CN115373226B - A calibration device and a calibration method for an optical path transmission module - Google Patents
A calibration device and a calibration method for an optical path transmission module Download PDFInfo
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- CN115373226B CN115373226B CN202110542117.2A CN202110542117A CN115373226B CN 115373226 B CN115373226 B CN 115373226B CN 202110542117 A CN202110542117 A CN 202110542117A CN 115373226 B CN115373226 B CN 115373226B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
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Abstract
本发明公开一种光路传输模块的调校装置和调校方法，涉及准分子激光器技术领域，用于调校光路传输模块。调校装置包括两个第一光学狭缝、两个第二光学狭缝和一字线光源，在第一调校状态，第一电极的朝向第二电极的表面与第一一字线狭缝的中心线共面，第一电极的朝向第二电极的表面与放大腔的高度方向相垂直；在第二调校状态，第二一字线狭缝的中心线和第一电极与第二电极在放大腔的高度方向上的中心线共面，该共面与放大腔的高度方向相垂直；一字线光源在第一调校状态发射穿过两个第一一字线狭缝和放大腔的一字线光束，在第二调校状态发射穿过两个第二一字线狭缝和放大腔的一字线光束。
The present invention discloses a calibration device and a calibration method for an optical path transmission module, which relates to the technical field of excimer lasers and is used for calibrating an optical path transmission module. The calibration device includes two first optical slits, two second optical slits and a line light source. In a first calibration state, the surface of the first electrode facing the second electrode is coplanar with the center line of the first line slit, and the surface of the first electrode facing the second electrode is perpendicular to the height direction of the amplifying cavity; in a second calibration state, the center line of the second line slit is coplanar with the center line of the first electrode and the second electrode in the height direction of the amplifying cavity, and the coplanarity is perpendicular to the height direction of the amplifying cavity; the line light source emits a line light beam passing through the two first line slits and the amplifying cavity in the first calibration state, and emits a line light beam passing through the two second line slits and the amplifying cavity in the second calibration state.
Description
Technical Field
The invention relates to the technical field of excimer lasers, in particular to a device and a method for adjusting an optical path transmission module.
Background
Photolithography is the largest field of industrial application of excimer lasers. As the lithography node is coming into the 32nm node, arF excimer lithography has become the dominant and is expected to be applied to the lower 22nm node and 16nm node. In this connection, research hotspots in the current excimer laser technology are mainly focused on excimer laser technology for lithography. With the decreasing lithography nodes, arF excimer lasers are required to have more stable narrow linewidths, greater output power, higher dose stability, and longer gas lifetimes. Currently ArF excimer lasers have two discharge cavities, one is a seed cavity (MO cavity) and one is a gain amplifying cavity (PA cavity), seed light in the seed cavity is input into the gain amplifying cavity multiple times by using the ring cavity technology, residence time in the amplifying cavity is long, and the amplifying cavity works in a deep saturation state.
The exact control light path passes through the gain area of the gain amplifying cavity, and determines the success or failure of the annular cavity technology. The gain amplifying cavity is designed at present so that the gain amplifying cavity can be adjusted in the horizontal direction, the vertical direction is determined by the installation reference, and the light beam transmission can be followed by two-dimensional angle adjustment of the reflecting mirror. The optical axis of the beam and the center line of the discharge chamber should coincide, if not coincide, a portion of the light will be blocked from entering the gain region. The direct effect is that the laser energy of the single pulse is reduced, and the vertical dimension of the light spot is reduced.
Disclosure of Invention
The invention aims to provide a device and a method for adjusting an optical path transmission module, which are used for adjusting the optical path transmission module so as to prevent light beams from being blocked and not completely passing through a gain area.
In a first aspect, the present invention provides an adjustment device for an optical path transmission module. The adjusting device comprises two first optical slits, two second optical slits and a word line light source. Each first optical element has a first word line slit and each second optical element has a second word line slit.
In the first adjustment state, each first optical element is disposed on a corresponding light-transmitting window, i.e., one first optical element may be disposed on one light-transmitting window. The surface of the first electrode facing the second electrode is coplanar with the center line of the first word line slit, and the surface of the first electrode facing the second electrode is perpendicular to the height direction of the amplifying cavity. For convenience of description, the height direction of the amplifying chamber 1 is defined to coincide with the up-down direction of the drawing plane with reference to the drawing plane direction in fig. 1, and the first electrode is located below, and the surface of the first electrode facing the second electrode will be hereinafter referred to as a first electrode tip. Thus, in the height direction of the amplifying cavity, the top end of the first electrode is positioned at the same height as the center line of the first word line slit.
In the second adjustment state, each second optical element is arranged on a respective light-transmitting window, i.e. one second optical element may be arranged on each light-transmitting window. The center line of the second word line slit is coplanar with the center lines of the first electrode and the second electrode in the height direction of the amplifying cavity, and the coplanar is perpendicular to the height direction of the amplifying cavity. That is, in the height direction of the amplifying cavity, the distance between the center line of the second first word line slit and the first electrode and the distance between the second electrode are equal. The center line of the first electrode and the second electrode in the height direction of the amplifying cavity may be referred to as an amplifying cavity center line, and the center line of the second linear slit may coincide with the center line of the amplifying cavity.
The alignment device has a first alignment state and a second alignment state, wherein a word line light source is positioned at one side of the amplifying cavity near the first reflecting element in the first alignment state and the second alignment state, and is used for emitting a word line light beam passing through the two first word line slits and the amplifying cavity in the first alignment state and emitting a word line light beam passing through the two second word line slits and the amplifying cavity in the second alignment state.
According to the technical scheme, in the first adjustment state, because the two first optical elements are positioned on two sides of the amplifying cavity, and the central line of the first word line slit and the top end of the first electrode are positioned on the same plane, when the word line light source emits a word line light beam passing through the two first word line slits and the amplifying cavity in the first adjustment state, the light outlet of the word line light source is indicated to emit the word line light beam locking the top end position of the first electrode under the current gesture. Meanwhile, in the second tuning state, the center line of the second first word line slit may coincide with the center line of the amplifying cavity. Based on this, when a word line light source emits a word line light beam passing through two second first word line slits and the amplifying cavity in the second alignment state with the light outlet posture of the word line light source kept constant, it can be determined that the light beam capable of passing through the two second first word line slits and the amplifying cavity is theoretically parallel to not only the word line light beam passing through the tip of the first electrode but also passes through the center of the amplifying cavity. On the basis, the incidence angle of the seed light entering the amplifying cavity can be adjusted by utilizing the first reflecting element and/or the second reflecting element, so that the seed light reflected by the second reflecting element passes through the amplifying cavity and the two second first word line slits, the optical axis of the seed light can be indicated to pass through the center of the amplifying cavity, the size of a laser spot amplified by the optical path transmission module in the height direction of the amplifying cavity can be ensured to meet the requirement, and the larger loss of laser energy is avoided. Therefore, the adjusting device provided by the application can adjust the optical path transmission module, and can avoid that the light beam is blocked and cannot completely pass through the gain area.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and do not constitute a limitation on the invention. In the drawings:
Fig. 1 is a schematic diagram of a calibrating device according to an embodiment of the present invention when calibrating an amplifying cavity in a first calibrating state;
FIG. 2 is a schematic diagram of a calibrating device according to an embodiment of the present invention when calibrating an amplifying cavity in a first calibration state;
FIG. 3 is a schematic diagram of a calibrating device according to an embodiment of the present invention when calibrating an amplifying cavity in a second calibrating state;
FIG. 4 is a schematic diagram of a calibrating device according to an embodiment of the present invention when calibrating an amplifying cavity in a second calibrating state;
FIG. 5 is a schematic diagram of a calibrating device according to an embodiment of the present invention when calibrating seed light;
FIG. 6 is a schematic diagram of a first optical slit according to an embodiment of the present invention;
fig. 7 is a schematic diagram of a second optical slit according to an embodiment of the present invention.
Reference numerals:
1-amplifying cavity, 11-first electrode, 12-second electrode, 13-light-transmitting window, 2-word line light source,
3-A first optical element, 4-a second optical element, 5-a third optical element,
6-First reflective element, 7-second reflective element.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present invention, the meaning of "a plurality" is two or more, unless explicitly defined otherwise. The meaning of "a number" is one or more than one unless specifically defined otherwise.
In the description of the present invention, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", "right", etc., are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
In the description of the present invention, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements or in an interaction relationship between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
Referring to fig. 1, the excimer laser has an optical path transmission module including a first reflecting element 6, a second reflecting element 7, and an amplifying cavity 1 of the laser between the first reflecting element 6 and the second reflecting element 7, the amplifying cavity 1 having a first electrode 11 and a second electrode 12 disposed opposite each other, the first electrode 11 and the second electrode 12 being distributed in a height direction of the amplifying cavity 1, and the amplifying cavity 1 having two light transmitting windows 13 disposed opposite each other. The invention provides a device for adjusting an optical path transmission module, which is used for adjusting the optical path transmission module.
Referring to fig. 1 to 7, an adjusting device according to an embodiment of the invention includes two first optical elements 3, two second optical elements 4, and a word line light source 2. Each first optical element 3 has a first word line slit and each second optical element 4 has a second word line slit.
In the first adjustment state, each first optical element 3 is arranged on the corresponding light-transmitting window 13, i.e. one first optical element 3 can be arranged on one light-transmitting window 13. The surface of the first electrode 11 facing the second electrode 12 is coplanar with the center line of the first word line slit, and the surface of the first electrode facing the second electrode is perpendicular to the height direction of the amplifying cavity. For convenience of description, the height direction of the amplifying chamber 1 is defined to coincide with the up-down direction of the drawing plane with reference to the drawing plane direction in fig. 1, and the first electrode 11 is located below, and the surface of the first electrode 11 facing the second electrode 12 will hereinafter be referred to as the tip of the first electrode 11. Thus, the tip of the first electrode 11 is positioned at the same height as the center line of the first word line slit in the height direction of the amplifying chamber 1.
In the second adjustment state, each second optical element 4 is arranged on a respective light-transmitting window 13, i.e. one second optical element 4 may be arranged on one light-transmitting window 13. The center line of the second word line slit is coplanar with the center lines of the first electrode 11 and the second electrode 12 in the height direction of the amplifying cavity, and the coplanar is perpendicular to the height direction of the amplifying cavity. That is, in the height direction of the amplifying cavity 1, the distance between the center line of the second first word line slit and the first electrode 11 and the distance between the second electrode 13 are equal. The center lines of the first electrode 11 and the second electrode 12 in the height direction of the amplifying cavity may be referred to as the center line of the amplifying cavity 1, and thus, the center line of the second one-word line slit may coincide with the center line of the amplifying cavity 1.
The tuning device has a first tuning state and a second tuning state, in which both the first tuning state and the second tuning state are located at a side of the amplifying cavity 1 near the first reflecting element 6, for emitting a word line beam passing through the two first word line slits and the amplifying cavity 1 in the first tuning state, and for emitting a word line beam passing through the two second word line slits and the amplifying cavity 1 in the second tuning state.
Through the above technical scheme, in the first adjustment state, since the two first optical elements 3 are located at two sides of the amplifying cavity 1, and the center line of the first word line slit and the top end of the first electrode 11 are located on the first plane, when the first word line light source 2 emits a word line light beam passing through the two first word line slits and the amplifying cavity 1 in the first adjustment state, it is explained that the light outlet of the first word line light source 2 locks the top end position of the first electrode 11 when the emitted first word line light beam is in the current posture, that is, the height of the first word line light beam is the top end position of the first electrode 11. Meanwhile, in the second tuning state, the center line of the second first word line slit may coincide with the center line of the amplifying cavity 1. Based on this, when one word line light source 2 emits one word line light beam passing through the two second first word line slits and the amplifying chamber 1 in the second tuning state with the light outlet posture of the one word line light source 2 kept constant, it can be determined that the light beam capable of passing through the two second first word line slits and the amplifying chamber 1 is theoretically parallel to not only one word line light beam passing through the tip of the first electrode 11 but also passes through the center of the amplifying chamber 1. On the basis, the first reflecting element 6 and/or the second reflecting element 7 can be used for adjusting the incident angle of the seed light entering the amplifying cavity 1, so that the seed light reflected by the second reflecting element 7 passes through the amplifying cavity 1 and two second linear slits, the optical axis of the seed light can be indicated to pass through the center of the amplifying cavity 1, the size of a laser spot amplified by the optical path transmission module in the height direction of the amplifying cavity 1 can be ensured to meet the requirement, and the larger loss of laser energy can be avoided. Therefore, the adjusting device provided by the application can adjust the optical path transmission module, and can avoid that the light beam is blocked and cannot completely pass through the gain area.
In one possible implementation, in the first adjustment state, each first optical element 3 is removably mounted in a respective light-transmitting window 13, and in the second adjustment state, each second optical element 4 is removably mounted in a respective light-transmitting window 13. In this way, the first optical element 3 can be easily detached and the second optical element 4 can be easily attached.
In one example, as shown in fig. 6 and 7, each of the first optical element 3 and the second optical element 4 may be configured as a circular plate provided with a slit. The circular plate may be provided with mounting holes at positions corresponding to the light-transmitting windows 13 so as to detachably mount the circular plate on the light-transmitting windows 13.
In a possible implementation, when the first optical element 3 is disposed on the corresponding light-transmitting window 13, the geometric center of the first optical element 3 may be coaxial with the geometric center of the corresponding light-transmitting window 13, and since the distance a between the top end of the first electrode 11 and the geometric center of the light-transmitting window 13 in the height direction of the amplifying cavity 1 is a constant value, the distance a between the geometric center of the first optical element 3 and the center line of the first word line slit may be set as well, and thus, in the height direction of the amplifying cavity 1, the center line of the first word line slit may be located at the same height as the top end of the first electrode 11.
When the second first word line slit is provided on the corresponding light-transmitting window 13, the geometric center of the second optical element 4 can be made coaxial with the geometric center of the corresponding light-transmitting window 13, and since the distance b between the geometric center of the light-transmitting window 13 and the center line of the amplifying cavity 1 in the height direction of the amplifying cavity 1 is a constant value, the distance b between the geometric center of the second optical element 4 and the center line of the second first word line slit can be set so that the center line of the second first word line slit can be positioned at the same height as the center line of the amplifying cavity 1, in other words, the center line of the second first word line slit can coincide with the center line of the amplifying cavity 1.
The difference in height between the first and second alignment states of the above-mentioned one-word line light source 2 is D, d=a-b. In this way, in the first adjustment state, when the light emitting posture of the one-word line light source 2 is adjusted, and the one-word line light beam emitted by the one-word line light source 2 can pass through the amplifying cavity 1 and the two first-word line slits, the one-word line light source 2 is lifted according to the height difference D only in the height direction of the amplifying cavity 1 on the premise that the light emitting posture of the one-word line light source 2 is kept unchanged, and as long as the position of the second-word line slit is correct, the one-word line light beam emitted by the one-word line light source 2 can pass through the amplifying cavity 1 and the two second-word line slits, and then the position of the second-word line slit is verified to be correct, so that the central line positions of the first electrode 11 and the second electrode 12 in the height direction of the amplifying cavity are marked by the second-word line slit.
The center line of the amplifying cavity 1 and the geometric center of the light-transmitting window 13 may be located at different heights in the height direction of the amplifying cavity 1, or may be located at the same height, for example, as shown in fig. 2, and in one example, the center line of the amplifying cavity 1 and the geometric center of the light-transmitting window 13 are located at different heights, b=1.1 mm, a=6.9 mm.
In a possible implementation manner, the adjusting device may further include fluorescent paper, in a first adjusting state, the fluorescent paper is located between the second reflecting element 7 and one of the first optical elements 3 close to the second reflecting element 7, and by using the principle that light irradiates on the fluorescent paper to generate light spots, it can be verified whether a word line light beam passes through the amplifying cavity 1 and two first word line slits, and further, whether the shape of the light spots can be verified through the shape of the light spots, and therefore, the complete propagation of the word line light beam can be achieved by fine adjustment of the light emitting posture of the first word line light source 2, and further, the accuracy of the light emitting posture of the first word line light source 2 can be improved.
After the second optical element 4 is mounted on the light-transmitting window 13, there may be a slight gap between the center line of the second word line slit and the center line of the amplifying cavity 1 due to the existence of a mechanical error, and since the positions of the one word line light source 2 in the first tuning state and the second tuning state are different, there may be a slight deviation in the light-emitting posture of the one word line light source 2 after moving the one word line light source 2, which may reduce the tuning accuracy of the optical path transmission module. In order to reduce or avoid the adverse effects caused by these errors, in one possible implementation, the tuning device may further include a third optical element 5 (as shown in fig. 5), where the third optical element 5 has a third first word line slit, in the second tuning state, the third optical element 5 may be located between the second first word line slit and a word line light source 2, and the center of the light outlet of the first word line light source 2 is located at the same level as the center line of the third first word line slit, and only the light outlet posture of the first word line light source 2 is substantially identical to that in the first tuning state, the first word line light beam emitted by the first word line light source 2 in the second tuning state may pass through the third first word line slit and then pass through the second word line slit and the amplifying cavity 1. Thus, the third one-word line slit can function to verify the light-emitting posture of the one-word line light source 2. Since there may be mounting errors in the second optical element 4, the position of the second optical element 4 may be fine-tuned throughout the second tuning state so that a wordline beam passes through the second wordline slit and the amplifying cavity 1.
In one possible embodiment, the third optical element 5 may be an adjustable mechanical slit, so as to adjust the size of the third first word line slit, so that a word line beam can pass through the third first word line slit completely, and improve the alignment accuracy.
In one possible implementation, the one-word line light source 2 may be a one-word line light source 2 with an adjustable beam size, so that the size of one-word line light beam may be adjusted to pass completely through the first one-word line slit and the second one-word line slit, thereby improving the alignment accuracy. The word line light source 2 can be a word line laser, and the alignment accuracy is improved by utilizing the alignment characteristic of laser. A word line laser can be used for the collimation of a Bawil prism, and the consistency of light sources is good. In addition, the horizontal displacement error brought by the gain amplifying cavity window sheet can be counteracted by the linear laser, and the adjustment precision is improved.
In one possible embodiment, the width of a cross section of a word line beam provided by a word line light source 2 is less than or equal to the width of the first word line slit, respectively. Therefore, one word line beam can completely pass through the first word line slit and the second word line slit, and the adjustment precision is improved.
In one possible embodiment, the width of the cross section of a word line beam provided by a word line light source 2 is less than or equal to the width of the second word line slit, and the width of the cross section of a word line beam provided by a word line light source 2 is less than or equal to the width of the third word line slit. The width of the second first word line slit is the dimension of the second first word line slit in the height direction of the amplifying chamber 1, and the width of the third first word line slit is the dimension of the third first word line slit in the height direction of the amplifying chamber 1. Thus, when the light emitting posture of the one-word line light source 2 is accurate and the position of the second one-word line slit is accurate in the height direction of the amplifying cavity 1, the one-word line light beam can pass through the second one-word line slit and the third one-word line slit completely without being blocked and enter the amplifying cavity 1. Therefore, the accuracy of the light emitting posture of the one-word line light source 2 and the accuracy of the position of the second one-word line slit are improved, and the adjustment accuracy of the optical path transmission module is improved.
In this context, the width of the cross section of the one-word line beam, the width of the first one-word line slit, the width of the second one-word line slit, and the width of the third one-word line slit refer to their respective dimensions in the height direction of the amplifying cavity.
The embodiment of the invention also provides a method for adjusting the optical path transmission module, which can be applied to the adjusting device, and comprises the following steps:
as shown in fig. 1, each first optical element 3 is first provided on a respective light-transmitting window 13.
As shown in fig. 2, the one-word line light source 2 is then disposed on the side of the first optical element 3 near the first reflecting element 6, and the position and the light-emitting posture of the one-word line light source 2 are adjusted so that the one-word line light beam emitted from the one-word line light source 2 passes through the amplifying cavity 1 and the two first one-word line slits, at which time the light-emitting posture of the one-word line light source 2 is determined.
As shown in fig. 3, the one-word line light source 2 is then moved by a distance D along the height increasing direction of the amplifying cavity 1, with the light emitting posture of the one-word line light source 2 kept constant, where d=a-b, a being the distance between the geometric center of the first optical element 3 and the center line of the first one-word line slit, and b being the distance between the geometric center of the second optical element 4 and the center line of the second one-word line slit. As can be seen from the above description about the distance b, after the movement is completed, the one-word line beam emitted from the one-word line light source 2 can be made to pass through the center line of the second one-word line slit, that is, the center line of the amplifying cavity 1, and then the seed light can be made to pass through the center of the amplifying cavity 1. Then, after the first optical element 3 is removed, each second optical element 4 is disposed on the corresponding light-transmitting window 13, so that the second first word line slit and the center of the light outlet of the word line light source 2 are located at the same height.
As shown in fig. 4, a word line light beam passing through two second first word line slits and the amplifying cavity 1 is emitted by a word line light source 2, and at this time, the position of the second optical element 4 is determined, and the second optical element 4 can be used for adjusting the optical path transmission module.
Finally, as shown in fig. 5, the posture of the first reflecting element 6 and/or the posture of the second reflecting element 7 are adjusted to adjust the incident angle of the seed light entering the amplifying cavity 1 by using the first reflecting element 6 and/or the second reflecting element 7, so that the seed light reflected by the second reflecting element 7 passes through the amplifying cavity 1 and the two second first word line slits, thereby completing the adjustment of the optical path transmission module.
Wherein the seed light is first irradiated onto the first reflecting element 6, then the posture of the first reflecting element 6 is adjusted so that the seed light reflected by the first reflecting element 6 can pass through the third first word line slit, the second first word line slit and the amplifying cavity 1 to be irradiated onto the second reflecting element 7, and then the posture of the first reflecting element 6 and/or the second reflecting element 7 is adjusted so that the seed light reflected by the second reflecting element 7 can pass through the second first word line slit, the amplifying cavity and the third first word line slit. At this time, the adjustment of the optical transmission module is completed. The seed light passing through the amplifying cavity 1 reflected by the first reflecting element 6 and the seed light passing through the amplifying cavity 1 reflected by the second reflecting element 7 may pass through the central region of the amplifying cavity 1. Wherein the posture of the first reflecting element 6 and the posture of the second reflecting element 7 each refer to an inclination angle of the reflecting element with respect to the center line of the amplifying chamber 1.
The seed light reflected by the first reflecting element 6 and passing through the amplifying cavity 1 has an included angle A less than or equal to 8mrad with the seed light reflected by the second reflecting element 7 and passing through the amplifying cavity 1. Since the included angle a is small, both of the two seed lights can pass through the third and second word line slits. For example, as shown in fig. 5, the seed light passing through the amplifying cavity 1 reflected by the second reflecting element 7 may coincide with the center line of the amplifying cavity 1, and the seed light passing through the amplifying cavity 1 reflected by the first reflecting element 6 has an angle a with the center line of the amplifying cavity 1.
In a possible embodiment, the first reflective element 6 may be a tunable mirror and the second reflective element 7 may comprise two tunable mirrors, namely a first mirror 71, a second mirror 72, in order to re-reflect the received seed light and pass it through the amplifying chamber 1 again.
Before a word line light beam passing through the amplifying cavity 1 and the two first word line slits is emitted by the word line light source 2, the light emitting posture of the word line light source 2 needs to be adjusted. The light-emitting posture of a word line light source 2 can be understood as the light-emitting direction with respect to the amplifying cavity 1.
In one possible implementation, when the adjustment device includes the third optical element 5, the adjustment method further includes, after emitting a word line beam passing through the two first word line slits and the amplifying cavity 1 by using the one word line light source 2, using the one word line light source 2 to emit a word line beam passing through the amplifying cavity 1 and the two second word line slits, placing the third optical element 5 having the third one word line slit between the amplifying cavity 1 and the first reflecting element 6, and then adjusting the size of the third one word line slit under the condition that the light emitting posture of the one word line light source 2 is constant, so that the one word line light beam completely passes through the third one word line slit, which is beneficial to improving the accuracy of the light emitting posture of the one word line light source 2 and the accuracy of the position of the second one word line slit, and further beneficial to improving the adjustment accuracy of the optical path transmission module. Then, after each second first word line slit is disposed in the corresponding light-transmitting window 13, a word line light beam emitted by the first word line light source 2 is made to pass through the third first word line slit and the second first word line slit. Here, since the third first wordline slit may be located between the second first wordline slit and the first wordline light source 2 in the second tuning state, the center of the light outlet of the first wordline light source 2 is located at the same height as the center line of the third first wordline slit, and only the light outlet posture of the first wordline light source 2 substantially coincides with that in the first tuning state, the first wordline light beam emitted by the first wordline light source 2 in the second tuning state can pass through the third first wordline slit and further through the second first wordline slit and the amplifying cavity 1. Thus, the third one-word line slit can function to verify the light-emitting posture of the one-word line light source 2.
In the adjustment method of the optical path transmission module provided by the invention, in the whole second adjustment state, the position of the second optical element 4 can be finely adjusted so that a word line beam passes through the second first word line slit and the amplifying cavity 1. Fine adjustment here means adjustment within the installation error range.
In the method for adjusting the optical path transmission module provided by the present invention, the third optical element 5 may be disposed before moving the word line light source 2 by the distance D, or the third optical element 5 may be disposed after moving the word line light source 2 by the distance D, which is not limited in the present disclosure. If the third optical element 5 is placed before moving a word line light source 2 by a distance D, the third optical element 5 and a word line light source 2 can be moved simultaneously in height by the distance D.
In addition, in order to improve the alignment accuracy, the influence of the amplifying action of the amplifying cavity 1 on light is reduced or avoided, when each first word line slit is arranged on the corresponding light transmission window 13, the amplifying cavity 1 can be in a power-down state to avoid amplifying a word line light beam passing through the amplifying cavity 1, and similarly, when each second word line slit is arranged on the corresponding light transmission window 13, the amplifying cavity 1 can be in a power-down state to avoid amplifying a word line light beam and seed light passing through the amplifying cavity 1.
In the description of the above embodiments, particular features, structures, materials, or characteristics may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily recognize that variations or substitutions are within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
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| CN101794960A (en) * | 2010-01-21 | 2010-08-04 | 北京大学 | Method for tuning collimation of light path of cavity of excimer laser |
| CN105811232A (en) * | 2016-05-06 | 2016-07-27 | 中国科学院合肥物质科学研究院 | Adjustment method for generation-mode excitation light path of passive optical resonant cavity |
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| CN101794960A (en) * | 2010-01-21 | 2010-08-04 | 北京大学 | Method for tuning collimation of light path of cavity of excimer laser |
| CN105811232A (en) * | 2016-05-06 | 2016-07-27 | 中国科学院合肥物质科学研究院 | Adjustment method for generation-mode excitation light path of passive optical resonant cavity |
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