CN118218328B - DOA positioning-based laser processing method and system with programmable beam tracking and zooming functions - Google Patents

DOA positioning-based laser processing method and system with programmable beam tracking and zooming functions Download PDF

Info

Publication number
CN118218328B
CN118218328B CN202410628228.9A CN202410628228A CN118218328B CN 118218328 B CN118218328 B CN 118218328B CN 202410628228 A CN202410628228 A CN 202410628228A CN 118218328 B CN118218328 B CN 118218328B
Authority
CN
China
Prior art keywords
area
laser
target position
data
cleaned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202410628228.9A
Other languages
Chinese (zh)
Other versions
CN118218328A (en
Inventor
曹崇梓
耿在明
王义平
董晓英
朱君
陈涛
黄奎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Three Gorges Jinsha River Yunchuan Hydropower Development Co ltd
Original Assignee
Three Gorges Jinsha River Yunchuan Hydropower Development Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Three Gorges Jinsha River Yunchuan Hydropower Development Co ltd filed Critical Three Gorges Jinsha River Yunchuan Hydropower Development Co ltd
Priority to CN202410628228.9A priority Critical patent/CN118218328B/en
Publication of CN118218328A publication Critical patent/CN118218328A/en
Application granted granted Critical
Publication of CN118218328B publication Critical patent/CN118218328B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning In General (AREA)

Abstract

The invention discloses a laser processing method and a system for tracking and zooming programmable light beams based on DOA positioning, which relate to the technical field of laser processing and comprise the following steps of observing a region to be cleaned through a three-dimensional measuring device coaxially arranged on a laser cleaning device; according to the calculated data, calculating angle vector data Z 0 of a target position on an ideal focal plane of the operation of a selected area of the area to be cleaned relative to the laser cleaning device based on a DOA positioning algorithm; setting parameters of cleaning operation in a control system of the laser cleaning device, and performing simulation verification; executing laser cleaning operation and simultaneously carrying out measurement and collection; comparing and fitting the measured and collected real angle vector data; dynamically adjusting a space distance vector and compensating in real time based on the comparison fitting result; judging whether the pollutants are cleaned and removed. The invention is beneficial to realizing accurate cleaning and removal of the selected area with the attached pollutants.

Description

DOA positioning-based laser processing method and system with programmable beam tracking and zooming functions
Technical Field
The invention relates to the technical field of laser processing, in particular to a laser processing method and a system for programmable beam tracking zoom based on DOA positioning.
Background
In recent years, with the gradual perfection of electric power facilities in China, the electric power generation capacity is frequently created and increased, and the advanced electric power storage means in the current stage are also in research and development, so that the pumped storage system becomes ballast for electric power storage; the hydroelectric generating set is a core part in the pumped storage system, the hydroelectric generating set comprises a thrust mirror plate, a reasoning bracket bottom surface, a rotor flange and the like which are used as precise matching surfaces of large parts and are matched and connected with other parts, the surface quality of the precise matching surfaces determines the service performance of the hydroelectric generating set, but the working conditions are complex (factors such as flushing water erosion, cavitation and oil film deterioration) during service, non-hard pollutants such as scale and oil stain are easily attached to local areas of the surfaces at random, and if the maintenance and the cleaning are not performed in time, the attached pollutants on the surfaces during continuous service can cause scratch, scratch and other damage to the surfaces; when cleaning operation is carried out, the traditional manual work closely uses chemical cleaning agent to wipe or dry ice and high-pressure water jet to spray, and cleaning work efficiency is low, waste liquid pollutes the environment, and danger coefficient is high.
While the existing laser cleaning technology can remove the surface-attached pollutants in a high-efficiency and environment-friendly way through continuous optimization iteration, when the components of the pollutants are complex and are randomly distributed in a local area of the surface of a precise part, the existing laser cleaning technology is difficult to clean the surface of the precise part in a region selection way, and the process parameters are required to be repeatedly cleaned according to the cleaning effect of the attached pollutants, so that when the laser cleaning operation is repeatedly performed, the problem that the damage of the laser cleaning to the surface of a substrate is extremely small after the cleaning limit interferes to the surface area without the attached pollutants is solved, the problem that the precise surface of the mating surface is ablated and damaged coarsely in different degrees is solved when the precise surface of the mating surface is repeatedly interfered to the precise surface without the attached pollutants for many times, and the surface quality and the surface precision are damaged.
Therefore, the problem that the precision surface of the matching surface is damaged and coarsened to different degrees due to interference of the laser cleaning of the surface area without the attached pollutant when the attached pollutant is solved.
Disclosure of Invention
The present invention has been made in view of the above-described problems occurring in the conventional laser cleaning technology.
Therefore, the problem to be solved by the present invention is how to provide a method and a system which do not interfere with the remaining area without attached contaminants, and at the same time avoid damage and coarsening during cleaning of attached contaminants, and affect the surface quality and profile accuracy of precision parts.
In order to solve the technical problems, the invention provides the following technical scheme:
In a first aspect, an embodiment of the present invention provides a laser processing method based on DOA positioning and programmable beam tracking zoom, which includes observing a region to be cleaned by a three-dimensional measurement device coaxially installed on a laser cleaning device, obtaining area data A of the region to be cleaned, and calculating a maximum scan field range area A 0; calculating angle vector data Z 0 of a target position on an ideal focal plane of a selected area operation of a to-be-cleaned area relative to a laser cleaning device based on a DOA positioning algorithm according to the calculated maximum scanning field range area A 0,; setting parameters of cleaning operation in a control system of the laser cleaning device, and carrying out simulation verification of contour and path scanning filling before the cleaning operation in the range of a target position area A x of the operation of the selected area through infrared indication light; performing laser cleaning operation within the range of the target position area A x of the selected area operation according to the obtained simulation verification data, simultaneously performing measurement and collection, and performing comparison fitting on the real angle vector data obtained by measurement and collection; dynamically adjusting a space distance vector and compensating in real time based on the comparison fitting result; the surface is irradiated by an ultraviolet lamp and is checked by combining machine vision to determine whether the pollutant attached to the surface of the target position for the selected region operation is cleaned and removed.
As a preferable scheme of the programmable beam tracking zoom laser processing method based on DOA positioning, the invention comprises the following steps: the area data A of the area to be cleaned is obtained, and the area A 0 of the maximum scanning field range is calculated to determine and record the number of times of selecting the area to be cleaned for completing the laser cleaning operation and the target position area A x data of each selected area operation;
the expression of the selection times N 0 is as follows:
；
The target position area A x is less than or equal to the maximum scan field range area A 0.
As a preferable scheme of the programmable beam tracking zoom laser processing method based on DOA positioning, the invention comprises the following steps: the calculation process of the angle vector data Z 0 is as follows: setting the position vector of the laser cleaning device as S= [ S x,Sy,Sz ], setting the target position vector of the to-be-cleaned area of the surface of the precision part as T= [ T x,Ty,Tz ], and calculating the data of the angle vector Z 0 of the target position relative to the laser cleaning device based on a DOA positioning algorithm, wherein the calculation mode is as follows:
；
Wherein, theta 1 is the azimuth angle true value of the target position of the selected area measured before the cleaning operation reaching the laser cleaning device; θ 2 is the true elevation angle value of the laser cleaning device measured before the cleaning operation reaching the target position in the rectangular coordinate system; z 0 is the angular vector data of the target position of the selected area measured before the cleaning operation relative to the laser cleaning device.
As a preferable scheme of the programmable beam tracking zoom laser processing method based on DOA positioning, the invention comprises the following steps: when the laser cleaning operation is executed, the three-dimensional measuring device is set to measure and collect every 5 s; and the comparison fitting is performed by taking the area A x of the target position covered by the current laser focusing light spot scanning filling in the selected area as the real angle vector data Z 1 of the real target position relative to the laser cleaning device, and comparing and fitting the real angle vector data Z 1 obtained by measurement and collection with the real angle vector data Z 0.
As a preferable scheme of the programmable beam tracking zoom laser processing method based on DOA positioning, the invention comprises the following steps: the process of comparing and fitting the true angle vector data Z 1 and Z 0 is as follows: the three-dimensional measurement camera observes and calibrates when the laser does not emit light and the laser emits light and has measurement noise errors, the area scanned and filled by the laser focusing light spot is regarded as a nonlinear relation between a real angle vector Z 1 of a real target position relative to the laser cleaning device and a target position vector T and a laser cleaning device position vector S when the real target position is in actual cleaning operation, and a calculation formula is as follows:
；
The measured noise error n is respectively marked as an azimuth measured noise error vector n 1 and an elevation measured noise error vector n 2, i.e., n= (n 1,n2), which are used for more accurately expressing the spatial vector data of the measured noise error, so as to facilitate compensation and correction.
As a preferable scheme of the programmable beam tracking zoom laser processing method based on DOA positioning, the invention comprises the following steps: the step of dynamically adjusting the spatial distance vector and compensating in real time based on the comparison fitting result comprises the steps of editing and calculating a phase diagram through a phase modulation technology of a spatial light modulator by adjusting spatial distance vector data L 0, diffracting incident laser into outgoing laser beams with different focal lengths, forming a plurality of focuses along the laser focusing propagation direction, realizing the traceable zooming of the laser beams in the irradiation focusing direction, compensating the spatial distance vector data L 0 in real time until angle vector data Z 1=Z0 is compared and fitted, and achieving the accurate cleaning and removal of the attached pollutants within the range of the target position area A x.
As a preferable scheme of the programmable beam tracking zoom laser processing method based on DOA positioning, the invention comprises the following steps: the step of irradiating the surface by an ultraviolet lamp and checking whether the attached pollutant is cleaned and removed in the target position area of the selected area operation by combining machine vision is as follows: installing an ultraviolet light source, and selecting ultraviolet rays with emission wavelength range near a fluorescence excitation peak value of the pollutant; shooting fluorescent images by using a high-sensitivity industrial camera, collecting a plurality of fluorescent images, combining the position change of an illumination light source to obtain different angle information, guiding the plurality of images into a computer for image correction, and eliminating the influence caused by the position change of the light source; extracting a pixel region of the fluorescent part by utilizing a color recognition function of an image processing algorithm; counting the number of pixels in a fluorescence area, and calculating the proportion P1 of the whole image area, wherein the formula is as follows:
；
Wherein X represents the area of the whole image, expressed by pixel number, h (z i) represents the processing function of fluorescence intensity, z i is the fluorescence intensity value of the ith pixel, N is the number of total pixels in the image, and G is a logarithmic function for ensuring that the ratio P1 is within a reasonable range; a statistical function of fluorescent pixels for a region of boundary points a, b, c, d; and (3) counting the area C of the whole target detection area, and finally obtaining the area ratio of the pollutant:
；
Wherein C represents the area of the whole target detection area, M is the total measurement point number in the target detection area, f (i) is the pollution characteristic of the ith point, and lambda is an adjustment parameter for controlling the growth rate of an exponential function; setting an area proportion threshold value of the allowable residual of the pollutants, and if the proportion is higher than the set threshold value, indicating that the pollutants remain and the cleaning is needed to be continued; if the ratio is less than or equal to the threshold, the contaminant is cleaned.
In a second aspect, the present invention provides a programmable beam tracking zoom laser processing system based on DOA positioning, which further solves the problems existing in the prior laser cleaning technology, and the embodiment comprises: the three-dimensional measurement module is used for observing the area to be cleaned, acquiring area data A and calculating the area A 0 of the maximum scanning field range; meanwhile, based on the set spatial distance and angle data of the position vector S of the laser cleaning device and the target position, calculating data of the target position vector T of the to-be-cleaned area on the surface of the precision part; the DOA positioning calculation module is used for calculating angle vector data Z 0 of the target position based on a DOA algorithm; the control system module is used for setting parameters of cleaning operation, and carrying out infrared light simulation verification and light-emitting cleaning processing; the cleaning execution module is used for executing laser cleaning operation on the target area, and collecting data measured by the three-dimensional measurement module and calculated by the DOA positioning calculation module every 5 s; the data processing and comparing module is used for processing the data collected by the cleaning execution module and comparing and fitting the obtained real angle vector data Z 1 and Z 0; the compensation control module is used for editing, calculating and adjusting the space distance vector according to the comparison result through the phase modulation technology of the spatial light modulator, and compensating in real time; and the verification module is used for checking whether the pollutants attached to the target position area of the selected area operation are cleaned and removed or not through the irradiation surface of the ultraviolet lamp and the machine vision.
In a third aspect, embodiments of the present invention provide a computer apparatus comprising a memory and a processor, the memory storing a computer program, wherein: the computer program when executed by a processor implements any step of the programmable beam tracking zoom based on DOA positioning laser machining method according to the first aspect of the invention.
In a fourth aspect, embodiments of the present invention provide a computer-readable storage medium having a computer program stored thereon, wherein: the computer program when executed by a processor implements any step of the programmable beam tracking zoom based on DOA positioning laser machining method according to the first aspect of the invention.
The invention has the beneficial effects that the high-energy laser beam for carrying out cleaning processing based on DOA positioning guide realizes the precise cleaning operation of selecting areas of the surface of the mating surface of the precise part, which is attached with pollutants, in a three-dimensional space, thereby avoiding the interference to the area without the attached pollutants during the cleaning operation of the high-energy laser beam to cause the ablation, damage and coarsening of the precise surface of the mating surface in different degrees and damaging the surface quality and the surface precision of the mating surface; according to the invention, incident laser is diffracted into outgoing laser beams with different focal lengths, so that a plurality of focal points are generated along the laser focusing propagation direction, the laser beams can be tracked and zoomed in the irradiation focusing direction, so that the focal length of the laser focusing light spot which is scanned at high speed in the cleaning operation range of a selected area can be kept when the space vector data of the true position is dynamically changed, the measuring noise error is corrected, and the accurate cleaning and removal of the selected area of the attached pollutant are facilitated.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Wherein:
Fig. 1 is a schematic diagram of a laser processing method based on the DOA positioning in example 1.
Fig. 2 is a schematic diagram of correcting a measurement noise error of a true position relative to an ideal focal plane position based on the DOA positioning in embodiment 1.
Fig. 3 is a schematic view of an optical path of a laser beam tracking a zoom compensation focal length in an irradiation focusing direction in embodiment 2.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways other than those described herein, and persons skilled in the art will readily appreciate that the present invention is not limited to the specific embodiments disclosed below.
Further, reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic can be included in at least one implementation of the invention. The appearances of the phrase "in one embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments.
Example 1
Referring to fig. 1 and 2, a first embodiment of the present invention provides a programmable beam tracking zoom laser processing method based on DOA positioning, which includes the steps of:
S1: and observing the area to be cleaned by a three-dimensional measuring device coaxially arranged on the laser cleaning device to obtain area data A of the area to be cleaned, and calculating the area A 0 of the maximum scanning field range.
Further, the boundary range of the area to be cleaned on the surface of the precise part is determined before the laser cleaning operation, after the laser cleaning device is installed at the laser focusing position of the safe distance, the area to be cleaned is observed through the three-dimensional measuring device coaxially installed on the laser cleaning device, and the area data A of the area to be cleaned can be obtained based on the observation.
The expression of the selection frequency N 0 is calculated according to the maximum scanning field range area A 0 of the laser cleaning device in the focusing plane cleaning operation and the area data A of the area to be cleaned, and is as follows:
；
and determining and recording the number of times of selecting the area to be cleaned to finish the laser cleaning operation (x times in total) and the target position area A x data of each selected area operation, and A x≤A0.
S2: according to the calculated data, angle vector data Z 0 of the target position on the ideal focal plane of the selected area operation of the area to be cleaned relative to the laser cleaning device is calculated based on the DOA positioning algorithm.
The calculated data is the area A 0 of the maximum scanning field range of laser cleaning processing, and the scanning field is a regular square or rectangle on any X-Y, X-Z, Y-Z plane in a three-dimensional space.
The area of the center point (zero point of the center of the scan field) of the area a 0 of the maximum scan field range within the area a of the area to be cleaned is an ideal focal plane.
Furthermore, the laser cleaning processing is to control the laser beam to focus on the area to be cleaned through a scanning galvanometer, namely, any X-Y, X-Z, Y-Z plane, rapidly move a focusing light spot in the scanning field range, and realize the selective cleaning of the area to be cleaned according to a certain track filling mode (the laser cleaning principle is described herein):
S2.1.1: the laser beam focusing spot is in ideal focal length (the focusing spot has focal depth, but the tolerance value of focal depth compensation focal position is not too large) only in a certain range (near the zero point of the scanning field) of the central point area of different planes in the X-Y, X-Z, Y-Z plane scanning field range, the working focal length of the laser focusing spot in most areas in the area A 0 of the maximum scanning field range is in dynamic positive defocus, and the optical characteristics of the laser beam are changed after defocus.
S2.1.2: the laser cleaning adopts a vibrating mirror to control the focus light spot of the laser beam, and a motor drives a plurality of groups of reflecting mirrors to rapidly deflect at a certain angle, so that the laser beam can realize scanning filling of various patterns in the X-Y, X-Z, Y-Z plane direction (known and mature technology), but in the dynamic scanning filling process, the plurality of groups of reflecting mirrors and f-theta field mirrors for transmitting the focused laser beam can also generate a thermal effect due to heat accumulated during laser beam transmission, so that the laser focusing light spot deviates from the set scanning filling boundary limit during high-speed scanning filling to generate a drift phenomenon.
S2.1.3: when the surface of a precise part is cleaned in a selective area, the surface pollution area is often local and irregular adhesion pollution, the area to be cleaned can be selected only through the three-dimensional measuring device identification frame during cleaning, the measured space vector data before laser cleaning is even more accurate, the three-dimensional measuring device can guide the selective area cleaning to generate measurement noise errors in the processing process due to the problems existing in S2.1.1 and S2.1.2 during the laser cleaning processing process, the problem that the damage of the laser cleaning to the surface of a substrate is extremely small is further caused, the problem that the precise surface of the mating surface is ablated and damaged coarsening to different degrees due to repeated interference when the precise part surface is repeatedly interfered to the precise surface of the mating surface without adhesion pollutant is solved, and the surface quality and the surface precision are damaged.
The DOA positioning algorithm can calculate the spatial vector data measured by the three-dimensional measuring device before and during cleaning, so the invention realizes accurate selective cleaning based on the DOA positioning algorithm by dynamically zooming the laser beam by combining a phase modulation technology and further correcting noise error data by adjusting spatial distance vector data L 0 of the real position of the laser focusing light spot relative to the ideal focal plane position of the laser focusing light spot.
As shown in fig. 1 and 2, by coaxially installing a three-dimensional measuring device on a laser cleaning device to observe and calibrate spatial vector data of a region to be cleaned on the surface of a precision part and the installation position of the laser cleaning device under a three-dimensional rectangular coordinate system, setting the position vector of the laser cleaning device as s= [ S x,Sy,Sz ], setting the target position vector of the region to be cleaned on the surface of the precision part as t= [ T x,Ty,Tz ], and synchronously calculating data of an angle vector Z 0 of the target position relative to the laser cleaning device based on a DOA positioning algorithm, wherein the calculation mode is expressed as follows:
；
Wherein, theta 1 is the azimuth angle true value of the target position of the selected area measured before the cleaning operation reaching the laser cleaning device; θ 2 is the true elevation angle value of the laser cleaning device measured before the cleaning operation reaching the target position in the rectangular coordinate system; z 0 is the angular vector data of the target position of the selected area measured before the cleaning operation relative to the laser cleaning device.
Based on the angle model given by the theta 1 and theta 2 calculation modes, the angle model can be regarded as a linear relation between the angle vector Z 0 of the three-dimensional rectangular coordinate system, the target position vector T and the position vector S of the laser cleaning device in a three-dimensional space in an ideal state (the linear relation refers to a first-order functional relation between two variables, namely, the coordinate vectors of the two variables in the three-dimensional rectangular coordinate system in the three-dimensional space can always keep a straight line on a plane).
S3: parameters of the cleaning operation are set in a control system of the laser cleaning device, and simulation verification of contour and path scanning filling before the cleaning operation is carried out within the range of a target position area A x of the selected area operation through infrared indication light.
Preferably, the parameters of the cleaning operation include laser power, pulse width, frequency, scanning speed of a laser focusing spot during the laser cleaning operation, track scanning filling mode and the like.
S4: and executing laser cleaning operation within the range of the target position area A x of the selected area operation according to the obtained simulation verification data, simultaneously carrying out measurement and collection, and carrying out comparison fitting on the real angle vector data obtained by measurement and collection.
During laser light-emitting cleaning operation, the three-dimensional measuring device is set to measure and collect every 5s (the laser focusing light spot moves at a high speed within a certain area range, the situation that the data volume processed during real-time uninterrupted measurement and collection is overlarge can be avoided during interval 5s measurement), the target position area A x of the current laser focusing light spot scanning filling coverage is used as real angle vector data Z 1 of a real target position relative to the laser cleaning device within a selected area range, and the real angle vector data Z 1 obtained through measurement and collection and Z 0 are subjected to comparison fitting.
It should be noted that, the interval 5s is a median value in time, and the 5s interval is because the laser cleaning is a processing application for realizing surface cleaning by high-speed scanning and filling of focal spots, the surface area of the high-speed scanning and filling of focal spots is too small when the interval is too short (< 1 s), and the data processing work is greatly increased by measuring the collected data; when the time interval is too long (more than 10 s), the focal spot scans and fills the surface area at a high speed too much, and when the surface area facing the local attached pollution is complex, the measurement acquisition data with too long time interval cannot correct the measurement error precision well, and the precision of the selected area cleaning can be influenced.
Specifically, when the cleaning operation is actually performed in the three-dimensional space, the laser focusing light spot formed by focusing the laser beam emitted by the laser cleaning device on the target position is moved at a high speed within a certain area range of the surface of the target position to scan the filling track so as to realize the laser cleaning operation.
Therefore, errors such as measurement noise and the like are necessarily existed in the observation and calibration of the three-dimensional measurement camera when no light is emitted and the laser emits light, a certain area region scanned and filled by a laser focusing light spot can be regarded as a real target position to be in a nonlinear relation with a real angle vector Z 1 of the laser cleaning device, a target position vector T and a laser cleaning device position vector S, the measurement noise error n can be respectively marked as an azimuth measurement noise error vector n 1, an elevation angle measurement noise error vector n 2, namely n= (n 1,n2), and the expression is as follows:
；
Wherein, n= (n 1,n2) is used for more accurate expression and measures the space vector data of noise error, is convenient for compensate the correction.
S5: and dynamically adjusting the space distance vector based on the comparison fitting result and compensating in real time.
Preferably, based on the comparison and fitting result in step S4, the spatial distance vector data L 0 of the true position of the current laser focusing spot in the scanned and filled region relative to the ideal focal plane position of the laser focusing spot is controlled and adjusted to correct the measurement noise error n.
Specifically, angle vector data Z 0 and spatial distance vector data L 0 of a target position relative to a laser cleaning device are calculated based on a DOA positioning algorithm, real angle vector data Z 1 obtained by real measurement and collection are compared and fitted with Z 0 during actual laser light-emitting cleaning operation, and based on data of an azimuth angle measurement noise error vector n 1 and an elevation angle measurement noise error vector n 2 obtained in a comparison and fitting result, spatial distance vector data L 0 of a real position of a laser focusing light spot measured during laser cleaning operation relative to an ideal focal plane position of the laser focusing light spot is adjusted to correct measurement noise error n, so that high-energy laser beams are guided to achieve accurate cleaning and removal of attached pollutants.
Preferably, the adjustment of the spatial distance vector data L 0 is implemented by performing edit calculation on a phase map by a spatial light modulator (the spatial light modulator performs phase modulation on the laser beam, which is similar to adding an independently controlled programmable Diffraction Optical Element (DOE) to shape the laser beam, so as to change the light intensity distribution form and energy distribution of the laser beam), diffracting the incident laser into outgoing laser beams with different focal lengths, forming a plurality of focuses along the laser focusing propagation direction, realizing the traceable zooming of the laser beams in the irradiation focusing direction, compensating the spatial distance vector data L 0 in real time until the angle vector data Z 1=Z0 is compared and fitted, and achieving the accurate cleaning and removal of the attached pollutants within the range of the target position area a x.
S6: the surface is irradiated by an ultraviolet lamp and is checked by combining machine vision to determine whether the pollutant attached to the surface of the target position for the selected region operation is cleaned and removed.
Further, an ultraviolet light source is installed, ultraviolet light with the emission wavelength range being near the fluorescence excitation peak value of the pollutant is selected to be aligned to the target area, the ultraviolet light source is started to irradiate the surface, and the pollutant emits fluorescence with a specific wavelength range under the excitation of the ultraviolet light.
Shooting fluorescent images by using a high-sensitivity industrial camera, collecting a plurality of fluorescent images, combining the position change of an illumination light source to obtain different angle information, guiding the plurality of images into a computer for image correction, and eliminating the influence caused by the position change of the light source; extracting a pixel region of the fluorescent part by utilizing a color recognition function of an image processing algorithm; counting the number of pixels in a fluorescence area, and calculating the proportion P1 of the whole image area, wherein the formula is as follows:
；
wherein X represents the area of the whole image, expressed in terms of pixel numbers, Is a double integral representing the statistical function of the fluorescent pixels in a particular region of the image (defined by the boundaries a, b, c, d), h (z i) represents the processing function of the fluorescent intensity, z i is the fluorescent intensity value of the ith pixel, N is the number of total pixels in the image, and G is a logarithmic function to ensure that the ratio P1 is within a reasonable range, especially when the fluorescent region is particularly bright or maldistributed.
；
Where k is a constant greater than 0 for increasing the weight to the high intensity fluorescent pixel.
And then counting the area S of the whole target detection area to finally obtain the area ratio of the pollutant:
；
wherein C represents the area of the whole target detection area, M is the total measurement point number in the target detection area, f (i) is the pollution characteristic of the ith point, and lambda is an adjustment parameter for controlling the growth rate of the exponential function.
Setting an area proportion threshold value of the pollutant allowed to remain, such as 5%, if the proportion is higher than the set threshold value, the pollutant is left, and the cleaning is needed to be continued; if the ratio is less than or equal to the threshold, the contaminant is cleaned.
And repeating the steps S3-S5 if the cleaning is not finished, and increasing the cleaning times of the cleaning operation area successively according to the manual process experience until the attached pollutant is cleaned within the range of the target position area A x of the selected area operation to reach the cleaning effect, and then replacing the target position of the next selected area operation.
And repeating the steps S2-S6 until all boundary ranges of the to-be-cleaned area on the surface of the precise part are completed, and completing the laser cleaning operation.
The present embodiment also provides a programmable beam tracking zoom laser processing system based on DOA positioning, comprising: the three-dimensional measurement module is used for observing the area to be cleaned, acquiring area data A and calculating the area A 0 of the maximum scanning field range; meanwhile, based on the set spatial distance and angle data of the position vector S of the laser cleaning device and the target position, calculating data of the target position vector T of the to-be-cleaned area on the surface of the precision part; the DOA positioning calculation module is used for calculating angle vector data Z 0 of the target position based on a DOA algorithm; the control system module is used for setting parameters of cleaning operation, and carrying out infrared light simulation verification and light-emitting cleaning processing;
The cleaning execution module is used for executing laser cleaning operation on the target area, and collecting data measured by the three-dimensional measurement module and calculated by the DOA positioning calculation module every 5 s; the data processing and comparing module is used for processing the data collected by the cleaning execution module and comparing and fitting the obtained real angle vector data Z1 and Z0; the compensation control module is used for editing, calculating and adjusting the space distance vector according to the comparison result through the phase modulation technology of the spatial light modulator, and compensating in real time; and the verification module is used for checking whether the pollutants attached to the target position area of the selected area operation are cleaned and removed or not through the irradiation surface of the ultraviolet lamp and the machine vision.
The embodiment also provides a computer device, which is suitable for the situation of a programmable beam tracking zoom laser processing method based on DOA positioning, and comprises the following steps: a memory and a processor; the memory is used for storing computer executable instructions, and the processor is used for executing the computer executable instructions to realize the laser processing method based on the programmable beam tracking zoom of DOA positioning as proposed by the embodiment.
The computer device may be a terminal comprising a processor, a memory, a communication interface, a display screen and input means connected by a system bus. Wherein the processor of the computer device is configured to provide computing and control capabilities. The memory of the computer device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and computer programs in the non-volatile storage media. The communication interface of the computer device is used for carrying out wired or wireless communication with an external terminal, and the wireless mode can be realized through WIFI, an operator network, NFC (near field communication) or other technologies. The display screen of the computer equipment can be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer equipment can be a touch layer covered on the display screen, can also be keys, a track ball or a touch pad arranged on the shell of the computer equipment, and can also be an external keyboard, a touch pad or a mouse and the like.
The present embodiment also provides a storage medium having stored thereon a computer program which, when executed by a processor, implements a laser processing method for implementing a programmable beam tracking zoom based on DOA positioning as proposed in the above embodiments; the storage medium may be implemented by any type or combination of volatile or nonvolatile Memory devices, such as static random access Memory (Static Random Access Memory, SRAM), electrically erasable Programmable Read-Only Memory (ELECTRICALLY ERASABLE PROGRAMMABLE READ-Only Memory, EEPROM), erasable Programmable Read-Only Memory (ErasableProgrammable Read Only Memory, EPROM), programmable Read-Only Memory (PROM), read-Only Memory (ROM), magnetic Memory, flash Memory, magnetic disk, or optical disk.
In summary, the high-energy laser beam for cleaning is guided to be performed based on DOA positioning, and the precise cleaning operation of selecting the local area of the surface of the mating surface of the precise part, which is attached with pollutants, is realized under the three-dimensional space, so that the problem that the precise surface of the mating surface is ablated and damaged and coarsened to different degrees due to interference to the area without the attached pollutants in the cleaning operation of the high-energy laser beam is avoided, and the surface quality and the profile precision are damaged; according to the invention, incident laser is diffracted into outgoing laser beams with different focal lengths, so that a plurality of focal points are generated along the laser focusing propagation direction, the laser beams can be tracked and zoomed in the irradiation focusing direction, so that the focal length of the laser focusing light spot which is scanned at high speed in the cleaning operation range of a selected area can be kept when the space vector data of the true position is dynamically changed, the measuring noise error is corrected, and the accurate cleaning and removal of the selected area of the attached pollutant are facilitated.
Example 2
Referring to table 1, for the second embodiment of the present invention, a comparison of the laser processing method of programmable beam tracking zoom based on DOA positioning with the prior art is given for further verification of the beneficial effects of the present invention.
Compared with other laser cleaning methods, the method is mainly characterized in that the method combines a three-dimensional measuring device to carry out selective cleaning on the pollutants attached to the surface of the precise part, and based on the DOA algorithm and the spatial light modulation technology, the laser beam is dynamically zoomed, and further, the measurement noise error data of the three-dimensional measuring device is corrected by adjusting the spatial distance vector data of the real position of the laser focusing light spot relative to the ideal focal plane position of the laser focusing light spot, so that the precise selective cleaning on the pollutants attached to the surface of the precise part is realized.
The comparison of the method with the traditional mechanical cleaning, chemical cleaning and other methods (from the aspects of cleaning efficiency, cleanliness and damage degree) can be referred to as the following table:
Table 1 effect of the invention compared with the prior art:
As shown in fig. 3, the adjustment of the spatial distance vector data L 0 of the real position of the laser focusing light spot measured during the laser cleaning operation relative to the ideal focal plane position of the laser focusing light spot is implemented by editing and calculating the phase diagram through the phase modulation technology of the spatial light modulator, the incident laser is diffracted into outgoing laser beams with different focal lengths to form a plurality of focal points along the laser irradiation focusing direction, so as to realize the tracking and zooming of the laser beams in the irradiation focusing direction, and the spatial distance vector data L 0 is compensated in real time until the fitted angle vector data Z 1=Z0 are compared, so that the precise cleaning operation can be implemented, when the contaminants attached to the surface of the precise component are removed through selective cleaning, the other regions without the contaminants attached are not interfered, and meanwhile, the damage condition during the removal of the contaminants attached is avoided, and the surface quality and the profile precision of the precise component are affected.
It should be noted that the above embodiments are only for illustrating the technical solution of the present invention and not for limiting the same, and although the present invention has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the present invention may be modified or substituted without departing from the spirit and scope of the technical solution of the present invention, which is intended to be covered in the scope of the claims of the present invention.

Claims (8)

1.基于DOA定位的可编程光束追踪变焦的激光加工方法，其特征在于：包括：1. A laser processing method with programmable beam tracking and zooming based on DOA positioning, characterized in that: 通过在激光清洗装置上同轴安装的三维测量装置观测待清洗区域，得到待清洗区域的面积数据A，并计算最大扫描场范围面积A0；The area to be cleaned is observed by a three-dimensional measuring device coaxially mounted on the laser cleaning device to obtain area data A of the area to be cleaned, and the maximum scanning field range area A 0 is calculated; 所述得到待清洗区域的面积数据A，并计算最大扫描场范围面积A0用于确定并记录待清洗区域完成激光清洗作业的选区次数和每次所选区作业的目标位置面积Ax数据；The area data A of the area to be cleaned is obtained, and the maximum scanning field range area A0 is calculated to determine and record the number of selected areas to complete the laser cleaning operation of the area to be cleaned and the target position area Ax data of each selected area operation; 所述选区次数N0的表达式如下：The expression of the number of selections N 0 is as follows: ； ; 目标位置面积Ax≤最大扫描场范围面积A0；Target position area A x ≤ maximum scanning field area A 0 ; 根据计算得到的最大扫描场范围面积A0，基于DOA定位算法计算出待清洗区域所选区作业的理想的焦平面上目标位置相对激光清洗装置的角度向量数据Z0；According to the calculated maximum scanning field range area A 0 , the angle vector data Z 0 of the target position on the ideal focal plane of the selected area to be cleaned relative to the laser cleaning device is calculated based on the DOA positioning algorithm; 所述角度向量数据Z0的计算过程如下：The calculation process of the angle vector data Z0 is as follows: 设定激光清洗装置的位置向量为S=[Sx,Sy,Sz]，精密零部件表面待清洗区域目标位置向量为T=[Tx,Ty,Tz]，基于DOA定位算法计算目标位置相对激光清洗装置的角度向量Z0的数据，计算方式为：The position vector of the laser cleaning device is set to S=[ Sx , Sy , Sz ], and the target position vector of the area to be cleaned on the surface of the precision component is set to T=[ Tx , Ty , Tz ]. The angle vector Z0 of the target position relative to the laser cleaning device is calculated based on the DOA positioning algorithm. The calculation method is: ； ; 其中，θ1为清洗作业前测量的所选区的目标位置到达激光清洗装置的方位角真实值；θ2为清洗作业前测量的激光清洗装置到达目标位置的直角坐标系下仰角真实值；Z0为清洗作业前测量的所选区的目标位置相对激光清洗装置的角度向量数据；Among them, θ1 is the true value of the azimuth angle of the target position of the selected area measured before the cleaning operation to the laser cleaning device; θ2 is the true value of the elevation angle of the laser cleaning device to the target position in the rectangular coordinate system measured before the cleaning operation; Z0 is the angle vector data of the target position of the selected area measured before the cleaning operation relative to the laser cleaning device; 在激光清洗装置的控制系统中设定清洗作业的参数，并通过红外指示光对所选区作业的目标位置面积Ax范围内进行清洗作业前的轮廓和路径扫描填充的模拟验证；The parameters of the cleaning operation are set in the control system of the laser cleaning device, and the contour and path scanning and filling simulation verification before the cleaning operation is performed on the target position area A x of the selected area operation through infrared indicator light; 根据得到的模拟验证数据对所选区作业的目标位置面积Ax范围内执行激光清洗作业，并同时每间隔5s进行测量收集，将测量收集得到的真实角度向量数据进行比对拟合；According to the obtained simulation verification data, the laser cleaning operation is performed within the target position area A x of the selected area, and at the same time, measurement and collection are performed every 5 seconds, and the real angle vector data obtained by the measurement and collection are compared and fitted; 基于比对拟合结果动态调整空间距离向量并实时补偿；Dynamically adjust the spatial distance vector based on the comparison and fitting results and compensate in real time; 通过紫外灯照射表面结合机器视觉检查所选区作业的目标位置面积内附着污染物是否清洗去除。The surface is illuminated by ultraviolet light and combined with machine vision to check whether the attached pollutants in the target position area of the selected area are cleaned and removed. 2.如权利要求1所述的基于DOA定位的可编程光束追踪变焦的激光加工方法，其特征在于：所述执行激光清洗作业时，三维测量装置设定为每间隔5s进行测量收集；2. The laser processing method with programmable beam tracking and zoom based on DOA positioning as claimed in claim 1, characterized in that: when performing the laser cleaning operation, the three-dimensional measurement device is set to perform measurement and collection every 5 seconds; 所述进行比对拟合为，将所选区范围内当前激光聚焦光斑扫描填充覆盖的目标位置面积Ax作为真实目标位置相对激光清洗装置的真实角度向量数据Z1，通过将测量收集得到的真实角度向量数据Z1与Z0进行比对拟合。The comparison and fitting is to use the target position area Ax scanned and filled by the current laser focus spot within the selected area as the real angle vector data Z1 of the real target position relative to the laser cleaning device, and compare and fit the real angle vector data Z1 collected by measurement with Z0 . 3.如权利要求2所述的基于DOA定位的可编程光束追踪变焦的激光加工方法，其特征在于：所述真实角度向量数据Z1与Z0进行比对拟合的过程如下：3. The laser processing method with programmable beam tracking and zoom based on DOA positioning as claimed in claim 2, characterized in that the process of comparing and fitting the real angle vector data Z1 and Z0 is as follows: 激光不出光和激光出光时三维测量相机观测和标定存在测量噪声误差，将实际清洗作业时激光聚焦光斑所扫描填充的面积区域作为真实目标位置，相对激光清洗装置的真实角度向量Z1与目标位置向量T和激光清洗装置位置向量S之间呈非线性关系，计算公式为：There are measurement noise errors in the observation and calibration of the 3D measurement camera when the laser is not emitting light or when the laser is emitting light. The area scanned and filled by the laser focus spot during the actual cleaning operation is taken as the real target position. The real angle vector Z1 relative to the laser cleaning device is nonlinearly related to the target position vector T and the laser cleaning device position vector S. The calculation formula is: ； ; 其中，将测量噪声误差n分别标记为方位角测量噪声误差向量n1和仰角测量噪声误差向量n2，即n=（n1，n2），用于更准确的表述测量噪声误差的空间向量数据，便于补偿修正。The measurement noise error n is marked as the azimuth measurement noise error vector n 1 and the elevation measurement noise error vector n 2 , ie n= (n 1 , n 2 ), for more accurately expressing the spatial vector data of the measurement noise error to facilitate compensation and correction. 4.如权利要求3所述的基于DOA定位的可编程光束追踪变焦的激光加工方法，其特征在于：所述基于比对拟合结果动态调整空间距离向量并实时补偿包括，4. The laser processing method with programmable beam tracking and zoom based on DOA positioning as claimed in claim 3, characterized in that: the dynamic adjustment of the spatial distance vector based on the comparison and fitting results and real-time compensation include: 空间距离向量数据L0的调节通过空间光调制器的相位调制技术对相位图进行编辑计算，将入射激光衍射成具备不同焦距的出射激光束，形成沿激光聚焦传播方向生成多个焦点，实现激光束在辐照聚焦方向可追踪变焦，实时补偿空间距离向量数据L0，直到对比拟合时角度向量数据Z1=Z0，达到对目标位置面积Ax范围内附着污染物的精准清洗去除。The spatial distance vector data L 0 is adjusted by editing and calculating the phase diagram through the phase modulation technology of the spatial light modulator, diffracting the incident laser into an outgoing laser beam with different focal lengths, forming multiple focal points along the laser focusing propagation direction, realizing the traceable zoom of the laser beam in the irradiation focusing direction, and compensating the spatial distance vector data L 0 in real time until the angle vector data Z 1 =Z 0 during comparison fitting, so as to achieve the precise cleaning and removal of the attached pollutants within the target position area A x . 5.如权利要求4所述的基于DOA定位的可编程光束追踪变焦的激光加工方法，其特征在于：所述通过紫外灯照射表面结合机器视觉检查判断所选区作业的目标位置面积内附着污染物是否清洗去除的步骤如下：5. The laser processing method based on DOA positioning and programmable beam tracking zoom as claimed in claim 4, characterized in that: the step of irradiating the surface with ultraviolet light combined with machine vision inspection to determine whether the attached contaminants in the target position area of the selected area are cleaned and removed is as follows: 安装紫外光源，选择发射波长范围为污染物的荧光激发峰值附近的紫外线；Install an ultraviolet light source and select ultraviolet light with an emission wavelength range close to the fluorescence excitation peak of the pollutants; 使用高灵敏工业相机拍摄荧光图像，采集多张荧光图像，结合照明光源位置变化获得不同角度信息，将多张图像导入计算机，进行图像校正，消除光源位置变化带来的影响；Use a highly sensitive industrial camera to capture fluorescence images, collect multiple fluorescence images, combine the changes in the position of the illumination light source to obtain information at different angles, import multiple images into a computer, perform image correction, and eliminate the impact of changes in the position of the light source; 利用图像处理算法的颜色识别功能，提取出荧光部分的像素区域；统计荧光区域像素数量，计算所占整个图像面积的比例P1，公式如下：The color recognition function of the image processing algorithm is used to extract the pixel area of the fluorescent part; the number of pixels in the fluorescent area is counted, and the proportion P1 of the entire image area is calculated. The formula is as follows: ； ; 其中，X代表整个图像的面积，用像素数表示，h(zi)表示荧光强度的处理函数，zi是第i个像素的荧光强度值，N是图像中总像素的数量，G 函数为一个对数函数，用于确保比例P1在一个合理的范围内；为边界点为a、b、c、d组成的区域的荧光像素的统计函数；Where X represents the area of the entire image, expressed in pixels, h(z i ) represents the processing function of the fluorescence intensity, z i is the fluorescence intensity value of the i-th pixel, N is the total number of pixels in the image, and the G function is a logarithmic function used to ensure that the ratio P1 is within a reasonable range; is the statistical function of the fluorescent pixels in the region composed of the boundary points a, b, c, and d; 统计整个目标检测区域的面积C，最终得到污染物面积占比：Count the area C of the entire target detection area, and finally get the pollutant area ratio: ； ; 其中，C代表整个目标检测区域的面积，M为目标检测区域内总的测量点数，f(i)为第i个点的污染特征，λ为调节参数，用于控制指数函数的增长速率；Where C represents the area of the entire target detection area, M is the total number of measurement points in the target detection area, f(i) is the pollution feature of the i-th point, and λ is the adjustment parameter used to control the growth rate of the exponential function; 设置污染物允许残留的面积比例阈值，若比例高于设置阈值，则表示污染物残留，需要继续清洗；若比例小于等于阈值，则表示污染物已清除干净。Set the area ratio threshold for the amount of pollutants allowed to remain. If the ratio is higher than the set threshold, it means that pollutants remain and need to be cleaned further; if the ratio is less than or equal to the threshold, it means that the pollutants have been removed. 6.基于DOA定位的可编程光束追踪变焦的激光加工系统，基于权利要求1~5任一所述的基于DOA定位的可编程光束追踪变焦的激光加工方法，其特征在于：包括：6. A laser processing system with programmable beam tracking and zoom based on DOA positioning, based on the laser processing method with programmable beam tracking and zoom based on DOA positioning according to any one of claims 1 to 5, characterized in that it comprises: 三维测量模块，用于观测待清洗区域，获取面积数据A和计算扫最大扫描场范围面积A0；同时基于设定的激光清洗装置的位置向量S与目标位置的空间距离与角度数据，计算得出精密零部件表面待清洗区域目标位置向量T的数据；The three-dimensional measurement module is used to observe the area to be cleaned, obtain the area data A and calculate the maximum scanning field range area A 0 ; at the same time, based on the spatial distance and angle data between the position vector S of the set laser cleaning device and the target position, the data of the target position vector T of the area to be cleaned on the surface of the precision parts is calculated; DOA定位计算模块，用于基于DOA算法计算目标位置的角度向量数据Z0;DOA positioning calculation module, used to calculate the angle vector data Z 0 of the target position based on the DOA algorithm; 控制系统模块，用于设定清洗作业的参数，进行红外光模拟验证和出光清洗加工；The control system module is used to set the parameters of the cleaning operation, perform infrared light simulation verification and light cleaning processing; 清洗执行模块，用于对目标区域执行激光清洗作业，同时每5s对三维测量模块测量和DOA定位计算模块计算的数据进行收集；The cleaning execution module is used to perform laser cleaning operations on the target area and collect data measured by the 3D measurement module and calculated by the DOA positioning calculation module every 5 seconds; 数据处理与比对模块，用于将清洗执行模块收集的数据进行处理，并对得到的真实角度向量数据Z1与Z0进行比对拟合；The data processing and comparison module is used to process the data collected by the cleaning execution module and compare and fit the obtained real angle vector data Z1 and Z0 ; 补偿控制模块，用于根据比对结果，通过空间光调制器的相位调制技术对相位图进行编辑计算调整空间距离向量，实时补偿；A compensation control module is used to edit and calculate the phase map and adjust the spatial distance vector through the phase modulation technology of the spatial light modulator according to the comparison result, and to compensate in real time; 校验模块，通过紫外灯照射表面结合机器视觉检查所选区作业的目标位置面积内附着污染物是否清洗去除。The verification module uses ultraviolet light to illuminate the surface and combines machine vision to check whether the attached contaminants in the target position area of the selected area are cleaned and removed. 7.一种计算机设备，包括存储器和处理器，所述存储器存储有计算机程序，其特征在于：所述处理器执行所述计算机程序时实现权利要求1~5任一所述的基于DOA定位的可编程光束追踪变焦的激光加工方法的步骤。7. A computer device, comprising a memory and a processor, wherein the memory stores a computer program, and wherein the processor implements the steps of the laser processing method with programmable beam tracking and zoom based on DOA positioning as described in any one of claims 1 to 5 when executing the computer program. 8.一种计算机可读存储介质，其上存储有计算机程序，其特征在于：所述计算机程序被处理器执行时实现权利要求1~5任一所述的基于DOA定位的可编程光束追踪变焦的激光加工方法的步骤。8. A computer-readable storage medium having a computer program stored thereon, characterized in that: when the computer program is executed by a processor, the steps of the laser processing method with programmable beam tracking and zoom based on DOA positioning as described in any one of claims 1 to 5 are implemented.
CN202410628228.9A 2024-05-21 2024-05-21 DOA positioning-based laser processing method and system with programmable beam tracking and zooming functions Active CN118218328B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202410628228.9A CN118218328B (en) 2024-05-21 2024-05-21 DOA positioning-based laser processing method and system with programmable beam tracking and zooming functions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202410628228.9A CN118218328B (en) 2024-05-21 2024-05-21 DOA positioning-based laser processing method and system with programmable beam tracking and zooming functions

Publications (2)

Publication Number Publication Date
CN118218328A CN118218328A (en) 2024-06-21
CN118218328B true CN118218328B (en) 2024-08-06

Family

ID=91508750

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202410628228.9A Active CN118218328B (en) 2024-05-21 2024-05-21 DOA positioning-based laser processing method and system with programmable beam tracking and zooming functions

Country Status (1)

Country Link
CN (1) CN118218328B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119870056A (en) * 2024-12-12 2025-04-25 中国神华能源股份有限公司神朔铁路分公司 Method, device, apparatus, storage medium, and program for controlling surface deposit
CN120563492B (en) * 2025-07-22 2026-01-16 广东立纬新材料科技有限公司 Sensor-based bar cleaning path self-adaption method and system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113134837A (en) * 2021-04-16 2021-07-20 浙江大学 Method for improving absolute positioning precision based on six-degree-of-freedom series mechanical arm
CN113385486A (en) * 2020-03-11 2021-09-14 山东省科学院激光研究所 Automatic laser cleaning path generation system and method based on line structured light
CN116765613A (en) * 2023-08-23 2023-09-19 中国长江电力股份有限公司 Precise surface nondestructive laser cleaning galvanometer system, cleaning equipment and method thereof
CN117030854A (en) * 2023-10-09 2023-11-10 常州诺清智能科技有限公司 Cleaning bottle detection device for cleaning machine

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007005636A2 (en) * 2005-06-30 2007-01-11 Controlled Semiconductor, Inc. Semiconductor failure analysis tool
JP2014014857A (en) * 2012-07-11 2014-01-30 Suzuki Motor Corp Image processing method, and image processing system
DE102016121644A1 (en) * 2016-11-11 2018-06-14 Jenoptik Automatisierungstechnik Gmbh Method and device for producing a weakening line in a planar workpiece along a predetermined contour by material removal by means of laser
CN106552998B (en) * 2016-11-21 2018-06-08 兰州理工大学 The method of estimation of laser index carving technological parameter and laser index carving method
JP7008942B2 (en) * 2017-12-21 2022-01-25 株式会社安川電機 Calibration method and calibration device
CN114042700B (en) * 2021-11-23 2023-05-12 贵州电网有限责任公司 High-efficient full-automatic profile high accuracy laser cleaning system
CN115358918A (en) * 2022-08-11 2022-11-18 熵智科技(深圳)有限公司 Projection-based scanning track fitting method, device, equipment and storage medium
CN116439664A (en) * 2023-03-31 2023-07-18 房黎亚 Skin quality detection device and skin quality detection method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113385486A (en) * 2020-03-11 2021-09-14 山东省科学院激光研究所 Automatic laser cleaning path generation system and method based on line structured light
CN113134837A (en) * 2021-04-16 2021-07-20 浙江大学 Method for improving absolute positioning precision based on six-degree-of-freedom series mechanical arm
CN116765613A (en) * 2023-08-23 2023-09-19 中国长江电力股份有限公司 Precise surface nondestructive laser cleaning galvanometer system, cleaning equipment and method thereof
CN117030854A (en) * 2023-10-09 2023-11-10 常州诺清智能科技有限公司 Cleaning bottle detection device for cleaning machine

Also Published As

Publication number Publication date
CN118218328A (en) 2024-06-21

Similar Documents

Publication Publication Date Title
CN118218328B (en) DOA positioning-based laser processing method and system with programmable beam tracking and zooming functions
CN110940490B (en) Laser spot scanning precision detection method and device of laser processing equipment
AU2009323838A1 (en) Provision of image data
JP2002542042A (en) Laser calibration device and method
CN115867402B (en) Improvements in or relating to optical scanners for directing electromagnetic radiation to different locations within a scanning field
CN102494639A (en) Laser divergence angle measuring device and measuring method based on full-automatic hole alignment method
CN100548022C (en) Method and apparatus for estimating in-focus position
CN210451366U (en) A galvanometer correction system
CN108747029A (en) A kind of teaching type laser engraving cutter and control method, application
CN118237733B (en) Laser beam calibration method and system
CA3079243A1 (en) Image reconstruction method, device and microscopic imaging device
CN119870772B (en) Laser focus spot position positioning and monitoring device
JP2018151353A (en) Measurement device
CN116673555B (en) Online monitoring device and method for microelectrode
CN113740316A (en) Method and system for automatic positioning of laser focus point based on spot position
CN120064297A (en) Nondestructive testing and repairing integrated equipment and method for thermal barrier coating of turbine blade of airplane
CN120628547A (en) Focus detection method, system, device and medium
CN116256367B (en) High-precision local mapping measurement system and method for surface damage density of optical components
US20110317153A1 (en) Laser peak energy point calibration method and apparatus
CN118225389A (en) Deep ultraviolet laser beam quality measurement system
CN107655872A (en) A kind of Focusing module and its Atomatic focusing method for gene sequencer
KR101937212B1 (en) A Laser Marking Apparatus Having a Structure of Detecting a Focus Length and a Method for Adjusting the Focus Length Automatically and Detecting a Marking Defect
CN118604004B (en) Product testing method, system, equipment and storage medium for cosmetic mirror production line
CN121603779B (en) A highly efficient autofocus method and system
JP7547625B2 (en) SYSTEM AND METHOD FOR DETERMINING MEASUREMENT POSITIONS IN SEMICONDUCTOR WAFER METROLOGY - Patent application

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant