CN119020853A - Single crystal furnace pulling head coupler and single crystal furnace pulling head - Google Patents

Abstract

The disclosure provides a single crystal furnace lifting head coupler and a single crystal furnace lifting head, and belongs to the technical field of crystal growth. The coupler includes: the control unit is connected between the upper computer and all the functional components of the lifting head; the control unit is used for acquiring a target control signal; transmitting a target control signal to a target functional component of the pull head to control the target functional component; the target functional components are components controlled by target control signals in all the functional components; and transmitting the target operation data acquired from the at least one functional component to the upper computer. The complexity of the assembly work and the interference between the devices can be reduced.

Description

Single crystal furnace pulling head coupler and single crystal furnace pulling head

Technical Field

The disclosure relates to the technical field of crystal growth, in particular to a single crystal furnace lifting head coupler and a single crystal furnace lifting head.

Background

The production of single crystal silicon is currently commonly performed in a single crystal furnace, which is an apparatus for growing dislocation-free single crystals by pulling in an inert gas environment using a heater to heat the polycrystalline material, typically using the Czochralski method.

In a single crystal furnace, a pull head is a key component mainly used for controlling the growth process of crystals. In the growth process of the crystal, the pure raw materials are heated to above the melting point in a single crystal furnace to form a uniform molten state, and seed crystals are fixed on a pulling head and are immersed into the molten material by controlling the motion of the pulling head. As the pull head rotates and pulls, the molten material crystallizes on the seed crystal surface to form a single crystal. In the process, the pulling speed, the rotating speed, the position, the temperature and the like of the pulling head need to be strictly controlled, and the control of the pulling head is realized through each functional component arranged on the pulling head, for example, the functional component for controlling the position and the speed of the pulling head is a servo motor, and the functional component for monitoring the weight of crystals is a resistance bridge of a weighing sensor and the like. Therefore, in the single crystal furnace, it is important to control the pulling head.

However, since the number of functional parts of the pull head is large, wiring for controlling the pull head by the host computer (at least one) is complicated. On the one hand, the complex wiring can lead to low operation and assembly efficiency of engineering personnel and difficult later maintenance; on the other hand, complicated wiring also increases interference, so that communication is unstable, control signal errors are large, and the quality of grown crystals is poor.

Disclosure of Invention

The present disclosure provides a single crystal furnace pulling head coupler and a single crystal furnace pulling head; the complexity of the assembly work and the interference between the devices can be reduced.

The technical scheme of the present disclosure is realized as follows:

In a first aspect, the present disclosure provides a single crystal furnace pull head coupler, the coupler comprising: the control unit is connected between the upper computer and all the functional components of the lifting head; the control unit is used for acquiring a target control signal; transmitting a target control signal to a target functional component of the pull head to control the target functional component; the target functional components are components controlled by target control signals in all the functional components; and transmitting the target operation data acquired from the at least one functional component to the upper computer.

In some embodiments of the present disclosure, the control unit is specifically configured to transmit, when the target functional component belongs to the first type functional component, a target control signal to the target functional component through a first path between the control unit and the target functional component, where all interfaces of the first type functional component are adapted to interfaces of the control unit; and transmitting the target operation data acquired from at least one functional component belonging to the first type of functional components to the upper computer through the first channel.

In some embodiments of the present disclosure, the coupler further comprises an external communication unit connected between the control unit and the second type of functional component, all interfaces of the second type of functional component being not adapted to interfaces of the control unit; an external communication unit, configured to receive an initial control signal sent by the control unit when the target functional component belongs to the second class of functional components; analyzing the initial control signal into a target control signal; analyzing the initial operation data acquired from the target functional component into target operation data; the control unit is specifically used for transmitting a target control signal to the target functional component through a second path among the control unit, the external communication unit and the target functional component; and transmitting the target operation data acquired from at least one functional component belonging to the second type of functional components to the upper computer through the second path.

In some embodiments of the present disclosure, the control unit is specifically configured to transmit, through the first path, or the second path, the target control signal and the target operation data when the target functional component is a third type functional component, where the third functional component includes: an interface adapted to the control unit and an interface not adapted to the control unit.

In some embodiments of the present disclosure, in the case that the target functional component belongs to the first class of functional components, a plurality of first passages are included between the control unit and the target functional component; and the control unit is particularly used for switching to the next first path communication in the case of failure of one first path communication.

In some embodiments of the present disclosure, in the case that the target feature belongs to the second class of features, a plurality of second passages are included between the control unit and the target feature; and the control unit is particularly used for switching to the next second path communication in the case of failure of one second path communication.

In some embodiments of the present disclosure, the target feature is an electrical slip ring, the coupler further comprising: a first anti-noise unit; the first anti-noise unit is connected with the electric slip ring of the lifting head and used for reducing electromagnetic interference caused by the electric slip ring of the lifting head.

In some embodiments of the present disclosure, the target feature is a sensor, the coupler further comprising: a second anti-noise unit; the second anti-noise unit is connected with the sensor and used for reducing the interference of the sensor to the control unit.

In some embodiments of the present disclosure, the coupler further comprises: a state feedback unit; the state feedback unit is used for monitoring interfaces of the control unit and outputting an alarm signal under the condition that the voltage value of any interface is not the corresponding rated voltage value.

In some embodiments of the present disclosure, the status feedback unit includes: the prompting lamp is used for prompting interface faults of the control unit.

In some embodiments of the present disclosure, the status feedback unit further includes: and the buzzer is used for sending out alarm prompt sound under the condition of interface failure of the control unit.

In some embodiments of the present disclosure, the external communication unit includes: analog-to-digital conversion chip set, bridge driving chip set, transceiver; the analog-to-digital conversion chip set is used for converting the analog signal into a digital signal; the bridge driving chip set is used for converting the resistance value into a voltage signal; the transceiver is used to bridge the control unit and the functional components.

In a second aspect, the present disclosure provides a single crystal furnace pull head connected to the single crystal furnace pull head coupler, the single crystal furnace pull head coupler controlling each functional component of the single crystal furnace pull head, and obtaining operational data from each functional component.

The present disclosure provides a single crystal furnace pull head coupler, the coupler comprising: the control unit is connected between the upper computer and all the functional components of the lifting head; the control unit is used for acquiring a target control signal; transmitting a target control signal to a target functional component of the pull head to control the target functional component; the target functional components are components controlled by target control signals in all the functional components; and transmitting the target operation data acquired from the at least one functional component to the upper computer. According to the single crystal furnace pull head coupler, communication can be carried out with each functional part of the pull head, centralized management of each functional part of the pull head is achieved, on one hand, in the wiring process of each functional part of the pull head, as the interfaces of the single crystal furnace pull head coupler are fixed, the single crystal furnace pull head coupler is only connected according to the corresponding interfaces, wiring and wiring are not needed to be considered, and complexity of assembly operation is greatly reduced. On the other hand, due to centralized management, the wiring is simple and fixed, and the interference between the devices connected with the pulling head is reduced, so that the quality of the grown crystal is improved.

Drawings

Fig. 1 is a schematic diagram of communication connection between a pull head and an upper computer provided by the present disclosure;

fig. 2 is a schematic diagram of a connection between a pull head and an upper computer through a coupler provided in the present disclosure;

FIG. 3 is one of the block diagrams of the coupler provided by the present disclosure;

FIG. 4 is a second block diagram of a coupler provided by the present disclosure;

FIG. 5 is a third block diagram of the coupler provided by the present disclosure;

FIG. 6 is one of the application scenarios of the exemplary coupler provided by the present disclosure;

FIG. 7 is a second application scenario of the exemplary coupler provided by the present disclosure;

FIG. 8 is a fourth block diagram of the structure of the coupler provided by the present disclosure;

FIG. 9 is a fifth block diagram of the structure of the coupler provided by the present disclosure;

fig. 10 is a third schematic diagram of an application scenario of the coupler provided in the present disclosure.

Detailed Description

Technical solutions in the embodiments of the present application will be clearly described below with reference to the drawings in the present disclosure, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which are obtained by a person skilled in the art based on the embodiments of the present application, fall within the scope of protection of the present application.

The terms "first," "second," and the like in the description of the present application, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged where appropriate so that the present disclosure may be practiced in sequences other than those illustrated and described herein, and that the objects identified by "first," "second," etc. are generally of a type and do not limit the number of objects, e.g., the first object may be one or more. In addition, "and/or" in the specification means at least one of the connected objects, and the character "/", generally means a relationship in which the associated objects are one kind of "or".

In a single crystal furnace, control and monitoring of a pulling head are key links for ensuring the growth quality of monocrystalline silicon, the pulling head is communicated with an external upper computer, and the pulling head is controlled and monitored through the upper computer. Common controls and monitoring for the pull head include: a functional unit for performing position control, which can control the vertical movement of the pull head to adjust the crystal growth rate and crystal diameter; the functional component (such as a high-precision displacement sensor) is used for monitoring the position of the lifting head, so that the position of the lifting head can be monitored in real time; the functional component for controlling the speed can accurately control the pulling speed and the rotating speed of the pulling head so as to ensure the uniformity and consistency of crystal growth, and can realize the accurate control of the speed by adopting a speed sensor and a servo motor system; the functional component for temperature monitoring can monitor the temperatures of the lifting head and the crystal growth area so as to ensure that the crystal growth is in a proper temperature range, and can adopt a thermocouple or an infrared thermometer for temperature measurement and control; the functional component for weight monitoring can monitor the progress and quality of crystal growth in real time by measuring the weight of seed crystals, and can monitor the weight by adopting an electronic scale, a force sensor and a weighing sensor resistance bridge; the functional component is used for rotation control, can control the rotation of the lifting head so as to promote the uniformity of crystal growth and reduce crystal defects, and can monitor the rotation speed and direction by adopting a rotary encoder; the functional component for pressure monitoring can monitor the pressure in the crucible, ensure crystal growth under a proper atmosphere and monitor the pressure change in the crucible by adopting a pressure sensor; the functional component for controlling atmosphere can ensure the stability of the gas environment (such as argon) of the pull head and the crystal growth area, prevent oxidization and impurity pollution, and can control the gas flow and pressure by adopting a gas flowmeter and a mass flow controller; the functional component for vibration monitoring can monitor tiny vibration in the process of pulling head and crystal growth so as to reduce crystal defects, and an acceleration sensor or a vibration sensor can be used for vibration monitoring; the functional component for carrying out real-time image monitoring can use a camera to monitor the crystal growth process in real time and observe the shape and growth condition of the crystal.

The upper computer controls the lifting head through various functional components arranged on the lifting head, or monitors the lifting head and the growing crystal. As shown in fig. 1, the upper computer 10 is in communication connection with the pull head 20, the pull head 20 includes functional units 1 to N, the functional units 1 are in direct communication with the upper computer 10, the functional units 2 are in communication with the upper computer 10 through the intermediate processing module 1, and the functional units N are in communication with the upper computer 10 through the intermediate processing module 2. The functional units 1 to N shown in fig. 1 need to be in communication connection with the upper computer 10, and fig. 1 shows that each of the simplest functional units is connected with the upper computer 10 through one path, in practical application, more than one communication path may exist between one functional unit and the upper computer, and the wiring of the communication connection may be more complex.

However, each functional component is connected with an upper control unit, a lower control unit or a monitoring unit (generally referred to as an upper computer in the disclosure), so that the wiring of the pull head is complicated, more time is required for engineering designers to spend, wiring work is performed on the wiring according to experience, the operation assembly efficiency is low, and the difficulty of later maintenance is increased; on the other hand, due to the complicated wiring, interference can occur between the respective devices, so that communication is unstable, control signal errors are large, and the quality of the grown crystal is poor.

Based on the problems of the pulling head, the disclosure aims to provide a single crystal furnace pulling head coupler which can reduce wiring difficulty and is easy to maintain, and the single crystal furnace pulling head coupler provided by the disclosure is described in detail by a specific embodiment with reference to the accompanying drawings.

Referring to fig. 1, as shown in fig. 2, the present disclosure provides a single crystal furnace pull head coupler 30, which performs unified management on functional components 1 to N of a pull head 20, and all the functional components of the pull head 20 communicate with an upper computer through the single crystal furnace pull head coupler 30, so that wiring is simple and easy to maintain.

Specifically, as shown in fig. 3, the single crystal furnace pull head coupler 30 includes: a control unit 301.

The control unit 301 is connected between all the functional components of the upper computer 10 and the pull head 20, and is used for acquiring a target control signal; transmitting a target control signal to a target functional component of the pull head to control the target functional component; and transmitting the target operation data acquired from the at least one functional unit to the host computer 10. The target functional component is a component controlled by the target control signal among all the functional components. The control unit 301 may be a microcontroller, a domain controller, a system-on-chip, or the like.

In fig. 3, taking the example that the pull head 20 includes the target functional part to the functional part N, the target functional part to the functional part N communicate with the upper computer 10 through the control unit 301 in the single crystal furnace pull head coupler 30. The upper computer 10 may be an upper control unit, and the upper control unit sends control signals to each functional component of the pull head to control the pull head 20; or the upper computer 10 may be a lower control unit, where the lower control unit controls other components according to the operation data of each functional component on the pull head 20; or the upper computer 10 may be a monitoring unit that monitors operation data of each functional component on the pull head 20.

Since the communication interfaces of the respective functional components of the pull head 20 may be the same or different, the single crystal furnace pull head coupler 30 needs to be adapted to the communication interfaces of the respective components in order to be able to connect with the respective functional components, i.e. different communication interfaces are provided in the single crystal furnace pull head coupler 30 to connect with the different functional components. The interface of the functional component is adapted to the interface of the control unit 301, i.e. it is indicated that the control unit 301 and the functional component can be directly connected, the control unit 301 being able to recognize the operating data obtained from the functional component, the functional component also being able to recognize the control signal sent by the control unit.

The functional components of the pull head 20 may be divided into three types, all interfaces of the first type of functional components being adapted to interfaces of the control unit 301; all interfaces of the second type of functional components are not adapted to the interfaces of the control unit 301; the part of the interfaces of the third class of functional components is adapted to the control unit 301 and the part of the interfaces is not adapted to the interfaces of the control unit 301.

As shown in fig. 3, in the case where the target functional component belongs to the first type of functional component, communication is performed between the slider 20 and the host computer 10 through the first path L1 between the control unit 301 and the target functional component. The method comprises the steps of transmitting a target control signal to a target functional unit, and transmitting target operation data acquired from at least one functional unit belonging to a first type of functional unit to an upper computer, such as transmitting operation data acquired from functional unit N, which also belongs to the first type of functional unit, to the upper computer via a first path L2.

As shown in fig. 4, in case that the target functional component belongs to the second type of functional component, the single crystal furnace pulling head coupler 30 further includes an external communication unit 302 connected between the control unit 301 and the second type of functional component, and the control unit 301, the external communication unit 302 and the target functional component as shown in fig. 3 constitute a second path L3. The external communication unit 302 is configured to receive an initial control signal transmitted by the control unit 301 through the second path L3; analyzing the initial control signal into a target control signal; analyzing the initial operation data acquired from the target functional component into target operation data; a control unit 301, in particular for the second path L3, for transmitting a target control signal to the target functional component; the target operation data acquired from at least one functional unit belonging to the second type of functional unit is transmitted to the host computer through the second path L3.

In the communication process from the pull head 20 to the upper computer 10, the external communication unit 302 performs protocol conversion, and if an interface adapted to a certain communication protocol is not set in the control unit 301, the external communication unit 302 needs to convert the operation data of the first protocol acquired on the functional component into the target operation data of the second protocol identifiable in the control unit 301. One case is that data conversion is performed, for example, the control unit 301 does not have the capability of resolving the first operation data, and the first operation data needs to be converted into target operation data identifiable by the control unit 301 by means of the external communication unit 302. Accordingly, the communication process from the upper computer 10 to the pull head 20 is the same, and will not be described here again.

In the case where the target functional component belongs to the third class of functional components, as shown in fig. 5, the control unit 301 and the target functional component constitute a first path L4, and the control unit 301, the external communication unit 302, and the target functional component constitute a second path L5. The control unit 301 and the target functional component may perform data interaction through the first path L4, and may also perform data interaction through the second path L5. The functional unit N belongs to a first type of functional unit, and communicates with the host computer via a first path L2, and the functional unit 1 belongs to a second type of functional unit, and communicates with the host computer via a first path L6.

For the third type of functional components, the communication interfaces of different types can be used for carrying out redundancy design on the paths so as to facilitate communication through one path and ensure normal communication under the condition of communication failure of the other path.

Specifically, the target operation data and the target control signal may be transmitted through the first path in the case where the first path communication is normal; and switching to the second path to transmit the target operation data and the target control signal in the case that the first path communication is abnormal. The target operation data and the target control signal can be transmitted through the second path under the condition that the second path communication is normal; and switching to the first path to transmit the target operation data and the target control signal in the case of the second path communication abnormality. The method can also be that a certain path is selected to communicate preferentially, for example, the second path is selected to communicate preferentially, and under the condition that the second path communication is normal, the target operation data and the target control signal are transmitted through the second path; and switching to the first path to transmit the target operation data and the target control signal under the condition that the second path communication is abnormal; and switching back to the second path to transmit the target operation data and the target control signal under the condition that the second path resumes normal communication.

Illustratively, the servo motor, which is a functional component in the pull head, belongs to the third class of functional components, and since the servo motor is a key component for achieving speed and position control of the pull head 20, the passage of the servo motor and the host computer is a key for ensuring crystal quality. As shown in fig. 6, by taking a functional component as a servo motor, a control unit 301 as an MCU, and an external communication unit 302 as a Max485 as an example, the servo motor is connected with the MCU through an Input/Output (IO) interface of the MCU to form a first path S1, the servo motor is connected with the MCU through Max485 to form a second path S2, the MCU can send a control signal to control the servo motor through the first path S1, and can send a control signal to control the servo motor through the second path S2, and if any path fails, the communication is seamlessly switched to another path.

It should be noted that only one path is in operation at the same time for the same functional component. For example, for the control of the servo motor, even if a first passage and a second passage are simultaneously provided, the MCU can transmit the control signal to the servo motor only through one passage so as to avoid the control signal collision or repeated control.

Through the single crystal furnace pulling head coupler 30 provided by the disclosure, communication with each functional component of the pulling head 20 is realized, centralized management of each functional component of the pulling head 20 is realized, on one hand, in the wiring process of each functional component of the pulling head 20, as the interfaces of the single crystal furnace pulling head coupler 30 are fixed, only the corresponding interfaces are needed to be connected, wiring and wiring are not needed to be considered, and the complexity of assembly operation is greatly reduced. On the other hand, because of centralized management, wiring is simply fixed, interference between the respective devices connected to the pulling head 20 is also reduced, and thus the quality of the grown crystal is also improved.

If communication of the pulling head is interrupted in the working process, the quality of the grown crystal is seriously affected, and even the grown crystal is not available, so that it is important to ensure that communication of the pulling head is not interrupted.

In some implementations, where the target feature belongs to the first class of features, a plurality of first pathways are included between the control unit and the target feature; the control unit 301 is specifically configured to switch to the next first path communication in case of a failure of one first path communication. In case the target functional component belongs to the second class of functional components, a plurality of second passages are comprised between the control unit and the target functional component; the control unit 301 is specifically configured to switch to the next second path communication in the case of a failure of one second path communication, that is, one functional component may communicate with the host computer 10 through two or more first paths or two or more second paths, and if one path fails in the communication, the control unit 301 determines the next path to be used, and the control unit 301 may specifically determine the next path to be used according to the priority of the paths.

Since the electrical slip ring is a key component for power supply and signal transmission of the pull head 20, it is important to ensure the communication. Illustratively, as shown in fig. 7, taking a functional component as an electrical slip ring, and taking a microcontroller unit (Microcontroller Unit, MCU) as an example, the electrical slip ring is connected with the MCU through two ethernet control automation technology (Ethernet for Control Automation Technology, ethercat) interfaces of the MCU, two first paths S3 and S4 are formed, in the case of a communication failure of the first path S3, the MCU controls to switch to the first path S4 for communication, and the switching process does not affect the ongoing communication transmission, i.e. seamless switching.

In summary, through the arrangement of the redundant passages, the risk of communication interruption in the crystal growth process can be reduced, so that the quality of crystal growth is ensured.

In order to improve the anti-interference capability of the interface of the single crystal furnace pull head coupler 30, avoid that interference between lines affects communication quality, thereby resulting in poor quality of grown crystals, in some examples of the present disclosure, the functional component is an electrical slip ring, as shown in fig. 8, the single crystal furnace pull head coupler 30 further includes: a first anti-noise unit; the first noise preventing unit is connected with the electric slip ring of the pull head 20, and is used for reducing electromagnetic interference caused by the electric slip ring of the pull head 20.

The electrical slip ring is to avoid the wire winding caused by the rotation of the pull head 20, and thus the more wires passing through the electrical slip ring, the larger the interference that may be generated. Accordingly, a first anti-noise unit is provided in the control unit 301 to filter the signal, avoiding errors caused by noise effects. In particular, the first noise immunity unit may be an inductive and capacitive common filter.

As further shown in fig. 8, the sensor single crystal furnace pull head coupler 30 further includes: a second anti-noise unit; the second anti-noise unit is connected with the sensor and used for reducing the interference of the sensor to the control unit.

The pull head 20 may include a plurality of sensors, and each sensor may also interfere with the signal received by the control unit 301, so that noise generated by the sensor is filtered by the second anti-noise unit. Specifically, the second noise immunity unit may be an isolation device such as an optocoupler, a triode, or the like.

It should be noted that, in the actual application, the first anti-noise unit and the second anti-noise unit shown in fig. 8 are also separated from the control unit 301 to be an independent unit in the single crystal furnace pull head coupler 30, and the specific setting mode is not limited in this disclosure.

To effectively monitor the connection status of each path, and ensure timely feedback when the path fails, in some embodiments of the present disclosure, in conjunction with fig. 4, as shown in fig. 9, the single crystal furnace pull head coupler 30 further includes: the state feedback unit 303.

The state feedback unit 303 is configured to monitor the interfaces of the control unit 301, and output an alarm signal when the voltage value of any interface is not the corresponding rated voltage value.

The external communication unit, the functional components, and the like are connected to the control unit 301 through an interface of the control unit 301. Each interface of the control unit 301 has a rated operating voltage, i.e. a rated voltage value. The state feedback unit 303 monitors each interface of the control unit 301, and if the voltage value of one interface is not the corresponding rated voltage value, determines that the interface fails, outputs alarm information to prompt engineering designers to repair in time.

Alternatively, the status feedback unit 303 may include a warning light. Specifically, there may be a plurality of different color combinations of the indicator lights, each combination indicating an interface; each interface can also be corresponding to a prompt lamp.

Further, in order to be able to timely notify the engineering personnel of the fault, the status feedback unit 303 further includes: a buzzer for giving alarm prompt sound under the condition of interface failure of control unit.

It should be noted that, in fig. 9, the state feedback unit 303 is disposed in the single crystal pulling head coupler 30, and as a separate module of the single crystal pulling head coupler 30, in practical application, the state feedback unit 303 may also be disposed in the control unit 301 as a part of the control unit 301.

To enable the various functional components of the pull head 20 to communicate with the host computer 10, in some embodiments of the present disclosure, the external communication unit 302 includes: analog-to-digital conversion chip set, bridge driving chip set, transceiver; the analog-to-digital conversion chip set is used for converting the analog signal into a digital signal; the bridge driving chip set is used for converting the resistance value into a voltage signal; the transceiver is used to bridge the control unit and the functional components.

Since the collected operational data on the functional components may be analog signals (e.g., the functional components commonly used in the pull head 20: a liquid level sensor), and the control unit 301 needs digital signals, an analog-to-digital conversion chip is required to convert the analog signals into digital signals. In addition, the common functional components in the pull head 20: the load cell resistive bridge from which the signal is acquired is a resistive signal that the bridge driver chipset is required to convert to a voltage signal for recognition by the control unit 301.

Transceiver (e.g., max 485), due to the usual features in the pull head 20: the communication interface of the servo motor is not adapted to the interface of the control unit 301, such as the communication interface 485 commonly used for servo motors, the control unit 301 does not support 485 communication, and thus communication between the functional components and the control unit 301 needs to be achieved by means of a transceiver.

Illustratively, as shown in fig. 10, a practical application scenario of the single crystal furnace pull head coupler 30 shown in the present disclosure is shown. The functional components included in the pull head 20 shown in fig. 10 are: the device comprises an electric slip ring, a weighing sensor resistor bridge, a liquid level sensor, a servo motor, an external encoder of a seed crystal motor and other sensors. The electrical slip ring is connected with the control unit 301 through two Ethercat interfaces to obtain two paths, and the signals passing through the paths are filtered through the capacitor and inductor universal filter 305 in the two paths to remove interference. The host computer 10 communicates with the control unit 301 via an electrical slip ring. The weighing sensor resistor bridge is connected to a universal asynchronous receiver Transmitter (Universal Asynchronous Receiver/Transmitter, UART) interface of the control unit 301 through a bridge drive chipset included in the external communication unit 302, and the liquid level sensor is connected to a universal UART interface of the control unit 301 through an analog-to-digital conversion chipset included in the external communication unit 302. Two paths are included between the servo motor and the control unit 301, one path is connected to an inter-integrated circuit (I2C) interface of the control unit 301 through a transceiver included in the external communication unit 302, and the other path is connected to the control unit 301 directly through an internal IO interface. The optocoupler/triode 304 serves as an isolation device, avoiding interference from other sensors to the control unit 301. The status feedback unit 303 monitors each interface of the control unit 301 to output alarm information in case of interface failure. Wherein, the electric slip ring, other sensors, external encoder of seed crystal belong to first class functional unit, weighing sensor resistance bridge and liquid level sensor belong to second class functional unit, and servo motor belongs to third class functional unit. The Ethercat bus is an integral equipment bus of the single crystal furnace, and is suitable for most high-speed communication requirements of industrial sites. The UART interface and the IO interface are used for external IO equipment communication, and the difference is that the UART interface is high in speed, less in line, small in interference, low in speed and more in line, and is usually used for supplementing when the chip interface is insufficient; in view of the difference between the two, the important functional components are communicated by adopting a UART interface, and a state feedback unit, other sensors and the like are communicated by supplementing an IO interface; in addition, the UART interface can be used for program debugging of a control unit of the single crystal furnace pull head coupler. I2C is a serial, half duplex bus, mainly used for communication between short-range, low-speed chips. Note that, the interface types of the access control unit 301 (Ethercat interface, UART interface, I2C interface, and IO interface are shown in the figures) are only for matching with the interfaces of the devices of the access control unit 301, and are not limiting to the disclosure.

The disclosure also provides a single crystal furnace pulling head, which is connected with the single crystal furnace pulling head coupler 30, controls each functional component of the single crystal furnace pulling head through the single crystal furnace pulling head coupler 30, and obtains operation data from each functional component.

Those of skill in the art will appreciate that in one or more of the examples described above, the functions described in this disclosure may be implemented in hardware, software, firmware, or any combination thereof. When implemented in software, these functions may be stored on or transmitted over as one or more instructions or code on a computer-readable medium. Computer-readable media includes both computer storage media and communication media including any medium that facilitates transfer of a computer program from one place to another. A storage media may be any available media that can be accessed by a general purpose or special purpose computer.

It should be noted that: the embodiments described in the present disclosure may be arbitrarily combined without any collision.

The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention.

Claims (13)

1. A single crystal furnace pull head coupler, the coupler comprising: the control unit is connected between the upper computer and all the functional components of the lifting head;

The control unit is used for acquiring a target control signal;

Transmitting the target control signal to a target functional component of the pull head so as to control the target functional component; the target functional components are components controlled by target control signals in all the functional components;

and transmitting the target operation data acquired from at least one functional component to the upper computer.

2. The coupler of claim 1, wherein the coupler comprises a plurality of coupling elements,

The control unit is specifically configured to transmit the target control signal to the target functional component through a first path between the control unit and the target functional component when the target functional component belongs to a first type of functional component, where all interfaces of the first type of functional component are adapted to interfaces of the control unit;

and transmitting the target operation data acquired from at least one functional component belonging to the first type of functional components to the upper computer through the first channel.

3. The coupler according to claim 2, characterized in that it further comprises an external communication unit connected between the control unit and the functional components of the second type, all interfaces of the functional components of the second type being not adapted to interfaces of the control unit;

the external communication unit is used for receiving the initial control signal sent by the control unit under the condition that the target functional component belongs to the second class functional component;

Resolving the initial control signal into the target control signal;

Analyzing the initial operation data acquired from the target functional component into the target operation data;

The control unit is specifically configured to transmit the target control signal to the target functional component through a second path among the control unit, the external communication unit, and the target functional component;

and transmitting the target operation data acquired from at least one functional component belonging to the second type of functional components to the upper computer through the second path.

4. The coupler of claim 3, wherein the coupler comprises,

The control unit is specifically configured to transmit, through the first path, or the second path, the target control signal and the target operation data when the target functional component is a third type functional component, where the third functional component includes: an interface adapted to the control unit and an interface not adapted to the control unit.

5. The coupler of claim 2, wherein the coupler comprises a coupler body,

In the case that the target functional component belongs to a first type of functional component, a plurality of first passages are included between the control unit and the target functional component;

The control unit is specifically configured to switch to the next first path communication in case of a failure of one first path communication.

6. The coupler of claim 3, wherein the coupler comprises,

In the case that the target functional component belongs to a second type of functional component, a plurality of second passages are included between the control unit and the target functional component;

The control unit is specifically configured to switch to the next second path communication in case of a failure of one second path communication.

7. The coupler of claim 1, wherein the target feature is an electrical slip ring, the coupler further comprising: a first anti-noise unit;

The first anti-noise unit is connected with the electric slip ring of the lifting head and is used for reducing electromagnetic interference caused by the electric slip ring of the lifting head.

8. The coupler of claim 1, wherein the target feature is a sensor, the coupler further comprising: a second anti-noise unit;

The second anti-noise unit is connected with the sensor of the lifting head and used for reducing the interference of the sensor on the control unit.

9. The coupler of claim 1, wherein the coupler further comprises: a state feedback unit;

The state feedback unit is used for monitoring interfaces of the control unit and outputting an alarm signal under the condition that the voltage value of any interface is not the corresponding rated voltage value.

10. The coupler of claim 9, wherein the state feedback unit comprises: and the prompting lamp is used for prompting interface faults of the control unit.

11. The coupler of claim 9, wherein the state feedback unit further comprises: and the buzzer is used for sending out alarm prompt sound under the condition of interface failure of the control unit.

12. A coupler according to claim 3, wherein the external communication unit comprises: analog-to-digital conversion chip set, bridge driving chip set, transceiver;

the analog-to-digital conversion chip set is used for converting an analog signal into a digital signal;

the bridge driving chip set is used for converting the resistance value into a voltage signal;

the transceiver is used to bridge the control unit and the functional components.

13. A single crystal furnace pull head characterized in that the single crystal furnace pull head is connected with the single crystal furnace pull head coupler of any one of claims 1 to 12, each functional component of the single crystal furnace pull head is controlled by the single crystal furnace pull head coupler, and operation data is acquired from each functional component.