CN110556279A - Cathode electron gun filament device - Google Patents
Cathode electron gun filament device Download PDFInfo
- Publication number
- CN110556279A CN110556279A CN201910743352.9A CN201910743352A CN110556279A CN 110556279 A CN110556279 A CN 110556279A CN 201910743352 A CN201910743352 A CN 201910743352A CN 110556279 A CN110556279 A CN 110556279A
- Authority
- CN
- China
- Prior art keywords
- filament
- slotted
- screw
- bushing
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention relates to a filament device of a cathode electron gun of a transmission electron microscope. The cathode electron gun is suitable for a cathode electron gun electron light source in a transmission electron microscope. The invention comprises the following steps: a bushing (1) with an opening; a slotted disc (2); a contact piece (3); filament stretching columns (4); a filament (5); a binding post (6) fixed by a screw; an insulation displacement screw (7). The invention is suitable for the electron gun filament device with high stability, high brightness, adjustable position, long service life and low cost of the transmission electron microscope.
Description
Technical Field
The invention discloses a cathode electron gun filament device.
Background
Transmission Electron Microscopy (TEM) can see microscopic structures smaller than 0.2um, which are not clearly seen under an optical Microscope, and these structures are called sub-microstructures or ultra-microstructures. To see these structures, a light source with a shorter wavelength must be selected to improve the resolution of the microscope, the service life of a filament of an electron gun of the electron microscope is generally 80-200 hours, the filament is in a v-shape with poor stability and is easy to break when working, the whole filament device needs to be replaced when the filament breaks, at present, one thousand yuan of the imported filament device is expensive, the whole device is wasted when replaced, the transmission current of a contact piece is unstable, and poor focusing of electron beams is influenced, so that the resolution of an imaging system is poor. Affecting the work efficiency of the transmission electron microscope.
Disclosure of Invention
The invention provides a filament device of a cathode electron gun of a transmission electron microscope, which comprises: a bushing (1) with an opening; a slotted disc (2); a contact piece (3); filament stretching columns (4); a filament (5); a binding post (6) fixed by a screw; an insulation displacement screw (7).
The preferable bushing (1) with holes is characterized in that the bottom part is provided with holes in the longitudinal direction and the upper part in the transverse direction, and the bushing can be fixed by screws to connect the slotted circular sheet (2) and the filament stretching column (4).
The optimized slotted wafer (2) is characterized in that a groove is formed in the wafer and connected with a bushing (1) with an opening to play a role in fixing, the slotted wafer (2) is connected with a filament stretching column (4), and connection of a filament electrode can be optimized on the basis of protecting a filament binding post.
The preferred contact piece (3) is characterized by being semicircular, made of tin-phosphor bronze and used as a contactor.
The preferable filament (5) is characterized by being arc-shaped, having high stability, high brightness, adjustable position, long service life and low cost.
The invention has the beneficial effects that: the arc-shaped filament prolongs the service life of the filament, reduces the frequency of replacing the filament and protects the vacuum of the transmission electron microscope. The contact piece increases the current stability, prolongs the service time of the filament and has stable brightness.
Description of the figures, fig. 1 shows a schematic view of the electron gun structure, with a bush (1) with an opening; a slotted disc (2); a contact piece (3); filament stretching columns (4); a filament (5); a binding post (6) fixed by a screw; an insulation displacement screw (7).
In the specific implementation mode, as shown in fig. 1, a bushing (1) with holes, where a filament (5) is located, fixes a filament stretching column (4) on the bushing, and fixes the filament stretching column on a contact piece (3) through a slotted wafer (2) in a vacuum sealing mode through the wiring column with a screw fixing (6), wherein the contact piece (3) is electrically connected with an electron microscope high-voltage cable. Meanwhile, the filament stretching column (4) is an actual connection point of the filament (5), and the filament is fixed in the bushing (1) with the hole, so that the filament stretching column (4) is protected from being polluted.
When the electron gun device works, high voltage is sent into the binding post (6) with the screw fixation through the high-voltage cable and is connected with the filament stretching post (4) in the bushing (1) with the hole, and the electrode of the binding post (6) with the screw fixation and the filament stretching post (4) is insulated with the outside and is in a high vacuum environment, so that the filament can be effectively protected from being polluted and the working current stability of the filament can be protected. By means of the insulation displacement screw (7), the relative position of the filament (5) and the central hole in the emitting direction of the filament (5) can be adjusted, so that the adjustment effect on the electron beam is realized.
Claims (10)
1. A filament assembly for a cathode electron gun of a transmission electron microscope, the assembly comprising: a bushing (1) with an opening; a slotted disc (2); a contact piece (3); filament stretching columns (4); a filament (5); a binding post (6) fixed by a screw; an insulation displacement screw (7).
2. Perforated bushing (1) according to claim 1, characterized in that it is perforated both in the bottom longitudinal direction and in the upper transverse direction, and can be fixed with screws.
3. The slotted wafer and the filament stretching column are connected, and connection of the filament electrode can be optimized on the basis of protecting the filament binding post.
4. Slotted disc (2) according to claim 1, characterized in that the disc is slotted and fixed in connection with a bush (1) with an opening.
5. The slotted wafer (2) is connected with the bushing (1) with the open hole and the high-voltage electrode of the instrument electron microscope, so that the connection stability and the vacuum of the whole system are ensured.
6. Contact strip (2) according to claim 1, characterised by a semi-circular shape of tin-phosphor bronze for the contactor, which improves the stability of the current through the filament.
7. Filament strain beam (4) according to claim 1, fixed on an open-pored insulating sheet, being the actual connection point of the filament.
8. The filament (5) according to claim 1, wherein the shape is circular arc, and the semicircular filament has smaller shape loss and longer service life in use and is cheaper than the existing filament.
9. The screw-fastened terminal (6) according to claim 1, for connection to high-voltage cables and filament-stretched poles (4), protecting the entire connection state in a vacuum environment.
10. Insulation displacement screw (7) according to claim 1 for adjusting the relative position of the filaments, acting as a physical filament centering, without affecting the passing current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910743352.9A CN110556279A (en) | 2019-08-13 | 2019-08-13 | Cathode electron gun filament device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910743352.9A CN110556279A (en) | 2019-08-13 | 2019-08-13 | Cathode electron gun filament device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110556279A true CN110556279A (en) | 2019-12-10 |
Family
ID=68737256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910743352.9A Withdrawn CN110556279A (en) | 2019-08-13 | 2019-08-13 | Cathode electron gun filament device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110556279A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2506660A (en) * | 1946-04-15 | 1950-05-09 | Csf | Device for the regulation and centering under vacuum of a filament for a wehnelt cathode |
| US3857055A (en) * | 1972-05-22 | 1974-12-24 | Akashi Seisakusho Kk | Electron gun for electron irradiation equipment |
| CN103299390A (en) * | 2010-10-25 | 2013-09-11 | 弗劳恩霍弗实用研究促进协会 | Equipment for generating electron beams |
| CN103531423A (en) * | 2013-10-21 | 2014-01-22 | 严建新 | Needle-shaped charged particle beam emitter and manufacturing method thereof |
-
2019
- 2019-08-13 CN CN201910743352.9A patent/CN110556279A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2506660A (en) * | 1946-04-15 | 1950-05-09 | Csf | Device for the regulation and centering under vacuum of a filament for a wehnelt cathode |
| US3857055A (en) * | 1972-05-22 | 1974-12-24 | Akashi Seisakusho Kk | Electron gun for electron irradiation equipment |
| CN103299390A (en) * | 2010-10-25 | 2013-09-11 | 弗劳恩霍弗实用研究促进协会 | Equipment for generating electron beams |
| CN103531423A (en) * | 2013-10-21 | 2014-01-22 | 严建新 | Needle-shaped charged particle beam emitter and manufacturing method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20191210 |
|
| WW01 | Invention patent application withdrawn after publication |