CN116609958B - Diffusion plate shaping device and shaping method for chemical vapor deposition process - Google Patents

Diffusion plate shaping device and shaping method for chemical vapor deposition process

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Publication number
CN116609958B
CN116609958B CN202310557169.6A CN202310557169A CN116609958B CN 116609958 B CN116609958 B CN 116609958B CN 202310557169 A CN202310557169 A CN 202310557169A CN 116609958 B CN116609958 B CN 116609958B
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China
Prior art keywords
shaping
diffusion plate
plate
hydraulic cylinder
pair
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CN202310557169.6A
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Chinese (zh)
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CN116609958A (en
Inventor
李秀锋
郑军东
余宵
李根水
翟黎明
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Anhui Jinghaina Photoelectric Technology Co ltd
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Anhui Jinghaina Photoelectric Technology Co ltd
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Priority to CN202310557169.6A priority Critical patent/CN116609958B/en
Publication of CN116609958A publication Critical patent/CN116609958A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133504—Diffusing, scattering, diffracting elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Shaping Metal By Deep-Drawing, Or The Like (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)

Abstract

The invention provides a diffuser plate shaping device and a shaping method for a chemical vapor deposition process, comprising a carrying platform and a top plate, wherein a plurality of longitudinally arranged long strip cushion blocks are arranged on the carrying platform, the long strip cushion blocks are used for placing a diffuser plate, an ejection mechanism capable of rotating by an angle is further arranged in the middle of the carrying platform, a transverse traveling mechanism is arranged on the top plate, a pair of supporting plates capable of moving oppositely are arranged on a moving part of the transverse traveling mechanism, and the pair of supporting plates are used for supporting the diffuser plate. This shaping device combines the characteristic of product, based on satisfying under the customer's the condition of operation requirement, uses the cold press to carry out hydraulic shaping to the part, realizes accurate correction, promotes efficiency, and the productivity in the release place can effectually alleviate the burden of thermal shaping stove, fine release the backlog of CVD correction link, also make the operation content of follow-up workshop section become abundant to make the recent productivity of CVD obtain releasing, the output value is promoted.

Description

Diffusion plate shaping device and shaping method for chemical vapor deposition process
Technical Field
The invention relates to the technical field of liquid crystal panel CVD equipment, in particular to a diffusion plate shaping device and a diffusion plate shaping method for a chemical vapor deposition process.
Background
In the process of manufacturing the liquid crystal display panel, a Chemical Vapor Deposition (CVD) process is required to deposit some functional films. The CVD process chamber mainly comprises a back plate, a diffusion plate, a shadow frame and a heating plate. The process gas firstly passes through the back plate and then is uniformly dispersed through the diffusion plate, so that the surface of the diffusion plate meets certain flatness (most flatness requirements are less than 2 mm), and corresponding pattern requirements exist, and once the process gas exceeds the range, the dispersion uniformity of the process gas is destroyed in the running process, so that the film coating of a film coating product is uneven, batch scrapping is caused, and great cost loss is generated.
At present, with the increase of the number of large-generation liquid crystal panel factories, the accumulated market of required regeneration equipment is also expanding continuously, the regeneration number of CVD equipment is also rising continuously, diffuse and Susceptor in maintenance equipment are affected by a high-temperature process of a machine, the machine is deformed gradually in the use process until the machine is taken off, so that the machine is required to be shaped when regeneration is carried out, the traditional shaping mode is heat treatment shaping, but the shaping efficiency is low (generally divided into heating-heat preservation-cooling, 4 days are required in the process), the shaping success rate is not high, and the two points can not be met by 100% of heat shaping.
Disclosure of Invention
According to the diffusion plate shaping device for the chemical vapor deposition process, provided by the invention, the characteristics of products are combined, and the cold press is used for hydraulic shaping of the components under the condition of meeting the use requirements of customers, so that the accurate correction is realized, the efficiency is improved, the capacity in a field is released, the burden of a thermal shaping furnace can be effectively relieved, the backlog of a CVD correction link is well released, the operation content of a subsequent working section is enriched, the recent capacity of CVD is released, and the yield is improved.
In order to solve the problems, the invention adopts the following technical scheme:
The utility model provides a diffusion plate shaping device that chemical vapor deposition technology used, includes cargo platform and back timber, the rectangular cushion of many vertical settings has been placed on the cargo platform, rectangular cushion is used for placing the diffusion plate, but cargo platform's middle part is still installed rotatory jack-up mechanism, install horizontal running gear on the back timber, install a pair of layer board that can move in opposite directions on horizontal running gear's the moving part, a pair of layer board is used for holding up the diffusion plate, cross mobile mechanical arm is still installed to the bottom of back timber, fixed mounting has the vertical plastic hydraulic press that sets up on the movable block of cross mobile mechanical arm, magnetism mechanism is still installed to the both sides of movable block, magnetism is inhaled the mechanism magnetism and is inhaled the shaping model upper frame.
Preferably, the shaping model upper frame comprises a frame body and a plurality of pressing strips, wherein the pressing strips are fixedly connected to the bottom of the frame body, and the pressing strips are arranged in parallel.
Preferably, the jack-up mechanism is including rotating the first pneumatic cylinder of connection on carrying platform, the telescopic end fixedly connected with roof of first pneumatic cylinder, carrying platform's bottom fixed mounting has first motor, be connected through a pair of gear drive between the output of first motor and the jar seat of first pneumatic cylinder.
Preferably, the transverse traveling mechanism comprises a bar-shaped groove arranged at the top of the top beam, a threaded rod is rotatably connected in the bar-shaped groove, a second motor capable of driving the threaded rod to rotate is arranged at one end of the top beam, a movable seat is connected to the threaded rod in a threaded manner, and a opposite movable assembly is fixedly arranged at the top of the movable seat.
Preferably, the opposite moving assembly comprises a moving plate fixedly connected to the top of the moving seat, the moving plate is longitudinally arranged, a strip-shaped cavity is formed in the moving plate, a double-head threaded rod is rotationally connected to the strip-shaped cavity, nuts are connected to the two sides of the double-head threaded rod in a threaded mode, connecting arms are fixedly connected to the two sides of the nuts, strip-shaped openings for the corresponding connecting arms to penetrate through are formed in the two sides of the moving plate, connecting rods are fixedly connected to the side walls of the connecting arms, inverted U-shaped rods are fixedly connected to the tail ends of the connecting rods, two ends of the supporting plates and the inverted U-shaped rods on the corresponding sides are fixedly connected, and a third motor capable of driving the double-head threaded rod to rotate is installed at one end of the moving plate.
Preferably, the magnetic attraction mechanism comprises two fixed arms, the two fixed arms are respectively and fixedly connected to two sides of a moving block of the cross-shaped moving mechanical arm, the tail ends of the two fixed arms are fixedly connected with second hydraulic cylinders which are vertically arranged, the telescopic ends of the second hydraulic cylinders are provided with electromagnets, and iron blocks matched with the electromagnets are embedded in the tops of two sides of the frame body.
The invention also discloses a shaping method of the diffusion plate, which comprises the following specific steps:
S1, placing a diffusion plate on a pair of support plates, starting a second motor to drive a threaded rod to rotate, and driving the support plates and the diffusion plate to transversely move above a carrying platform through a opposite moving assembly;
S2, starting a first hydraulic cylinder to drive a top plate to move upwards to jack up a diffusion plate, then starting a third motor to drive a double-head threaded rod to rotate, driving a pair of support plates to move back to open through nuts, connecting arms, connecting rods and U-shaped rods to release the diffusion plate, then contracting the first hydraulic cylinder, paving the diffusion plate on a plurality of strip cushion blocks, testing the flatness of the diffusion plate by using laser, and uploading data;
s3, starting a cross-shaped movable mechanical arm, driving the upper frame of the shaping model to sequentially move to the corresponding position on the diffusion plate, starting a second hydraulic cylinder, driving the upper frame of the shaping model to move downwards, enabling a plurality of pressing strips to press against the surface of the diffusion plate, and closing and releasing the upper frame of the shaping model by a magnetic attraction mechanism;
S4, driving the shaping hydraulic machine to move through the cross-shaped movable mechanical arm, starting the shaping hydraulic machine, enabling the telescopic end of the shaping hydraulic machine to press the longitudinally arranged pressing strip, finishing the shaping process on the longitudinal angle of the diffusion plate, plugging a gauge during the shaping process, and measuring the shaping result;
S5, after finishing shaping in the longitudinal direction, lifting an upper frame of the shaping model, starting a first hydraulic cylinder to jack up the diffusion plate, starting a first motor, driving the first hydraulic cylinder to rotate through a pair of gears, and driving the diffusion plate to integrally rotate by 90 degrees, and shaping the diffusion plate from the other direction, wherein the accuracy of shaping is ensured by adopting a feeler gauge in the same step S4;
S6, supporting the shaped diffusion plate through a pair of supporting plates, and driving the diffusion plate to enter the next working procedure through a transverse travelling mechanism.
Preferably, the shaped diffuser plate 27 has a flatness of 1.78mm and the fine pattern exhibits an M-shape, i.e., low-high-low pattern trend.
The beneficial effects of the invention are as follows:
1. This shaping device combines the characteristic of product, based on satisfying under the customer's the condition of operation requirement, uses the cold press to carry out hydraulic shaping to the part, realizes accurate correction, promotes efficiency, releases the in-situ productivity, can effectually alleviate the burden of thermal shaping stove, fine release the backlog of CVD correction link, also make the operation content of follow-up workshop section become abundant to make the recent productivity of CVD release, the output value is promoted.
2. The diffusion plate is arranged on the pair of support plates through the transverse travelling mechanism and the opposite moving assembly, the second motor is started to drive the threaded rod to rotate, the support plates and the diffusion plate are driven to transversely move to the upper part of the carrying platform through the opposite moving assembly, the diffusion plate can also move to the next working procedure, and the lifting is convenient.
3. Through installation jack-up mechanism and magnetism mechanism of inhaling, through the break-make electricity of electro-magnet, can magnetism inhale or release plastic model upper frame, jack-up mechanism can jack up whole diffuser plate, and the starter motor can drive the diffuser plate through a pair of gear drive and rotate 90, realizes the shaping process on diffuser plate length direction and the width direction.
4. By installing the shaping hydraulic machine and the cross-shaped movable mechanical arm, the shaping hydraulic machine and the shaping model upper frame can be driven to move to any position in the longitudinal direction or the transverse direction, and the shaping process of the whole surface of the diffusion plate is completed.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a top plan view of a top plate according to the present invention;
FIG. 3 is a top view of the upper frame of the shaping mold according to the present invention;
fig. 4 is a schematic diagram of the shaping state of the present invention.
In the drawing, a carrying platform 1, a gear 2, a first motor 3, a first hydraulic cylinder 4, a top plate 5, a strip cushion block 6, a frame 7, a pressing strip 8, a second hydraulic cylinder 9, an electromagnet 10, an inverted U-shaped rod 11, a supporting plate 12, a shaping hydraulic machine 13, a cross-shaped movable mechanical arm 14, a fixed arm 15, a threaded rod 16, a second motor 17, a strip-shaped groove 18, a movable plate 19, a movable seat 20, a top plate 21, a nut 22, a connecting rod 23, a third motor 24, a iron block 25, a connecting arm 26, a diffusion plate 27 and a double-head threaded rod 28 are arranged.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit or scope of the invention, which is therefore not limited to the specific embodiments disclosed below.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Referring to fig. 1-4, a diffuser plate shaping device for chemical vapor deposition process comprises a carrying platform 1 and a top beam 21, wherein a plurality of longitudinally arranged strip cushion blocks 6 are arranged on the carrying platform 1, the strip cushion blocks 6 are used for placing a diffuser plate 27, a 90-degree rotary jacking mechanism is further arranged in the middle of the carrying platform 1, the jacking mechanism comprises a first hydraulic cylinder 4 which is rotationally connected to the carrying platform 1, a top plate 5 is fixedly connected to a telescopic end of the first hydraulic cylinder 4, a first motor 3 is fixedly arranged at the bottom of the carrying platform 1, an output end of the first motor 3 is in transmission connection with a cylinder seat of the first hydraulic cylinder 4 through a pair of gears 2, and an upper frame of a shaping model can be integrally jacked up, and can also be driven to rotate by 90 degrees.
The top beam 21 is provided with a transverse traveling mechanism, a movable part of the transverse traveling mechanism is provided with a pair of supporting plates 12 capable of moving oppositely, the pair of supporting plates 12 are used for supporting a diffusion plate 27, the transverse traveling mechanism comprises a strip-shaped groove 18 arranged at the top of the top beam 21, a threaded rod 16 is rotationally connected with the strip-shaped groove 18, one end of the top beam 21 is provided with a second motor 17 capable of driving the threaded rod 16 to rotate, the threaded rod 16 is in threaded connection with a movable seat 20, the top of the movable seat 20 is fixedly provided with an opposite moving assembly, the second motor 17 is started to drive the threaded rod 16 to rotate, and the diffusion plate 27 can be driven to transversely move to a corresponding procedure.
Further, the moving assembly in opposite directions includes the movable plate 19 of fixed connection at the movable seat 20 top, the movable plate 19 vertically sets up, be equipped with the bar chamber in the movable plate 19, bar intracavity rotation is connected with double-end threaded rod 28, the equal threaded connection in both sides of double-end threaded rod 28 has nut 22, the equal fixedly connected with linking arm 26 in both sides of nut 22, the both sides of movable plate 19 are equipped with the bar mouth that supplies corresponding linking arm 26 to pass, linking arm 26's lateral wall fixedly connected with connecting rod 23, the end fixedly connected with of connecting rod 23 falls U-shaped pole 11, the layer board 12 is with the both ends fixed connection of the corresponding side falls U-shaped pole 11, can drive the third motor 24 of double-end threaded rod 28 pivoted, start third motor 24 and drive double-end threaded rod 28 rotation, through nut 22, linking arm 26, linking rod 23 and U-shaped pole 11 drive a pair of layer board 12 and move in opposite directions and open, release the diffuser plate 27, move in opposite directions, hold up 27.
The bottom of the top beam 21 is also provided with a cross-shaped movable mechanical arm 14, a vertical shaping hydraulic machine 13 is fixedly arranged on a movable block of the cross-shaped movable mechanical arm 14, the shaping hydraulic machine 13 is driven to move by the cross-shaped movable mechanical arm 14, the shaping hydraulic machine 13 is started, and the telescopic end of the shaping hydraulic machine 13 is abutted against the longitudinally arranged pressing bar 8 to finish the shaping process of the diffusion plate 27.
The mechanism is inhaled to magnetism still installs in the both sides of movable block, magnetism is inhaled the mechanism and is included two fixed arms 15, two fixed arms 15 are fixed connection respectively in the both sides of the movable block of cross mobile mechanical arm 14, the equal fixedly connected with of the end of two fixed arms 15 is vertical the second pneumatic cylinder 9 that sets up, the electro-magnet 10 is all installed to the flexible end of second pneumatic cylinder 9, the both sides top of framework 7 all inlays and is equipped with the iron plate 25 with electro-magnet 10 complex, magnetism is inhaled the mechanism magnetism and is inhaled plastic model upper frame, plastic model upper frame includes framework 7 and many layering 8, the equal fixed connection of many layering 8 is in the framework 7 bottom, many layering 8 parallel arrangement.
The invention also discloses a shaping method of the diffusion plate, which comprises the following specific steps:
S1, placing a diffusion plate 27 on a pair of support plates 12, starting a second motor 17 to drive a threaded rod 16 to rotate, and driving the support plates 12 and the diffusion plate 27 to transversely move above a carrying platform 1 through a opposite moving assembly;
S2, starting the first hydraulic cylinder 4 to drive the top plate 5 to move upwards to jack up the diffusion plate 27, then starting the third motor 24 to drive the double-head threaded rod 28 to rotate, driving the pair of support plates 12 to move back to open through the nuts 22, the connecting arms 26, the connecting rods 23 and the U-shaped rods 11 to release the diffusion plate 27, then contracting the first hydraulic cylinder 4, paving the diffusion plate 27 on the plurality of strip cushion blocks 6, testing the flatness of the diffusion plate by using laser, and uploading data;
s3, starting a cross-shaped movable mechanical arm 14 to drive the upper frame of the shaping model to sequentially move to the corresponding position on the diffusion plate 27, starting a second hydraulic cylinder 9 to drive the upper frame of the shaping model to move downwards, enabling a plurality of pressing strips 8 to press against the surface of the diffusion plate 27, and closing and releasing the upper frame of the shaping model by a magnetic attraction mechanism;
S4, driving the shaping hydraulic machine 13 to move through the cross-shaped movable mechanical arm 14, starting the shaping hydraulic machine 13, enabling the telescopic end of the shaping hydraulic machine to press the longitudinally arranged pressing strip 8, completing the shaping process on the longitudinal angle of the diffusion plate 27, and measuring the shaping result by plugging a clearance gauge in the shaping process;
S5, after finishing shaping in the longitudinal direction, lifting an upper frame of the shaping model, starting a first hydraulic cylinder 4 to jack up a diffusion plate 27, starting a first motor 3, driving the first hydraulic cylinder 4 to rotate through a pair of gears 2, namely driving the diffusion plate 27 to integrally rotate by 90 degrees, shaping the diffusion plate 27 from the other direction, and ensuring shaping accuracy by adopting a feeler gauge in the same way as S4;
S6, supporting the shaped diffusion plate 27 through a pair of supporting plates 12, and driving the diffusion plate 27 to enter the next process through a transverse travelling mechanism.
Specifically, the shaped diffuser plate 27 has a flatness of 1.78mm and the fine pattern exhibits an M-shape, i.e., low-high-low pattern trend.
The working principle is that a diffusion plate 27 is firstly placed on a pair of supporting plates 12, a second motor 17 is started to drive a threaded rod 16 to rotate, a moving seat 20 is used for driving a moving plate 19 to transversely move, then a connecting arm 26, a connecting rod 23 and a U-shaped rod 11 are used for driving the supporting plates 12 and the diffusion plate 27 to transversely move above a carrying platform 1, a first hydraulic cylinder 4 is started to drive a top plate 5 to upwards move, the diffusion plate 27 is jacked up, a third motor 24 is started to drive a double-head threaded rod 28 to rotate, a nut 22, the connecting arm 26, the connecting rod 23 and the U-shaped rod 11 are used for driving a pair of supporting plates 12 to reversely move and open, the diffusion plate 27 is released, then the first hydraulic cylinder 4 is contracted, the diffusion plate 27 is paved on a plurality of strip cushion blocks 6, and the flatness is tested by using laser, and data are uploaded.
The cross-shaped movable mechanical arm 14 is started to drive the upper frame of the shaping model to sequentially move to the corresponding position on the diffusion plate 27, the second hydraulic cylinder 9 is started to drive the upper frame of the shaping model to move downwards, the pressing strips 8 are abutted against the surface of the diffusion plate 27, the electromagnet 10 is powered off, the upper frame of the shaping model is released, the shaping hydraulic press 13 is driven to move through the cross-shaped movable mechanical arm 14, the shaping hydraulic press 13 is started, the telescopic end of the telescopic end abuts against the pressing strips 8 which are longitudinally arranged, the shaping process on the longitudinal angle of the diffusion plate 27 is completed, a corkscrew can be plugged in during the shaping process, the shaping result is measured, after the shaping is completed in the longitudinal direction, the upper frame of the shaping model is lifted, the first hydraulic cylinder 4 is started to jack up the diffusion plate 27, the first motor 3 is started, the first hydraulic cylinder 4 is driven to rotate through the pair of gears 2, and the diffusion plate 27 can be driven to integrally rotate by 90 degrees, and the diffusion plate 27 is shaped in the other direction.
The foregoing description of the preferred embodiments of the invention is not intended to limit the invention to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims (8)

1.一种化学气相沉积工艺用的扩散板整形装置，包括载物平台（1）和顶梁（21），其特征在于，所述载物平台（1）上放置有多根纵向设置的长条垫块（6），所述长条垫块（6）用于放置扩散板（27），所述载物平台（1）的中部还安装有可90°旋转的顶起机构，所述顶梁（21）上安装有横向行走机构，所述横向行走机构的移动件上安装有可相向移动的一对托板（12），所述一对托板（12）用于托起扩散板（27），所述顶梁（21）的底部还安装有十字型移动机械臂（14），所述十字型移动机械臂（14）的移动块上固定安装有竖直设置的整形液压机（13），所述移动块的两侧还安装有磁吸机构，所述磁吸机构磁吸有整形模型上框。1. A diffusion plate shaping device for chemical vapor deposition process, comprising a loading platform (1) and a top beam (21), characterized in that a plurality of longitudinally arranged long pads (6) are placed on the loading platform (1), the long pads (6) are used to place the diffusion plate (27), a lifting mechanism that can rotate 90 degrees is also installed in the middle of the loading platform (1), a transverse walking mechanism is installed on the top beam (21), a pair of support plates (12) that can move toward each other are installed on the moving parts of the transverse walking mechanism, the pair of support plates (12) are used to support the diffusion plate (27), a cross-shaped mobile robot (14) is also installed at the bottom of the top beam (21), a vertically arranged shaping hydraulic press (13) is fixedly installed on the moving block of the cross-shaped mobile robot (14), and a magnetic attraction mechanism is also installed on both sides of the moving block, and the magnetic attraction mechanism magnetically attracts the shaping model upper frame. 2.根据权利要求1所述的一种化学气相沉积工艺用的扩散板整形装置，其特征在于，所述整形模型上框包括框体（7）和多根压条（8），所述多根压条（8）均固定连接在框体（7）底部，多根压条（8）平行设置。2. A diffusion plate shaping device for a chemical vapor deposition process according to claim 1, characterized in that the upper frame of the shaping model includes a frame body (7) and a plurality of beadings (8), the plurality of beadings (8) are all fixedly connected to the bottom of the frame body (7), and the plurality of beadings (8) are arranged in parallel. 3.根据权利要求1所述的一种化学气相沉积工艺用的扩散板整形装置，其特征在于，所述顶起机构包括转动连接在载物平台（1）上的第一液压缸（4），所述第一液压缸（4）的伸缩端固定连接有顶板（5），所述载物平台（1）的底部固定安装有第一电机（3），所述第一电机（3）的输出端与第一液压缸（4）的缸座间通过一对齿轮（2）传动连接。3. A diffusion plate shaping device for a chemical vapor deposition process according to claim 1, characterized in that the lifting mechanism includes a first hydraulic cylinder (4) rotatably connected to a loading platform (1), a telescopic end of the first hydraulic cylinder (4) is fixedly connected to a top plate (5), a first motor (3) is fixedly installed on the bottom of the loading platform (1), and an output end of the first motor (3) is connected to a cylinder seat of the first hydraulic cylinder (4) through a pair of gears (2). 4.根据权利要求1所述的一种化学气相沉积工艺用的扩散板整形装置，其特征在于，所述横向行走机构包括设置在顶梁（21）顶部的条形槽（18），所述条形槽（18）内转动连接有螺纹杆（16），所述顶梁（21）一端安装有可带动螺纹杆（16）转动的第二电机（17），所述螺纹杆（16）上螺纹连接有移动座（20），所述移动座（20）的顶部固定安装有相向移动组件。4. A diffusion plate shaping device for a chemical vapor deposition process according to claim 1, characterized in that the horizontal walking mechanism includes a strip groove (18) arranged on the top of the top beam (21), a threaded rod (16) is rotatably connected in the strip groove (18), a second motor (17) that can drive the threaded rod (16) to rotate is installed at one end of the top beam (21), a movable seat (20) is threadedly connected to the threaded rod (16), and a relative moving component is fixedly installed on the top of the movable seat (20). 5.根据权利要求4所述的一种化学气相沉积工艺用的扩散板整形装置，其特征在于，所述相向移动组件包括固定连接在移动座（20）顶部的移动板（19），所述移动板（19）纵向设置，移动板（19）内设有条形腔，所述条形腔内转动连接有双头螺纹杆（28），所述双头螺纹杆（28）的两侧均螺纹连接有螺母（22），所述螺母（22）的两侧均固定连接有连接臂（26），所述移动板（19）的两侧设有供对应连接臂（26）穿过的条形口，所述连接臂（26）的侧壁固定连接有连接杆（23），所述连接杆（23）的末端固定连接有倒U型杆（11），所述托板（12）与对应侧的倒U型杆（11）的两端固定连接，所述移动板（19）的一端安装有可带动双头螺纹杆（28）转动的第三电机（24）。5. A diffusion plate shaping device for a chemical vapor deposition process according to claim 4, characterized in that the opposite moving component includes a moving plate (19) fixedly connected to the top of the moving seat (20), the moving plate (19) is arranged longitudinally, and a strip cavity is provided in the moving plate (19), a double-headed threaded rod (28) is rotatably connected in the strip cavity, nuts (22) are threadedly connected on both sides of the double-headed threaded rod (28), and connecting arms (26) are fixedly connected on both sides of the nut (22), and strip openings for corresponding connecting arms (26) to pass through are provided on both sides of the moving plate (19), the side walls of the connecting arms (26) are fixedly connected to connecting rods (23), the ends of the connecting rods (23) are fixedly connected to inverted U-shaped rods (11), the support plate (12) is fixedly connected to the two ends of the inverted U-shaped rods (11) on the corresponding side, and one end of the moving plate (19) is installed with a third motor (24) that can drive the double-headed threaded rod (28) to rotate. 6.根据权利要求2所述的一种化学气相沉积工艺用的扩散板整形装置，其特征在于，所述磁吸机构包括两根固定臂（15），所述两根固定臂（15）分别固定连接在十字型移动机械臂（14）的移动块的两侧，两根固定臂（15）的末端均固定连接有竖直设置的第二液压缸（9），所述第二液压缸（9）的伸缩端均安装有电磁铁（10），所述框体（7）的两侧顶部均嵌设有与电磁铁（10）配合的铁块（25）。6. A diffusion plate shaping device for a chemical vapor deposition process according to claim 2, characterized in that the magnetic attraction mechanism includes two fixed arms (15), the two fixed arms (15) are respectively fixedly connected to the two sides of the moving block of the cross-shaped mobile mechanical arm (14), the ends of the two fixed arms (15) are fixedly connected to a vertically arranged second hydraulic cylinder (9), the telescopic ends of the second hydraulic cylinder (9) are installed with electromagnets (10), and the tops of both sides of the frame (7) are embedded with iron blocks (25) that cooperate with the electromagnets (10). 7.一种扩散板的整形方法，其特征在于，使用权利要求5所述一种化学气相沉积工艺用的扩散板整形装置,所述顶起机构包括转动连接在载物平台（1）上的第一液压缸（4），所述第一液压缸（4）的伸缩端固定连接有顶板（5），所述载物平台（1）的底部固定安装有第一电机（3），所述第一电机（3）的输出端与第一液压缸（4）的缸座间通过一对齿轮（2）传动连接，所述整形模型上框包括多根压条（8）,所述磁吸机构包括第二液压缸（9）,7. A method for shaping a diffusion plate, characterized in that a diffusion plate shaping device for a chemical vapor deposition process according to claim 5 is used, wherein the lifting mechanism comprises a first hydraulic cylinder (4) rotatably connected to a loading platform (1), a telescopic end of the first hydraulic cylinder (4) is fixedly connected to a top plate (5), a first motor (3) is fixedly installed at the bottom of the loading platform (1), an output end of the first motor (3) and a cylinder seat of the first hydraulic cylinder (4) are connected by a pair of gears (2), the upper frame of the shaping model comprises a plurality of pressure strips (8), and the magnetic attraction mechanism comprises a second hydraulic cylinder (9). 包括以下具体步骤：The specific steps include: S1、将扩散板（27）置于一对托板（12）上，启动第二电机（17）带动螺纹杆（16）转动，再通过相向移动组件带动托板（12）以及扩散板（27）横移至载物平台（1）上方；S1, placing the diffusion plate (27) on a pair of support plates (12), starting the second motor (17) to drive the threaded rod (16) to rotate, and then driving the support plates (12) and the diffusion plate (27) to move horizontally above the loading platform (1) through the opposite moving components; S2、启动第一液压缸（4）带动顶板（5）上移，将扩散板（27）顶起，随后启动第三电机（24）带动双头螺纹杆（28）转动，通过螺母（22）、连接臂（26）、连接杆（23）以及倒U型杆（11）带动一对托板（12）相背移动打开，释放扩散板（27），随后第一液压缸（4）收缩，将扩散板（27）铺设在多根长条垫块（6）上，使用激光镭射测试其平面度，上传数据；S2, start the first hydraulic cylinder (4) to drive the top plate (5) to move upward, lift the diffuser plate (27), then start the third motor (24) to drive the double-headed threaded rod (28) to rotate, and drive a pair of supporting plates (12) to move back and forth and open through the nut (22), the connecting arm (26), the connecting rod (23) and the inverted U-shaped rod (11), thereby releasing the diffuser plate (27), and then the first hydraulic cylinder (4) contracts, laying the diffuser plate (27) on a plurality of long pads (6), using a laser to test its flatness, and uploading the data; S3、启动十字型移动机械臂（14），带动整形模型上框按顺序依次移动至扩散板（27）上的对应位置，启动第二液压缸（9）带动整形模型上框下移，多根压条（8）抵触扩散板（27）表面，磁吸机构关闭释放整形模型上框；S3, starting the cross-shaped mobile mechanical arm (14), driving the upper frame of the plastic model to move to the corresponding position on the diffusion plate (27) in sequence, starting the second hydraulic cylinder (9) to drive the upper frame of the plastic model to move downward, the multiple pressure strips (8) contact the surface of the diffusion plate (27), and the magnetic attraction mechanism closes and releases the upper frame of the plastic model; S4、通过十字型移动机械臂（14）带动整形液压机（13）移动，启动整形液压机（13），其伸缩端抵压纵向设置的压条（8），完成对扩散板（27）纵向角度上的整形过程，整形过程可塞入塞尺，测量整形结果；S4, the shaping hydraulic press (13) is driven to move by the cross-shaped mobile mechanical arm (14), the shaping hydraulic press (13) is started, and its telescopic end presses against the longitudinally arranged pressure strip (8), completing the shaping process of the longitudinal angle of the diffuser plate (27). During the shaping process, a feeler gauge can be inserted to measure the shaping result; S5、纵向上完成整形后，抬起整形模型上框，启动第一液压缸（4）顶起扩散板（27），启动第一电机（3），通过一对齿轮（2）带动第一液压缸（4）转动，即可带动扩散板（27）整体转动90°，从另一方向整形扩散板（27），同S4采用塞尺确保整形的准确性；S5. After the shaping is completed in the longitudinal direction, the upper frame of the shaping model is lifted, the first hydraulic cylinder (4) is started to lift the diffusion plate (27), and the first motor (3) is started to drive the first hydraulic cylinder (4) to rotate through a pair of gears (2), thereby driving the diffusion plate (27) to rotate 90 degrees as a whole, and shaping the diffusion plate (27) from the other direction. The feeler gauge is used as in S4 to ensure the accuracy of the shaping; S6、整形后的扩散板（27）通过一对托板（12）托起，通过横向行走机构带动扩散板（27）进入下一道工序。S6. The shaped diffusion plate (27) is lifted by a pair of supporting plates (12), and the diffusion plate (27) is driven by a lateral walking mechanism to enter the next process. 8.根据权利要求7所述的一种扩散板的整形方法，其特征在于，整形后的扩散板（27）平面度为1.78mm，细微图形呈现M型，即低-高-低-高-低的图形趋势。8. A method for shaping a diffuser plate according to claim 7, characterized in that the flatness of the diffuser plate (27) after shaping is 1.78 mm, and the fine pattern presents an M-shape, that is, a low-high-low-high-low pattern trend.
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