CN115094388B - Heating pipe coating method and rose gold pipe prepared by heating pipe coating method - Google Patents

Heating pipe coating method and rose gold pipe prepared by heating pipe coating method Download PDF

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CN115094388B
CN115094388B CN202210801926.5A CN202210801926A CN115094388B CN 115094388 B CN115094388 B CN 115094388B CN 202210801926 A CN202210801926 A CN 202210801926A CN 115094388 B CN115094388 B CN 115094388B
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coating
quartz glass
glass tube
tube
layer
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CN115094388A (en
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叶伟洋
钱伟
叶智龙
叶超祺
唐烽
陈炯锋
谢房安
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Guangdong Xinda Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/085Oxides of iron group metals
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/40Heating elements having the shape of rods or tubes
    • H05B3/42Heating elements having the shape of rods or tubes non-flexible

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The invention relates to a heating pipe film plating method and a rose gold pipe and a gold pipe prepared by the heating pipe film plating method, wherein the heating pipe film plating method comprises the following steps: providing a quartz glass tube, siO 2 The content is more than 99.5 percent; polishing and cleaning respectively; feeding the material to a coating material frame of coating equipment; introducing oxygen and argon at 125-135 ℃ in a vacuum environment of 0.4-0.6MPa, and starting an ion source in a coating device to bombard the surface of the quartz glass tube, wherein the total amount of the introduced oxygen and argon is 20-32cc; and (3) evaporating and coating the coating material by adopting an electron gun of a coating device, and heating the pipe wall by adopting the electron gun for 160-200 seconds before coating the first layer. The adhesive force of the surface of the quartz glass tube to the coating layer is improved, atoms separated out by a heating source are better adsorbed, the first layer of the coating layer is tightly combined, and the thermal efficiency is further improved.

Description

加热管镀膜方法及其制备得到的玫瑰金管及黄金管Heating tube coating method and rose gold tube and gold tube prepared therefrom

技术领域Technical field

本发明涉及加热管制备技术领域,特别是涉及一种加热管镀膜方法及其制备得到的玫瑰金管及黄金管。The present invention relates to the technical field of heating tube preparation, and in particular to a heating tube coating method and the rose gold tube and gold tube prepared therefrom.

背景技术Background technique

远红外加热管是采用了经特殊工艺加工的石英玻璃管、配用电阻合材料作为发热子,加热管可以吸收来自电热丝辐射的几乎全部的可见光和近红外光、且能使之转化为远红外辐射,因而具有较大应用场景。The far-infrared heating tube uses a specially processed quartz glass tube and a resistance composite material as the heating element. The heating tube can absorb almost all the visible light and near-infrared light radiated from the electric heating wire and convert it into far-infrared light. Infrared radiation, so it has a large application scenario.

加热管通常会在石英管外层采用镀膜工艺形成氧化层,以提高热效率。然而,目前的加热管的镀层工艺,容易存在下列问题:首先,膜层均一性相对较差,影响整体产品性能及品质,其次,目前的镀层,热效率相对较低,还有很大的改善空间。再者,采用传统镀层的加热管,使用时相对较为刺眼,长时间观看后容易造成眼睛模糊。Heating tubes usually use a coating process to form an oxide layer on the outer layer of the quartz tube to improve thermal efficiency. However, the current coating process of heating tubes is prone to the following problems: First, the uniformity of the film layer is relatively poor, which affects the overall product performance and quality. Second, the current coating has relatively low thermal efficiency, and there is still a lot of room for improvement. . Furthermore, heating tubes using traditional coatings are relatively glaring when used, and may easily cause blurry eyes after long viewing.

发明内容Contents of the invention

基于此,有必要针对提供膜层均一性相对较好、能够提高热效率以及能够改善使用时刺眼问题的一种加热管镀膜方法及其制备得到的玫瑰金管及黄金管。Based on this, it is necessary to provide a heating tube coating method that has relatively good film uniformity, can improve thermal efficiency, and can improve the glare problem during use, and the rose gold tube and gold tube prepared therefrom.

一种加热管镀膜方法,包括如下步骤:A heating tube coating method includes the following steps:

提供石英玻璃管,其中所述石英玻璃管使用材质是SiO2含量为99.5%以上的透明石英玻璃管;Provide a quartz glass tube, wherein the quartz glass tube is made of a transparent quartz glass tube with a SiO 2 content of more than 99.5%;

对所述石英玻璃管分别进行抛光及清洗处理;The quartz glass tubes are polished and cleaned respectively;

将所述石英玻璃管上料至镀膜设备的镀膜料架上;Load the quartz glass tube onto the coating material rack of the coating equipment;

在0.4-0.6MPa的真空环境、125-135摄氏度温度下,通入氧气和氩气,开启镀膜设备中的离子源对所述石英玻璃管表面进行轰击处理,其中,氧气的重入量为10-20cc;氩气的通入量为10-30cc;且氧气和氩气的通入量总量为20-32cc;In a vacuum environment of 0.4-0.6MPa and a temperature of 125-135 degrees Celsius, oxygen and argon are introduced, and the ion source in the coating equipment is turned on to perform bombardment treatment on the surface of the quartz glass tube. The re-introduction amount of oxygen is 10 -20cc; the amount of argon gas introduced is 10-30cc; and the total amount of oxygen and argon gas introduced is 20-32cc;

采用镀膜设备的电子枪对镀膜材料进行蒸发镀膜,所述镀膜材料为二氧化硅和三氧化二铁,两者来回交替镀膜,在所述石英玻璃管表面形成镀膜层,其中,首层为二氧化硅镀膜层,且在镀膜所述首层之前,采用电子枪对所述石英玻璃管的管壁加热160秒-200秒。The electron gun of the coating equipment is used to evaporate the coating material. The coating material is silicon dioxide and ferric oxide. The two are alternately coated back and forth to form a coating layer on the surface of the quartz glass tube. The first layer is silicon dioxide. Silicon coating layer, and before coating the first layer, use an electron gun to heat the tube wall of the quartz glass tube for 160 seconds to 200 seconds.

在其中一个实施例中,所述石英玻璃管使用材质是SiO2含量为99.8%的透明石英玻璃管。In one embodiment, the quartz glass tube is made of a transparent quartz glass tube with a SiO 2 content of 99.8%.

在其中一个实施例中,在镀膜所述首层之前,采用电子枪对所述石英玻璃管的管壁加热180秒。In one embodiment, before coating the first layer, an electron gun is used to heat the wall of the quartz glass tube for 180 seconds.

在其中一个实施例中,所述电子枪对所述石英玻璃管的管壁加热时,所述电子枪的速率为15A/s。In one embodiment, when the electron gun heats the tube wall of the quartz glass tube, the rate of the electron gun is 15 A/s.

在其中一个实施例中,形成所述镀膜层的各二氧化硅镀膜层时的所述电子枪的速率为25A/s。In one embodiment, the rate of the electron gun when forming each silicon dioxide coating layer of the coating layer is 25 A/s.

在其中一个实施例中,形成所述镀膜层的各三氧化二铁膜层时的所述电子枪的速率为5A/s。In one embodiment, the rate of the electron gun when forming each iron oxide film layer of the coating layer is 5 A/s.

在其中一个实施例中,在形成所述镀膜层之后,所述加热管镀膜方法还包括:In one embodiment, after forming the coating layer, the heating tube coating method further includes:

将形成所述镀膜层的所述石英玻璃管在所述镀膜设备中自放7min后,再开室门下料。After the quartz glass tube forming the coating layer is placed in the coating equipment for 7 minutes, the chamber door is opened to unload the material.

在其中一个实施例中,采用电子枪对所述石英玻璃管的管壁加热160秒-200秒时,仅通入氩气30cc,未通入氧气。In one embodiment, when an electron gun is used to heat the wall of the quartz glass tube for 160 seconds to 200 seconds, only 30cc of argon gas is introduced, and no oxygen is introduced.

在其中一个实施例中,所述镀膜层的交替层数为8层-10层。In one embodiment, the number of alternating layers of the coating layer is 8-10 layers.

本申请还提供一种加热管,采用如上任一实施例中所述的加热管镀膜方法制备得到。This application also provides a heating tube, which is prepared by the heating tube coating method described in any of the above embodiments.

本申请还提供一种玫瑰金管,采用如上任一实施例中所述的加热管镀膜方法制备得到,其中,所述加热管为玫瑰金管,所述镀膜层的交替层数为10层。This application also provides a rose gold tube, which is prepared by the heating tube coating method as described in any of the above embodiments, wherein the heating tube is a rose gold tube, and the number of alternating layers of the coating layer is 10.

本申请还提供一种黄金管,采用如上任一实施例中所述的加热管镀膜方法制备得到,其中,所述加热管为黄金管,所述镀膜层的交替层数为8层。This application also provides a gold tube, which is prepared by the heating tube coating method as described in any of the above embodiments, wherein the heating tube is a gold tube, and the number of alternating layers of the coating layer is 8.

上述加热管镀膜方法,应用在用于作加热管的石英玻璃管上对其进行镀膜形成氧化层,首先对石英玻璃管进行抛光处理,去除表面杂质,弥补一些缺陷,比如说划痕或者是磨损的情形,提高石英玻璃管的透明度和折射率,以提高热效率,且使得膜层的镀层面相对较为均匀,进而使得镀膜层成型时相对较为均匀,提高了光学性能。通过在镀膜所述首层之前,采用电子枪对所述石英玻璃管的管壁加热160秒-200秒,提高石英玻璃管表面对镀膜层的附着力,更好的吸附加热源离析出来的原子,进而使得镀膜层的首层结合较为紧密,进一步提高热效率。通过选用所述镀膜材料为二氧化硅和三氧化二铁,两者来回交替镀膜,在所述石英玻璃管表面形成镀膜层屏蔽大量紫外光,将大部分紫外光转换为远红外线,使紫外线系没那么刺眼;而且结合在形成首层之前采用电子枪对所述石英玻璃管的管壁加热,能够进一步提高热效率约3%左右,大幅提高热效率。此外,通过在镀膜中,在0.4-0.6MPa的真空环境、125-135摄氏度温度下,结合电子枪的速率为15-25A/s,能够提高镀膜效率,镀膜整体时间在60-70min即可完成,相较于传统工艺本申请减少了镀膜时间和镀膜温度,因而能够提高生产效率和减少能耗。The above heating tube coating method is used to coat the quartz glass tube used as the heating tube to form an oxide layer. First, the quartz glass tube is polished to remove surface impurities and make up for some defects, such as scratches or wear. In this case, the transparency and refractive index of the quartz glass tube are increased to improve thermal efficiency and make the coating layer of the film layer relatively uniform, which in turn makes the coating layer relatively uniform during molding and improves the optical performance. By using an electron gun to heat the wall of the quartz glass tube for 160 seconds to 200 seconds before coating the first layer, the adhesion of the surface of the quartz glass tube to the coating layer is improved, and the atoms separated from the heating source are better absorbed. This in turn makes the first layer of the coating layer more tightly bonded, further improving thermal efficiency. By selecting the coating materials as silicon dioxide and ferric oxide, and coating them alternately back and forth, a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and convert most of the ultraviolet light into far-infrared rays, making the ultraviolet system It is not so dazzling; and combined with the use of an electron gun to heat the wall of the quartz glass tube before forming the first layer, the thermal efficiency can be further improved by about 3%, significantly improving the thermal efficiency. In addition, by using a vacuum environment of 0.4-0.6MPa and a temperature of 125-135 degrees Celsius in the coating, combined with an electron gun rate of 15-25A/s, the coating efficiency can be improved, and the overall coating time can be completed in 60-70 minutes. Compared with traditional processes, this application reduces coating time and coating temperature, thereby improving production efficiency and reducing energy consumption.

附图说明Description of drawings

图1为本发明一实施例的加热管镀膜方法的步骤图。Figure 1 is a step diagram of a heating tube coating method according to an embodiment of the present invention.

具体实施方式Detailed ways

为了便于理解本发明,为使本发明的上述目的、特征和优点能够更加明显易懂,下面结合附图对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明,附图中给出了本发明的较佳实施方式。但是,本发明可以以许多不同的形式来实现,并不限于本文所描述的实施方式。相反地,提供这些实施方式的目的是使对本发明的公开内容理解的更加透彻全面。本发明能够以很多不同于在此描述的其它方式来实施,本领域技术人员可以在不违背本发明内涵的情况下做类似改进,因此本发明不受下面公开的具体实施例的限制。In order to facilitate understanding of the present invention and to make the above objects, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the invention, and the preferred embodiments of the invention are illustrated in the accompanying drawings. However, the invention may be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that a thorough understanding of the disclosure of the present invention will be provided. The present invention can be implemented in many other ways different from those described here. Those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

一实施例中,请参阅图1,一种加热管镀膜方法,包括如下步骤:In one embodiment, please refer to Figure 1, a heating tube coating method includes the following steps:

S100:提供石英玻璃管,其中所述石英玻璃管使用材质是SiO2含量为99.5%以上的透明石英玻璃管;S100: Provide quartz glass tubes, where the material of the quartz glass tube is a transparent quartz glass tube with a SiO 2 content of more than 99.5%;

本实施例中,通过此采用石英玻璃管使用材质SiO2含量为99.5%以上的透明石英玻璃管;能够提高热效率。具体的,石英玻璃管使用材质SiO2含量为99.5%或者99.8%。优选的,石英玻璃管使用材质SiO2含量为99.8%。更优选的,石英玻璃管使用材质SiO2含量为99.8%以上。本实施例中,通过选用SiO2含量为99.8%的石英玻璃管,能够进一步提高加热管的热效率。In this embodiment, by using a quartz glass tube and a transparent quartz glass tube with a SiO 2 content of more than 99.5%, the thermal efficiency can be improved. Specifically, the SiO 2 content of the quartz glass tube used is 99.5% or 99.8%. Preferably, the SiO 2 content of the quartz glass tube is 99.8%. More preferably, the SiO 2 content of the quartz glass tube is more than 99.8%. In this embodiment, by selecting a quartz glass tube with a SiO 2 content of 99.8%, the thermal efficiency of the heating tube can be further improved.

例如,石英玻璃管为圆管。再如,石英玻璃管的管壁厚度为0.98mm~1.2mm。例如,石英玻璃管的管径为经申请人发现,采用上述管壁厚度和管径,同时结合石英玻璃管使用材质SiO2含量为99.8%,具有较好的透光性,能够进一步提高加热管的热效率,减少热损耗。For example, quartz glass tubes are round tubes. For another example, the wall thickness of a quartz glass tube is 0.98mm~1.2mm. For example, the diameter of a quartz glass tube is The applicant found that the above-mentioned tube wall thickness and tube diameter, combined with the SiO 2 content of the quartz glass tube material used is 99.8%, has good light transmittance, can further improve the thermal efficiency of the heating tube and reduce heat loss.

S200:对所述石英玻璃管分别进行抛光及清洗处理;S200: Polish and clean the quartz glass tubes respectively;

本实施例中,通过对石英玻璃管进行抛光处理,能够弥补一些缺陷,比如说划痕或者是磨损的情形,提高石英玻璃管的透明度和折射率,以提高热效率,且使得膜层的镀层面相对较为均匀,进而使得镀膜层成型时相对较为均匀,提高了光学性能。具体的,可采用抛光粉抛光处理,通过利用抛光粉对石英玻璃管进行抛光处理,利用其高速摩擦来去除表面的划痕或者是磨损等,能够较大限度的提高其透光性和折射效果。例如,所述抛光粉为稀土抛光粉,主要成分为氧化铈。当然,抛光的形式不局限于此,也可以为本领域所公知的其它抛光方式。In this embodiment, polishing the quartz glass tube can compensate for some defects, such as scratches or wear, improve the transparency and refractive index of the quartz glass tube, improve thermal efficiency, and make the coating layer of the film layer It is relatively uniform, which in turn makes the coating layer relatively uniform during molding and improves the optical performance. Specifically, polishing powder can be used to polish the quartz glass tube, and its high-speed friction can be used to remove scratches or wear on the surface, which can maximize its light transmittance and refraction effect. . For example, the polishing powder is a rare earth polishing powder, and its main component is cerium oxide. Of course, the polishing form is not limited to this, and may also be other polishing methods known in the art.

本实施例中,通过对在抛光之后进行石英玻璃管清洗处理,以去除其表面的杂质和污秽,进一步提高玻璃管的透光性,使得热效率较高。具体的,可采用超声清洗的方式。超声清洗时可以结合市售的超声波清洗剂进行清洗。清洗后去除其上的水分备用。当然,清洗的形式不局限于此,也可以为本领域所公知的其它清洗方式。In this embodiment, the quartz glass tube is cleaned after polishing to remove impurities and contamination on its surface, thereby further improving the light transmittance of the glass tube and resulting in higher thermal efficiency. Specifically, ultrasonic cleaning can be used. Ultrasonic cleaning can be combined with commercially available ultrasonic cleaning agents. After cleaning, remove the moisture on it and set aside. Of course, the form of cleaning is not limited to this, and may also be other cleaning methods known in the art.

本申请中,通过对石英玻璃管进行抛光处理,去除表面杂质,弥补一些缺陷,比如说划痕或者是磨损的情形,提高石英玻璃管的透明度和折射率,以提高热效率,且使得膜层的镀层面相对较为均匀,进而使得镀膜层成型时相对较为均匀,提高了光学性能。In this application, the quartz glass tube is polished to remove surface impurities, make up for some defects, such as scratches or wear, and improve the transparency and refractive index of the quartz glass tube to improve thermal efficiency and make the film layer more durable. The coating layer is relatively uniform, which makes the coating layer relatively uniform during molding and improves the optical performance.

S300:将所述石英玻璃管上料至镀膜设备的镀膜料架上;S300: Load the quartz glass tube onto the coating material rack of the coating equipment;

通过将清洗后的石英玻璃管,去除其上的水分后,将其上料至镀膜设备的镀膜料架上,用于在镀膜设备中进行镀膜准备。镀膜料架用于安装石英玻璃管。一实施例中,所述镀膜设备为真空镀膜机,其型号BLL-1500F,其为丹阳市宝来利真空机有限公司生产。After removing the moisture from the cleaned quartz glass tube, load it onto the coating material rack of the coating equipment for preparation of coating in the coating equipment. The coating rack is used to install quartz glass tubes. In one embodiment, the coating equipment is a vacuum coating machine, its model is BLL-1500F, which is produced by Danyang Baolaili Vacuum Machine Co., Ltd.

具体的,放置镀膜料架上之后,将其装入真空镀膜机,然后开冷水机并控制气压为镀膜环境,比如,本申请的0.4-0.6MPa,同时控制温度为125-135摄氏度。Specifically, after placing the coating material rack, load it into the vacuum coating machine, then turn on the chiller and control the air pressure to the coating environment, for example, 0.4-0.6MPa in this application, and control the temperature to 125-135 degrees Celsius.

S400:在0.4-0.6MPa的真空环境、125-135摄氏度温度下,通入氧气和氩气,开启镀膜设备中的离子源对所述石英玻璃管表面进行轰击处理,其中,氧气的重入量为10-20cc;氩气的通入量为10-30cc;且氧气和氩气的通入量总量为20-32cc;;S400: In a vacuum environment of 0.4-0.6MPa and a temperature of 125-135 degrees Celsius, introduce oxygen and argon, turn on the ion source in the coating equipment to bombard the surface of the quartz glass tube, where the re-introduction of oxygen The input amount of argon gas is 10-30cc; and the total input amount of oxygen and argon gas is 20-32cc;;

本申请中,在气压为0.4-0.6MPa,温度为125-135摄氏度时,通入氧气和氩气。其中控制整体通入量为20-32cc。具体的,实际应用上,先通入氩气再融入氧气,更具体的,开启镀膜设备中的离子源对所述石英玻璃管表面进行首次轰击处理时,加热源未将材料加热,采用电子枪对所述石英玻璃管的管壁加热160秒-200秒,此过程中仅通入氩气30cc,在氩气的保护下使玻璃管先被加热,提高后续石英玻璃管表面对镀膜层的附着力,更好地吸附加热源离析出来的原子,进而使得镀膜层的首层结合较为紧密,进一步提高热效率。通过选用所述镀膜材料为二氧化硅和三氧化二铁,两者来回交替镀膜,在所述石英玻璃管表面形成镀膜层屏蔽大量紫外光,将大部分紫外光转换为远红外线,使紫外线系没那么刺眼;而且结合在形成首层之前采用电子枪对所述石英玻璃管的管壁加热,大幅提高热效率。优选的,采用电子枪对所述石英玻璃管的管壁加热180秒,优选的,电子枪对所述石英玻璃管的管壁加热时,所述电子枪的速率为15A/s。如此,经申请人研究发现,此附着力效果最好,且镀层后光学性能较好,相较于传统热效率能大幅提高,且加热效果较好。In this application, when the air pressure is 0.4-0.6MPa and the temperature is 125-135 degrees Celsius, oxygen and argon are introduced. The overall input volume is controlled to be 20-32cc. Specifically, in practical applications, argon gas is first introduced and then oxygen is blended. More specifically, when the ion source in the coating equipment is turned on to bombard the surface of the quartz glass tube for the first time, the heating source does not heat the material, and an electron gun is used to The tube wall of the quartz glass tube is heated for 160 seconds to 200 seconds. During this process, only 30cc of argon gas is introduced. Under the protection of argon gas, the glass tube is heated first to improve the adhesion of the subsequent quartz glass tube surface to the coating layer. , to better absorb the atoms separated from the heating source, thereby making the first layer of the coating layer more tightly bonded, further improving thermal efficiency. By selecting the coating materials as silicon dioxide and ferric oxide, and coating them alternately back and forth, a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and convert most of the ultraviolet light into far-infrared rays, making the ultraviolet system It is not so dazzling; and combined with the use of an electron gun to heat the wall of the quartz glass tube before forming the first layer, the thermal efficiency is greatly improved. Preferably, an electron gun is used to heat the wall of the quartz glass tube for 180 seconds. Preferably, when the electron gun heats the wall of the quartz glass tube, the rate of the electron gun is 15 A/s. In this way, the applicant's research found that this adhesion effect is the best, and the optical properties after coating are better. Compared with traditional thermal efficiency, the thermal efficiency can be greatly improved, and the heating effect is better.

S500:采用镀膜设备的电子枪对镀膜材料进行蒸发镀膜,所述镀膜材料为二氧化硅和三氧化二铁,两者来回交替镀膜,在所述石英玻璃管表面形成镀膜层,其中,首层为二氧化硅镀膜层,且在镀膜所述首层之前,采用电子枪对所述石英玻璃管的管壁加热160秒-200秒。S500: Use the electron gun of the coating equipment to evaporate the coating material. The coating material is silicon dioxide and ferric oxide. The two are alternately coated back and forth to form a coating layer on the surface of the quartz glass tube. The first layer is Silicon dioxide coating layer, and before coating the first layer, use an electron gun to heat the tube wall of the quartz glass tube for 160 seconds to 200 seconds.

本申请中,通过选用所述镀膜材料为二氧化硅和三氧化二铁,两者来回交替镀膜,在所述石英玻璃管表面形成镀膜层屏蔽大量紫外光,将大部分紫外光转换为远红外线,使紫外线系没那么刺眼;而且结合在形成首层之前采用电子枪对所述石英玻璃管的管壁加热,能够进一步提高热效率约3%左右,大幅提高热效率。此外,通过在镀膜中,在0.4-0.6MPa的真空环境、125-135摄氏度温度下,结合电子枪的速率为15-25A/s,能够提高镀膜效率,镀膜整体时间在60-70min即可完成,相较于传统工艺减少了镀膜时间和镀膜温度,因而能够提高生产效率和减少能耗。In this application, by selecting the coating materials to be silicon dioxide and ferric oxide, and coating them alternately back and forth, a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light and convert most of the ultraviolet light into far-infrared rays. , making the ultraviolet system less dazzling; and combined with the use of an electron gun to heat the wall of the quartz glass tube before forming the first layer, the thermal efficiency can be further improved by about 3%, significantly improving the thermal efficiency. In addition, by using a vacuum environment of 0.4-0.6MPa and a temperature of 125-135 degrees Celsius in the coating, combined with an electron gun rate of 15-25A/s, the coating efficiency can be improved, and the overall coating time can be completed in 60-70 minutes. Compared with traditional processes, the coating time and coating temperature are reduced, thus improving production efficiency and reducing energy consumption.

一具体实施例中,形成所述镀膜层的各二氧化硅镀膜层时的所述电子枪的速率为25A/s。再如,成所述镀膜层的各三氧化二铁膜层时的所述电子枪的速率为5A/s。如此,形成的膜层附着力好且成膜效率较高。In a specific embodiment, the rate of the electron gun when forming each silicon dioxide coating layer of the coating layer is 25 A/s. For another example, the speed of the electron gun when forming each iron oxide film layer of the coating layer is 5 A/s. In this way, the formed film layer has good adhesion and high film-forming efficiency.

一实施例中,所述镀膜层的交替层数为8层-10层。一具体实施例中,当镀膜层为10层时,镀膜层的自所述石英玻璃管的最内层开始,依次为:SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3;其各层厚度依次为:2280A\841A\2280A\1682A\2280A\1682A\2280A\1682A\2280A\841A,厚度单位A即为埃,如此,生成的加热管为玫瑰金管,外观美观、档次高,屏蔽大量紫外光,将大部分紫外光转换为远红外线,提高热效率约3%左右,同时使其紫外线系没那么刺眼;避免长时间观看后造成人员模糊。In one embodiment, the number of alternating layers of the coating layer ranges from 8 to 10 layers. In a specific embodiment, when there are 10 coating layers, the coating layers starting from the innermost layer of the quartz glass tube are: SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 ; The thickness of each layer is: 2280A\841A\2280A\1682A\2280A\1682A\2280A\1682A\2280A\841A, thickness The unit A is angstrom. In this way, the generated heating tube is a rose gold tube with beautiful appearance and high grade. It shields a large amount of ultraviolet light and converts most of the ultraviolet light into far-infrared rays. It improves the thermal efficiency by about 3% and makes the ultraviolet rays invisible. So dazzling; avoid blurring people after long viewing.

又一具体实施例中,当镀膜层为8层时,镀膜层的自所述石英玻璃管的最内层开始,依次为:SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3,其各层厚度依次为:2337A\505A\2337A\1009A\2337A\1009A\2337A\1009A,如此,生成的加热管为黄金管。如此,生成的加热管为黄金管,外观美观、档次高,屏蔽大量紫外光,将大部分紫外光转换为远红外线,提高热效率约3%左右,同时使其紫外线系没那么刺眼;避免长时间观看后造成人员模糊。In another specific embodiment, when there are 8 coating layers, the coating layers starting from the innermost layer of the quartz glass tube are: SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 , the thickness of each layer is: 2337A\505A\2337A\1009A\2337A\1009A\2337A\1009A. In this way, the generated heating tube is a gold tube. In this way, the generated heating tube is a gold tube with beautiful appearance and high grade. It shields a large amount of ultraviolet light and converts most of the ultraviolet light into far-infrared rays, improving the thermal efficiency by about 3% and making the ultraviolet rays less glaring; avoid long-term use. People are blurred after viewing.

一可选实施例中,生成所述玫瑰金管采用如下的表1的真空镀膜机的技术参数,生成所述玫瑰金管采用如下的表2的材料。可选的,生成黄金管采用如下的表3的真空镀膜机的技术参数,生成所述黄金管采用如下的表4的材料。In an optional embodiment, the technical parameters of the vacuum coating machine in Table 1 below are used to generate the rose gold tube, and the materials in Table 2 below are used to generate the rose gold tube. Optionally, the technical parameters of the vacuum coating machine in Table 3 below are used to generate the gold tube, and the materials in Table 4 below are used to generate the gold tube.

表1玫瑰金管镀膜技术参数Table 1 Technical parameters of rose gold tube coating

表2玫瑰金管镀膜使用材料Table 2 Materials used for rose gold tube coating

表3黄金管镀膜技术参数Table 3 Technical parameters of gold tube coating

表4黄金管镀膜使用材料Table 4 Materials used for gold tube coating

表1中,其为玫瑰金管镀膜技术参数,镀膜温度为130摄氏度,氧气和氩气的放气温度为300度,材料名和坩埚号为选择相应材料,坩埚装入了相应的材料。其中第一层的电子枪的镀膜速率为15A/s,其时间为180秒,厚度为0A,表明其中第1层为对石英玻璃管进行在镀膜首层之前,采用电子枪对所述石英玻璃管的管壁加热180秒,以提高附着力,加热源未将材料加热,无原子离析出来,也即,第1层实际不存在,实际的镀膜层是从第2层开始的。后面的有厚度数值的为相应的镀膜层,采用相应的电子枪速率生成相应的厚度即可,其他时间为0但有厚度,该现象是在镀膜过程中不做时间限制,镀完一层的厚度后直接跳转下一层。在源号中,1为穴枪+阻蒸,2为环枪。,“模式(18)(0:恒流)(1:恒压)”中,恒流恒压是记录编号,便于下面工艺上的一个选择模式,模式18是一个预存的记录标号,具体的恒流恒压其和机型相匹配,比如本实施例采用的真空镀膜机BLL-1500F为丹阳市宝来利真空机有限公司所生产,上述参数为在其上优化制备得到。需要说明的是,在表1中控制氧气和氩气的总流量,本申请前面的限定为20-32cc,第3层中,充氧2:20cc,充氩12,总流量数为32cc。Table 1 shows the technical parameters of the rose gold tube coating. The coating temperature is 130 degrees Celsius, the outgassing temperature of oxygen and argon is 300 degrees, the material name and crucible number are the corresponding materials selected, and the crucible is filled with the corresponding materials. The coating rate of the electron gun of the first layer is 15A/s, the time is 180 seconds, and the thickness is 0A, indicating that the first layer is used to coat the quartz glass tube before coating the first layer. The electron gun is used to coat the quartz glass tube. The tube wall is heated for 180 seconds to improve adhesion. The heating source does not heat the material and no atoms are segregated. That is, the first layer does not actually exist, and the actual coating layer starts from the second layer. The ones with thickness values at the back are the corresponding coating layers. You can use the corresponding electron gun rate to generate the corresponding thickness. The other times are 0 but have thickness. This phenomenon is that there is no time limit in the coating process. The thickness of the finished layer is Then jump directly to the next level. In the source number, 1 is the hole gun + steam resistance, and 2 is the ring gun. , in "Mode (18) (0: Constant Current) (1: Constant Voltage)", the constant current and constant voltage is the record number, which is convenient for a selection mode in the following process. Mode 18 is a pre-stored record number. The specific constant The flow constant pressure matches the machine model. For example, the vacuum coating machine BLL-1500F used in this embodiment is produced by Danyang Baolaili Vacuum Machine Co., Ltd., and the above parameters are optimized and prepared on it. It should be noted that the total flow rate of oxygen and argon is controlled in Table 1. The previous limit in this application is 20-32cc. In the third layer, the oxygen filling is 2:20cc, the argon filling is 12, and the total flow rate is 32cc.

表2中,二氧化硅的密度为2.648g/cm3,Fe2O3的密度为5.24g/cm3,材料信息与购买的材料相对应,相应参数可以找镀膜材料厂家,电子枪控制、预存设置、调节控制回路及主工具和相应的镀膜机匹配,比如本实施例的采用的真空镀膜机BLL-1500F为丹阳市宝来利真空机有限公司所生产,上述参数为在其上优化制备得到。表3,表4生成黄金管的技术参数及工艺类型,其为与上述类型,也是申请人优化制备得到。In Table 2, the density of silicon dioxide is 2.648g/cm3, and the density of Fe2O3 is 5.24g/cm3. The material information corresponds to the purchased material. The corresponding parameters can be found from the coating material manufacturer, electron gun control, pre-stored settings, and adjustment control loop. And the main tool is matched with the corresponding coating machine. For example, the vacuum coating machine BLL-1500F used in this embodiment is produced by Danyang Baolaili Vacuum Machine Co., Ltd., and the above parameters are optimized and prepared on it. Table 3 and Table 4 are the technical parameters and process types for generating gold tubes, which are similar to the above types and are also optimized and prepared by the applicant.

本实施例中,玫瑰金管和黄金管基于本申请的加热管镀膜方法,同时结合上述镀膜技术参数和镀膜使用材料,分别制备得到的玫瑰金管和黄金管,具有如下显著优点:1、镀层的作用主要是屏蔽大量紫外光,将大部分紫外光转换为远红外线,使其紫外线系没那么刺眼;2,厚度是由设备中的仪器晶控控制,但其整体相对较为均一;3、外观美观、档次高,屏蔽大量紫外光,将大部分紫外光转换为远红外线,提高热效率约3%左右,同时使其紫外线系没那么刺眼;避免长时间观看后造成人员模糊。需要额外说明的是,玫瑰金管和黄金管性能无太大影响,玫瑰金和普通金紫外线系数是一样的,只是玫瑰金的红光没那么多。In this embodiment, the rose gold tube and the gold tube are respectively prepared based on the heating tube coating method of the present application, combined with the above-mentioned coating technical parameters and coating materials, and have the following significant advantages: 1. The role of the coating It mainly shields a large amount of ultraviolet light and converts most of the ultraviolet light into far-infrared rays, making the ultraviolet rays less dazzling; 2. The thickness is controlled by the instrument crystal control in the equipment, but its overall appearance is relatively uniform; 3. Beautiful appearance, It is of high grade, shields a large amount of ultraviolet light, converts most of the ultraviolet light into far-infrared rays, improves thermal efficiency by about 3%, and at the same time makes the ultraviolet rays less dazzling; avoiding blurring of people after long-term viewing. It should be noted that the performance of rose gold tubes and gold tubes does not have much impact. The UV coefficients of rose gold and ordinary gold are the same, but the red light of rose gold is not so much.

当然,上面结合玫瑰金管和黄金管的具体镀膜技术参数以及使用材料,结合表1至4,只是对本申请的一种可选的举例说明,应当理解的是,不应认为其为本申请的整体的限制。Of course, the above combination of specific coating technical parameters and materials used for rose gold tubes and gold tubes, combined with Tables 1 to 4, is only an optional illustration of the present application. It should be understood that it should not be considered as the entire application. limits.

又一实施例中,在形成所述镀膜层之后,所述加热管镀膜方法还包括:In yet another embodiment, after forming the coating layer, the heating tube coating method further includes:

将形成所述镀膜层的所述石英玻璃管在所述镀膜设备中自放7min后,再开室门下料。After the quartz glass tube forming the coating layer is placed in the coating equipment for 7 minutes, the chamber door is opened to unload the material.

上述加热管镀膜方法,应用在用于作加热管的石英玻璃管上对其进行镀膜形成氧化层,首先对石英玻璃管进行抛光清洗处理,去除表面杂质,弥补一些缺陷,比如说划痕或者是磨损的情形,提高石英玻璃管的透明度和折射率,以提高热效率,且使得膜层的镀层面相对较为均匀,进而使得镀膜层成型时相对较为均匀,提高了光学性能。通过在镀膜所述首层之前,采用电子枪对所述石英玻璃管的管壁加热160秒-200秒,提高石英玻璃管表面对镀膜层的附着力,更好的吸附加热源离析出来的原子,进而使得镀膜层的首层结合较为紧密,进一步提高热效率。通过选用所述镀膜材料为二氧化硅和三氧化二铁,两者来回交替镀膜,在所述石英玻璃管表面形成镀膜层屏蔽大量紫外光,将大部分紫外光转换为远红外线,使紫外线系没那么刺眼;而且结合在形成首层之前采用电子枪对所述石英玻璃管的管壁加热,能够进一步提高热效率约3%左右,大幅提高热效率。此外,通过在镀膜中,在0.4-0.6MPa的真空环境、125-135摄氏度温度下,结合电子枪的速率为15-25A/s,能够提高镀膜效率,镀膜整体时间在60-70min即可完成,相较于传统工艺减少了镀膜时间和镀膜温度,因而能够提高生产效率和减少能耗。The above heating tube coating method is used to coat the quartz glass tube used as the heating tube to form an oxide layer. First, the quartz glass tube is polished and cleaned to remove surface impurities and make up for some defects, such as scratches or In the case of wear and tear, the transparency and refractive index of the quartz glass tube are improved to improve thermal efficiency and make the coating layer of the film layer relatively uniform, which in turn makes the coating layer relatively uniform during molding and improves the optical performance. By using an electron gun to heat the wall of the quartz glass tube for 160 seconds to 200 seconds before coating the first layer, the adhesion of the surface of the quartz glass tube to the coating layer is improved, and the atoms separated from the heating source are better absorbed. This in turn makes the first layer of the coating layer more tightly bonded, further improving thermal efficiency. By selecting the coating materials as silicon dioxide and ferric oxide, and coating them alternately back and forth, a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and convert most of the ultraviolet light into far-infrared rays, making the ultraviolet system It is not so dazzling; and combined with the use of an electron gun to heat the wall of the quartz glass tube before forming the first layer, the thermal efficiency can be further improved by about 3%, significantly improving the thermal efficiency. In addition, by using a vacuum environment of 0.4-0.6MPa and a temperature of 125-135 degrees Celsius in the coating, combined with an electron gun rate of 15-25A/s, the coating efficiency can be improved, and the overall coating time can be completed in 60-70 minutes. Compared with traditional processes, the coating time and coating temperature are reduced, thus improving production efficiency and reducing energy consumption.

本申请还提供一种加热管,采用如上任一实施例中所述的加热管镀膜方法制备得到。This application also provides a heating tube, which is prepared by the heating tube coating method described in any of the above embodiments.

本申请还提供一种玫瑰金管,采用如上任一实施例中所述的加热管镀膜方法制备得到,其中,所述加热管为玫瑰金管,所述镀膜层的交替层数为10层。This application also provides a rose gold tube, which is prepared by the heating tube coating method as described in any of the above embodiments, wherein the heating tube is a rose gold tube, and the number of alternating layers of the coating layer is 10.

本申请还提供一种黄金管,采用如上任一实施例中所述的加热管镀膜方法制备得到,其中,所述加热管为黄金管,所述镀膜层的交替层数为8层。This application also provides a gold tube, which is prepared by the heating tube coating method as described in any of the above embodiments, wherein the heating tube is a gold tube, and the number of alternating layers of the coating layer is 8.

上述加热管镀膜方法,应用在用于作加热管的石英玻璃管上对其进行镀膜形成氧化层,首先对石英玻璃管进行抛光清洗处理,去除表面杂质,弥补一些缺陷,比如说划痕或者是磨损的情形,提高石英玻璃管的透明度和折射率,以提高热效率,且使得膜层的镀层面相对较为均匀,进而使得镀膜层成型时相对较为均匀,提高了光学性能。通过在镀膜所述首层之前,采用电子枪对所述石英玻璃管的管壁加热160秒-200秒,提高石英玻璃管表面对镀膜层的附着力,更好的吸附加热源离析出来的原子,进而使得镀膜层的首层结合较为紧密,进一步提高热效率。通过选用所述镀膜材料为二氧化硅和三氧化二铁,两者来回交替镀膜,在所述石英玻璃管表面形成镀膜层屏蔽大量紫外光,将大部分紫外光转换为远红外线,使紫外线系没那么刺眼;而且结合在形成首层之前采用电子枪对所述石英玻璃管的管壁加热,能够进一步提高热效率约3%左右,大幅提高热效率。此外,通过在镀膜中,在0.4-0.6MPa的真空环境、125-135摄氏度温度下,结合15-25电子枪的速率为25A/s,能够提高镀膜效率,镀膜整体时间在60-70min即可完成,相较于传统工艺减少了镀膜时间和镀膜温度,因而能够提高生产效率和减少能耗。The above heating tube coating method is used to coat the quartz glass tube used as the heating tube to form an oxide layer. First, the quartz glass tube is polished and cleaned to remove surface impurities and make up for some defects, such as scratches or In the case of wear and tear, the transparency and refractive index of the quartz glass tube are improved to improve thermal efficiency and make the coating layer of the film layer relatively uniform, which in turn makes the coating layer relatively uniform during molding and improves the optical performance. By using an electron gun to heat the wall of the quartz glass tube for 160 seconds to 200 seconds before coating the first layer, the adhesion of the surface of the quartz glass tube to the coating layer is improved, and the atoms separated from the heating source are better absorbed. This in turn makes the first layer of the coating layer more tightly bonded, further improving thermal efficiency. By selecting the coating materials as silicon dioxide and ferric oxide, and coating them alternately back and forth, a coating layer is formed on the surface of the quartz glass tube to shield a large amount of ultraviolet light, and convert most of the ultraviolet light into far-infrared rays, making the ultraviolet system It is not so dazzling; and combined with the use of an electron gun to heat the wall of the quartz glass tube before forming the first layer, the thermal efficiency can be further improved by about 3%, significantly improving the thermal efficiency. In addition, by combining the 15-25 electron gun with a rate of 25A/s in a vacuum environment of 0.4-0.6MPa and a temperature of 125-135 degrees Celsius during the coating, the coating efficiency can be improved, and the overall coating time can be completed in 60-70 minutes , compared with traditional processes, the coating time and coating temperature are reduced, thus improving production efficiency and reducing energy consumption.

以上所述实施例仅表达了本发明的几种实施方式,其描述较为具体和详细,但并不能因此而理解为对发明专利范围的限制。应当指出的是,对于本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。因此,本发明专利的保护范围应以所附权利要求为准。The above-mentioned embodiments only express several implementation modes of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the invention. It should be noted that, for those of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the scope of protection of the patent of the present invention should be determined by the appended claims.

Claims (5)

1.一种加热管镀膜方法,其特征在于,包括如下步骤:1. A heating tube coating method, characterized in that it includes the following steps: 提供石英玻璃管,其中所述石英玻璃管使用材质是SiO2含量为99.8%以上的透明石英玻璃管;石英玻璃管为圆管,石英玻璃管的管壁厚度为0.98mm~1.2mm,石英玻璃管的管径为Ø8~Ø12mm;A quartz glass tube is provided, wherein the material of the quartz glass tube is a transparent quartz glass tube with a SiO 2 content of more than 99.8%; the quartz glass tube is a round tube, and the wall thickness of the quartz glass tube is 0.98mm ~ 1.2mm. The quartz glass The diameter of the tube is Ø8~Ø12mm; 对所述石英玻璃管分别进行抛光及清洗处理;其中,通过利用抛光粉对石英玻璃管进行抛光处理,所述抛光粉为稀土抛光粉;采用超声清洗的方式,超声清洗时结合超声波清洗剂进行清洗;The quartz glass tube is polished and cleaned respectively; wherein, the quartz glass tube is polished by using polishing powder, and the polishing powder is rare earth polishing powder; ultrasonic cleaning is used, and ultrasonic cleaning is carried out in combination with an ultrasonic cleaning agent cleaning; 将所述石英玻璃管上料至镀膜设备的镀膜料架上;其中,所述镀膜设备为真空镀膜机;其中,将所述石英玻璃管放置镀膜料架上之后,将其装入真空镀膜机,然后开冷水机并控制气压为镀膜环境 0.4-0.6MPa,同时控制温度为125-135摄氏度;Load the quartz glass tube onto the coating material rack of the coating equipment; wherein the coating equipment is a vacuum coating machine; wherein, after the quartz glass tube is placed on the coating material rack, it is loaded into the vacuum coating machine , then turn on the chiller and control the air pressure to the coating environment of 0.4-0.6MPa, and control the temperature to 125-135 degrees Celsius; 在0.4-0.6MPa的真空环境、125-135摄氏度温度下,通入氧气和氩气,开启镀膜设备中的离子源对所述石英玻璃管表面进行轰击处理,其中,氧气的重入量为10-20cc;氩气的通入量为10-30cc;且氧气和氩气的通入量总量为20-32cc;先通入氩气再融入氧气;开启镀膜设备中的离子源对所述石英玻璃管表面进行首次轰击处理时,加热源未将材料加热,采用电子枪对所述石英玻璃管的管壁加热180秒,此过程中仅通入氩气30cc,在氩气的保护下使玻璃管先被加热;电子枪对所述石英玻璃管的管壁加热时,所述电子枪的速率为15A/s;In a vacuum environment of 0.4-0.6MPa and a temperature of 125-135 degrees Celsius, oxygen and argon are introduced, and the ion source in the coating equipment is turned on to perform bombardment treatment on the surface of the quartz glass tube. The re-introduction amount of oxygen is 10 -20cc; the input amount of argon gas is 10-30cc; and the total amount of oxygen and argon gas is 20-32cc; first introduce argon gas and then blend in oxygen; turn on the ion source in the coating equipment to treat the quartz When the surface of the glass tube was bombarded for the first time, the heating source did not heat the material. An electron gun was used to heat the wall of the quartz glass tube for 180 seconds. During this process, only 30cc of argon gas was introduced, and the glass tube was heated under the protection of argon gas. Heated first; when the electron gun heats the tube wall of the quartz glass tube, the rate of the electron gun is 15A/s; 采用镀膜设备的电子枪对镀膜材料进行蒸发镀膜,所述镀膜材料为二氧化硅和三氧化二铁,两者来回交替镀膜,在所述石英玻璃管表面形成镀膜层,其中,首层为二氧化硅镀膜层,形成所述镀膜层的各二氧化硅镀膜层时的所述电子枪的速率为25 A/s;形成所述镀膜层的各三氧化二铁膜层时的所述电子枪的速率为5 A/s,所述蒸发镀膜的整体时间在60-70min;其中,所述镀膜层的交替层数为8层-10层;The electron gun of the coating equipment is used to evaporate the coating material. The coating material is silicon dioxide and ferric oxide. The two are alternately coated back and forth to form a coating layer on the surface of the quartz glass tube. The first layer is silicon dioxide. Silicon coating layer, the speed of the electron gun when forming each silicon dioxide coating layer of the coating layer is 25 A/s; the speed of the electron gun when forming each iron oxide film layer of the coating layer is 5 A/s, the overall time of the evaporation coating is 60-70min; wherein, the number of alternating layers of the coating layer is 8-10 layers; 当述镀膜层的交替层数为10层时,镀膜层的自所述石英玻璃管的最内层开始,镀膜层的自所述石英玻璃管的最内层开始,依次为:When the number of alternating layers of the coating layer is 10, the coating layer starts from the innermost layer of the quartz glass tube, and the coating layer starts from the innermost layer of the quartz glass tube, in order: SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3;其各层厚度依次为:2280A\841A\2280A\1682A\2280A\1682A\2280A\1682A\2280A\841A;SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 ; the thickness of each layer is: 2280A\841A \2280A\1682A\2280A\1682A\2280A\1682A\2280A\841A; 当所述镀膜层的交替层数为8层时,镀膜层的自所述石英玻璃管的最内层开始,依次为:SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3\SiO2\Fe2O3,其各层厚度依次为:2337A\505A\2337A\1009A\2337A\1009A\2337A\1009A。When the number of alternating layers of the coating layer is 8, starting from the innermost layer of the quartz glass tube, the coating layers are: SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 \SiO 2 \Fe 2 O 3 , the thickness of each layer is: 2337A\505A\2337A\1009A\2337A\1009A\2337A\1009A. 2.根据权利要求1所述的加热管镀膜方法,其特征在于,在形成所述镀膜层之后,所述加热管镀膜方法还包括:2. The heating tube coating method according to claim 1, characterized in that, after forming the coating layer, the heating tube coating method further includes: 将形成所述镀膜层的所述石英玻璃管在所述镀膜设备中自放7min后,再开室门下料。After the quartz glass tube forming the coating layer is placed in the coating equipment for 7 minutes, the chamber door is opened to unload the material. 3.一种加热管,其特征在于,采用如权利要求1或2中所述的加热管镀膜方法制备得到。3. A heating tube, characterized in that it is prepared by the heating tube coating method as described in claim 1 or 2. 4.一种玫瑰金管,其特征在于,采用如权利要求1或2中所述的加热管镀膜方法制备得到,其中,所述加热管为玫瑰金管,所述镀膜层的交替层数为10层。4. A rose gold tube, characterized in that it is prepared by the heating tube coating method as described in claim 1 or 2, wherein the heating tube is a rose gold tube, and the number of alternating layers of the coating layer is 10. . 5.一种黄金管,其特征在于,采用如权利要求1或2中所述的加热管镀膜方法制备得到,其中,所述加热管为黄金管,所述镀膜层的交替层数为8层。5. A gold tube, characterized in that it is prepared by the heating tube coating method as described in claim 1 or 2, wherein the heating tube is a gold tube, and the number of alternating layers of the coating layer is 8. .
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