance frequency, and is improved by about 21.6 percent compared with a traditional stainless steel cantilever sensor (787.6 mV/Pa).
2. The device has the advantage of wide frequency response, the frequency response range is 500Hz-8kHz, and the device is suitable for various acoustic detection scenes.
3. The sensor has the advantage of high temperature stability, and can stably work in a 120 ℃ environment due to the high temperature resistance of a Polyimide (PI) film, and the sensitivity fluctuation is less than 3%.
4. The method has the advantages of interference resistance: the all-fiber structure design has no electrical component and has extremely strong electromagnetic interference resistance.
Drawings
For a clearer description of embodiments of the invention or of solutions in the prior art, the drawings that are necessary for the description of the embodiments or of the prior art will be briefly described, it being apparent that the drawings in the description below are only some embodiments of the invention, from which, without inventive faculty, other drawings can be obtained for a person skilled in the art, in which:
FIG. 1 is a schematic diagram of the overall structure of a fiber cantilever acoustic sensor based on Polyimide (PI) film according to the present invention;
FIG. 2 is a schematic view of the cross-sectional portion of FIG. 1, i.e., the cantilever beam;
FIG. 3 is a schematic diagram of an optical fiber cantilever beam acoustic sensor based on a Polyimide (PI) film based on the Fabry-Perot interference principle and an optical path;
FIG. 4 is a graph of reflectance versus column before and after gold plating of a fiber optic cantilever acoustic sensor based on Polyimide (PI) film in accordance with the present invention.
Detailed Description
The details of the implementation of a Polyimide (PI) film based fiber optic cantilever acoustic sensor according to the present invention are described in detail below with reference to specific embodiments so as to enable one of ordinary skill in the art to practice the present invention.
As shown in fig. 1-4, a fiber cantilever acoustic sensor based on Polyimide (PI) film.
Example one preparation of the sensor
1) The Polyimide (PI) film gold plating comprises selecting Polyimide (PI) film (Kapton HN) with thickness of 25 μm, plating gold film with thickness of 200nm on the surface of the Polyimide (PI) film by using magnetron sputtering machine (model: DCT-600), vacuum degree of 10- 4 Pa, sputtering power of 200W, plating time of 30min, and reflectivity test (using spectrometer) after gold plating of 85% (wavelength 1550 nm).
2) Cantilever beam processing, namely placing a gold-plated Polyimide (PI) film in a laser marking machine (model: fiberMark), setting laser parameters, namely wavelength 1064nm, power 20W and scanning speed 100mm/s, cutting a cantilever beam structure, namely the total length of 1.5mm, the total width of 0.8mm, the top of the cantilever beam structure is an isosceles triangle (bottom of 0.8mm and height of 0.5 mm), and the bottom of the cantilever beam structure is a rectangular arm (1 mm multiplied by 0.5 mm).
3) The assembly was carried out by preparing two stainless steel annular substrates (thickness 100 μm, inner diameter 2mm, outer diameter 10 mm), clamping a cut Polyimide (PI) cantilever Liang Baomo between the two substrates, fixing with blue field 9005 epoxy AB glue (mixing ratio 1:1), aligning an optical fiber ceramic core (inner diameter 125 μm) with a single mode fiber (Corning SMF-28), inserting into the center of the stainless steel substrate, printing a housing (material: ABS resin) with a size of 15mm in diameter and 10mm in length with a 3D printer (model: form 3), and placing the assembled substrate and optical fiber ceramic core in the housing and sealing with epoxy glue.
Example two Performance test
1) The frequency response test comprises the steps of placing a sensor on an acoustic test platform, connecting a signal generator (model: agilent 33220A) with a photoelectric converter, inputting an acoustic wave signal with the frequency range of 500Hz-8kHz, the sound pressure level being 1Pa, recording the change of output voltage along with the frequency, measuring the resonant frequency to be 4.1kHz, and the sensitivity to be 957.7mV/Pa.
2) The high temperature stability test is to place the sensor in a high temperature box (model: DHG-9070A) with the temperature set to 120 ℃, continuously work for 24 hours, and measure the sensitivity every 4 hours, and the result shows that the sensitivity fluctuation is less than 3%, which proves that the performance is stable at high temperature.
3) Reflectance test the reflectance of the gold plated Polyimide (PI) film was measured to be 85% (wavelength 1550 nm) using a spectrum analyzer (model: yokogawa AQ 6370D) and the reflectance of the non-gold plated Polyimide (PI) film was measured to be 5%.
Embodiment III application verification
1) The sensor is deployed in a simulated seismic wave detection scene in geological exploration application, and weak vibration signals in the range of 500Hz-8kHz are successfully captured, so that the sensitivity is better than that of the traditional sensor.
2) And pipeline leakage monitoring, namely in a pipeline leakage simulation experiment, the sensor accurately positions the sound wave signals sent by the leakage points, and the detection distance reaches 50m.
3) And in the underwater 10m depth environment, the sensor stably outputs a 4kHz sound wave signal, and the underwater adaptability is good.
The sensor works based on the Fabry-Perot interference principle, incident light is transmitted to an optical fiber ceramic core through a single-mode optical fiber, multi-beam interference is formed between the end face of the optical fiber and a gold-plated Polyimide (PI) film, interference spectrum characteristics are closely related to the length of an interference cavity, when external sound waves act on a Polyimide (PI) cantilever Liang Baomo, the film vibrates to change the length of the interference cavity, interference spectrum deviation is caused, and accurate measurement of an acoustic signal can be achieved by detecting the light intensity change of reflected light.
Compared with the prior art, the optical fiber cantilever beam acoustic sensor based on the Polyimide (PI) film has the following remarkable advantages:
1. the sensor has the advantage of high sensitivity, wherein the sensitivity reaches 957.7mV/Pa at 4.1kHz resonance frequency, and is improved by about 21.6 percent compared with a traditional stainless steel cantilever sensor (787.6 mV/Pa).
2. The device has the advantage of wide frequency response, the frequency response range is 500Hz-8kHz, and the device is suitable for various acoustic detection scenes.
3. The sensor has the advantage of high temperature stability, and can stably work in a 120 ℃ environment due to the high temperature resistance of a Polyimide (PI) film, and the sensitivity fluctuation is less than 3%.
4. The method has the advantages of interference resistance: the all-fiber structure design has no electrical component and has extremely strong electromagnetic interference resistance.
The optical fiber cantilever beam acoustic sensor based on the Polyimide (PI) film has the following three innovation points:
1. The material innovation is that Polyimide (PI) film is adopted as cantilever Liang Jicai, the Young modulus of the polyimide film is only 1/50 of that of stainless steel, and the vibration sensitivity is greatly improved.
2. The technological innovation is that a 200nm gold film is plated through magnetron sputtering, the reflectivity of a Polyimide (PI) film is improved from 5% to 85%, and the interference signal intensity is obviously enhanced.
3. The structure innovation is that a triangle-rectangle composite cantilever beam structure is designed, the stress distribution is optimized, the sensor has flat frequency response within the range of 500Hz-8kHz, and the resonance frequency is 4 MoscaHz.
The optical fiber cantilever beam acoustic sensor based on the Polyimide (PI) film can be widely applied to the following fields:
1) seismic wave detection in geological exploration, 2) acoustic wave positioning in pipeline leakage monitoring, 3) underwater signal acquisition in underwater acoustic detection, and 4) gas analysis in photoacoustic spectroscopy. The sensor has excellent adaptability and reliability especially in extreme environments such as high temperature, high noise and the like.
While specific embodiments of the present invention have been described above, it will be understood by those skilled in the art that these specific embodiments are by way of example only, and that various omissions, substitutions, and changes in the form and details of the methods and systems described above may be made by those skilled in the art without departing from the spirit and scope of the invention. For example, it is within the scope of the present invention to combine the above-described method steps to perform substantially the same function in substantially the same way to achieve substantially the same result. Accordingly, the scope of the invention is limited only by the following claims.
Claims (4)
1. A Polyimide (PI) film-based optical fiber cantilever acoustic sensor, comprising the following components:
A gold plated Polyimide (PI) cantilever Liang Baomo, the Polyimide (PI) cantilever Liang Baomo having a thickness of 25 μm;
two stainless steel annular substrates, the thickness of the stainless steel annular substrates being 100 μm, for fixing the Polyimide (PI) cantilever Liang Baomo;
The 3D printing shell is 15mm in diameter and 10mm in length and is used for packaging the sensor assembly;
The Polyimide (PI) cantilever Liang Baomo is plated with a gold film with the thickness of 200nm through magnetron sputtering to form a reflecting surface of the Fabry-Perot interference cavity;
The cantilever beam has the size of 1.5mm (length) multiplied by 0.8mm (width), the top is an isosceles triangle with the bottom of 0.8mm and the height of 0.5mm, and the bottom is a rectangular arm with the length of 1mm multiplied by 0.5mm (width);
wherein the Young's modulus of the Polyimide (PI) cantilever Liang Baomo is 1/50 of that of stainless steel, and the sensitivity at 4.1kHz frequency is 957.7mV/Pa;
The reflectivity of the gold-plated layer is 85%, and compared with the reflectivity of a Polyimide (PI) film without gold plating, the reflectivity is 5%, and the reflectivity is improved by 1600%.
2. A fiber optic cantilever acoustic sensor based on a Polyimide (PI) film according to claim 1 wherein the sensor has a frequency response in the range of 500Hz to 8kHz and a resonant frequency of 4.1kHz.
3. The Polyimide (PI) film based fiber cantilever acoustic sensor according to claim 1, wherein the stainless steel annular substrate and the fiber ceramic core are secured by blue field 9005 epoxy AB glue.
4. The Polyimide (PI) film based fiber cantilever acoustic sensor of claim 1, wherein the Polyimide (PI) cantilever Liang Baomo is machined by a laser marking machine to form a triangle-rectangle composite structure.
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| CN117538563A (en) * | 2023-11-20 | 2024-02-09 | 中北大学 | Full-rigid packaging high-temperature-resistant optical fiber Fabry-Perot cavity acceleration sensor and assembly method thereof |
| CN118010147A (en) * | 2024-02-04 | 2024-05-10 | 郑州大学 | Optical fiber microphone and microphone system based on microstructure cantilever beam |
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| US7561277B2 (en) * | 2006-05-19 | 2009-07-14 | New Jersey Institute Of Technology | MEMS fiber optic microphone |
| US20130096413A1 (en) * | 2011-10-12 | 2013-04-18 | Regents Of The University Of Minnesota | Optical ultrasound transducer |
| CN113567818B (en) * | 2021-08-16 | 2024-05-03 | 重庆大学 | Fabry-Perot partial discharge sensing device and method based on cantilever supporting structure |
| CN221976140U (en) * | 2024-01-02 | 2024-11-08 | 中国计量大学 | Double-parameter measurement sensor based on FBG cascading SMF-MMF-HCF-MMF structure |
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| CN117538563A (en) * | 2023-11-20 | 2024-02-09 | 中北大学 | Full-rigid packaging high-temperature-resistant optical fiber Fabry-Perot cavity acceleration sensor and assembly method thereof |
| CN118010147A (en) * | 2024-02-04 | 2024-05-10 | 郑州大学 | Optical fiber microphone and microphone system based on microstructure cantilever beam |
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| Label-free ferrule-top optical fiber micro-cantilever biosensor;J Li 等;Sensors and Actuators A: Physical;20181231;1-25 * |
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